Bai Giang Ky Thuat Cam Bien Do Luong Va Dieu Khien

BO CONG THNG
TRNG AI HOC CONG NGHIEP TP. HO CH MINH

KHOA C KH
TAP BAI GIANG
KY THUAT CAM BIEN

O LNG VA IEU KHIEN
Giang vien: ao Thai Dieu, TS.
TP. HO CH MINH, 2008
Tap Bai giang Ky thuat Cam bien o lng va ieu khien, ao ThaiDieu, TS., HCN TP.HCM, 2006.
DAN NHAP
Tap bai giang Ky thuat Cam bien o lng va ieu khien c bien soan theo chng trnh ao
tao ai hoc cac chuyen nganh ky thuat (nam th ba ai hoc).
Muc tieu bien soan tap bai giang nay nham giup sinh vien co tai lieu hoc tap mon hoc Ky thuat
cam bien o lng cac ai lng khong ien ben canh cac tai lieu tham khao khac theo hng
dan cua giang vien e nam c nhng noi dung truyen at tren lp mot cach tch cc, ket hp
nhng dan giai va he thong hoa van e cua giang vien vi nhng nghien cu thao luan chuyen e
seminar cua lp hoc.
Vi nhan thc rang mon ky thuat cam bien o lng lien quan hau het cac lnh vc kien thc c
ban ma sinh vien cac nganh ai hoc ky thuat a hoac ang tiep thu trong chng trnh hoc, mot so
phan lien quan chu yeu c a vao cac phu luc cuoi tap bai giang nay e sinh vien t oc on lai
va he thong hoa kien thc a hoc trong nhng mon khac.
La mot tap bai giang, tai lieu c chia thanh cac bai giang, da theo chng trnh giang day mon
hoc la 3 tn ch (tng ng 45 tiet len lp va 45 tiet t hoc cua SV). Viec bo tr chng trnh
giang day phu hp la tuy giang vien, tuy nhien, thi lng moi bai giang ay tnh cho 4 tiet len
lp (khong ke kiem tra va on luyen). Va o cung ch co tnh chat khuyen ngh.
Nhng noi dung tap hp trong tap bai giang nay c thc hien tren c s nhng tai lieu mi va
cap nhap, neu trong muc Tai lieu tham khao, phu hp vi nhng bai giang tren lp theo chng
trnh, e cng mon hoc cua nha trng. Tuy nhien, do nhng han che nhat nh, viec tap hp trnh
bay trong mot tap sach co the con nhieu khiem khuyet. Rat mong cac ong s, ong nghiep giup
gop y chnh ly va nhat la nhng sinh vien ma tap bai giang nay nham hng ti.
ao Thai Dieu, 01.2008.
TAI LIEU THAM KHAO

1. Mess- und Regelungstechnik. K.Boether, H.Breckwoldt, H-J.Siedler, R.Wieting, Pflaum Verlag,
Muenchen, 1995. Tieng c.
2. Position Sensing Angle and Distance Measurement for Engineers. H.Walcher, Butterworth
Heinemann, 1994. Tieng Anh.
3. Sensor Technology Handbook. Jon S. Winson, Ed.-in-Chief, Elsevier Inc., 2005.
4. Sensors and Actuators (A,B&C), Journal by Elsevier Science of Amsterdam, Netherlands.
5. Modern Control Technology Components & System, 2nd Ed.
6. MEMSnet, online Web site: www.memsnet.org; Corporation for National Research Initiatives of
Reston, Virginia, USA, and Nexus Association of Grenoble, France.
7. The Mechatronics Handbook, Robert H.Bishop, Ed.-in-Chief, CRC Press LLC, 2002, online Web
site: www.crcpress.com.
8. Cac bo cam bien trong ky thuat o lng va ieu khien. Chu bien: Le Van Doanh, NXB KHKT,
Ha Noi, 2001.
9. o lng cac ai lng khong ien (Tap bai giang). Nguyen Khac Hai, Cuc TCLCL, Ha noi,
1992.
10. Ky thuat ieu khien t ong (Tap bai giang). ao Thai Dieu, TP.HCM, 2007.
11. T ong hoa san xuat (Tap bai giang). ao Thai Dieu, TP.HCM, 2006.
12. Ky thuat vi x ly ng dung trong o lng va ieu khien (Tap bai giang). ao Thai Dieu,
TP.HCM, 2005.
13. Phan t t ong (Tap bai giang). ao Thai Dieu, TP.HCM, 2004.
14. Ky thuat o ien ien t (Tap bai giang). ao Thai Dieu, TP.HCM, 2002.
15. He thong thong tin o lng (Tap bai giang). ao Thai Dieu, TP.HCM, 2000.
WUX
BAI 1. C S KY THUAT CAM BIEN O LNG.

CHNG 1. KHAI NIEM CHUNG.
Muc tieu bai nay tap trung vao nhng khai niem c ban va nhng
van e tong quat cua ky thuat cam bien o lng ng dung
gom chng 1.
Noi dung c ban ma SV phai nam c bai nay la nhng van e
trong tam sau:
Khai niem tong quat ve he thong tin o lng va ieu khien
cung nhng phan t cau thanh c ban cua no, hoat ong chc
nang, cac ac tnh ky thuat, ac iem ng dung. ac biet can
nam vng va hieu c ban chat cac nh ngha khai niem,
ac tnh van hanh, he thong hoa trong phan loai phan t, t
duy logic trong ky thuat ng dung.
Cac van e ng dung thc tien cac phan t cam bien trong he
thong tin o lng va ieu khien e co nhan thc va ren ky
nang tong hp, thiet ke va che tao he thong cu the trong thc
te moi trng ng dung.
Cac t khoa, thuat ng va y ngha cua no trong phan nay (va
tiep ve sau) ong vai tro quan trong trong nhng bai kiem tra
va thi trac nghiem ly thuyet noi chung.
Thi lng bai giang la 04 tiet/45 tiet len lp theo chng trnh mon
hoc la 03TC (45 tiet) va 04 tiet t nghien cu.
1.1 Khai niem he thong o lng va ieu khien.
Ngay nay, kho co mot nganh ky thuat nao khong bao gom ky thuat o lng va ieu khien t
ong, ma trong o cac phan t cam bien o lng thng ong vai tro tien quyet. ng dung ien
hnh la trong cac day chuyen cong nghe c kh che tao, cac may t ong trong san xuat, gia cong
go, kim loai, nha plastics, may moc che bien thc pham, cac loai may in va ong goi san pham,
vv ...
S phat trien cua ky thuat o lng va ieu khien hien ai da tren c s nhng tien bo khoa hoc
cua nhieu nganh ly thuyet c ban cung nh nhng tien bo cong nghe trong ky thuat ng dung. ac
biet, tien bo ky thuat cong nghe a a en s thong nhat chuan hoa trong che xuat cac linh kien,
cac phan t t ong, cac khoi chc nang module Trong nhieu lnh vc khac nhau cung co nhieu
trng hp s dung nhng bo phan, phan t t ong chc nang nh nhau. V du, cac he cam bien
v tr va ieu khien cac vat the dch chuyen vi o chnh xac cao c ng dung rong rai trong cac
nganh nh giao thong van tai, hang hai, hang khong, cu ho (nh v tau thuyen, xe may va may
bay, ieu khien cac he d phong va truyen tai nang ...), cung nh trong cac nganh thong tin lien
lac vien thong, thien van vu tru (dung e ieu chnh v tr cua cac anntena radio, radar, cac he vien
vong thien van, ...).
Noi chung, cac phan t cam bien khong hoat ong t than. Chung la mot bo phan cua mot he ln
bao gom ca cac bo chuan hoa tn hieu va cac mach x ly tn hieu so va tng t khac nhau. Noi v
du, he thong co the la he o lng, he thu thap d lieu, hay he ieu khien qua trnh cong nghe.
ay, chung ta tap trung vao cac phan t cam bien trong he o lng va ieu khien qua trnh cong
nghe. Hnh 1.1 gii thieu mo hnh ieu khien t ong qua trnh cong nghe, c thc hien bi mot
he thong tin o lng ieu khien.
Hnh 1.1 Mo hnh ieu khien t ong qua trnh cong nghe.
Qua trnh cong nghe la mot he vat ly c mo ta bi cac bien trang thai. Cac bien nay ac trng
nh tnh qualitative va nh lng quantative cho qua trnh cong nghe bi cac phng trnh mo ta
quan he toan-ly va cac so lieu o thc nghiem. Qua trnh cong nghe c ieu khien (hoac ieu
chnh) bi mot he thong o lng va ieu khien t ong, hoat ong theo mot chng trnh program
nh san, tren c s cac d lieu thu nhan c t cac bo phan, phan t cam bien o lng
transducers va tnh nang cua cac phan t c cau tac hoat chap hanh actuators.
Nh vay, he thong thong tin o lng va ieu khien la tap hp phng tien ky thuat vi chc nang
chung va hoat ong theo mot chng trnh chung, thu nhan thong tin t oi tng (o lng, bien
oi, hien th hay lu tr) va x ly tiep theo e thc hien nhng muc tieu chc nang he thong (ieu
khien, hieu chnh hay theo doi giam sat).
Nhng nam gan ay, s phat trien cong nghe ien ttin hocvien thong a co nhng bc tien
can ban ve hieu suat tnh toan, dung lng nh, toc o x ly va truyen dan d lieu cung nh
nhng phat trien phan mem ng dung. Cung vi s hnh thanh va phat trien mang vien thong
Internet, cac mang may tnh (cuc bo va ca dien rong) cung c s dung cho cac he o lng va
ieu khien, ng dung chu yeu la thu thap va x ly d lieu nham t ong ieu chnh / ieu khien
qua trnh cong nghe cung nh theo doi giam sat trang thai qua trnh.
Hnh 1.2 gii thieu cau truc ien hnh cua mot he cam bien o lng va ieu khien.
Hnh 1.2 Cau truc ien hnh mot he cam bien o lng va ieu khien t ong.
ng dung cam bien trong mot he ieu khien qua trnh ien hnh c trnh bay trong hnh 1.3. Gia
thiet thuoc tnh vat ly can ieu khien la nhiet o. au ra cua cam bien nhiet o c chuan hoa va
4
roi so hoa bang chuyen oi ADC. Bo vi ieu khien microcontroller hay may tnh chu xac nh lieu
nhiet o co cao hn hay thap hn gia tr mong muon, va xuat tn hieu ti chuyen oi sotng t
(DAC). au ra DAC c chuan hoa va ieu khien c cau chap hanh actuator, trong trng hp
nay la mot bo gia nhiet heater. Lu y rang giao dien gia trung tam ieu khien va qua trnh ieu
khien t xa la thong qua mang tieu chuan cong nghiep 4-20 mA.
Hnh 1.3 Mach ieu khien mot qua trnh cong nghiep ien hnh.
Ky thuat so a tr thanh pho bien trong viec x ly cac au ra cam bien trong thu thap d lieu o
lng, ieu khien qua trnh va cac phep o. Noi chung, cac vi ieu khien 8-bit (v du 8051) co toc
o va dung lng x ly thch ang oi vi hau het cac ng dung. Bang cach gop them chuyen oi
A/D va tnh nang lap trnh vi ieu khien t ben trong cam bien, co the tao nen mot cam bien linh
hoat smart sensor vi cac tien ch t chuan nh va tuyen tnh hoa trong so nhieu tien ch khac.
Khi o, mot cam bien linh hoat co the giao dien trc tiep vi mot mang cong nghiep nh trnh bay
trong hnh 1.4.
Hnh 1.5 trnh bay cac khoi cau tao c ban cua mot cam bien linh hoat, c cau hnh vi cac vi
mach tch hp a thanh phan. Loat san pham MicroConverter cua hang Analog Devices bao gom
on-chip cac bo oi noi multiplexers tnh nang hoat ong cao, cac chuyen oi tng tso (ADCs)
va sotng t (DACs), ghep vi bo nh Flash va mot loi vi ieu khien tieu chuan cong nghiep
8052, cung nh giai phap mach ho tr va vai cau truc cong noi tiep tieu chuan.
o la nhng vi mach tch hp au tien thc s la nhng he thu thap d lieu cam bien linh hoat (cac
mach chuyen oi tn hieu, vi ieu khien, bo nh Flash tnh nang hoat ong cao) trong mot con chip
n (xem hnh 1.6).
Hnh 1.4 Tieu chuan hoa giao dien so dung cam bien linh hoat.
Hnh 1.5 Cac phan t c ban trong cam bien linh hoat.
Hnh 1.6 Mot cam bien tham ch con linh hoat hn.
1.2 Cac phan t chu yeu cua he thong.
S gia tang yeu cau ve o chnh xac, o an toan chat lng san pham va hieu qua cong nghe dan
ti nhng tien bo ky thuat c ban lam tang o chnh xac, o tin cay va toc o tac hoat cao cua cac
phng tien ky thuat o lng va ieu khien. Phng tien ky thuat trong he o lng ieu khien la
tap hp cac thiet b t ong o lng, t ong ieu khien va t ong x ly thong tin theo mot
chng trnh nhat nh, c goi chung la cac phan t t ong.
ay chung ta phan biet ba dang phan t t ong chu yeu:
Phan t cam bien Transducer, trong o gom co:
o Phan t cam bien tham so (R,L,C);
o Phan t cam bien vat ly (nhiet-ien, quang-ien, ap-ien, ).
Phan t chap hanh Actuator, trong o gom co:
o Cac phan t chap hanh dang may ien;
o Cac phan t chap hanh dang c cau ien-c.
o Cac phan t chap hanh thuy-kh.
Phan t thong tin, ac trng la:
o Tacho-generator;
o Selsyn;
6
o Bien ap quay;
o Cac phan t khuyech ai (khuyech ai t, khuyech ai may-ien, khuyech ai ien t, ).
o
Phan t cam bien Transducers. Cam bien o lng, ngay nay thng goi la ky thuat cam bien
sensorstechnique, c hieu nh ky thuat thu nhan va bien oi thong tin trang thai, la mot bo phan
thanh phan quan trong trong he ieu khien t ong.
Cac bien trang thai ac trng cho he thong va qua trnh thng la cac ai lng khong ien, nh
nhiet o, ap suat, ng lc, toc o, moment vv Cac phan t cam bien nhay cam oi vi nhng ai
lng vat ly khac nhau. Phan t cam bien thu nhan gia tr cua ai lng vat ly, vi s bien thien
theo thi gian cua no, chuyen oi thanh cac ai lng ien e co the gia cong x ly, hien th hoac
lu nh, truyen dan va x ly tiep nham ieu khien qua trnh. Chu yeu ai lng au ra cua cac
sensor la ien ap hoac dong ien, nhng cung co the la tan so hay ien tr, ien khang.
ay, ta goi chung la phan t cam bien. Theo ngha rong, phan t cam bien transducer la thiet b
hay bo phan thiet b cam nhan va ap ng vi cac kch thch t ai lng o, c ac trng nh
mot khau chc nang trong he thong o lng va ieu khien, mot mang hai ca noi chung (hnh
1.7).
Cam bien va cac mach ket hp cua no c dung e o lng cac thuoc tnh vat ly khac nhau nh
nhiet o, lc, ap suat, lu lng dong chay, v tr, cng o sang, vv Cac tnh chat nay tac ong
nh kch thch ti cam bien, va au ra cua cam bien c chuan hoa va x ly e cung cap so o
phu hp cua thuoc tnh vat ly o. Cac transducers hien ai thng c phoi ghep bo phan cam
bien o lng vi bo phan chuan hoa tn hieu conditioner va cac bo phan vi tnh khac (nh
microprocessor hay microcontroller) e hieu chnh hoac tuyen tnh hoa, xac nh cac anh hng
nhieu, xac nh nguon sai so va kh hoac giam thieu chung, cung nh e a ti cac bo phan ieu
khien khac (nh cac phan t chap hanh actuators ).
Nh vay, au ra cua cac phan t transducers thng la tn hieu a c chuan hoa, co the trc tiep
a ti giao dien vi cac khoi cau thanh he thong khac, thng la qua cac tuyen bus truyen dan,
hoac x ly, hien th trc tiep.
Noi mot cach nghiem chnh th cam bien sensor la mot dung cu chuyen oi tn hieu kch thch (the
hien mot thuoc tnh vat ly) thanh tn hieu ien; trong khi bien cam transducer la bo chuyen oi mot
dang nang lng thanh nang lng dang khac. Tuy nhien trong thc te, cac thuat ng nay c s
dung mot cach trao oi c.
Cac phan t cam bien c phan loai theo nhieu tieu chuan khac nhau.
Ve ban chat vat ly, cac cam bien c phan loai la phan t cam bien tch cc hay thu ong.
Cac phan t tch cc tac hoat nh mot nguon (nguon ap hay nguon dong), khong phai cung cap
nguon nang lng phu. Nhng phan t nay c bieu dien di dang mang hai ca co nguon trong.
Cac phan t tch cc ien hnh la cac phan t cam bien vat ly nh cam bien nhiet-ien
thermoelements, cap nhiet ngau thermocouples, cac he ien-ong electro-magnetic generators,
phan t quang-ien photoelements, tinh the ap-ien piezocristall, vv
Cac phan t thu ong tieu thu nang lng t nguon phu hoac lay t bien kch thch au vao e
bien oi thanh tn hieu au ra. Nhng phan t thu ong c bieu dien di dang mang hai ca
khong nguon, co tr khang trong phu thuoc kch thch au vao. ien hnh la cac phan t cam bien
tham so nh au do bien tr (chiet ap potentiometers, bien tr he so nhiet am hay dng NTC- /
PTC-, bang o bien dang DMS, bien tr quang photoresistances, ); cam bien ien dung (tu xoay /
tu ban cc phang ); cam bien ien cam; cam bien t tnh, vv
Nh vay, chung ta phan loai dang phan t tch cc hay thu ong la theo quan iem bien oi nang
lng t than cua phan t cam bien.
ieu can lu y la cho ti nay, mac du s phan biet ve tnh tch cc va tnh thu ong la ro rang va
kha thong nhat, nhng trong cac tai lieu khac nhau co nhieu cach nhn nhan khac nhau (tham ch
ngc lai) khi phan loai oi tng la thu ong hay tch cc. V nh co quan niem phan t tch cc
hay thu ong nh sau [000]: Mot cam bien tch cc oi hoi mot nguon kch thch ngoai. Cac cam
bien tren c s ien tr nh thermistors, RTDs (Resistance Temperature Detectors cac bo cam
bien nhiet kieu tr khang), va cac day o cang (Strain Gages) la nhng v du cam bien tch cc,
bi v dong ien phai chay qua chung va o ien ap tng ng e xac nh gia tr ien tr (cach
khac la mac dung cu vao mot mach cau; tuy nhien, trong trng hp khac, oi hoi phai cung cap
dong ien hay ien ap t ngoai). Mat khac, cac cam bien thu ong (passive hay self-generating)
tao ra tn hieu ien ap ra cua chnh chung ma khong oi hoi dong hay ap t ngoai. Cac v du ve
cam bien thu ong la cac cap nhiet ngau thermocouples va diodes quang photodiodes tao ra ien
ap nhiet-ien va dong quang-ien tng ng, khong phu thuoc vao mach ngoai. Nh vay, ngi ta
phan loai cam bien tren quan iem chuan hoa tn hieu, theo nhu cau can thiet (hoac khong) giai
phap mach tch cc ngoai e tao tn hieu ien ra t cam bien. Ta neu hai cach phan loai ac trng,
ch e co the hieu logic van e (ve quan niem, khong nen v the ma nham lan ve thuat ng trong
cac tai lieu tham khao).
Bang 1.1 di ay la mot tong quan khai quat ve cam bien.
Bang 1.1 Cac cam bien ien hnh va tn hieu ra cua chung.
Thuoc tnh
Cam bien
Tn hieu ra
Nhiet o
Cap nhiet ngau Thermocouple
ien ap
Silicon
Silicon Sensor
Ap / Dong
Kieu ien tr RTD
ien tr
Thermistor
Thermistor
Tr khang
Lc / Ap suat
Day o cang Strain Gage
ien tr
Ap-ien piezo- Piezoelectric
ien ap
Gia toc
May o gia toc Accelerometer
ien dung
V tr
LVDT
ien ap AC
Cng o sang
Photodiode
Photodiode
Dong ien
Mot phng cach logic khac phan loai cam bien la phan loai theo thuoc tnh vat ly ma cam bien
c thiet ke ng dung nh cam bien nhiet o, cam bien ap suat, cam bien chuyen ong, vv Nh
vay, theo nguyen ly bien oi co the phan loai cac cam bien nh sau:
Phan t cam bien tham so;
Phan t cam bien vat ly.
Cac phan t cam bien da tren c s nguyen ly hoat ong ng dung cac hieu ng vat ly nh ient, quang-ien, piezo, vv bien oi cac ai lng thong so trang thai vat ly cua qua trnh cong
nghe thanh nhng thay oi thong so ien, c goi chung la cac cam bien vat ly noi chung (xem
them Phu luc 2 ). Trong o, ac biet thong dung cac phan t cam bien bien oi cac ai lng vat
ly (nh nhiet o hay anh sang, chuyen v vat the hay tac dung lc va ng suat ) trc tiep thanh
nhng thay oi tham so ien (nh ien tr hay ien dan, ien cam hay ho cam, ien dung, ),
c goi chung la cac cam bien tham so (xem them Phu luc 1).
Phan t (c cau) tac hoat chap hanh Actuators. Trong cac he o lng va ieu khien, ben canh
viec thu nhan gia tr cac ai lng vat ly, gia cong x ly chung thanh cac tn hieu ien, la viec
bien oi tn hieu thanh nhng ai lng khac (v nh c hoc, am thanh hay anh sang ) cho nhng
muc ch ieu khien khong che tiep theo. Cac c cau bien oi nay c goi la c cau chap hanh.
Ngay nay cung goi chung la cac phan t tac hoat chap hanh actuators. Phan t tac hoat chap hanh
c ac trng nh mot khau chc nang trong he thong cam bien o lng va ieu khien, mot
mang hai ca noi chung (hnh 1.7).
Thong dung cac dang phan t tac hoat chap hanh sau:
Cac phan t chap hanh dang may-ien, nh ong c / may phat ong bo / khong ong bo, mot
chieu / xoay chieu ;
Cac phan t chap hanh dang c cau ien-c, nh rele, khp noi, khi ong t,
Cac phan t chap hanh thuy-kh.
Phan t thong tin. Trong cac he o lng va ieu khien con co mot kieu dang phan t t ong
kha ac biet la cac phan t thong tin. Nhng phan t nay co tnh nang khac nhau, trong nhieu
trng hp cung co tnh nang cam bien (nh tachogenerators, selsyn, mot so loai bien ap quay, ),
nhng chung nhat la kha nang truyen at thong tin ieu khien trc tiep, ong bo gia cac bo phan
cua he thong. ien hnh la:
Tacho-generator;
Selsyn;
Bien ap quay;
Cac phan t khuyech ai (nh khuyech-ai-t, khuyech ai may-ien, khuyech ai thuat
toan,)
Cung vi transducers va actuators, cac phan t thong tin va mach x ly tiep theo noi chung tao nen
he thong phng tien bieu trng trang thai cua mot qua trnh ky thuat hay cong nghe co ieu khien
nao o trong mot he o lng ieu khien thong nhat.
1.3 Cac ac tnh c ban.
Cam bien sensor la mot dung cu chuyen oi mot hien tng vat ly thanh tn hieu ien. Nh vay,
cam bien la mot phan cua giao dien gia the gii vat ly va the gii ky thuat ien, cung nh may
tnh ( la mot phan cua giao dien gia con ngi va the gii toan tnh). Phan khac cua giao dien nay
la cac c cau chap hanh actuators, chuyen oi tn hieu ien thanh tn hieu vat ly.
ay chung ta quan tam en kha canh giao dien cua the gii vat ly va he o lng ieu khien
cung nhng phan t cau thanh cua no. Ngay nay, nang lc x ly mot khoi lng thong tin khong lo
a c phat trien trong nganh ien tmay tnh. V du co y ngha nhat ve nang lc nay la may
tnh ca nhan va s ton tai cua cac bo vi x ly microprocessors, vi ieu khien microcontroller, em
lai kha nang thiet ke che tao nhng san pham gan ket vi toan tnh, t cong nghe che tao oto en
nhng thiet b dan dung nh lo vi song, ti o chi tre em. Vai nam lai ay cac phien ban cua
nhng san pham nay dung vi x ly trong cac bo phan ieu khien chc nang a tr nen pho bien
rong rai. Trong nganh che tao oto nhng kha nang nh the rat can thiet e at c nhng tnh
nang phu hp vi s han che ve o nhiem moi trng. Trong nhng trng hp khac, mot cach n
gian nang lc ay em lai nhng tien ch khong may ton kem.
Tat ca nhng mach x ly tn hieu, mach bien oi tng hp tn hieu chuan hoa tn hieu, ke ca
cac mach toan tnh tiep theo, eu can co tn hieu ien au vao e nhan ma lenh va d lieu thong
tin. Nh vay, cung vi s san co cac microprocessor re tien, c hoi s dung cac sensor a khong
ngng tang len trong hang loat san pham o lng ieu khien. Hn na, bi v au ra cua sensor la
tn hieu ien, cho nen cac sensors co xu hng ac trng nh the la cac linh kien ien t. Cac ban
ke d lieu cua nhieu sensor a c lap nen giong nh ban ke cua cac linh kien ien t.
Tuy nhien, oi vi cac phan t cam bien sensors cho ti nay cha co c s thong nhat gan vi
mot tieu chuan quoc te danh cho cac ac tnh ky thuat cua sensors. Ngi thiet ke he thong se bat
gap mot loat cac cach dien giai thong so hoat ong cua cam bien, va no co the gay nen lam lan.
Cho nen ay chung ta iem lai mot so nh ngha khai niem c ban ve cac ac tnh cua he o
lng ieu khien cung cac phan t cua no.
Trong cac he o lng ieu khien, phan t t ong la khau chc nang c ban, c mo ta tren c
v
v
s mo hnh mot khoi kn vi vector tn hieu au vao x (t ) va vector tn hieu au ra y (t ) (hnh 1.7).
Khi o, ban chat cua mo hnh toan hoc nay se chnh la anh xa:
v
v
T : x (t ) a y (t ) ;
(1.1)
hay co the viet di dang:
v
v
y (t ) = T {x (t )}.
(1.2)
Tren quan iem ky thuat, thay v tn hieu vao-ra cua phan t, ngi ta thng s dung khai niem
v
kch thch va ap ng vi ngha nh sau: neu kch thch phan t bang vector tn hieu x (t ) th se co
v
ap ng la y (t ) .
Viec khao sat, phan tch cac ac tnh cua mot phan t t ong thng c quy ve phan tch mo
hnh toan hoc cua no. Nh vay, ch can phan tch, khao sat ap ng cua phan t vi mot vai kch
thch ien hnh, chang han nh khao sat ap ng cua phan t vi kch thch la tn hieu xung Dirac
(t ) hay tn hieu bc nhay n v Heaviside 1(t). Tuy theo dang tn hieu c bieu dien trong
mien thi gian hay mien anh Fourier, Laplace th mo hnh se co dang la phng trnh vi phan, ham
truyen at hay ham ac tnh tan.
Ham truyen at.
Ham truyen at ch ro quan he chc nang gia tn hieu vat ly au vao va tn hieu ien au ra.
Thong thng, quan he nay thng c bieu dien bang o th ch ra moi quan he gia tn hieu au
vao va au ra, va nhng chi tiet cua quan he o co the tao thanh s mo ta cac ac tnh ky thuat
cua phan t. oi vi nhng phan t chuyen dung, nh la nhng sensor at tien, von c kiem
chuan ca biet, no co the dang ng cong quy chuan.
Ham truyen at cua mot phan t c xay dng tren c s mo hnh mo ta quan he vat ly ben trong
phan t va giao tiep vi moi trng tng tac ben ngoai. Cac quan he vao-ra nay cua phan t
thng c mo ta di dang phng trnh toan hoc, nh bieu thc (1.1) chang han. Ham truyen
at F(s) cua mot phan t t ong c nh nghia nh la ty so gia ap ng Y(s) vi kch thch
X(s).
Y ( s)
;
(1.3)
F (s) =
X ( s)
ay: Y(s) va X(s) la anh Laplace cua ap ng y(t) va kch thch x(t) t trang thai ban au bang 0.
Ham truyen at (1.3) c dan xuat t phng trnh vi phan mo ta quan he vao-ra cua phan t,
bieu dien theo toan t Laplace thanh mot phng trnh ai so, co the co dang tuyen tnh, phi tuyen,
ham loga, ham luy tha hay ham mu vv
10
Hnh 1.7 mo ta mo hnh mot phan t t ong bang ham truyen at F(s), ham trong lng g(t) khi
kch thch au vao la tn hieu Dirac (t ) , hay ham qua o h(t) khi kch thch au vao la tn hieu
bc nhay Heaviside 1(t).
Hnh 1.7 Mo hnh mot phan t t ong c mo ta bi ham truyen at F(s).

oi vi cac phan t cam bien o lng th thong thng kch thch au vao la s tac ong cua cac
ai lng vat ly ac trng thong so trang thai cua qua trnh; con ap ng au ra la tn hieu ien
tng ng. Quan he ap ng kch thch cua bo cam bien, c ac trng bi nhng ac tnh c
ban cua phan t cam bien trong anh hng cua rat nhieu yeu to tac ong, do vay rat phc tap.
ay chung ta e cap en nhng ac tnh c ban cua phan t cam bien noi chung, trc tien la e co
mot cach nhn khai quat va he thong.
o nhay. o nhay c xac nh theo cach noi rieng lien quan ti moi quan he gia tn hieu vat ly
au vao va tn hieu ien au ra. Noi chung, no la ty so gia s thay oi nho trong tn hieu ien oi
vi mot s thay oi nho trong tn hieu vat ly. Nh the, no co the c the hien nh mot dan xuat
cua ham truyen at lien quan vi tn hieu vat ly. n v o lng ien hnh la volts/kelvin,
millivolts/kilopascal, vv Mot nhiet ke co o nhay cao neu nh mot s thay oi nho cua nhiet
o at ket qua la mot s thay oi ien ap ln.
Trang thai ben ac tnh tnh.
Cac ac tnh ben mo ta tng quan thng on stationary gia ai lng au ra va au vao cua mot
phan t trong he o lng ieu khien, thong qua cac bien trang thai vat ly trang thai tnh hay
trang thai dng. Moi tng quan nay thng c bieu dien bang mot trng cac ng ac tnh
tnh. Khi o tnh nang truyen at cua phan t c mo ta bi quan he ham toan hoc gia ai lng
vat ly au vao x (kch thch au vao) va tn hieu au ra y (ap ng au ra) di dang bieu thc
(1.1), hay o th, hay bang gia tr so.
Ch co the noi en tnh ben oi vi cac phan t co ac tnh tham so tnh, mach can bang ma trong
o qua trnh bien thien ai lng au vao x va ai lng au ra y ng vi trang thai tnh hay dng
stationary. Vi nhng phan t khong can bang (ai lng au ra thay oi khi ai lng au vao la
hang nh phan t oan mach co tnh tch phan) th khong thuoc dang nay.
o tuyen tnh. Mot phan t la tuyen tnh trong mot dai bien thien trang thai au vao neu trong dai
o o nhay cua cam bien (hay chuyen oi) khong phu thuoc vao gia tr (o ln) cua bien au vao,
tc la o nhay la hang so. Khi o, che o tnh ac tuyen tnh la tuyen tnh. che o ong, o
tuyen tnh bao gom s khong oi cua o nhay va cua cac thong so ap ng, nh tan so dao ong
rieng, he so suy giam cung khong phu thuoc vao bien au vao.
Trong thc te, o tuyen tnh c dung nh la o phi tuyen. Ta hieu o la sai lech toi a so vi mot
ham truyen at tuyen tnh bao trum ca dai ong hoc ac trng. Co vai phep o sai lech o. Chung
nhat la so sanh ham truyen thc te vi ng thang nhat (xem hnh 1.9), nam gia hai ng
song song bao toan bo ham truyen trong suot dai ong hoc ac trng cua dung cu. S la chon
phng phap so sanh nay la pho bien bi v no lam cho a so cac cam bien trong co ve tot hn. Co
the dung nhng ng tham chieu khac, sao cho ngi s dung cung se can than khi so sanh ma
dung cung tham chieu ay.
11
o ln tn hieu au vao. La gia tr ln nhat cua tn hieu au vao ma sai so cua phan t khong vt
ngng cho phep. Thong thng ngng ong cua kch thch au vao c bieu dien bang dB,
logarithm cua ty so cong suat hoac ty so ien ap (bang 1.2).
P
u
1dB = 10 lg 2 = 20 lg 2 .
(1.4)
P1
u1
Decibel, dB
P2 P1
u 2 u1 ; (i2 i1 )
Bang 1.2 Quan he gia ty so cong suat, ien ap theo dB.

