NEW Digital Microscope

VHX-1000

Setting the Trend in Observation

VHX-1000

WO RLD’S FI RST
 Per for mance Un r ivalled by
O pt ical Microscopes

The VHX-1000 integrates advanced functionality with

top of the line imaging and measurement capabilities.

In the 20 years that KEYENCE has developed digital microscopes, we have seen ground breaking changes
across the board in industries that utilise microscopy for analytical research. We have striven as a company to
continually evolve our technology with these ever-changing industry demands.

We are proud to introduce the VHX-1000: a Digital Microscope that not only integrates advanced functionality
into a streamlined, all-in-one unit, but truly launches microscopy into the next generation. In the future, quick and
accurate measurement and observation for the most challenging of targets will become a standard requirement for
an observation system.

Welcome to the future.

2
 Our first priority is natural,
high resolution imaging.

RZ LENS 54 million pixel 3CCD REMAX III

High-speed processing graphic engine

BASIC CONCEPTS
Quick and Accurate Observation

Obser vation P.4

Quick observation of natural images at any time
Large depth of field & Free-angle observation

Recording P.10
Save and record images on-site
High-capacity HDD & PC mode for report preparation

Measurement P.12
On-screen real-time measurement
2D & 3D measurement

ADVANCED FU NCTIONS
Functions that Simplify the Most Difficult of Observations

High Dynamic Range (HDR) Function

P.18
[World’s Fi rst]
Exponentially increase the levels of observable colour gradation

Quick Depth Composition & 3D Display

P.20
[I ndust r y’s Fastest]
Simple two step operation to create fully-focused 2D and 3D images

Real-Time 2D & 3D Image Stitching

P.24
[World’s Fi rst]
Increase the field of view by 50 times while maintaining the same high magnification

3
 BASIC CONCEPT

Obse r vat ion

The imaging ability of a digital microscope is unrivalled by that of conventional optical microscopes.

1 Large depth of field for vivid and sharp

3D observation
Quick and natural observation
The VHX-1000 provides a depth of field at least 20 times larger than optical microscopes. Because of this,
the VHX-1000 can accurately observe the surface topography of a target with large peaks and valleys;
imaging that is typically impossible for conventional optical microscopes to achieve. Furthermore, the
number of steps required for observation and focus adjustment can be reduced considerably.

Image captured with an optical microscope Image captured with a digital microscope Probe tip (100x)

2 Observation at all angles

The Free-angle observation system eliminates blind spots on
the target by simplifying multi-angle viewing
VHX Series digital microscopes offer easy hand-held observation in addition to simplified stand-
mounted observation systems. Considerably reduce the time it takes to capture images of a target at
a wide variety of angles and positions by using the Free-angle observation system. Using these two
methods of observation, you will never again miss a detail in your observation.

0°
15° 15°
° 30
30 °
°
45

45
°
°
60

60
°
75°
90°

Handheld observation Free-angle observation system

4
3 Super high resolution observation
The Pixel Shift method provides super high resolution
images with excellent colour reproduction*
Despite its compact size, the camera can capture images of up to 54 million pixels, using an actuator to
shift the CCD. A flicker-free progressive scan method allows texture expression and colour reproduction
similar to observation with the naked eye.
* The 18 million pixels x 3CCD mode achieves both excellent colour reproduction and super high resolution images.

2.11 million pixels 54 million pixels

Bird feather (100x)

World’s first
54 million pixels 3CCD handheld camera
What is the pixel-shift method?
The camera takes a total of nine images to
produce a single image by actually shifting the
CCD horizontally and vertically by 1/3 pixel.
Furthermore, it obtains RGB data from each pixel.
This produces sharp images with excellent colour
reproduction.

Selectable resolutions suited for observation purposes

❙ 54 Mega-pixel, 18 Mega-pixel x 3CCD mode (2000TV lines) ❙ 6 Mega-pixel, 2 Mega-pixel x 3CCD mode (1200TV lines)
❙ 18 Mega-pixel ultra-high-definition mode (2000 TV lines) ❙ 2.11 Mega-pixel normal mode (1000TV lines)
❙ 8 Mega-pixel high-definition mode (1600TV lines)

Camera-shake correction function eliminates the influence of

vibration
Through further improvement of the processing
capacity, the VHX-1000 has real-time camera-shake
correction. This function allows high-magnification
observation without being affected by environmental
vibration. Without camera-shake correction With camera-shake correction

Frame rate of 15 FPS for smooth observation

With a frame rate of 15 frames/second, the VHX-1000 provides excellent tracking ability, allowing
magnification change and focal adjustment to be performed smoothly.

5
 BASIC CONCEPT

Obse r vat ion

4 Observation under optimal lighting

conditions
With one click, e-Preview Mode allows you to view the target
under nine different lighting scenarios.
By simply pushing the Optimal Image button,
nine types of image modes are displayed.
From there, you can quickly select the
lighting scenario that is ideal for your target
observation.
Normal Sharpen Image Light shift

Selectable with a click!

Glare removal Glare removal + Sharpen HDR + Light shift

Image
Just press
a button

Solar cell (500x) HDR1 HDR2 HDR3

Glare removal function suppresses reflectivity on a target

One of the lighting optimisation functions
available has the ability to remove the glare on
a highly reflective target. Our glare removal
function can remarkably reduce the time
required for illumination adjustment.

Gold plating (150x)

Just press
a button

Light-shift function enhances projections and depressions

By simply pushing the Height Difference
Enhancement button on the console, the
illumination mode is instantaneously switched
to partial illumination to enhance target edges.

Grain (250x)
Just press
a button

Full illumination Partial illumination

A full ring light is illuminated at Only one-fourth of the illuminations
the tip of the camera/lens unit. at the tip of the camera unit turn on.
The projections and depressions
are enhanced.

6
5 Simultaneous observation by several
people
Quick analysis with image projection
Magnified images are displayed onto a 17-inch high-resolution monitor, enabling several people to
observe and discuss the images simultaneously on-site.

6 Comparative observation
Split-screen function
The screen can be split into two (horizontally or vertically) or four sections enabling comparative
observation. This could be applied to a wide variety of applications including comparing an acceptable
part to a defective one, or showing a macro-image and magnified image side-by-side.

Vertical two-part split Horizontal two-part split Quarter split

7
 BASIC CONCEPT

Obse r vat ion

7 Wide magnification range from 0x to

5000x
Covers a full range of magnification, fulfilling every need
The VHX-1000 enables a wide range of microscopic observation from macro-scale stereoscopic imaging
to the detailed analysis of an SEM. Many techniques are also supported including transmitted light
observation, polarised light observation and differential interference observation.

Electronic microscope
Stereoscopic microscope Metallographic microscope
(SEM)

RZ Lenses covering 0x to 5000x support every application.

Real Zoom Lens

8
Wide range of microscopic observation

Stereoscopic
microscope range
Macro-observation

PC board (10x) PC board (50x)

Metallographic
microscope range
Surface feature observation

Metal structure (400x) IC (300x)

Electronic
microscope range
Detailed analysis

TFT (5000x) Fracture surface of glass fibre reinforced resin (500x)

Every application supported

Transmitted light observation Polarised light observation Differential interference observation
Bright field

Differential
interference

Cell (2000x) Plastic gate section (50x) Surface of ACF (500x)

9
 BASIC CONCEPT

Re cord i ng
Data saving to report making

1 Saving images on-site

Save data onto a high-capacity HDD and manage data with
an original high speed filing system
Observed images can be easily recorded on-site using an integrated, high-capacity 160GB HDD. Our
original high speed filing system ensures stress-free handling of high-volume images. File names, titles,
organisation names, lenses and magnifications used and comments can be registered, providing for quick
image searches.

