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    Optical MEMS (Micro-Electro-Mechanical Systems) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through microfabrication technology. And Optical MEMS has created a new fabrication paradigm for optical devices and systems. Using tools developed for the integrated-circuits industry, Optical MEMS brings unprecedented levels of miniaturization and integration to optical communication systems. Today , the capacity of optical communication networks is limited by the switches that are electronic in their core. Optical MEMS is transforming the telecommunications infrastructure by providing all-optical switches that enable high-capacity networks. Optical MEMS devices are driving the trend toward all-optical telecommunication networks. With the ability to directly manipulate an optical signal, MEMS have several applications that eliminate unnecessary optical-electrical-optical (O-E-O) conversions. In optical communication, electrical components such as inductors and tunable capacitors can be improved significantly compared to their integrated counterparts if they are made using optical MEMS technology. With the integration of such components, the performance of communication circuits will improve, while the total circuit area, power consumption and cost will be reduced. In addition, the mechanical switch, it is a key component with huge potential in various microwave circuits. Optical MEMS technology is currently used in low- or medium-volume applications. It proves to be a boon for the modern world.

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    Optical MEMS (Micro-Electro-Mechanical Systems) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through microfabrication technology. And Optical MEMS has created a new fabrication paradigm for optical devices and systems. Using tools developed for the integrated-circuits industry, Optical MEMS brings unprecedented levels of miniaturization and integration to optical communication systems. Today , the capacity of optical communication networks is limited by the switches that are electronic in their core. Optical MEMS is transforming the telecommunications infrastructure by providing all-optical switches that enable high-capacity networks. Optical MEMS devices are driving the trend toward all-optical telecommunication networks. With the ability to directly manipulate an optical signal, MEMS have several applications that eliminate unnecessary optical-electrical-optical (O-E-O) conversions. In optical communication, electrical components such as inductors and tunable capacitors can be improved significantly compared to their integrated counterparts if they are made using optical MEMS technology. With the integration of such components, the performance of communication circuits will improve, while the total circuit area, power consumption and cost will be reduced. In addition, the mechanical switch, it is a key component with huge potential in various microwave circuits. Optical MEMS technology is currently used in low- or medium-volume applications. It proves to be a boon for the modern world.

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as PPT, PDF, TXT or read online from Scribd
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    155 views13 pages

    Optical MEMS

    Uploaded by

    ashu_update
    Optical MEMS (Micro-Electro-Mechanical Systems) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through microfabrication technology. And Optical MEMS has created a new fabrication paradigm for optical devices and systems. Using tools developed for the integrated-circuits industry, Optical MEMS brings unprecedented levels of miniaturization and integration to optical communication systems. Today , the capacity of optical communication networks is limited by the switches that are electronic in their core. Optical MEMS is transforming the telecommunications infrastructure by providing all-optical switches that enable high-capacity networks. Optical MEMS devices are driving the trend toward all-optical telecommunication networks. With the ability to directly manipulate an optical signal, MEMS have several applications that eliminate unnecessary optical-electrical-optical (O-E-O) conversions. In optical communication, electrical components such as inductors and tunable capacitors can be improved significantly compared to their integrated counterparts if they are made using optical MEMS technology. With the integration of such components, the performance of communication circuits will improve, while the total circuit area, power consumption and cost will be reduced. In addition, the mechanical switch, it is a key component with huge potential in various microwave circuits. Optical MEMS technology is currently used in low- or medium-volume applications. It proves to be a boon for the modern world.

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    of 13

    1

    What is MEMS?

    • MEMS technology is an amalgam of


    principles, based on tools and
    methods, applicable for the
    fabrication of micron sized elements
    comprising structural, mechanical,
    optical and electrical components

    2
    What is Optical MEMS?
    • The integration of micro-optics and
    micro-electromechanical systems has
    created a new class of micro-
    systems, termed micro-opto-electro-
    mechanical systems (MOEMS)
    • In Optical MEMS mechanical motion
    of microstructures is used for
    manipulation of photons
    3
    MEMS mirrors
    • MEMS Mirrors are the most critical
    component for optical MEMS
    technology.

    • MEMS mirrors are 2 types


    – Torsional mirrors
    – Piston Mirrors 2-axis motion
    mirror

    4
    Torsional Mirrors
    • Torsional mirrors deflect light
    spatially by rotating the mirror
    surface relative to the plane

    5
    Piston Mirrors
    Piston mirrors move perpendicular to
    the plane of the mirror and shift the
    phaseof the incoming light

    6
    Application areas of optical
    MEMS
    • Display and Imaging Systems
    • Fiber Optic Communication
    • Optical Scanning Systems
    • Adaptive Optics
    • Medical treatement

    7
    MEMS for Display
    • High Resolution
    • High Contrast and
    Brightness(High Fill factor)
    • Small Size
    • Controlled in both digital
    mode and analog mode
    • New market such as
    portable projector and large
    screen TV

    8
    Optical Bioimaging
    Optical biopsy provides high-resolution, cross-
    sectional imaging of tissue noninvasively.

    MEMS Endoscopic OCT Imaging

    MEMS-based Endoscope fits into a


    standard Cystoscope

    Schematic of endoscopic OCT system


    9
    Fiber Optic Communications
    Optical Crossconnects (OXCs)
    • Switching Speed in
    μs/ms range
    • Low Crosstalk / Low
    Insertion Loss
    • Small Size / Low 2-axis motion mirror
    Cost
    • Scalability to Large
    Number of I/O Port

    Micromirror Array “Bubble” Optical Switch


    10
    Telescope Adaptive Optics

    11
    In a nutshell
    • Microelectronic integrated circuits can be
    thought of as the "brains" of a system and
    MEMS augments this decision-making
    capability with "eyes" (Optical integration)
    and "arms“ (mechanical Integration) to allow
    Microsystems to sense and control the
    environment.
    • It will make a diverse catalog of
    unprecedented levels of functionality,
    reliability, and sophistication making possible
    the realization of complete
    systems-on-a-single-chip .
    12
    13

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