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Experiment: Sheet Resistance and the Calculation of Resistivity () or Thickness

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(a) Measurement of film thickness of material resistivity= 2.44 x 10-8Ω/m

1. Experimentaltable:

probes) probes)
1 0.4

2 0.9

3 1.4

4 1.9

5 2.4

6 2.8

7 3.4

8 3.8

9.01 4.3

10.43 5

11.16 5.4

12.44 6

13.55 6.6

14.93 7.2

16.81 8.2

18.07 8.8

19.7 9.6
2. Calculation:

3.

Slope from plot = (19.7 – 9.01) / (9.6 – 4.3) = 2.02

Thickness t = ln(2) x (I/V) x  / Π
= 10.876 nm.

From Resistance vs Temperature plot (R-T)

1. Experimental Table
α
02 =Slope
Resistance Temp in celsius (R/T)
Ω oC Ω/ oC
0.060192 35.3 0.001705
0.060243 35.47 0.001698
0.060273 35.57 0.001694
0.06026 35.76 0.001685
0.060267 35.88 0.00168
0.060329 36.01 0.001675
0.060296 36.23 0.001664
0.060302 36.37 0.001658
0.060348 36.6 0.001649
0.060375 36.75 0.001643
0.060451 36.95 0.001636
0.060447 37.14 0.001628
0.06046 37.28 0.001622
0.060439 37.47 0.001613
0.060439 37.63 0.001606
0.060508 37.82 0.0016
0.06042 37.96 0.001592
0.060444 38.15 0.001584
0.060498 38.29 0.00158
0.060561 38.41 0.001577

Percentage change in resistance per degree Celsius

Experimental Table
delta R delta T alpha = dr/dt alpha(*100%) abs of alpha

-0.0000261804599 0.04 -0.0006545114975 -0.06545114975 0.06545114975

-0.0000561998305 0.08 -0.0007024978812 -0.07024978812 0.07024978812
0.0000378263363 0.03 0.001260877877 0.1260877877 0.1260877877
0.0000391096597 0.04 0.0009777414925 0.09777414925 0.09777414925
0.0000007162995 0.1 0.000007162995 0.0007162995 0.0007162995
-0.0000140070016 0.08 -0.00017508752 -0.017508752 0.017508752
0.0000348645324 0.11 0.0003169502945 0.03169502945 0.03169502945
0.0000112872762 0.08 0.0001410909525 0.01410909525 0.01410909525
-0.0000176108654 0.14 -0.0001257918957 -0.01257918957 0.01257918957
0.0000497532094 0.1 0.000497532094 0.0497532094 0.0497532094
-0.0000408264182 0.17 -0.0002401554012 -0.02401554012 0.02401554012
0.0000509920072 0.1 0.000509920072 0.0509920072 0.0509920072
0.0000296651648 0.19 0.0001561324463 0.01561324463 0.01561324463
-0.0000125306683 0.12 -0.0001044222358 -0.01044222358 0.01044222358
0.000007447815 0.13 0.00005729088462 0.005729088462 0.005729088462
0.0000618070245 0.22 0.0002809410205 0.02809410205 0.02809410205
-0.0000336261038 0.14 -0.0002401864557 -0.02401864557 0.02401864557
0.0000063237868 0.23 0.00002749472522 0.002749472522 0.002749472522
0.0000459135985 0.15 0.0003060906567 0.03060906567 0.03060906567
0.0000274217228 0.2 0.000137108614 0.0137108614 0.0137108614
0.0000755736471 0.19 0.0003977560374 0.03977560374 0.03977560374
-0.0000036031779 0.14 -0.000025736985 -0.0025736985 0.0025736985
0.0000125310211 0.19 0.00006595274263 0.006595274263 0.006595274263
-0.0000210931777 0.16 -0.0001318323606 -0.01318323606 0.01318323606
0.0000001171864 0.19 0.0000006167705263 0.00006167705263 0.00006167705263
0.0000691322657 0.14 0.0004938018979 0.04938018979 0.04938018979
-0.0000879849841 0.19 -0.0004630788637 -0.04630788637 0.04630788637
0.0000235773009 0.14 0.0001684092921 0.01684092921 0.01684092921
0.0000546000652 0.12 0.0004550005433 0.04550005433 0.04550005433
0.0000624048405 0.19 0.0003284465289 0.03284465289 0.03284465289
-0.0000620482428 0.12 -0.00051706869 -0.051706869 0.051706869
0.0000259395757 0.17 0.0001525857394 0.01525857394 0.01525857394
0.0000580857455 0.12 0.0004840478792 0.04840478792 0.04840478792
AVERAGE --------> 0.0321312768

= 0.0321312768 %