By: Joaquin Gabriels November 24th, 2008

Overview of CMOS CMOS Fabrication Process Overview CMOS Fabrication Process Problems with Current CMOS Fabrication Future Changes in CMOS Fabrication

http://en.wikipedia.org/wiki/CMOS Complementary metaloxidesemiconductor (CMOS) Has many different uses:

Integrated Circuits Data converters Integrated transceivers Image sensors Logic circuits

NAND Circuit

http://lsmwww.epfl.ch/Education/former/20022003/VLSIDesign/ch02/ch02.html

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Create a pattern. Oxidize small layer, about 1m thick. Place photoresist on top of SiO2 Place mask(pattern) above photoresist and expose it to UV light.

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Etch away SiO2 using HF acid or plasma. Remove remaining photoresist with acids.

To create a n well:

Diffusion
Heat wafer in Arsenic gas chamber until diffusion occurs.

Ion Implantation
Arsenic or phosphorous are implanted in window.

SiO2 n well

A thin layer of oxide is deposited. A thin layer of polysilicon is deposited using Chemical Vapor Deposition (CVD) .

n well p substrate

http://en.wikipedia.org/wiki/Chemical_vapor_deposition

Remove oxide layer using acid. Dope open area using Ion implantation or diffusion.
n+ n+ p substrate p+ n well p+ n+

p+

Metal Thick field oxide p+ n+ n+ p substrate p+ n well p+ n+

Optical lithography is limited by the light frequency. Material limitations Yield limitations Space limitations

Material changes like using high-k materials. Design changes

SOI(Silicon On Insulator) Double Gate (Finfet) Twin-Tub Process

http://www.fujitsu.com/downloads/MAG/vol39-1/paper02.pdf

CMOS Digital Integrated Circuit Design - Analysis and Design by S.M. Kang and Y. Leblebici http://www.fujitsu.com/downloads/MAG/vol39-1/paper02.pdf Introduction to VLSI Circuits and Systems, John Wiley and Sons, 2002 http://lsmwww.epfl.ch/Education/former/20022003/VLSIDesign/ch02/ch02.html http://en.wikipedia.org/wiki/Chemical_vapor_deposition users.ece.utexas.edu/~adnan/vlsi-05/lec0Fab.ppt http://en.wikipedia.org/wiki/CMOS www.usna.edu/EE/ee452/LectureNotes/02_CMOS_Process_Steps/08_Simple_CMOS_Fab.ppt http://en.wikipedia.org/wiki/Silicon_on_insulator access.ee.ntu.edu.tw/course/VLSI_design_90second/data/Chapter%203%20Part 2%2003-20-2002.doc