The AHU supply is not 100% OA. That is why there is a return air duct.

The OA
required must be adequate for ventilation & pressurization. For pressurization of
0.05"wg assume 1.25 CFM OA/SF floor area and adjust as required during the
commissioning. Better yet, Kenred should measure that on the existing AHUs and
factor it with the ratio of new vs existing building area. Also Kenrad, see if you can
find control sequence of operation of the existing. See if it has active pressurization
controls and setback (reduced airflow at unoccupied times). Class 10,000 requires
minimum 30 ACPH. You should make sure the supply air dewpoint is low enough to
handle the loads. You would not want condensation to occur in the plenum or
anywhere within the clean room.