0,1
1,0
10
20
30
40
50
60
70
80
3
4
5
6
7
1,023 1,26
10
100 10
10
10
10
10
10 8
1,012 1,12 3,16
10 31,6 100 316 10 3 316 2 10 4
90
10 9
3. 10 4
100
1010
10 5
o phan giai. o phan giai cua mot cam bien c xac nh la dao ong tn hieu nho nhat co the
phan biet c. Bi v nhng dao ong that thng la hien tng tam thi, co moi quan he nao o
gia thang o thi gian oi vi dao ong va bien o nho nhat co the phan biet c. Do o nh
ngha cua o phan giai phai bao gom thong tin nao o ve ban chat cua phep o ang thc hien.
Nhieu loai cam bien b gii han bi nhieu co phan bo pho trang. Trong nhng trng hp nh vay,
co the ac trng o phan giai theo n v o cua tn hieu vat ly / root (Hz) (can bac hai root). Khi
o, co the xac nh o phan giai thc te oi vi tng phep o rieng biet bang cach nhan so lng
o vi can bac hai cua bang tan o. Cac ban ke d lieu cam bien noi chung xac nh o phan giai
n v o tn hieu / can bac hai (Hz) hoac cho tn hieu nho nhat co the phan biet c oi vi
phep o ac trng. Neu dang nhieu cung c mo ta ac tnh th co the tong quat hoa o phan giai
nay cho nhng phep o bat ky.
Tnh thi gian ac tnh ong.
Tnh thi gian mo ta moi tng quan bien thien theo thi gian gia cac ai lng au ra va au
vao cua phan t he. Cac phan t trong he o lng ieu khien thng bieu th nhng tnh chat ap
ng rat khac nhau oi vi s bien ong ai lng au vao (thng kem theo ai lng nhieu).
ieu nay co the c xac nh thong qua phan ng oi vi s bien ong au vao hoac anh hng
nhieu, se cho ket luan ve cac tnh nang truyen at cua no ac tnh ong cua mot phan t t ong
hay cam bien. Thng th ac tnh ong cua phan t c ac trng bi ham ac tnh tan cua no.
Hien tng tre. Mot so phan t cam bien sensor khong tr ve cung mot tr so au ra trong khi au
vao co xu hng dao ong len xuong. o rong cua sai so ky vong oi vi ai lng o c xac
nh nh la hien tng tre. n v o lng ien hnh la kelvin hay la phan tram cua toan thang o
FSO.
Dai ong hoc (hoac o rong pham vi ong hoc). Pham vi bien thien cua cac tn hieu vat ly au
vao co the chuyen oi thanh cac tn hieu ien cua cam bien la dai ong hoc hay la o rong pham
vi ong hoc. Nhng tn hieu ngoai pham vi nay c cho rang se gay nen s mat chnh xac khong
chap nhan c. o rong hoac dai ong hoc thng c nha cung cap cam bien ac trng nh la
pham vi bao trum ma cac ac tnh hoat ong cua phan t cam bien a neu trong ban ke d lieu
cuano hy vong se co tac dung. Cac n v o lng ien hnh la kelvin, pascal, newton, vv
o tac ong nhanh. La kha nang ap ng theo thi gian tac ong cua bien au vao (thi gian hoi
ap). Thi gian ap ng la khoang thi gian bien thien tn hieu ap ng au ra, t thi iem tac
ong cua bien au vao, cho en khi ch con khac gia tr cuoi mot ngng sai lech quy nh [%].
Hnh 1.8 bieu dien ap ng cua mot phan t t ong khi c kch thch bi tn hieu bc nhay n
12
v Heaviside 1(t): dang A la ap ng tc thi; B ap ng tre dang ham mu; C ap ng tc thi

co suy giam; D ap ng tre co suy giam; E ap ng dao ong tat dan.
Hnh 1.8 Cac dang ap ng cua phan t t ong oi vi tac ong au vao dang bc nhay.
o rong bang tan. Moi phan t eu co thi gian ap ng nhat nh oi vi s thay oi lien tuc cua
kch thch. oi vi cac cam bien th chung phai co thi gian e ap ng vi s bien thien lien tuc
cua tn hieu vat ly au vao. Them vao o, nhieu cam bien co thi gian ton hao, la khoang thi gian
can thiet sau bien ong dang bc nhay trong tn hieu vat ly e au ra cua cam bien at ti gia tr
thc cua no (hnh 1.8). Quan he tng ho cua nhng khoang thi gian nay tuy theo tan so tng
ng gii han tren hay di. o rong bang tan cua mot cam bien la pham vi tan so gia hai tan so
gii han ay.
Nhieu. Moi cam bien eu co au ra mot so nhieu ket hp lai trong tn hieu ra. Trong vai trng
hp, nhieu cua cam bien la nho hn nhieu cua phan t he thong ke can (phan t / linh kien ien
t), hoac nho hn nhng dao ong that thng cua tn hieu vat ly, ma trong trng hp o khong
may quan trong. Ton tai nhieu trng hp hn, khi nhieu cua cam bien lam han che hoat ong cua
he von da tren c s cam bien.
Thong thng nhieu c mo ta thong qua pho tan so. Nhieu nguon nhieu thong thng gay nen
phan bo pho nhieu trang ma co the noi rang mat o pho nhieu cung giong nh tat ca cac tan so
khac. Nhieu Johnson trong ien tr la mot v du ien hnh cua mo ta nhieu ay. oi vi nhieu trang,
mat o pho nhieu c ac trng n v volts/root-can bac hai(Hz). Co mot cach mo ta ban chat
t nhien ay la gop them nhieu vao phep o co bien o ty le vi can bac hai cua o rong bang tan
dai o. Bi quan he gia o rong bang tan va thi gian o la tr nghch ao cua nhau, nen co the
noi rang nhieu se giam theo can bac hai cua thi gian o.
o chnh xac (hay o bat nh) va sai so.
Noi chung, o bat nh c nh ngha nh la sai lech ln nhat co the xay ra gia cac tn hieu ra
thc te va tn hieu ra ly tng. n v o lng ien hnh la kelvin. oi khi c dan xuat nh la
mot phan (phan tram) cua toan bo thang o au ra hay la mot phan cua ch th oc c. V du,
mot nhiet ke am bao o chnh xac trong khoang 5% pham vi toan thang o FSO (Full Scale
Output). o chnh xac ay, noi chung c cac can bo o lng cong nhan, phai la mot thuat
ng nh tnh, trong khi o bat nh la thuat ng co tnh nh lng. V du: mot cam bien co o
chnh xac cao hn cam bien khac neu nh o bat nh cua no la 1% so vi nhng cam bien khac co
o bat nh 3%.
o chnh xac cua cac phan t t ong noi chung va cac phan t cam bien noi rieng tuy thuoc
chung loai, nguyen ly, phng phap va phng tien ky thuat cho phep thu nhan, bien oi hay tai
tao ai lng vat ly gan vi gia tr thc ti mc nao (hnh 1.9). oi vi cac phan t cam bien trong
13
thc tien ng dung ky thuat, o chnh xac cam bien c anh gia bi cac phep o nh lng,
bang ky thuat o lng, chung ac trng bi sai so o lng.
Hnh 1.9 Ham truyen va gii han sai so cua cam bien ly tng.
Ly thuyet sai so xay dng c s e nhan biet va anh gia sai so cua cac phep o thc nghiem. Ly
thuyet sai so la mot bo phan cua thong ke toan hoc, co nhiem vu xac nh tr so cua nhng ai
lng cha biet theo ket qua cua nhng phep o thc nghiem co cha sai so ngau nhien. Cong cu
toan hoc xac suat thong ke la c s tm ra quy luat phan bo cac sai so ngau nhien, tm cach anh
gia cac ai lng cha biet theo cac ket qua quan sat va xac nh sai so cua cac cach anh gia nh
lng (lng gia) chung.
Sai so tuyet oi cua phep o ai lng cam bien X la o lech gia gia tr o c X do va gia tr
thc X .
X = X do X .
(1.5)
Sai so tng oi cua cam bien:

X
[%] =
.100% .
X
(1.6)
oi vi phng tien o, thong thng sai so tuyet oi c xac nh theo pham vi o cua thiet b
(Pvd), c goi la thang o. Pham vi o Pvd cua mot thiet b o la gia tr chuan nh cua thang o,
bang khoang khac biet gia gia tr au va gia tr cuoi thang o. Cap chnh xac Cl. (Class) cua
phng tien o c nh chuan theo sai so tng oi quy oi tren toan thang o Pv:
X
~[%] =
.100% ;
(1.7)
Pvd
o ln ~ c anh gia nh sai so chuan nh hay sai so nho nhat cua thiet b o co the at ti, do
vay ma cap o chnh xac cua may o c nh ky kiem nh theo mc sai so ~ o.
Trong thc te, khi cha biet c gia tr that X va neu gia tr o X do nhan c theo quan sat tren
mot may o co cap chnh xac Cl. nao o, (khi sai so o u nho << 1 , va phep o c coi nh
khong chu anh hng cua sai so ngau nhien), th ket qua o bang:
14
Pvd .Cl
X = ( X do X ) X do
(1.8)
;
100%
ay: X do gia tr o thu c tren may o; Pvd pham vi thang o; Cl. cap chnh xac may o,
[%].
Khong the loai tr hoan toan c sai so, ngi ta ch co the anh gia sai so noi ung hn la
anh gia c gii han tren cua sai so mac phai trong cac phep o va anh hng cua no ti ket
qua o. Tuy tnh chat va nguyen nhan sai so, tuy theo cach anh gia ma giam thieu hay loai tr
anh hng cua sai so, ngi ta phan biet hai loai sai so: sai so he thong va sai so ngau nhien.
Sai so he thong la nhng sai lech co tr so gan nh khong oi hoac thay oi theo mot quy luat
nhat nh, trong mot loat phep o giong nhau (khong phu thuoc so lan o lap). Nguyen nhan co the
la:
Do nguyen ly cam bien, bien oi khong phu hp;
Gia tr ai lng chuan-so khong chnh xac;
Do ac tnh ky thuat cua cam bien khong tng thch;
Do ieu kien va che o s dung khong phu hp;
Do x ly ket qua o khong tot.
Sai so ngau nhien la sai so co tr so khong xac nh, bien thien bat thng, sinh ra do nhieu
nguyen nhan khong ro ch xac. Nhng nguyen nhan thng gap la:
Do ac tnh ky thuat cua cua cam bien thay oi ma khong c chuan lai;
Do tac ong nhieu ngau nhien;
Do anh hng nhng thay oi moi trng (thng la ieu kien o).
Sai so he thong th co the loai tr c hoac co the tnh c e hieu chnh, bo chnh ket qua o
mot cach thch hp. Sai so ngau nhien lai khong the loai tr, nhng van co the lng gia c o
ln (tr so) va anh hng cua no oi vi phep o. Viec lng gia gia tr sai so ngau nhien da tren
c s toan hoc xac suat thong ke, trong o sai so ngau nhien c ac trng bi cac ac tnh c
ban:
nh luat phan bo sai so va ham mat o phan bo xac suat sai so;
o lech trung bnh bnh phng (phng sai) va tr trung bnh so hoc;
Khoang tin cay va xac suat tin cay.
Theo nh luat phan bo chuan Gauss, th tr trung bnh so hoc (goi la gia tr xac suat ky vong)
cua cac ket qua quan sat le X i trong mot phep o lap ai lng cam bien X cho ta ket qua phep o
X do c coi la gan gia tr that X nhat, vi o sai lech trung bnh bnh phng (goi la sai lech
chuan , hay goi tat la phng sai). T o tnh c o tin cay thong ke (tc la xac suat P) xuat
hien mot gia tr o le X i trong khoang gia tr (pham vi tin cay) nao o cho trc X1 X i X2 .
Gia tr that von khong nhan biet trc tiep va ch xac c. Du cho co tien hanh o lap nhieu lan
(ly thuyet la vo so lan) gia tr o bang mot phng tien o trong cung mot ieu kien o, th cung se
cho cac ket qua quan sat khong giong nhau, khong phu thuoc nhau va bien oi mot cach ngau
nhien. Tuy vay, trong thc te phep o lap cho phep anh gia ai lng cam bien theo cac ac tnh
c ban neu tren cua phep toan tnh xac suat thong ke.
Chuan tn hieu giao dien cua cac bo cam bien. Noi chung, oi vi cac phan t cam bien, tn hieu
au ra cua cac cam bien vat ly thng khong phu hp, cha tng thch vi cac bo phan cua cac
cong oan ke tiep can thiet, nh x ly d lieu, lu ghi hien th, hay truyen dan Nhat la ngay nay
cac bo phan nay chu yeu la cac phan t linh kien ky thuat so may tnh. Do vay can chuan hoa tn
15
hieu, bien oi tng hp trong mot he o lng va ieu khien chung (xem hnh 1.2, 1.3) va c
thc hien bi bo conditioner chuan hoa giao dien gia cam bien vi bo phan ke tiep.
Ngay nay cac sensors va transducers co tn hieu au ra la tn hieu ien (dong hay ap) c xac
nh bi nhng phep bien oi tng hp tn hieu chuan hoa, trong ky thuat ieu khien t ong
thng la:
ien ap: 0 ... 10 [V]; 10 [V];
Dong ien: 0 ... 10 [mA]; 4 ... 20 [mA];
Tn hieu dong chuan hoa ( 4 20 ) [mA] c chap nhan nh mot chuan cong nghiep
Cac au ra toan thang o cua hau het cam bien la ien ap, dong ien hay nhng thay oi ien tr
tng oi nho, va do o cac au ra cua chung phai c chuan hoa mot cach thch hp trc khi co
the x ly so hay tng t tiep theo. V the, a xuat hien ca mot lp mach ien, noi chung c
tham chieu nh la cac mach chuan hoa tn hieu. Khuyech ai, chuyen mc, ien ly, bien oi tr
khang, tuyen tnh hoa, va loc la nhng chc nang c ban chuan hoa tn hieu co the can en.
Tuy nhien, du co lay bat ky dang chuan hoa nao i na th giai phap mach va viec thc hien se
c ch ao bi ac tnh ien cua cam bien va au ra cua no. S ac trng hoa chnh xac cam
bien trong cach noi rieng ve cac thong so ng dung, v nh o nhay, mc dong va ap, o tuyen
tnh, tr khang, o khuyech ai, thien ap, o troi, hang so thi gian, cac cc tr ve ien, tr khang
tre va cac ac tnh quan trong khac co the noi len s khac biet gia sieu chuan va s ng dung
thanh cong cua dung cu, ac biet la trong trng hp o phan giai va o chnh xac cao, hoac cac
phep o mc o thap c thc hien.
Mc o tch hp cao cua cac vi mach tch hp IC ngay nay cho phep chung ong vai tro ay y
ngha trong lnh vc chuan hoa ca tn hieu so va tn hieu tng t. Cac ADC (chuyen oi tng t
so) c thiet ke chuyen dung cho cac ng dung o lng thng bao gom cac bo khuyech ai lap
trnh c o khuyech ai ben trong con chp (PGAs Programmable-Gain Amplifiers) va cac
mach tien ch khac nh cac nguon dong e ieu khien cac RTDs ong thi giam thieu nhng yeu
cau ve mach chuan hoa tn hieu ngoai.
Hau het cac au ra cua cam bien la phi tuyen oi vi cac kch thch, va cac au ra cua chung phai
c tuyen tnh hoa nham mang lai phep o ung. Co the dung cac ky thuat tng t analog e
thc hien chc nang o. Tuy nhien, ngay nay a co cac chuyen oi A/D co tnh nang hoat ong
cao cho phep thc hien tuyen tnh hoa mot cach hieu qua va chnh xac hn nhieu bang cac phan
mem va gii han s can thiet phai co nhng hieu chuan bang tay phien phc bang cach s dung bo
nhan va oi khi la cac mach cat tng tac trimpots.
Cac phan t tch cc hay thu ong. Co the phan loai cac phan t t ong theo dang phan t
linh kien tch cc active hay thu ong passive. Nh tren a neu, co hai cach nhn khac nhau ve viec
o. ay chung ta i theo cach nhn nhan va cach phan loai chung nhat, tren c s nguyen ly bien
oi nang lng.
Cac phan t tch cc tac hoat nh mot nguon (nguon ap hay nguon dong), khong phai cung cap
nguon nang lng phu. Nhng phan t nay c bieu dien di dang mang hai ca co nguon trong.
Cac phan t tch cc ien hnh la cac phan t cam bien vat ly nh cam bien nhiet-ien
thermoelements, cap nhiet ngau thermocouples, cac he ien-ong electro-magnetic generators,
phan t quang-ien photoelements, tinh the ap-ien piezocristall, vv
Cac phan t thu ong tieu thu nang lng t nguon phu hoac lay t bien kch thch au vao e
bien oi thanh tn hieu au ra. Nhng phan t thu ong c bieu dien di dang mang hai ca
khong nguon, co tr khang trong phu thuoc kch thch au vao. ien hnh la cac phan t cam bien
tham so nh au do bien tr (chiet ap potentiometers, bien tr he so nhiet am hay dng NTC- /
16
PTC-, bang o bien dang DMS, bien tr quang photoresistances, ); cam bien ien dung (tu xoay /
tu ban cc phang ); cam bien ien cam; cam bien t tnh, vv
Cac phan t ly tng va thc te. Cac phan t t ong, nhat la cac phan t cam bien, ve nguyen
ly la ng dung cac hieu ng bien oi vat ly. Cac phan t cam bien co chc nang chung la bien oi
tn hieu au vao co ban chat nang lng nh c nang, ien nang, hoa nang hay nhiet nang, thanh
tn hieu au ra dang nang lng ien. Cac phan t ly tng thc hien bien oi nay ma khong ton
hao. V du, mot phan t cam bien ly tng dung o hay ieu chnh ap lc th khong c e b bien
dang, do o phai co o ben cng ln vo cung. Mot phan t cam bien o rung hay chan ong phai
co o deo cao vo cung, e co the lam viec ma khong b ton hao. oi vi nhng trng hp nh
vay, viec che tao cac phan t t ong (ly tng) tng thch vi yeu cau ky thuat la rat kho khan,
nhng lai rat can thiet cho cac cong viec nghien cu, khao sat, phan tch, thiet ke
Hau nh het thay cac nguyen ly vat ly ly thuyet va ng dung ma cong nghe at ti eu c em
ra ng dung cho ky thuat thiet ke va che tao chung. Moi ng dung ky thuat lai oi hoi phai co
nhng bien phap cau truc phu hp, do vay cac ac tnh cua cac phan t t ong thc te la rat a
dang. Noi chung, oi vi tng chung loai hay tng phan t t ong co nhng yeu cau chuyen biet
rieng, ch co the thoa hiep gia yeu cau ly tng va nang lc hien thc hoa chung cua ky nghe
ng ai.
1.4 C s ng dung.
Sau khi a iem qua nhng khai niem nh ngha c ban ve cac ac tnh hoat ong cua cac phan t
t ong noi chung va cac phan t cam bien noi rieng, chung ta hay tham khao mot v du lay ien
hnh ban ke d lieu cua mot phan t cu the minh hoa.
1.4.1 ac tnh van hanh cua mot cam bien cu the.
e minh hoa nhng khai niem nh ngha tren ta la ra tr so cua cac thong so ay oi vi mot may
o san co, may o gia toc ADXL150 cua hang Analog Devices.
Ham truyen.
Quan he chc nang gia ien ap va gia toc c neu ra la:
mV
V ( Acc) = 1,5V + ( Acc.167
);
(1.9)
g
ay: Acc la tr so o gia toc; V la tr so ien ap ra.
Co the dung bieu thc nay e hieu chnh ac tnh cua cam bien, va bao gom ca thong tin ve o
nhay va ien ap nh thien offset au ra cua cam bien.
o nhay.
o nhay cua cam bien c cho bi dan xuat ien ap oi vi gia toc tai mot iem van hanh nhat
nh. oi vi dung cu nay o nhay la 167 mV/g.
Dai ong hoc.
Dai ong hoc c neu ra oi vi ADXL322 la 2g. Ngoai pham vi nay tn hieu se tiep tuc tang
len hay ha xuong, nhng o nhay khong con c nha san xuat am bao la 167 mV/g na. Cam
bien co the chu ng c ti 3500g.
o tre.
Trong dung cu nay khong co nguon tre c ban nao. Trong ban ke d lieu khong noi g en o tre.
He so nhiet o.
Trong cam bien nay o nhay thay oi theo nhiet o, va s thay oi nay c am bao nho hn
0.025%/C. ien ap bu (nh thien offset) khi khong co gia toc (nh mc la 1,5V) cung thay oi
17
trong khoang 2 mg/C. Bieu dien bang ien ap, s thay oi ien ap bu nay khong ln hn 0,3
mV/C.
o tuyen tnh.
trng hp nay, o tuyen tnh la s khac biet gia ham truyen at thc te va ng thang nhat
trong suot pham vi hoat ong ac trng. oi vi dung cu nay, no c neu la nho hn 0.2% toan
bo thang o tn hieu ra. Ban ke d lieu cung cho o sai lech khoi o tuyen tnh co the co.
Nhieu.
Nhieu c bieu dien nh mat o nhieu va khong ln hn 300 microg/root Hz. e bieu th so lieu
o theo ien ap, ta nhan no vi o nhay (167 mV/g) c 0,5 microV/Rt Hz. Khi o, s dung bo
loc thong tan thap 10Hz, ta se co nhieu khoang 1,5 microV hieu dung, va sai so ve gia toc khoang
1 milligr.
o phan giai.
Ban ke d lieu cam bien cho so lieu la 300 miroG/Rt Hz.
o rong bang tan.
o rong bang tan cua cam bien nay phu thuoc vao s la chon cac tu ien va ien tr mach ngoai.
1.4.2 Cac van e ng dung.
Cam bien chat lng cao nhat, cap nhat nhat, c hieu chuan chuan xac nhat va c la chon ky
cang nhat van co the cho nhng d lieu hoan toan sai neu khong c ap dung phu hp. ay
xem xet mot vai van e ve nhan thc e am bao s dung cam bien mot cach phu hp, co hieu
qua, trong khi e cap en cac van e can phai tm hieu va giai ap trong qua trnh chon la va ap
dung bat ky cam bien nao.
Thng th mot trong nhng nhiem vu kho khan ma mot ky s o lng ieu khien phai oi mat la
viec chon la mot he o lng thch hp. Tnh thc dung ve kinh te va sc ep cua nhu cau oi vi
thiet b phan cng hoat ong mot cach thch ng va an toan tao nen mot yeu cau thiet thc ve viec
thu nhan d lieu chnh xac, thiet yeu oi vi moi mot phep o.
Mat khac, moi ng dung se co nhng ac trng khac biet cua no, va chac se tuy thuoc vao nhng
ieu kien moi trng khac, vi nhng yeu cau khac ve d lieu. Mot khi phep th nghiem hay cac
chng trnh o lng ang chay, th d lieu thng la tuy thuoc cac bc thao tac, phan tch va
khao sat tng tan. Trong moi trng nay, co the ngi ky s o lng khong con phu thuoc vao
cac he o lng chc nang tong quat cua mnh na ma hy vong co c d lieu chap nhan c.
Tat nhien, anh ta phai phan tch ky lng moi mat phep th a thc hien, khoan muc th nghiem,
cac ieu kien moi trng, va, neu nh san co, ca nhng d bao dung phep phan tch. Trong a so
cac trng hp, qua trnh nay se ch th mot s chon la ro rang cac thanh phan cua mot he chap
nhan c. Trong vai trng hp, nhng phan tch nay se ch ra nhng thoa hiep khong the tranh
khoi hoac s can oi thoa hiep gia hai ben va canh bao cho ngi ky s va khach hang cua anh ta
nhng thieu hut co kha nang xay ra trong ket qua. Phan di ay nham tr giup trong qua trnh la
chon mot he o lng chap nhan c.
Trong khi hy vong at c muc tieu, ta hieu rang khong the nham ti mot cach triet e moi tnh
huong co the xay ra. Ta hay xem xet mot vai trng hp gia thiet khi s la chon dung cu a c
lam mot cach can than, nhng nhng th nghiem a hong.
1. Th nghiem oi hoi thong tin ve tan so thap, trong lc g thap c o tren truc o bi xe la e
anh gia trang thai cua nen ng sat. Sau khi lng gia c pham vi nhng ieu kien phai o,
o nhay cao, cong hng thap, ngi ta a chon may o gia toc ap-ien piezoelectric. Nhng va
18
ap dien ra khi banh xe cham cac moi noi gia cac phan ng lam bo khuyech ai bao hoa, lam
cho no khong con kha nang thu nhan bat ky d lieu co ngha nao.
2. Mot muc th nghiem phai boc lo s ket hp moi trng rung ong va nhiet o thay oi nhanh.
Ngi ky s chon mot may o gia toc cho pham vi nhiet o cao ma khong tham khao y kien nha
san xuat. Tn hieu nhiet au ra lam tran ngap d lieu ve o rung ong.
3. S quan tam cac mach ien c ban nhac ti s chon la mot may o gia toc co vo boc cach ly.
Cau truc th nghiem c lam tng phan, t cac hp chat nhe, va trng hp cua vai may o gia
toc a khong c tham khao mot cach c ban. ien dung ky sinh cua nhieu giao thoa phat xa len
ng tn hieu bao phu ca luong d lieu.
T nhng v du tren, ta hy vong nhan manh c rang: oi vi tat ca cac he o lng, ch nhan
thc n thuan nhng g ta muon o la ieu khong u, khong tng xng. Tren thc te, moi hien
ng vat ly va hien tng ien hien hu eu can phai c nhan thc rang t ra chung eu b bao
phu, hay te hn, lam o nhiem mot cach tinh vi cac d lieu cua ta. Ngi s dung nen nh rang moi
he o lng phai hoan toan tng ng vi moi trng cua no.
Cac ac tnh cam bien. Noi chung, ngi s dung no lc tm cach la chon da tren c s nhng
ac tnh ky thuat san co trong ban ke d lieu san pham. Nhieu ac tnh ng dung c neu trong
ban ke d lieu ien hnh. Nhieu nha san xuat cam thay rang ban ke d lieu phai cung cap cang
nhieu thong tin cang tot. Khong may thay, s d tha d lieu nay co the tao ra s lung tung nao o
cho ngi se s dung chung, nhat la ngi mi s dung. Do o ngi ky s phai chac chan rang
anh (hay co ta) hieu biet nhng ac tnh c ban va chung se anh hng the nao ti phep o. Neu
ieu o khong con nghi ng g na, th nen tiep xuc vi nha san xuat e lam ro hn.
Cac ac tnh cua he. Cam bien va cac bo chuan hoa tn hieu phai c la chon e lam viec
chung vi nhau nh trong mot he thong nhat. Hn na, he thong phai c la chon e hoat ong
tot trong muc tieu ng dung a nh. o chnh xac toan phan cua he thng b anh hng nhieu
nhat bi cac ac tnh cua cam bien nh cac anh hng cua moi trng va cac ac tnh ong hoc.
Cac ac tnh khuyech ai nh o phi tuyen, o meo dang song hai va o phang cua ng cong
ap ng tan so thng la khong ang ke so vi cac sai so cam bien.
La chon dung cu. Viec la chon mot he cam bien (hay he chuan hoa tn hieu) cho nhng phep
o co o chnh xac cao oi hoi ngi ky s ay ky nang va phai ky lng. Phai nhan thc c tat
ca nhng ieu kien moi trng, c hoc, ky thuat o. Viec lap at phai c len ke hoach va thc
hien ky lng.
Nhng hng dan neu di ay nh mot phng tien e la chon va lap at cac he o lng e co
the at c o chnh xac cao nhat.
Cam bien. Phan t quan trong nhat trong he o lng la cam bien sensor. Neu d lieu b sai lac
hoac h hong bi cam bien, th thng rat hiem co kha nang chnh sa lai.
Lieu cam bien se hoat ong thoa man trong moi trng o hay khong?
Kiem th:
Pham vi nhiet o.
o va ap va rung ong toi a.
o am.
Ap suat.
Mc am thanh.
19
o an mon day o.
T trng va trng ien-t RF.
Phong xa hat nhan.
Hi bui muoi.
Nhiet dan.
Sc cang trong be mat lap rap.
Lieu cac ac tnh cam bien co cung cap d lieu vi o chnh xac mong muon hay khong?
Kiem th:
o nhay.
ap ng tan so.
Tan so cong hng.
Cong hng th cap.
ien dung ben trong.
o nhay xuyen ngang.
Bien o o tuyen tnh va o tre.
Dao ong nhiet o.
Trong lng va kch thc.
Tr khang trong nhiet o toi a.
o chnh xac hieu chuan.
o nhay sc cang.
Suy giam cac cc tr nhiet o.
iem 0 so o au ra.
o troi nhiet iem 0.
ap ng nhiet dan.
Lieu phng phap lap at dung cho ng dung nay co phu hp hay khong?
Kiem th:
Co can lp cach ly (ien, nhiet) hay khong?
Mach tiep a.
Mo phong hieu chuan.
Co can chat ket dnh lap rap khong?
Kch thc dai, o sau va cap bac.
Cap noi. Cac ng cable va au noi thng la moi lien ket yeu nhat trong chuoi he o lng.
Lieu ng cap co hoat ong thoa man trong moi trng o hay khong?
Kiem th:
Pham vi nhiet o.
Cac ieu kien o am.
Lieu cac ac tnh ky thuat cua cap co cung cap d lieu vi o chnh xac mong muon hay khong?
Kiem th:
o nhieu tap thap.
Kch thc va trong lng.
Tnh linh hoat.
Co oi hoi au noi niem kn hay khong?
Nguon cung cap.
Lieu nguon cung cap hoat ong co thoa man trong moi trng o hay khong?
Kiem th:
20
Pham vi nhiet o.
o am.
Ap suat.
Mc am thanh.
o an mon day o.
Phong xa hat nhan.
Hi muoi.
Lieu o a phai la nguon cung cap phu hp cho ng dung nay cha?
Kiem th:
ieu chnh ien ap.
ieu chnh dong ien.
S tuan thu ien ap.
ien ap ra co ieu chnh c khong?
Dong ien ra co ieu chnh c khong?
ng truyen ra co dai khong?
S can thiet cam bien ngoai.
Cach ien.
Card kieu thc mode, neu yeu cau.
Lieu cac ac tnh cua nguon co cung cap d lieu vi o chnh xac mong muon hay khong?
Kiem th:
ieu chnh tai.
ieu chnh ng dan.
On nh nhiet.
On nh thi gian.
o gn song va nhieu.
Tr khang ra.
ap ng ng truyen.
Nhieu ti at.
Cach ly ien mot chieu DC.
Bo khuyech ai. Bo khuyech ai phai cung cap o khuyech ai, phoi hp tr khang, dong ieu
khien ra, va cac x ly tn hieu khac.
Lieu bo khuyech ai co hoat ong thoa man trong moi trng o hay khong?
Kiem th:
Pham vi nhiet o.
o am.
Ap suat.
Mc am thanh.
o an mon day o.
Phong xa hat nhan.
Hi muoi.
ay a la bo khuyech ai phu hp vi ng dung nay cha?
21
Kiem th:
ng day vao co dai khong?
S can thiet bo khuyech ai nap.
S can thiet bo khuyech ai nap t xa.
ng day ra dai.
S can thiet bo khuyech ai cong suat.
ng truyen khong trung.
Cac gii han ve kch thc, trong lng, cong suat.
Lieu cac ac tnh khuyech ai co cung cap cac d lieu vi o chnh xac mong muon hay khong?
Kiem th:
o khuyech ai va o on nh khuyech ai.
ap ng tan so.
o tuyen tnh.
o on nh.
o dch pha.
Dong va ap ra.
Nhieu d.
Tr khang vao.
ap ng chuyen tiep.
ien dung qua tai.
Loai bo kieu thc mode chung.
He so nhiet zero-.
He so nhiet khuyech ai.
Thu nhan d lieu va ch th.
Lieu phan con lai cua he, bao gom ca cac khuyech ai phu, cac bo loc, cac thiet b thu d lieu va
ch th, co han che nao o lam mat gia tr cac ac tnh cua phan cam bien khuyech ai hay
khong?
Kiem th: ALL cua cac khoan muc th nghiem tren, cong ca giai thuat tng ng.
1.4.3 Lap at. Tham ch mot he a c la chon va hieu chuan mot cach can than va thong
suot nhat van co the tao ra nhng d lieu toi neu c lap at mot cach kem hieu biet va khong
can than chu toan.
Cam bien sensor.
Lieu bo phan a trong tnh trang tot va san sang e s dung?
Kiem th:
Cap nhat hieu chuan.
ieu kien vat ly.
Bao goi.
Be mat lap rap.
au noi.
Lap rap phan cng.
Kiem tra au lam sach.
ien tr trong.
Lieu viec lap rap phan cng a trong trang thai tot va san sang e s dung?
Kiem th:
22
ieu kien be mat lap rap.

ieu kien ng ren.
ay khoan cua cac khe cam.
au cach ly.
ien tr cach ly.
H hai au noi bi lc xoan qua mc.
Lo khoan va o sau c o u lng.
Hieu chnh kch thc lap rap.
Lo c at thang goc thch hp vi be mat lap rap.
ng ren cua au noi a c boi trn.
Sensor a c rap vi o xoan khuyen ngh.
Gan ket moi lap.
Kiem nghiem:
Be mat lap rap sach va phang.
Tram cement cho be mat loi lom.
Tron cement mot cach thch hp.
Sensor c rap vao au gan cement vi lc xoan khuyen ngh.
ng cap.
ng cap a trong tnh trang tot vasan sang e s dung?
Kiem th:
ieu kien vat ly.
Xoan day cap, ep dep.
Cac ng ren cua au noi, cac chan cam.
Kiem tra o sach cua cac au noi.
Tnh lien tuc.
ien tr cah ly.
ien dung.
Gan chat tat ca cac au noi cap.
Cap c rai cang thch hp.
Quan phan cap d va cot lai.
Lap vong cuon cho thoat nc ong.
Gan kn cac au noi va boc kn, neu can.
Nguon cung cap, khuyech ai, bo phan ch th.
Cac bo phan nay a trong tnh trang tot va san sang e s dung?
Kiem th:
Cap nhat hieu chuan.
ieu kien vat ly.
Cac au noi.
Hom hop bao goi.
Cac cap ra.
Kiem tra o sach cua cac au noi.
Lap rap cng vng.
Gan chat tat ca cac au noi cap.
Gan kn vo hop khuyech ai, neu can.
23
Nen tiep a trong qua trnh s dung.

Mot khi cac van e tren a c giai ap mot cach thoa ang oi vi ngi s dung, th he o
lng co kha nang cao cung cap cac d lieu chnh xac.
1.4.4 Ket qua va chuan hoa.
Cac cam bien c dung mot cach thong dung nhat e lam cho cac phep o co kha nang nh
lng, ngc lai vi s kham pha nh tnh hoac s hien dien cam bien. Do o, ro rang la nhng
nhu cau cua phep o se xac nh s la chon va ng dung cua cam bien. Vay th bang cach nao ta
co the nh lng c nhng yeu cau cua phep o ?
Trc tien, ta phai nhan thc can o cai g. Tren th trng co san cac cam bien e o bat ky
nhng g ma anh co the ngh ra, va ca nhieu th ma anh se khong bao gi ngh ti (nhng mot vai
ngi lai ngh ti!). Ap suat, nhiet o va lu lng co le la nhng phep o thong thng nhat v
chung lien quan ti viec kiem tra va ieu khien nhieu qua trnh cong nghe va gia cong vat lieu.
Mot chuyen tham quan ngan vao trien lam Sensors Expo hay lt nhanh tren internet cung u e
ke ten hang tram, neu khong la hang ngan, cac ai lng, ac tnh hay hien tng co the o lng
c bang cac cam bien sensors.
ieu th hai, ta phai lu y quan tam en moi trng cam bien. Cac hieu ng moi trng co le la
ong gop ln nhat cho cac sai so trong hau het cac he o lng. Cac cam bien, va dng nh la ca
he thong o lng, phan ng ti moi trng tong hp cua chung, khong ch phan ng vi oi tng
o. Trong nhng trng hp cc oan, phan ng oi vi to hp cac moi trng co the ln hn phan
ng oi vi oi tng o mong muon. Mot trong nhng thach thc ln nhat cua nha thiet ke cam
bien la giam thieu phan ng ti moi trng va lam tang toi a phan ng oi vi oi tng o mong
muon. Viec anh gia moi trng va c lng hieu ng cua no len he o lng la mot phan ac
biet quan trong cua qua trnh la chon va ng dung cam bien.
Moi trng khong ch bao gom cac thong so nh nhiet o, ap suat va o rung ong, ma con ca viec
lap rap hay ghep kep cam bien, cac hieu ng ien-t va tnh ien, va toc o thay oi cua nhng
moi trng khac nhau. V du: mot cam bien co the b anh hng t bi nhiet o cao tot o, nhng
co the tao ra nhng sai so khung khiep khi nhiet o bien ong nhanh (o nhay bien thien nhiet
thoang qua).
Th ba la ta phai xem xet cac yeu cau ve o chnh xac (o bat nh) cua phep o. Thong thng,
ta mong at ti o bat nh nho nhat co the, nhng ieu o co the khong kha thi ve mat kinh te,
hoac tham ch la can thiet. Thong tin rut ra t phep o se c s dung nh the nao? Cuoi cung th
o bat nh la 1% hay 1% co g thc s khac biet ? Cac d lieu cam bien co o chnh xac cao
lieu co b che khuat bi s thieu chnh xac trong qua trnh chuan hoa tn hieu hay trong qua trnh
ghi nhan so o ? Mat khac, nhieu he thu thap d lieu hien ai co dung lng o chnh xac ln hn
nhieu so vi cac sai so do phep o gay ra. Ngi s dung se khong b la doi bi y ngh cho rang
o phan giai cao trong he thu thap d lieu se tao ra d lieu co o chnh xac cao t mot cam bien co
o chnh xac thap.
ieu cuoi cung, ma khong phai la het, la ngi s dung phai chac chan rang toan bo he a c
hieu chuan va co kha nang c cap chng ch cua c quan tieu chuan quoc gia (v nh Vien tieu
chuan va cong nghe quoc gia NIST Hoaky). Khong co kha nang bang chng c cong nhan th
tnh bat nh cua phep o bat ky cung khong biet c. Hoac la moi mot phan cua he o lng
phai c hieu chuan va tnh o bat nh moi cho, hoac phai hieu chuan toan bo he nh no se
c a vao s dung (hieu chuan he thong hay hieu chuan au nay ti au kia). Bi v a so
cac cam bien khong co kha nang hieu chnh nao e hieu chuan theo cong c, thong thng
24
nhat oi hoi phai co mot s ac tnh hoa hay s anh gia cac thong so cua cam bien sensor. oi
vi o bat nh thap nhat trong phep o, s ac tnh hoa nen thc hien vi s lap rap va moi trng
cang giong vi cac ieu kien o lng thc te cang tot.
Ket cuc phan nay co the noi ngan gon: Cam bien phai c nhn nhan va gan ket mot cach can
than vi, va c tch hp vao, vi toan bo he o lng va moi trng cua no.
WUX
25
BAI 2: KY THUAT CAM BIEN ANH SANG.

