ELECTRON BEAM MACHINING (EBM)

Electron beam machining is a thermal nontraditional process, uses electrical energy to generate thermal
energy for removing material. A pulsating stream of high-speed electrons produced by a generator is focused
by electrostatic and electromagnetic fields to concentrate energy on a very small area of work. High-power
beams are used with electron velocities exceeding half the speed of light. As the electrons impinge on the
work, their kinetic energy is transformed into thermal energy and melts or evaporates the material locally.
Electron beams are concentrated on spots as small as 0.05 mm in diameter. The process is usually
performed in a vacuum, as shown schematically in Fig. 1. A vacuum is used both to prevent collisions of
electrons with gas molecules, which would scatter or diffuse the beam, and to protect the workpiece from
oxidation and other atmospheric contamination. Lead shielding is required to protect the operator from X-ray
radiation produced by the electron beam.
Beam generation: a triode-style electron gun forms the electron beam. That is consisting of 1) a cathode
- a heated emitter of electrons which is maintained at a filament emitting high negative potential; 2) a grid
cup - an electrode negatively biased with respect to the filament; and 3) an anode - a ground potential
electrode through which the accelerated electrons pass.
Electrons are randomly emitted from the surface of the hot cathode and are accelerated toward the anode
by the high accelerating potential applied between the anode and cathode. Because of the shape of the
electrostatic field formed by the anode grid cup configuration employed, the emitted electrons are
electrostatically shaped into a slightly diverging beam that passes through a hole in the center of the
anode. As soon as the electrons have passed through the anode, they attain the maximum velocity
available from the applied accelerating voltage and maintain this velocity, when the process takes place in
vacuum environment, until they collide with the workpiece.
Beam control: The electron beam column assembly has a built-in optical system which enables the
operator to accurately position the beam impact point and observes the drilling, cutting, or milling
operation taking place. Through the use of visual optics, the operator can simultaneously view the workpiece
and impingement spot at up to 40 times magnification on some equipment.
After the electrons pass through the anode, but before they collide with the workpiece, a variable-strength
electromagnetic lens is used to refocus the beam to any desired diameter at a precise location on the
workpiece. Thus the beam attains an extremely high power density (see Fig. 1). An electron beam having a
cross- sectional diameter of 0.013-0.03 mm results in power density of 1.55x10 9 W/cm2. This extremely
high power density immediately vaporizes any material on which the beam impinges.
An electromagnetic deflection coil, mounted below the focusing lens, is additionally employed to bend the
beam, allowing the beam spot to be directed in the fashion desired over the surface of the workpiece. This
deflection system permits programming of the beam in any specific geometrical pattern, by adjusting the coilcurrent input in the proper manner. At the point of beam impingement, the kinetic energy of the beam
electrons is converted to thermal energy in the workpiece.
Principles of Operation
When electrons impinge upon a solid material at a certain speed, their kinetic energy is immediately
translated into thermal energy.
In removing material by electron beam machining, one of two different mechanisms is employed: The
material is either totally evaporated, or it is simply melted. Then the liquid phase is taken away by additional
forces such as centrifugal forces. In general, a combination of melting and evaporating is used in such a way
that generated vapor pressure acts as additional force that assists in ejecting the liquid material.
The pulse interval, and thus the time of impact of the beam on the workpiece is between 10 s and 10 ms.
The main task of process control is to choose suitable beam parameters which allows the shape of the
molten volume to be controlled, as well as the position of maximum temperature (the vapor source), so that
the liquid material is ejected completely and rapidly.

To obtain the machined shape required, sequences of hundreds to thousands of pulses are necessary.
Reproducibility of the machining operations is normally ensured by suitable computer control.
Applications
Any known material, metal or nonmetal, which will exist in high vacuum can be cut, although experience has
shown that diamonds do not cut well. Holes with depth- to-diameter ratios up to 100:1 can be cut. Limitations
include high equipment costs and the need for a vacuum, which usually necessitates batch processing and
restricts workpiece size. The process is generally economical only for small cuts in thin parts.
Drilling: In drilling holes, the electron beam focuses on one spot and evaporates material until it
has completely penetrated the workpiece or is switched of after a specified hole depth has been
reached. Hole diameter depends on beam diameter and energy density. If holes larger than the
beam diameter are required, the electron beam is deflected electromagnetically in a circular path
of required diameter. Varying the amplitude of the voltage generator connected to the
electromagnetic deflection system can change the diameter of the circular beam path. If extremely
large holes are required, the workpiece can be moved off center and rotated.
In general, holes less than 0.13 mm in diameter can be drilled almost instantaneously in thickness
up to 1.25 mm in any material. Hole diameters larger than 0.13 mm can be drilled by deflecting or
rotating the electron beam.
Circular holes are producable with electron beam drilling techniques. Hole diameters are usually
between 0.03 mm and 1.02 mm. Noncircular holes can also be drilled using EBM. A multipulse
technique is employed. Modern EB machines feature computer control of beam deflection coupled
with CNC of workpiece motion. To machine noncircular holes, the control systems are used to
move the workpiece and deflect the beam analog a predetermined hole contour.
Perforation: Electron beam machining is used widely to perforate many materials including heatresistant superalloys, plastics, and textiles.
An important advantage of EB perforation is processs ability to drill relatively small holes in thick
materials. The process is normally employed to produce holes with depth-to-diameter ratios of
about 10:1. This capability is employed effectively in the drilling of small holes on the trailing edges of
turbine blades, for example.
Inclined holes are another advantage of EB perforation. The angle at which an electron beam can
be directed at the workpiece is usually between 20- 90. This capability allows the application of
EB perforation to turbine blades, combustion chamber rings, mixer plates, and other gas turbine
parts.
Milling: Applications in which EBM is employed to mill small profile-shaped holes of less than 160
mm2. The workpiece is held stationary while the electron beam is programmed to cut the pattern.
Operating Parameters
Power: EBM operations are performed at voltage ranging from 50-150 kV. The beam current is
usually between 0.1-1.0 mA. Power requirements are on the order of 0.5-60 kW. Beam intensity
ranges between 1.55x105 to 1.55x109 W/cm 2. Electron bean equipment is employed in a wide variety
of production applications. By varying the power density, many different jobs can be performed
using EB techniques.
Cut characteristics: The narrowest cut attainable with EBM operations is on the order of 0.03
mm when cutting material of 0.03 mm thickness. The maximum depth of cut is usually about 6
mm.
Material removal: Material removal rates are a function of the power applied and workpiece
material. Generally, penetration rates up to 0.25 mm/s have been achieved.

 Tolerances: Elecbeam machining is capable of holding tolerances on hole size to about 0.03
mm, although in special cases, tolerances of 0.005 mm can be held.
Surface characteristics: The heat-affected zone developed by EBM is generally less than 0.25
mm deep. The heat-affected zone consists of a thin layer of recast material, which may diminish
the structural integrity of workpieces, which are highly stressed. Surface roughness is usually about
1.02 m Ra, although surface roughness as low as 0.13 m Ra has been achieved.