AE GLOBAL SERVICES

AE PRODUCT
& SERVICES
PORTFOLIO
MAXIMIZE
PRODUCTIVITY
AND ROI
THROUGHOUT
FOR THIN-FILM
THE PRODUCT
MANUFACTURING
LIFECYCLE

AE is a leader
in global hightechnology
applications.
Semiconductor

Thin-film solar

X-ray

Glass

Industrial coatings

Instrumentation

Flat panel display

Mass spectrometry

Other key markets

Page 2

Page 3

With a focus on power conversion and control that

spans more than three decades, we build industryspecific expertise into every solution and deliver
manufacturing solutions that create an advantage for
our customers.

THIN-FILM PROCESSES REQUIRE DIVERSE POWER TECHNOLOGIES

AES BROAD PRODUCT PORTFOLIO MEETS YOUR NEEDS

WE DELIVER

AE Innovation
and Technology
Solutions as dependable as
they are innovative

Page 4

Premier Solutions

Proven products that deliver

today and adapt to your
needs tomorrow

Global Coverage
Local Resources
Rapid-response service and
support, worldwide

Page 5

AE POWER DELIVERY SYSTEMS AND CONTROLS

PRODUCT

Direct Current/
Low Frequency

Mid Frequency

High Frequency

Very High Frequency

Matching Networks

Source Technology

Thermal
Instrumentation

PERFORMANCE
RANGE

POWER

APPLICATION
SPUTTERING
METAL

INSULATIVE

ETCH/CLEAN

CVD

ABATEMENT

HEATING, MELTING,
AND MOULDING

OTHER

DC Suite: Ascent, Pinnacle, and Solvix Series

3 to 480 kW

Pulsed-DC Suite: Pinnacle Plus+ and Solvix

Series

3 to 60 kW

5 to 350 kHz

Solvix Arc Series

0 to 400 A

1 to 200 Hz (optional)

Solvix Bias Series

3 to 30 kW

1 to 350 kHz (optional)

