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Ch. 1 Lecture Slides For Chenming Hu Book: Modern Semiconductor Devices For ICs
Ch. 1 Lecture Slides For Chenming Hu Book: Modern Semiconductor Devices For ICs
in Semiconductors
1.1 Silicon Crystal Structure
Slide 1-1
(100) x
(011)
x
(111)
Si (111) plane
Slide 1-2
Si
Si
Si
Si
Si
Si
Si
Si
Silicon crystal in
a two-dimensional
representation.
Si
Si
Si
Si
Si
Si
Si
Si
Si
Si
Si
Si
Si
Si
Si
Si
Si
Si
(a)
When an electron
breaks loose and becomes( b )a conduction
electron, a hole is also created.
Modern Semiconductor Devices for Integrated Circuits (C. Hu)
Slide 1-3
Dopants in Silicon
Si
Si
Si
Si
Si
Si
Si
As
Si
Si
Si
Si
Si
Si
Si
Si
Si
Hydrogen:
E ion =
m0 q4
80 h
2 2
= 13.6 eV
Slide 1-4
Ga As
Ga
As Ga
As
Ga As
Ga
Slide 1-5
( conduction band)
2p
2s
(valence band)
}
(a)
(b)
Energy states of Si atom (a) expand into energy bands of Si crystal (b).
The lower bands are filled and higher bands are empty in a semiconductor.
The highest filled band is the valence band.
The lowest empty band is the conduction band .
Modern Semiconductor Devices for Integrated Circuits (C. Hu)
Slide 1-6
Ec
Band gap
Eg
Ev
Valence band
Energy band diagram shows the bottom edge of conduction band,
Ec , and top edge of valence band, Ev .
Ec and Ev are separated by the band gap energy, Eg .
Modern Semiconductor Devices for Integrated Circuits (C. Hu)
Slide 1-7
photons
Ec
Eg
Ev
hole
Ge
0.67
Si
1.12
GaAs
1.42
GaP
2.25
Diamo
ZnSe
nd
2.7
6
Slide 1-8
Acceptor Level
Ed
Ec
Ea
Valence Band
Ev
P
44
Acceptors
As
54
B
45
Al
57
In
160
Slide 1-9
E g = 1.1 eV
Si (Semiconductor)
Ec
Top of
conduction band
E g= 9 eV
empty
Ev
Ev
SiO (Insulator)
2
filled
Ec
Conductor
Slide 1-10
Ec
Ev
hole kinetic energy
Slide 1-11
2 V ( r )
2m 0
q d 2 E F
accelerati on 2
2
dk
m
2
effective mass 2
d E / dk 2
Modern Semiconductor Devices for Integrated Circuits (C. Hu)
Slide 1-12
mn/m0
mp/m0
Si
0.26
0.39
Ge
0.12
0.3
GaAs
0.068
0.5
InAs
0.023
0.3
AlAs
2
0.3
Slide 1-13
mn v 2
qvB
r
qBr
v
mn
v
qB
f cr
2r 2mn
Microwave
Slide 1-14
Ec
Dc
Ec
D
Ev
Ev
Dv
Dc ( E )
Dc ( E )
Dv ( E )
number of states in E
1
3
E volume
eV cm
8mn 2mn E Ec
h3
8m p 2m p Ev E
h
Derived in Appendix I
Slide 1-15
Dish
Vibrating Table
Slide 1-16
f (E)
1
1 e
( E E f ) / kT
Boltzmann approximation:
f (E) e
Ef + 3kT
EE f
f (E) e
kT
Ef + 2kT
Ef
f (E) 1 e
Ef + kT
Ef
Ef kT
EE f
kT
E f E kT
E E f kT
E E f kT
R e m e m b e r : th e r e is o n ly
Ef 2kT
Ef 3kT
f (E) 1 e
f(E)
0.5
E f E kT
o n e F e r m i- l e v e l i n a s y s t e m
a t e q u il i b r i u m .
Slide 1-18
Ec
8mn 2mn
n
h3
8mn 2mn
h
f ( E ) Dc ( E )dE
E Ec e
Ec
Ec E f
kT
E Ec
EE f
kT
dE
E Ec e E E c
kT
d ( E Ec)
Slide 1-19
N c 2
( Ec E f ) / kT
2mn kT
h 2
p Nve
32
( E f Ev ) / kT
2m p kT
N v 2
2
h
32
Slide 1-20
( Ec E f ) / kT
Ec
Ec
Ef
Ef
Ev
(a)
0.31 eV
Ev
(b)
Slide 1-21
ed
p
o
d
r
o
n
Ef, Do
Ef , Acce
400K
n Nce
( Ec E f ) / kT
E f Ec kT ln N c n
ptor-dop
ed
400K
300K
Ev
1013
1014
1015
1016
1017
1018
1019
1020
N a or N d (cm-3)
Modern Semiconductor Devices for Integrated Circuits (C. Hu)
Slide 1-22
( Ec E f ) / kT
np N c N v e
and
( Ec Ev ) / kT
np ni
p Nve
Nc Nve
( E f Ev ) / kT
E g / kT
ni N c N v e
E g / 2 kT
Slide 1-23
ni
10 20 cm -3
p
15 3 105 cm -3
n 10 cm
After increasing T by 60C, n remains the same at 1015 cm-3 while p
E / kT
2
increases by about a factor of 2300 because ni e g .
Question: What is n if p = 1017cm-3 in a P-type silicon wafer?
Solution:
ni
10 20 cm -3
n
17 3 103 cm -3
p 10 cm
Slide 1-24
n N d 1017 cm 3 E f Ec 146meV
45meV
146 meV
Ed Ec
Ef
Ev
Probability of not
being ionized
1
1 ( E E ) / kT
1 e d f
2
1
1
1 e((14645) meV ) / 26 meV
2
0.04
Slide 1-25
n Na p Nd
np ni
Na Nd Na Nd
2
p
ni
2
2
1/ 2
Nd Na Nd Na
2
n
ni
2
2
1/ 2
Slide 1-26
n Nd Na
2
p ni n
If N d N a ,
n Nd
If N a N d ,
p Na
p ni N d
and
p Na Nd
n ni
and
p
2
n ni N a
Slide 1-27
++++++
n = 410 cm-3
......
Nd = 61016 cm-3
16
-3
. . . .N.a. =. .210
. . . cm
16
16
n ni / p 10 20 / 2 1016 5 103 cm 3
++++++
......
Nd = 61016 cm-3
Na = 81016 cm-3
-------- ......
p = 21016 cm-3
Slide 1-28
ln n
intrinsic regime
n = Nd
freeze-out regime
1/T
High
temp
Room temp
Cryogenic temp
high T: n p ni N c N v e
Nc Nd
low T: n
E g / 2 kT
1/ 2
e ( Ec Ed ) / 2 kT
Slide 1-29
Ec
Ed
Ev
Slide 1-30
p Nve
( E f Ev ) / kT
n Nd Na
p Na Nd
np ni
Slide 1-31