MEMS Market Overview:

Steady Growth for MEMS in 2013 and Beyond

Pascal Viaud, CSO
Taipei, September 2013

75 Cours Emile Zola, F-69100 Villeurbanne - Lyon, France Tel: +33 472 83 01 80 - Fax: +33 472 83 01 83
2013

Web: http://www.yole.fr

Outline
Introduction Yole Dveloppement Update on the Global MEMS Market MEMS for Mobile Examples of New Successful Applications Diversity of Technologies Conclusion
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INTRODUCTION

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Fields of Research Activity

Founded in 1998, Yole Dveloppement is a global market, technology and strategy consulting company involved in : Photovoltaic Power Electronics & Compound Semi Microfluidic & MedTech

MEMS & Image Sensors

Advanced Packaging LED, OLED & LD

2013

Equipment & Materials

MEMS Market Historical Data

2004-2012 in US$M

2004 - 2012 MEMS Markets ($M)

Source Yole Dveloppement $12 000

$10 000

$8 000

$6 000

$4 000

$2 000

$0
$M

2004 $5 240

2005 $5 630

2006 $6 350

2007 $7 200

2008 $6 800

2009 $7 538

2010 $8 880

2011 $9 934

2012 $10 930

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UPDATE ON THE GLOBAL MEMS MARKET

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MEMS markets by application (in US$M)

MEMS $M forecast per application & CAGR 2012-2018 March 2013
$25 000M Telecom Medical Industrial Defense Consumer Automotive Aeronautics 11.7% 22.8% 11.5% 11.9% 11.6% 5.5% 6.4% Telecom

$20 000M

$6 .3B

Medical

$15 000M

Industrial

Defense $10 000M

$1 .8B

$9.8B

Consumer

$5 000M

$5 .0B
Automotive

$2 .6B
$ 0M 2012 2013 2014 2015 2016 2017

$3 .6B
Aeronautics 2018

2013

Continued Strong Growth

2012-2018 Forecast (in US$M)

Yole Developpement March 2013

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2012-2018 Forecast (in Munits)

Yole Developpement March 2013

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2012 MEMS Players Ranking Top 30

Yole Developpement March 2013

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MEMS FOR MOBILE

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Simplified View of TODAY (2013s) Smart-Phone Board

MEMS in red
MEMS devices in volume in 2013:
IMU combo Magnetometer MEMS microphones Pressure sensor Humidity + Temperature sensor BAW filters and duplexers Antenna tuner

2013

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Simplified View of TOMORROW (2018s) Smart-Phone Board

MEMS in red
New MEMS devices in volume in 2018?
9-axis combo Pressure + Humidity + T combo More microphones! Silicon timing for XO / TCXO / 32kHz clock Antenna switching Gas / biochemical sensors Auto-focus

MEMS mirrors
Microspeaker Touchscreen? IR sensor?

Energy harvesting? UV sensor? LIDAR? Ultrasonic sensor? Radiation sensor?

Joystick?
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MEMS Value Proposition in Mobile Devices

Better communication performances Sound quality
Wispry antenna tuner on cell phone board Sand 9 MEMS Oscillator AudioPixel microspeaker

High volume Small production Sampling / R&D

DelfMEMS switch

Knowles microphones

Scanning mirror from Lemoptix

Sensirion Humidity Sensor

Improved visual experience

Polight MEMS autofocus Mirasol display

Navigation & environment sensing

Freescale pressure sensor

Nectar fuel cell

STM 9-axis

Increased battery lifetime New tactile interface

Thermal imager MuOptics NextInput SoftTouch interface

TI temperature sensor versus a competing thermopile sensor

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Infra red sensing

2012 2018 MEMS Market in Mobile ($M)

Better communication performances Sound quality
Wispry antenna tuner on cell phone board Sand 9 MEMS Oscillator

$388M (2012) $1166M (2018)

DelfMEMS switch

$438M (2012)
AudioPixel microspeaker

$868M (2018)
Knowles microphones

$11M (2012) $1140M (2018)

Scanning mirror from Lemoptix Polight MEMS autofocus

Sensirion Humidity Sensor

Improved visual experience

Navigation & environment sensing

$492M (2012)

Freescale pressure sensor

Mirasol display

$1691M (2018)
STM 9-axis Nectar fuel cell $0 (2012) NA (2018)

Increased battery lifetime

$0M (2012)
TI temperature sensor versus a competing thermopile sensor

$0M (2012) $52M (2018)

Thermal imager MuOptics

NA (2018)
NextInput SoftTouch interface

New tactile interface

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Infra red sensing

Key MEMS Players in Mobile

Better communication performances Sound quality
Wispry antenna tuner on cell phone board Sand 9 MEMS Oscillator AudioPixel microspeaker

