Professional Documents
Culture Documents
4
5 .
.
.
.
.
55
.
.
1
sensor
processor
3
actuator
4
chip
5
)Micro Electro Mechanical System (MEMS
2
.
.
1333
.
.
.
.
.
.
.
.
1335
akbari@sharif.edu
masoudinejad@mech.sharif.edu