CHNG 2. CAM BIEN VA O CAC AI LNG ANH SANG.
Muc tieu bai nay tap trung vao nhng khai niem c ban va ky thuat
cam bien anh sang ng dung trong o lng va ieu khien
gom chng 2.
trong tam sau:
Khai niem c ban ve anh sang va nhng thong so ac trng
cua no. Cac loai phan t cam bien anh sang ng dung trong ky
thuat o lng ieu khien, ket cau, hoat ong chc nang, cac
ac tnh ky thuat, ac iem ng dung.
Cac van e ng dung thc tien cac phan t cam bien va phat
xa anh sang trong he thong tin o lng va ieu khien e co
nhan thc va ren ky nang tong hp, thiet ke va che tao he
thong cu the trong thc te moi trng ng dung.
2.1 Nhng khai niem c ban ve anh sang.
2.1.1 Khai niem anh sang.
Anh sang la bc xa song ien-t phang, co ban chat song va hat (hnh 2.1).
r
Hnh 2.1 Song anh sang hp vi vector cng o ien trng E va
r
cng o t trng H thanh mot tam dien vuong goc.
Article I.
Anh sang co ban chat la bc xa dao ong (song) ien-t. Mat tri la nguon sang
thien nhien ln nhat. en ien si ot, en neon, en LED hay laser la nhng nguon sang nhan
tao, do nang lng ien chuyen hoa thanh nang lng anh sang, hay con goi la nang lng bc xa,
theo nhieu cach khac nhau (v du: bc xa nhiet cua en si ot). Anh sang nhn thay c (kha kien
loai anh sang thch hp vi mat ngi) ch la mot phan nho trong dai pho rat rong cua song ient. Dai pho nay (goi la dai pho nhn thay c dai kha kien) co tan so t rat thap (tng ng
tan so ien cong nghiep), en tan so cao co the phat ra vu tru.
Nhng tnh chat quaqn trong cua anh sang la phan xa, khuc xa, giao thoa va phan cc. Van toc anh
sang trong chan khong khoang ba tram ngan killomet/giay, tc la c = 299792 [km/s]
3. 10 5 [km/s]=3. 10 8 [m/s]. Van toc lan truyen anh sang trong moi trng co chiet suat n bang:
26
c
.
(2.1)
n
Quan he gia van toc lan truyen anh sang vi tan so va bc song cua anh sang la:
(2.2)
va trong chan khong th anh sang co bc song:

c 3.10 8
=
; [m].
(2.3)
Pho bc xa. Bc xa phan ra:

Bc xa n pho bc xa co mot o dai bc song nhat nh; va:
Bc xa a pho gom nhieu bc xa thanh phan n pho, dang ri rac hay lien tuc.
Dai bc xa ien-t nam gia bc xa Roentgen (tia t ngoai) va bc xa vo tuyen hong ngoai goi la
bc xa quang (370 770 [mm]), con c goi la anh sang nhn thay (dai kha kien). Bc xa hong
ngoai co tac dung say nong, ot nong, dung trong ky thuat phim anh Bc xa t ngoai co tac dung
sinh hoa manh (bang 2.1).
Bang 2.1 Pho anh sang va cac dai mau cua pho.
0,01
0,358
0,370 0,435 0,490 0,575 0,580 0,650 0,760
0,770 m
Roentgen [Cc tm] [Tm] [Lam] [Luc] [Vang] [Da cam] [o] [Hong ngoai] Vo tuyen cc ngan
T ngoai
Anh sang nhn thay (kha kien)
Hong ngoai Vo tuyen
Tia o (hong ngoai), va tia tm (t ngoai) cung c phan loai la bc xa song anh sang, nhng la
anh sang khong nhn thay bang mat thng cua ngi c. Ta thay mau anh sang phu thuoc o
dai song. Tia o (IR Infra-Red) co o dai bc song t 780 [nm] en 10 6 [nm], song anh sang nay
co the thay c di dang anh sang mau o toi, giap can di dai song vo tuyen LW (Low Wave).
Tia cc tm (UV Ultra-Violet) co o dai t 10 [nm] en 380 [nm], tia sang nay co the thay c
di dang anh sang mau tm tham, giap can tren cua song co ngan hn (tia Roentgen).
Article II.
Hnh 2.2 minh hoa dai pho bc xa ien-t c the hien theo thang o dai song. n
v o dai thng dung ay la micron (1 [m] = 1 x 10-6 [m]).
Article III.
Article IV.
Hnh 2.2 Dai pho bc xa song ien-t.
Anh sang tng tac vi vat chat thong qua tnh chat hat cua no hat photon, ma nang lng ch
tuy thuoc tan so:
W = h ;
(2.4)
34
ay: h - hang so Planck ( h = 6,6256. 10 [J.s]).
27
Khi chieu sang vat chat, cac photon co nang lng u cung cap cho cac ien t hoa tr trong
nguyen t vat chat th co the giai phong ien t. Nang lng o tng ng bc song ngng
mc chan cua nguyen t vat chat:
hc 1,237
max =
=
.
(2.5)
W W [eV ]
Photon la mot hat c ban ac biet, co khoi lng ngh bang 0 (ngha la luon luon chuyen ong vi
van toc anh sang). Photon co nang lng u ln khi va cham vi hat nhan co the sinh ra cap
electron-positron (sinh cap); ngc lai, khi hat gap phan hat th huy thanh photon (huy cap).
Photon co the b nguyen t hap thu hoan toan (e chuyen sang mot mc nang lng cao hn), va
khi mot nguyen t chuyen t mot mc nang lng cao xuong mc thap hn, no cung bc xa mot
photon. o chnh la nguyen ly c ban c ng dung trong tat ca cac phan t cam bien hay phat xa
anh sang.
2.1.2 nh ngha khai niem cac ai lng quang.
Quang nang Q; tnh bang n v [J] Joule hoac [lm.s] nang lng phat xa, lan truyen hoac b
hap thu di dang bc xa quang hoc. Quang nang la ai lng ac trng phan nang lng anh
sang co tac dung kch thch than kinh th giac trong mot chum sang, co tr so bang tch cua
quang thong vi thi gian.
Quang thong ; tnh bang [W] Watt hay [lm] Lumen cong suat phat xa, lan truyen hoac b
hap thu di dang nang lng bc xa quang hoc c phat ra bi nguon sang trong mot
n v thi gian, c xem la cong suat bc xa hay thong lng bc xa, ac trng cho
cong suat anh sang toan phan cua nguon.
dQ
; [lm].
(2.6)
=
dt
Quang thong la ai lng ac trng cam giac ve anh sang ma chum bc xa gay cho mat ngi,
c anh gia theo tac dung cua anh sang len th giac con ngi, la hieu suat anh sang pho tng
oi K ( ) . Neu bc xa la n pho th:
(2.7)
= CQ K ( ) .
Neu bc xa la a pho ri rac th:
770
= C 370 Qi K ( ) .
(2.8)
Neu la bc xa a pho lien tuc, th:

= C
770
=370
Qi K ( )d .
(2.9)
K ( ) c chuan hoa vi anh sang ban ngay, nen quy oi quang nang n pho sang quang thong
se la:
= 683.Q K ( ) .
(2.10)
Thong lng bc xa co th nguyen cua cong suat, nen quang thong cung tng ng vi cong
suat, nhng khong hoan toan ong nhat vi cong suat, v vay c o bang mot n v rieng
(lumen). Mot bong en si ot 40[W]/220[V] cung cap mot thong lng anh sang (400 450)
lumens. Mot en huynh quang 40 [W]/220[V] xap x 2000 en 3000 lumens, tuy tng loai.
Cng o anh sang I ; tnh bang [W/sr] Watt/steradian hay [cd] candela la quang thong phat
xa theo mot hng, di mot n v goc khoi :
d
.
(2.11)
I=
d
28
Mat o phan bo quang thong trong khong gian theo cac hng bang ty so quang thong tren goc
khoi khong gian (mat cau) co nh tai nguon sang iem, ma trong pham vi gii han khong gian
o quang thong c coi nh phan bo eu, goi la cng o sang. Hnh 2.3 minh hoa hnh khoi mat
cau, dien tch mat cau 1[ m 2 ], ban knh ti nguon la 1[m].
Hnh 2.3 Minh hoa hnh khoi mat cau.

Cng o sang cua mot nguon sang la ai lng ac trng o ln cua quang thong do nguon bc
xa ra, co o ln bang quang thong bc xa t nguon trong mot n v goc khoi. Khai niem nay ch
ung cho nguon sang iem (se neu phan di). Goc cau la ty so dien tch mat cau gii han bi
goc khoi va bnh phng ban knh hnh cau:
S
(2.12)
= 2 [St] ; max = 4 .
R
Candela la n v cng o sang cua nguon sang iem theo mot hng nao o vi tan so bc xa
f = 540.1012 [Hz] va cng o nang lng bang 1/683 [W/St].
Khi khong neu ro phng th thuat ng cng o sang thng ch cng o sang trung bnh
(cng o sang cua mot nguon co cung quang thong nh mot nguon sang iem nhng bc xa eu
theo moi phng), tnh n gian bang quang thong toan phan cua nguon sang chia cho 4 .
o choi L; tnh bang [W/st. m 2 ] hay [cd/ m 2 ] la ty so cng o sang phat xa theo mot hng
nhat nh bi be mat ngoai cua mot nguon sang kch thc hu han co dien tch quy chieu
vuong goc vi hng phat xa dAn , tren dien tch quy chieu o.
dI
.
(2.13)
L=
dAn
o choi c anh gia theo tac dung th giac cua no, bi o roi len vong mac mat phu thuoc vao
mat o quang thong. Tng ng, dQ la quang thong phan be mat sang chieu len con ngi mat; dA
la dien tch anh cua phan be mat nay tren vong mac; la he so xuyen thau cua thuy tinh the.
Hnh 2.4 o nhay cua mat theo bc song anh sang.

Trong vung anh sang nhn thay c, mat ngi cam nhan o nhay anh sang khac nhau oi vi
nhng mau sac khac nhau. Hnh 2.4 la o nhay cua mat ngi theo bc song anh sang; o nhay
cc ai cua mat ngi la oi vi anh sang co bc song = 555 [nm], tng ng vi anh sang mau
29
xanh dng hoac mau vang. o nhay cua mat tai = 555 [nm] ng vi gia tr bang 1 nh trong
hnh ve. oi vi bc song ngan hoac dai hn th o nhay cua mat giam va tien ti 0.
o choi la ai lng ac trng cho mat o chieu sang ve dien tch va ca theo hng. Quan he gia
thong lng anh sang va o choi c mo ta trong hnh 2.5.
o roi E; tnh bang [W/ m 2 ] hay [lx] lux la ty so gia quang thong hap thu bi mot dien tch
be mat, tren dien tch be mat o.
d
;
(2.14)
E =
dA
trong o: - he so xuyen thau cua he quang.
o roi la ai lng ac trng quang thong roi len be mat c chieu sang. V be mat thng loi
lom khong eu, nen o roi khong ac trng cho toan bo be mat ma ch han che o roi cua iem
tren be mat o, con oi vi be mat th ac trng bi o roi trung bnh. Lux [lx] la o roi tao bi
nguon sang co quang thong 1[lm] chieu eu tren be mat co dien tch 1[ m 2 ], tc la: 1[lx] =
1[lm/ m 2 ]. Hnh 2.6 la quan he gia quang thong va o roi.
r 2 =2 r1
Nguon
bc xa
r1
Ee1
Ev1
Ee2=1/4Ee1
Ev2=1/4Ev1
Hnh 2.5 Quan he gia thong lng va o choi (qui tac hnh vuong ngc).
1 lumen
1 Lux
1m 2
Hnh 2.6 Quan he gia quang thong va o roi.

Article V.
Tren mat at, anh sang mat tri cung cap o choi E = (50 100). 10 3 [lx]; ngay nang
th co the hn mot tram ngan lux. Nhng mat trang ch cung cap E = 0,1[lx]; em trang sang co the
en 0,25[lx]. Thng th anh sang cua mot can ho va nha xng co o roi la 150[lx]; trong phong
30
lam viec E = 300[lx] va co the at mot ngan lux cho nhng ni lam viec tot; con ngoai pho xa th
ch khoang vai lux (2 4 [lx]).
o trng M; tnh bang [lm/ m 2 ] ty so quang thong bc xa hay phan xa t be mat sang hoac be
mat c chieu sang, tren dien tch phan be mat o:
dQ
.
(2.15)
M =
dS
o trng ac trng cho kha nang bc xa cua mot nguon rong, hien tng be mat sang len do anh
sang bc xa hay phan xa bi mat o quang thong cua be mat phat sang, ch khong phai mat o
quang thong cua be mat c chieu sang. Moi lien he gia o trng M va o roi E la:
o neu be mat hoan toan phan xa th M = E;
o neu phan xa mot phan (f[%] he so phan xa) th M = fE;
o neu xuyen thau vi he so xuyen thau [%], th M = E.
Nhng viec thay oi dien tch chieu sang cung rat quan trong. ieu nay khang nh o chieu sang
hoac o choi cua be mat thay oi t le dien tch va khoang cach be mat ti nguon sang. Neu nguon
co o choi khong phu thuoc phng (vat bc xa toan phan) th gia o trng M va o choi L co he
thc n gian: M = .L . Moi quan he nay c the hien trong hnh 2.6 tren.
2.1.3 Nguon sang. Nguon sang la vat t phat c anh sang. Ve ly thuyet th cac nguon bc xa
anh sang c coi la nguon sang iem mot nguon sang co ty le kch thc cua ban than nguon so
vi khoang cach t no ti mot v tr nhat nh nao o khong qua 1/5 lan, c coi la nguon sang
iem.
Tuy rang cac nguon sang khong la bo phan cam bien, nhng trong ky thuat cong nghe va nhat la
trong o lng ieu khien, cac nguon nay lai thng c s dung nh mot bo phan phan t t
ong. Do o ay chung ta khao sat nhng ac iem ky thuat va ng dung chu yeu cua chung:
o Nguon phat xa si ot (en si ot Lamp);
o Nguon phat xa ban dan (en LED Light Emitting Diode);
o Nguon bc xa quang hoc (LASER Light Amplification by Stimulated Emission Radiation).
en si ot Lamp. Cho ti nay, mac du a co s xuat hien vi nhieu u the hn cua cac diodes
LED, trong nhieu ng dung ky thuat van dung en si ot. Mot phan, o la do cong nghe phat
trien a tao c nhng en si ot co tuoi tho en hn 100 nghn gi; ket qua la nhng phan bac
gay gat nhat oi vi viec s dung en si ot la tuoi tho han che cua chung th nay ch ung trong
mot so trng hp.
Viec la chon en si ot thng c thc hien theo nhng tieu chuan sau:
Tuoi tho hoat ong cua en;
Hnh dang kch c en;
Cng o phat xa; va
Nhiet o mau cua en.
Co cong thc tnh tuoi tho hoat ong LB cua en wolfram tng quan vi ien ap nguon cung cap
U B so vi tuoi tho danh nh LN khi s dung vi nguon ien ap danh nh U N la:
(1314 )
LB U N
.
(2.16)
=
L N U B
Trong cong thc nay, so mu 13 tng ng vi trng hp en chan khong, con so mu 14 en nap
kh. Cong thc nay ung cho trng hp nguon ien ap cung cap cho en nam trong pham vi
20% ien ap danh nh. Thong thng, giam ien ap lam viec cua en i 5% co nghia la tang
tuoi tho len gap oi, va neu giam i 15% th tuoi tho tang len ca chuc lan, trong khi o dong phat
31
sang cung ch giam chut t. Hnh 2.7 cho thay mc o thay oi ien tr si ot, cng o dong ien
va nang lc phat xa anh sang cua en phu thuoc vao ien ap cung cap. Theo o co the thay la
dong khi ong cua en si ot co the ln gap mi lan dong ien khi en hoat ong, cho nen en
si ot hay b chay khi mi bat len. S qua tai nay co the khac phuc bang cach han dong, ong
thi nh vay cung lam tang tuoi tho cua en.
Hnh 2.7 ac tuyen cua en si ot khi ien ap cung cap nho hn ien ap danh nh.
Ve hnh dang kch thc cua en th co the noi rang en cang nho cang tot. ieu nay c khch
le bi s phat trien cac loai en ien ap thap, 6 hay 12 [V], nap kh halogen va co bong en bang
vat lieu thuy tinh thach anh. Si ot dang day cuon ngan cho phep tao nguon sang iem vi o
chnh xac cao; co quan tnh nhiet ln hn va do vay ma trong nhieu trng hp co the dung nguon
ien xoay chieu ma cng o sang van khong dao ong nhieu ti mc nhan thay c iem so.
Ngoai ra, ro rang loai en ien ap thap co o on nh c hoc cao hn la cac en ien ap cao.
Hnh 2.8 Quan he pho bc xa anh sang va nhiet o.

Van e cng o phat sang phai tng thch vi bo tach loc anh sang luon luon phai c xem xet
theo quan iem tng thch pho. ieu nay co ngha nhiet o mau la mot ai lng quan trong. Mac
dau nhiet o mau ch mo ta an tng vat ly ve mau sac, nhng no cung cho mot s mo ta chnh xac
ve pho bc xa khi s dung mot vat bc xa nhiet nh si wolfram. Hnh 2.8 ve ac tuyen phan bo
pho cua anh sang phat xa oi vi vat en, vat xam hay la si ot wolfram, ay si ot wolfram
co the coi la vat xam. ac tuyen phan bo pho c xac nh theo nh ly chuyen v Wien:
g max .T = 2,898.10 3 [mK ] = const.
(2.17)
ieu nay noi len rang khi nhiet o tang, cng o phat xa anh sang co iem cc ai nam vung
bc song thap.
32
LED Light-Emitting-Diode. Khac vi cac en si ot, tham ch ca cac loai en neon, LED tao ra
anh sang bi hieu ng quang-ien ben trong vat lieu ban dan. Hieu ng quang-ien noi trong ban
dan la hieu ng tai to hp cac hat mang ien trong tiep giap ban dan p-n khi phat xa bc xa. Bc
song bc xa cua cac en LED tuy thuoc vat lieu chat ban dan va chat phu gia kch thch. Vat lieu
chung la GaAs (Gallium Arsenide), GaAsP (Gallium Asenide Phosphide), va GaP (Gallium
Phosphide). Diode GaAs phat xa anh sang trong mien hong ngoai infrared, co pham vi pho t 0,88
en 0,94 [ m], co cc ai 0,9 [ m] (hnh 2.9).
Hnh 2.9 Cac ac tuyen cua diode GaAs: a). Cng o phat xa; b). Goc gia truc quang
cua diode va hng o; c).ac tuyen V-A theo hng phat xa.
Pho bc xa cua LED nam trong vung nhay pho nhat cua cac linh kien cam quang silicon (hnh
2.10). Cac diodes GaAsP phat xa anh sang o hoac vang, con cac diode GaP th phat xa anh sang
o, vang hoac xanh la cay. Bi s phat xa c tao ra t hieu ng tai to hp cac thanh phan mang
ien trong chat ban dan, nen cac diode LED phat xa anh sang lanh (phan biet vi anh sang cua
cac en si ot). Hoat tnh cua cac den LED phu thuoc vao nhiet o moi trng, cho nen o chnh
la ly do khong ap dung cac bien phap tan nhiet cho cac diode nay. trang thai dan, ien ap tren
diode la khoang (1 2)[V], dong chay qua khoang (5 10)[mA] che o lam viec lien tuc, nen
cong suat tieu thu khoang (30 50)[mW]. Song, cong suat tieu thu nho so vi cac en phat xa si
ot lai khong phai la u the duy nhat cua cac en LED. u iem chnh la ap ng hau nh tc thi
phat xa khi co dong chay qua. Thi gian sang va tat co the em c nano-giay, co ngha la viec
ieu bien che o sang-tat co the thc hien vi tan suat c GHz.
Hnh 2.10 Pho cac nguon phat xa khac nhau va o nhay cua
cac linh kien cam quang silicon va mat ngi.
33
Tan suat sang-tat cua LED phu thuoc trong pham vi rong vao cac chat phu gia kch thch. V du,
cac diode GaAs co them chat kem zinc tac hoat nhanh hn la cac diode co them silicon. ien hnh
la tuoi tho cua cac en LED khoang 100 000 gi, (han tuoi tho c xac nh khi cng o phat xa
giam xuong en mot na tr so danh nh). Cng o phat sang bien thien gan nh tuyen tnh vi
cng o dong ien, cho nen so lieu tren cung ung cho cac en LED noi chung. Tuy nhien, nen
nh rang mc ien ap sut tren LED phu thuoc rat nhieu vao nhiet o, co ngha la tot nhat nen
dung nguon cung cap la nguon dong hang. Nhng, tham ch ngay ca khi s dung nguon dong hang,
nang lc phat xa se thay oi theo nhiet o, se giam xuong khoang 1 [%/ o C ] gan nh tuyen tnh vi
nhiet o.
Cung nen lu y ti nhng u iem cua LED la co kch thc nho, kem nhay vi nhng va ap va
rung ong.
LASER. Tia laser co u the vt troi cac nguon sang khac la no hoan toan n sac, co bien o
khong oi va gan ket chat che thi gian vi khong gian. n sac co ngha la ch tao ra bc xa co
mot tan so nhat nh. e co the hieu c nguyen ly va cac ac tnh nay cua laser, ta nen tm hieu
cac tng quan vat ly laser tren c s laser chat kh c cau thiet b laser au tien ma con ngi
tao ra.
iem khi au la mau hanh nguyen t cua Bohr, mo ta cac trang thai nang lng cua ien t trong
nguyen t atom. Theo thuyet nay, cac ien t chuyen ong theo cac ng cong quy ao quanh hat
nhan nguyen t nucleus, va moi ng quy ao tng ng vi mot trang thai nang lng ac trng
cua ien t. ien t cang xa hat nhan th nang lng cua no cang ln. Bang cach hap thu them
nang lng, mot ien t co the chuyen t quy ao nay sang quy ao khac xa hat nhan hn, nhng
so nang lng ma ien t hap thu c ch bang mot so lng nhat nh cac lng t Planck h.
Trang thai kch thch co the co c la do tiep nhan bc xa ien-t, do nhiet lng hay do va ap
trong khoang phong kh. Neu ien t c gia tang nang lng t mc thap nhat cua no (tren quy
ao nguyen thuy cua no khi cha nhan them nang lng) ti mc cao hn, th no se ch lai trong
trang thai nang lng cao nay mot khoang thi gian ngan (c ( 10 8 10 3 )[s]). Roi rt tr lai trang
thai thng on cua no, phat ra nang lng di dang bc xa anh sang. Tan so bc xa se tuy thuoc
hieu so nang lng gia hai mc chuyen dch ien t neu tren. Khi mot nguyen t c kch nang
lng, ri tr lai trang thai thng on cua no mot cach t phat, th khong lien quan g ti phase
truyen song cua vat the bc xa, v nh oi vi cac loai en si ot. Hn na, song bc xa o ch co
mot bc song nhat nh. Hieu ng laser tao nen c s ket hp phase truyen song ac trng la
do nguyen t b kch nang lng, ri tr lai trang thai cu khong ch mot cach t phat, ma con bi
cac anh hng ben ngoai tac ong, v nh tng tac vi mot trng ien-t nao o ben ngoai (bc
xa bi kch nang lng). Do o, tan so bc xa do kch nang lng f L se tng ng vi hieu nang
gia hai mc E a va Eb cua ien t b kch thch:
f L .h = E a Eb ;
(2.18)
ay: h la so lng t Planck cua bc xa.
34
Hnh 2.11 Cau truc nguyen ly cua mot laser He-Ne. a). Phan t electrostrictive;
b). Gng hnh cau; c). Ca so che tac; d). Thanh ket noi thach anh hoac
invar; e). Bo on tan; f). Cathode; g). Anode; R Bo ieu chnh t ong.
Mot yeu cau na cua hieu ng laser la phai hap thu u nang lng e chac chan rang a ao c
mc nang lng cao hn, cho nen phan nang lng tao bc xa lam phat sang phai ln hn phan
nang lng b hap thu. Trong laser chat kh He-Ne, viec ao len cac mc nang lng cao c lay
t s phong kh. Vat lieu tac hoat la neon, co hai mc nang lng va hieu nang lng gia chung
at ti bc xa bc song =0,6328 [m] (tc la tan so bc xa f = 4,7. 1014 [Hz]). Mac du nh a
biet, helium He co mc nang lng a on metastable cung v tr nh neon, th cung khong the
lam rong mc nay bang bc xa kch thch. Tuy nhien, s va ap khong an hoi gia cac nguyen t
helium b kch thch va nguyen t neon co the em lai s chuyen hoa nang lng ma t o tao
them nhng nguyen t na b kch thch. Do vay ma helium ch dung e tao ra nhng nguon kch
thch mi, gay nen trang thai ao mc nang lng neon. Ty le hp chat He:Ne la khoang 10:1.
oi hoi bc xa kch thch phai co mat o nang lng cao la e at c s nhan boi cong suat bc
xa kch thch tren mc bc xa roi loan hien hu (nhieu loan). Mat o nang lng nay at c
bang cach hp nhat khoi lng phong kh trong mot bo cong hng quang hoc gom hai gng phan
chieu hoi tu tng ho at oi dien nhau (hnh 2.11). Mot gng phan chieu hau nh 100%, trong
khi gng kia cho xuyen thau khoang (12)%. Khi laser c bat, th thoat au co bc xa ngau
nhien va vo hng c tao bi s hp nhat ion hoa phu hp vi bc xa roi loan cua nguyen t
neon. a phan bc xa kch thch ay b mat i, ngoai tr mot phan nho ri vao gng phan chieu hoi
tu nam song song vi truc cua chung va do o b phan chieu ngc tr lai khoang phong kh. Phan
bc xa nay lai tao ra bc xa anh sang tiep theo co cung phase va cung bc song bang cach gay ra
nhng nguyen t neon b kch nang lng. Trong khi bc xa anh sang lan truyen song song vi
ng bc xa kch thch, va do o cung song song vi truc khoang cong hng, qua trnh nay tang
trng theo ham mu exponent cho ti khi at c s can bang gia nang lng kch thch va nang
lng b mat. S phong kh tac ong giong nh bo khuyech ai anh sang co bc song ac trng
nh nhng phan ng dien ra trong bo cong hng quang hoc. Chieu dai cua khoang cong hng
xac nh o chnh xac tan so ma laser dao ong trong o, nh mot vach pho co o rong khoang 1,6
[GHz]. Vach pho nay thoat au trong co ve cc ky rong, co ngha la o bat nh tng oi ve tan
so la 2,7. 10 6 . Ve mat nguyen ly, ieu nay c xac nh bang tng tac gia cac nguyen t theo
hieu ng Doppler. Nh la ket qua s chuyen ong lien tuc cua cac phan t kh, tan suat chuyen
dch khac nhau dien ra tng ng toc o va hng chuyen dch cua cac nguyen t khac nhau. Tuy
nhien, cac anh hng ben ngoai, v nh nhiet o, se lam thay oi bc song bc xa mot cach
khong the chap nhan c, tham ch ca khi co bo cong hng. Do vay, oi vi cac phep o tuyen
tnh, can o on tan tng oi c 10 7 ti 10 9 , ch co the at c bang nhng bien phap on tan phu.
o on nh nay co the at c bang cach thay oi c hoc khoang cach gia hai gng phan chieu.
Mot trong hai gng c lap tren mot phan t ap ien electrostrictive (v du lam bang gom ap
ien piezoelectric ceramics) ma o dai cua no co the thay oi c bang mot ien trng ngoai.
35
Hai hieu ng quang hoc c s dung lam tieu chuan e hieu chnh la: mot la au ra cua tia laser
thu hep ti mc toi thieu dang t nhien la tinh chnh chnh xac vao gia vach pho (lamp-dip);
hieu ng th hai la hieu ng Zeeman. Chu anh hng cua t trng kinh tuyen, anh sang laser b
tach ra thanh hai thanh phan phan cc ngc. Hai thanh phan nay bang nhau ve cng o neu tan
so cong hng f 0 nam gia vach neon nguyen thuy (hnh 2.12).
Hnh 2.12 Hieu ng Zeeman tren vach pho neon.

Nen gii thieu ky hn mot chut ve bien phap ieu chnh o on tan bang te bao hap thu Zeeman.
Mot phan tia bc xa b tach oi phan sau cua tia laser, phan cc vong va roi c thu nhan bi te
bao hap thu Zeeman. Te bao hap thu Zeeman gom mot te bao neon, c cap t trng kinh tuyen
lam tach ng cong thanh hai ng cong oi xng, mot trong o ch ieu khien tia sang phan cc
vong ve pha phai, con ng cong kia ch ieu khien anh sang phan cc vong ve pha trai. ieu
nay co ngha la ng cong hap thu tng ng vi s phan tach pho (hnh 2.12). Neu hng t
trng b ao ngc th s phu hp quay tr lai hng phan cc. Neu t trng c tiep nang
lng bang cach dung ien ap xoay chieu th s hap thu se bien ong tuan hoan nh tan so cua
anh sang laser sai phan khoi tan so chnh f 0 . Trong trng hp nay, mot bo cam quang at ang
sau te bao hap thu cho ra mot ien ap xoay chieu. Co the dung mot bo chnh lu nhay pha e nan
sai phan xoay chieu nay. Cuoi cung, tn hieu au ra cua bo chnh lu dung e ieu khien tinh the
ap ien piezo va nh vay ieu chnh c bc song cua bo cong hng. Mot cach ngan han, co
the giam bien ong tan so tng oi (f / f 0 ) xuong c 2. 10 9 . Tuy nhien, nhng thay oi dai han
co the dan ti nhng bien ong tan so f 0 gi mc di 100 [kHz] trong thi gian mot ngay lam
viec.
Hnh 2.13 gii thieu nguyen ly LASER chat ran c kch thch bang en Flash (hnh 2.13a) va
LASER ban dan (hnh 2.13b).
36
Hnh 2.13 Nguyen ly: a). LASER chat ran; b). LASER ban dan.
2.2 Cam bien quang.
2.2.1 Nguyen ly cam bien Phan loai. Cac phan t quang-ien c phan ra:
Nguon phat xa Radiation Sources : c ng dung trong nhieu lnh vc, nhat la trong ky thuat
o lng va ieu khien, ien hnh la cac en si ot Incandescent Lamps, diode phat quang
LED Light-Emitting Diodes, laser ban dan Laser Diodes, LASER Light Amplification by
Stimulated Emission Radiation.
Nguyen ly , ac iem ng dung cua cac nguon phat xa nay a c trnh bay phan tren (muc
2.1.3 Nguon sang).
Cam bien quang Photodetectors : Cac phan t cam bien quang c che tao tren c s ng
dung hieu ng quang-ien trong cac chat ban dan, theo hai hieu ng:
o Hieu ng quang-ien noi; va
o Hieu ng quang-ien ngoai.
Trng hp hieu ng quang ien noi, la hien tng giai phong cac hat mang ien trong cac chat
ban dan di tac dung anh sang: anh sang chieu xa tao nen cac hat mang ien lam tang ien dan
cua no, gay nen s thay oi tnh chat (ban dan) cua vat lieu. Trng hp hieu ng quang ien
ngoai, th cac ien t c giai phong khoi be mat cua vat la do ket qua cua viec chieu tia bc xa.
Tren c s o, co the phan loai cac cam bien quang thanh hai nhom:
Cac phan t cam quang s dung hieu ng quang-ien noi chu yeu la cac linh kien quangien, khi chu tac ong tng thch cua anh sang (ve tan so, cng o bc xa), tao nen cac
hat mang ien ben trong chat ban dan lam thay oi tnh chat vat lieu, thay oi thong so trang
thai ien, chu yeu la tnh ien dan cua phan t cam bien.
Cac phan t cam quang ien hnh la:
o ien tr quang photoresistor phan t cam quang khong co tiep giap ban dan p-n;
o te bao quang-voltaic photovoltaic cell;
o diode-quang photodiode;
o transistor-quang phototransistor; va
o thyristor-quang photothyristor.
Cac phan t cam bien phat xa da tren c s hieu ng quang-ien ngoai, hien tng giai
phong cac ien t hoa tr khoi be mat vat chat khi b chieu xa tia sang. Cac cam bien phat xa
lam viec theo c che ba giai oan: hap thu photon giai phong ien t ien t ti c be mat
phat xa ien t phat xa khoi be mat vat lieu cathode.
ng dung hieu ng nay trong cac cam bien phat xa chu yeu la ien t s cap tao dong cathode,
sau o co the:
o c cathode thu nhan trc tiep c ng dung trong cac te bao quang-dan chan khong;
o lam ion hoa chat kh c ng dung trong cac en ion kh (te bao quang-dan nap kh);
o lam phat xa th cap kem theo khuyech ai dong th cap c ng dung trong cac bo
nhan quang-ien.
Cac phan t cam bien phat xa ien hnh la:
o te bao quang-dan nap kh gas-filled photoconductive cell;
o te bao quang-dan chan khong vacuum photoconductive cell;
o bo nhan quang-ien bc xa th cap secondary-emission multiplier; va
o mot vai ong phong tia am cc TV-cathode ray tubes.
37
Ngoai nhng v du neu tren, con co mot so phan t dang ac biet nh:
o photodiode p-i-n PIN;
o photodiode avalanche hieu ng thac APD;
o photodiode Schottky ...
c che xuat cho nhng muc ch chuyen dung.
Hnh 2.14 trnh bay mot so ac tuyen V-A cua cac phan t cam bien quang ien hnh va hnh 2.15
so sanh thong so o nhay s va hang so thi gian T ap ng cua cac phan t cam quang. Quang-tr,
diode-quang, transitor-quang la linh kien thu ong, thay oi noi tr cua chung di tac dung chieu
xa anh sang. Trong khi o, cac te bao quang-voltaic (nguyen ly cau tao tng t pin-mat-tri) va
cac phan t cam quang hieu ng quang-ien ngoai th sinh dong ien khi nhan tia sang, nen la
nhng linh kien tch cc.
Hnh 2.14 ac tuyen V-A cua cac phan t cam bien quang-ien.
2.2.2 Cac phan t cam quang.
Trong cac ng dung ky thuat thng phai ac biet chu y cac thong so cua cac phan t cam bien
quang nh: kch thc cau truc phan t, pham vi o nhay pho, tnh n gian mach ng dung
(khuyech ai, bu anh hng dong ien toi ) va cuoi cung (ma cha phai a het) la gia thanh.
ien tr toi Dark Resistance Rc 0 cua cac phan t quang dan phu thuoc ban chat ly-hoa cua vat
lieu, hnh dang, kch thc va nhiet o cua te bao.

Quan he R(E) la phi tuyen (hnh 2.16) ien tr toi giam nhanh khi c chieu sang. nhiet
o 25 [ oC ], tr so Rc 0 cua cac chat quang dan PbS, CdS, CdSe la ( 10 4 10 5 ) [ ]; vi cac chat
SbIn, AbSs, CdHgTe la c (10 10 3 ) [ ].
o nhay pho cua cac phan t cam quang:
I
, [A/W];
S ( ) =
( )
(2.19)
38
Hnh 2.15 o nhay s va hang so thi gian chuyen mach T cua cac phan t cam quang.
Hnh 2.16 Quan he ien tr te bao quang dan va o roi.

