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Date

15-06-2016

Time

1530

TCM
1

Solvent Room

All CDM is in auto mode.

Statu
s
Info

2

Bulk Caustic Room

All CDM is in auto mode.

Info

3

Caustic Room

NO

System

Description

1.All CDM is in auto mode.
2. TMA248WA autotitrator
in auto mode.
3.MF26A Dilution
autotitrator in auto mode.

Info
Info

4

Acid Room

All CDM is in auto mode.

Info

5

Bulk Acid Room

All CDM is in auto mode.

Info

6

Slurry Room

All CDM is in auto mode

Info

7

ECD Room

All CDM is in auto mode.

Info

1.CMS server 1
2.CMS server 2 (backup
server)

Onlin
e
Onlin
e
Info

8
SCADA
9

PREVENTIVE
MAINTENANCE
ACTIVITY

Remarks
CPT- Recycle / HTRD2 CDM
1. Consume from CPT drum (10/06/2016)
source.
PGMEA CDM
1. Consume from PGMEA Nagase source.
ROUTINE SAMPLING SENT TO ANALAB
1. Solvent CDM
H2O2 32% CDM
1. H2O2 32% consume from Bulk Tank
source.
(10/06/2016)
MF26A CDM
1. Consume from MF dilution. (14/1/2016)
2. MF26A Dilution conductivity
compartment leaking and temporary
bypass line. Awaiting rectification works
from KINETICS PROJECT.
3. MF26A dilution mixing tank minor leak.
Already
Escalated and currently under
monitoring. Absorbent pad have been
placed for containment of leak. Awaiting
rectification works from KINETICS
PROJECT.
HF 50% CDM
1. Consume from HF 50% Nagase source
H2SO4 96% CDM
1. Consume from bulk tank source.
H2SO4 96% ISOTANKER OFFLOADING
1. Offloading 1 ISOTANKER of H2SO4 96%.
Send samples from Bulk Tank and
ISOTANKER to ANALAB.

MONTHLY CDM VISUAL INSPECTION
1. KOH 5% CDM
2. EKC 162 CDM
3. MICRO ETCH CDM
4. EVERPLATE CDM
MONTHLY SUB FAB CMB MONITORING
1. SLURRY CMB
2. NH4OH 28%
CHEMICAL FILTER REPLACEMENT ACTIVITY
FOR IPA CDM

10

FAB 2 Acid Room

11

FAB 2 Solvent Room

Info

All CDM in auto mode

Info
Info

12 FAB 2 Caustic Room 13 Others All CDM in auto mode 1. FAB 2 Highlights CMS client have been move to FMCS Control Room Info Info .