Applicable file format: JPEG, TIFF, and

WDP (Windows Media Photo)

Video record/replay function for observation of chronological

changes
The VHX-1000 is equipped with a Video record/replay function that can accurately and completely
records chronological changes and subtle movements of the target. Data can be recorded for up to
an hour, at up to 28 frames per second. You can fast forward, advance the frame, and capture a still
image from the video. Furthermore, the video is recorded as an AVI file that can be replayed with
the VHX-1000 or a computer.

Video recordings up to 1 hour long

Solder separation test (50x)

Timer capture function for lengthy unattended observation

The VHX-1000 can automatically save images based on a time
setting. Using the LAN function, you can observe the images
being captured by having them sent directly to your personal
computer. The light used for observation is automatically
turned off between image captures, saving the life of the lamp.
Bacterial growth

10
2 Network compatible
Quick information sharing
The VHX-1000 can be connected to a network via LAN. This allows quick and easy sharing/transfer
of images with other departments or remote locations. This image and data sharing ensures speedy and
accurate action in urgent situations.

Quality assurance/Research/Development departments Manufacturing/Engineering departments

Company LAN

VHX-1000

Network

Other factories Overseas offices

3 PC mode for report preparation

Immediate report preparation on-site OBSERVATION REPORT
PC mode allows installation of Microsoft Word or Excel
Device: KEYENCE VHX-Series
onto the microscope unit. You can prepare reports on-site
File name
immediately after observation or image capture. [Link]
Captured on
**, **

Various antivirus software

Date
**, **
Capturing
programs supported Title
conditions
Magnification:
500x
Subtitle
Various antivirus software programs can also be installed as Prepared by Lens: VH-Z500

needed.

11
 BASIC CONCEPT

Mea su reme nt
The digital microscope has various dimension measurement tools with easy operation.

1 On-screen real-time measurement

Total of 13 measurement modes for on-screen, real-time
measurement
With the added modes, the VHX-1000 offers a wider range of measurement with 13 modes in total.
The basic operation has also been greatly improved by allowing measurement point re-positioning and
measurement-free display functions.
DISTANCE RADIUS CENTRE DISTANCE X-Y DISTANCE

D
Y
X

The distance between two points on the The radius of the circle can be measured by Specify three points on the circumference of The longitudinal (X-direction), transversal
screen can be measured by specifying the specifying the three points on the circle. two separate circles to find the coordinate of (Y-direction), and diagonal (D-direction)
points with the cursor. the circle centre. The distance between two distances of a rectangle formed by four
circle centres can be measured by specifying coordinate axes (two in the X-direction and
two circles sequentially. two in the Y-direction) can be measured at
one time.
AREA/COUNT/AUTO MEASUREMENT DISTANCE BETWEEN PARALLEL LINES
The target of the measurement can be extracted automatically by differentiating the The shortest distance between two parallel lines can be measured by specifying two points
brightness and colours in the image. The area and the perimeter length are measured. that draw a line and another line parallel to the first line.
The number of extracted areas can be counted automatically as well.

LENGTH OF PERPENDICULAR LINE ANGLE

The shortest distance (perpendicular line) between a line specified by two points and The angle determined by three selected points on the screen can be measured.
another arbitrary point can be measured.

OVERLAY SCALES
A bar, mesh, cross and other various shapes can be displayed as a scale. These can
be conveniently used as the reference scale for simplified measurement or for printing
the images.

Support functions for improved measurement accuracy

Multi-point input Edge lines are determined using the least squares method to ensure accurate measurement results.

The edge of a target is detected and then the measurement point is corrected automatically. This ensures reliable measurement
Auto edge selection by eliminating human error.
High-resolution dimensional Measurement points can be specified on an image of 4800 x 3600 pixels (9 times larger than normal). This improves the
measurement accuracy of dimension measurement.

Auto calibration Automated calibration according to the observation magnification can be performed using the special glass scale (OP-51483).

Automatic Lens/Zoom Recognition function DOUBLE‘R

By combining KEYENCE’s advanced sensor technology and accumulated microscopy/optical expertise,
a brand new technology has been formed. Now it is possible for the VHX to not only recognise (in real
time) which lens is mounted to the camera, but also the current magnification being viewed. Calibration
is not required every time magnification is changed. In addition, the magnification setting, required for
3D observation, is unnecessary. Typical mistakes that are made when selecting magnification will not
occur, resulting in a much smoother, more accurate measurement process.

New system having both lens and zoom recognition

[Double Recognise]

Lens compatible with DOUBLE‘R: VH-Z00W/VH-Z20W/VH-Z100W/VH-Z100UW/VH-Z250W/VH-Z500W/VH-Z50W

* Using the DOUBLE'R with the VHX-500F requires the purchase of the OP-84263 (optional DOUBLE‘R unit).

12
2 Fusion of a digital microscope and
a measuring microscope
X-Y Measurement System
VH-M100 NEW
Moving the manual stage allows you
to measure a target in sizes of up to
100 mm x 100 mm. Even a target with
a size larger than the field of view limit
can be measured. You can perform both
monitoring and measurement of a target
with a single microscope.

Ensuring traceability to achieve reliable measurement

The X-Y measurement system ensures highly reliable measurements based on the traceability system to
international standards.

Measurement software for further improved usability

VHX-H1M1
Real-time screen display
The XYD measurement results are displayed on the monitor screen in real time.

Various measurement modes

Distance, radius, angle and other various measurement modes are included.

Wide image capturing

Once a wide image captured under low magnification is registered, the current measurement point is
always indicated even after the field is changed under higher magnification. The measurement point
can be easily checked for an entire image.

X-Y measurement Specifications

system Model VH-M100
Display unit
VH-M100 Stage stroke distance
100 mm in the X and Y directions,
OP-84483 respectively
The display unit is useful Display resolution 0.1 µm
when the moved distance Movement accuracy 4 + 0.02L (µm)*
cannot be confirmed on
Power supply
the monitor. 100 to 240 VAC 50/60 Hz
voltage
Ratings
Current
50 VA
consumption
Transmission Ambient
illumination unit Environmental temperature 5 to 40°C
resistance
OP-84484 Relative humidity 35 to 80%, No condensation
Clearly projects edges Weight 18 kg
of a target Load capacity 3 kg
* “L” means movement distance (mm).

13
 A l l -i n - O n e D e s ig n

All functions for Observation, Recording and Measurement

have been integrated into a single unit
In one unit, the VHX-1000 encompasses a 17-inch LCD monitor and high-capacity HDD. This design enables
usage in every scenario from portable on-site observation to high resolution image capture. This unit is
heavily utilised in various areas including research, development, quality assurance, and manufacturing.

LAN Hard disk drive

CD-R/RW/DVD

Light source
17-inch LCD
monitor

USB2.0

Lens CCD camera

Just direct the lens Observation is possible

toward the target. anytime, anywhere.

14
WUXGA high-resolution LCD monitor
The VHX-1000 features a WUXGA (1920 x 1200 pixels) high-resolution 17-inch LCD monitor. Its wide
viewing area offers clear images even when viewed from an angle, which is also useful for simultaneous
observation by several people.

Easy-to-use interface
The ultimate interface has been incorporated to make full use of the advantages of the wide monitor.
The navigation window displayed on the right provides operation procedures and function explanations,
allowing even first-time users to utilise advanced functions.

Menu display
Self-explanatory icons allow
intuitive operation.

Navigation
window
Brief function instructions allows
easy operation even for first-time
users.

