Welcome to Scribd, the world's digital library. Read, publish, and share books and documents. See more
Download
Standard view
Full view
of .
Look up keyword
Like this
7Activity
0 of .
Results for:
No results containing your search query
P. 1
Lecture 01 Introduction to MEMS_new

Lecture 01 Introduction to MEMS_new

Ratings: (0)|Views: 500 |Likes:
Published by rmehfuz
Introduction to MEMS.
Introduction to MEMS.

More info:

Published by: rmehfuz on Jun 19, 2009
Copyright:Attribution Non-commercial

Availability:

Read on Scribd mobile: iPhone, iPad and Android.
download as PDF, TXT or read online from Scribd
See more
See less

05/11/2014

pdf

text

original

 
1
Introduction to MEMS
Prof. TianhongCui, Mechanical EngineeringME 8254
MovieMovieMovieOverview
What is micromanufacturingand MEMS?
Why the interest in MEMS?
IC Fabrication Processes
Bulk Micromachining Processes
Surface Micromachining Processes
Combined Processes
References
MEMS -evolved from the MicroelectronicsRevolution
 IC Industry Timeline
1999
10 million transistors
1947
single transistor
1958
first IC
 
2
Micro-Electro-Mechanical Systems (MEMS) is theintegration of mechanical elements, sensors, actuators, andelectronics on a common substrate through the utilization of microfabrication technology or “microtechnology”.
So what exactly is MEMS?MEMS Examples
pressure sensorsaccelerometersflow sensorsinkjet printersdeformable mirror devicesgas sensorsmicromotorsmicrogearslab-on-a-chip systems
 MEMS Timeline
198020301999
(1.3 million micro-mirrors)TI DMD
?
Bulk micromachinedpressure sensor
General MEMS Advantages
Batch fabrication
Reduced cost
Reduced size
Is everything better smaller?
Reduced power
High precision
New capabilities?
Improved performance?
The MicroTechnology/MEMS Tool Set
Cleanroom plusmicrofab processes
+
Micromachining Processes
Standard Integrated Circuit (IC) Processes
Identical to those used in IC fabricationGenerally used for surface micromachining
Surface Micromachining
Additive processes
Bulk Micromachining
Subtractive Process
Dividing line can become very blurry
 
3
Standard IC Processes
Source:CWRUSource: Jaeger
Standard IC ProcessesPhotolithography
Source:Jaeger
Standard IC Processes
Sputtering
Evaporation
Thermal Oxidation
CVD
Spinning
Epitaxy
1) Deposit/Grow Thin FilmsStandard IC Processes
Lithography
Etching Techniques (wet, dry, RIE)
2) Pattern Thin FilmsStandard IC Processes
Thermal Diffusion
Ion Implantation
3) Introduce Dopants(to form electrically-activeregions for diodes, transistors, etc.)Micromachining Processes
wet vsdry
isotropic vsanisotropic
subtractive process
Bulk Micromachining

Activity (7)

You've already reviewed this. Edit your review.
1 hundred reads
1 thousand reads
Amit Guleria liked this
vanikasturi liked this
merdota liked this
MATHANKUMAR.S liked this
estiva liked this

You're Reading a Free Preview

Download
/*********** DO NOT ALTER ANYTHING BELOW THIS LINE ! ************/ var s_code=s.t();if(s_code)document.write(s_code)//-->