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[1]

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-9: ha9nma. 2. 10.

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[3]

McGeough J. A, Leu M. C, Rajurkar K. P, De Silva A. K. M, Liu Q, Electroforming Process ans Application

to Micro/Macro Manufacturing, CIRP Annals-Manufacturing Technology, 50/2/2001, pp 499-514.

-9: ha9nma. 4. 10.

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pp 483-695.

-9: ha9nma. 5. 10.

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[5]

Vogler M. P, Liu X, Kapoor S. G, DeVor R, Ehmann K. F, Development of Meso-scale Machine Tool (mMT) Systems,
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http://www.mech.northwestern.edu/MFG/AML/pdf/2002-154.pdf

-9: ha9nma. 6. 10.

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[7]

WTEC Panel Report on INTERNATIONAL ASSESSMENT OF RESEARCH AND DEVELOPMENT IN

MICROMANUFACTURING, http://www.wtec.org/micromfg/report/Micro-report.pdf.
[8]
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of Machine Tools & Manufacture, 47(2007), pp 1651-1659. (ASM: Signal Access Module).

-9: ha9nma. 7. 10.

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[8]

[8.1] Ryan M, Voice Coil, ECE 5320 Mechatronics Assignment 1, Utah State
http://mechatronics.ece.usu.edu/ece5320/Schedule/hw01-2006/Michel_Ryan_a.ppt
[8.2] N. N, Linear Piezoelectric Motors, PiezoMotor Uppsala AB, http://www.piezomotor.se

University,

2006.

-9: ha9nma. 8. 10.

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-9: ha9nma. 9. 10.

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[9]

Kurita T, Hattori M, Development of new-concept desk top size machine tool, International Journal of Machine Tools &
Manufacture, 45(2005), pp959-965.

-9: ha9nma. 10. 10.