Many functions to simplify the imaging process

❙ Side Album
Selected folders are listed in the side album and can be pulled up on the main
screen using the drag-and-drop operation making it easy to save or retrieve
images.

❙ Observation Condition Reproduction Function

When an image is saved in the side album, its observation conditions are
also saved together automatically. If you want to observe a target with the
same conditions, you can set them easily and accurately by just reading the
saved conditions from the file.
Side album

15
 E a s y O p e r a t io n fo r Eve r yo n e

Easy-to-use console
Commonly used functions can be accessed from the handheld
console.
The console is designed to help perform observation more quickly and easily. Only commonly used
functions are provided on the console, allowing you to observe a clear image of any target with the
press of a button. From the VHX-1000, a jog focus function has been added, allowing easy fine focus
adjustment to enable precise observation

Measurement Camera-Shake Correction

Pause High Definition (HD) Image

Remove Glare Lighting Shift

Record Optimal Image

Quick Composition Range

& 3D

High Dynamic Range (HDR)

Image Stitching

Auto Focus Jog Focus

Z-axis automatic
head
Auto Focus & Jog Focus are made possible
VHX-S50F
with the motorised stand
Attaching the Z-axis automatic head to the free-angle observation
system enables motorised focus control. Use the auto focus to
simply adjust focus on the target. Accurate focus can be achieved
by just pressing the console button, saving observation time. To
adjust focus manually, the jog focus is useful to allow fine control
at your fingertips.

The focus position changes

according to the jog focus control.

You can also use

the mouse wheel
instead of the jog
focus dial.
Fractured surface of aluminium (200x)

16
Transfer and process images on your PC
Communication software is available to extend the VHX
image processing capability to your PC.
The main functions used with the VHX-1000, including 2D measurement, image stitching, 3D
composition and measurement and HDR, can also be carried out on your PC. (The software can be
downloaded free of charge on the special VHX site.)

The main functions of

the VHX-1000 can be
performed on your PC.

[ Full Use of Stitched Images ]

Wide-field images can be enlarged or
reduced as desired
Captured wide-field images can be browsed through
high-speed processing. This allows stress-free
operation including enlarging or reducing and 2D Bump

measurements of stitched images.

[ Full Use of 3D Images ]

3D observation on your PC
All information to create 3D images is stored. You
can observe 3D moving images as well as still images. Solder paste(300x)
Also, you can later observe the saved 3D images on
your computer from any angle.

[ Full Use of HDR Images ] Printing

Comparison of images under several (400x)

conditions
An enormous amount of information beyond the display
limit of the monitor has been stored and can be set as
desired on your computer screen. You can adjust items
such as brightness, colour, and texture (pattern) to
Observation after Observation after Observation after colour
emphasise the desired conditions. contrast adjustment texture (pattern) adjustment
enhancement

17
 ADVANCED World's First 16-bit gradation exponentially increases the level of observable colour gradation
FUNCTION
High Dynamic Range (HDR) Function

Conventional 8-bit gradation

Low contrast and transparent objects can now be

imaged with high levels of detail.
With traditional 8 bit colour resolution, observation of transparent or low-contrast targets was nearly
impossible. The High Dynamic Range (HDR) function provides images with rich gradation using an
overwhelming amount of information. Furthermore, the original algorithm automatically determines image
processing suitable for the current image.

Rendering detailed
images of areas with
low colour gradation

Processed with conventional colour resolution (8-bit) HDR (16bit)

Rendering accurate
images of a target with
glare

Processed with conventional colour resolution (8-bit) HDR (16bit)

18
 HDR
16-bit

Printing (400x)

High performance graphic engine “REMAX III”

with 16-bit colour resolution
The advanced high performance graphic engine allows you to capture images in 16-bit gradation through RGB
data from each pixel, instead of conventional 8-bit data. This enables target profiles to be accurate in a way that
is not possible with conventional systems. Furthermore, the obtained images are stored as 16-bit data, allowing
you to more acutely observe images as needed.

High Dynamic Range The camera captures multiple colour images in different brightnesses while changing the shutter speed, and
then produces an image with high level gradation data. The range of obtainable brightness widens, resulting in

HDR function the accurate representation of targets with glare as well as rendering detailed images of areas with low colour
gradation.

8-bit (256 levels of gray) 16-bit (65536 levels)

Conventional method HDR function

Gradations obtained
by opening the
shutter
Resolutions obtained
by opening multiple Conventional
shutters 256x levels

Difficulties Solutions
❙ The range of obtainable brightness is narrow, resulting in the glaring ❙ The range of obtainable brightness is wide, diminishing the perceived glare.
of areas beyond the range. ❙ Subtle contrast can be rendered because of detailed gradation.
❙ Subtle contrast cannot be rendered because of coarse resolutions.

World's First [Moving image] HDR + Quick 3D display

The HDR function can now be applied to a live image to allow HDR+ Quick 3D display. This allows 3D observation
with fine texture expression.

19
 ADVANCED Fastest in industry Further simplified 2-step operation
FUNCTION
Quick depth composition & 3D display function

Objects with multiple planes of focus could never be observed clearly and
completely in focus at one time.

Focus position: Lowest part Focus position: Middle part Focus position: Highest part

Just press
the console
button.

Observation of a fully focused image and a 3D

display of the target is impossible with conventional
optical microscopes.
Even when the target has an uneven surface, a fully-focused image can be obtained instantaneously by
compiling images of different focus positions. The 3D display allows surface shape observation from various
angles. When the Z-axis electric stage is used, this quick 3D image can be displayed easily by just pressing the
console button twice.

Accurate [Link]
We have adopted a new algorithm that uses the fine
changes in texture to estimate height data. Building
on our depth-up feature, whereby a fully focused
image can be constructed from a small number of
images, the D.F.D. method facilitates the accurate
construction of a 3D model allowing for versatile
observation in three dimensions. Conventional image Accurate D.F.D Bolt (100x)

D.F.D.=Depth from Defocus

The D.F.D. method is the process by which the VHX can 1.) Compile a completely in-focus image, or
2.) Generate data to compile a 3D model. The D.F.D. method analyses the level of contrast, or focus Method in which
at each level of the target. By using the degree of blurring, the D.F.D. method can calculate height accurately focused
images are
information for each pixel, thereby enabling the compilation of a 3D model or a completely in-focus stacked
image. Even if a pixel cannot be captured in perfect focus, a calculation is made to generate height D.F.D. processed
data. The D.F.D. method exponentially increases the efficiency of a 3D construction. image

20
 IMAGE AFTER DEPTH COMPOSITION 3D DISPLAY

Observing the target in complete focus allows for quick, detailed Detailed topographical features not visible in two dimensions
analysis of the entire object. are observed.

Just press
the console
button.

Auto Adjust function to prevent edge displacement

during depth composition
Edge displacement and image blurring due to
camera-shake while capturing an image with a
non-telecentric lens are automatically corrected,
and a comprehensive, completely focused image
is constructed. This method is at least five times
faster and more accurate than conventional position
correction methods, and obtains accurate information
even for easily distorted, low magnification areas. Conventional image Adjusted by the Auto Adjust Function

By combining our Glare Removal and Quick 3D

Display functions, even highly reflective objects can
be used for a quick 3D compilation.
Once applicable only to still
images, we’ve now enabled the
glare removal function to be used
on live images and 3D display.
By removing the ref lectivity, the Solder (200x)

accurate 3D display of the target

surface becomes possible. Conventional image Image subjected to glare removal and
Quick 3Ddisplay processing

21
 ADVANCED
FUNCTION Digital microscope for 3D shape measurement

Easy, on-screen 3D profile measurement

The VHX-1000 creates a 3D image based on automatically captured images, and it calculates
height profile data on a desired measuring line. Height, width and height difference data
on the measuring line are plotted on a graph. Since the profile graph is related to the cursor
position in the image display area, you can see the current measuring point easily.

