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Deep RIE of Pyrex glass

using SF6 Plasma


(Tohoku University, Esashi Lab.)

Pyrex
glass

quart
z

Deep RIE of Pyrex glass, quartz, PZT (lead zirconium


titanate)
and SiC (silicon carbide) using thick nickel mask
MicroElectroMechanic
al System Lab.

Powderblasted Glass Chips


(MESA+ Research Institute, University of Twente)

MicroElectroMechanic
al System Lab.

Powderblasted Glass Chips


(MESA+ Research Institute, University of Twente)
500 depth
channel

Cross-section of
powder blasted
channels
MicroElectroMechanic
al System Lab.

Microstructure Using Glass

Caliper
tech.

Agilent
tech.
MicroElectroMechanic
al System Lab.

Plastic MEMS
Why plastic MEMS?
Soft Lithography

Micro-transfer Molding( TM)


Micro-molding in Capillaries (MIMIC)
Replica Molding(REM)
Hot embossing
Plastic injection molding technique

Plastic Biochip
(Digital Bio Technology, Korea)

Bio-detection System
(MicroSystems and BioMEMS Lab at University of Cincinnati)

MicroElectroMechanic
al System Lab.

Why Plastic MEMS ?

Simple and low coat fabrication


Low weight, high strength
Good optical transparency
Biocompatibility

MicroElectroMechanic
al System Lab.

Soft Lithography
(elastomeric stamp)

Thick
photoresist
SU-8,10

Si surface
after
etching

( ~50 m
thick)
University of Washiton CAM
MicroElectroMechanic
al System Lab.

Lab.
7

Soft Lithography
Micro-transfer Molding(TM)
Micro-molding in
Capillaries(MIMIC)
Replica Molding(REM)
Hot embossing
Plastic injection molding
technique
MicroElectroMechanic
al System Lab.

Micro-transfer Molding( TM)


In TM, the recessed regions of a mold are filled
with a liquid or prepolymer, and the filled mold is
then brought into contact with a substrate. TM
allows formation of both interconnected and
isolated microstructures.

MicroElectroMechanic
al System Lab.

Micro-molding in Capillaries
(MIMIC)
In MIMIC, a liquid prepolymer or other fluid
capable of subsequent solidification wicks
spontaneously by capillary action into the network
of channels formed by a conformal contact
between a mold and a substrate.

MicroElectroMechanic
al System Lab.

10

Replica Molding(REM)
In REM, a liquid prepolymer is directly cast again as a
mold. After curing the prepolymer, the mold is removed,
leaving a polymer micro- or nano-structure on the
surface. REM is remarkable for its simplicity for
generating nanostructures (>30 nm) or polymers with a
resolution of a few nanometers.

MicroElectroMechanic
al System Lab.

11

Hot embossing
(Laboratory for Micro- and Nanotechnology
Paul Scherrer Institut)

MicroElectroMechanic
al System Lab.

12

Plastic injection molding technique


(MicroSystems and BioMEMS Lab at University of Cincinnati)

MicroElectroMechanic
al System Lab.

13

Plastic Biochip
(Digital Bio Technology, Korea)

Cell-count C-BOX

Dilution palette
Absorbance
tester

RBC filter-RBC
MicroElectroMechanic
hemocytometer
al System Lab.

14

Bio-detection System
(MicroSystems and BioMEMS Lab at University of Cincinnati)

MicroElectroMechanic
al System Lab.

15

Microstereolithography

MicroElectroMechanic
al System Lab.

16

Microstereolithography?
CAD tool

Laser

*.

Slice size

MicroElectroMechanic
al System Lab.

file
l
st

Liquid photopolymer

17

Support
platfor
m

Polymerize
d
layered
model

Microstereolithography

MicroElectroMechanic
al System Lab.

18

Stereolithography?

MicroElectroMechanic
al System Lab.

19

Advantage

Conductiv
e epoxy
Glas
s
Pump
chambe
r

MicroElectroMechanic
al System Lab.

20

PZ
T

Diffuser/nozz
le

Microstructure
(Ikuta Lab., Japan)

Microturbi
ne

Microco
il
Microgear
train
MicroElectroMechanic
al System Lab.

21

Multi-polymer IH Process
(Ikuta Lab., Japan)

Optical
waveguides
MicroElectroMechanic
al System Lab.

