Complexity & Productivity Growth of ICs

A. Complexity grows 58%/yr compound (doubles in every 18 months), Depend on advancement of cad tools for Mask development (Transistor count)

B. Productivity grows 21%/yr compound (doubles every 3 & 1/2 yrs) unless methodology is updated (physical transistor existing on a chip)

Flow diagram of IC fabrication process

System to Silicon Design Y-Chart

Common CMOS materials and their use in microand nano electromechanical systems (MEMS and NEMS)