With the horizontal/vertical cursor, the height and

width can be measured. The 2-line comparative
mode can simultaneously display comparative
analysis profile data on two parallel lines.

Electronic die component

(500x)

Colour topographical overlay allows you to see height

differences at a glance
Colour bars that indicate height are displayed on a 3D image. The highest position is displayed in red, and the
lowest position is displayed in blue, allowing you to see a height difference at a glance. The height data can be
superimposed on a raw image. Furthermore, the X-axis, Y-axis and Z-axis scales are calculated automatically
and displayed according to the image size and the 3D rotation angle.
3D raw image 3D raw image + Topographic image 3D topographic image

Electronic die component (500x)

A target can be quickly measured in real-time

3D display mode
Various measurements are available on the 3D image. During 3D observation, you can make the desired
measurements.
Volume Cross section profile Plane distance Plane angle

The volume within the selected rectangle A selected cross-section of the 3D image A distance between two parallel planes A cross section angle of two chosen
on the 3D image can be measured. can be displayed as a profile line. in the 3D image can be measured. planes in the 3D image can be measured.

22
All-in-one 3D profile measurement system including
a precision motorised stage for 3D measurement
The precision linear stage and newly-developed shape measurement functions allow integrated operation of
magnified observation and automatic 3D shape measurement. All of the steps from stage operation, magnified
observation, 3D analysis to image saving can be controlled with the VHX unit. This integration significantly
reduces image capture and analysis time.

Electric stage
VHX-S15F

Electric stage
VHX-S15H

Controller Vibration-resistant, high-magnification Free-angle observation system

VHX-S15CE observation system VH-S30
VH-S5

Specifications Option
Model VHX-S15CE/H (VHX-S15F) 2. Digital indicator set
Stage stroke distance 15 mm OP-51610
Motor 5-phase stepping motor Digital indicator for direct
Resolution 0.05 µm/pulse measurement of the lens
Positioning accuracy 1. 6 µm stroke distance, ensuring
easy calibration
Repeatability 1. ±0.5 µm
Power supply
100 to 240 VAC, 50/60 Hz
voltage
Ratings
Power
70 VA
consumption
Ambient temperature 5 to 40°C
Relative humidity 35 to 80%, No condensation
VHX-S15CE (Controller): 3 kg, VHX-S15H (Electric
Weight
stage): 1.3 kg, VHX-S15F (Electric stage): 3.2 kg
Load capacity 5 kg
1. Positioning accuracy and repeatability specifi cations apply to the motorised stage
2. The motorised stage for the VH-S30 is the VHX-S15F.

23
 ADVANCED World's First Observation area expanded by 50 times under the same high magnification
FUNCTION
Real-time 2D & 3D image stitching

High-magnification
observation area
expanded by 50 times

REAL-TIME IMAGE
STITCHING Conventional field

10000
pixels 1200
pixels

Seamless,
high-definition
1600 pixels image

Up to 10000 x 10000 pixels

can be manually added to the
observation area.

10000 pixels

Obtain high-resolution images with a large

field-of-view
Unlike conventional methods, which perform stitching after capturing all images using a motorised stage,
we have developed a completely new image stitching algorithm. When the user shifts the field of view using
a manual stage, the area is stitched together in real time. The field of view can be expanded from a normal
field (1600 x 1200 pixels) to 10000 x 10000 pixels at maximum, while the high-magnification sharpness is
maintained.

1 2 3

Normal field of view (1600 x 1200 pixels) Shift the field of view into the direction that you wish Up to 10000 x 10000 pixels
to expand.

The real-time image stitching

Low magnifi cation High magnifi cation Image stitching
function has the advantages
Field of view Wide OK Narrow NG Wide OK
of both low and high
Depth of fi eld Deep OK Shallow NG Deep OK
magnification observation.
Resolution Low NG High OK High OK
3D display Impossible NG Possible OK Possible OK

24
Wide-field 3D image also possible

3D IMAGE STITCHING
Wide-field 3D display allows easy
understanding of the target as a whole

10000
pixels

10000
pixels

3D image created using

the standard field of view
1200
pixels
1600
pixels

Because of the large depth of focus, it was impossible

to obtain a 3D topography at low magnifications.
A 3D image is built based on 3D depth information
obtained from the amount of out-of-focus blurring.
Our low magnification lenses boast a large depth of High

field, making it impossible to distinguish different Full focus Middle

layers of focus. Consequently, it was impossible Low
to construct a 3D profile at low magnification. By
stitching together higher magnification 3D images,
Height information cannot be obtained from a fully-focused image under low
we are able to decipher the depth information over a magnification. From a high magnification image, such information can be
large field of view. This algorithm has allowed for obtained by changing the focus positions.

macro-level 3D compilations.

World's First Target focus method: Technology for real-time image stitching
Once data in the Z direction is obtained within the
initial field of view, the "Z" positioning of the next
1. Initial field 2. Moved field
section is determined through live pattern-matching
algorithms. This method is critical in achieving a
manual 3D image stitch.

The range of the depth

During the Pattern Matching Operation,
composition is determined.
the focus position is tracked based on the
obtained height information.

25
 L e n s Li n e u p a n d Te c h n olog y

KEYENCE continually strives to evolve their optical lens lineup

We make it our priority to continuously ask ourselves: “What can we do to provide the highest resolution images?” and “What
features will ensure the best operability?”. We aim to use all of the best and newest technologies in the development of our
digital microscope lenses.

26
RZ Lenses − Highest Resolution in the Industry Real Zoom Lens

Along with minimising chromatic aberration and distortion, the RZ lens features an advanced telecentric design.
You can obtain a comprehensive, exceptionally clear image, even when constructing a depth composition or 3D image.

High-Performance Low-Range Zoom Lens

0 50
VH-Z00R/Z00W

From the whole target to a Model VH-Z00R/Z00W

magnified image Magnification 1. 0.1× 0.5× 1× 5× 10× 30× 50×

Monitoring range
In a range from 0-50x, the target can Horizontal 3200 640 320 61 30.5 10.2 6.1
be viewed from its entirety down to a

(mm)
magnification. This macro lens excels in Vertical 2400 480 240 45.5 22.8 7.6 4.6
workability and high performance with
click-style magnification, an aperture Diagonal 4000 800 400 76.2 38.1 12.7 7.6
mechanism and a viewing distance of Monitoring distance Approx. Approx. Approx.
95 mm or more. 95
(mm) 7700 1500 720
1. Magnifi cation on a 15-inch monitor

Ultra-Small, High-Performance Zoom Lens

20 200
VH-Z20R/Z20W

High resolution, ultra- Model VH-Z20R/Z20W

small high-performance Magnification 1. 20× 30× 50× 100× 150× 200×
zoom lens
Monitoring range
Horizontal 15.24 10.16 6.10 3.05 2.03 1.52
The VH-Z20R/Z20W offers high-
(mm)
resolution observation at general Vertical 11.40 7.60 4.56 2.28 1.52 1.14
purpose magnifications of 20x to
Diagonal 19.05 12.70 7.62 3.81 2.54 1.91
200x. Furthermore, the large depth
of field, that is a feature of the Depth of field 2.
(mm) 34 15.5 6.0 1.6 0.74 0.44
conventional VHX Series, has been
further enhanced. Monitoring distance
25.5
(mm)
1. Magnifi cation on a 15-inch monitor
2. The value when the lens is set with priority to depth of fi eld. The depth of fi eld
changes depending on the setting for the iris diaphragm ring.

