Simulation of Thermionic Electron Gun used in Scannning Electron Microscope

Basic Geometry:

Cut View:

Expanded View:

Filament:

Parameter List:

Name Bias HV L Temp d h t

Value 300 Volt 15000 Volt 5 mm 2400 C 1.3 mm 0.25 mm 0.3 mm

Description The Bias Voltage The Acceleration Voltage The Distance between ande and Wehnelt Filament Temperature in degree C The Wehnelt bore diameter Filament height from wehnelt The Wehnelt plate thickness

Wehnelt Potential = -HV Cathode potential = - (HV-Bias) Anode Potential = 0 Volt Emission Model : Thermionic Emission

Case 1: Acceleration Voltage: 15000 Volt Bias = 0 to 500 Volt ( Step Size 25Volt)