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Sputter Yield Trials
Sputter Yield Trials
1 :
=45
= 1eV
=
= (He)
2 :
=45
= 1eV
=
= NEON (Ne)
3 :
=45
= 1eV
=
= ARGON (Ar)
4 :
=45
= 1eV
=
= KRYPTON (Kr)
5 :
=45
= 1eV
=
= XENON (Xe)
6 :
=45
= 1eV
=
= RADON (Rn)
7-9 ,
,
7 :
=45
= 1eV
=
= ARGON (Ar)
8 :
=45
= 2eV
=
= ARGON (Ar)
9 :
=45
= 3eV
=
= ARGON (Ar)