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Modeling of LASER

Micromachining Process

Debkalpa Goswami
Department of Production
Engineering
Jadavpur University
B. Prod. E. III
Roll: 001011701033

Light
Amplification by
Stimulated
Emission of
Radiation

Population
Inversion
Albert Einstein
Stimulated
Emission

Amplification
2

T. H. Maiman

Population Inversion

N 2 N1e

E2 E1

kT

Boltzmann Distribution Law


(Thermal Equilibrium)

Stimulated Emission

h E2 E1
4

Amplification
I1 r1r2 I 0 e
r1r2e

2 k L

2 kth L

1 1
kth
ln

2 L r1r2
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Properties of Laser Radiation


Monochromaticity
Collimation
Beam Coherence
Temporal Modes
Frequency
Multiplication

Types of Industrial Lasers


Solid-state Lasers
Nd:YAG (1064 nm)
Ruby (694 nm)
Nd:glass (1062 nm)

Gas Lasers
HeNe (632.8 nm)
CO2 (10,600 nm)
Argon (488, 514.5 nm)

Kumar Patel

Semiconductor Lasers
InGaAs (980 nm)

Liquid dye Lasers


Rhodamine 6G (570-640 nm)
Coumarin 102 (460-515 nm)
Stilbene (403-428 nm)

Laser Materials Interactions


Laser Parameters

Material Parameters

intensity

absorptivity

wavelength

thermal
conductivity

spatial and
temporal coherence

specific heat

angle of incidence

density

polarization

latent heat

illumination time

Thermal Effects
T z , t
2T z , t
T
z
,
0

0
2
t
z
T 0, t
k
H
z

for

1 0 t tp

0 t tp

z
12

4 t ierfc
12

4 t

T z , t

12
2H 1 2 1 2
z
z

t ierfc

t
ierfc

4 t 1 2
k
4 t t p

ierfc x

1
exp x 2 x 1 erf x

where erf x

e
d .
0

0 z

1 2

0 t tp

heating

t tp

cooling

10

Hzmax
Tm
ierfc

kT
T
b
b

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Important Practical Considerations


Beam Shapes

2r 2
I r I 0 exp
2
w

2T x, y , z , t 2T x, y, z , t 2T x, y , z , t
T x, y, z , t

2
2
2
t

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Pulse Shapes

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Moving Source of Heat

x vt

2T , y, z , t 2T , y, z , t 2T , y, z , t
T , y, z , t T , y, z , t
v

2
2
2

T , y, z, t
0
t

(quasi-stationary heat flow)

T T0 e v , y , z

(trial function)

2
2 , y, z 2 , y, z 2 , y, z
v

, y, z
2
2
2

y
z
2

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Temperature dependent properties

Thermal conductivity
Thermal diffusivity
Absorptivity
Etc.

f(T)
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Laser Micromachining Mechanisms


Laser Ablation
material removal processes
by photo-thermal or photochemical interactions.
multiphoton
mechanism: even
though the energy
associated with each
photon is less than the
dissociation energy of
bond, the bond breaking
is achieved by
simultaneous absorption
of two or photons.

Laser Assisted
Chemical Etching
carried out by using
suitable etchant
(precursors).
gaseous precursors:
Cl2 and Br2
(dry etching)
liquid precursors: HCl,
HNO3, H2SO4, NaCl,
and K2SO4 (wet
etching)

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Laser Micromachining Applications


Microvia
Drilling

Drilling of
Inkjet
Nozzle
Holes
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Fuel
Injector
Drillin
g

Laser
Scribing

Bio-medical applications:

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Relevant Research and Recent Trends


Experimental
Models

Kuar et. al (2006)

Semi-analytical
Models

Gospavic et. al
(2004)

Numerical or
Computer Models

Ding et. al (2012)

Kuar, A. S., B. Doloi and B. Bhattacharyya (2006). "Modelling and analysis of pulsed Nd:YAG laser machining
characteristics during micro-drilling of zirconia (ZrO2)." International Journal of Machine Tools and Manufacture 46(1213): 1301-1310.
Gospavic, R., M. Sreckovic and V. Popov (2004). "Modelling of laser-material interaction using semi-analytical approach."
Mathematics and Computers in Simulation 65(3): 211-219.
Ding, H., N. Shen and Y. C. Shin (2012). "Thermal and mechanical modeling analysis of laser-assisted micro-milling of
difficult-to-machine alloys." Journal of Materials Processing Technology 212(3): 601-613.

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Kuar et. al
(2006)

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Gospavic et.
al (2004)

Alternative
method

Differential
Transform

Semi-analytical model
Particular cases with
cylindrical geometry
Laplace Transform and
Fourier Method of
Variable Separation
PDE

ODE

Mukherjee, S., D. Goswami and B. Roy (2012). "Solution of Higher-Order


Abel Equations by Differential Transform Method." International Journal of
Modern Physics C 23(09): 1250056.

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Ding et. al
(2012)

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Laser-Assisted Nano-wire Growth and Harvest


Laser Thermal Lab, UC Berkeley

Nanoplasians harvesting their nanowires selectively grown on a field by a laserassisted method. (SEM image)

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Thank You

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