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  • Manipulator Product Sheet

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    soybon
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    The document describes sample manipulators for use in ultra-high vacuum environments. The manipulators allow for high resolution rotation and temperature control up to 1400°C. They include options for oxygen and ammonia compatibility and integrated shutters. Motions include x-y translation, z translation, and continuous 360 degree azimuthal rotation. Specifications include substrate sizes up to 8 inches, mounting flanges from 4.5 to 10 inches, and power supplies from 1-5kW.

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    The document describes sample manipulators for use in ultra-high vacuum environments. The manipulators allow for high resolution rotation and temperature control up to 1400°C. They include options for oxygen and ammonia compatibility and integrated shutters. Motions include x-y translation, z translation, and continuous 360 degree azimuthal rotation. Specifications include substrate sizes up to 8 inches, mounting flanges from 4.5 to 10 inches, and power supplies from 1-5kW.

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as PDF, TXT or read online from Scribd
    Flag for inappropriate content
    8 views1 page

    Manipulator Product Sheet

    Uploaded by

    soybon
    The document describes sample manipulators for use in ultra-high vacuum environments. The manipulators allow for high resolution rotation and temperature control up to 1400°C. They include options for oxygen and ammonia compatibility and integrated shutters. Motions include x-y translation, z translation, and continuous 360 degree azimuthal rotation. Specifications include substrate sizes up to 8 inches, mounting flanges from 4.5 to 10 inches, and power supplies from 1-5kW.

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as PDF, TXT or read online from Scribd
    Flag for inappropriate content
    of 1

    Sample Manipulators

    Features
    Magnetically Coupled Rotation High Resolution Rotation Oxygen Compatible Option Available Ammonia Compatible Option Available Up to 1,400 C Substrate Temperature

    Standard 3" Stage, Filament, and Integrated Shutter

    Description
    UHV compatible Growth Manipulators and Preparation Stages are available for 1" to larger than 8" samples. An optional integrated Master Shutter is available upon request. Up to three way direction motion provides flexibility. The integrated wafer clamp allows for simple sample mounting. Material specific design increases longevity in corrosive environments such as oxygen or ammonia background.

    X-Y Translation
    Resolution 0.001 Repeatability 0.001 Backlash 0 Travel +/- 0.5" Resolution 1 mm or 132 scale Repeatability 132 or 1 mm Backlash 0 Travel 4.0"

    Specifications
    Substrate Size Up to 8" Mounting Flange 4.5" to 10.0" CF Temperature Range Up to 1,400 C Thermocouple Type C or K Temperature Uniformity +/- 1% Filament Material Graphite (Others Available Upon Request) Azimuthal Rotation with Motor 0 60 rpm Bakeout Maximum Temperature 200 C Power Supply 1kW up to 5kW

    Z Translation

    Azimuthal Rotation
    Resolution 1.25 Backlash < 1 Rotation 360 Continuous

    S
    MBE

    T
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    7620 Executive Drive | Eden Prairie, MN 55344-3677 | USA Phone: 952-934-2100 | Fax: 952-934-2737 | Email: sales@svta.com | www.svta.com

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