$CM_FORMAT JEOL/EO

$CM_VERSION 1.0
$CM_COMMENT CMNano-UFS
$CM_DATE 2013-11-25
$CM_TIME 14:03:53
$CM_OPERATOR Zelia
$CM_INSTRUMENT JSM-6510
$CM_ACCEL_VOLT 15
$CM_MAG 20000
$CM_SIGNAL SEI
$CM_STAGE_POS -7.225 6.214 11.000 0.000 0.000
$CM_STAGE_X -7.225
$CM_STAGE_Y 6.214
$CM_STAGE_T 0.000
$CM_STAGE_Z 11.000
$CM_STAGE_R 0.000
$$SM_MICRON_MARKER 1 m
$$SM_FILM_NUMBER 0000
$$SM_TITLE PC-SEM M600
$$SM_WD 10
$$SM_SPOT_SIZE 30
$$SM_VACUUM
$$SM_PHOTO ON
$$SM_MERGE ON
$$SM_SIGNAL1
$$SM_SIGNAL2
$$SM_MULTI
$$SM_VAC_MODE HV