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A ppt on

MEMS TECHNOLOGY

Submitted by-
Submitted to-
Prem Shanker Meghwal Mr. Sandeep
Jhamb
13EAIME080 H.O.D.
Mechanical
Me- 8th Sem. Department
CONTENT:
Introduction
Fabrication Techniques
Design and Modeling
Applications
Advantages and
Disadvantages
Future scope
Conclusion
INTODUCTION:
MEMS is a technology of very small
devices. It is a combination of
mechanical functions and electrical
functions on the same chip using
micro fabrication technology.

MEMS are made up of components


between 1 to 100 micrometers in
size
MEMS devices generally range in size
DEFINATION AND
CLASSIFICATION:
Actuator
Ambient intelligence
Energy scavengers
Getters
Sensor (M,T,C,R,E)
Fabrication of MEMS

Depositio Etching
Patterning
n

Lithography
Physical Dry Wet
Chemical
Photolithogr
aphy

Electron
beam
lithography
Deposition
Physical deposition :
Physical deposition consists of a process in which a material is
removed from a target, and deposited on a surface
Chemical deposition :
Chemical deposition techniques include chemical vapor deposition, in
which a stream of source gas reacts on the substrate to grow the
material desired.

Patterning
Patterning of MEMS is the transfer of a pattern into a material.
Lithography is a widely used process in patterning of mems .
Examples of lithography are Photolithography, Electron beam
lithography, Ion beam lithography, Ion track technology, X-ray
lithography.
Etching
Wet Etching : Dry Etching :
Wet chemical etching
consists in selective Dry etching can be
removal of material by done in three ways
dipping a substrate and they are
into a solution that a) Reactive ion etching
dissolves it. (RIE)
The chemical nature b) Sputter etching
of this etching process c) Vapor phase etching.
provides a good
selectivity
DESIGN AND MODELING
Designing an MST/MEMS device is basically an iterative process; the
design is put into a simulation loop, improved and resubmitted for
simulation until the design fits the demands.
It is seldom possible to use design methodologies and tools from
traditional industries working with larger dimensions due to the
fundamental differences related to the order of magnitude of the
typical dimensions .
APPLICATIONS:

Accelerometers in consumer electronics


devices such as game controllers
Communications
biotechnology
MEMS IN MOBILE DEVICE
In medicine
A MEMS is a device
that can be implanted
in the human body.
MEMS surgical tools
provide the flexibility
and accuracy to BIO MEMS
perform surgery.
Bio-mems are used to
refer to the science and
technology of operating at
the micro scale for
biological and biomedical
applications.
In automotives :

Heavy use of mems is


found in air bag systems,
vehicle security system,
inertial brake lights,
rollover detection,
automatic door locks etc.
As gyroscope:
Inexpensive vibrating structure
gyroscopes manufactured with
MEMStechnology have
become widely available.
These are packagedsimilarly
to other integrated circuitsand
may provide either analog or
digital outputs.
In microphones:
The memsmicrophone also called as
microphone Chip is widely used in the
present day communication world.

In military :

Micro-electro mechanical
system (MEMS) technology
help projectiles to reach
their targets accurately.
In accelerometers:
MEMS accelerometers are widely
used in cars for airbag deployment
and in consumer electronics
applications such as smart phones,
gaming devices for sensing motion

In sensors:
A sensor is a device which
receives and responds to a
signal when touched. A
micro sensor reaches a
significantly higher speed
and sensitivity compared
with microscopicapproaches.
Apart from these applications mems are also used
in many fields in the present world .

They are used to detect earth quakes, in gas shut


off, in shock and tilt sensing

Inkjet printers and micro scanners also involve


the use of mems.
Mems is used in Optical switching technology in
which, switching technology and alignment for
data communications is done.
Advantages and
disadvantages
Farm
establishment
Minimize energy
requires huge
and materials. investments.
Improved Micro-components
reproducibility. are costly
Improved compared to macro
accuracy and components.
reliability. Design includes
Increased very much complex
selectivity and procedures
sensitivity.
Conclusion
This enabling
technology promises to
create entirely new
categories of products.
MEMS will be the
indispensible factor in
advancing technology
As with all emerging
technologies had been
predicted to
revolutionize technology
and our lives
FUTURE SCOPE
The future of MEMS is integrally linked to market
trends in general and driven by the increasing demand
to monitor and control our environment and the
equipment and instruments we use in our daily lives.
In order to avoid the need for a multitude of wires,
such sensors must be self sustaining and able to
communicate wirelessly.
As a result, not only more sensors are needed, but also
small energy generating modules and wireless
transmission components. Clearly, the increased
numbers of devices will drive size reduction which in
turn will enable higher levels of integration.
N K
H A
T ! !!
U
YO
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Q U