Bo co bi tp ln

Nhm 2 KU1301-KU1302
Khoa Khoa Hc ng Dng
i Hc Bch Khoa TpHCM

Knh hin vi in t

T knh hin vi quang hc n knh

hin vi in t

S cu to knh hin vi quang

hc

Cc loi knh hin vi in t

ph bin

Knh
Knh
Knh
Knh

hin
hin
hin
hin

vi
vi
vi
vi

in t truyn qua (TEM)

in t qut (SEM)
in t TUNEL (STM)
lc nguyn t (AFM)

Knh hin vi in t truyn qua

(Tranmission Electron Microscopy - TEM)

Nm 1924 trong lun n tin s ca

mnh,Louis De Broglie a ra gi
thuyt:Cc ht vi m iu c tnh
cht sng,ht c ng lng
P=mv
h
h

ng vi
sng
c bc sng c bc
p
mv
sng
Bc sng ca in t nh hn rt
nhiu so vi sng nh sng nn s
dng sng in t s to ra thit b
c phn gii tt hn nhiu knh

Knh hin vi in t truyn qua

Cu to

Knh hin vi in t truyn qua

Sng phng in t

Sng phng in t l ngun pht

in t (electron) thay th nh
sng chiu vo vt cn quan st.

Knh hin vi in t truyn qua

Thu knh t

Nguyn tc hot ng: tng t thu

knh thy tinh nh hng cho
chm tia in t trong knh hin vi
Cu to: L mt nam chm in c
cu trc l mt cun dy cun trn
li lm bng vt liu t mm. iu
khin chm tia electron qua thu
knh, cn phi iu chnh cng
dng in qua cun dy.

Knh hin vi in t truyn qua

B phn ghi nhn v quan st nh

Khc vi knh hin vi quang hc, TEM

s dng chm in t thay cho ngun
sng kh kin. quan st nh, c
th s dng cc cch di y:
Mn hunh quang v phim quang hc
Camera in t

Knh hin vi in t truyn qua

u im v hn ch

u im:
To nh vi tng phn, phn gii cao
C th thc hin phng php nhiu x in t, vi chm

electron l chm sng n sc cn mu tinh th l cch t

khng gian 3 chiu, t kt hp vi nh hin vi cho bit
nhiu hn thng tin v cu trc vt cht

Hn ch
Yu cu kht khe trong qu trnh hot ng v bo dng,

trnh vn hnh cao

Chi ph cao
i hi x l mu vt phc tp (cn phi ph hy mu), mu
nghin cu ca TEM c dy rt nh (c hng chc nm)
Cn khim khuyt trong vic cho thng tin v su ca nh

Knh hin vi in t qut

(Scanning Electron Microscopy - SEM)

Knh hin vi in t qut , l mt loi

knh hin vi in t c th to ra nh
vi phn gii cao ca b mt mu
vt bng cch s dng mt chm cc
electron hp qut trn b mt mu.
Vic to nh ca mu vt c thc
hin thng qua vic ghi nhn v phn
tch cc bc x pht ra t tng tc
ca chm in t vi b mt mu vt.

Knh hin vi in t qut

Cc bc x in t ch yu khi chiu
chm tia in t ln b mt mu vt

Bc x in t th cp
Bc x in t tn x ngc
Tia X, nh sng, cc loi in t khc

Tt c cc bc x ny u c
Detector ghi li, t c th ti to li
hnh nh b mt mu vt.

Knh hin vi in t qut

Cu to v nguyn l lm vic

Knh hin vi in t qut

u im v hn ch

u im
Lm mu d dng, khng phi ct lt mng
To nh phng i bng phng php qut, do nh c

chiu su cng nh chi tit tt hn.

C th chp nhiu kiu nh trn cng mt mu, mi kiu th
hin mt c tnh khc nhau bng vic thay i u thu
(detector)

Hn ch
Mu quan st vn phi c t trong mi trng chn khng
nh d c su nhng vn l nh 2 chiu, v ch quan st

c b mt ca vt mu
Nng sut phn gii km hn knh hin vi in t truyn qua
v cn cch rt xa yu cu thy c nguyn t

Knh hin vi in t TUNEL

Hiu ng ng hm

Hiu ng ng ngm l hin tng

mt vi ht vt qua mt ro th nng
c ln U0 ln hn nng lng E ca
ht. Ro th nng l mt min khng
gian c th nng ln hn th nng
cc min xung quanh.

Knh hin vi in t TUNEL

Cu to v nguyn l

Knh hin vi in t TUNEL

Cu to v nguyn l

Knh hin vi in t TUNEL

u im v hn ch
u

im
C phn gii cao ( thy c nhng
hnh nh tng nh khng th: nguyn
t, ADN)
Khng cn b gii hn bi mi trng
chn khng nh SEM, TEM.
STM l mt k thut ghi nh m khng
i hi phi ph hy mu nh knh TEM
( knh hin vi in t vi phn gii
tng ng).

Knh hin vi in t TUNEL

u im v hn ch
Hn

ch

Yu cu c ch chng rung phc tp

Vt mu phi dn in
Tc ghi nhn hnh nh thp
Ch dng kho st cu trc b mt ca mu

Knh hin vi lc nguyn t

(Atomic Force Microscopy - AFM)

khc phc mt s hn ch ca
knh hin vi TUNEL, Binnig v Rohrer
pht minh ra knh hin vi lc
nguyn t (AFM)
Knh hin vi lc nguyn t hot ng
theo nguyn tc u d nh knh
hin vi TUNEL nhng da vo lc
tng tc gia nguyn t b mt
vt mu v nguyn t u mt u
d to nh

Knh hin vi lc nguyn t

Cu to v nguyn l hot ng

Knh hin vi lc nguyn t

u im v hn ch

u im
C phn gii cao
Cung cp thng tin ba chiu ca b mt vt

mu
S dng dc trn vt mu dn in v vt
cch in
Khng yu cu mi trng chn khng m

Hn ch

Ch qut c trn mt din tch rt nh (ti

a 150
Tc qut chm, cht lng nh b nh

Cm n thy c v cc
bn lng nghe