Fabrication Technology

Wafers vs. chips

A chip 10-100 mm2 in size may contain up to several
million devices.

Fabrication Technology
Bulk crystal growth Czochralski method
(vertical pull)

Fabrication Technology
Basic fab processes:
Oxidation
Photolithography
Etching
Diffusion
Ion implantation
Epitaxy
Metalization and interconnections

Fabrication Technology
Thermal oxidation

Fabrication Technology
Photolithography

Fabrication Technology
Diffusion
(Ion implantation)

Fabrication Technology
Epitaxial growth
i) Chemical Vapor Deposition (CVD)

Fabrication Technology
Epitaxial growth
ii) Molecular Beam Epitaxy (MBE)

Fabrication Technology
Metalixation & Interconnection

Fabrication Technology
Process flow of planar PN junction diode fabrication

Fabrication Technology
Resistors and Capacitors