PEII Series

5 to 10 kW

40 kHz

Ascent DMS Accessory for Ascent AMS DC

30 to 180 kW

500 Hz to 50 kHz

Crystal Series

60 to 180 kW

Up to 100 kHz

Paramount MF Series

2 to 8 kW

330 to 460 kHz

5 kW

2 MHz

PDX Series

900 W to 8 kW

235 to 460 kHz

Cesar Series

300 W to 5 kW

400 kHz to 4 MHz

Paramount HF Series

1.5 to 6 kW

13 MHz

Apex Series

1.5 to 10 kW

13 MHz

Cesar Series

300 W to 5 kW

13 to 40 MHz

Paramount VHF

3 to 7 kW

27 to 60 MHz

Ovation Series

2.5 and 5 kW

60 MHz

Cesar Series

300 W to 4 kW

13 to 40 MHz

Navigator II Matching Networks

Up to 50 kW

Up to 60 MHz

Navigator Matching Networks

1 to 15 kW

2 to 60 MHz

Navio Matching Networks

1 to 5 kW

13 to 60 MHz

Litmas RPS 1501 and 3001 Remote Plasma

Sources

1.5 and 3 kW

1.7 to 3 MHz

Litmas RPS for Foreline Abatement

1.5 and 3 kW

1.7 to 3 MHz

X
X

X
X

Sekidenko MXE High-Speed Pyrometers

950 nm

Sekidenko MXE High-Speed Reflectometers

405 and 635 nm

Sekidenko OR4000T Series Multi-Channel

Pyrometers

919, 950, 1020, 1500 nm

Sekidenko OR4000E Series with Active

Emissivity Compensation

919 nm

Sekidenko OR400T Single-Channel

Pyrometers

919, 950, 1020, 1500 nm

Sekidenko OR400M Mid-IR Pyrometers

3.3, 5.2 m

Thyro-A Digital Thyristor Power Controllers

3.7 kW, 1.3 MVA

16 to 1500 A

230, 400, or 500 V

Thyristor Power
Controllers

Thyro-AX Digital Thyristor Power Controllers

with Touchscreen Display

3. 7 kW, 1. 55 MVA

Thyro-P High-Precision Digital Thyristor

Power Controllers for Industrial Applications

8.5 kW, 2.63 MVA

Thyro-S Digital Thyristor Switches

3. 7 kW, 140 kVA

16 to 1500 A

230, 400, 500, or 600 V

37 to 2900 A

400, 500, or 690 V

16 to 280 A

230, 400, or 500 V

* High voltage power supplies also are available for semiconductor implantation and inspection, X-ray, mass spectrometry, scientific, industrial, and medical applications.

Page 6

Page 7

DC MAGNETRON SPUTTERING PRODUCTS

Largest install base and broadest array of DC products to meet the most demanding applications
ASCENT DC POWER SYSTEMS

Ensures maximum field reliability

Effectively manages arcs for improved film quality, productivity,
throughput, and yield
Simplifies power supply integration in sputtering processes
Reduces arc-caused contamination and damage

NEXT-GENERATION RF POWER SOLUTIONS

Digital Architecture and Industry-Leading RF Plasma Control
PARAMOUNT RF POWER SYSTEMS

Optimizes film uniformity and throughput with unprecedented

power-delivery accuracy
Enables faster, seamless process transitions
Provides advanced pulsing and pulse synchronization
Reduces RF delivery system complexity
Reduces arc-caused contamination and damage

Solve
manufacturing
challenges, elevate
productivity, and
push the limits of
innovation.
Page 8

NAVIGATOR II DIGITAL MATCHING NETWORKS

Speeds matching response time

Tightens process control
Helps increase tool throughput and product yield
Improves reliability and cost of ownership

Page 9

Best-in-Cla
ss S
yst
em
s

nd

Ind
us
tr
y-

s
ol
o
T

ISO-certified
management
system

Expertise

Six-sigma-based
tools and
methods

Page 10

Worldwide presence; local service

24x7x365 technical support
Applications support

C u s to

m e r Fo c u s

SUPPORTING YOUR SUCCESS THROUGH THE ENTIRE PRODUCT LIFECYCLE

TOOL INSTALLATION

AE PRODUCT PURCHASE
Extended Warranty
Exchange Programs

24x7
x3
65

Applications Support
Consulting Education

SUSTAINING SUPPORT

Annual Service Agreements

Flat-Rate Repair Refurbishment
Enhancement

de Tec
hn
ldwi
r
o
ic
a
W

port
up
lS

Innovative
technologies,
premier service
solutions, and
well-established
direct support

Innovation
Premier Performance,
Productivity, and Value

SSQA-driven
continuous
improvement

ies
nolog
ech
gT
in
ad
Le

DRIVING QUALITY IN EVERY ASPECT OF OUR BUSINESS

AE PRODUCT EOL

Certified Used Equipment

Upgrade Repair Retrofit

Page 11

PROVIDING HIGHLY RESPONSIVE SALES, SERVICE, AND TECHNICAL SUPPORT

Page 12

Upta quam: nonsectem aut vella et facerovit, undipsunt pel ipsa quidenimusam labore nit quas eici conet modite quae porio
dis preritenihil et plique di aligendi omnia sunt maionse quature rumquaera aliqui odit.

Page 13

AE World Headquarters
1625 Sharp Point Drive
Fort Collins, Colorado 80525
1 800 446 9167
+1 970 221 4670
sales.support@aei.com
advanced-energy.com

ENG-TF-LNCD-200-05 8.15
Specifications are subject to change without notice. 2015 Advanced Energy Industries, Inc. All rights reserved. Advanced Energy, Apex, Ascent, Cesar, Crystal, LineUP,
Litmas, Navigator, Navio, Ovation, Paramount, PDX, Pinnacle, Solvix, Thyro-A, Thyro-AX, Thyro-P, and Thyro-S are trademarks of Advanced Energy Industries, Inc.
ISO is a trademark of International Organization for Standardization, Switzerland.