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Study of Accuracy of a Long-Travel-Range, UltraHigh-Resolution, HybridDrive Translational Stage using Laser Interferometer

By Samik Dutta, Somnath Chatterjee, Ranjan Sen CMERI Durgapur
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Objective 1. high precision nano . 2.To exploit full potentials of scanning probe microscope to take nano scale measurement of 3D surface topography.Performance evaluation of individual stage movements of meso-micronano machine tools in the micro and nano scale range. 3.Linear and angular errors of state-ofthe-art hybrid drive translational stage has been examined by laser interferometer.

6 × 108mm .Smart table (vibration isolation table) UT2 with ST-200 controller of Newport corporation with IQ damping technology.Experimental Set-up 1.4 × 10-3 • Maximum relative motion value : <7. vertically bonded closed cell construction. • Maximum dynamic deflection coefficient: 0. • Working Surface: 400 Series ferromagnetic stainless steel 3/16 in.8 mm) thick with integrated damping layer • Surface Flatness : ±0. (4.1 mm over 600 mm2 • Core Design : Trussed honeycomb.

Yaw: ± 25 (5.2.HD. PI made: • C-702 controller • Hybrid drive consisting of a motor and piezo actuator with a servo control mechanism Guiding mechanism: ball screw • • Linear optical encoder resolution: 2nm • Minimum incremental motion : 4nm • Accuracy < 0.15) µrad (arcsec)   Experimental Set-up contd… . M511.01 µm • • Pitch. Translational stage.05 µm Hysteresis : 0.

5°C   Experimental Set-up contd… . Reference scale: LASER interferometer • LASER source: He-Ne laser (λ=632nm) • Accuracy : 1 part in 107 which is 10 nm in 100 mm • Working principle: Michelson laser interferometer Temperature of experiment: 20±0.3.

3164 nm Intensity L 6 .8 nm and for a length L = 1m No.Measurement of Length Michelson Interferometer Output  sinusoidal with a phase 4π L θ= λ L For λ = 632. of oscillations = 1580278.13 Using modern detectors it is possible to measure 1 to 1000 parts of one oscillation Resolution in this case is 0.

Experimental Set-up contd… Reading Temperature sensor M-511.HD Laser source C-702 Mirror & beamsplitter .

Experimental Set-up contd… Laser source Mirror & beamsplitter Translational Stage Reading .

Angular Measurements .

5 -0.0014 100 100.7 0.6 -1.1 40.3 90.1 100.6 80.1 -1.7 0.5 -0.0006 -0.9 70.4 -1.0004 20 20.2 -2.3 0.5 -0.4 -0.5 0.0006 10 10.0008 30 30.5 20.6 -0.2 -2 -2.003 -3 65.8 -0.0011 55 55.5 25.0006 50 50.0003 -0.7 75.0007 35 35.5 0.0005 40 40.3 -2.0026 -2.6 95.5 15.0006 15 15.0005 -0.5 0.0029 -2.0005 25 25.4 -1.0016 -1.0005 -0.4 0.0023 -2.0011 Error (b) Hystere (µm) sis (µm) 0 -0.6 0.0005 -0.0021 -2.1 5.1 0 0.0005 45 45.8 0.0011 -1.Result Com True position Error (f) True position (forward) (µm) position (mm) (mm) (backward) (mm) 0 0 0 0 5 5.0019 95 95.0022 80 80.3 0.1 -2.1 0 0.3 10.1 60.7 -0.6 -0.0011 -1.6 50.5 35.1 0.0016 -1.0018 90 90.0015 -1.9 -1.0019 -1.0023 70 70.9 0.0021 75 75.5 45.8 -1.0024 85 85.2 0.2 0 .002 65 65.0012 60 60.0027 -2.0005 -0.0001 -0.003 -3 85.9 55.6 30.2 1.1 0 0.

0 -10 0 10 20 30 40 50 60 70 80 90 100 110 ErrorF ErrorB Hysteresis Commanded Position(mm) .Result contd… 1.0 -0.5 -3.0 -1.5 -1.0 Parameters(micron) 0.5 1.5 -2.0 -2.5 0.

Result contd… Command Position (mm) Yaw (F) (arcsec) Yaw (B) (arcsec) Pitch (F) (arcsec) Pitch (B) (arcsec) 0 10 20 30 40 50 60 70 80 90 100 0 2.66 1.58 0 1.94 2.31 2.55 11.26 19.26 19.24 7.35 17.15 7.49 2.07 1.2 2.53 .53 0 2.6 14.6 19.15 9.46 -0.34 -5.63 9.93 2.72 16.08 -3.91 -5.57 1.22 3.1 19.55 5.54 1.45 -3.81 15.28 19.28 17.5 6.58 0 3.39 0.05 2.42 0.88 12.

Result contd… 22 20 4 Pitch error(arcsecond) 16 14 12 10 8 6 4 2 0 -2 -10 0 10 20 30 40 50 60 70 80 90 100 110 Yaw error(arcsecond) 18 PitchF PitchB 3 2 1 0 -1 -2 -3 -4 -5 -6 -7 -10 0 10 20 30 40 50 60 70 80 90 100 110 YawF YawB Commanded Position(mm) Commanded Position(mm) .

• Future work can be done to get the best ratio using design of experiment. It may be due to errors in guide mechanism.Conclusions • To get the best performance. . • There is some problem of linear positioning between 65mm to 85mm. there is a definite ratio between incremental step and velocity.

Thank You .