What is MEMS Technology?

What is MEMS ?

Micro Electro Mechanical Systems

micro scale dimensions (1mm = 1000 microns) electrical and mechanical features systems (features combined to perform a function) MEMS fabrication techniques Originally used IC (computer chip) fabrication
techniques and materials More MEMS-specific fabrication techniques and materials are now in use

MEMS is an enabling
technology
Smaller device size Batch processing for low cost, uniform production Distributed device placement More precise sensing

4000 die per 6 inch wafer

Why is MEMS useful?

Sensors and Actuators two classes of MEMS

Sensors - measure the environment
SMALL => interfere less with the environment it is measuring SMALL => redundancy, batch fabricated,

Actuators - perform work on the environment

SMALL => small motion but very precise SMALL => can be placed in small spaces

How are MEMS made?

Bulk Micromachining subtractive process (3-D)
Create device by etching material out of a wafer Distinct processes and materials from IC fabrication Flexible for design of diverse device features sizes Advantageous for high precision sensors/actuators

Surface Micromachining additive process (2-D)

Create device by adding materials on top of a wafer Easily mixed with IC fabrication techniques Limited to film thickness less than 4 microns
(human hair 50-75 microns, IC gate ~ 0.15 microns)

Typically used for high volume, low precision, low cost devices