Wide-Range Zoom Lens

100 1000
VH-Z100R/Z100W

Wide-range zoom lens Model VH-Z100R/Z100W

offers high resolution and Magnification 1. 100× 200× 300× 500× 700× 1000×
large depth of field
Monitoring range

Horizontal 3.05 1.53 1.02 0.61 0.44 0.30

This innovative lens was developed to
(mm)

satisfy the contradictory needs of high Vertical 2.28 1.14 0.76 0.46 0.33 0.23
resolution and high depth of field for
Diagonal 3.81 1.90 1.27 0.76 0.54 0.38
magnified observation.
Monitoring distance
25 (20 2.)
(mm)
1. Magnifi cation on a 15-inch monitor
2. The Dual Light Base Unit (OP-84430) and the Adjustable Illumination (OP-72402)
are attached.

Universal Zoom Lens

100 1000
VH-Z100UR/Z100UW NEW

Differential Interference Model VH-Z100UR/Z100UW

Contrast (DIC) observation Magnification 1. 100× 200× 300× 500× 700× 1000×
is made possible with the
Monitoring range

Horizontal 3.05 1.53 1.02 0.61 0.44 0.30

universal type
(mm)

Vertical 2.28 1.14 0.76 0.46 0.33 0.23

Bright/dark field, polarisation and
Differential Interference Contrast (DIC) Diagonal 3.81 1.90 1.27 0.76 0.54 0.38
observation can be performed with
Monitoring distance
the VH-Z100UR/Z100UW. Differential 25 (20 2.)
(mm)
Interference Contrast (DIC) observation
makes it possible to clearly visualise 1. Magnifi cation on a 15-inch monitor
2. The Dual Light Base Unit (OP-84430) and the Adjustable Illumination (OP-72402)
both projections and depressions, which
are attached.
are difficult to observe with bright field
observation.

The DOUBLE‘R compliant VH-Z00W/Z20W/Z100W/Z100UW lenses are fitted with Automatic Lens/Zoom Recognition units.

27
 Real Zoom Lens

Dual Light High-Magnification Zoom Lens

250 2500
VH-Z250R/Z250W NEW

During observation, Model VH-Z250R/Z250W

illumination for dark field Magnification 1. 250× 300× 500× 1000× 1500× 2000× 2500×
and bright field can be

Monitoring range
Horizontal 1.22 1.02 0.61 0.31 0.2 0.15 0.12
easily switched

(mm)
Vertical 0.92 0.76 0.46 0.23 0.15 0.11 0.09
This lens incorporates dual illumination
mechanisms: coaxial vertical Diagonal 1.52 1.27 0.76 0.38 0.25 0.19 0.15
illumination and ring illumination.
Monitoring distance
(mm) 6.5

1. When displayed on a standard 15-inch monitor.

High-Resolution Zoom Lens

500 5000
VH-Z500R/Z500W

This zoom lens is the Model VH-Z500R/Z500W

pinnacle of optical lenses Magnification 1. 500× 1000× 2000× 3000× 5000×

Monitoring range
This zoom lens incorporates high- Horizontal 610 305 152 102 61
quality fluorite optics to provide the

(µm)
highest resolution in its class. The Vertical 457 229 114 76 46
advanced 3D display function precisely
reproduces images. Diagonal 762 381 191 127 76
Monitoring distance
(mm) 4.4

1. Magnifi cation on a 15-inch monitor

The DOUBLE‘R compliant VH-Z250W/Z500W lenses are fitted with Automatic Lens/Zoom Recognition units.

RZ Lens Features

Highest Resolution in the Industry

Approx. 2x Conventional Lenses
These lenses have achieved the highest resolution in their
class by bringing together the know-how acquired during
long-term microscope development and the essence of
KEYENCE’s optical technology. They complement the
abilities of the microscope offering higher-quality CCD
images. Conventional lens RZ lens

Wide Range Zoom

10x Optical Zoom
The RZ lens is designed for a wide zoom range,
seamlessly covering from the whole image to an enlarged
view of a target. Since the RZ lens retains a constant
observation distance throughout the zoom range, it can
improve operating efficiency. It is an all-around zoom
lens applicable to any target. TFT (500x) TFT (5000x)

Highly-telecentric zoom lens

With a highly-telecentric lens design, the RZ lens can
create extremely clear and perfect depth composition
and 3D images. The RZ lens can make the best use of the
digital focus functions that are an essential feature of the
VHX Series.

Battery safety valve (700x) Electrode hole (1000x)

28
Long Working Distance LW Lenses Long Working Lens

LW Lens – Clearly view targets at high magnification from long range. Like the RZ Lenses, this lens also excels in telecentricity
and allows the digital focus function to be used to its fullest extent.

Maximum Magnification

500x
Viewing
Distance
VH-Z50L
85 mm
Viewing Distance

85 mm Conventional lens
46 mm

Long-Focal-Distance, High-Performance Zoom Lens

50 500
VH-Z50L/Z50W NEW

Long Range Lens with a Model VH-Z50L/Z50W

85 mm Viewing Distance Magnification 1. 50× 100× 200× 300× 400× 500×

Monitoring range
When you want to view the target at Horizontal 6.09 3.05 1.53 1.02 0.76 0.61
high magnification from a distance.

(mm)
Presenting a long range lens which Vertical 4.57 2.28 1.14 0.76 0.57 0.46
defies optical microscope conventions.
Sections can be viewed that couldn’t Diagonal 7.62 3.81 1.90 1.27 0.95 0.76
until now. Monitoring distance
(mm) 85.0

1. Magnifi cation on a 15-inch monitor

The DOUBLE‘R compliant VH-Z50W lens is fitted with an Automatic Lens/Zoom Recognition unit.

LW Lens Features

Long Working Device 85 mm Viewing

Distance
With cutting-edge optical design and advanced
illumination technology, the LW lens has achieved
a 85 mm viewing distance at a maximum 500x
magnification. The recesses of the target can be clearly
captured. Since you can also ensure working space,
observation efficiency is dramatically improved. Easily View the Target's Recesses Aluminium Surface (500x)

Wide Range Zoom

10x Optical Zoom
Wide range design can be used to seamlessly view the
target from its entirety to a magnification. Since the
magnification can be changed while maintaining an
85 mm viewing distance, work efficiency is greatly
improved.
Solder Cross-Section (50x) (500x)

Deep Depth of Field

Approx. 3x Conventional Lenses
Deep depth of field, the microscope’s greatest feature,
is further improved. With a depth of field 3x or greater
than conventional lenses, you can clearly view irregular
targets.

Screw Surface (200x) VH-Z50

Conventional Lens VH-Z75

29
 Free-Angle Observation System (Motorised Z-Axis) VHX-S50

Simple, versatile and intuitive operation

Motorised Free-Angle Stand
This system tilts the lens and rotates the stage, maintaining the field of view from every direction in 360
degrees. Attaching the Z-axis automatic head allows motorised focus control.

