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Technology Changes Lives –

Engineering Tomorrow’s
Engineers

Dr. Cynthia Furse


University of Utah
Dept. of Electrical and Computer
Engineering
Salt Lake City, UtahElectrical and Computer Engineering
Let Me Introduce Myself…
• Professor
• Teacher
• Inventor
• Business
Executive
• Mom
• First girl in
Logan to
take Shop

Electrical and Computer Engineering


Technology Teachers DO
Make a Difference

Mr. Gray Mr. Bradford


Shop Teacher Physics Teacher
Logan Junior High Logan High School
“It will be hard, but “Have you thought
you can do it.” about Engineering?”

Electrical and Computer Engineering


Technology Changes Lives –
Engineering Tomorrow’s
Engineers
• Why we want more Engineering students
in Utah.
• Teaching Methods that make a Difference.
• The Future Today -- NanoTechnology

Electrical and Computer Engineering


Product: Engineer
• Intelligent
• Creative
• Educated

Electrical and Computer Engineering


Engineering
• Engineering is the science and
art of applying scientific and
mathematical principles,
experience, judgment, and
common sense to design things
that benefit society.
• If people have built it, grown it,
moved it, or launched it into
space, you can be sure that
engineering had something to
do with it.

Electrical and Computer Engineering


Engineers and Scientists
• “The scientist explores what
is. The engineer creates
what has not been.”
-- Theadore Von Karmen

Engineers
SOLVE PROBLEMS
INVENT
ENSURE OUR SAFETY

Electrical and Computer Engineering


Technology Changes Lives

BSEE $45-65k / yr
($22-32 / hr)
MSEE $55-80k / yr
($27-40 / hr)
PhDEE$75 – 125k / yr
($37 – 62 / hr)
Consulting $100-250 /hr

“Have you thought about Engineering?”

Electrical and Computer Engineering


Technology Changes Utah
Utah’s Kids Stay in Utah

• UU College of
Engineering Graduates
600+ students each year
• Over 70% stay in Utah

Dr. Jeff Ward


Assistant Professor
Weber State University
Electrical and Computer Engineering
A FEW of Utah’s
Engineering Firms

Electrical and Computer Engineering


Utah’s Engineers Start
Companies

Utah Innovation Awards – Best of Show 2002


Electrical and Computer Engineering
Engineering
= Economic Engine

• Utah’s Engineering-
Generated Economy
has grown $189M
over the past 5 years

Electrical and Computer Engineering


Utah’s Product Goal -- 2000
• Double Engineers/High Tech by 2005
• Triple by 2008!

Electrical and Computer Engineering


22% More $
46% More Engineers
900
800
Eng/CS Undegraduates

700
600
500 Growth to Triple
400 Growth to Double
300 Projected Growth
200
100
Need 180 MORE
0
2000 2002 2004 2006 2008 2010 Graduates/ year

Electrical and Computer Engineering


What Can YOU do to Help?

Send us MORE Smart, Motivated Kids


“Have you thought about Engineering?”
Electrical and Computer Engineering
The Numbers Game:
A Typical Engineering Picture

Furse Research Group 2002


Electrical and Computer Engineering
UofU Engineers
American Indian Hispanic
Black
Women
1
2
White or Asian Men 3
4
5

Electrical and Computer Engineering


Does It Matter? Yes!

Ford Moms
Electrical and Computer Engineering
Beating the Numbers Game

“I can’t do it” Mentors MATTER -- YOU are a Mentor


Teach Students Creative Failure
Do team projects, pair the girls.
Just say, “I KNOW you can do it.”
“I want to change the world” Teach the BIG PICTURE and Societal Impact
“Have you thought about Engineering?”

Electrical and Computer Engineering


Engineering Tomorrow’s
Engineers
• K-6
– Curiosity
– Interest
– Confidence
– Basic Skills

Electrical and Computer Engineering


Engineering Tomorrow’s
Engineers
• 7-8
– Critical Thinking
– Career Options
– Experience
Technology
– Confidence

Electrical and Computer Engineering


Engineering Tomorrow’s
Engineers
• 9-12
– Think and Design
– Career Choice /
Direction
– Experience!

Electrical and Computer Engineering


Technology Changes Lives –
Engineering Tomorrow’s
Engineers
• Why we want more Engineering students
in Utah.
• Teaching Methods that make a Difference.
• The Future Today -- NanoTechnology

Electrical and Computer Engineering


Teaching Methods that Make
a Difference
• Teach the BIG
PICTURE
• Work in Teams
• Communication
(written/oral) Matters
• Creativity is King

Have you thought about Engineering?

Electrical and Computer Engineering


Technology IS Real Life
Experiential Learning is Great …

Electrical and Computer Engineering


Technology IS Real Life

Especially when you


link it to something
Real and Familiar….

