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Component for transfer

Providing technology to the future of this planet

Glass floatation system


Corresponding for transfer, process and inspeciton for
glass board by precise floatation system

GFM series products


This is appropriate for
aliment process.
Alignment
floatation pad

Air consumption L/min. (abs)


Floatation volume
(at 0.1MPa)
Applications
[m]

Series variation

This is appropriate for


precise transfer, loader
and unloader
Floatation rail
(standard type)

Appropriate for
transfer process
Floatation rail
(general purpose type)

Floatation system and


glass floatation module

*1
*3

Positioning

over 10 [m]

Transfer

over 250 [m]

Loader and
unloader

over 150 [m]

Processes

30 [m]

Components
for Solar Battery
Manufacturing Process

*2

*1 This for reference flow.


*2 Number changes by positive pressure/
negative pressure flow combination.
*3 glass thickness: For 0.7mm.

Appropriate for
different processes

Precise
floatation stage

Direct drive actuator


Precise/high-function

Applications: Turntable

Absolute type high-precision DD motor which is available to


set up any indexing angle, any rotation moving and conbination

Related products
Lifter cylinder which developed
by Absodex manufacturer CKD

Lifter cylinder
LFC-KL Series
Function which is kind to environment
Available to develop environment-friendly equipment
which are energy-saving, save space, oilless and
reuse so on

Network
Corresponding for Network by serial transmission
sysytem

CKD Corporation
2009.3.DCC

CC-970A-1.indd

CC-970A

09/03/18

15:48:24

CKD product line-up for solar battery manufacturing process


Components meet each process needs
Electrode printing
and calcination

Wiring installation

Film forming
Washing ,Texure formation

(n layer and reflection prevention film)

Affixing guard glass and film


Affixing sealing and frame
Inspection

Silicon crystal type


solar battery

Body material can be selected from


Aluminum or SUS by application

Reliable for in compact


chemical liquids

Vacuum control valve


AVB/MVB Series

Fluorine resin chemical


liquid valve
AMD/MMD Series

CKD known as the pioneer,


presents high-reliability

The water-hammer which reduction


occurs depending on the valve
open and close.

Water hammerless valve


AMD L Series

Valve for process gas


AGD/MGD/OGD Series

High pressure chemical


liquid valve
AMD/MMD H Series
Fusion of Chemical valve and
General purpose valve.

Full surface suction by using porus


resin without any damage

PGM Series

Pressure constant in stroke length

Amazing magnetic spring


Magnetic spring buffer
FBU2 Series

Precise suction plate


PVP Series (white)
PVP-B Series (black)

Wide range application for from large


modular component to fine parts

Components for vacuum


Series

For high precision positioning


Firm positioning high-precision and
high-reigidity

Linear guided cylinder


LCG Series

It combine high responsibility


and reliability

Regulator for process gas


Safe by large bore size, large flow
rate and high pressure compatible.

For damage-free handling

For automatic control with flow and pressure

Suitable for downsizing of tranferring


system. Space saving mounting
style and cylinder switch is available.

Linear slide cylinder


LCM Series

Small direct mounting cylinder


MDV Series

For visual management

For pressure control as highprecision and high-responsibility,


like tension control of film
Leakage amount of a vacuum
sealing contact 1.3x10-8Pa.m3/s He
or less is achieved.

With both downsized caused by


integrated of linear guide, and
precise/high rigidity

Digital electro-pneumatic regulator


EVD Series

Flow rate is visible by number of


needle turn.

Needle valve
DVL Series

Suitable for management of energy


of equipment and factory such as
purge air and cooling water.

Flow sensor (air/water)


PFD/WFK Series

Cylinder for vacuum


Suitable for remote control of air flow to
supply non-contact transfering chuck.

Accurate and precise flow sensing is available


by comapact design and quick response.

Flow controller
FCM Series

Small size flow sensor


FSM2 Series

"Current figures" and " set-point "


monitor ring with dual digital display
at the same time

Clean cylinder valve


LAD Series

Be suitable for actuator around


chamber

Air and for clean purge N2 supply by


oil-prohibited specifications.

Many model available such


as guided and space saving
Heat resistance cylinder

Oil-prohibition regulator
RC2000 Series

Suitable for operation of acutuator


around chamber.Wide variation such as
Guide type and space-saving and so on.

Clean air compact supply purge and


air blow dry

Purge air precise filtration in compact


light in weight, large flow rate

No bronze specification make it


possible to supply cleaner air.

Solenoid valve for


pneumatic

Clean air unit


CAU30 Series

Inline clean filter


FCS Series

Speed control valve and joint


SC3P/ZSP Series

Pneumatic pressure switch


PPX Series

For creation of a clean environment

MN3E/4E Series

Thin film system


solar battery

Affixing guard glass and film


Affixing sealing and frame

Cleaning
Film forming
(electrode and p/i/n layer)

CC-970A-1.indd

Patterning

Inspection

Wiring installation

09/03/18

15:53:20

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