22

High-speed Two-photon
Microstereolithography
(Ikuta Lab., Japan)

MicroElectroMechanic
al System Lab.

23

Hybrid IH Process
(Ikuta Lab., Japan)

MicroElectroMechanic
al System Lab.

24

Biochemical IC Chip Set Family


(Ikuta Lab., Japan)

MicroElectroMechanic
al System Lab.

25

Biochemical IC Chip
(Ikuta Lab., Japan)

MicroElectroMechanic
al System Lab.

26

Micro-Electrophoretic Chip
(Sankyo Co., Ltd., Japan)

MicroElectroMechanic
al System Lab.

27

Integral Microstereolithography
Principle(EPFL)

MicroElectroMechanic
al System Lab.

28

Microstructure
(EPFL)

Sprin
g

Micromixer
impell
or

Gea
r
MicroElectroMechanic
al System Lab.

Tub
e
29

Microstereolithography
Pump & Liquid analyzer
Young-Tae Lee

MicroElectroMechanic
al System Lab.

30

Micro-pump

Mechanical
pump

Non-mechanical
pump
Electrohydrodynamic
(EHD)
Magnetohydrodynami
c
(MHD)

Piezoelectric
Electrostatic
Thermopneumat
ic
Magnetic

MicroElectroMechanic
al System Lab.

31

Pump structure

Electrod
e

PZT(0.2
t)

Diaphrag
m

Chamb
er

Pump
direction

Diaphrag
m
(glass)

MicroElectroMechanic
al System Lab.

Conductive
silver
epoxy
PZT

Diffuser/nozz
le

32

Pump
chamber

Fabrication process
PZT

Conductive
epoxy
Glass

Pump
chamber
Diffuser/nozzl
e

MicroElectroMechanic
al System Lab.

33

Photograph of the pump

Plastic
tube

Electrod
e

PZT
disk
Diffuser/nozz
le

MicroElectroMechanic
al System Lab.

34

Diffuser/nozzle

1mm

MicroElectroMechanic
al System Lab.

0.5mm

35

Pressure Head Difference

80m
m

Supply voltage: 200V,


140Hz

MicroElectroMechanic
al System Lab.

36

MicroElectroMechanical System Lab.

Pressure head difference


9
8

Pressure Head Difference


(cm)

7
6
5
4
3
2
1
0
0

50

100

150

Supply Voltage(Vp-p)

37

200

250

Frequency response

Pressure headdifference
(Normalized)

0.8
0.6
0.4

0.2
0
0

100

200

Frequency (Hz)
MicroElectroMechanic
al System Lab.

38

300

400

Flow rate
2.5

Flow rate(ml/min)

1.5

0.5

0
100

150

200

Apply voltage(Vp-p)
MicroElectroMechanic
al System Lab.

39

250

Liquid analyzer
Chamb
er

Pum
p

AC

Mixe
r
Sensing
part
Glas
s

MicroElectroMechanic
al System Lab.

Channel

40

Simulation results

Pum
p

Mixe
r

MicroElectroMechanic
al System Lab.

Chamber
Chambe
r
Chann
el

41

Mixe
r

Photograph of the liquid


analyzer
Electrode(P
t)

Chambe
r

MicroElectroMechanic
al System Lab.

Mixe
r

PZT
disk

42

Glas
s

Photograph of the mixer

1m
m

0.5m
m

MicroElectroMechanic
al System Lab.

Fluidic
direction

43

Characteristics of
the liquid analyzer

1.00E+06

0.8

Resistance(ohm)

Resistance(Mohm)

0.6
0.4
0.2

1.00E+05

0
0

0.2

0.4

0.6

0.8

1.00E- 05

0.9% NaC l(ml)

1.00E- 03

0.9% NaCl(liter)

DI water(100ml)+0.9%NaCl(x
liter)
MicroElectroMechanic
al System Lab.

1.00E- 04

44

1.00E+04
1.00E- 02

Circulation and Mixing


Operation
Electrod
e

Mix
er

Pum
p
MicroElectroMechanic
al System Lab.

In
k

45

Output voltage(mV)

Characteristics of the Mixing


Operation

NaCl solution
injection

5s

200mV

Time(sec)
MicroElectroMechanic
al System Lab.

46

Electrolysis Phenomenon

2V

5s

Time(sec)

MicroElectroMechanic
al System Lab.

47