Microelectromechanical systems (MEMS) are microscopic devices that combine electrical and mechanical components. MEMS are manufactured using integrated circuit batch fabrication techniques similar to those used for computer chips. Common MEMS devices include accelerometers, pressure sensors, gyroscopes, digital micromirror devices, and inkjet printer heads.
Microelectromechanical systems (MEMS) are microscopic devices that combine electrical and mechanical components. MEMS are manufactured using integrated circuit batch fabrication techniques similar to those used for computer chips. Common MEMS devices include accelerometers, pressure sensors, gyroscopes, digital micromirror devices, and inkjet printer heads.
Microelectromechanical systems (MEMS) are microscopic devices that combine electrical and mechanical components. MEMS are manufactured using integrated circuit batch fabrication techniques similar to those used for computer chips. Common MEMS devices include accelerometers, pressure sensors, gyroscopes, digital micromirror devices, and inkjet printer heads.