Electrical and Computer Engineering


Technology IS Real Life

Change the Context, and


Invite Creative Thought

Electrical and Computer Engineering


Inviting Creativity
• Write a Patent
• Invent Something
• Keep an Invention
Journal
• Brainstorm – Dream
Big!
• Talk about Famous
Inventors
Invention Convention 1999
• Point out problems
that need to be solved

Electrical and Computer Engineering


Celebrate Creative Failure

Tacoma Narrows Bridge Collapse 1940


Something that is really creative doesn’t just fizzle and die,
It really BLOWS UP!
Electrical and Computer Engineering
Teaching Methods that Make
a Difference
• Teach the BIG
PICTURE
• Work in Teams
• Communication
(written/oral) Matters
• Creativity is King

Have you thought about Engineering?

Electrical and Computer Engineering


Technology Changes Lives –
Engineering Tomorrow’s
Engineers
• Why we want more Engineering students
in Utah.
• Teaching Methods that make a Difference.
• The Future Today –
– Micro / NanoTechnology

Electrical and Computer Engineering


The Future Today –
Micro and NanoTechnology

100-electrode array developed at the


University of Utah Center for Neural
Interfaces and commercialized through
Bionic Technologies, LLC
Micro – micrometer (µm = 10-6 m)
Nano -- nanometer (nm = 10-9 m)
UW-Madison UW-Madison
Electrical and Computer Engineering
Micro and NanoTechnology
• How do you Build a Microdevice?
• Applications
– Nerve / Muscle Stimulation
– Drug Delivery
– Robotics
– Sensing
– Imaging / Optical Devices

Electrical and Computer Engineering


How do you Build a
Microdevice?
MEMS - evolved from the Microelectronics
Revolution
IC Industry Timeline
1947 1958 1999

single transistor first IC 10 million transistors

Bruce Gale, UU BioEng Electrical and Computer Engineering


What is MEMS?
Micro-Electro-Mechanical Systems (MEMS) is the
integration of mechanical elements, sensors, actuators, and
electronics on a common substrate through the utilization of
microfabrication technology or “microtechnology”.

Bruce Gale, UU BioEng Electrical and Computer Engineering


What is BioMEMS?
• BioMEMS is a subset of MEMS technologies
– Many MEMS technologies can be used for BioMEMS
• Bio includes:
– Cells
• Animal, bacteria, plant, fungi
– Viruses
– Biological tissues
– Proteins and antibodies
– DNA and RNA
– Biochemicals (glucose, etc)
– Whole organisms
Electrical and Computer Engineering
MEMS Examples

pressure sensors
accelerometers
flow sensors
inkjet printers
deformable mirror devices
gas sensors
micromotors
microgears
lab-on-a-chip systems

Bruce Gale, UU BioEng Electrical and Computer Engineering


How to Build a MEMS Device

From: Reid Harrison, UofU


Electrical and Computer Engineering
Photolithography

• Step 2: Grow a silicon


crystal and cut it into
wafers

Nobelprize.org Electrical and Computer Engineering


Photolithography
Coat the Wafer with silicon oxide
and then with
UV sensitive film

Nobelprize.org Electrical and Computer Engineering


Photolithography
• Develop the wafer to
remove the film.
• Etch the silicon oxide
underneath.
• Remove the remaining film.

Nobelprize.org Electrical and Computer Engineering


Photolithography
• “Dope” the silicon with
positive or negative ions
• “Grow” more silicon or
deposit metal.
• Repeat process to build up IC

Nobelprize.org Electrical and Computer Engineering


From: Reid Harrison, UofU
Electrical and Computer Engineering
Electrical and Computer Engineering
Micromachining Processes

Deep Reactive Ion Etching (DRIE)

• high density ICP plasma


• high aspect ratio Si structures
• cost: $500K
Source: LucasNova

Source: STS Source: STS Source: AMMI


Electrical and Computer Engineering
MicroDevices for Medicine:
Opportunities
• Nerve / Muscle Stimulation
• Drug Delivery
• Robotics
• Sensing
• Imaging / Optical Devices

Electrical and Computer Engineering


Nerve Recording and Stimulation…Changing
Research Directions in Neuroscience

January 2003
July 2000

Center for Wireless Integrated MicroSystems, Univ. Electrical


Michigan, K.Engineering
and Computer Wise et al.
GOAL: A Button-Size Wireless Implant forming a
High-Density NeuroElectronic Interface
• Required:
Hermetic Cap * A High-Yield Probe Technology
* Practical 3D Technology
* Integrated Circuits allowing
Access to many Sites
Signal
Processing
Wireless
Interface

3D
Probe
Array

• Platform Electronics
• Wireless Interface
• Hermetic Packaging
• Biocompatible Coatings
Center for Wireless Integrated MicroSystems, Univ. Electrical
Michigan, K.Engineering
and Computer Wise et al.
TOWARDS AN ADVANCED
COCHLEAR MICROSYSTEM

A Fifteen-Site Passive Cochlear Probe


with High-Density Sites (Second-Year)

Center for Wireless Integrated MicroSystems, Univ. Electrical


Michigan, K.Engineering
and Computer Wise et al.
A 32-SITE 4-CHANNEL PASSIVE ELECTRODE
ARRAY FOR A COCHLEAR PROSTHESIS
Passive version of the active 32-site probe (optimized for guinea pig)
– In-vivo testing confirms earlier auditory thresholds of 20-50µA and
150-300µA for monopolar and bipolar stimulation, respectively.
– Neural response data indicates a strong dependence on
perimodiolar placement of the array.
– Back voltages are consistent with operation from ±3V supplies
delivering 1mA and 40nC.