V du, vi ien ap U = 10 [V], dien tch d = 1 [ cm 2 ] th o nhay pho c (0,1 10) [A/W].
Do so sanh cac thong so quan trong o, tren thc te hau nh moi la chon eu tap trung vao cac te
bao quang-the voltaic, photodiodes va phototransistors. Cac linh kien ban dan nay co mot hay hai
lp tiep giap suy bien, trong o cac hat mang ien c tao nen bi chieu xa lam tang dong ien
trang thai khoa. o nhay pho bc xa, co the co iem max vung pho bc xa kha kien (nhn thay)
hay khong nhn thay, lai khong phu thuoc vao cau truc thanh phan ban dan rieng le ma hoan toan
ch tuy thuoc chat ban dan s dung. Cac diodes-quang dung trong ky thuat hau het c che tao t
chat silic, con germanium ch c dung trong cac trng hp chuyen dung. Ly do la bi v o
nhay pho tng oi cua silic khong ch phu hp nhat oi vi pho bc xa cua cac nguon sang dung
trong ky thuat (nh en si ot wolfram, diodes GaAs, laser kh He-Ne, ) (xem hnh 2.10) ma gia
tr o nhay pho ay mien bc xa kha kien la kha ln. Ngoai ra, germanium co o nhay vi pho
hong ngoai, trong nhieu ng dung gay nen hien tng cam ng nhieu lam tang dong toi bi anh
hng cua nhiet o moi trng.
Quang tr Photoresistor.
Quang tr la phan t cam quang c che xuat t vat lieu ban dan a tinh the nhng khong co tiep
giap ban dan p-n. Quang tr co the lam viec vi ien ap mot chieu hay xoay chieu. Anh sang roi
len photoresistor phong thch cac ien t hoa tr t mang tinh the cua chat ban dan va khien chung
di chuyen nh nhng ien t t do va lam tang o dan ien, giam ien tr khi chieu xa anh sang.
Vat lieu che tao photoresistors la cac chat ban dan, CdS Cadmium Sulphide va CdSe Cadmium
Selenium, rat nhay vi pho anh sang kha kien. Mot so quang tr c lam t PbS (sulfure ch) va
InSb (indium antimoine) co o nhay cao oi vi pho anh sang vung tia o (Infrared), tuy nhien
ngay nay t c s dung.
39
Article VI.
ac tnh quan trong cua photoresistor la ien tr toi R0 va ien tr sang Rill . ac
tnh nay thng c cho trong tai lieu ky thuat cua hang che xuat, da tren o roi Ev =100 [lx].
ien tr sang o roi Ev =1000 [lx] c ky hieu R100 trong tai lieu.
ien tr toi R0 la tr so ien tr photoresistor sau 1 phut sau khi chan toan bo anh sang roi len
no; ien hnh la R0 > 10 [ M ].
ien tr sang Rill la tr so ien tr photoresistor tai Ev = 100 [lx] hoac Ev= 1000 [lx]; ien hnh
la Rill = 500 [ ] en 50 [ k ] tuy loai quang tr.
Hnh 2.17 cho thay moi lien he o nhay quang tr loai CdS vi mat ngi. o th cho thay vung
quang pho ni ma quang tr co o nhay tng oi cao.
Hnh 2.17 o nhay tng oi cua photoresistor.

Hnh 2.18 cho ac tuyen cua photoresistor loai LDR 03 (hang Valvo). o th ve theo he toa o
logarithm, nen lu y rang ac tuyen tuy tuyen tnh nhng khong dien ta moi tng quan tuyen tnh
gia cng o sang Ev va ien tr R. Nhng quang tr cung loai cung co the thay oi thong so
chut t. Theo o th 2.18, photoresistor LDR 03 co ien tr sang R100 =1 [ k ]; con ien tr toi
c qui nh gia tr R0 10 [ M ]. V ac tnh ien ap lam viec thap, quang tr LDR 03 ket
hp vi transistor chu yeu c dung trong cac thiet b o lng va kiem tra.
Hnh 2.18 ac tuyen gia tr gii han cua photoresistor loai LDR 03.
Khi s dung quang tr, lu y rang photoresistor bien oi ien tr theo nang lng anh sang chieu
xa mot cach quan tnh, ngha la co tnh tre ve thi gian (thi gian ap ng). Quan tnh nay trc
tien phu thuoc vao iem lam viec va ke en la cng o choi thay oi. Tuy tng loai, sau khi tat
nang lng anh sang chieu xa, khoang 20 giay en 30 phut, th ien tr toi cua photoresistor mi
at ti gia tr R0 >1 [ M ]. Hien tng quan tnh la do s di chuyen t do cua cac hat mang ien
40
khi c chieu sang can phai tai to hp, ngha la no can phai quay ve moi lien ket chat che trong
li tinh the. Do ac tnh thi gian ap ng (o quan tnh ve thi gian) nay ma cac photoresistors
kho ng dung trong nhng he o lng va ieu khien co cac bien thay oi bien ong nhanh.
Hnh 2.19 ve cau truc ien hnh va kch c cua photoresistor LRD 03. Hnh sin cua day ien tr co
the nhn thay t ben ngoai.
Hnh 2.19 Cau truc photoresistor.

ay ta lay v du mot ng dung n gian cua photoresistor: mach phan ap ieu khien bi anh
sang chieu xa (hnh 2.20). Hay tnh sao cho phan ap hnh 2.18 co ien ap ra U out c 9 [V] khi o
chieu xa anh sang EV = 30 [lx] va c 3 [V] khi EV = 500 [lx].
Hnh 2.20 Mach phan ap ieu khien bang anh sang.

Trng hp EV = 30 [lx]:
Article VII.
I (30) =
U out (30 )
9[V ]
= 3.10 3 [ A] = 3[mA] ;
3
Rill
3 10 []
U s U out (30 ) (12 9)[V ]
=
=
= 10 3 [] = 1[k] .
I ser (30 )
3 10 3 [ A]
Rser (30 )
Article VIII.
I (500)
Trng hp E v = 500 [lx]:

U out (500 )
3[V ]
=
=
= 1,5.10 2 [ A] = 15[mA] ;
Rill (500 )
200[]
Rser (500 ) =
U s U out (500 )
I ser ( 500)
(12 3)[V ]
= 0,6.10 3 [] = 600[] .
15 10 3 [ A]
Chon R ser = 820[] . Kiem tra lai ieu kien ien ap:
U out (30 ) =
U out (500 ) =
Rser
Us
12[V ]
Rill (30 ) =
3 10 3 [] = 9,4[V ] ;
3
+ Rill (30 )
(820 + 3 10 )[]
Rser
Us
12[V ]
Rill (500) =
= 2,4[V ] .
+ Rill (500 )
(820 + 200)[]
Kiem tra lai ieu kien cong suat: oi vi photoresistor:
41
P( 30) = U out (30 )
Rser
P( 500) = U out (500 )
Us
12[V ]
= 9,4[V ]
= 0,03[W ] = 30[mW ]
+ Rill (30)
(820 + 3.10 3 )[]
Rser
Us
12[V ]
= 2,4[V ]
= 0,027[W ] = 27[mW ] .
+ Rill (500 )
(820 + 200)[]
Article IX.
P( 30)
oi vi ien tr noi tiep:

Us
12[V ]
= (U s U out ( 30) )
= 2,6[V ]
= 0,0082[W ] = 8,2[mW ] ;
Rser + Rill (30 )
(820 + 3.10 3 )[]
P( 500) = (U s U out (500 ) )
Rser
Us
12[V ]
= 9,6[V ]
= 0,113[W ] = 113[mW ] .
+ Rill (500 )
(820 + 200)[]
Diode quang Photodiode va te bao quang-the Photovoltaic Cell.

Cac diode quang va te bao quang-the la nhng phan t cam quang co lp tiep giap ban dan p-n
mong, co vung suy bien tiep giap (ngheo ien tch) u rong e hap thu toi a bc xa anh sang co
bc song nho hn bc song ngng S (hnh 2.21). Khi o, quang thong tham thau be day
x cua vat lieu se la:
( x) = 0e x ;
(2.20)
o
ay, - he so xuyen thau; khi lng quang thong i qua vat lieu day c 10 3 [ A ] giam xuong
63% th 10 5 [1/cm].
Hnh 2.21 Hieu ng quang-ien trong tiep giap ban dan p-n.
Vat lieu la cac chat Si, Ge lam viec trong vung pho nhn thay va hong ngoai; GaAs, InAs, InSb,
CdHgTe lam viec trong vung hong ngoai. Che o lam viec co the la:
Quang-dan photodiode (hnh 2.22); hay
Quang-the photovoltaic (hnh 2.23).
Cau truc c ban cua photodiode va te bao quang-voltaic la giong nhau v chung cung co tiep giap
ban dan p-n. Bat ky photodiode nao cung co the hoat ong nh mot te bao quang-the va ngc lai.
42
Hnh 2.22 Che o quang dan cua photodiode;

Hnh 2.23 Pho o nhay cua te bao
a). S o nguyen ly; b). ac tuyen VA.
quang-the Photovoltaic Cell.
Hnh 2.24 ve ac tuyen V-A cua mot tiep giap ban dan p-n cam quang. Goc phan t th I la ac
tuyen cua diode lam viec hng dan dong. ng cong ac tuyen cua diode khong c chieu
xa se b dch theo hng dong ien am (truc tung) khi o chieu xa E tang len. Tuy nhien, goc phan
t th I khong may y ngha oi vi nhng ng dung oi hoi phai co linh kien c kch hoat bi
anh sang.
Hnh 2.24 ac tuyen V-A cua photodiode.
43
Goc phan t th III che o photodiode; goc phan t th IV che o te bao quang ien. Thong so: E o chieu xa
( E 0 =0; E1 ; E 2 ; E 3 ). U R ien ap khoa. U F ien ap m. I R dong khoa. I F dong m. U L ien ap khong
tai. I K dong ngan mach. R L ien tr mach tai ( R L1 = khong tai;
RL 5 = 0 ngan mach).
Cac goc phan t th III (lam viec nh photodiode) va th IV (lam viec nh te bao quang-ien) mi
la nhng phan ac tuyen ang chu y trong trng hp o. che o lam viec nh te bao quangien, cac cap ien tch donorreceipter se c hnh thanh trong vung ien-nap space-charge
region tao ra bi tiep giap p-n khi b chieu xa do ket qua hieu ng quang ien noi. Trng ien tch
nay se ay cac hat ien tch ra khoi tiep giap p-n va gay ra dong ngan mach phan mach ngoai.
Dong ngan mach ty le tng quan vi o chieu xa E len ti hn 10 5 [lux]. Neu dong ien mach
ngoai c cung cap cho tai ien tr R0 th tren tiep giap ban dan p-n se co mot ien ap quangvoltaic. Khi lam viec che o h mach open-circuit, cac hat mang ien c tao nen bi hap thu
anh sang kch thch se khong the thoat ra ngoai. ieu o lam thay oi cac ieu kien ien-nap va
tao ra mot ien ap h mach (khong tai) tren cac au ra. Qua trnh nay tang trng dang logarithm
theo o chieu xa. Bi v vung ien-nap b phan ra mot tr so ac trng nao o cua o chieu xa,
ien ap h mach nay se tang nhanh ti mot tr cc ai nao o, at ti mot o ln bao hoa (khong
nh viec tang dong ngan mach mot cach tuyen tnh theo o chieu xa e at ti mot o chieu xa
cc ln hnh 2.25).
Hnh 2.25 Dong ngan mach I K va ien ap khong tai U L la ham cua o chieu xa E.
che o lam viec nh photodiode (goc phan t th III), mot ien ap hng chan se c at
tren tiep giap p-n. e co c tn hieu u ln khi o chieu xa nho (va do o ma dong quang ien
cung nho), oi hoi phai co ien tr tai R0 cc ai va ien ap cc ai. Bi ien dung cua lp suy
bien depletion layer tang len theo chieu hng tang ien ap chan, tan so cat cut-off se tang len
theo ien ap chan vi ien tr tai co tr so ac trng nao o. Tuy nhien, bi v ong thi tan so cat
cung ty le nghch vi tr so ien tr tai, cho nen oi khi can phai thoa hiep gia bien o tn hieu
mong muon va tan so gii han.
Mac du bat ky photodiode nao cung co the lam viec nh mot te bao quang-the voltaic va ngc
lai, cung can phan biet ro co the phat trien dang ac tuyen nao, tuy theo tng ng dung cu the.
V du: du rang lp suy bien co dien tch rong, co ngha la o nhay cam quang ln, nhng ong thi
cung co ngha la ien dung lp tiep giap suy bien va dong ien toi cung ln hn.
cac photodiode, lp tiep giap suy bien c gi mc nho e co c dong ien toi nho nhat va
ien ap chan cao. ieu nay han che o nhay cua photodiode. Ngc lai, trng hp te bao quangien lam viec che o quang-dan, th o nhay pho cang ln cang tot, dan ti m rong lp suy
bien. che o te bao quang-ien khong co dong ien toi. Do vay ien ap chan cua te bao quangien thap hn nhieu (khoang 1 en 20 [V]) so vi trng hp photodiode (10 en 100 [V]), nhng
trong che o lam viec nay th ien ap chan nho cung khong may quan trong. S phu thuoc nhiet o
cua ien ap va dong ien c kch bi anh sang ong vai tro quan trong hn nhieu trong cac he
ky thuat cam bien o lng.
44
Nh vay, ien ap h mach cua cac te bao quang-ien ien hnh giam xuong theo nhiet o la
khoang 2,3 [mV/ o K ]. Khi ien ap bao hoa khoang 400 [mV] th ien ap h mach giam theo nhiet
o xuong hn 0,5%/ o K . Ngc lai, dong ngan mach co he so nhiet o ch c 0,1%/ o K .
Thi gian ap ng la mot thong so ac tnh khac. oi vi cac te bao quang-ien lam viec che o
dong ngan mach, thi gian ap ng b han che bi thi gian lan truyen cac hat ien tch va che
o h mach th b han che bi ien dung lp tiep giap suy bien va noi tr. che o h mach, thi
gian ap ng cung phu thuoc nhieu vao o chieu xa. Tr so ien hnh thi gian chuyen mach co the
c vai micro-giay oi vi che o ngan mach va khoang 50 [ s ] en 10 [ms] oi vi che o h
mach, tuy theo o chieu xa.
Article X.
Transistor-quang Phototransistor.
Cac phototransistor ve nguyen ly la mach ghep hai diodes, mot la E-B- diode (Emitter-Base-) va
mot la C-B-diode (Collector-Base-), mot diode lam viec theo hng dan dong con diode kia lam
viec hng chan. Collector-diode lam viec nh mot photodiode. Tren quan iem hoat ong chc
nang, phototransistor la mot transistor quy c co cha mot photodiode gia mach base va
collector cua no. Tren hnh 2.26 la s o nguyen ly cua mot phototransistor silic n-p-n, chieu sang
basic.
Hnh 2.26 Phototransistor: a). S o mach;
Hnh 2.27 Phototransistor
trng
b). S o tng ng; c). Tach cap ien t.
PhotoFET.
Khi chieu sang tiep giap BC th phototransistor lam viec che o quang dan vi dong ien ngc
Ir :
I r = I0 + I ;
(2.21)
ay: I 0 - dong ngc che o toi, 25 [ oC ] co tr so c [nA], nhng khi nhiet o tang them 10
[ oC ] th gia tr o tang gap oi; I - dong quang ien khi co quang thong chieu qua be day X.
I = SG ;
(2.22)
trong o SG - o nhay cua tiep giap cong-kenh.
Dong I r la dong basic, gay nen dong collecter I C :
I C = ( + 1) I r = ( + 1) I 0 + ( + 1) I ;
(2.23)
ay: - he so khuyech ai dong che o emitter chung.

o nhay pho:
S ( ) = I C 0 = f ( 0 ) ;
(2.24)
la ham phu thuoc 0 . bc song tng ng iem cc ai ng cong ac tuyen pho cua
phototransistor th o nhay pho co gia tr c (1 100) [A/W].
45
Hnh 2.27 la s o nguyen ly cua phototransistor trng Photo-FET. Hieu ng anh sang lam thay
oi tr khang cua kenh, o rong cua kenh c at nh bi ien ap U GS gia cong gate va nguon
source. Dong mang cua phototransistor se bang:
2
U
I D = I DSS 1 + GS ;
U
ay: I DSS - dong mang khi U GS = 0; U - ien ap chan kenh.
(2.25)
Nh vay, mot cach gian lc ve nguyen ly, co the coi phototransistor thc hien chc nang nh mot
photodiode co mac ke tiep transistor e khuyech ai dong ien trang thai khoa cua photodiode
c ieu khien bi bc xa anh sang (xem hnh 2.26b). Thng th phototransistor lam viec theo s
o emitter chung ma cc base thng khong dan.
Do tnh nang khuyech ai cua transistor, o nhay cua cac phototransistor ln hn o nhay cua cac
photodiode t 100 en 500 lan. Tuy nhien, ong thi dong ien toi cua phan photodiode trong no
cung c khuyech ai len. Mot nhc iem na cua phototransistor la thi gian chuyen mach
tang len kha nhieu so vi thi gian ap ng cua photodiode va te bao quang-the voltaic. Do
nguyen nhan o nhay cao nen ien dung lp suy bien von co la tng oi cao, lam tang hang so
thi gian cua phototransistor theo o khuyech ai dong .
Cuoi cung, co the ket luan rang nen s dung te bao quang-the voltaic che o ngan mach, trong
nhng ng dung oi hoi o on nh nhiet cao va tan so cat ln. Bi tn hieu thng c khuyech
ai che o A, nen phai danh mot khoan chi ph tng ng cho bo khuyech ai kem theo mac sau
no.
Vi cac photodiodes, va ac biet la vi cac phototransistors, o nhay cao thng i kem vi cai gia
phai tra la dong ien toi ln ti mc kho chap nhan. Hn na, cac phototransistors, thi gian
chuyen mach tng oi cao con co the gay nhieu cam ng.
Cac dang photodiodes ac biet la cac photodiodes tiep giap cach ly p-i-n, photodiode hieu ng
thac, photodiode hieu ng Schottky; phai lu y en cac ac tuyen cua chung. Can lu y cac ac
iem hoat ong sau:
Photodiode p-i-n PIN la loai phan t cam quang gom ba lp ban dan p, i, va n; trong o hai lp p
va n la nhng lp ban dan pha tap chat, con lp i (Intrinsic thuan chat) la lp ban dan thuan chat
hay la co ty le pha tap rat nho. Photodiode p-i-n co thi gian chuyen mach c t pico-giay ti
nano-giay. Chung con co dong ien toi rat nho (bien o c 1[A]). Do o chung phu hp vi cac bo
thu nhan xung anh sang nano-giay (tia laser) va dung truyen dan cac tn hieu anh sang ieu bien
tan so cao (ti 50 [MHz]).
cac photodiodes hieu ng thac APD (Avalanche PhotoDiode), tac ong anh sang lam tang hieu
ng ieu khien anh thung kieu thac. Tan so cat cua diode hieu ng thac c gigaHerz (o rong
bang tan khuyech ai co the at ti 80 [GHz]). Nh tnh nang ieu chnh tinh ien ap lam viec va
cac ac tnh khac (nh dong ien toi), photodiodes hieu ng thac thng rat ang gia trong nhng
ng dung chuyen mach.
Cac photodiodes Schottky c ng dung rong rai hn bi chung co the che tao loat nh cac
diodes thng va bi cong nghe ay cho phep che xuat c nhng diodes ban rong. Chung co the
c che xuat nhng phan t can quang e o nhng sai phan ng bien cua tia sang so vi truc
quang co o dai bc song ti 20 [cm]. Phan t cam quang co be mat tron hay vuong, dien tch ti
10 [ cm 2 ], c chia thanh 4 goc phan t e phan biet nhng sai lech t hai truc quang. Moi goc
phan t co mot au ra, va mot ien cc chung tam mat sau. Neu tia sang ti ap ung vao tam
46
phan t cam quang nh vay, se khong co tn hieu ra. Nhng ch can tia sang sai lech khoi tam phan
t cam quang th se tao ra hai tn hieu ty le vi o lech tam nay (theo hng x va y). Cac diodes
loai nay c dung trong cac he ve o ban t ong, trong cac he o lng va ieu khien v tr va
dch chuyen.
2.2.3 Cam bien phat xa.
Article XI.
Cac cam bien phat xa hoat ong theo nguyen ly nh nguyen ly hoat ong cua pin mat
tri, khi c chieu sang cac te bao quang-ien se tao ra mot dong ien co o ln tuy thuoc vao anh
sang chieu xa. V vay chung cung c xem nh linh kien quang-ien tch cc.
Article XII. Trong te bao quang-ien (va pin mat tri), vat lieu ban dan bao gom mot vung dan
loai n va mot vung dan loai p. Giong het nh diode ban dan, mot ien ap khuyech tan c tao ra
vung tiep giap ban dan, o la ket qua cua qua trnh khuyech tan. ien ap chan nay ngan can s di
chuyen sau cua ien t vao vung p va cua lo trong vao vung n. Tai vung trong rat mong nay vung
tiep giap suy bien, ngheo ien tch, hau nh khong co s di chuyen cua cac hat mang ien. Neu nang
lng bc xa (di dang anh sang chieu xa) ap vao vung trong nay th cac chuoi tinh the se b pha
v, tao ra hien tng cung cap nang lng, ong thi sinh ra cac cap hat mang ien t do. Di tac
dung cua ien trng gay ra bi ien ap khuyech tan tren vung trong, cac ien t t do di chuyen
vao vung n va cac lo trong t do se di chuyen vao vung p. V the mot lng ien tch d se xuat hien
trong vung n va vung p, bang cach o lp n tr thanh cc am va lp p tr thanh cc dng cua mot
nguon ien nguon quang-ien. Qua trnh nay c the hien hnh 2.28.
Hnh 2.28 Nguyen ly c ban cua te bao quang-ien.

Article XIII. Neu te bao quang-ien c noi vi tai th se co mot dong ien chay qua ien tr tai,
dong nay c ieu khien bi ien ap sinh ra do chieu xa anh sang. ng dung n gian nhat cua te
bao quang-ien ien hnh la mot dung cu o o sang ien-quang ke, trong o co mot cuon day
ong rat nhay c dung lam ien tr tai. o lech cua cuon day ong la tr so o cua anh sang.
Hnh 2.29 Cau truc c ban cua te bao quang-ien silicon.
Hnh 2.29 trnh bay cau truc c ban cua mot te bao quang-ien silicon che xuat theo cong nghe
planar. Vi cau truc hnh 2.29, tiep giap p-n nam ngay di be mat e anh sang chieu ti co hieu
47
qua cang manh cang tot. Pin mat tri cung co cau tao tng t , tuy nhien no c thiet ke vi dien
tch ln hn te bao quang-ien.
Hnh 2.30 ve ac tuyen ien ap khong tai (h mach) cua te bao quang-ien U oc phu thuoc vao
cng o chieu sang EV. Neu vi mot te bao quang-ien, cng o sang tang t EV = 0 [lx] ban
au th ien ap h mach cung tang theo tng oi nhanh ti iem co cng o sang EV = 100 [lx].
Neu cng o sang tiep tuc tang cao hn, th U OC tang trng cham lai va co xu hng tien ti gia
tr bao hoa U OC 500 [mV] cng o chieu xa anh sang cc ai. V vay U OC max luon thap hn
ien ap khuyech tan cua tiep giap p-n.
Article XIV. ac tuyen ien ap h mach tren thang o logarithm hnh 2.30 tng t cho moi te bao
quang-ien. Ngoai ra, ien ap mach h ch phu thuoc vao nhiet o va thuoc tnh cua vat lieu. Kch
thc vung nhay sang cua te bao quang ien khong anh hng ti o ln ien ap mach h sinh ra.
Hnh 2.30 ien ap h mach cua te bao quang-ien nh mot ham cua E .
Article XV.
ac tnh dong ngan mach cua cac te bao quang-ien cung quan trong trong cac ng
dung thc te. No ch ra s phu thuoc cua dong ngan mach Ish vao cng o chieu sang EV va c
trnh bay hnh 2.31.
Hnh 2.31 Dong ngan mach cua te bao quang-ien nh la ham cua E .
Co quan he gan nh tuyen tnh gia dong ngan mach I sh va cng o sang E cac te bao quangien. V vay I sh tang gan nh tuyen tnh vi E . Ngoai ra, con co quan he tuyen tnh khac gia tr
tuyet oi cua I sh va kch thc vung nhay sang A cua te bao quang-ien, nh cac ac tuyen ng
vi cac vung nhay sang A = 0,09; 0,3; 0,6; 1,8 [ cm 2 ]tren hnh 2.31.
48
Hnh 2.32 - ac tuyen h mach va ngan mach cua te bao quang-ien BPY.
o nhay sang S ( dong ap ng) co the c tnh t o doc cua ac tuyen dong ngan mach, tnh
theo n v [nA/lx]:
I
(2.26)
S = sh ; [nA/lx].
EV
Dien tch vung nhay sang cang ln th dong ngan mach I sh va o nhay sang S cang cao. ien hnh
la cac loai te bao quang-ien BPY 11 va BPY 64.
Article XVI. ien ap h mach va dong ngan mach cua te bao quang-ien (hnh 2.32) cho thay s
phu thuoc vao nhiet o he so nhiet o TC Temperature Constant. V du TCU C 2,6[mV / oK ] va
TC Ish +12[%/ oK ] ng vi kieu BPY 11 va BPY 64.

Article XVII. o nhay pho va ac tnh nh hng cung rat quan trong trong cac ng dung thc te
cua te bao quang-ien. Hnh 2.33a la o nhay pho tng oi cua te bao quang-ien kieu BPY 11 va
BPY 64. ay, nh vi hau het cac te bao quang-ien khac, gia tr cc ai la 850 [nm], ngha
la nam trong dai hong ngoai.
Article XVIII. Moi quan he gia hng bc xa va dong ngan mach I sh co the xac nh t ac
tuyen nh hng hnh 2.33b. Vi cung mot o chieu sang, tia sang cham vao te bao quang-ien
vi goc cang phang th dong ngan mach cang nho.
Hnh 2.33 o nhay pho tng oi va ac tuyen ch th ISh=f() cua BPY11 va BPY64.
Te bao quang-ien chuyen oi nang lng bc xa anh sang thanh nang lng ien. Neu s dung
s chuyen oi nay trong thc te, ta phai mac ien tr tai R L vao te bao quang-ien. Nang lng
49
ln nhat co the lay t nguon ap quang-the la neu R L = Ri , ngha la tng thch ien tr tai vi noi
tr nguon. ien tr trong Ri cua te bao quang-ien co the xac nh t ac tuyen h mach va dong
ngan mach theo cong thc:
U
Ri = l vi Ev=const.
I Sh
(2.27)
Nh co the thay t hai ac tuyen cua te bao quang-ien BPY 64, ien tr trong khong phai la hang
so ma la mot ham cua o sang EV. V vay vi kieu te bao quang-ien BPY 64 th: Ri 13 [ k ]
EV = 100 [lx], Ri 3,3 [ k ] 500 [lx] va Ri 1,8 [ k ] 1000 [lx]. V vay, ien tr trong cua te
bao quang-ien giam khi o sang tang.
Article XIX. Bi cac te bao quang-ien c ng dung chu yeu e o o sang, se la rat tien li
neu co c quan he that tuyen tnh gia lng anh sang kch thch va lng ien sinh ra. ieu nay
co the at c neu te bao quang-ien hoat ong vi che o dong tng thch vi ien tr tai, ngha
la neu R L << Ri , khi o thc te se xay ra hien tng gan nh ngan mach. Nh vay, se at c quan
he tuyen tnh muon co gia dong quang-ien va o sang, ke ca vi o sang ln.
Cuoi cung, ket thuc gii thieu cac phan t cam bien quang, chung ta so sanh chung thong so cua
chung (bang 2.2).
Bang 2.2 So sanh cac cam bien quang-ien.
Cam bien
o nhay
Dai pho
0,3 30 m
1. Te bao quang dan.
0,1 10 A/W
2. Photodiode.
0,1 1 A/W
0,4 1,2 m
3. Phototransistor.
1 100 A/W
0,4 1,2 m
4. Te bao quang ien chan khong.
10 100 mA/W
2.3 ng dung cac phan t cam bien quang, o cac ai lng anh sang.
2.3.1 Khai quat. Co hai phng phap chu yeu o anh sang:
Trc quan (o bang mat, tren c s th giac);
Khach quan (o lng tren c s cam bien vat ly).
o cac ai lng quang da tren c s th giac ngi (bang mat), co ac iem la mat ngi ch
phan ng ro ret vi o choi. Cho nen cac phng phap trc quan co nguyen ly chung la so sanh o
choi cua hai trng (hai be mat) e canh nhau. V vay, trong cau truc cac dung cu o o sang bang
phng phap trc quan cung co nguyen ly chung: thiet b tao trng so sanh va thiet b thay oi o
choi cua cac trng o, can bang anh sang cua trng o vi trng so, dung nh luat bnh phng
khoang cach e xac nh cac ai lng anh sang khac, nh o roi, cng o sang
V du: o o roi bang hop trac quang Lummer Brodhunt:
I
E = 2 cos ;
(2.28)
l
trong o: I cng o sang cua nguon; l khoang cach t nguon sang ti knh th; - goc ti cua
tia sang.
Trong phng phap o quang thong bang cau quang ke, quang thong c xac nh:
X l02
=
;
(2.29)
0 l X2
50
trong o: l X - khoang cach t en so ti knh th, khi at en o trong cau ke; l0 - khoang cach
tng ng, khi at en mau trong cau ke.
2.3.2 Cac thiet b thong dung o anh sang theo phng phap trc quan. ay chung ta
khong i sau vao lnh vc cac thiet b quang hoc, nhng co the iem qua cac thiet b trac quang
thong dung nhat:
Thiet b tao trng so sanh bang hop trac quang LummerBrodhunt;
Cau quang ke, co au trac quang di ong, hay co te bao quang ien va ien the ke
galvanometer o quang thong, cng o sang;
Quang ke vi he quang trc tam e o cng o anh sang cua cac nguon bc xa, ke ca nguon
bc xa lam viec che o xung (kieu FPI, SMI, FIM, FIS);
Luxmeter quang ien o o roi;
Choi ke kieu FPI, FIM,
Cac may so mau sac ke colorimeters (quang ien EKS-1, KNO-3, ).
2.3.3 Phng phap o cac ai lng quang theo ky thuat o ien. Trong phan tren, ta a e
cap en cac cam bien anh sang nh nhng phan t chc nang cua he cam bien o lng va ieu
khien, c ac trng bi mang hai ca noi chung (xem hnh 1.3).
ay, cac phan t cam bien anh sang cam nhan kch thch au vao la cac ai lng anh sang va
bien oi thanh tn hieu ien au ra. Viec o lng cac ai lng ien c thc hien bi nhng
phng tien va ky thuat o lng ien, tuy theo nhiem vu va yeu cau ng dung cu the. Do o trong
khuon kho tai lieu nay khong the bao gop. Tuy nhien, co the tm hieu ky va cu the hn trong
nhng tai lieu tham khao neu muc tng ng.
WUX
51
Hnh 2.16.
Hnh 2.15.
Hnh 2.17.
Hnh 2.18.
52
BAI 3: KY THUAT CAM BIEN NHIET O CONG NGHIEP.

CHNG 3. CAM BIEN O NHIET O. PHAN 1.
cam bien nhiet o trong cac ng dung o lng va ieu khien
gom 2 phan cua chng 3 (cam bien nhiet o cao va nhiet o
thap).
trong tam sau:
Khai niem c ban ve nhiet o va thang o nhiet o; cac ac
trng phan t cam bien nhiet. Cac loai phan t cam bien nhiet
ng dung trong ky thuat cong nghe, dung cho cac he o lng
ieu khien: ket cau, hoat ong chc nang, cac ac tnh ky
thuat, ac iem ng dung.
Cac van e ng dung thc tien cac phan t cam bien va ieu
chnh nhiet o trong he thong tin o lng ieu khien; co nhan
thc va ren ky nang tong hp, thiet ke va che tao he thong cu
the trong thc te moi trng ng dung.
Bai 3 tap trung trong tam la ky thuat cam bien nhiet o cao
bang cac phan t cam bien kim loai (chu yeu cac nhiet ien
tr va nhiet ngau), ng dung rong rai trong cong nghiep luyen
kim va x ly vat lieu kim loai.
3.1 Khai niem chung.
Nhiet o Nhiet o la so o cng o chuyen ong hon on cua cac phan t cau tao nen vat the.
Nhiet o la mot ai lng vat ly the khoi extensive (pho quat) nh anh sang, nhng co ac trng
quan tnh, do vay ch co the xac nh gian tiep thong qua tnh chat trang thai a biet trc cua vat
chat co lien quan ti nhiet o. V nhiet luon luon t ong truyen t vat nong sang vat lanh cho nen
co the coi nhiet o cua mot vat la tnh chat xac nh hng truyen nhiet gia vat o vi cac vat
khac tiep xuc vi no.
Thang nhiet o la he thong nh c va tnh nhiet o theo mot quy tac nao o. Trong ky thuat, e
co the xac nh gia tr nhiet o mot vat ngi ta da vao cac qua trnh co the tai tao lai c lam
c s lap thang o nhiet o. V nh iem ong va iem soi cua nc c dung lam nhng iem
dan xuat xac nh thang nhiet o Celsius [ o C ], chon 0 [ o C ] la nhiet o cua a ang tan va 100
[ o C ] la nhiet o cua nc nguyen chat ang soi di ap suat 1 [atm]. Nh vay, c nhiet o la
1/100 khoang chenh lech nhiet o gia nc a ang tan va nc ang soi.
Thang nhiet o theo nh luat nhiet ong hoc:
Thang nhiet o Hook (Hook Robert, 1664) coi iem 0 la iem ong cua nc cat;
Thang nhiet o Fahrenheit (D.G. Fahrenheit, ngi Ha lan, 1706) thang F: nc a tan
32 o F , soi 212 o F .
5
T oC = (T oF 32) ;
(3.1)
9
53
9
(3.2)
T oF = T oC + 32 ;
5
Thang nhiet o Celsius (Celsius Andreas, ngi Thuy ien, 1742) thang bach phan:
T oC =T oK 273,15 ;
(3.3)
o
o
(3.4)
1 C =1 K;
Thang nhiet o Kelvin (tc hieu cua William Thomson, ngi Anh, 1852) thang nhiet-ong
tuyet oi: 0 oC = 273,15 o K - nhiet o can bang ba trang thai cua nc.
0 o K = -273,15 oC - nhiet o khong tuyet oi.
(3.5)
Thang nhiet o Rankine thang nhiet o tuyet oi, trong o hieu nhiet o gia iem soi va
iem ong ac cua nc la 212 o R , va nhiet o 0 la o khong tuyet oi. iem ong ac cua
nc di ap suat tieu chuan la 491,7 o R . Mot o Rankine ( o R ) bang mot o Fahrenheit ( o F ).
Nhiet o tac ong ti vat chat va cac qua trnh vat ly mc phan t, la bien trang thai vat ly c
cam bien rong rai nhat trong so cac bien he thong. Nhiet o c nh ngha nh la ac trng mc
o nong lanh c tham chieu theo mot thang o ac trng. No cung co the c ac trng nh
lng nhiet nang trong mot oi tng hoac mot he vat ly. Nang lng nhiet tng quan trc tiep
vi nang lng phan t (s rung ong, ma sat va dao ong cua cac hat ben trong phan t). Nang
lng nhiet cang cao, th nang lng phan t cang ln.
Bang 3.1 Thang o nhiet o va tng quan.
Nhiet o
Celsius [ oC ]
Kelvin [ o K ]
iem khong tuyet oi
0
-273,15
Hoa hp nc nc a
273,15
0
Can bang nc-nc a-hi nc
273,15
0,01
Nc soi
373,15
100
Fahrenheit [ o F ]
-459,67
32
32,018
212
Nhiet o cua vat chat la thong so ac trng trang thai can bang nhiet-ong-hoc cua the tch nhat
nh. Qua trnh can bang la mot qua trnh quan tnh.
T = Tk Td ;
(3.6)
trong o: Tk nhiet o (thc) cua moi trng can o; Td - nhiet o (o) tren phan t cam bien
nhiet.
Nhiet lng truyen thu ti cam bien trong mot n v thi gian dt:
dQ = ATdt ;
54
(3.7)
ay: nhiet dan xuat cua vat lieu cam bien; A tiet dien trao oi nhiet.
Da tren vat ly thong ke ngi ta nh ngha nhiet o cua mot vat the la so o ong nang tnh tien
trung bnh cua cac phan t cau tao nen vat. Kch thc va nhieu tnh chat khac cua vat nh cac tnh
chat c hoc, ien hoc, quang hoc cua vat lieu va vat the phu thuoc vao nhiet o. Chnh t s phu
thuoc o ma ngi ta a che tao ra nhng phan t cam bien va o lng nhiet o. Do ban chat vat
ly the khoi pho quat cua nhiet o, ch co the xac nh nhiet o vat chat thong qua tnh chat trang
thai biet trc cua vat chat phu thuoc vao nhiet o. V nh tnh dan n trong nhiet ke lng kim,
tnh phu thuoc nhiet o cua ien tr trong nhiet-ien-tr kim loai, hay tia bc xa nhiet trong hoake bc xa.
Trong nhieu kha nang khac nhau, nhiet o c bien oi bi cac phan t cam bien thanh ai lng
ien nh ien ap, dong ien hay ien tr, ien dan; trong o cac phan t ien tr kim loai hay ban
dan, cac phan t nhiet-ngau, ong vai tro quan trong trong ky thuat o lng va ieu khien.
Phan loai cam bien nhiet. Cac cam bien nhiet o phat hien s thay oi trong mot thong so vat ly
(nh ien tr hay ien dan, ien ap hay dong ien) tng ng vi s thay oi cua nhiet o. Co hai
phng phap c ban cam bien nhiet o.
Phng phap tiep xuc nhiet; oi hoi cam bien phai tiep xuc vat ly trc tiep vi moi trng hay
oi tng o, co the dung kiem tra nhiet o cua chat ran, chat long hay chat kh trong mot pham
vi nhiet o rat rong.
Phng phap o khong tiep xuc; cam nhan nang lng bc xa cua nguon nhiet dang nang
lng thu nhan c trong phan hong ngoai cua pho ien-t. Phng phap nay co the dung e
kiem tra cac chat ran va cac chat long, nhng khong co tac dung vi cac chat kh bi ban chat
trong suot t nhien cua chung.
Phan loai cac phan t cam bien nhiet:
Cam bien tiep xuc:
Nhiet ke dan n (lng kim);
Nhiet ke ap suat (chat long, chat kh);
Nhiet ngau;
Nhiet ien tr:
ien tr nhiet kim loai;
Nhiet ien tr ban dan (silicon, diode, transistor)

Cam bien bc xa (khong tiep xuc):
Cam bien quang (hoa quang ke, hoa ke quang ien);
Cam bien sieu am;
Quang pho.
Trong ky thuat o lng va ieu khien nhiet o chu yeu ng dung cac phan t cam bien tiep xuc
nhiet, nh:
Phan t cam bien kim loai:
o Nhiet ke dan n (lng kim hay chat long, chat kh);
o Nhiet ien tr kim loai;
o Nhiet ngau.
Phan t cam bien ban dan:
o Nhiet tr ban dan (thermo-diode, thermo-transistor); vi mach cam bien nhiet IC.
Ky thuat ng dung. Hnh 3.1 gii thieu mot may o nhiet o va cac au o phan t cam bien
nhiet o, dung cho nhieu ng dung khac nhau.
55
Loai au cam, day dan ngan.
Loai day mem xoan (keo dai 1,5 [m])
Loai co tay cam, day dan teflon dai 1,5 [m].
au cam, day nha PVC cuon (dai 4 [m]).
Dang au o
Kieu
t 99 , [s]
au o nhiet o be mat.
57
au o kieu nhung.
au o kieu cam.
10
au o nhiet o luong kh.
70
t 99 Khoang thi gian ti khi ch th at 99% gia tr o.

