()

(electropolishing)
.

.

.

.
.

1) (Rmax) 2. 0m
(Rmax) 0.7m

HIGH POWER

Na .

2)LOW POWER
.

3)() PIT() .

4) () .

.
PIT
.

POWDER
.

Rmax, Ra .
,
.

GAS
.
- (Scanning Electron Microscopy, SEM)
.
- .
- AES(Auger Electron

Spectroscopy) ESCA(Electron Spectroscopy for

Chemical Analysis) .
- .

- .

, , , ,
, .
< 1> , FITTING .
(STS316L) ,
,
(AFM, Abrasive Flow
Machining) . ,
,
.

(PITTING) .
4 CLEAN ROOM(CLASS
100) , .

< 2> D. I WATER SYSTEM FLOW CHART . D.

I WATER DEIONIZED WATER
. (FILTER), (STERILIZER), POLISHER 25

RESISTIVITY 18., 5. . 18. D. I

WATER 2 (FILTER), (STERILIZER), POLISHER
.

< 3> 18, 5 D. I WATER , 4

< 4> , 1 RO 18, 2 RO 18, 3 , 4
.

< 5>

CLEAN

ROOM SPEC. 0.5 CLASS 100 .

< 3> D. I WATER (5 & 18)

< 4> 4


< 5> ,

GAS

GAS GAS

GAS

. (ULTRA CLEAN)
GAS WAFER .

 FITTING, TUBE
, GAS

, GAS (ULTRA

CLEAN) .
.

- GAS ,
.

1) , , ,

2)

3)

4) Cr

.

GAS GAS ,
(ULTRA CLEAN) GAS .

1) INBOARD LEAKAGE FREE GAS , METAL

SEAL , .

2) PARTICLE
PARTICLE 10% 0.013 PATTERN
. PATTERN PARTICLE
,
(PURGE) PARTICLE .

< 6> (EP ) (PURGE)

(PURGE) .

3) DEAD SPACE

DEAD SPACE , (:
/BELLOWS SEAL ), PURGE GAS
, PURGE , PARTICLE , DEAD SPACE
GAS .
DEAD SPACE COMPONENT , DEAD SPACE

< 7>

DEAD SPACE

DEAD

SPACE DEAD VOLUME

1.3cc 0.01cc

< 6> / PURGE

< 7> DEAD SPACE

4) OUTGAS

OUTGAS PROCESS GAS ,

GAS
. .

< 8> .

 < 9>
OUT GAS .
,
, .
.

< 10> (BAILBY LAYER)

, OUT GAS
.

OUT GAS
, < 11>
.

< 8>

< 9> ( )

< 10> Stainless

< 11> TEST

GAS

1.
SUPER CLEAN STAINLESS STEEL
2.
PROCESS GAS / /
3.
PARTICLE / / PITTING
4.
/
5. GAS
/
6. - VCR
/

(C) AUSTENITE AUSTENITE Cr

, . , ,

. (Si) FERRITE .
TOUGHNESS , .
(Mn) S, Se RED-SHORTNESS
. AUSTENITE Ni 50% N STAINLESS
STEEL N .

(P) (),
AUSTENITE . (S)
, Mn, Te, Mo . (Cu) AUSTENITE

ION ,

(Ni) AUSTENITE AUSTENITE STAINLESS STEEL

, . (Cr) FERRITE STAINLESS
STEEL 12% ,
.

(Mo) (NORMALIZING) ,
, CREEP , ION .
(Al) FERRITE Ni

. 13Cr-STAINLESS STEEL FERRITE

, .

(N) AUSTENITE AUSTENITE STAINLESS STEEL ,

, TOUGHNESS . (O)
, , TOUGHNESS .
(H) Ni STAINLESS STEEL
PINHOLE . () .

(C), (Si), (Mn), (P), (S), (Al)

.

, ,
, AF(EF), (AOD), (VOD),
(VIM)
, Electro Slag (ESR), ARC (VAR), (VCR)

< 1> .

,
(VCR)- ARC (VAR) (VIM)- ARC
(VAR) . < 12> .
VCR-VAR ,

, AF , 20015torr
O2+Ar (VCR)
. LF(Ladle Furnace) (S) ,
Casting , ARC (VAR) (C), (O),

(H) .

