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Unit for Nano

Fabrication
Clean Room Principles
July 2008

Safety - General

It is FORBIDDEN to enter the clean room without


signing in with the personal ID card
Guests will receive VISITOR card
The ID card is for the personal use ONLY
Never work in the Clean Room alone
Regular working hours: from 8AM to 5PM; work out of
working hours needs authorization
All the chemicals going into the clean room must be
approved and cataloged by Noa Mazorsky

Safety Alarms

Fire Alarm
Security Alarm
Exhaust Alarm

Go out from the clean room


Call for a UNF staff member

Safety Emergency Exits

Safety Emergency Electricity


Breakers

Safety Fire Extinguishers

Safety Emergency Showers

Clean Room Protocol Purpose

Promote Successful Clean Room Operations


Ensure Safety in the Clean Environment
Provide Operational Conditions that Meet
Process & User Needs

Perspective

The protocol provides basic awareness and


general guidelines for clean room users
Successful clean room operation relies on each
users understanding, participation and self
discipline
The success of each user relies on trust,
understanding and shared responsibility among
all users

?What is a Clean Room


A clean environment designed to reduce the
contamination of processes and materials.
This is accomplished by removing or
reducing contamination sources.

Principles of the Clean


Environment

Air is highly (HEPA) filtered


(99.99% @ 0.3)
Layout should minimize
particle sources in filtered
air stream
Air flow should remove
most particles generated
by process

Types of Contamination

Particulate
Dust, skin, hair, makeup
Chemical
Oil, grease, metal ions, perfume
Biological
Bacteria, fungi,
Radiation
Ultraviolet light

Particle Characteristics

50 micron particles are visible


Average human hair is about 100 microns
Time to fall 1 meter in still air

33 seconds for 10 micron particle


48 minutes for 1 micron particle

Humans generate >1x105 particles per minute when


motionless (fully gowned)
Humans can generate >1x106 particles when
walking in the clean room

Contamination Sources

People ~75%
Ventilation ~15%
Room Structure ~5%
Equipment ~5%

Contamination Control

Personnel Control

Dress code
Personal Hygiene
Gowning

Environmental Control

Entrance and exit


Materials and supplies
Cleaning and maintenance
Atmospheric

Dress Code

No sleeveless shirts
No shorts or skirts
No slippers or sandals
No jewelry that can puncture garments or
gloves
Avoid clothing that sheds

Personal Hygiene

Control Dermatitis & Dandruff


Do not smoke before entry

Wait at least 20 min. after smoking to enter the


clean room

No chewing gum or tobacco


No Cosmetics should be worn
Facial hair will need to be covered

Gowning

Proper gowning order

Hair cover
Shoe covers
Mouth cover (only for those with mustache or beard)
Coverall
Booties
Gloves
Safety Glasses
The use of gloves in the e-LINE
room is not obligatory, but
ONLY in this room.

Gowning Basics

Garments should not be removed from clean


room unless in approved container
Dont walk out of the clean room with your
garments on
Change garments when soiled or showing
any visible signs of wear
Dont reach inside your garment while in the
clean room

Garment Reuse and Storage

Reusable Store in the Gowning Room

Coveralls
Booties (not the blue disposables)
Safety Glasses

Not Reusable Throw in trash

Hair cover
Blue disposable shoe covers
Gloves
Mouth cover

Entry & Exit

The use of the access card is a MUST (entry


and exit)
Enter and exit quickly
Each user must use their own access card
including visitors
Use the passthrough access for small objects

Materials and Supplies

Do not carry non-clean room items into the clean


room
Do not carry clean room items out of the clean room
Do not use pencils or erasers
Paper should be kept in a plastic sleeve
Do not cut the clean room wipers
Clean everything you carry into the clean room

Chemicals

Do not take new chemicals into the clean room without


permission of Noa Mazurski
Always read MSDS for every chemical you use
Large quantities of chemicals must be stored outside the
clean room
Chemicals inside the clean room should be properly
stored in their storage cabinets
All chemical containers should be clearly labeled with
their contents and Hazard Classification
Unattended chemicals and experiments should be
labeled with the owners name, immediate contact
number, list of all chemicals involved, and estimated time
of return or completion.

Chemical Handling

Do not transport chemicals in open containers


Chemicals should be used inside approved hoods
Full apron, Trionic gloves and full face shield are
required for using all acids
Gloves, lab coat, and safety glasses are considered
minimum personal protective equipment when
handling ANY chemical

Chemical Handling

In case of a small spill

Inform all users in the clean room


Clearly mark the affected area
Use appropriate absorbent material to clean up the spill

In case of large spill

Inform all users in the clean room


Clearly mark the affected area and evacuate
Contact UNF staff immediately

Chemical Handling

Chemical waste should be properly disposed in the


appropriate waste container into the hoods
No chemicals may be poured down the drains
Waste containers should be properly marked as
such
If you have questions about disposal contact a staff
member

In Case of Emergency

Always follow the rules set forth by UNF staff


If an emergency requires evacuation, leave
the clean room immediately, do not stop to
un-gown
Inform other users before leaving

Equipment use

All users must be trained before using any


equipment
All equipment use should be scheduled
Before operating any equipment check with UNF
staff if it is useable
If you are unable to use scheduled time please
delete your reservation
It is every users responsibility to report damaged or
malfunctioning equipment
It is every users responsibility to properly operate
and clean each piece of equipment that they use

Housekeeping

Every user is responsible for keeping the clean room


clean
Always clean your workspace before leaving
Dont leave or store items on or in equipment
Store your personal items (samples, wafers, tools) in
the locker located in the clean room main corridor
Do not set liquids on any equipment
Properly store all materials before leaving the clean
room
Last one out should make sure the room is in a safe
idle mode

Violations of Rules

First time
Warning
Report to Advisor
Second time
Suspension of access
Report to Advisor
Retraining may be required
Third Offense
Suspension of access
Report to Advisor
Access will not be renewed until an acceptable resolution
is reached by the UNF Managing
Clean Room Protocol re-training will be required

Services rates

Clean room use: 5$ per hour


In addition to the clean room fee, each system has its
own rate consult the nanocenter website for details (
http://www.nanoscience.huji.ac.il/unf/info.htm)

Incorrect use of the ID card for enter or exit the clean


room confuses the doors control system. In case of
uncertainty on the worked hours for an specific day, 8
hours will be taken into account.

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