Hnh 3.1 May o nhiet o va phan t cam bien nhiet (hang Testotherm).
La chon cam bien o nhiet o. Trc khi i vao chi tiet cac loai phan t cam bien nhiet, thiet
ngh can co nhng nhan thc ung an t quan iem ng dung cu the. ay ta lu y nhng van e
chung nhat trong ky thuat ng dung.
Nhan thc chung. La chon the nao mot cam bien nhiet o tot nhat? Noi chung, tat ca cac kieu
cam bien la nhng tuy chon o lng nhiet o co ch, nhng moi cai eu co nhng u nhc iem
cua no. V du:
Cac thermistors co o phan giai cao, co pham vi ng dung rong rai nhat, co o nhay cao
nhat va gia thanh thap, nhng khong tuyen tnh va co pham vi nhiet o o gii han.
Cap nhiet ngau thermocouple co pham vi nhiet o o cao va ben chac oi vi nhng ng
dung co o rung ong va shock va ap cao, nhng oi hoi phai co ng day noi chuyen
dung.
56
Cac ien tr nhiet RTDs gan tuyen tnh, co o nhay cao va on nh, nhng chung co kch
thc ln va at tien.
Cac kieu silicon co gia thanh thap va gan tuyen tnh, nhng b han che pham vi nhiet o o.
Mot nhan thc quan trong trong viec la chon cac cam bien nhiet la vat lieu c s dung, nhng
vat lieu nay co gii han nhiet o. Dung sai, o chnh xac, va tnh thay the lap lan cung la nhng
tnh nang quan trong. Dung sai la yeu cau ac trng, thng la bang cong hay tr ( ) nhiet o ty
oi. o chnh xac la kha nang cua cam bien o gia tr thc cua nhiet o trong suot pham vi nhiet
o o.
Bat ke la chon cong nghe cam bien nao i na, ngi s dung van phai quan tam hang au en
o an toan tin cay. ng bao gi chon mot dung cu n thuan ch v no co gia re. Hay chon dung
cu cung cap nang lc thc hien tot nhat so vi gia thanh cua no va luon luon ton trong triet e
nhng nguyen tac ch ao va nhng khuyen cao cua nha san xuat
Moi ng dung cam bien nhiet o co the hien dien mot tong the nhng yeu cau va nhng van e
cua no, can phai anh gia tren mot c s nhan thc cu the. Di ay la mot so cau hoi can nhan
thc:
ng dung a cho oi hoi cam bien dang tiep xuc hay khong tiep xuc?
Neu la ng dung co tnh ong moving hoac neu tiep xuc vat ly la khong thc te bi nhng tnh chat
vat lieu (de bam ban hay moi trng nguy hiem), th cong nghe cam bien hong ngoai (o khong
tiep xuc) la la chon thch hp.
Qua trnh ieu khien hay kiem tra oi hoi phai cam bien trong pham vi nhiet o nh the nao?
Phai nam c pham vi nhiet o lam viec noi chung cua cac kieu loai cam bien nhiet e co c
mot s la chon phu hp cho ng dung cu the at ra. Cac cap nhiet ngau co pham vi nhiet o o
rong nhat, t -200 o C ti +2315 o C . Cac thermistors th tuy theo mau thiet ke va vat lieu, co pham
vi s dung t -100 ti +500 o C . Cac nhiet ke lng kim co the chu c nhiet o t -85 ti
+371 o C .
oi vi cac nhiet o ong lanh cryogenic, cac ien tr nhiet RTDs va mot so dung cu cam bien
ban dan silicon co kha nang tiep can nhiet o khong tuyet oi (0[K ]). Pham vi nhiet o o toi a
la t 150 o C ti 200 o C .
oi vi cac dung cu o khong tiep xuc (cam bien hong ngoai) th nhng nhiet o di -18 o C hay
ln hn 538 o C oi hoi phai co n at hang rieng custom unit. Cac mach ien t ho tr phai c
cach ly nhiet vi cam bien e khong anh hng en cac tnh nang mach.
Vi tat ca cac dung cu nay, co kha nang vt ngng o bang cach s dung cac nguon ieu nhiet
thermowells hoac bang cach at dung cu vao mot v tr tng oi so vi nguon nhiet. Tuy nhien,
cach tiep can nay co the anh hng ti o chnh xac va ap ng cua he.
Toc o thay oi nhiet o (bien thien nhiet theo thi gian) nh the nao?
oi vi nhng ng dung ma toc o thay oi nhiet o nhanh ( >1,0[ o C / min ]), vo boc cam bien co
the tr thanh mot nguon nhiet. o quan tnh nhiet cua cam bien tuy theo vo boc cua no. oi vi
nhng thay oi nhiet o cc nhanh, nen gi sao cho vo cam bien la toi thieu e cho phep no doi
theo mot cach chnh xac s bien thien nhiet o nay. ieu nay lien quan ti ca khoi vo boc va nhiet
dan cua nguon ieu nhiet hoac cac vat lieu bao ve khac.
oi vi nhng ng dung ma cam bien c lap at xa cac bo phan x ly ieu khien va o lng,
th nen s dung viec th nghiem mau thiet ke bien the. e giai quyet viec nay, ngi ta s dung
hai hoac nhieu cam bien e kiem tra nhiet o trong ng dung, trong khi mot cam bien khac kiem
tra nhiet o tai v tr d nh lap cam bien. Bang cach o v tr cam bien se c toi u hoa.
57
Can phai ieu khien hoac kiem tra nhiet o chnh xac ti mc nao?
oi vi nhng ng dung hoac qua trnh y hoc thc hien cac phan ng hoa hoc, co the oi hoi dung
sai c 0,1o C hoac nho hn. oi vi ng dung bat ky oi hoi dung sai nho hn 1,7 o C , se can
en mot he ien t phu tr. Cac he cam bien ban dan silicon, ien tr nhiet kim loai RTD, cap
nhiet ngau hoac thermistors het thay eu co the c thiet ke e am bao o dung sai chat che
nh vay. Noi chung mot cach ien hnh la cac ien tr nhiet RTDs cho o chnh xac ln nhat. Nen
nh rang trong cac ng dung ieu khien, o chnh xac cua tng phan t linh kien va o chnh xac
cua toan he la hai van e khac nhau. Neu o chnh xac cua he khong cao hn + 3o C , th viec mua
mot cam bien co o chnh xac cao, at tien, se khong mang lai hieu ch. Trong trng hp ay, co
kha nang dung mot nhiet ke lng kim ma at c o chnh xac cua he van nh the vi gia thanh
re hn nhieu.
Gia thanh he thong vi cam bien a chon quan trong nh the nao?
Trong nhng ng dung co gia tr cao tot o, gia hang ngan dollars, th gia thanh cua cam bien nhiet
o co y ngha nhat nh. V ly do o, viec la chon da tren c s o chnh xac theo yeu cau cua
he thong. Neu o chnh xac c 3o C la chap nhan c, th mot dung cu cam bien c-ien (lng
kim) hay mach thermistor gia thanh thap co the se hieu qua hn. o chnh xac 0,1o C se oi hoi
cach khac, tinh te hn (hoac at tien hn).
Khi viec co lien quan ti cac khoan muc gia thanh thap nh cac mat hang tieu dung (may nau
caphe nho giot, may rang hat bap n, vv) cam bien co the chiem so phan tram gia thanh ln hn
nhieu gia thanh toan bo. Trong nhng ng dung nh vay, o chnh xac cua cam bien t quan trong
hn va gia thanh hieu qua lai tr thanh co y ngha hn. Ve lng ln, cac nhiet ke thermostat
thng mai co phan o theo nhiet o co the thc hien cong viec hieu qua vi gia thanh toan bo t
hn 0,5 $. Vi gia thanh cua ca to hp board mach, cac bo phan thanh phan, day han, vv gia
thanh tong cong cua mot cap nhiet ngau hay cua mach thermistor co the se ln hn nhieu, nhng
hieu qua thc te co the thap hn bi so lng cac bo phan phu tr va cac tiep giap han noi vv...
Cuoi cung, cau hoi toi hau la o chnh xac can phai la bao nhieu va co the tra gia bao nhieu? Cung
phai nhan thc c cac ieu kien moi trng ma trong o cam bien se c s dung va can phai
lam g e chac chan s song con survival cua no.
Nhng phat trien mi nhat va trien vong. Cac nha san xuat cam bien nhiet hien ang lam viec
vi cac cam bien nhiet o co the chu ng c nhiet o cao hn trong khoang thi gian hoat
ong lau ben hn. V du, hang Honeywell ang lam viec vi cac nha san xuat cac bo nap ien
turbo e phat trien ca cac loai ien tr nhiet kim loai RTDs va ca cam bien nhiet ban dan
thermistors e ap ng yeu cau o nhiet o cao ti 1100 o C .
S tang trng nhu cau xe may tiet kiem nhien lieu ang dan ti s phat trien nay. Vi viec a
vao ap dung tieu chuan phat xa kh thai EURO 4 trong nam 2005 cung nh tieu chuan LEV My,
cac nha san xuat ong c may no ang no lc gia tang cong suat ra ngay cang ln hn t cac kieu
may co kch c ngay cang nho hn. Xu hng hien nay hng ti tang cng s dung cac bo
chargers turbo ket hp vi kch c may nho. Cac cam bien nhiet o cao cho phep cac he ieu
khien kiem tra c lng tieu thu kh gas cua may no van hanh va s qua nhiet cua cac bo nap
turbo.
3.2 Cac phan t cam bien nhiet kim loai.
3.2.1 Phan t cam bien nhiet dan n.
58
Cac nhiet ke la dung cu dung o nhiet o da tren c s o mot ai lng vat ly nao o co moi
phu thuoc nhiet o tng minh theo mot nh luat nhat nh cua chat c chon lam nhiet bieu.
Tuy theo ai lng (bien thien theo nhiet o) va tuy theo vat nhiet bieu, cac nhiet ke dan n c
phan loai da tren nguyen ly dan n chieu dai cua vat ran hay the tch chat long hoac chat kh khi
thay oi nhiet o (ma ap suat khong oi). Phan ln chung co o chnh xac thap, khong on nh,
nhng do n gian ve cau truc va che tao nen thng c s dung e lay tn hieu trong cac qua
trnh ieu khien, ong ngat mach ien, t c s dung lam cam bien o nhiet o.
Cac phan t cam bien dan n thng c xep vao loai cam bien nhiet c-ien. Chung bao gom
hai kieu:
Nhiet ke lng kim (bi-metal thermostat) da tren nguyen ly dan n vat lieu kim loai; va:
Nhiet ap ke nhiet ke dang ong bulb va dang mao dan capillary, da tren nguyen ly dan n
chat long.
Nhiet ke lng kim. Cac phan t nhiet ke lng kim la hai phien kim loai khac ban chat c
ghep chat vi nhau di nhiet o va ap suat, e tao thanh mot bang kim loai co o dan n nhiet
khac nhau, nen khi co tac ong nhiet th se b bien dang (dan n cong len chang han).
o bien dang phu thuoc o dan n va do o phu thuoc nhiet o. Bang cach khai thac o dan n
khac nhau cua hai vat lieu, nang lng nhiet co the c chuyen oi thanh dch chuyen c-ien.
Trong ky thuat th cac phan t dan n lng kim c ng dung pho bien trong cac thiet b ien
(lam rele nhiet, rele dong, vv).
Mot v du ien hnh nguyen ly hoat ong cua kieu cam bien nhiet lng kim nay dung ieu khien
mot contact chuyen mach thuy ngan (hnh 3.2). Cam bien nhiet lng kim nay n gian la mot
bang lng kim uon hnh xoan oc. Bang lng kim la mot tam dat mong cua hai kim loai co he so
dan n nhiet khac nhau. Khi nhiet o tang, kim loai mat trong dan n nhieu hn la kim loai
mat ngoai, va ng xoac oc co xu hng duoi thang ra. Cac cam bien nay c s dung mot cach
ien hnh e ieu khien ong m tiep iem ien, nh trong nhiet ke gia dung dung chuyen mach
thuy ngan. Trong hnh 3.2 khi nhiet o tang, ong cha thuy ngan long xoay theo chieu kim ong
ho. Khi ong xoay qua nam ngang, thuy ngan chay xuong phai va ien ay tiep xuc ien gia cac
ien cc. Mot u iem noi bat cua he nay la co the s dung trc tiep tn hieu ra cua chuyen mach
ma khong phai chuan hoa tn hieu. Ngay nay, cac chuyen mach thuy ngan a b loai khoi ng
dung bi nhng ly do moi trng, nhng cac chuyen mach kieu c cau tiep iem contact a chiem
v tr o.
Hnh 3.2 Cam bien nhiet lng kim ieu khien chuyen mach thuy ngan
(trong hnh la trang thai nguoi).
Co hai cong nghe nhiet ke lng kim c ban:
o Phan t tac ong nhanh snap-action, va:
59
o Phan t rao t t creeper.

Phan t nhiet ke tac ong nhanh kieu snap- c tao dang hnh a lng kim, co tnh nang thay
oi trang thai hau nh tc thi (t m chuyen sang ong va t ong sang m). Phan t kieu
tac ong cham creeper co dang thanh lng kim, co tnh nang m va ong cac tiep iem t t. Toc
o m c xac nh bi loai lng kim a chon va pham vi thay oi nhiet o cua chung. Nhiet ke
lng kim cung c che san theo phng an ieu chnh c. Bang cach van vt, thay oi ket cau
hnh hoc ben trong lam thay oi iem at nhiet o setpoint.
Mot cach ien hnh, cac cam bien c-ien dang lng kim nay la nhng bo phan cau thanh n
gian nhat trong giao dien vi cac ng dung cua chung. Bi tnh nang m hay ong mach khi nhiet
o tang, chung co kha nang ngat mach nguon cung cap cho ieu khien, tat mach hoac ong mach
nguon cung cap am thanh canh bao, bat m quat, vv Trong a so trng hp, cac nhiet ke ieu
nhiet thermostats c ket noi vao mot chan cua mach nguon cung cap. Khi at en nhiet o o,
dung cu se tac ong lam m hay ngat mach.
Khi phu tai ien can thiet vt qua kha nang cua nhiet ke, co the dung nhiet ke phoi hp vi mot
relay, mot tiep iem hoac phan t bo phan nao khac tac ong mach.
Viec la chon dung cu la rat quan trong khi s dung cac dung cu c-ien. Trong nhng moi trng
an mon hay co o am cao phai dung nhng dung cu c bao boc kn. Co the dung nhng dung cu
khong boc cho tng ng dung cu the da tren thong tin cung cap t nha san xuat. Tuy nhien, chung
cung nen boc bang epoxy hay loai vo ngoai uc khuon nao o.
oi vi nhng ng dung co o rung ong hay va ap cao, viec thiet ke mau la quan trong. Cac
nhiet ke thng mai phan o theo nhiet o ien hnh ch da vao ap suat lo xo loi e gi tiep iem
ong. Tiep iem co the b rung di tac ong rung ong mc o cao va mat tiep xuc sm hn d
nh. Hay tham khao y kien vi nha san xuat trong suot giai oan thiet ke cho kieu ng dung nay.
Nhng dung cu se phai oi mat vi nhiet o di 17,8 o C ( 0 o F ) can phai khai thac chat kh tr
kho ben trong e han che ngng tu hi am ti mc toi thieu, hay hien tng ong bang tren be mat
tiep xuc. Phu tai mach ien phai tuan theo nhng gii han ma nha san xuat quy nh. Viec s dung
mot dung cu tren mc gii han quy nh co the dan ti h hong vnh vien va lam hong ca muc tieu
ng dung.
S la chon dung cu nen da tren c s moi trng lo nhiet, khong phai nhiet o o. Mot dung cu
oi hoi phai hoat ong trong pham vi phu hp vi cac tnh chat vat lieu cua no, nhng phai cung
phai gan xap x mc ngng nhiet o nhat nh cao hn. Theo thi gian, lam viec mc ngng
nay se dan ti s h hong dung cu.
Cac nhiet ke lng kim a c s dung hn 50 nam nay trong nhng ng dung khac nhau nh
may nau caphe nho giot hay trong tau con thoi van chuyen vu tru Space Shuttle. Trong khi c coi
nh mot giai phap gia thanh thap oi vi th trng cung cap, chung cung la mot cong cu co o an
toan tin cay cao e s dung lau ben trong cac ng dung quan s hay vu tru.
Cac cam bien nhiet ke lng kim eu co san theo cac phng an dung cu h hay bao kn nhiet
o tang cao. Tuy theo kieu loai dung cu c la chon, iem at nhiet o co the trong pham vi t
85 ti +371 o C (t -120 ti +700 o F ). Mot so dung cu s dung mot bo gia nhiet ben trong e cung
cap tnh nang chong ca nhiet o qua ngng va qua dong.
Cac dung cu nhiet ke lng kim c che san theo nhieu kch c, ket cau va tnh nang khac nhau.
Bi thng phai mang tai ng dung thc te, chung khong oi hoi bat ky giai phap mach phu them
nao e thc hien chc nang cua mnh. Cac tnh nang dong tai thng c t phu tai tho cho ti dong
cao c 25 A tren giay [A/s]. o chnh xac cua cac san pham tieu chuan la khoang 1,7 o C ( 3o F ).
60
Cac nhiet ke thermostats co tuoi tho lau ben mot cach ien hnh vi phu tai ien ac trng va co
the bien ong tuy thuoc vao viec chung c dung trong ng dung ieu khien hay kiem tra nh the
nao
u iem:
Giao dien trc tiep vi mach ng dung oi vi nhng ap ng nhanh.
Khong oi hoi nhng linh kien / mach ien phu tr.
c che san ca hai mau thiet ke la co bao kn hay khong vo boc.
Co tnh nang chu dong tai ln.
Pham vi nhiet o lam viec rong.
c nh gia da tren c s th trng / ng dung.
San co nhng phng an tnh nang an toan tin cay chat lng cao ng dung cho quan s va
cho NASA.
Nhc iem:
o chnh xac thap hn hau het cac he cam bien khac.
Co kch thc ln hn so vi cac he cam bien khac.
Dung cu kieu tac ong cham creepage-type khong the giao dien vi cac bo phan ien t
thanh phan khac.
Co the tac ong sai chap mach vao thi ky cuoi tuoi tho.
Nhiet ap ke. Mot dang nhiet ke khac, da tren c s s phu thuoc vao nhiet o cua ap suat chat
long, chat kh trong the tch kn. o la kieu nhiet bieu chat kh theo s thay oi ap suat hay the tch
kh ly tng, thng dung la nhiet bieu kh co the tch khong oi. Chat lieu thu nhiet co the la chat
long (ru, thuy ngan), chat kh (nitro, heli), chat hi (acetone). c ng dung rong rai trong cac
moi trng de chay no, ch th trc tiep khong can nguon ien, co the truyen ch th i xa (10[m]
oi vi nhiet ap ke chat long, 60[m] chat kh). Nhc iem la o chnh xac thap ( 1,5% vi chat
long va 2,5% vi chat hi), quan tnh ln, de b ro r, ien hnh la cac nhiet ke dang ong bulb
va dang mao dan capillary s dung tnh chat mao dan cua chat long co gian e ong m bo tiep
iem ien. Chat long ng trong ong co the at cach chuyen mach (150 200) [mm]. ieu o cho
phep cam bien c nhiet o lam viec cao hn mot chut so vi hau het cac cam bien tiep xuc trc
tiep khac. Bi giai phap ket cau cong nghe nh vay nen tac ong chuyen mach cua cac dung cu
nay la cham so vi cac dung cu kieu tac ong nhanh snap-.
Cac nhiet ke dang ong bulb va capillary c che san di dang n ccnhay n SPST (single
pole, single throw) hay n ccnhay kep SPDT (single pole, double throw) va mau thiet ke ieu
chnh c iem at nhiet o trong pham vi t -35 ti +400 o C (-31 ti 752 o F ). Chung cung c
che xuat di dang at nh nhiet o bang tay. Bi ket hp tnh nang chu phu tai ien cao vi cac
ng dung au cuoi ien hnh va tac ong chuyen mach tng oi cham cua chung, ngi ta dung
nhng vat lieu tiep xuc cc ky cng vng. ieu o dan ti tr khang tiep xuc ban au cao, khong
cho phep s dung chung trong nhng ng dung dong nho.
u iem:
Co the lap at cam bien v tr kha xa bo phan ieu khien trung tam.
Co san cac he qua nhiet tch hp ben trong cam bien.
Pham vi nhiet o van hanh rong.
Co tnh nang chu dong tai ln.
Nhc iem:
Co kch thc ln.
Tng oi at tien.
61
Pham vi ng dung han che.

Khong co kha nang lap trnh (bi ngi s dung).
3.2.2 Nhiet ien tr kim loai Thermoresistances.

Nguyen ly hoat ong cua cac cam bien nhiet ien tr da tren c s s thay oi tr khang cua vat
lieu (day dan kim loai hay chat ban dan) bi thay oi nhiet o. Nhiet ien tr kim loai RTD
(resistive temperature devices), cung giong nh cac nhiet ien tr ban dan thermistors, khai thac s
thay oi ien tr theo nhiet o e o lng hoac ieu khien nhiet o.
Cac phan t nhiet-ien-tr kim loai co s phu thuoc ien tr day dan vao nhiet o la tng oi on
nh:
(3.8)
RT = R0 (1 + .T ) ;
ay, RT ien tr nhiet o T [ o C ], tnh bang [ ]; R0 ien tr nhiet o (dan xuat)
T0 = 0[ o C ] , tnh bang [ ]; he so nhiet cua vat lieu trong khoang bien thien nhiet o T , tnh
theo n v [1/ o K ] oi vi day dan vat lieu la ong, th trong khoang (0 100) [ oC ] gia tr he so
nhiet c xac nh nh tr trung bnh 0 = 0,00428 [1/o]. Can lu y ti gia tr cua he so 0 :
trong khoang (t0 tk ) biet R3 tai t3 , e tnh R4 tai t4 trong khoang (t0 tk ) , khong the thay:
R4 = R3[1 + 0 (t4 t3 )] ;
(3.9)
ma phai tnh theo:

R4 = R3 + R0 0 (t4 t3 ) ;
(3.10)
con R0 th c tnh theo bieu thc (3.11):
R3 = R0 [1 + 0 (t3 t0 )] .
(3.11)
Mot cach ien hnh, cac ien tr nhiet kim loai c che xuat t cac vat lieu co he so nhiet o
dng (tang ien tr khi nhiet o tang) va gia tr ien tr ac tnh ln. Yeu cau na la he so nhiet
cang t phu thuoc vao nhiet o cang tot, nh vay th tr so nhiet-ien-tr cua phan t RT se bien
thien theo T tuyen tnh hn. Cac chat kim loai nh nickel va platin ap ng vi yeu cau nay tot
hn ca. oi vi chung, tr so ien tr cung van gi nguyen sau nhieu lan gia nhiet nong-lanh (tnh
tai lap lai), tac dung cua phng phap x ly nhiet lam cho tnh nang nay van gi c trong mot
khoang thi gian dai (tnh on nh theo thi gian). Tr so ien tr ac tnh cua nickel va platin
tng oi ln nen cho phep dung day tr tng oi ngan, che c nhng phan t cam bien co kch
thc nho.
Cac ien tr nhiet kim loai co ac iem: he so nhiet ien tr ln va on nh; o ben hoa hoc cao
khi b ot nong hoac lam lanh; co the san xuat loat vi cac ac tnh ky thuat nh nhau. ien tr
nhiet kim loai rat on nh theo thi gian, va nh co tnh n gian ket cau, khong chu anh hng
mot cach ien hnh bi cac ieu kien moi trng. Vat lieu thng dung la ong, sat, bach kim
platin (platinum), nickel (nickel co the o ti 250 - 300 oC ), co the la nickel/sat hp kim, va
wolfram.
Nhiet ien tr kim loai la mot loai cam bien nhiet o da tren thc te la cac kim loai co he so
nhiet o dng PTC, tang ien tr khi nhiet o tang. Hnh 3.3 gii thieu mot nhiet ien tr kim loai
ien hnh. Mot day dan, nh platinium, c quan quanh mot thanh gom hay thuy tinh (oi khi
cuon day c kep gia hai thanh gom). Day platinium co he so nhiet o la 0,0039[ / / o C ], co
ngha la ien tr se gia tang them 0,0039 [ ] cho moi ohm day dan ng vi moi o nhiet o gia
tang. Cac nhiet ien tr kim loai san co vi nhieu tr so ien tr, ma tr so thong dung nhat la
62
100[ ]. Nh vay, mot nhiet ien tr platin 100- (loai Pt-100) co ien tr danh nh la 100[ ]
0 o C , va no co he so nhiet o dng PTC c 0,39[ / o C ].
Cac nhiet ien tr kim loai co u iem la chnh xac va on nh (cac ac tnh hau nh khong thay
oi theo thi gian). Nhc iem la o nhay thap (s thay oi ien tr ng vi moi o la nho), ap
ng thi gian oi vi nhng thay oi nhiet o la tng oi cham, va gia thanh cao.
Hnh 3.3 Nhiet ien tr kim loai RTD (resistance temperature detector).
Cam bien nhiet ien tr platin va nickel. Cam bien nhiet ien tr platin la loai co o chnh xac
cao, c coi nh chnh xac nhat, on nh, thng c dung lam mau chuan, gia thanh cao. RTD
platin thng c dung o nhiet o trong khoang (-200 +660) [ oC ], con RTD nickel co the o
ti (250 300) [ oC ]. Cac ien tr nhiet nay co s thay oi ien tr kha tuyen tnh, cho phep dien
dch mot cach de dang sang nhiet o.
Bi ien tr suat thap, cam bien nhiet ien tr platinium co ket cau day quan manh (ng knh
day tr thng 0,05 0,07 [mm]) va dai quan quanh loi gom e at ien tr 100[ ] (xem hnh
3.2). o thng la tr so ien tr danh nh tieu chuan 0[ oC ]oi vi cac kieu nhiet ien tr
RTDs.
Cac phan t thc te can co kha nang thay the lap lan c. oi vi cac phan t cam bien nhiet
nickel va platin th tr so ien tr danh nh nhiet o 0 [ o C ] la R0 = 100[] , nen c ky hieu la
Ni-100 va Pt-100. Cac thong so ky thuat ac trng cua chung c cho trong bang 3.2.
Bang 3.2 Thong so ky thuat Ni-100 va Pt-100.
ien tr nhiet nickel 100 [ ] ky hieu: Ni-100.
o
= 0,00618 [1/
He so nhiet o trung bnh, trong khoang (0 100) [ C ]:
o
K]
Pham vi nhiet o o:
(-60 +150)
o
[ C]
Gia tr c ban:
o
Nhiet o
-60 [ C ]
0[ C]
ien tr
69,5 1,0 [ ]
100,0 0,2 [ ]
ien tr nhiet platin 100 [ ] ky hieu: Pt-100.
He so nhiet o
o
+100 [ C ]
161,8 0,8 [ ]
trung bnh, trong khoang (0 100) [ o C ]:
= 0,00385 [1/
K]
Class B: (-200 +650) [
Pham vi nhiet o o:
Gia tr c ban:
Nhiet o
[
-200 [
C]
0[
C]
63
C]
+200 [
C]
C]
+400
ien tr A: 18,49 0,24 [ ]

[
C]
Class B: 18,49 0,56 [ ]
100,00 0,13 [ ]
175,84 0,20 [ ]
247,04 0,33
100,00 0,30 [ ]
175,84 0,48 [ ]
247,04 0,79
C]
Phan t nhiet Pt-100 co hai cap chnh xac A va B. Cap chnh xac B dung lam phan t thc nghiem.
oi vi nhng phep o yeu cau o chnh xac cao th phai dung nhng phan t cap chnh xac cao
hn, pham vi nhiet o cung co the ln hn, nhng b gii han 650 [ o C ]. Ngay nay co nhng phan
t nhiet-ien-tr co tr danh nh ln hn hay nho hn (10, 46, 100 [ ]), nhng chung lam cho
viec dien dch tn hieu kho khan hn.
Cam bien nhiet ien tr sat, ong. Trong ky thuat con dung cac cam bien nhiet-ien-tr khac
nh sat, ong, c dung nh cac che pham RTDs gia thap. Cam bien nhiet-ien-tr ong co s
phu thuoc ien tr day ong vao nhiet o tng oi on nh, c dung mot cach thong dung.
Ngi ta thng san xuat ien tr ong t day co ng knh 0,2 [mm] va 0 [ oC ] co ien tr
danh nh la 53 [ ] va 100 [ ], dung o nhiet o trong khoang (-50 -180) [ oC ], v nhiet o
cao ong de b oxy hoa.
S thay oi ien tr ong thc te la tuyen tnh hn platinium. Tuy nhien, pham vi nhiet o cua no
b han che hn va no nhay vi s xam thc an mon ma khong co oi vi platinium. Cac dung cu
ong hay nickel/sat hp kim co the b anh hng bi xam thc hoac cac moi trng o am cao va
phai c cach ly khoi nhng ieu kien moi trng nh vay. Cac day dan dung noi phan t cam
bien vi thiet b o thng c lam t nickel, hp kim nickel, ong trang thiec, ong trang bac,
hay trang nickel, va c cach ien bang cac chat deo PVC, FEP Teflon, TFE Teflon, va si
thuy tinh. Cac vat lieu c chon cung anh hng ti nhiet o ma RTDs c s dung trong o.
Cac nha san xuat thng chao hang cac ket cau cho nhiet o thap va cho nhiet o cao. Cac ket cau
nhiet o thap co pham vi t 400 ti 500 o F , va thng co cac day quan nickel hay ong trang bac,
cach ien bang Teflon vi lp boc epoxy. Cac ket cau nhiet o cao co pham vi t 900 ti 1200 o F
va s dung cach ien bang si thuy tinh, day quan la ong trang nickel vi chat gan ket gom.
Cac RTDs co the c lap rap vi nhng vat lieu khac nhau. Thong thng a so trng hp th
phan t cam bien va cac day dan c ut vao mot ong thep khong r bt kn mot au, c boc
trong lp giam chan hay vat lieu truyen nhiet nh bot gom.
Bang 3.3 cho so lieu so sanh pham vi nhiet o ng dung cua cac vat lieu cam bien nhiet ien tr
kim loai khac nhau.
Bang 3.3 Cac vat lieu phan t cam bien va gii han nhiet o.
Vat lieu
Pham vi nhiet o, [ o F ]
Platinium
-450 +1200
Nickel
-150 +600
ong
-100 +300
Nickel/Sat
+32 +400
Ket cau cam bien. Cac cam bien nhiet RTD thng co ket cau bao gom mot phan t nhiet ien
tr, cac day noi gia phan t va may o, va mot ga nh v phan t trong qua trnh o. Phan t
nhiet ien tr kim loai la mot ien tr thay oi tr so ien tr theo nhiet o. Phan t thng la mot
cuon day hoac mang ien dan bang chat ien dan c khac hoac c cat hnh tren no. No
64
thng co vo boc bang gom va c gan kn bang chat gom cement hoac bang thuy tinh. (hnh
3.4).
Hnh 3.4 Cac mau thiet ke phan t cam bien nhiet ien tr kim loai RTD.
Cac cam bien nhiet ien tr kim loai dang day cuon va dang mang mong khac mau c che xuat
di nhieu cau hnh tieu chuan khac nhau. ien hnh la dung cac chat cach ien loai Karton, caosu
silicon, Mylar hoac vat lieu ien moi polyester sach. Chung co the c lap rap len nhng be mat
cong hoac be mat hnh dang bat thng bang cach s dung chat gan ket nhay ap suat, keo dan
nhiet dan, bang dai silicon hoac kep c kh. Dang cau truc nay ac biet thch hp cho viec kiem tra
nhng be mat dien tch ln nh mat ngoai ng ong hoac be cha. Chung cung co the c tch
hp thanh mot mach ot nong linh hoat dung trong ky thuat ieu khien toi u.
Trong ky thuat nhiet o dung day nhiet-tr kha manh, ng knh c (0,05 0,3) [mm]. Day cuon
theo nhieu kieu: kieu n linear, kieu chap oi bifilare. Hnh 3.5 gii thieu mot vai kieu cuon day
nh vay.
Hnh 3.5 Kieu dang cac phan t nhiet-ien-tr kim loai:

a). Kieu day cuon n; b). Kieu day cuon oi; c). Kieu mang mong.
Trong mot so che xuat cong nghiep, day dan nickel manh c quan tren ban thuy tinh hay mica.
Ban gia cuon day c boc ca hai pha bang bang mica. Lp phu c co nh bang inh tan hay
bang keo dan. Mot kieu khac co loi cuon day la ong thuy tinh, boc phu bang ong mem bao ve. Co
loai la day platin quan tren loi gom va phu bang mot lp gom s. Kieu nay ac biet tot cho nhng
ng dung nhiet o cao.
nhng kieu neu tren cung co the quan day kieu cuon oi. Kieu day cuon oi khong b dong cam
ng khi au ien, them vao o co the lam viec vi ien xoay chieu. Chung cho phep au mach
65
nh hai phan t bien tr oc lap, co the thc hien phng an mot phan t dung cho mach o ch
th, con phan t kia dung cho mach ieu khien khong che. Cach cuon day chap oi cung la e
tuyen tnh hoa va bu can bang gia tr o. Mot u iem na la ca hai phan t eu trong cung nhng
ieu kien, moi trng nh nhau, khi c mac mach thch hp co the bu tr c nhng anh hng
moi trng nhieu.
Trong ng dung thc te thng can en nhng phan t co kch thc nho, te vi. ieu nay dan ti
cong nghe che xuat mi. Thay v day dan kim loai, ngi ta dung bien tr mang mong. Cac lp
mang mong nay c phu theo nhieu phng phap cong nghe khac nhau len nen phang hay loi
hnh tru. Kch thc hnh hoc c gia cong, tinh chnh chuan xac bang tia laser, nhng mep ria
mang mong va lp phu c tao dang chnh xac. Nh vay, o chuan xac gia cong rat cao. Phan t
bien tr nhiet co kch thc nho, va do o ma khoi lng cung nho, cho phep co c toc o ap
ng cao, gan nh tc thi. Hnh 3.3c gii thieu cau truc mot phan t bien tr mang mong platin nh
vay.
Phan t bien tr nhiet c lap trong mot vo ong bao ve, co chi tiet co nh lap rap (au ren) va o
au day ra, cho nen nhng au do nh vay c goi la nhiet ke nhiet-ien-tr (hnh 3.6).
Hnh 3.6 Hnh dang ket cau nhiet ke cong nghiep:

a). Nhiet ke ien tr kep, ga lap bang ren vt; b). Nhiet ke ien tr co o noi day.
Phan t nhiet ien tr trong RTD c che tao cho mot tr so ien tr ac trng mot nhiet o
nhat nh. Cac ng cong ac tuyen ien tr oi vi cac RTDs c tieu chuan hoa bi nhieu
hang ai dien khac nhau, lam cho RTDs de dang thay the lap lan c trong so cac che xuat loat.
Kieu dang ket cau, ac biet trng hp co vo boc bao ve, tat nhien se anh hng nhieu ti ac
tnh thi gian cua phan t bien tr nhiet. Hnh 3.7 la o th ac tuyen ap ng oi vi thay oi
nhiet o trong pham vi 20 [ o C ] cua ba kieu nhiet-ien-tr Pt-100 khac nhau.
66
Hnh 3.7 ac tnh thi gian cua nhiet-ien-tr kim loai.

