Process Control Plan

Operation Module Etch Number Operation Name Responsible Engineer Reference Document

Product: Factory Location:
Parameter Name Meas. Units

© TLC, 2003

Name of the operation process step or machine Reference document where process controls Primary Engineer are defined responsible for design and deployment of process controls for that operation Units of the parameter Name of the parameter(s) being controlled Temp, time, width, etc.

Operation number or step

© TLC, 2003

(X/Y) Functional CTQ* Type of Indicator

Clear Specification Limits?

Requires Eng. support for for moves?

Lines of Defense (types of control)

Machine Alarm Limits (X Only)

Machine alarms Machine controls, all products Recipe/machine control Technology control Machine controls, all products Recipe/machine control Technology control Machine alarms Machine controls, all products Recipe/machine control Technology control Machine controls Recipe/machine control Technology control

Engineering Type of indicator, product (Y) or process (X) *Critical to Quality. Link parameter to product performance. Answer "why are we controlling this parameter?" Specifications are clearly communicated to the floor for disposition of product (Y/N) support is not required to disposition or move lots (Y/N)

Upper or Lower alarm limits

Machine Alarms: operational limits within the machine can run Machine controls/all products: allows the floor to monitor and control performance across all units produced on each machine Recipe/Machine control: allows the floor to monitor recipes per machine to determine if additional adjustments are required for each recipe Technology control: allows the Engineer to monitor performance across all machines by technology or recipe

Control Chart Type*

Active Control Control Limits Rules* (1-5) OCAP Sample Frequency (n) Sample Size Process Sigma Cpk Measurement Variation 1 SME

Upper or lower control limits Type X-bar R X-bar s Individuals Delta to target z UWMA

OCAP is defined and approved (Y/N) Active Rules 1. One point beyond limits 2. 6 increasing or decreasing 3. 8 in a row above or below CL 4. 2 out of 3 beyond zone A 5. 4 out of 5 beyond zone B Specify if using only one sided criteria Frequency of data collection.

How many samples are taken per subgroup? What is the baseline process standard deviation a typical high volume product.

Current Cpk Use a high volume product with the tightest spec.

One standard deviation of measurement error from a gage study

Measurement Reference Standard Control & OCAP Database (Y/N) Status Date


Reference standard available (Y/N) Measurement control is used to monitor and control gage bias and repeatability

Data stored in database (Y/N) 10/14/2008 10/14/2008 Completed Date to start activity Activity Started, Date to complete activity

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