VIM-VAR

(VIM) . (C),

(N), (O) (VIM)

ARC (VAR) (C), (O), (H) .

< 2>
.
VCR-VAR , VCR-VAR (STS316L) ,

(STS316L) . (Mn)

(MnS), Mn FUME ,
, VCR-VAR 0.28 VIM-VAR 0.02

.
(Ni),
(Cr), (Mo) .

(STS316L) , VCR/VAR , AOD , JIS-G3214

<

13> .

JIS-G3214

100

, VCR/VAR

,
AOD , VCR/VAR

C, Si, Mn, P, S . < 14>

AOD
VCR/VAR

, AOD

, VCR/VAR

.
< 15> VIM-VAR VCR-VAR VIM-VAR

, VCR-VAR

25% .

S : NORMAL STS316L -- SINGLE MELTING() --------- AOD

P : PRIMET ----------- DOUBLE MELTING(/) --- VCR +VAR
U : PRIMET - ULM ---- DOUBLE MELTING(/ Mn) - VIM +VAR

< 3> / BA(Bright Annealing)

SP
< 4>

Rmax 2.5 . EP(Electropolishing) SPU

Rmax 0.7

. SEP(Super Electropolishing) EP

, ,

< 4> Rmax 0.4 .

< 1> Stainless Steel /

< 2>

< 3> /

< 4>

Level

Spec.

Rmax

Ra

B A

Rmax ave. 2.5

Ra ave. 10inch

E P

Rmax ave. 0.7

Ra ave. 5inch

SEP

Rmax ave. 0.4

Ra ave. 3inch

< 5>

(+)

(ppb)

(-)

(ppb)

NH4+

N/D

Cl-

N/D

Na+

N/D

NO3-

N/D

K+

N/D

SO42-

N/D

Ca2+

N/D

PO43-

N/D

Mg2+

N/D

< 11> TEST

< 12> PROCESS

< 13> STS316L

< 14> STS316L VCR/VAR

< 15> COST

, ,
,
, CHEMICAL , CHEMICAL .
LAMP

/ , ,

. (Rmax) STYLUS LOT

3PCS 1 /1PCS , Rmax .

 200ml 1

. LOT 10PCS

(SEM)

300, 500, 2000 .

PARTICLE, PITTING, .
CHEMICAL AUGER CHEMICAL ,
(Cr RICH) . CHEMICAL

ESCA CHEMICAL , (Cr2O3)

(SEM)

< 16> .

. SEM

, ,

PIT

ION

CAP

1Hr ,

50ml .

ION NH4+, Na+, K+, Ca2+, Mg2+ Cl-, NO3-, SO42-,

PO43-
. ION , < 5> GAS FITTING
.

AES

, SPUTTER 1 , SPUTTER 2 , SPUTTER 3 , 10

DEPTH PROFILE

AES < 17>

. O, C Fe, Cr, Ni, Si

PEAK
. < 6> ,

( ) <
18>

10

, , Cr OXIDE 40

(CCl4) ( 3.4 C-H

) ppm

SAMPLE 100ml

120 < 7> 0.1ppm

< 6> AES

:ELBOW
Fe

Cr

Ni

Si

29

61

sputter 1

20

25

50

sputter 2

60

25

15

sputter 3

63

26

11

< 7>

SAMPLE

HC (ppm)

3/8TEE (3EA)

< 0.1

# : < 0.1 ppm OK

(SMOOTHNESS)

, BA, EP, SEP , < 19> .

- B A : PRECISION NC-MACHINING + SUPER CLEANING
- E P : ELECTROPOLISHING + SUPER CLEANING
( ; Rmax 0.7)
- SEP : ELECTROPOLISHING + SUPER CLEANING
( ; Rmax 0.4)
FITTING EP Ra 0.029 (Rmax 0.5), SEP

Ra 0.014 (Rmax 0.17), TUBE EP Ra 0.046 (Rmax

0.43)

, ,

, ,
,
, , , , , ,
,
, . < 20>< 24>

FITTING , 90ELBOW , DOUBLE FITTING , TUBE

, VALVE /, , ,


< 16> SEM

< 17> AES SPUTTER

< 18> DEPTH PROFILE

< 19>

< 20> FITTING

< 22> DOUBLE FITTING

< 24> VALT

< 23> TUBE