Hieu chuan cam bien. o chnh xac cua cam bien la ham cua dung sai che pham va hieu chuan
phu tr bat ky nao ma cam bien co the co c. Hieu chuan co the tang cng o chnh xac cua
mot ien tr nhiet gap 10 lan dung sai che pham. Cac tr so o chnh xac trong bang 3.4 cho dung
sai che pham chat che e tinh chnh cac RTDs vi iem ong bang R0 0,1% . Tr so cua ien tr
mang mong trong bang 3.5 danh cho ieu chnh tinh cac RTDs platinium. Ca hai trng hp mang
mong va day quan tinh chnh RTDs vi 0,00385 tr alpha tng ng IEC751 Class B.
Trong viec anh gia chat lng loat ln, cac RTDs co the c tinh chnh bang laser at ien tr
nh chuan theo tnh nang thay the lap lan nhiet o bat ky trong khoang t 0 ti 150 o C hoac
iem ong bang la 100 hoac 1000 . Viec tinh chnh bang laser cung cho phep lam cho ien tr
cua RTDs phu hp vi cac gia tr hieu so alpha nhiet o muc tieu o.
Bang 3.4 o chnh xac theo nhiet o.
iem ong bang,
1000
100
100
Tr alpha
0,00375
0,00385
0,003902
ien tr R , [ ]
Nhiet o, [ o C ]
-200
5,1
0,5
0,5
-100
2,4
0,3
0,3
0
1,0
0,1
0,1
100
2,2
0,2
0,2
200
4,3
0,4
0,4
300
6,2
0,6
0,6
400
8,3
0,8
0,8
500
9,6
1,0
1,0
600
10,4
1,2
1,2
o
o
Nhiet o, [ C ]
Nhiet o T , [ C ]
-200
1,2
1,2
1,2
-100
0,6
0,6
0,6
0
0,3
0,3
0,3
67
100
200
300
400
500
600
0,6
1,2
1,8
2,5
3,0
3,3
0,6
1,2
1,8
2,5
3,0
3,6
0,6
1,2
1,8
2,5
3,0
3,6
Bang 3.5 ien tr nhiet platinium theo nhiet o.

100 [ ]
100 [ ]
iem ong bang,
1000 [ ]
0,00375 Pt
0,00385 Pt
0,00385
Tr so alpha,
Mang mong
Mang mong
Pt WW
Kieu dang
o
ien tr, [ ]
Nhiet o, [ C ]
-200
199,49
18,10
18,10
-180
284,87
26,81
26,81
-160
368,57
35,35
35,35
-140
450,83
43,75
43,75
-120
531,83
52,04
52,04
-100
611,76
60,21
60,21
-80
690,78
68,30
68,30
-60
769,01
76,32
76,32
-40
846,58
84,27
84,27
-20
923,55
92,16
92,16
0
1000,00
100,00
100,00
20
1075,96
107,79
107,79
40
1151,44
115,54
115,54
60
1226,44
123,24
123,24
80
1300,96
130,89
130,89
100
1375,00
138,50
138,50
120
1448,56
146,06
146,06
140
1521,63
153,57
153,57
160
1594,22
161,04
161,04
180
1666,33
168,46
168,46
200
1737,96
175,83
175,83
220
1809,11
183,16
183,16
240
1879,78
190,43
190,43
260
1949,96
197,67
197,67
280
2019,67
204,85
204,85
300
2088,89
211,99
211,99
320
2157,63
219,08
219,08
340
2225,89
226,12
226,12
360
2293,66
233,12
233,12
380
2360,96
240,07
240,07
400
2427,78
246,98
246,98
68
100 [ ]
0,003902
PtWW
19,76
28,01
36,17
44,27
52,31
60,31
68,27
76,22
84,15
92,08
100,00
107,92
115,84
123,76
131,69
139,61
147,53
155,45
163,37
171,29
179,21
187,14
195,06
202,98
210,90
218,82
226,74
234,66
242,59
250,51
258,43
420
440
460
480
500
520
540
560
580
600
620
640
660
680
700
720
740
750
2494,11
2559,96
2625,33
2690,22
2754,63
2818,55
2881,99
2944,96
3007,44
3069,44
3130,96
3191,99
3252,55
3312,62
3372,21
3431,32
3489,95
3519,09
253,83
260,65
267,41
274,13
280,80
287,42
294,00
300,53
307,01
313,44
319,83
326,18
332,47
338,72
344,92
351,08
357,18
360,22
253,83
260,65
267,41
274,13
280,80
287,42
294,00
300,53
266,35
274,27
282,19
290,11
198,04
305,96
313,88
321,80
Mot so van e ng dung. Cac ien tr nhiet kim loai c s dung cho nhng ng dung dan dung
khac nhau ke ca oto, cac bo ieu hoa nhiet o, cac o gia dung nho, bep lo, may lanh tu lanh, ieu
hoa khong kh, cac loai lo nng, va may nau nc nong. Chung cung pho bien trong cac ng
dung cong nghiep nh ieu khien qua trnh san xuat, cac mach va cac to hp ien t, may in, may
vi tnh xach tay, may tnh, bo nguon cung cap, cac hop battery, o nhiet o ong c va o , vong
bi, HVAC, cac thiet b va cac buong th nghiem moi trng. Cac ng dung y te bao gom bnh hi
th (oxy) respiratory, long ap incubator, buong cay khuan culture, va buong kh trung disposables.
Phan t cam bien nen nh v cho ma no co the nhanh chong at ti nhiet o cua qua trnh can
o. Cac ien tr day cuon phai c ghep chat mot cach tng ng trong cac ng dung co o rung
ong va shock va ap cao. Cac day noi phan t cam bien vi may o cho phep thc hien phep o
t xa vi khoang cach ln.
Khi tch hp RTDs thanh cac mach o, can phai tnh en ca ien tr tiep xuc. oi vi moi s gia
tang 0,33 do ng day noi, th se tng ng sai so 1 o C .
Cung can phai lu y en viec tiep mass va hien tng phat nhiet t than cua dung cu trong ng
dung. Bi v o la linh kien ien tr, chung tao nhiet t than them vao nhiet lng can o. B iv
nhiet o o tang len, ien tr cua dung cu giam xuong, hieu ng phat nhiet t than se tang len.
Neu vo mass va o nhiet dan co tac dung, th hieu ng nay se co the bo qua. Tuy nhien, yeu cau
ve o chnh xac cua toan he oi hoi phai lu y ti viec nay.
Di ay liet ke mot so u nhc iem chnh cua cac nhiet ien tr kim loai RTDs.
u iem:
Rat chnh xac va co tnh lap lai ac tnh ky thuat.
Pham vi nhiet o rong t -200 ti +650 o C (-328 ti +1202 o F tuy loai.
o on nh cc ky cao thi gian: o troi >0,1 o C /nam.
Tn hieu ien ap ra ln hn loai nhiet ngau.
o tuyen tnh ien tr tuyet vi.
69
ien tr co the xac nh tyrong phong th nghiem va se khong bien ong ang ke vi thi
gian.
Co kha nang cam bien nhiet o dien rong hay nhiet o iem.
Co tnh thay the lap lan tot vi bien ong thap.
Co the dung cap noi tieu chuan e ket noi vi thiet b ieu khien.
ac tnh xuat xng phu hp vi ng cong ien tr.
Nhc iem:
Gia thanh cao hn thermistors va nhiet ngau.
Hien tng phat nhiet t than co the anh hng en o chnh xac toan phan cua he.
Kch thc ln hn thermistors va nhiet ngau.
Khong lau ben nh cap nhiet ngau trong cac moi trng rung ong cao va va ap ln.
Hnh 3.8 Cac kieu ket noi au o nhiet-ien-tr.

o nhiet o bang nhiet ien tr. Cac dung cu o th cap cua nhiet ke ien tr thng la cac cau
o tr: cau can bang, cau lech, logometer (c cau o t-ien khung day cheo) e ch th trc tiep
thang o nhiet o, hoac may t ghi, hay trong cac thiet b t ong ieu khien, ieu chnh.
Trong cac phep o nhiet o bang cac au do nhiet-ien-tr th ien tr day noi se anh nhieu ti
ket qua o. e khac phuc anh hng o ngi ta s dung nhieu kieu ket noi khac nhau (hnh 3.8).
s o mach noi hai day th mach cau o tiep nhan toan bo tr khang cua au o. Anh hng
ien tr day noi co the c hieu chnh bang ien tr day dan can bang khong phu thuoc nhiet o
moi trng nhiet o khong oi. S o noi mach ba day cho phep thc hien phep o khoang
cach xa t au o ti may o. Anh hng nhiet o len ng day noi se b giam thieu. Phep o
chnh xac nhat c thc hien theo s o bon day noi. ay anh hng ien tr day noi c
khac phuc bi tach biet ng dan dong va ng dan ien ap ra.
Tren c s cac kieu ket noi mach o nhiet ien tr nh tren, co cac dang mach ng dung cu the
cho cac RTDs di day.
Mach 2-day. Mach cau Wheastone la cach tiep can thong dung nhat e o ien tr nhiet kim loai
RTD. V ien tr nhiet tang hay giam theo nhiet o, nen tn hieu ien ap ra Vout cung tang hay
70
giam. Dung mot mach khuyech ai thuat toan Op-Amp e theo doi Vout . ien tr day noi L1 va
L2 c dan trc tiep t chan RTD cua mach cau (hnh 3.9).
Hnh 3.9 Mach o nhiet o 2-day.
Mach 3-day. Trong cach tiep can nay, L1 va L3 tai dong ien cau. Khi cau can bang, khong co
dong chay qua L2 , cho nen khong thay co ien tr day L2 . Cau se mat can bang khi ien tr nhiet
RTD thay oi tr so. Dung mach Op-Amp e quan sat Vout va ngan dong chay vao L2 . Cac hieu
ng dien ra L1 va L3 se b loai bo khi L1 = L3 bi chung nam hai canh khac nhau cua mach cau
(hnh 3.10).
Mach 4-day. Cac tiep can mach o 4-day dung mot nguon dong hang e loai tr cac hieu ng day
dan tham ch khi L1 L4 . Dung mach Op-Amp e quan sat Vout va ngan dong chay vao L2 va L3
(hnh 3.11).
Hnh 3.12 Mach o nhiet o kieu chuyen mach.

71
Chuyen mach nhiet o. Mach ien sau lam ien ap ra b chot lai khi nhiet o cua RTD vt qua
mot gia tr co nh T1 . au ra collector m lam n gian hoa giao dien mach vi cac bo phan ien
t phu tr (hnh 3.12).
Chuyen mach nhiet o co tre. Mach ien sau dung mach phan hoi dng t au ra e lam phat
nhiet t thabn RTD u e phat trien mot khoang tre trong ac tnh cua chuyen mach. Mot khi m
mach, nhiet o phai rt xuong u thap e nh thien offset t phat nhiet trc khi chuyen mach
mat hieu lc (hnh 3.13).
Hnh 3.13 Mach o nhiet o kieu chuyen mach co tre.

3.2.3 Cap nhiet-ngau Thermocouple.
Nguyen ly hoat ong. Phan t cam bien theo nguyen ly nhiet ngau co ket cau au o la cap nhietngau, tao au ra mot nhiet-ien-ong (t ay viet tat la nh. thermoelectromotive force) tuy
thuoc tac ong cua nhiet o.
Nguyen ly nhiet ngau da tren c s hieu ng Seebeck (T. Seebeck, ngi c, 1770 1831): s
phat sinh the-ien-ong nhiet-ien trong mot mach kn bao gom cac vat dan khac loai han noi vi
nhau va cac moi han c gi nhiet o khac nhau (hnh 3.14). Mach ien o goi la cap nhietngau (thermocouple).
Moi cap nhiet ngau eu co mot moi noi c tham chieu nh la au nong (hoac goi la au o,
au lam viec), va au noi kia la au nguoi (au tham chieu). Mot au cua nhiet ngau (au o)
c a vao moi trng nhiet o can o, trong khi au kia c gi mot nhiet o biet trc
nhiet o tham chieu (hnh 3.15). au nguoi co the hoac la mot tiep giap tham chieu c gi
nhiet o 0 o C (32 o F), hoac co the c mac vi mot giao dien ien t bu tr nhiet o moi trng
xung quanh.
Hnh 3.14 S o nguyen ly nhiet ngau.
Hnh 3.15 Cap nhiet ngau thermocoupler.
Khi hai au noi phai chu nhng nhiet o khac nhau, th dong ien chay trong cac day dan ty le vi
hieu so nhiet o cua chung. Co the xac nh c nhiet o au o mot khi biet kieu cap nhiet ngau
72
s dung (vat lieu), o ln nhiet ien ong (thng tnh bang millivolt), va nhiet o cua au tham
chieu.
Cac cap nhiet ngau c phan loai theo dang hieu chuan bi ien ap (hay goi tat the ien ong
EMF electromotive force) khac nhau cua chung, cung tc la ac tnh ap ng nhiet o. ien the
millivolt la ham cua hp chat vat lieu va cau truc luyen kim ien dan cua chung. Trong thc te
ng dung, thng th thay v c ky hieu bang tr so mot nhiet o ac trng (nh Pt-100, Ni100,), cac cap nhiet ngau c cho theo tieu chuan hay theo cac gii han ac biet sai so bao trum
mot khoang pham vi nhiet o.
Neu nhiet o au t do c gi nhiet o khong oi T0 = const, th nh. trong mach la ham cua
nhiet o au kia, tc la au lam viec. Nh. se bang 0 [V] neu cac au t do va au lam viec co
cung nhiet o. Sai lech nhiet o gia au lam viec T va au t do T0 ma cang ln th nh. U thm
sinh ra trong mach se cang ln:
U thm = k .(T T0 ) = k .T ;
(3.12)
ay: U thm nh. cua phan t nhiet-ien; T nhiet o au lam viec ( iem o); T0 nhiet o
au t do (nhiet o tham chieu iem can bang); k hang so vat lieu, phu thuoc ban chat day
nhiet-ien.
Hang so vat lieu k noi chung la he so phu thuoc nhiet o, cho nen ac tuyen bien thien cua nh.
khong hoan toan tuyen tnh. Hn na, nh. phu thuoc vao chenh lech nhiet o iem o va iem
can bang, do o phai biet trc nhiet o au t do iem can bang va phai gi cho no khong oi
trong suot thi gian o (dung lam nhiet o tham chieu). Khi o, phep o nhiet o n thuan ch la
mot phep o ien ap.
Hnh 3.16 Nguyen ly o nhiet o bang cap nhiet-ngau.

Hnh 3.16 gii thieu nguyen ly s o phep o nhiet o bang phan t nhiet-ngau trong pham vi (200 +1800) [ o C ]. u iem cua s o nay la khong can co them nguon ien phu nao (do o cap
nhiet ngau c coi la phan t tch cc, khac vi nhiet ien tr phan t thu ong, lam viec vi
mach nguon cung cap t ngoai).
Pham vi nhiet o lam viec cua cac phan t nhiet-ngau chu yeu tuy thuoc vat lieu nhiet-ien. e
co c o chnh xac cao, can lu y en o tuyen tnh va tnh nang tai lap ac tuyen cua phan t.
Phan loai va ac iem ng dung. Trong ng dung ky thuat, pho bien cac cap nhiet ngau sau:
PlatinPlatinoRhodi (90% Pt, 10% Rh) ien cc la kim loai quy, o chnh xac cao ( 103 [mV]),
o ben hoa hoc cao, thng dung lam cap nhiet mau e kiem chuan cac nhiet-ngau thc
nghiem, s dung o nhiet o cao (che o lam viec lau ben: 1300 [ oC ], o nhanh: 1600 [ oC ]).
Tuy co o chnh xac cao nhat va tnh on nhiet cao, nhng so vi nhng cap nhiet-ngau khac th
PtRh-Pt co gia tr nh. nho hn, tc la mc tn hieu au ra nho. Ngay nay co nhng che pham
goc platin dung nhiet o o cao hn.
CromenAlumen, lam viec ben vng trong moi trng kiem, kha ben trong moi trng axit, o
nhiet o t -50 [ oC ] ti 1100 [ oC ], o nhanh co the ti 1300 [ oC ];
73
CromenCopen, lam viec ben trong ca moi trng kiem va axit, o nhiet o t -50 [ oC ] ti 600
[ oC ], o nhanh co the ti 800 [ oC ].
NickelNichrom Ni-NiCr co the lam viec ti 1000 [ o C ].
Hnh 3.17 Cau truc nhiet-ngau.

Ngoai ra con co: (ong) CuConstantan (nay khong dung na). (sat) FeConstantan co nhiet-ienong cao, va FeCopen.
Day nhiet-ngau co tiet dien nho, do o iem o co o dan n nho, co the thc hien phep o nhiet
o iem. Cau truc phan t nhiet-ngau gii thieu trong hnh 3.17.
Bang 3.6 ke thong so cac loai nhiet-ngau thong dung trong ky thuat. oi vi cac loai day nhietngau th phai ap ng nhng yeu cau oi hoi ve tnh chat, thanh phan vat lieu. Trong bang co neu
nhng d lieu o.
Bang 3.6 Thong so ky thuat chu yeu cua cap nhiet-ngau.
Pham vi l.viec
Loai nhiet-ngau
Tmax [ o C ]
Lau
Ngan
Cu-Constantan
700
900
Fe-Constantan
700
900
NiCr-Ni
1000
1300
PtRh-Pt
1500
1800
PtRh 30-PtRh 6
1500
1800
Day nhiet-ien
Cc
tnh
ong
Constantan
Sat
(+)
()
(+)
Constantan
Nickel Chrom
Nickel
PlatinRhodium
Platin
PlatinRhodium
Platin
()
(+)
()
(+)
()
(+)
()
74
Vat lieu
Phu lieu
ong ien phan 100%.

Cu 53%, Ni 45%, Mn 1,2%.
Al,Si, Co, Mg.
Sat ky thuat, nguyen chat,

pha <0,1% (S, Si, Mn, C).
Cu 53%, Ni 45%, Mn 1,2%.
Al, Si, Co,Mg.
Ni 89%, Cr 10%.
Ni 95%, Mn 3%, Al 2%.
Si, Al.
Mg, Co.
Pt 90%, Rh 10%.
Pt 100% nguyen chat.
Pt 70%, Rh 30%.
Pt 94%, Rh 6%.
Hnh 3.18 ac tuyen cua cac phan t nhiet-ngau.

Ben canh o, ac tuyen cua cac cap nhiet-ngau co o phi tuyen trong pham vi nhiet o rong, ieu
nay co the nhan thay tren hnh 3.18. Phai khac phuc o phi tuyen bang bien phap hoan thien thiet
b hay x ly tn hieu e co the at o chnh xac cao.
Bang cach ng dung nhng to hp vat lieu khac nhau cho ra tn hieu ien ap cao hn ng vi hieu
nhiet o, chung cho tn hieu phu hp vi ng cong ac tuyen ien ap gan tuyen tnh. ieu o
lam cho cac nhiet ngau giao tiep n gian hn vi bo phan ch th hay ieu khien controller.
Cac cap nhiet ngau thng mai co san vi nhng pham vi nhiet o va o nhay khac nhau (o nhay
c o bang V/o). Hnh 3.19 gii thieu ac tuyen ien ap theo nhiet o cua cac kieu class nhiet
ngau thng mai co san tren th trng. Nh ta co the thay, kieu J (Fe-Constantan) co o nhay cao
nhat, nhng pham vi nhiet o o thap nhat; kieu K (Chromel-Alumel) co pham vi nhiet o o cao
hn nhng o nhay thap hn; va kieu R (Platinum-Rhodium) co o nhay tham ch con thap hn
na, nhng co the lam viec nhng nhiet o cao.
Cac bang tra co san cho quan he ien ap nhiet o cua cap nhiet ngau chnh xac ( ca hai thang
nhiet o o C va o F ).
Hnh 3.19 au ra thermocouples ng vi cac kieu day nhiet ngau (tham chieu 0 o C ).
Cac cap nhiet ngau co ket cau n gian va tho nhng oi hoi phai co nhng bo phan ien t e
giai quyet nhng thuoc tnh von co cua chung nh o nhay thap va cac van e nhiet o tiep giap
nguoi. Tuy nhien, bi la nhng cam bien nhiet kha tuyen tnh (trong mot pham vi gii han), an
75
toan tin cay, va on nh, chung van chiem c ng dung rong rai trong cac phep o nhiet o cao,
nhat la trong cac lo luyen kim va lo nung.
V du 3.1. Gia thiet co mot lo nung c gi 1000[ o F ] bang mot he ieu khien, nhng co kha
nang ang ng la nhiet o co the con thap hn mc o nhieu. Ta co trong tay mot cap nhiet ngau
kieu J va mot volt-ke. Lam sao co the dung cac thiet b nay e kiem tra nhiet o lo nung ?
Trc khi i vao giai bai toan lay lam v du nay, ta hay khao sat trng hp mot cap nhiet ngau
Fe-Constantan (lam t sat va constantan, hp kim cua ong, nickel va mangan) tao ra ien ap xap
x 35 [ V / o C ]. Hnh 3.20a minh hoa trng hp nay.
Hnh 3.20 Mach nhiet ngau (loai Fe-Constantan): a). Nguyen ly;
b). Cap nhiet ngau mac mach vi day noi bang ong.
Ta co the ngh ve cac tiep giap moi au day kim loai khac nhau khi tao ra ien ap, cho nen ien
ap toan phan Vnet thc s la hieu so gia hai ien ap tiep giap. Mot tiep giap tren au o va
c goi la au nong. Tiep giap kia c gi mot nhiet o tham chieu biet trc va c goi
la au nguoi, hoac la tiep giap tham chieu. ien ap ra t he nay co the c bieu dien nh sau:
Vnet = Vhot Vcold .
(3.13)
Trong thc te, cac day nhiet ngau phai noi vi nhng day ong iem nao o nh ve tren hnh
3.20b, cho nen thc te co ba tiep giap. Tuy nhien, thc ra la ien ap toan phan t hai tiep giap day
ong cung giong nh ien ap tiep giap nguoi n Vcold trong hnh 3.20a (gia thiet rang cac tiep
giap ong cung nhiet o), cho nen phan tch tren khong co g thay oi.
Giai. Trc tien, hay a cap nhiet ngau vao lo va noi cac day dan ra cua cap nhiet ngau vi voltke (hnh 3.21). Hay rang lam sao cho cac tiep giap nguoi cua cap nhiet ngau noi vi cac au day
may o cung mot nhiet o cua moi trng xung quanh, no khoang 90[ o F ](nh ch th cua nhiet
ke treo tren tng).
Volt-ke ch th khoang 17[mV], ma theo bieu thc (3.13) o la gia tr cua Vnet . Tren o th hnh 3.19
(oi vi nhiet ngau kieu J) c lap cho trng hp tiep giap nguoi nhiet o ong bang (0 o C ),
khong hoan toan ung nh trng hp nay. T o th ta thay rang 90 o F se cho ra khoang 2,0[mV].
Ta co thay t bieu thc (3.13) rang neu Vcold tang len th se giam Vnet , cho nen neu ta nh dung o
th hnh 3.19 th phai bu tr bang cach tang ch so o cua ta t 17[mV] len 19[mV].
Bay gi dung o th hnh 3.19 oi vi 19[mV] ta oc nhiet o tng ng la 660[ o F ]. Nh vay,
nhiet o thap hn mc 1000[ o F ] nhieu, cho nen ro rang la co van e g h hong trong he ieu
khien nhiet o.
76
Hnh 3.21 o nhiet o lo nung bang cap nhiet ngau (v du 3.1).

Day noi nhiet-ngau. Day nhiet-ngau cua phan t nhiet-ien thng co au noi dan ra ngay canh
iem o, va nh vay co s can thiet phai noi dai day dan ti may o. Day dan noi dai nay cung
phai lam t vat lieu cung loai vi day nhiet-ngau. oan day noi nay co nhng yeu cau nhat nh,
bi neu khong chung se tao ra hieu ng nhiet-ien nh ban than phan t nhiet-ngau, gay sai so o.
Tren cac s o noi day th oan day noi nay c goi la day can bang nhiet. Cac day can bang
nhiet nay c lam t day n hay cap oi hoac cap nhieu si, co cach ien tng ng. e de
phan biet khi rap noi gia day nhiet-ngau va day noi can bang nhiet, chung co ky hieu mau (bang
3.7).
Bang 3.7 Ky hieu mau cua cap nhiet-ngau.
Mau day
Ky hieu
Mau day noi
Cap nhiet-ien
nhiet-ien
loai
can bang nhiet
Cu-Constantan
Nau
Typ T
Nau
Fe-Constantan
Xanh da tri
Typ J
Xanh da tri
Ni-NiCr
Xanh la cay
Typ K
Xanh la cay
Pt-PtRh
Trang
Typ S
Trang
Cc tnh dng (+) day nhiet-ngau hay day noi eu c ky hieu mau o. iem cuoi cac au
day noi can bang nhiet (goi la iem can bang nhiet) c noi vao thiet b o th cap (hoac ti may
o hoac ti au vao mach khuyech ai tn hieu). oan day noi ti thiet b th cap nay khong la
van e na, co the ch la day ong, bi oan xa iem o (t iem can bang nhiet tr ra) nhiet o
a co the coi la nh nhau.
Thi gian ap ng. Cung nh oi vi cac phan t nhiet-ien-tr RTDs, thi gian ap ng cua cac
phan t nhiet-ngau phu thuoc vao ket cau cua chung. Khi phai hien dien trong moi trng an mon
hay oxide hoa manh, phan t nhiet ngau phai c bao ve bi nguon ieu nhiet thermowell, co vo
thep khong r, va cap boc ien khoang chat.
Hnh 3.22 gii thieu cau truc cac dang ket cau phan t nhiet ngau co vo boc. Cac cap nhiet ngau
c che xuat vi ba kieu moi noi khac nhau:
Moi noi e tran. au cam bien gom hai day vat lieu khac nhau c han noi vi nhau, tao
thanh au nong. Dang nay co thi gian ap ng nhanh nhat trong so ba dang.
Moi noi tiep at. au nong c han vao mat trong cua lp vo kim loai bao ve (hnh 3.22, kieu
TM, TMS). Viec nay bao ve c moi noi nhng lai anh hng en ap ng nhiet. No cung lam
cho dung cu nhay cam hn vi nhieu giao thoa ien t EMI (electromagnetic interference).
Moi noi khong tiep at (hnh 3.22, kieu TI, TIS). au nong c cach ien vi lp vo kim loai
bao ve bang vat lieu nhiet dan. Viec nay lam tang tnh nang tiep nhiet nhng cach ly moi noi
khoi nhieu giao thoa ien t EMI.
77
Hnh 3.22 Dang ket cau cua phan t nhiet-ngau co vo boc (hang Philips).
Cap nhiet-ngau tran, tc la phan t nhiet-ngau ch gom hai day khong vo boc, la loai co ap ng
nhanh nhat. Khi cho vao vo boc bao ve, th thi gian ap ng se keo dai hn. e gii han anh
hng nay, tiet dien vo boc au do gan iem o c lam be hn (kieu TMS, TIS trong hnh
3.22). Tiep xuc nhiet cang tot (gia moi trng o va au han cua cap nhiet-ngau) th thi gian
ap ng se cang giam; cho nen co kieu au han cua cap nhiet-ngau c gan trc tiep vi vo
(kieu TM, TMS). Tuy nhien, trong nhieu trng hp, au han co the chu anh hng qua lai vi
moi trng o, nen lai phai co cach ly vi vo.
Cac au nong e h nhay vi oxy hoa va an mon. Chung co the c bao ve bang cach dung
nguon ieu nhiet thermowells hoac lp vo boc bang thep khong r ca hai dang co tiep at hay
khong tiep at. Tuy nhien, ieu nay co the anh hng nghiem trong ti o chnh xac cua he. au
nong tiep at se bao ve cam bien, tuy nhien no se lam tang thi gian ap ng nhiet va lam cam
bien nhay cam hn vi nhieu giao thoa EMI. No cung lam tang sai so bc xa va sai so ien dan.
au noi khong tiep at cung se bao ve cam bien. Tuy nhien, bi v cam bien c cach ien khoi
nguon ieu nhiet hay vo boc, anh hng cua nhieu giao thoa ien-t t hn nhieu. S that thiet
mau thiet ke nay la sai so ien dan va sai so bc xa tham ch con ln hn va ap ng cham hn
nhieu.
o nhiet o bang nhiet ngau. Trong ky thuat o nhiet o bang phan t nhiet-ngau co nhng
phng phap o khac nhau:
Phep o anh gia (ch th) trc tiep;
Phep o co khuyech ai;
Phep o theo phng phap bu.
Tren thc te, pho bien phng phap anh gia trc tiep vi c cau o t-ien khung day quay, dung
ac dung cho tng loai cap nhiet-ngau, thang o ch th millivolt [mV] hoac khac vach theo nhiet
o cho ung loai cap nhiet-ngau o. Dung cu th cap o nh. cua cap nhiet ngau thng la:
Millivolt-ke t-ien;
ien the ke galvanometer.
May o khong ch oi hoi ap ng o chnh xac phep o ma con phai co noi tr u ln e khong
lam qua tai phan dong phan t cap nhiet-ien; cho nen cung khong c mac them may o th
hai song song vao mach nhiet-ngau.
78
Hnh 3.23 Phep o dung mach khuyech ai o lng.

Phng phap o co ng dung mach khuyech ai cho phep thc hien phep o nhiet o bang cap
nhiet-ngau khong phu thuoc vao o dai cua ng day dan va thiet b o th cap. Tn hieu o
khong ch c khuyech ai len ma con c gia cong tng ng mc tn hieu chuan hoa. Va nh
vay, viec chuan hoa tn hieu trong he o lngieu khien xa cung khong la van e na. Hnh
3.23 ve s o nguyen ly cac phep o dung mach khuyech ai o lng. Trong cac mach khuyech
ai o lng, con co mach bu t ong. Ngoai ra, chung con co nhng giai phap mach e tuyen tnh
hoa ac tuyen phan t nhiet-ngau.
Nhiet o iem can bang nhiet. Viec xac nh nhiet o bang cap nhiet-ngau luon luon keo theo
van e nhiet o iem can bang, tc nhiet o au nguoi (au t do). Trong thc te, nhiet o nay
khoang 20 [ o C ] (nhiet o trong phong). Trc ay, e phep o chnh xac hn, ngi ta gi nhiet
o iem can bang nhiet 0 [ o C ] nhiet o nc a tan, nh la nguon nhiet o tham chieu. Cung
co the dung bo on nhiet thermostater e gi nhiet o iem can bang mot mc nhat nh biet
trc. Song ngay nay chu yeu s dung bo bu t ong nhiet o au nguoi cua cap nhiet-ngau. V du
ien hnh la vi mach khuyech ai AD 594 / AD 595 dung cho phan t nhiet-ien Fe-Constantan
(kieu J) pham vi o (-200 +750) [ o C ], hay Ni-NiCr (kieu K) trong pham vi (-200 +1250) [ o C ].
ien ap ra (oi vi ca hai kieu) la 10 [mV/ o C ]. ien tr au ra nho. ien ap cung cap la U B = +5
[V], tham ch co the la 15 [V]. o chnh xac at ti 1 o, co mach bu nhiet o iem can bang
0 [ o C ]. Co mach bao ong t mach nhiet-ngau. Tuy nhien, khong co tuyen tnh hoa ac tuyen
phan t nhiet-ngau. Hnh 3.24 gii thieu mot s o ng dung n gian.
Hnh 3.24 Khuyech ai o lng AD 594 / AD 595 (hang Analog Devices).
79
Thong thng, tiep giap nguoi c gi 0 o C (32 o F ) trong mot bnh cha nc a, tc la co nc
va a ang tan. Nc a c dung bi v o la mot cach e tao ra nhiet o biet trc, va cho nen
Vcold tr thanh hang so trong bieu thc (3.13), dan ti quan he trc tiep gia Vnet va Vhot :
Vhot = Vnet + cons. ;
(3.14)
ay so hang const. la gia tr Vcold = cons. 0 C (32 F ) hay mot nhiet o tham chieu nao o biet
o
trc.
Cac he thong hien ai han che nhu cau s dung nc a tan. Mot phng phap gi tiep giap nguoi
nhiet o khong oi bang mot he ieu khien. ieu nay rat co li khi trong he co nhieu cap nhiet
ngau chung co the c tham chieu ti cung mot nhiet o.
Phng phap khac (c dung bi bo vi ieu khien may tnh) n gian la tra bang (c lu trong
bo nh vi tnh) tr so Vcold oi vi nhiet o moi trng chung quanh va cong no vao vi Vnet e tm
ra Vhot .
Con cach khac e han che viec s dung bnh nc a tan la s dung mot diode nhay nhiet o
(trong mot mach ien giao dien) lam cho au ra cua cap nhiet ngau co tnh chat nh the tiep giap
nguoi van nhiet o ong bang, mac du khong phai the. Hnh 3.25 gii thieu mot mach nh vay
dung cho cap nhiet ngau Fe-Constantan. Cac tiep giap nguoi c gi cung nhiet o nh nhiet
o diode bang cach lap rap tat ca chung vao mot khoi ang nhiet isothermal. Khi nhiet o moi
trng tang len, ien ap thuan ri tren diode (khoang 0,6 [V]) giam xuong vi ty le khoang 1,1
[mV/ o C ].
ien ap nay c phan ap (bang R2 va R3 ) xuong c 28[ V / o C ], o chnh la ty le ma ien ap
tiep giap nguoi thc te tang len theo nhiet o moi trng. Bang cach tr (bi mot khuyech ai
thuat toan op-amp) hieu ng thay oi nhiet o moi trng len tiep giap nguoi, ta nhan c ien
ap nhiet ngau n thuan ty le thuan vi nhiet o o.
Hnh 3.25 Bu ien ap tiep giap nguoi bang diode.

