MICROCANTILEVER BASED GLUCOSE SENSOR

BY

Madhura V. Tapse & Jyotsna D. Mohod (10330018) (10307012)

Overview
 Introduction to Glucose Biosensor

 Microcantilevers
 Design and Optimization  Fabrication

Introduction To Glucose Biosensor  Biosensor-A biosensor is an analytical device which converts a biological response into an electrical signal. Glucose Biosensor: Biological Recognition Element-Glucose Oxidase Analyte-Glucose .  A device which incorporates biological recognition element in close proximity with sensing system specific to analyte.

To monitor glucose level in Diabetes patients .Glucose Biosensor  Reaction: Glucose Oxidase  Glucose +  Application: Gluconic Acid + 1.

Portable Device  Why Microcantilevers? 1. . reduction in time 3.Lab on chip Technology 2.Low cost.89pg)and specificity Can detect trace amount in parts per billion and parts per trillion 3.Reduce work load. Their ability to be fabricated into a multi-element sensor array 2.Glucose Biosensor Using MEMS Technology  Advantages- 1.High sensitivity (300Hz/2.

 Vibrational Sensing-By measuring change in vibrational frequency Piezoelectric method-Measures shift in resonance frequency due to adsorption of biomolecule. .Principle Of Detection Using Microcantilever  Static Sensing-By measuring microcantilever deflection. Piezoresistive method-Measures strain induced resistive change produced upon adsorption of biomolecule.

.And microactuator is used to drive the plate into resonance.  Now this frequency shift can be measured with piezoresistive microsensor.M and thus frequency.Piezoelectric Method Continued….  Microcantilever has its own natural frequency as K-Spring Constant M-Mass of cantilever  When Biomolecule adsorbs on surface of microcantilever. it changes K.  Microcantilever has thin film plate .

 This change in resistance is measured by Wheatstones bridge.Strain will cause change in piezoresistance and thus change in resistance is given by. .Piezoresistive Sensor Equations  Resonance Frequency:  Change in mass of cantilever due to adsorption of Biomolecule:  This will cause stress on microcantilever and thus strain is induced.

Immobilization of Glucose oxidase is done at free end of microcantilever.At the free end of Microcantilever.External Piezoelectric Element 3.a small area of gold coated to capture glucose molecule.Microcantilever 2.Piezoresistors at root of microcantilever 4. 5.Design Of Microcantilever  Design Of Structure: 1. .

Design and Optimization  Different Geometries have different resonant frequencies as well as unique frequency shifts.Effective mass of cantilever at free end 2.Clamping width at fixed end . Shape A:∆f=49Hz  Sensitivity=frequency mass Sensitivity depends on: 1.

Optimization..  ∆f=41Hz  ∆f=36Hz  ∆f=69Hz  ∆f=31Hz .

Reduce effective mass at the end of the cantilever 2.So trapezoidal shape is taken.Optimization Continued…  To improve sensitivity: 1. Shape G:∆f=150Hz .Increase clamping width Shape F:∆f=506Hz Advantage:Uniform stress distribution Disadvantage: Insufficient area to capture bioparticles of interest.

93kHz New resonance frequency:1311kHz maximum frequency shift=300Hz Mass of particle=0.285pg=1.  Resonance frequency is increased . Original resonance frequency:264.285pg So.Higher Resonance Modes  These are used for further improvement in sensitivity.05×1018 s-1kg-1 . Sensitivity= 300Hz/0.and thus frequency shift is also increased but at higher modes smaller amplitude of vibration is present.  So .

Dose ~10^14 /cm . Energy~30KeV.FABRICATION The SOI wafer Ion Implantation to form Piezoresistive element Boron.

Photoresist on Upper Si Layer Photolithography .

Wet etching to remove unexposed Photoresist Further remove some part of Photoresist etching to exposed .

Electron beam deposition of Ti(~5 nm) Rate of deposition ~ 3 A/s. Pressure ~ 2 x 10 Torr.2 A Electron beam deposition of Au(~150nm) Rate of deposition ~ 10A/s . Emission current ~ 0.1 – 0.

Wet etching of remaining photoresist DRIE to define cantilever .

Bulk DRIE to remove Si substrate Piezoelectric actuator stamped on base of cantilever .

Carrascosa. Ayumi Ikeuchi a. 2. Hayato Sone a. A´ lvarez. 3. Ghi Yuun Kanga.Sumio Hosaka a.L. Moreno. Dae Sung Yoona. Takafumi Chiyoma a. Prorok.C. M. M. Tae Song Kima. Morshed & B. Tailoring Beam Mechanics Towards Enhancing Detection of Hazardous Biological Species. .Nanomechanical biosensors: a new sensing tool. L. 4. Lechuga.b. Ji Yoon Kanga.S. Takashi Izumi c Possibility of a femtogram mass biosensor using a self-sensing cantilever. Kyung Wook Weea. Jung Ho Parkb..M. Jaebum Parka.REFERENCES : 1. Haruki Okano b. Novel electrical detection of label-free disease marker proteins using piezoresistive self-sensing micro-cantilevers.G.

Biosensors and Bioelectronics 20(9): 1697-1708. 7. 6. MEMS Hilton Head. C Tucker and C Liu (2006) Development and characterization of high-sensitivity bioinspired artificial haircell sensor. Y Zhang. K Hinkley and M Zhang (2001)TwoDimensional Protein Micropatterning for Sensor Applications Through Chemical Selectivity Technique. S Pandya. M Veiseh and M Zhang (2005) Surface modification of silicon and gold-patterned silicon surfaces for improved biocompatibility and cell patterning selectivity.S Lan. J Engels.N Chen. . Biomedical Microdevices 3(1): 45-51. J Chen. M Veiseh.5.

K.R. Weea.W. Addison-Wesley 10.Y. CRC Press. Biosensors and Bioelectronics 20:1932-38 9. 67-68.K. Yoona. T. Parkb.C. D. Jaeger (1997) Introduction to Microelectrical Fabrication.H.F Laermer and A Urban (2003) Developments and applications of silicon deep reactive ion etching.Y. J.S.8. G.S. Microelectronics Engineering. Kanga.M Madou (2001) Fundamentals of Microfabrication. J Parka. (2004) Novel electrical detection of label-free disease marker protein using piezoresistive self-sensing microcantilevers. 349-355 11. J.K. .

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