0°

15° 0°
15° Quick Setup Marks
30°
45°
30°
45° Easy-to-Adjust

45°
60°
45°

Cable Holder
60° The cable is held in place preventing
vibration. The cable is also protected
against abrasions and deterioration.
Angle

75°

90° 90°
Oblique axis
120°

Rotation
axis 0°

Stability
90°

Vibration-Proof
Rubber Feet
60°

Easy-to-Adjust Vibration-Proof Rubber

Easy focus adjustment, X-Y stage movement, rotation and Absorbs low to high frequency vibration,
oblique axis motion. A custom mechanism allows the target allowing for observation of specimens
to stay centred in the field of view, even when the lens unit is without interference.
inclined or rotated.
Specifications
Quick Setup Marks Model VHX-S50/VHX-S50F
VH-Z00R/W, VH-20R/W, VH-Z50L/W,
The ideal setting position for different lenses is indicated on Applicable lens
VH-Z100R/W, VH-Z100UR/UW, etc.
the arm. Stage stroke distance Electric: 29 mm, Manual: 33 mm
Motor 2-phase stepping motor
Stability Resolution 1 µm (typ)
Ambient temperature 5 to 40°C
The die-cast main body provides a highly rigid structure that Relative humidity 35 to 80%, No condensation
allows for more stable observations. Weight 13.5 kg (VHX-S50), 2.5 kg (VHX-S50F)

30
Vibration-Proof, High-Magnification Observation System VH-S5

High stability through a low centre of gravity

The special rigid structure provides more vibration resistant, high magnification images.

Anti-Vibration System

The vibration resistant rubber is

the same material used for vision Stability
inspection systems and high-
accuracy measurement devices
in the semiconductor, R&D, and
automotive industries.

Vibration- 3-Axis Rotation

Proof Mechanism
Rubber

Vibration-Proof Rubber Aluminium Die Casting

A special vibration proof material has been selected to insulate the Aluminium die casting is the process of forcing molten
VH-S30/S5. It is designed to absorb a broad range of vibrations in aluminium under high pressure into mold cavities. It allows
order to provide stable images of highly magnified objects. for the creation of high precision casts, such as automotive
components and precision machinery parts.

Anti-Vibration System Stability

The cable is tightly held in place, completely eliminating subtle The die-cast main body
vibrations during high-magnification observation. provides a highly rigid
structure that allows for
more stable observations.
3-Axis (X/Y/Ө) Rotation Mechanism
This mechanism helps everyone to perform fine position
adjustments in high-magnification observations. Furthermore,
removing the stage enables transmitted illumination.

31
 Various Optical Adapters Applicable lenses: VH-Z20R/Z20W/Z25/Z100R/Z100W/Z100UR/Z100UW

State-of-the-art illumination technologies for creating

ideal lighting conditions

Variable Illumination Adapter

Using the original KEYENCE optical mechanism, you are able to adjust the angle of incidence of the lighting to emphasise or
minimise surface topography. This adapter significantly increases the amount of surface feature details that can be observed.

VH-K20
Standard illumination Paper surface (200x) Variable illumination

Coaxial Vertical Illumination Adapter

The coaxial vertical illumination adapter emits light parallel to the lens axis (bright-field observation). Using this adapter,
the microscope can retain sufficient light quantity for illumination. This adapter is useful for observation of metal
microstructures, IC, etc. in a bright visual field.

OP-35416 When the adapter is not used IC (1000x) When the adapter is used (Bright field illumination)
(Dark field illumination)

Polarisation Illumination Adapter

Effective for suppressing glare during observation through a transparent film or coating.

OP-35415
Standard illumination Printed material (30x) Polarising illumination

Diffuse Illumination
You can observe real surface conditions without the glare of a target. The diffuse illumination adapter emits both vertical and
lateral illumination.

Diffuse illumination Super-diffuse

adapter Illumination adapter
OP-35324 OP-42305

Non-contact diffusion
adapter Standard illumination Solder (200x) Diffuse illumination
Multi-diffuse adapter
OP-35414
OP-35469

32
Standard Model VHX-500F

All-in-one design allows observation, recording and

measurement
Inheriting the basic style of the digital microscopes, the VHX-500F allows users to leverage various functions
for magnified observations such as the depth composition and the 3D display. This is a standard model of the
VHX Series with a superb cost performance.

2.11 million pixel handheld camera All-in-one design

With 2.11 million pixels, this compact camera enables you to All the functions you need have been loaded into the compact
make crisp and clear observations easily, without having to VHX-500F. You can perform observation, recording and
perform destructive testing. measurement with this single instrument.

Depth composition 3D image display

Simply by turning the focus adjusting dial, you can bring With our proprietary Accurate D.F.D. method, you can construct
the entire field into sharp focus, even for targets with highly 3D images, enabling you to readily understand phenomena that
uneven surfaces. are difficult to grasp in two-dimensional images.

Optimal contrast
Built-in 80 GB HDD
With the contrast algorithm, the VHX-500F automatically adjusts
The unit is equipped with an 80 GB hard disk drive, capable the contrast in accordance with the sensitivity of the human eye,
of storing approximately 400,000 images (when using image adjusting areas of an image that are too bright or dark, while
compression). You can easily upload files to a computer over leaving areas that already have the proper contrast as is.
a LAN.

33
 VHX Series System Line Up
System configuration

RZ LENS 2.

High-resolution VH-Z500R/Z500W 3.
Polarisation illumination adapter
OP-51649 zoom lens
500x to 5000x

VH-Z250R/Z250W
Polarisation observation set
OP-86927 Dual-light
High-magnifi cation
zoom lens
250x to 2500x
Differential interference set
OP-86943

VH-Z100UR/
Contact adapter Z100UW 3.
OP-81880 Universal Zoom Lens
OP-72407 100x to 1000x
Coaxial polarisation adapter
OP-72406
(OP-72407 is required for polarisation)
VH-Z100R/
Z100W 3.
Darkfi eld illumination adapter Wide-range zoom lens
OP-72402 100x to 1000x
Dual light
base unit VH-Z20R/Z20W
OP-84430 Ultra-small, high-performance zoom lens
Diffuse illumination adapter 20x to 200x
OP-72403
VH-Z00R/Z00W
High-performance low-range zoom lens
Adjustable illumination adapter 0x to 50x
OP-72404
OP-72407
Polarisation illumination adapter LW LENS 2.
OP-72405 1.
(OP-72407 is required for polarisation) VH-Z50L/Z50W 3.
Long-focal-distance,
50x to 500x
Adjustable illumination adapter high-performance zoom lens
VH-K20

Super-diffuse illumination adapter ZOOM LENS

OP-42305
VH-Z25
Polarisation illumination adapter Zoom Lens
OP-35415 25x to 175x

Diffuse illumination adapter VH-Z35

Long-focal-distance
OP-35324
zoom lens
35x to 245x
Non-contact diffusion
OP-35414
VH-Z150
Multi-diffuse adapter Middle-range zoom lens
OP-35469 150x to 800x

Free head
OP-32348 4.

Coaxial vertical illumination

adapter
OP-35416
HYPER-VIEW LENS
Adjustable illumination adapter
VH-K150 VH-V100 (100x) VH-V200 (200x)

Non-refl ective illumination ring

OP-32009
VERTICAL-ILLUMINATION LENS
VH-C501 (500x) VH-C1001 (1000x)
LONG-FOCAL-DISTANCE LENS

VH-W50 (50x)
BORESCOPE LENS
VH-B
VH-W100 (100x) VH-B31 VH-B61

VH-B32 VH-B64
Lateral view
adapter
VH-W200 (200x)
OP-98535
BORESCOPE LENS 5.

OP-32666
FIXED-MAGNIFICATION LENS

VH-20 (20x) VH-200 (200x) OP-32681

OP-32662 OP-32665

OP-32663
VH-50 (50x) VH-501 (500x)

OP-32664
VH-100 (100x) VH-1001 (1000x)

34
 XY measurement
software
VHX-H1M1

3D shape
PC PC PC
measurement
software
VHX-H3M
Bayonet-type
standard VHX-1100
attachment 6.
OP-51478

VHX-1020

PC Communication software
(2D measurement, 3D/HDR
display software)
VHX-1000E LAN

CD-R/RW USB memory, etc.