DelfMEMS switch

Knowles microphones

Scanning mirror from Lemoptix

Sensirion Humidity Sensor

Improved visual experience

Polight MEMS autofocus Mirasol display

Navigation & environment sensing

Freescale pressure sensor

STM 9-axis Nectar fuel cell

Increased battery lifetime New tactile interface

Thermal imager MuOptics NextInput SoftTouch interface

TI temperature sensor versus a competing thermopile sensor

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Infra red sensing

Successful Companies Are Still Large Leaders in Distinct MEMS Categories

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Drivers for Mobile Care Applications

Level of integration Time

Health Phone Mobile Care Point of Care

Everywhere Care

Smartphone & Tablet revolution Feature Phones

Hospital Care

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EXAMPLES OF NEW SUCCESSFUL APPLICATIONS

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Pressure and Humidity Sensors

2 new killer apps!
Pressure sensor now used in high volume
For GNSS improvement today, and for LBS services soon

Humidity + temperature sensors are also adopted in 2013

Sensirion SHTC1 (2 x 2 x 0.8 mm) - Digital humidity sensor integrated in Samsung Galaxy S4

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Drivers for RF Tuners

and MEMS value proposition
Increasing number of bands and antennas

Drivers for RF tuners

LTE

Carrier aggregation

Operators demand for more users per BST + more data per user

Smaller antennas for smaller phones

MEMS value proposition

2013

Very high Q Excellent linearity over wide frequency range Low loss High capacitor range Digital control, that can be integrated Low power consumption (electrostatic actuation)

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Wispry reverse engineering

Extract from the reverse costing report Wispry RF MEMS Antenna Tuner (published in Jan. 2012)
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Proliferation of RF tuners
First Epcos close loop tuner on the market!

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DIVERSITY OF TECHNOLOGIES

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Combos are Driving the Inertial Sensor Market

Discrete sensors decline but will still be used in some platforms
Market ($M)

Inertial sensors for mobile phones and tablets 2010-2018 market ($M)
2000
Yole dveloppement May 2013

1800 1600 1400

6-axis IMUs are the hottest market since 2012

Because of strong price pressure and high

1200
1000 800 600 400

adoption rate, the total market will stabilize

from 2015

200
0 2010 2011 2012 2013 2014 2015 2016 2017 2018
MEMS accelerometers Magnetometers 6DOF E-compass
2013

MEMS gyroscopes 6DOF IMUs 9DOF Combos

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L3G4IS Dual Core Gyro

Teardown of Nokia Lumia 920

This gyro is integrated in the cameramodule and is able to provide both the image stabilization function

and the user interface function (replace the gyroscope

on the main board)

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InvenSense MPU-6050

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InvenSense MPU-9150

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Evolution of the MEMS Gyro Patent Publication Timeline

Patent Filing Trends for MEMS Gyro Technologies (includes relevant and related)
220
200 180

No. of Patent Families

160 140

120
100 80 60 40 Note: Most patents filed in 2011 2012 not published yet

20
0

Priority years

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Is IP Used in Commercial Products?

Some examples

IP

Product on the market

IP

Product on the market

IP

Product on the market

IP

Product on the market

+ hundreds of variations
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Regional Comparison
Percentage of filed patents vs. revenues by headquarters location
60%

Regional Comparison of % Filed Patents vs. Revenue by Competitor HQ Location

Yole dveloppement Feb. 2013

(includes relevant and related)

Geographical patent distribution by publication country

50%

40% Total 2012 revenue by competitor location in % % of filed patents 20%

30%

10%

0%
Japan USA China Germany Other

In domain patents are filed mainly by firms and universities located in Japan and the USA However, a significant portion of the actual business is done by German (Bosch) and Italian (STMicro) companies. The lesson: generating patents doesnt mean generating business!
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TOP 10 Leading Patent Applicants

Top 10 Patent Assignees for MEMS Gyro Patents (includes relevant and related)
No. of Patent Families Assignee PANASONIC (JP) MURATA (JP) SONY (JP) BOSCH (DE) HONEYWELL (US) SEIKO EPSON (JP) ADI (US) WACOH (JP) ST MICRO (FR/IT) CEA (FR) UNIV SHANGHAI (CN) 42 51 31 29 57 32 26 18 41 2 27 11 30 6 27 5
Notes: - Graph doesnt include licensing agreements (i.e. from CEA to Movea for some patents, while post-2008 co-developed patents are included in both CEA and Moveas portfolios) - VTI Technologies patents are included within Muratas

100

200 447 472

300

400 37

500

600

125
89 47 9 20

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Relevant 1 Related

17

QUALCOMM (US)
DRAPER LABORATORY (US) INVENSENSE (US)
32

MOVEA (FR) 15 13
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CONCLUSION

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Summary
MEMS industry is big and growing: $ 22.5B market in 2018 Strong market pull observed for sensors and actuators in Mobile

Not limited to few devices. A new wave of MEMS is coming!

IP position is now critical in this highly competitive market

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Contact Taiwan / Greater China:

Thank You

Ms. Mei-Ling TSAI T E +886 9 3757 6016 meiling.tsai@yole.com.tw

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