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INDUSTRIAL TRAINING

[AT401] Session of December 2011
Present by Chong Wei Ting (18DTK10F1036) SPANSION (Penang) Sdn. Bhd.

Phase II Free Industrial Zone, 11900, Bayan Lepas, Penang.
Course :Diploma in Electronic Engineering(Computer)

Profile Of Company
a) Company’s name Spansion Sdn Bhd (Penang)
b) Products Flash Memory, Semiconductor Chip

c) Founded 1993
d) Headquarter Sunnyvale, California, US

e) Manufacturers Austin(US), Bangkok and Penang
f) Global Employees  <3400 (around 300 for

Penang branch)

Snapshot Of My Team Organization
FMO Engineering Department Wafer Sort & Operation QE Department

Process engineering develop

IQC/
calibration lab

Teoh LB
Senior manager

Thiyagarajan Senior manager

Tan Gin Ghee Member of technical staff

Namas Karupanan Quality engineer

Chong Wei Ting Industrial Trainee

My Training Activities
1. Main project: TSV Benchmarking Study Project.

• • • • • • • • •

Follow up Mr. Tan Gin Ghee
Reformatting subcon control plan Follow up Mr. Tan Gin Ghee (FMO process develop) Assembly process flow study Clean room particle count control Equipment calibration. ESD monitoring Follow up Mr. Namas (IQC & Preventative Maintenances calibration lab) Machine buy-off Dimensional check Measurement system analysis study

2. Extra Training:

THROUGH SILICON VIA BENCHMARKING STUDY
Done by Chong Wei Ting that assigned by Mr. Tan Gin Ghee

What is TSV?
 Through-Silicon Via:  A via that goes through the silicon substrate by
vertical connection.
Via

Silicon wafer

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Evolutions Of Interconnection Technologies
1st generation 2nd generation 3rd generation

NEW Wire bonding Flip chip TSV

Confidential

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Why We Need TSV Package????

Connections is shorter.

High speed signal propagation & processing.

Lower power consumption.

Reduce noises

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THREE Typical TSV Process Technologies
Via first

Via middle

Via last

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Typical TSV Processes Scheme : Via First
Via
Via Forming

Wafer

CMOS
FEOL

Wiring Layer
BEOL

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Typical TSV Processes Scheme: Via Middle
CMOS
FEOL

Wafer Via

Via Forming

Wiring layer
BEOL

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Typical TSV Processes Scheme: Via Last
CMOS
FEOL

Wafer

Wiring layer
BEOL

Via
Via Forming

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BOSCH Process

(Patented process developed in 1994)

1. Use alternating steps between etching and passivation processes.

Source: Oxford instruments

Confidential

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BOSCH Process Flow (Etching Step)
1. Etch the silicon wafer in one direction.
SF₆
Mask Mask

Typical ~0.1µm

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BOSCH Process Flow (Passivation Step)
2. Deposit the polymer in the surface of silicon and side wall of the Via.
C₄F₈

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BOSCH Process Flow (Alternative Step)
3. Etch the polymer and silicon wafer in one direction.

Mask

SF₆

Mask

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Conclusion, Suggestions & Comments
Conclusion
• Can help trainee sense real working world. • Improved the interchange of employees. • Produced trainee have selfconfidence. • Time management capability. • Gain experience and seeking valuable knowledge. • Technical work handling.

Suggestion & Comments
• Provides EHS training. • Fixes some critical courses for trainee. • Fixes some line tour for trainee. • Allowing trainee to request for accommodation

Selamat Berpuasa