Hard disk drive

Footswitch
USB

DVI (VHX-1000E)
RGB (VHX-500FE)

A large screen monitor. When several people need

to view a target simultaneously, connect a large
screen monitor. Since the target image is magnifi ed
Camera unit further on the large screen, it can be checked more
thoroughly.
3D Profile
Bayonet-type C-mount measurement Monitor
attachment VHX-500FE unit
OP-51479 VHX-S15CE

Camera lens (C-mount type)

DOUBLE‘R
recognise unit
7.
OP-84263
VH-F

Microscope 3D profile
measurement
software
VHX-H2MK

FIBRESCOPE 8. Option

VH-F61

VH-F111

Free-angle observation Free-angle observation VH lens mounting stand High-precision

system system (Z-axis automatic) (with XY stage) VH mounting stand
VH-S30 VHX-S50 OP-25539 + OP-22124 (with X-Y stage and
1. For the VH-Z100R/Z250R/Z500R/Z50L, OP-51647 is required. penetration illumination)
2. DOUBLE‘R compliant lenses VH-Z00W/Z20W/Z100W/Z100UW/Z250W/ Z500W/ VH-S5
Z50W are fi tted with Automatic Lens/Zoom Recognition units, respectively.
3. The optional light guide dedicated to the VHX Series is required.
OP-51480: VH-Z100R/Z100UR/Z500R/Z50L
4. OP-94841 and OP-51482 also needed with OP-35416.
5. The optional bore fibre cable (OP-33242) and the light guide attachment (OP-51482)
dedicated to the VHX Series are required.
6. OP-32348 is the special adapter for the VH-Z25.
7. A C-mount adapter suitable for the microscope is required. X-Y measurement system Transmission Display unit VHX lens mount X
8. The optional light guide attachment (OP-51482) dedicated to the VHX Series is VH-M100 illumination unit OP-84483 (for VH-S30)
required. OP-84484 OP-66871

35
 Specifications (Basic functions)

Controller
Model VHX-1000E VHX-500FE
1/1.8-inch, 2.11 million-pixel CCD image sensor 1/1.8-inch, 2.11 million-pixel CCD image sensor
Total pixels: 1688 (H) x 1248 (V) Total pixels: 1688 (H) x 1248 (V)
Image receiving element
Effective pixels: 1628 (H) x 1236 (V) Effective pixels: 1628 (H) x 1236 (V)
Virtual pixels: 1600 (H) x 1200 (V) Virtual pixels: 1600 (H) x 1200 (V)
Scan method Progressive Progressive
Frame rate 15 frames/sec. and 28 frames/sec. selectable 15 frames/sec. and 28 frames/sec. selectable
2 million pixels 1600 (H) x 1200 (V) Approx. 1000 TV lines 1600 (H) x 1200 (V) Approx. 1000 TV lines
1600 (H) x 1200 (V) Approx. 1200 TV lines
6 million pixels 1. 3.
2 million pixels x 3 CCD mode (Excellent colour reproducibility)
Resolution 8 million pixels 3. 3200 (H) x 2400 (V) Approx. 1600 TV lines
Camera –
18 million pixels 3. 4800 (H) x 3600 (V) Approx. 2000 TV lines
4800 (H) x 3600 (V) Approx. 2000 TV lines
54 million pixels 2. 3.
18 million pixels x 3 CCD mode (Excellent colour reproducibility)
High Dynamic Range 16-bit resolution through RGB data from each pixel –
Gain AUTO, NORMAL, PRESET AUTO, NORMAL, PRESET
AUTO, MANU, OFF, 1/15, 1/30, 1/60, 1/120, 1/250, 1/500, 1/1000, AUTO, MANU, OFF, 1/15, 1/30, 1/60, 1/120, 1/250, 1/500, 1/1000,
Electronic shutter
1/2000, 1/5000, 1/9000, 1/19000 1/2000, 1/5000
Supercharge shutter 0.2 sec. to 17 sec. Can be set in increments of 0.1 sec. 0.2 sec. to 17 sec. Can be set in increments of 0.1 sec.
White balance Auto, Manual, One-push set, Preset (2700K, 3200K, 5600K, 9000K) Auto, Manual, One-push set, Preset (2700K, 3200K, 5600K, 9000K)
Back-focus adjustment Not required Not required
Size Colour LCD (TFT) 17" Colour LCD (TFT) 15"
Panel size 365.76(H) x 228.6 (V) mm 304.5 (H) x 228.4 (V) mm
Pixel pitch 0.1905 (H) x 0.1905 (V) mm 0.1905 (H) x 0.1905 (V) mm
Number of pixels 1920 (H) x 1200 (V) (WUXGA) 1600 (H) x 1200 (V) (UXGA)
LCD monitor 5.
Display colour Approx. 16,770,000 colours 4. Approx. 16,770,000 colours 4.
Brightness 270 cd/m 2 (typical) 200 cd/m 2 (typical)
Contrast ratio 450 : 1 (typ) 500 : 1 (typ)
Viewing angle ±80° (typical, horizontal), ±70° (typical, vertical) ±85° (typical, horizontal), ±85° (typical, vertical)
Unit DVD-ROM drive unit CD-R/CD-RW drive unit
Speed CD-R/CD-RW: 24x Write, 24x Re-write, 24x Read, DVD: 8x Read 24x Write, 10x Re-write, 24x Read
CD-R/CD-RW/DVD Used disk CD-R/CD-RW/DVD CD-R/CD-RW
drive unit
700 MB, approx. 3500 images (When a 2 million-pixel image is 700 MB, approx. 3500 images (When a 2 million-pixel image is
Storage capacity compressed) to approx. 117 images (When a 2 million-pixel image is compressed) to approx. 117 images (When a 2 million-pixel image is
not compressed) not compressed)
160 GB (including 45 GB reservation area), approx. 575,000 images 80 GB, approx. 400,000 images (When a 2 million-pixel image is
Hard disk drive unit Storage capacity (When a 2 million-pixel image is compressed) to approx. 19,000 compressed) to approx. 13,334 images (When a 2 million-pixel
images (When a 2 million-pixel image is not compressed) image is not compressed)
Image format JPEG/HD Photo (With compression), TIFF (No compression) JPEG (With compression), TIFF (No compression)
Observable image size 10000 (H) pixels x 10000 (V) pixels (when stitched) 1600 (H) x 1200 (V) pixels
Lamp 12 V, 100 W, Halogen lamp 12 V, 100 W, Halogen lamp
Light source Lamp life 1000 hours (average) 1000 hours (average)
Colour temperature 3100 K (at maximum light intensity) 3100 K (at maximum light intensity)
Video output DVI (1920 x 1200 pixels) Analogue RGB (1600 x 1200 pixels)
Output Special LCD monitor 75 kHz (H), 60 Hz (V) 75 kHz (H), 60 Hz (V)
Scanning frequency
External monitor 75 kHz (H), 60 Hz (V) 75 kHz (H), 60 Hz (V)
Mouse input Supports USB mouse MINI-DIN 6-pin connector (DOS/V-compatible PS/2 mouse)
Keyboard input Supports USB keyboards MINI-DIN 6-pin connector (DOS/V PS/2)
Input
Pause/ Recording, Non-voltage input Pause/ Recording, Non-voltage input
External remote input
(Contact/Noncontact) (Contact/Noncontact)
LAN RJ-45 (10BASE-T / 100BASE-TX / 1000BASE-T) RJ-45 (10BASE-T / 100BASE-TX / 1000BASE-T)
Interface
USB 2.0 Series A 8 types 4 types: Special printer port x 1, External storage connection port x 3
Power-supply voltage 100 to 240 VAC, 50/60 Hz 100 to 240 VAC, 50/60 Hz
Power supply
Current consumption 340 VA 310 VA
Ambient temperature 5 to 40°C 5 to 40°
Environmental resistance
Relative humidity 35 to 80%, No condensation 35 to 80%, No condensation
Controller Approx. 11.6 kg Approx. 12.5 kg
Weight Camera unit Approx. 1.00 kg (VHX-1100), Approx. 0.90 kg (VHX-1020) Approx. 0.88 kg
Console Approx. 0.30 kg Approx. 0.25 kg
Dimensions (Excluding the projected areas) 420 x 416 x 181 mm (when stored) 382 x 425 x 162 mm
1. 2 million pixels x 3 CCD mode
2. 18 million pixels x 3 CCD mode
3. Supports only the multi-scan camera VHX-1100.
4. Approximately 16,770,000 pixels are realised with the dithering processing of the display controller.
5. The LCD monitor provided in the VHX Series is based on extremely advanced technology. Rarely, an unlit part (black spot) or lit part (bright spot) may exist on the monitor screen. However, this is not an indication of the LCD monitor being defective.