Mot so sai so c ban khi o nhiet o bang cap nhiet ngau.
Sai so do ga at au lam viec khong hp ly, khong u sau trong moi trng nhiet o can o
(thng th khoang 100 [mm]), gan nguon lanh, at doc dong lu thong nhiet cua moi trng
o, gan be mat bc xa,
Nhiet o au t do (au nguoi) b thay oi (so vi nhiet o tham chieu cua cap nhiet-ngau);
Do thay oi ien tr phan day noi, day bu, ;
80
Do thay oi, dao ong nhiet o moi trng ngoai.

Khac phuc sai so do thay oi nhiet o au t do.
Gia s may o c khac vach trc tiep theo nhiet o vi gia tr nhiet o au t do (nhiet o tham
chieu) la T0 = 0 [ oC ], tc la vach ch th cua millivolt-ke ng vi tr so nh. cho trong bang 3.6,
va cap nhiet-ngau la Fe-Constantan co ac tuyen phu thuoc nhiet o hnh 3.26.
Neu nhiet o moi trng o (au lam viec) la T = 600 [ o C ], khi o nh. cua cap nhiet-ngau
nhiet o T la ET (T, T0 ) = ET (600,0) = 33,096 [mV]. Neu au t do co nhiet o ln hn nhiet o
tham chieu ( T0' > T0 ), gia s T0' = 25 [ o C ], th nh. ng vi iem T0' se bang ET ' (T0' , T0 ) = 1,293
0
[mV].
Hnh 3.26 ac tuyen nhiet-ngau va nhiet o au t do.

Nh vay nh. o c ET' (T, T0' ) se la:
ET' (T , T0' ) = ET (T , T0 ) ET ' (T0' , T0 ) = (33,096 1,293) = 31,803 [mV];
(3.15)
tc la nho hn nh. thc ET , bi khi o hieu nhiet o hai au nhiet-ngau la T ' = (T T0' ) se nho
hn T = (T T0 ) , (xem bieu thc (3.9)-). Nhiet o ng vi tr so nh. ET' (T, T0' ) se la T ' T , o
la bi sai so do thay oi nhiet o tham chieu (nhiet o au t do).
Tc la khi o nh. thc se bang:
E (T , T0 ) = E (T ' , T0 ) + E (T0' , T0 ) ;
(3.16)
Neu bo ch th c khac o theo nhiet o th:

(T0' T0 ) tan = (T T ' ) tan ' ;
(3.17)
tan
(3.18)
(T T ' ) = (T0' T0 ).
= K .(T0' T0 ) ;
tan '
ay, K he so bu nhiet o:
tan
.
(3.19)
K=
tan '
ieu nay co ngha la sai lech nhiet o o do thay oi nhiet o tham chieu ty le vi s thay oi o
theo he so bu K.
Bi nh. cua nhiet-ngau phu thuoc vao chenh lech nhiet o iem o va iem can bang nhiet, cho
nen trong thc te ng dung thng ngi ta phai xac nh them nhiet o au t do iem can bang
nhiet va phai gi cho no khong oi trong suot thi gian o (xem hnh 3.16 nguyen ly s o phep
o nhiet o bang phan t nhiet-ngau), hoac tao cho iem can bang nhiet co nhiet o tham chieu
T0 = 0[ o C ] . Khi o, phep o nhiet o co the dung mot may o ien ap n thuan thc hien phep o
81
nh. cua nhiet-ngau. Vi moi loai cap nhiet-ngau se xay dng mot he so K e tien li khi khac
vach may o ch th trc tiep nhiet o, v du vi cap nhiet ngau Pt-PtRh (PlatinPlatinoRhodi) K =
(0,5 6); Cr-Al (CromenAlumen) va Co-Al (ConstantanAlumen) K = (0,8 0,1).
Khac phuc anh hng cua dao ong nhiet o moi trng ngoai. Nh neu tren, sai so phep o
nhiet o mot phan la do nhiet o au t do khac vi nhiet o tham chieu cua cap nhiet-ngau, bi
au nguoi cua cap nhiet-ngau c at trong moi trng ben ngoai, nhiet o luon co the b thay
oi, dao ong. Thong thng, ngi ta s dung hop bu t ong mac noi tiep vi cap nhiet-ngau
(hnh 3.27).
Hop bu nhiet o moi trng ngoai thc chat la mot cau tr, trong o R1 la ien tr day ong thay
oi theo nhiet o moi trng; R2 , R3 va R4 la cac ien tr co nh. ien ap ng cheo cau bu
cho lng nhiet ien ong ng vi nhiet o moi trng ngoai (so vi nhiet o tham chieu cua cap
nhiet-ngau). Lng ien ap bu nay c at nh bang chiet ap nguon cung cap cho cau. Nhanh
cau R1 co ien tr day ong thay oi theo nhiet o moi trng, nh mot phan t nhiet-ien-tr,
nen dao ong nhiet o moi trng se lam thay oi tr so ien tr R1 va nh vay se lam thay oi
ien ap bu mot cach tng ng.
Cac cap nhiet ngau co pham vi nhiet o lam viec rong nhat trong tat ca cac cong nghe cam bien
nhiet, t -200 ti +2315 o C (t -328 ti +4200 o F ), va co the dung trong pham vi moi trng rat
khac nhau (xem bang 3.8). Ket cau von n gian cua chung cho phep chu ng c mc o va
ap va rung ong c kh ln. Kch thc nho cho phep ap ng hau nh tc thi oi vi nhng thay
oi nhiet o nho.
Hnh 3.27 S o bu t ong nhiet o ngoai.

Bang 3.8 ng dung cap nhiet ngau.
Class
Thong tin ng dung
Khuyen ngh s dung cho kh quyen oxy hoa lien tuc hoac kh tr. Khong xac lap cac gii
E
han sai so di 0. Tn hieu nhiet ien ong ra cao nhat cua cac kieu nhiet ngau thong dung.
Thch hp vi chan khong, kh tr hay kh quyen giam ap, kh quyen oxy hoa vi tuoi tho
J
giam. Sat b oxy hoa mau chong tren 538 o C (1000 o F ), cho nen khuyen ngh ch dung cac
day o to chac cho nhiet o cao. Phan t cam bien dang tran khong nen dung trong chat kh
sulfurous tren 538 o C (1000 o F ).
Khuyen ngh s dung cho chat kh oxy hoa lien tuc hay kh tr. Chu yeu dung tren
K
538 o C (1000 o F ). Co kha nang sai hong neu boc lo trong kh sulfur. S oxy hoa u tien
chat chromium chan dng trong mat o oxy thap mc nhat nh se tao ra hien tng
82
xanh o va s troi hieu chuan am ln a phan la nghiem trong trong pham vi

(816 1038) o C (tc 1500-1900 o F ). Viec thong gio hoac bt kn ben trong ong bao ve co
the ngan nga hien tng nay.
Co the s dung trong nhng ng dung ma phan t loai K co tuoi tho ngan hn va co van e
N
vi o on nh bi s oxy hoa va xu hng phat trien hien tng xanh o.
S dung c trong nhng moi trng oxy hoa, kh tr hac giam ap cung nh trong chan
T
khong. Khong b an mon trong moi trng am. Cac gii han sai so c cong bo cho pham
vi nhiet o di 0.
R&S Khuyen ngh s dung cho nhiet o cao. Phai c bao ve trong ong phi kim loai va chat
cach ien gom. S dung lien tuc nhiet o cao se gay nen s phat trien hat ln co the dan
ti h hong c kh. o troi hieu chuan am gay ra bi s khuyech tan rhodium vao chan
ngheo platinium cung nh do boc hi rhodium. Loai R dung trong cong nghiep, con loai S
dung trong phong th nghiem.
Cung nh loai R&S nhng co au ra thap hn. Cung co nhiet o toi a cao hn va kem
B
nhay oi vi hien tng tao hat ln trong tinh the.
Cuoi cung, co the tom tat mot so u nhc iem chu yeu cua cac phan t nhiet ngau di day.
u iem:
Kch thc nho cho phep ap ng nhiet nhanh.
Tng oi khong at tien.
Pham vi nhiet o rong.
Co tnh ben chac lau dai hn loai RTDs e dung trong cac ng dung co rung ong ln va o
va ap cao.
La cac kieu co hieu chuan theo ANSI.
Nhc iem:
Phai c bao ve trong moi trng xam thc.
Kch thc day o manh hn se t on nh hn va co tuoi tho van hanh ngan hn.
S dung day o ong tam plated-copper instrumentation wire se gay ra sai so kjhi nhiet o
moi trng xung quanh thay oi.
oi hoi phai co day dan noi mach chuyen dung.
oi hoi co au noi tham chieu.
Kem on nh hn cac RTDs trong cac bien the hoac nhiet o cao.
Nen c th nghiem cho hien thc bien the di nhng ieu kien co ieu khien oi vi
nhng ng dung nghiem trong.
oi hoi cac bo phan thanh phan hoac mach phu tr e ieu khien phu tai ng dung.
Nh vay, bai nay chung ta tap trung vao cac van e cam bien va o lng cac nhiet cao trong cong
nghiep (en 1800 o C). oi vi dai nhiet o cao hn, thng ngi ta dung cac loai cam bien bc
xa (xem muc 3.4). Phan tiep theo se chu trong vao dai nhiet o thap hn, pho bien trong cac ng
dung ky nghe moi trng va dan dung.
83
BAI 4: KY THUAT CAM BIEN NHIET O THAP.

CHNG 3. CAM BIEN O NHIET O. PHAN 2.
cam bien nhiet o trong cac ng dung o lng va ieu khien
gom 2 phan cua chng 3 (cam bien nhiet o cao va nhiet o
thap).
trong tam sau:
Khai niem c ban ve nhiet o va thang o nhiet o; cac ac
trng phan t cam bien nhiet. Cac loai phan t cam bien nhiet
ng dung trong ky thuat cong nghe, dung cho cac he o lng
ieu khien: ket cau, hoat ong chc nang, cac ac tnh ky
thuat, ac iem ng dung.
chnh nhiet o trong he thong tin o lng ieu khien; co nhan
thc va ren ky nang tong hp, thiet ke va che tao he thong cu
Bai 4 tap trung trong tam la ky thuat cam bien nhiet o thap
bang cac phan t cam bien ban dan va vi mach, ng dung rong
rai trong cong nghiep va dan dung.
3.3 Phan t cam bien nhiet ban dan.
3.3.1 Nhiet ien tr ban dan Thermistor. Thermistor (thermal sensitive resistor ien tr nhay
nhiet), la linh kien nhiet ien tr ban dan, lam t vat lieu ban dan co ien tr phu thuoc vao nhiet
o. Trong ng dung thermistors c coi nh dung cu hai ca, hoat ong theo nguyen ly thay oi
ien tr theo nhiet o,
Thermistor la nhng dung cu thay oi ien tr trong tng quan vi nhiet o cua no. ien hnh la
chung bao gom to hp hai hoac ba lp oxide kim loai c dung ket sintered trong mot vat lieu
nen gom va co cac day dan ra c han vao chat lieu ban dan semiconductor wafer hoac chp vi
mach, co phu lp vo boc epoxy hoac thuy tinh.
Ngoai cong nghe oxide kim loai, linh kien PTC cung co the c che xuat bang chat polymer ien
dan. Nhng linh kien nay ng dung hieu ng thay oi phase trong vat lieu e cung cap s tang
trng nhanh ien tr. ieu o cho phep s dung chung oi vi hien tng qua dong cung nh qua
nhiet.
Giong nh cac ien tr nhiet kim loai RTD, tr so ien tr cua thermistor c cho vi dung sai
cong hay tr ( ) nhiet o ty oi. Cac thermistors thng c ac trng 25[ o C ]. Co the lam
ien tr cua thermistors thc s tuyen tnh bang cach dung mach ho tr nh mach cau Wheastone.
Co the dien dch ien tr thermistor bang cach dung cac bang tra, dung e thc hien chc nang
chuyen mach hoac e dan ti may o, hay cung co the dung trong cac ng dung cam bien o mc
chat long. Trong cac mach ien t, thermistors c dung e bu s troi nhiet o cua cac linh kien
mach ien t, e o lng nhiet o hoac dung trong mach bao ve dong khi ong may ien
84
Cac thermistors phan biet hai loai theo he so nhiet o Temperature Coefficient:
NTC-thermistor (con goi la phan t dan nong), co he so nhiet o am negative-; va:
PTC-thermistor (phan t dan nguoi), co he so nhiet o dng positive-.
ng vi s thay oi nhiet o theo hng tang th cac linh kien PTC co tnh chat thay oi dng
(tang ien tr), con linh kien NTC co tnh thay oi am (giam ien tr).
ieu o co nghala khi nhiet o tang, cac NTC-thermistor giam ien tr, cho dong ien chay qua
ln hn, cho nen chung la phan t dan dong khi nong len va c goi la phan t dan nong.
Ngc lai, cac phan t PTC-thermistor se tang gia tr ien tr khi nhiet o tang, va nh vay, phan
t PTC se dan dong ln hn khi nhiet o thap, nen c goi la phan t dan nguoi.
Cac thermistors c lam t cac vat lieu ban dan tren c s oxyde va c che xuat vi nhieu kch
c kieu dang khac nhau. Kieu dang cau truc cac phan t thermistor c nh hng tuy theo ng
dung cu the. Phan ln nhng phan t nay co dang hat (thuy tinh). Dang ket cau hat cho phep o
nhiet o iem, khi nhiet o thay oi ot ngot dan ti nhng bien ong ngan han. Nhng phan t
thermistor ng dung cho cac chc nang ieu khien nh han dong hay han lu chuyen mach, th v
phai lam viec vi dong ln nen thermistor cung phai co tiet dien ln hn. o la ket cau dang ia
(hnh 3.28).
Hnh 3.28 Thermistor dang hat va dang a.

Cac thermistors khong tuyen tnh, do o, chung thng khong c dung e cung cap ch so o
nhiet o vi o chnh xac cao, nhng e ch th nhng thay oi nhiet o, noi v du nh qua nhiet.
Hn na, phan ln cac thermistors co he so nhiet o am, co ngha la ien tr giam khi nhiet o
tang, nh minh hoa bang ng ke am trong o th ac tuyen ien ap-nhiet o hnh 3.29a. Mot
tien ch rat ang mong c nhng dung cu nay la o nhay cao cua chung. Mot s thay oi nho
nhiet o co the tao ra mot thay oi ln ve ien tr.
Hnh 3.29b gii thieu mot mach giao dien thermistor n gian. Bang cach at thermistor len au
mot mach phan ap, ien ap c lay ra kha la tuyen tnh va ac tuyen co o doc dng (ng ke
t quang tren hnh 3.29a). Tr so ien tr R (xem hnh 3.29b) nen chon sao cho gan vi tr so danh
nh cua thermistor. Cac thermistors c che xuat vi mot pham vi tr so ien tr rong, t vai ohm
ti megaohm, viec la chon chung tuy theo pham vi nhiet o quan tam. Cac mau ien tr cao c
dung cho nhng nhiet o cao, e tang o nhay, va e gi cho cam bien khong hut dong qua ln. V
du, hay gia thiet cai g se xay ra neu ta dung thermistor hnh 3.29 trong phamvi nhiet o (150
200)[ o F ], o nhaych bang 0,1[ / o C ], va tr so ien tr danh nh rat thap (15-20)[ ]. Neu ta
cho thermistor ay hoat ong ch trong pham vi nhiet o (50-100)[ o F ], th o nhay se cao hn nhieu
(2,6[ / o C ]), va tr so ien tr danh nh cao hn (gia 50 va 80[ ]).
V du 3.2. Mot ien tr nhiet kim loai platinum Pt-100 c s dung trong he. So o ien tr hien
thi la 110[ ]. Xac nh nhiet o.
Giai. So o nhan c la 110[ ] co ngha la ien tr a tang them 10[ ] t tr so cua no 0 o C .
Do o, neu biet he so nhiet o cua thermistor la 0,39[ / o C ], ta co the tnh toan ra nhiet o hien
hu la:
85
100[].
[o C]
= 25,6[ o C ] .
0,39[]
Hnh 3.29 Thermistor: a). ac tuyen nhiet oien tr; b). Mach giao dien.
Mach o ng dung dung ien tr nhiet ban dan thermistor thng la mach cau tr. Hnh 3.30 gii
thieu nguyen ly mach cau o vi thermistor va cau can bang t ong trong ng dung thermistor.
Hnh 3.30 S o nguyen ly mach cau o dung thermistor.

Thermistor NTC. Nhiet ien tr dan nong NTC co he so nhiet o am t -0,030 en -0,055 [1/ o K ].
Khac vi cac nhiet ien tr kim loai, kho co the bieu dien mot cach n gian moi lien quan tr so
ien tr mot nhiet o nhat nh vi tr so ien tr nhiet o tham chieu cua thermistors. ay
ta s lc khao sat chung.
S phu thuoc nhiet o cua ien tr phan t thermistor NTC dan nong co the bieu dien theo cong
thc:
RT = R N .e
1 1
B
T TN
TN
RT = R N .e
B
TN = 2 ;
T
T
.T . N
T
; hoac:
(3.20)
; ay:
(3.21)
(3.22)
86
ay: RT ien tr phan t thermistor NTC nhiet o T , tnh bang [ o K ]; R N ien tr

thermistor NTC nhiet o dan xuat TN = 293[ o K ] = 20[ o C ] ; B hang so vat lieu, xac nh s phu
thuoc nhiet o dan nong; N he so nhiet cua phan t thermistor NTC.
Cac lng nhiet o T trong nhng bieu thc nay c tnh theo n v Kelvin [ o K ], (tuy rang n
v chnh thc [K] khong co dau o ( o ) nh [ o C ] hay [ o F ], ay bieu dien vay ch e khong lan
vi he so (hay hang so) K trong cac bieu thc tnh toan). .
Cac bieu thc tren mo ta s phu thuoc nhiet o cua nhiet ien tr thermistor NTC dang gan
ung. oi vi nhng phep o chnh xac hn trong mot pham vi bien thien nhiet o rong hn th t
nhieu se co sai lech. Cho nen phai coi hang so B la ham bien thien theo nhiet o. Hnh 3.31 ve
cac ac tuyen bien tr phu thuoc nhiet o oi vi cac tr so ien tr dan xuat va gia tr B khac
nhau.
Hnh 3.31 ac tuyen ien tr
Hnh 3.32 ac tuyen volt-ampere trang thai

tnh
phan t dan nong.
(thng on).
Trong ng dung cac phan t nhiet ien tr dan nong th nhiet o moi trng c xac nh theo tr
so ien tr, v nh trong cac phep o nhiet o hay trong ky thuat ieu chnh nhiet, cho nen can lu
y khong c e phan t thermistor NTC b lam nong len do dong ien chay qua (hien tng phat
nhiet t than). So vi cac so lieu gii han cua thermistor NTC, khong c e b dong qua tai.
Khi nhiet o moi trng thay oi, sau mot thi gian ngan thermistor NTC se co nhiet o bang nhiet
o moi trng. Tr so ien tr se c xac nh theo ng cong ac tuyen R HL =f( THL ) cho trong
tai lieu ky thuat cua hang san xuat ng vi nhng tr so ien tr danh nh khac nhau (xem hnh
3.31).
Trng hp dong ien hay ien ap cua thermistor NTC ln hn bnh thng se lam nong
thermistor len en nhiet o cao hn nhiet o cua moi trng. Viec nay dan ti trang thai thng on
stationare, khi ton hao cong suat ien nang do tang dong hay ap se bang cong suat ma phan t dan
nong toa ra moi trng di dang o nong gia tang ay. Nham nghien cu cac ac tnh nay ngi ta
xac nh ac tuyen tnh cua phan t . Hnh 3.32 ve ac tuyen nh vay cua mot thermistor NTC dan
nong.
Bang 3.9 Cac thong so khai quat cua phan t bien tr dan nong (Siemens).
Kieu
87
tr
danh
Dung
sai
He so
B,
Chu
tai
Nho
danh
Phvi
nho
nh
K276
K252
M822
RN
[]
330
330
950
950
500
1 k
6 k
40 k
500
1 k
6 k
40 k
1 k
1,5k
2,2k
3,3k
4,7k
6,8k
10 k
15 k
22 k
33 k
47 k
68 k
100 k
150 k
220 k
330 k
470 k
R N / [ o K ]
o
[%/ K
[mW]
[ C]
3,5
1000
100
-10
en
+100
400
20
-55
en
+125
400
20
-55
en
+125
750
25
-55
en
+125
P25
nh,
o
C]
10
20
5
10
3 950
3 950
3 760
3 760
3 410
3 560
3 950
4 250
3 410
3 560
3 950
4 250
3 730
3 900
3 900
3 950
3 950
4 200
4 300
4 250
4 300
4 450
4 600
4 600
4 830
5 000
5 000
V tr iem cc ai tren ac tuyen volt-ampere tuy thuoc ien tr nguoi cua thermistor NTC, nhiet
o moi trng va ca dien tch be mat cua phan t dan nong. Phan t co dien tch be mat ln hn,
do o tan nhiet tot hn, se phat tan cong suat ra moi trng nhieu hn so vi phan t co dien tch
be mat nho. Trong trng hp o iem cc ai se xe dch ve pha tr so dong va ap ln hn. Cac
phan t nhiet ien tr dan nong dung trong o lng va mach ieu khien bu can bang
compensation ch nen chu tai nhe, sao cho khong b phat nhiet t than, nh vay tr so ien tr cua
chung mi that s ch tuy thuoc nhiet o moi trng.
Do ien tr nguoi va he so nhiet co the khac nhau cho nhng phan t cung loai, en mc thng
phai chnh nh can bang tr so phan t bang cach mac noi tiep hay song song mot ien tr khong
phu thuoc nhiet o. e tuyen tnh hoa ac tuyen, ngi ta dung s o mac phan t dan nong vao
88
mot bo phan ap (hnh 3.33). ien tr R1 co tr so sao cho phan t nhiet ien tr NTC ch th vao
khoang gia pham vi nhiet o lam viec. Tr so ien tr R2 ln gap 10 lan ien tr R1 .
Hnh 3.33 Tuyen tnh hoa ac tuyen phan t bien tr NTC.

Cac phan t nhiet ien tr thermistor dan nong NTC c phan loai theo nhng ng dung chu yeu
cua chung va c goi ten theo o. Kieu phan t K276 dung cho nhng mach chc nang o va
ieu chnh nhiet o lam viec trong moi trng khong kh t nhien hay trong chat long. Kieu K252
ac biet dung cho cac mach rap tren chassis (khung, gam, vo may, ).
Tuy nhien, cung co the dung vao nhng ng dung khac nh la trng hp rieng cua no vay. Noi v
du, mot phan t bien tr khi ong, hoan toan co the dung cho mach o lng, nhng khi o can
phai tnh toan lai dung sai toan phan cua ac tuyen volt-ampere va cua ac tuyen nhiet mot cach
rieng le va ky lng.
Tren th trng co san vo so linh kien phan t nhiet ien tr dan nong cua nhieu hang khac nhau,
ay ch neu len mot so phan t, linh kien nhiet ien tr dan nong cua hang Siemens dung trong ky
thuat o lng va ieu khien (bang 3.9).
Thermistor PTC. Phan t nhiet ien tr PTC dan nguoi c che t gom pha titanat a tinh the.
Chung co he so nhiet o dng PTC rat ln trong mot pham vi nhiet o ac trng. Trong khoang
nhiet o nay ien tr thermistor gia tang hn mi phan tram (hnh 3.34). S gia tang ien tr la
do tac ong chat ban dan va hieu ng sat-ien. vung lan can hat nhan tinh the co mot lp chan
ma o ln mc ien the cua no tuy thuoc hang so ien moi cua vat lieu quanh no. S hnh thanh
lp chan quyet nh mc gia tang ien tr. mien ien tr thap, lp chan dan ra tng oi yeu,
hang so ien moi ln, nhiet o lam viec cua phan t thap hn nhiet o chuyen pha, c coi nh tr
so gii han hay con goi la nhiet o Curie. Tren mc ngng nhiet o chuyen pha th hang so ien
moi giam xuong, lp chan manh len, va nh vay ien tr phan t tang len co dang doc ng. S
hoat hoa nhiet cua tai gay ra s sut giam ien tr chat ban dan, se c bu hoan, mac du van
con co the nhan thay mien nhiet o thap hn nhiet o Curie (xem hnh 3.34).
iem au pham vi lam viec goi la nhiet o ban au T A , ien tr tng ng vi nhiet o o la ien
tr ban au R A la tr so ien tr nho nhat cua phan t nhiet ien tr PTC. ien tr tng ng
iem au oan tang trng doc ng c coi la tr so danh nh R N nhiet o danh nh TN .
Nhiet o danh nh gan nh tng ng nhiet o Curie cua vat lieu phan t nhiet ien tr dan
nguoi. e tr danh nh tr thanh gia tr co the tai lap lai, ngi ta thong nhat rang tr so ien tr
danh nh R N co o ln gap oi tr ien tr ban au R A .
R N = 2.R A .
(3.23)
89
Day so nhiet o danh nh oi vi cac phan t dan nguoi la: -30; 0; +20; +40; +60; +80; +110;
+120; +130; +160; va +180 [ o C ]. Dung sai la 5[ o K ] .
Hnh 3.34 Bien thien ien tr la ham nhiet o phan t dan nguoi.
Hnh 3.35 Cau truc cac phan t bien tr PTC (Siemens).

Trong cac ng dung han dong (v du nh bao ve ong c) nhiet o danh nh cua cac phan t dan
nguoi nam trong pham vi (60 180) [ o C ] chia thanh nac, moi nac 10 [ o K ]. Tr so nhiet o ap ng
danh nh lai khong phai la nhiet o danh nh cua phan t ma la nhiet o ng vi ien tr bang
570 [ ] (oi khi cung chon t 600 [ ] en 1,7 [ k ]). Nhiet o cuoi TE la iem cuoi oan tang
trng ien tr doc ng. Nh thay t s bien thien ien tr cua phan t dan nguoi phu thuoc vao
nhiet o, cac gia tr nhiet o cuoi TE va ien tr cuoi R E khong phai la nhng thong so ac trng
cua phan t cam bien nhiet ien tr.
Do phan t dan nguoi c th nghiem cng o ien trng khoang 1 [V/mm], nh trng hp
lay ac tuyen tnh cua phan t cam bien ien tr PTC, nen co the bo qua s phat nhiet t than va
90
tnh chat ien tr phu thuoc ien ap. Cung ton tai moi lien quan gia ien tr phan t dan nguoi va
nhiet o trong pham vi khoang ien tr tang trng doc ng. Da tren c s moi lien quan o ma
phan t dan nguoi PTC c dung lam cam bien nhiet o. Mot lnh vc ng dung quan trong cua
phan t dan nguoi la c ghep vao cuon day may ien e theo doi nhiet o boi day ong c. Bi
phai lam viec trong cng o ien trng khoang 10 [V/mm] nen no b gia nhiet cao hn tr nhiet
o danh nh.
Hnh 3.35 gii thieu cau truc va bang 3.10 neu thong so mot vai phan t cam bien ien tr dan
nguoi dung trong ky thuat o lng va ieu khien.
Bang 3.10 Thong so ky thuat phan t bien tr PTC (Siemens).
ien ap
U max , [V]
( 25 [
C ])
20
30
250
tr R25 ,
[ ]
130
80
80
80
> 100k
> 5k
110
80
80
85
110
110
1 100
1 100
1 100
Dung sai
[%]
+ 100
- 50
25
25
25
25
25
25
+100
- 50
Nho au
TA , [ oC ]
+
+
+
-
10
20
40
80
70
40
0
+ 20
+ 40
+ 80
+ 120
+ 140
+ 20
+ 40
+ 80
RA , [ ]
TN , [ o C ]
115
80
76
74
700
600
95
80
80
75
80
70
1 000
1 000
1 000
40
60
80
120
- 30
0
40
60
80
120
160
180
60
80
120
Cau truc
(hnh 3.28)
1)
2)
3)
4)
5)
Kieu
P310
P330
P350
P390
P240
P270
P310
P330
P350
P390
P430
P450
P330
P350
P390
Ky thuat ng dung. Ket cau thermistors lam cho chung tr thanh cam bien nhay nhat hn tat ca
cac cam bien nhiet khac oi vi s thay oi nhiet o. Bi khong cha nhng vat lieu nh
platinium, chung tng oi re tien so vi nhng ien tr nhiet kim loai day quan khac. Kch thc
nho cho phep chung s dung c trong nhieu ng dung khac nhau. Cong vao o la chung co the
c uc khuon de dang thanh nhng goi co vo boc bao ve dung lau ben.
Tuy nhien, bi v nhng vat lieu s dung, chung hoat ong trong pham vi nhiet o hep hn (t -100
ti +300 o C ) so vi cac RTDs hay cap nhiet ngau. Va bi v cac ac tnh nhiet ien tr cua chung
la khong tuyen tnh nen ng dung cua chung b han che trong mot pham vi nhiet o hep e giam
thieu anh hng o phi tuyen. Cac thermistors PTC co pham vi nhiet o s dung hep hn loai
NTC.
Nhc iem khac gan lien vi thermistors la chung co the sai sot trong kieu chap mach. Mot
cach tiem tang, ieu nay co the tao nen mot ien tr ma he thong co the dien dch nh la ch so o
nhiet o ch khong phai la linh kien cam bien b hong.
91
Cung nh vi cac RTDs, thermistors la dung cu c cap nguon. Chung oi hoi co ien au vao e
hoat ong. Trong nhng ng dung ma nguon nang lng cung cap la van e nghiem trong hoac oi
hoi phai co giao dien vi mach IC, co the oi hoi phai co nguon battery d phong.
Cung can phai lu y en viec tiep mass va hien tng phat nhiet t than cua dung cu trong ng
dung. Bi v o la linh kien ien tr, chung tao nhiet t than them vao nhiet lng can o. Bi v
nhiet o o tang len, ien tr cua dung cu giam xuong, hieu ng phat nhiet t than se tang len.
Neu vo mass va o nhiet dan co tac dung, th hieu ng nay se co the bo qua. Tuy nhien, yeu cau
ve o chnh xac cua toan he oi hoi phai lu y ti viec nay.
Cac thermistors khong co cac ac tuyen nhiet o va ien tr tieu chuan, cho nen tnh nang thay
the lap lan co the la ca van e. o co the yeu cau thiet ke lai he mot cach ph ton khi xem xet
viec thay oi nha san xuat. Phan ln cac nha san xuat co nhng ng cong ac tuyen ien tr oc
quyen cua mnh, thng c cong bo nh nhng lng ty oi da tren tr so ien tr 25 o C .
Cac thermistors hoac co the la loai manh chac robust hoac cc ky manh mai. ien hnh la cac
thermistors kieu chuoi bead thermistors co cac ng day dan cc ky manh, phai c bao ve an
toan mot cach tng ng trong nhng moi trng co o rung ong cao hay o va ap ln. Ban than
chuoi cung phai c ghep chat vao v tr ng dung trong nhng moi trng nh the.
S hien dien trong nhiet o cao co anh hng nhieu ti o on nh lau ben cua cam bien. ac biet
la nhng vat lieu gom chon s dung cho nhng tr so tr khang thap, luon co xu hng bien ong
khoi ng cong ac tuyen ien tr ban au.
Trong nhng ng dung nghiem trong, nha san xuat phai c tham khao trong giai oan thiet ke
e am bao chac chan viec la chon dung cu. Trong nhng moi trng xam thc, nhng chuoi phu
epoxy co the b mat pham chat trong mot khoang thi gian tng oi ngan. oi vi nhng kieu ng
dung nh vay, nen dung loai dung cu co lp boc thuy tinh hoac to hp au o tham ch neu gia
thanh co cao hn chut t.
u iem:
Gia thanh bo phan thap.
ap ng nhiet nhanh.
Co s thay oi nhiet o ln oi vi thay oi nhiet o cho o phan giai cao.
Kch thc cc ky nho co ngha la tac ong nhanh oi vi nhng thay oi nhiet o va kha
nang s dung trong nhng to hp khac nhau.
Co san kieu ien tr a c tuyen tnh hoa.
Tr so ien tr cao nen khong can bu ien tr day noi.
Nhc iem:
Pham vi nhiet o o b han che.
Nhiet o boc lo thap hn so vi cac RTDs hay nhiet ngau.
Khong co nh chuan ien tr tieu chuan.
S phat nhiet t than co the anh hng ti o chnh xac.
S thay oi ien tr khong tuyen tnh oi hoi nhng bo phan phu tr e dien dch chnh
xac.
S gia tang so lng bo phan thanh phan lam giam o an toan tin cay cua toan he.
oi hoi phai co cac bo phan thanh phan hay mach phu tr e ieu khien phu tai ng dung.
3.3.2 Phan t cam bien nhiet ban dan silicon. ay s dung tnh chat phu thuoc nhiet o cua
vat lieu ban dan silicon chnh la s phu thuoc vao nhiet o cua ien tr tinh the hp chat silicon.
92
Mot kha nang na la anh gia s sut ap tren tiep giap p-n hng thuan. T nguyen ly o ma
ngi ta che tao cac phan t ban dan cam bien nhiet silicon.
Cac cam bien silicon ng dung cac tnh chat ien tr the khoi bulk cua vat lieu ban dan, noi chnh
xac hn la tiep giap cua hai dien tch ghep noi c pha tap chat khac nhau. ac biet nhiet o
thap, cac cam bien silicon co ac tnh tang ien tr gan nh tuyen tnh oi vi nhiet o tang hoac
he so nhiet o dng PTC.
Cac cam bien silicon c che san theo cac mau thiet ke kieu dang phong phu, cac au tn hieu ra
va gia thanh khac nhau. Pham vi nhiet o t nhiet o ong lanh (1,4K) ti 200 o C . Vi o nhay
cao va ng cong ac tuyen ien tr gan tuyen tnh, chung la dung cu ly tng oi vi nhieu ng
dung.
Tuy theo ng dung, cac cam bien silicon co the c thiet ke nh mot phan t nam trong to hp
ong nghiem hoac tch hp trc tiep tren board mach in trong ket cau lap at be mat. Trong mau
thiet ke vi mach s dung cong nghe silicon can rat can trong oi vi hien tng qua dong co the
gay ra s phat nhiet t than cua phan t cam bien. ieu o co the lam giam o chnh xac cua he
mot cach tram trong.
Mot so nha san xuat a phat trien cac mau thiet ke cam bien vi mach IC e dung thay the cac
nhiet ke thermostats trong mot so ng dung. Chung co tien ch c lap trnh san khi xuat xng
hoac lap trnh bi ngi s dung oi vi iem at nhiet o setpoint va o tre. Chung c che san
theo cac cau hnh tieu chuan JEDEC (Joint Electron Device Engineering Council). Cac phng an
vi mach IC c che xuat co bo phan chuan hoa tn hieu ben trong chip trc tiep a ra tn hieu
dong hoac ap ti bo ieu khien hoac bo ch th. Bi co bo nh trong, cac cam bien dang IC co the
c hieu chuan rat chnh xac. Chung hoat ong rat hieu qua trong nhng moi trng a cam bien
multi-sensor environments nh cac mang truyen thong.
Tr so tn hieu au ra cua hau het cac cam bien IC ty le vi nhiet o trong mot pham vi ac trng.
Thng th ngi ta cong nhan o chnh xac tieu chuan (ng vi mot pham vi nhiet o nhat nh),
nhng cung thng co the hieu chuan lai mot nhiet o ac trng nao o. Cung vi chc nang c
ban ieu khien va ch th nhiet o, trong mach in cung thng to hp them nhng tnh nang khac
nhau nh bu nhiet.
Cac thong so van hanh cua mau thiet ke dang lap trnh c bi ngi s dung, thc hien bang
cach dung cac ien tr mac ngoai hoac c lap trnh so thong qua giao dien hai day lien thong
vi bo vi x ly processor.
u iem:
Re tien hn cac ien tr nhiet kim loai RTDs.
Co o tuyen tnh tot hn cac nhiet ien tr ban dan thermistors.
De s dung hn RTDs va cap nhiet ngau thermocouple bi tn hieu ra ln hn.
Cac kieu cam bien vi mach IC co tien ch chuan hoa tn hieu tch hp ben trong chip.
Nhieu dang cam bien IC bao gom ca cac giao thc lien lac vi he thu thap d lieu kieu bus.
Nhc iem:
Khong tuyen tnh bang cac RTDs.
Kem chnh xac hn cac he cam bien nhiet khac.
at tien hn thermistors hay nhiet ngau.
Pham vi nhiet o lam viec han che.
ap ng nhiet cham hn cac he cam bien nhiet khac.
Kch thc ien hnh ln hn so vi cac RTDs va thermistors.
oi hoi bao goi kch thc ln hn oi vi kieu nhung.
93
oi hoi phai co cac bo phan thanh phan hay mach phu tr e ieu khien tai ng dung.
Cam bien nhiet ban dan loat KTY10 KTY16. Phan t cam bien nhiet KTY10 en KTY16 co
cha lp tinh the silic n che theo cong nghe planart, khong co tiep giap ban dan, ch co hai au cc
dan ra. e o nhiet o, ngi ta tan dung tnh phu thuoc nhiet o cua ien tr gia hai ien cc.
ac tuyen ien tr R=f(T) ch gan tuyen tnh, con phai tuyen tnh hoa tiep bang mot mach ien tr
ngoai. Cac linh kien cam bien nay von co tnh nang phu thuoc chieu dong ien chay qua ien tr,
bang cach bo tr thch ng ien cc cua phan t cung co the giam thieu c anh hng nay en
mc co the bo qua. Phan t bien tr loat nay lam viec trong dai nhiet o t -50 en +150 [ o C ].
ien tr danh nh cua KTY 10 nhiet o 25 [ o C ] khoang t 1890 [ ] en 2110 [ ].
Cac phan t khac thuoc loat nay co ien tr danh nh la 2000 [ ]. Dung sai c tnh theo phan
tram ien tr danh nh, chia thanh cac nhom. Bang 3.11 cho thong so ky thuat cua phan t bien
tr ban dan loat nay, hang so thi gian ap ng cua au o oi vi thay oi nhiet o moi trng.
Hang so thi gian phu thuoc vao dang ket cau au o, s truyen nhiet gia moi trng va au o,
bang khoang thi gian ma qua trnh thch ng nhiet at ti khoang ~63%. Qua trnh thch ng nhiet
dien ra theo dang ham mu e t nhien.
Bang 3.11 Thong so ky thuat phan t cam bien loat KTY 10 16 (hang Siemens).
R25 , [ ]
R25 , [%]
I max , [mA]
Tmoitruong ,
Hang so , [s]
Kieu
o
( I N =1[mA])
( I N =1[mA])
Kh
Dau
25 [ C ]
[ oC ]
KTY 10
KTY 11-1A
KTY 11-1B
KTY 11-1C
KTY 11-2A
KTY 11-2B
KTY 11-2C
KTY 14-6
KTY 15-6
KTY 16A
KTY 16B
1890 2110
2 000
2 000
2 000
2 000
2 000
2 000
2 000
2 000
2 000
2 000
1
2
5
1
2
5
1
1
1
2
5
3
3
3
3
3
3
5
5
3
3
20
9,5
9,5
9,5
11
11
11
30
30
10
10
4
1,3
1,3
1,3
1,5
1,5
1,5
4
4
2
2
-50 +150
-50 +150
-50 +150
-50 +150
-50 +150
-50 +150
-50 +150
-30 +125
-50 +150
-25 +125
-25 +125
Hnh 3.36 la hai dang linh kien ban dan KTY 11. Cac day dan ket noi cam bien vi e nen c
thc hien sao cho s truyen tai nhiet nang la tot nhat va thi gian ap ng cua au do la nho nhat.
Hnh 3.36 Ket cau phan t cam bien nhiet KTY 11.
94
Hnh 3.37 la o th ac tuyen phan t cam bien KTY 11. ac tuyen cua cac phan t cam bien nay
hi cong. oi vi nhng ng dung thc tien th viec tuyen tnh hoa ac tuyen la rat co ch. Viec
tuyen tnh hoa c thc hien bang mot ien tr mac noi tiep khi nguon cung cap la nguon ap hay
mac song song khi nguon cung cap la nguon dong (hnh 3.38).
S phu thuoc nhiet o cua phan t bien tr RT = f (T A ) ; I 0 = 1
[mA].
V du 3.3: Phng an 1 vi RT = f (T A ) ; R25 = 2000 [ ];
Tnh RT = 2 .T A2 + 1 .T A + 0 .
2 = 2,881. 10 2 [ / oK 2 ]
1 = 1,349. 101 [ / oK ]
0 =1,646. 10 3 [ ]
V du 3.4: Phng an 2 vi RT = f (T A ) ; R25 = 2000 [ ]
va T A = T A 25 o C
Tnh RT = R25 .(1 + .T A + .T A2 ) .
= 7,461. 10 3 [ 1/ oK ]
= 1,440. 10 5 [ 1/ oK 2 ]
Hnh 3.37 ac tuyen va v du tnh ien tr R(T) cua phan t KTY 11.
Viec tnh toan ien tr tuyen tnh hoa R L trong ca hai trng hp c thc hien theo bieu thc:
R .( R + Rc ) 2 Ra .Rc
;
(3.24)
RL = b a
Ra + Rc 2 Rb
ay: R L ien tr tuyen tnh hoa, [ ]; Ra , Rb va Rc ien tr cua phan t bien tr ng vi
nhiet o iem au, gia va iem cuoi khoang pham vi o, tnh bang [ ]. Cac tr so Ra , Rb va Rc
c lay t ac tuyen cua phan t (xem hnh 3.37).
Cac phan t cam bien nhiet do hang Valvo che xuat cung tng t, nhng c ky hieu la KTY
81/83, va tr so ien tr danh nh la 1000 [ ].
Hnh 3.38 Tuyen tnh hoa ac tuyen phan t bien tr nhiet KTY:
a). Vi nguon ap; b). Vi nguon dong.
95
3.3.3 Vi mach cam bien nhiet ban dan.

