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Programming Technologies
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Poly-Diffusion Antifuse
An antifuse is the opposite of a regular fuse. It is an open path until a programming current is forced through it by applying a high programming voltage across it. Advantage: small (allow denser switch population). Disadvantage: only one-time programmable.
wire
Antifuse
Polysilicon Dielectric
Diffusion
Oxide
wire
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Y
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Metal-Metal Antifuse
Cross section of a metal-metal antifuse
Metal 1
Dielectric
Metal 2
Oxide
wire
Parasitic capacitance
wire
Antifuse is programmed to be ON
wire
Antifuse is programmed to be OFF
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To program an EPROM (or EEPROM) cell, apply a high voltage to the drain of the transistor. It results in electrons trapped in the floating gate and consequently increasing the the threshold voltage.
To erase an EPROM cell, expose the chip to UV light. To erase an EEPROM cell, electrical field is used to remove electrons from the floating gate.
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Low Vt
High Vt
High Vt
Low Vt
Y
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Yes Yes Out of circuit In circuit Small 1-4K 1050 No Small 1-4K 1050 No
Large (12X) Small (2X) Small (1X) 600800 1050 ++ Yes 100500 35 + No 3080 1 + No
+ Desirable; - no desirable
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