Micro-Electro-Mechanical Systems (MEMS) is theintegration of mechanical elements, sensors, actuators, andelectronics on a common substrate through the utilization of microfabrication technology or “microtechnology”.
So what exactly is MEMS?MEMS Examples
pressure sensorsaccelerometersflow sensorsinkjet printersdeformable mirror devicesgas sensorsmicromotorsmicrogearslab-on-a-chip systems
(1.3 million micro-mirrors)TI DMD
Bulk micromachinedpressure sensor
General MEMS Advantages
–Is everything better smaller?
The MicroTechnology/MEMS Tool Set
Cleanroom plusmicrofab processes
Standard Integrated Circuit (IC) Processes
–Identical to those used in IC fabrication–Generally used for surface micromachining
Dividing line can become very blurry