36
Specifications (Various functions)

Console Console
Model VHX-1000E VHX-500FE
compatible* compatible*
Image stitching function Provided O –
3D image stitching function Provided O –
HDR function Provided O –
Real-time depth composition Real-time depth composition O
Depth composition function
High-quality depth composition High-quality depth composition
Accurate D.F.D. method 3D display function Provided (Quick) O Provided (Quick) O
3D illumination simulation function Provided Provided
3D two-screen simultaneous Provided (Combination/Comparison/ Provided (Combination/Comparison/Difference display
comparison function Difference display mode) mode)
Auto focus function Provided (VHX-S50 and VHX-S15 are required) O Provided (VHX-S15 is required)
Jog focus function Provided (VHX-S50 and VHX-S15 are required) O –
Quick HD image Provided O –
Real-time digital zoom 1.0x to 10.0x (100 steps) 1.0x to 10.0x (100 steps)
Lighting shift function Provided Provided
O O
(Height difference enhancement) (Full, Partial, and Flanking illumination modes) (Full, Partial, and Flanking illumination modes)
Various controller Provided (Automatically lists of nine types of image Provided (Automatically lists of four types of image
e-Preview mode O O
functions modes, allowing selection of the optimal image) modes, allowing selection of the optimal image)
Optimal contrast function Provided Provided O
Glare removal function Provided O Provided O
Vivid & sharp image mode Provided Provided
Supercharge shutter function Provided O Provided O
Edge enhancement function Provided (200 steps) for a moving image Provided (200 steps) for a moving image
Gamma correcting function Provided Provided
Camera-shake correcting function Provided (For a moving image) O Provided (For a moving image) O
Split function Vertical split, Horizontal split, 4-part split Vertical split, Horizontal split, 4-part split
Moving image recording/ 28 frames/sec. (800 x 600),
–
reproducing function 15 frames/sec. (1600 x 1200)
Timer recording function Provided Provided
Side album function Provided –
Observation condition reproduction function Provided –
Shutter speed and camera gain can be adjusted with Shutter speed and camera gain can be adjusted with
Sensitivity quick adjusting dial O
one trimmer one trimmer
Provided –
DOUBLE‘R function
(Automatic Lens/Zoom Recognition function) (Extension is possible with OP-84263 option)
High-resolution dimensional measurement
Provided –
function
Distance, angle, radius, area, etc. Various functions are provided Various functions are provided
Automatic count/ Provided (Enables distance/area measurement through Provided (Enables distance/area measurement through
Measuring measurement function brightness/colour extraction) brightness/colour extraction)
function Scale display Various functions are provided O Various functions are provided
Auto calibration Full-auto (Numerical input is not required) Full-auto (Numerical input is not required)
Measurement point replacement function Provided –
Measurement free display function Provided –
Specifi ed dimension display function Provided –
Measurement auxiliary function Provided (Automatic edge extraction, multi-point input) Provided (Only automatic edge extraction)
CSV storage Provided Provided
XY measurement XY stage measurement Provided –
system Wide image display function Provided –
3D height colour/ Provided (Enables X/Y/Z-axis height scale display and Provided (Enables X/Y/Z-axis height scale display and
scale display function colour bar display related to height) colour bar display related to height)
Measuring 3D profile measurement Provided Provided
function
3D volume measurement Provided Provided
(Optional function)
3D plane distance measurement Provided Provided
3D plane angle measurement Provided Provided
All-in-one system that enables all operations for All-in-one system that enables all operations for
Complete style covering Observation,
Observation, Recording and Measurement without Observation, Recording and Measurement without
Recording and Measurement
using a PC using a PC
HD Photo compatible filing system Provided –
Bayonet-type attachment Provided Provided
Utility
Keyboard entry Enabled Enabled
Compatible with a foot switch Enabled Enabled
User settings Provided Provided
PC mode Provided –
Function guide Provided Provided
Image data transfer between the VHX and PC can be Image data transfer between the VHX and PC can be
PC communication software
performed easily. (LAN) performed easily. (LAN)
3D reproduction software for the PC The PC can reproduce a 3D image saved in VHX. The PC can reproduce a 3D image saved in VHX.
(Available free of charge) (Copy free) (Copy free)
Accompanying 3D HDR play back software
Allows adjustment of brightness, contrast, and texture. –
software (Available free of charge)
Image stitching playback software (Available
Quickly processes captured wide-fi eld images. –
free of charge)
Measurement software (Available free of
Allows dimension measurement on the PC. –
charge)
*Function can be used simply by pressing a button on the console.

Specifications (Software modules)

Moving images recording software Functions for recording/reproducing moving images
Functions for composing a single image from a plurality of images obtained by focusing on and
High-quality depth composition software
capturing an image of each portion of the target that is of a different height
Real-time depth composition software Displays full-focused images in real-time at the turn of the focus adjustment dial.
Accompanying
Camera settings and image improvement
software Image processing functions for correcting images to make observation easier
software
Comment input software Function for inputting and displaying comments such as letters, marks, or the like in an observation image
Area measurement software Measures areas of 2D images.
Image splitting software Function for splitting an image vertically, horizontally, or into four parts, and displaying the image

37
 Satisfies Every Need in Every Industry

Semiconductor

CMOS (15x) Wire bonding (300x)

Colour filter (800x) ITO film (1000x)

Automotive/Metal

Miniature bearing (10x) CVT gear (50x)

Metal structure (400x) Metal flow (10x)

Material/Chemical

Cross section of multilayer film (1000x) Nonwoven fabric (200x)

Heat insulator (50x) Fracture surface of glass (20x)

38
Electronics

Connector terminal (70x) BGA (50x)

Cross section of solder (1000x) Ink penetration (500x)

Pharmaceutical/
Packaging

Injection needle (100x) Tear in package (100x)

Hair (3000x) Emulsion (2000x)

Other Industries

Bath agent (20x) Mica (500x)

Scarab beetle (30x) Ovary (200x)

39
 SAFETY INFORMATION
Please visit: [Link] Please read the instruction manual carefully in
order to safely operate any KEYENCE product.

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Phone: +33 1 56 37 78 00 Fax: +33 1 56 37 78 01 Phone: +82-31-642-1270 Fax: +82-31-642-1271 Phone: +421 2 5939 6461 Fax: +421 2 5939 6200
WW1-1010

The information in this publication is based on KEYENCE’s internal research/evaluation at the time of release and is subject to change without notice.
Copyright (c) 2010 KEYENCE CORPORATION. All rights reserved. VHX1000-WW-C-E 1020-1 600783 Printed in Japan
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