You are on page 1of 24

AFM SOP

SemiContact (tapping)
1.
1 ( B )

2. (- 1m(B )
100m(C ))
(1) 2
(3 )


3. (
)
4. ()
(()()
)
5. OM
()

6. (NovaSpectraFotocomTV)
(1) :5303
(2)
(3) NoFast(Full )startNext
v(v
())
7. ( Aiming )
Focus()cantilever XY

8.
(1) Laser ( cantilever XY )
Laser
(2) LFDFL 0()
LFDFL 0
Laser 20 20 cantilever XY
LFDFL 0
9. Sample( 2mm)

LFDFL
10.
(1) SemiContact

(2) Resonance

run
Mag Set point (Set point
10 Mag 200.1 Mag 20
Setpoint )
Mag ( 1V*1
Run Mag
10 run )
0.1110
run

11.
Approach

1. Mag Setpoint
2. FB gain

3. scar ()

Mag 1 Aiming Laser

DFLLF 0 2 Mag 3 Mag

Setpoint Approach
12.
Landing

Approach Done scar


( Set Point 10.00
Mag 10)

FB (scar )(1) FB (2)


( Fast ) (3) Aiming (4)( sample)
FB Gain, 1 , Mag
,0

13. ()
(1) FB save

(2) Focus
(3) FB off(
)
(4) DFLLF(FBOFF)
14. Scan(FBFrequencySet point)
:scanscarMag
(FB)Mag

(1) FB()
(2) ModeSemicontact Topography

(3) Frequency
(Set point
)
(4) Scan Size
(5) ()
(6) (
scar)6m

(7) setting
ADC#1 :SensheighV(Sensheigh:
FB GainClosed-loopXYZ100m
1mHeigh)
(8) RUN()match

setting
Graph

None(
)

1~4

15. ()
(1) Data()
(2)
16.
(1) Data3D

(2) Statistics()Roughness(2
)

(3)
17.
(1) :

(2) : Graphic
ok
XY

3D
Ctrl+
18.
(1) Approach
(2) FB Gain

(3)
(4) Aimingsample
(5) sample
(6) ()(power)
Contact
1.
1 ( B )

2. (- 1m(B )
100m(C ))
(1) 2
(3 )


3. (
)

4. ()
(()()
)
5. OM
()

6. (NovaSpectraFotocomTV)
(1) :5303
(2)
(3) NoFast(Full )startNext
v(v
)
7. ( Aiming )
Focus()cantilever XY

8.
(1) Laser ( cantilever XY )
Laser
(2) LFDFL 0()
LFDFL 0
Laser 20 20 cantilever XY
LFDFL 0
9. Sample( 2mm)

LFDFL
10. Contact

11.
Approach

:
1.
2. FB gain

3. scar ()
12.
Landing

Approach Done scar


( Set Point 2.001
DFL 2.001)

FB (scar )(1) FB (2)


( Fast ) (3) Aiming (4)( sample)

FB Gain, 1 , Mag
,0
13. ()
(1) FB save

(2) Focus
(3) FB off(
)
(4) DFLLF(FBOFF)

14. Scan(FBFrequencySet point)

(1) FB()
(2) Mode Contact Topography
(3) Frequency
(Set point
)
(4) Scan Size
(5) ()

(6) (
scar)6m

(7) setting
ADC#1 :SensheighV(Sensheigh:
FB GainClosed-loopXYZ100m
1mHeigh)

(8) RUN()
setting
Graph

None(
)

1~4
15. ()
(1) Data()
(2)
16.
(1) Data3D

(2) Statistics()Roughness(2
)

17.
(1) :

(2) : Graphic
ok
XY

3D
Ctrl+

18.
(1) Approach
(2) FB Gain

(3)
(4) Aimingsample
(5) sample
(6) ()(power)