Center for Wireless Integrated MicroSystems, Univ. Electrical


Michigan, K.Engineering
and Computer Wise et al.
Opportunity: Microfluidics for
INTEGRATED DRUG-DELIVERY PROBES
Moving toward probes having full duality of function between
electrical and chemical modes.
Inlet Fluidic
Microcable

Flowmeters

Recording/
Pumps Stimulating
Electrodes
Valves
Circuitry

Shutters Realized with


only two
additional masks

Center for Wireless Integrated MicroSystems, Univ. Electrical


Michigan, K.Engineering
and Computer Wise et al.
Spider Mite on Gear Assembly

http://mems.sandia.gov/scripts/index.asp Electrical and Computer Engineering


Gears and Gear Train

http://mems.sandia.gov/scripts/index.asp
Electrical and Computer Engineering
Microscale Robot

Electrical and Computer Engineering


MicroBot

Richard Yeh
(Professor Kristofer S. J. Pister)
(NSF) IRI-93-21718 Electrical and Computer Engineering
Nano-Robots

Jean-Pierre MERLET
Electrical and Computer Engineering
Nano-Robots

Jean-Pierre MERLET
Electrical and Computer Engineering
MicroTweezers

http://www.memspi.com/

Peg in Hole!
Electrical and Computer Engineering
MicroTweezers

http://www.memspi.com/ Electrical and Computer Engineering


MicroTweezers

http://www.memspi.com/
Electrical and Computer Engineering
Microsurgical Tools

• Focused Ion
Beam
Machining

Electrical and Computer Engineering


Lab-on-a-Chip
Fluid
(Body Fluid In; Answer Out)
Handling,
Amplification,
Derivatization, Fluorescence,
Lysis of cells, UV/vis Absorption,
Concentration, Amperometric,
Extraction, Conductivity,
Centrifugation Raman

Sample Prep Sample Detection

Sample Separation

Electrophoresis, liquid chromatography


Molecular exclusion, Field flow
fractionation Electrical and Computer Engineering
Microscale Nuclear Magnetic
Resonance (NMR) Unit

jstephen@eng.utah.edu
Electrical and Computer Engineering
NMR Permanent Magnet
Assembly
• It is possible to generate relatively large fields
with permanent magnets (~2.35 Tesla).

Electrical and Computer Engineering


Neural Cell
Measurement
• Neuron acts as gate on FET
• Cell must migrate to sensor

Electrical and Computer Engineering


Tissue Scaffolds
• Tissue Engineering Lattices with integral microfluidic
channels

Electrical and Computer Engineering


Electrical and Computer Engineering
Local flexibility and
general rigidity are the
primary advantages

Uniform seeding also


possible
Electrical and Computer Engineering
MicroDevices for Medicine

Center for Wireless Integrated MicroSystems, Univ. Electrical


Michigan, K.Engineering
and Computer Wise et al.
Powerful Engineering
Massive Potential
Creative Solutions

http://mems.sandia.gov/scripts/index.asp
Electrical and Computer Engineering
THANK YOU!

Mr. Gray Mr. Bradford


Shop Teacher Physics Teacher
Logan Junior High Logan High School
“It will be hard, but “Have you thought
you can do it.” about Engineering?”

Electrical and Computer Engineering


Engineering Tomorrow’s
Engineers Today

www.ece.utah.edu/~cfurse
Have you thought about Engineering?
Electrical and Computer Engineering
MEMS References
Fundamentals of Microfabrication; Marc J. Madou

Micromachined Transducers Sourcebook; G. Kovacs

An Introduction to MEMS Engineering; by Nadim Maluf

Silicon Micromachining; by Elwenspoek and Jansen

Microsensors; by Richard S. Muller, Roger T. Howe, Stephen


D. Senturia, R. Smith (Editors)

Micromechanics and Mems : Classic and Seminal Papers to


1990; by W. Trimmer (Editor)

MEMS WWW Bookstore: http://mems.isi.edu/bookstore/


Electrical and Computer Engineering
BioMEMS References

Micro Total Analysis Systems 2000; A. van den Berg


and P. Bergveld (editors)

Microsystem Technology in Chemistry and Life Sciences;


A. Manz and H. Becker (editors)

Biomedical Microdevices (Journal); Mauro Ferrari (editor)

Microsystem Technology : A Powerful Tool for Biomolecular


Studies (Biomethods); by J. M. Kohler

Electrical and Computer Engineering