Vi mach AD 590. Phan t cam bien nhiet AD 590 la vi mach ban dan. Cac phep o nhiet o s
dung s phu thuoc ien ap thuan ri tren tiep giap p-n cua chung. Vi mach AD 590 ve ban chat la
nguon dong phu thuoc nhiet o, gia tr dong ien au ra co tr so tnh bang [ A ] se tng ng
nhiet o tuyet oi tnh bang [ o K ]. Pham vi lam viec la t -55 en +150 [ o C ] tng ng 218,2 en
423,2 [ o K ]. ien tr mang mong trong vi mach nay c gia cong chnh xac bang tia laser, sao
cho dong ien nhiet o 25 [ o C ] co gia tr la 298,2 [ A ]. ien ap lam viec cua vi mach AD 590
co the trong khoang U B = (4 30) [V].
Cam bien nhiet AD 590 c phan theo cap chnh xac. Bang 3.12 la nhng thong so ky thuat chu
yeu cua AD 590.
Bang 3.12 Thong so ky thuat chu yeu cua phan t cam bien AD 590.
ac tnh
AD 590 J AD 590 K AD 590 L AD 590 M
298,2
298,2
298,2
298,2
Dong ra nh mc 25 [ o C ], [ A ]
1
He so nhiet o, [ / o K ]
Saiso chnh nh 25 [ C ], (max.)
Sai so trong pham vi o (max.):
- khong bien phap can bang nhiet:
- co bien phap can bang nhiet:
o phi tuyen (max.)
o
5k
2,5k
10 k
3 k
1,5k
5,5 k
2 k
0,8 k
1 k
3 k
1,6k
0,4k
0,5k
1,7k
1,0k
0,3k
Ket cau co dang nh linh kien transistor tron hay det, dang vi mach hay dang co vo boc hnh tru
tuy theo ng dung ky thuat. Cam bien loai nay ve nguyen ly la nguon dong, nen cho phep ng
day ket noi dai gia phan t va mach ien t x ly tn hieu. La nguon dong tr khang cao, viec
thay oi ien ap nguon cung cap khong lam anh hng ti tn hieu ra. e gi cho s phat nhiet t
than nho, nen chon ien ap nguon cung cap khong qua ln. Hnh 3.39 gii thieu s o ng dung
AD 590 co tn hieu au ra la dong ien 1 [ A/ oK ] hay la ien ap 1 [ mV / oK ].
Hnh 3.39 S o ng dung cam bien nhiet AD 590 (hang Analog Devices):
Hang san xuat linh kien a kiem chuan xuat xng cac cam bien nhiet trong mot pham vi dung sai
nhat nh. Song ngi s dung cung co the tiep tuc giam sai so cho linh kien a chon bang cach
dung cac bien phap mach. Trong hnh 3.32b gii thieu s o ma trong o co chiet ap trimmer tinh
chnh can-bang-mot-iem n gian. Can-bang-mot-iem co nghia la viec can bang ch thc hien
96
mot iem o. Cac phan t cam bien nhiet nay cung can mot thi gian nhat nh mi tiep nhan
c nhng thay oi nhiet o moi trng. Hang so thi gian c xac nh theo qua trnh bien
thien dang ham mu e nam trong khoang 0,6 [s} khi gan trc tiep len be mat nhom (nh vo ong c
o-to, xe may, ), trong dau th c 1,4 [s], trong khong kh lang th bang 60 [s].
Co the ch th tr so o theo n v [ o C ], khi o gia tr dong phai tr i 273,2 [ A ]. Nha san xuat
a ra cac dang may o ba khoi thanh phan dung o nhiet o, c chuan nh thang o ca cho
nhiet o Celsius lan thang Kelvin mot cach n gian thuan tien.
Mot vi mach khac, loat AD7414 (Analog Devices), la mot he kiem tra nhiet o so hoan toan. Tren
mot vi mach nho, 6 chan, no co mot cam bien nhiet, bo chuyen oi ADC 10-bit, va giao dien noi
tiep. No cung co the lap trnh c vi gii han nhiet o cao va thap; mot chan ra dung e ch th
khi vt ngng gii han a lap trnh.
Vi mach cam bien ban dan LM35. Cac vi mach IC cam bien nhiet o co nhieu cau hnh khac
nhau. Dang thong dung nhat la loat LM34 va LM35. Vi mach LM34 tao tn hieu ien ap ra ty le
vi nhiet o Fahremheit, con vi mach LM35 co dau ra ty le vi nhiet o Celsius. Vi mach LM35 la
mot vi mach cam bien nhiet rat thuan tien bi ien ap ra tng ng trc tiep nhiet o Celsius. Mot
so vi mach, v nh LM135, cho ien ap ra theo o Kelvin. Mot o Kelvin hay Celsius bieu dien
cung mot khoang nhiet o, nhng thang o Kelvin bat au t nhiet o 0 tuyet oi, tc la 273 o C
di iem ong bang.
Cam bien ban dan LM35 la loai dung o nhiet o theo thang o Celsius trong pham vi -55 en
+150 [ o C ]. o chnh xac 25 [ o C ] la 1,5 o, oan au va cuoi khoang o th o chnh xac la
2 o. o tuyen tnh trong pham vi nhiet o lam viec co sai lech khoang 0,5 o. Tn hieu ra cua
phan t cam bien la 10 [ mV / oK ]; ien ap lam viec la trong khoang 4 ti 30 [V]. Cam bien LM35
khong oi hoi cac bien phap chnh nh can bang. S o ng dung khi ch dung o nhiet o dng
(tren 0 [ o C ]) th n gian (hnh 3.40a). e o c ca nhiet o dng va nhiet o am th can co
them nguon ien ap am (hnh 3.40b).
ien ap ra cua LM35 ty le thuan vi o C , co ngha la:
Vout = 10[mV / o C ] .
ang thc nay neu len rang oi vi moi o gia tang nhiet o, ien ap ra tang len 10[mV]. Lu y
rang co ba cong terminals tch cc: nguon cung cap VS , at, va Vout .
T, [ o C ] U A , [mV]
T, [ o C ] U A , [mV]
+ 2
+ 20
+150
+1500
+ 25
+ 250
+ 25
+ 250
+150
+1500
- 55
- 550
a). Pham vi o:
b). Pham vi o:
(+2 +150)
(-55 +150)
o
[ C]
[ oC ]
Hnh 3.40 S o nguyen ly ng dung cam bien ban dan LM 35 (hang National Semiconductor).
97
Hnh 3.41 gii thieu cac dang ket cau vo vi mach LM35. Loat vi mach LM35 co san dang che xuat
vo boc kn TO-46 kieu transitors, con cac loai LM35C. LM35CA, va LM35D c che san dang
transistors co vo chat deo. Loai LM35D cung co che xuat dang lap rap be mat 8-chan va dang vo
chat deo TO-202.
Hnh 3.41 Vi mach cam bien nhiet LM35 (Courtesy of National Semiconductor).
u iem cua vi mach cam bien hiet LM35:
c hieu chuan trc tiep theo nhiet o Celsius.
He so thang o tuyen tnh +10,0[mV/ o C ].
o chnh xac c bao hanh 0,5[ o C ] +25[ o C ].
ac tuyen phang tren suot pham vi nhiet o -55 ti +150[ o C ].
Phu hp cho nhng ng dung ieu khien xa.
Gia thanh thap do tinh chnh ngay trong giai oan gia cong nen wafer.
Hoat ong vi nguon cung cap t 4 ti 30[V].
Dong tieu thu nho hn 60[ A ].
o phi tuyen ien hnh ch c 1 4 [ o C ].

Tr khang ra thap, 0,1 oi vi tai 1[mA].
Hnh 3.42 Mach cam bien nhiet o dung IC (v du 3.5).

V du 3.5. Cau truc motcam bien nhiet o dung vi mach LM35 co nhng thong so sau:
Pham vi: 5-100[ o C ].
Nguon cung cap: 5[V].
ien ap ra: 0,1[V/ o C ].
98
Giai. Pham vi nhiet o o theo yeu cau la khong van e, bi vi mach LM35 co pham vi hoat ong
t -55 ti +150 o C . Bai toan quy lai ch con ac trng mach va khuyech ai au ra cho phu hp vi
nhng ac tnh yeu cau.
Bi v pham vi nhiet o la dng, ta co the dung s o mach n gian trong hnh 3.40a, s dung
nguon 5V lam ien ap cung cap.
Cac ac tnh yeu cau cung cho 0,1[V]=1[ o C ], ln gap 10 lan ien ap ra cua vi mach LM35. Yeu
cau nay co the ap ng bang mach op-amp minh hoa tren hnh 3.42. o khuyech ai cua op-amp
co the at nh bang 10 bang cach la chon ien tr thch hp:
Rf
90[k]
+ 1 = 10
Gain = A =
+1 =
Ra
10[k]
Con dang vi mach cam bien nhiet na la TMP01 (Analog Devices), c thiet ke ac biet cho vi
mach chip n nhiet ke. Ba ien tr ngoai thiet lap iem at ngng nhiet o tren va nhiet o
di. Cac au ra cua TMP01 co the trc tiep dan ong cac relay e tat m may lanh hay may nong
khi can.
3.4 Cam bien bc xa.
3.4.1 Khai niem bc xa nhiet. C s phng phap o nhiet o bang bc xa cua vat the la s phu
thuoc gia mat o pho nang lng bc xa va nhiet o cua vat en tuyet oi, bieu th theo nh luat
Planck ve s phan bo theo nhiet o cua mat o pho bc xa ,T hay ,T cua bc xa can bang do
mot n v dien tch be mat cua vat en tuyet oi phat ra trong goc khoi 2 :
3
2h
,T = 2 .
- tnh theo tan so bang n v, hay:
c exp(h
1)
kT
c
2hc 2
1
- tnh theo bc song bang n v;
, T = , T 2 =
5
exp(hc
1)
kT
(3.25)
(3.26)
h
= (1,0545919
2
0,0000080). 1034 [J.s] hang so lien he nang lng E cua mot photon vi tan so cua no; k
hang so Boltzmann, k = (1,380622 0,000059). 1023 [J/o]; c van toc anh sang trong chan khong,
c = 299792 [km/s] 3. 105 [km/s]; - tan so anh sang; - bc song anh sang.
Bieu thc (3.26) co the bien oi thanh:
C15
;
(3.27)
,T =
C
exp( 2
1)
T
trong o: C1 = 2hc 2 ; C2 = hc k - la cac hang so.
Trong giai pho anh sang T << C2 , cong thc Planck (3.27) co the tnh gan ung:
E ,T = C15 exp( C2 T ) .
(3.28)
ay: h hang so Planck h = (6,626196 0,00050). 1034 [J.s], hay h =
Con trong giai pho T >> C2 , th cong thc Planck ng vi cong thc nh luat RayleighJeans
nh luat gan ung ve s phan bo pho nang lng theo bc song, tren pho bc xa cua vat en
tuyet oi nhiet o T. Theo o, o choi nang lng cua vat en ng vi bc song nhiet o T:
2c
C T
E ,T = 4 kT = 1 4 .
(3.29)
C2
99
Mat o pho nang lng bc xa cua cac vat thc E ,T khac vi mat o pho nang lng bc xa cua
vat en tuyet oi ,T :
E ,T = ,T ;
(3.30)
ay, - he so pho bc xa: ham cua bc song bc xa va nhiet o T, xac nh cho tng trng
hp cu the (v noi chung, khong the xac nh c tat ca cac yeu to anh hng ti nang suat bc xa
cua be mat vat the).
Ham thc nghiem = f ( , T ) ng dung trong nguyen ly hoat ong cua cac dung cu o nhiet o
bc xa.
3.4.2 Hoa ke bc xa. Cac may o bc xa nhiet thong dung thng c goi la hoa-quang-ke. Co
ba loai hoa quang ke:
Hoa quang ke bc xa toan phan;
Hoa quang ke bc xa mot phan (pho); phan biet theo ba phng an thc hien:
o trc tiep tn hieu ien tren bo cam quang;
Theo s o bu vi nguon bc xa chuan co nhiet o thay oi c. Tn hieu ien cua bo cam

quang ty le vi hieu quang nang cua vat o va mau th, dung e hieu chnh nhiet o bc xa
cua mau th cho en khi quang nang cua hai nguon bang nhau.
Theo s o bu, nhng nhiet o nguon bc xa mau gi co nh. Viec can bang quang nang
cua hai kenh so bi cac phan t hap thu a vao gia nguon mau va bo thu.
Hoa quang ke ty le pho; cung c thc hien di ba dang:
Ty le quang nang hai pho c xac nh trc tiep theo tn hieu ien cua cam bien;
Xac nh ty le quang nang pho khac nhau theo v tr cua phan t hap thu a vao mot
trong hai kenh o;
Bc xa hai giai pho cua vat o c so sanh vi bc xa mau.

Sai so o lng trong cac cam bien bc xa. Gom sai so phng phap va sai so dung cu o.
Sai so phng phap ay la do anh hng cac thong so quang nang khoang cach nhat nh so
vi vat the b anh hng khong ch do nhiet o ma con do he so bc xa cua be mat vat can o va
s hap thu cua moi trng trung gian. Co the coi o nhiet o bang cac hoa ke bc xa la phng
phap gian tiep o nhiet o, bi v ngoai nhiet o cua vat o, con co cac yeu to khac anh hng len
thong so bc xa:
Tnh chat cua vat bc xa (tnh chat quang hoc, nhiet tr ), trang thai pha, o nhan be mat, lp
oxyt trung gian tren be mat Cach khac phuc s thay oi dong bc xa do nguyen nhan nay la
a vao cac tnh toan he so pho bc xa cua vat thc ng vi trng hp vat thc cu the o.
He so <1.
S hap thu cua moi trng trung gian. Co the khac phuc anh hng cua moi trng trung gian
bang cach a vao tnh toan he so xuyen thau m cua knh loc. He so m <1.
S phan xa t vat oi vi anh sang ngoai. Co the tnh ti anh hng cua nguon anh sang ngoai
bang cach a vao tnh toan he so tng ng ( ,T )eqyv cua bc xa, do nhiet o hoa ke o
c khong phai la nhiet o thc, ma la nhiet o quy c, goi la nhiet o bc xa, nhiet o
choi, hay nhiet o mau khi s dung hoa quang ke thu bc xa trong giai pho rong, pho hep hay
trong nhieu vach pho, trong khi thong thng th cac hoa quang ke c khac vach theo nguon
bc xa mau vi 0 a biet.
100
Sai so dung cu o do o chnh xac o lng cac thong so dong bc xa. Sai so tng oi cua hoa
quang ke thong dung la:
T
1
M =
F = F ;
(3.31)
C2
n
ay, F - sai so o dong bc xa.
3.4.3 Hoa ke hong ngoai IR Infrared Pyrometry.
Moi oi tng phat xa nang lng hong ngoai tng ng nhiet o cua chung tren nhiet o khong
tuyet oi (0 o Kelvin). Co mot s tng quan trc tiep gia nang lng hong ngoai ma mot oi
tng phat xa va nhiet o cua no.
Cac cam bien IR o nang lng bc xa hong ngoai phat xa t oi tng bc song 4-20 micron
va chuyen oi ch so o bc xa thanh ien ap. Cong nghe IR ien hnh s dung mot thau knh e
hoi tu nang lng bc xa len pile nhiet ien thermopile. ien ap ra c khuyech ai va c
chuan hoa e cung cap ch th so o nhiet o.
Cac yeu to anh hng ti o chnh xac cua cam bien IR la:
He so phan xa thermopile so o tnh nang vat lieu phan xa nang lng bc xa hong ngoai.
He so truyen transmissivity so o tnh nang vat lieu truyen dan nang lng hong ngoai; va:
o phat xa emissivity ty le nang lng ma mot oi tng phat xa tren nang lng phat xa
toan phan t mot nguon bc xa be mat c o.
Mot oi tng co o phat xa bang 0 la vat phan xa hoan toan, trong khi oi tng co o phat xa
bang 1,0 se phat xa (hoac hap thu) 100% nang lng hong ngoai c cung cap ti no. (Mot o
phat xa bang 1,0 c goi la vat en va khong ton tai trong the gii thc).
Hoa ke hong ngoai IR, aso la dang dung cu xach tay, nguon nuoi battery, cac bo cam tay cung
cap ch th so o nhiet o dang so. Chung cung c che xuat dang thiet b lap at co nh, co the
dung vi cap quang e cam bien t xa. Cac tn hieu ra co the dung e ieu khien bo ch th hay
mach ieu khien vong kn (co phan hoi).
ieu quan trong la phai s dung cam bien vi quan niem ung oi vi ng dung cu the can o. e
am bao chac chan o chnh xac cua cac ch so o, oi tng o phai c nhn nhan hoan toan
tren c s cua mot he o lng hoan chnh. He thong o lng se xac nh pham vi nhiet o cua
tat ca cac dung cu thiet b tren quan iem toan canh ke ca phan hau trng.
Mot so yeu to co the co anh hng oi vi van hanh cua ca dung cu thiet b lan he thong noi
chung. Cac chat bui bam trong kh quyen gia cam bien va muc tieu o se hap thu hay tan xa mot
so nang lng bc xa va gay nen nhng bien ong ln trong phep o. Cac ng cap quang co the
dung e giam khoang cach gia cam bien va muc tieu target e giam thieu sai so, nhng khi o
phai tnh en ca nhng thuoc tnh nhiet o moi trng cua ng cap.
u iem:
Cho phep thc hien phep o khong tiep xuc cac oi tng chuyen ong hoac cac vat lieu
oc hai nguy hiem.
Co the dung phoi hp vi cap quang e thc hien cam bien t xa.
Pham vi nhiet o ien hnh la t -18 ti +538 o C (t 0 ti 1000 o F ).
o chnh xac 1% .
Nhc iem:
o chnh xac co the b anh hng bi cac yeu to be mat.
Trng ngam phai phu hp vi kch thc muc tieu.
Nhiet o moi trng co the anh hng ti ch so o.
101
Bo loc bc xa vi bc song phu hp phai thch hp vi ng dung cu the.

Gia thanh cao (200$+), tham ch co the con cao hn neu oi hoi mach ieu khien.
Viec hieu chuan kho khan hn va at tien hn.
oi hoi cac bo phan thanh phan hoac mach phu tr e ieu khien tai ng dung.
Cac chat bui bam, chat kh hoac hi nc trong moi trng co the anh hng ti o chnh
xac cua he o.
WUX
102
BAI 5: KY THUAT CAM BIEN V TR VA KHOANG CACH.

CHNG 4. CAM BIEN VA O CAC CHUYEN V VAT THE.
PHAN 1.
cam bien v tr, khoang cach va cac chuyen dch vat the trong
khong gian (phan 1) va thi gian (phan 2).; cac ng dung
trong o lng, nh v va ieu khien gom 2 phan cua
chng 4.
trong tam sau:
Khai niem ai cng ve v tr va chuyen v vat the va nhng
ac iem xac nh chung. Cac loai phan t cam bien ng dung
trong ky thuat o lng ieu khien nh v, ket cau, hoat ong
chc nang, cac ac tnh ky thuat, ac iem ng dung.
khien nh v vat the trong cong nghiep e co nhan thc va ren
ky nang tong hp, thiet ke va che tao he thong cu the trong
thc te moi trng ng dung.
Bai 5 tap trung trong tam la ky thuat cam bien v tr, khoang
cach va cac chuyen dch vat the trong khong gian (phan 1)
bang cac phan t cam bien ng dung rong rai trong cong
nghiep va dan dung.
4.1.1 ai cng ve chuyen v vat the.
Viec nh v v tr, xac nh kch thc hnh hoc cua vat the trong bo tr khong gian vat chat, cung
nh s chuyen dch cua no trong khong gian la mot trong nhng nhiem vu cua ky thuat thong tin o
lng va ieu khien. Cac thiet b s cap nham thc hien nhiem vu o la cac cam bien chuyen v.
Trong phan chng muc nay chung ta coi nhng van e lien quan ti v tr, kch thc va khoang
cach (khong gian), chuyen dch (chuyen ong trong khong gian theo thi gian, vi van toc va gia
toc nao o) cua cac vat the la s chuyen v cua vat the (ng yen hay trong van ong). Mac du
ay chung ta chu trong cac phng phap va phng tien ky thuat xac nh nhng ai lng nay
trong ky nghe, tuy nhien, e co nhng quan niem t duy ky thuat ng dung, thiet ngh cung nen
nhac lai mot so khai niem vat ly c ban lien quan en chuyen v vat the.
Trc tien, a noi en v tr va chuyen dch vat the trong khong gian va thi gian. o chnh la hnh
thc ton tai cua vat chat va van ong. Cac qua trnh vat ly luon luon xay ra trong khong gian ba
chieu va trong thi gian. Khong gian va thi gian khong ton tai ngoai vat chat va khong the oc
lap vi vat chat. Khai niem khong gian bieu hien s song song ton tai va tach ri cua cac vat the,
v tr va s bo tr cua chung oi vi nhau. Cac ac trng khong gian la: toa o v tr cua vat the,
khoang cach gia cac vat the, goc gia cac phng. Khai niem thi gian bieu hien tnh trc sau
103
va s tiep noi cua cac hien tng (tnh nhan qua causal). Cac ac trng thi gian la thi iem tai
o hien tng xay ra, khoang keo dai cua hien tng (qua trnh).
Chuyen ong cua vat the trong khong gian theo thi gian la oi tng nghien cu cua c hoc, mot
nganh quan trong va rat rong ln cua vat ly. Chuyen ong c hoc la s bien thien theo thi gian
cua v tr tng oi cua cac vat the hoac cac phan khac nhau cua cung mot vat the.
Van toc la ai lng vector ac trng cho phng, chieu va s nhanh cham cua chuyen ong. Tai
r
moi thi iem van toc v c nh ngha la:
v
r
v
;
(4.1)
v = lim
t 0 t
v
trong o: r la so gia cua ban knh vector cua vat the van ong sau khoang thi gian t .
La ai lng vector, van toc co o ln va co hng; hng van toc la hng tiep tuyen vi quy ao
chuyen ong, cung chieu vi chuyen ong. Ve o ln, van toc co tr so bang:
ds
;
(4.2)
v=
dt
trong o ds la quang ng vat the i c sau khoang thi gian nho dt. Trong he SI n v van toc
la [m/s].
Toc o la o ln cua vector van toc. Toc o tc thi ac trng cho s nhanh cham cua chuyen
ong tai tng thi iem. Toc o trung bnh ac trng cho s nhanh cham trong mot khoang thi
gian. Ve tr so, toc o bang quang ng vat the i c trong mot n v thi gian. Toc o anh
sang trong chan khong la ai lng tr so van toc ln hn van toc cua moi chuyen ong va moi qua
trnh trong the gii thc. Toc o anh sang trong chan khong la toc o gii han ma ngoai photon
khong vat nao at ti c. o la mot hang so vu tru, khong phu thuoc toc o nguon va may thu,
khong phu thuoc tan so bc xa. Ky thuat thong thng xac nh c = 299 792 458 1 [ms].
Gia toc la ai lng vector ac trng cho s bien thien cua vector van toc theo thi gian. Vector
gia toc bang ao ham cua vector van toc theo bien thi gian lay tai iem o:
v dv
.
(4.3)
a=
dt
Theo nh luat hai Newton, gia toc cua chat iem ty le vi lc tac dung va co phng trung vi
phng tac dung; do o no c phan thanh hai thanh phan theo hai phng tiep tuyen va phap
tuyen (hng tam) vi quy ao chuyen ong, tng ng goi la gia toc tiep tuyen hay gia toc phap
tuyen. Trong he SI, gia toc c o bang [ m s 2 ].
Trong cac ai lng gia toc, ngoai gia toc tiep tuyen, gia toc hng tam (phap tuyen), ta cung biet
gia toc trong trng (gia toc ri t do). o la gia toc ma trong lc truyen cho mot chat iem t do.
Gia toc ri t do tai moi iem phu thuoc vao o cao so vi mat bien, v o a ly va ac iem a
chat vung o. Thong thng, neu bo qua cac sai so, ngi ta tnh gia toc trong lc tieu chuan bang
g = 9,80665 [ m s 2 ].
Trong ky thuat ngi ta phan biet cac dang chuyen ong thang (tnh tien) va chuyen ong quay.
Trong chuyen ong tnh tien, tat ca cac iem cua vat ran luon luon co cung mot vector van toc va
vach nen nhng quy ao nh nhau (khong nhat thiet la quy ao thang). Chuyen ong quay la mot
trong nhng dang chuyen ong n gian nhat cua vat ran. Chuyen ong quay c xac nh bang
v
vector van toc goc , co o ln bang toc o quay , co phng nam tren truc quay va co chieu
xac nh theo quy tac van nut chai. Ly thuyet chuyen ong quay co nhieu ng dung trong c hoc
che tao may va nguyen ly c cau may, trong ly thuyet con quay hoi chuyen hay vat ly thien the
oi vi lu chat (chat long hay chat kh) dang chuyen ong tng ng la chuyen ong xoay co
104
kem theo s quay cua cac hat moi trng quanh cac truc quay tc thi i qua chnh cac hat ay. Khi
chat long va kh chuyen ong trong cac ong hay vong qua cac vat the ran (canh may bay, canh
tuabin, ) th du la chay tang hay chay roi th cac lp bien cung eu co chuyen ong xoay.
4.1.2 Phan loai cac phan t cam bien chuyen v.
Nh a neu, phan biet cac dang chuyen dch thang (linear-, chuyen ong thang theo mot hng),
chuyen dch goc (angular-, chuyen ong xoay quanh mot tam iem) va chuyen dch hon hp. Cac
chuyen dch thang va chuyen dch goc co the xac nh bang mot phan t cam bien, nhng chuyen
dch hon hp lai can en nhieu phan t hn.
e xac nh cac chuyen dch thang co nhng phan t cam bien nh:
cam bien chiet ap potentiometer phan t bien tr;
cam bien ien dung phan t bien dung;
cam bien ien cam phan t bien cam;
cam bien t tnh va bien ap o;
cam bien quang;
cam bien bien dang an hoi.
Cac phng phap o chuyen dch goc chu yeu bien the t nhng phng phap o khoang cach hay
khoang dch chuyen, ch khac la co s phu thuoc vao goc quay ch khong phai la chuyen ong
thang, tuyen tnh. Cac phan t cam bien chuyen dch goc co the la:
cam bien chiet ap potentiometer;
cam bien ien dung phan t bien dung;
cam bien ien cam phan t bien cam;
cam bien quang.
Cac cam bien bien dang an hoi khong trc tiep o chuyen dch goc; trong mot so trng hp, phai
bien the mi o c cac chuyen dch goc.
Cung co the phan loai cac cam bien chuyen v theo nguyen ly bien oi:
Phan t cam bien tham so;
Phan t cam bien vat ly.
Cac phan t cam bien nh bien tr, bien dung hay bien cam la nhng cam bien bien oi cac ai
lng thong so trang thai vat ly cua qua trnh cong nghe (v du nh v tr, chuyen dch kch
thc, khoang cach, ) thanh nhng thay oi tham so ien (nh ien tr hay ien dan, ien cam
hay ho cam, ien dung, ) c goi chung la cac cam bien tham so (xem them Phu luc 1 C s ly
thuyet phan t cam bien tham so).
Cac phan t cam bien nh cam bien ien-t, cam bien quang hay quang-ien, cam bien an hoi
la nhng cam bien bien oi cac ai lng chuyen v vat the thanh nhng thay oi thong so vat ly
ky thuat (trung gian, hoac sau o c chuyen oi thanh thong so ien), c goi chung la cac cam
bien vat ly (xem them Phu luc 2 Phan t may ien thong tin).
Phan loai phan t cam bien tham so:
Bien tr Resistance Transducers;
Bien cam Inductance Transducers;
Bien dung Capacitance Transducers.
Viec phan loai khao sat ay ch la tng oi. Trong nhng phan tiep theo chung ta se xem xet
nhng phan t t ong trong he o lng va ieu khien tng ng vi tnh nang cua chung trong
he. V nh mot phan t cam bien chuyen v kieu bien ap vi sai Differential-Transformer cung co
the xem nh ghep hai phan t bien cam Inductance-Transducers, ve mot phng dien nao o.
105
Ky thuat o chuyen dch thang va chuyen dch goc cung c ng dung e o cac ai lng vat ly
nh tac dung lc, ap suat, ng suat, hay o xoan (torsion) va nhat la cac ng dung trong ky nghe
may cong cu.
4.1.3 Phng phap xac nh kch thc hnh hoc va chuyen v.
Khi nhiem vu cua ta la o kch thc hnh hoc, chuyen dch (thang hay goc quay) th viec au tien
ma ta ngh ti la so sanh trc tiep vi mot mau chuan etalon nao o. Trng hp o goc th mau
chuan co the la mot a khac vach protractor chnh xac vi nhng dau vach nam cach nhau ung
theo gia tr goc a cho. oi vi kch thc thang cung vay, v nh dung thc metre-rod. Phep o
nay goi la phep o trc tiep direct hay la phep o tuyet oi absolute, bi kch thc can o va mau
chuan c so trc tiep, mau chuan co iem zero 0 co nh va cho so lieu gia tr tuyet oi cua so
o. ong thi, phng phap o nay lien quan vi viec so hoa digitizing kch thc o, tc la
chuyen oi cac kch thc vat ly analog thanh cac gia lng increments, v du thanh millimetre hay
o goc, va cho so o la so lng cac increments, nhieu t tuy theo kch thc o.
Ngoai cac phep o kch thc thang hay goc o, thng phai xac nh v tr. V du nh khi khi
ong may cong cu, co the can phai bat au hay tiep tuc gia cong vat pham t mot v tr nhat nh
nao o. Trong trng hp nay, cung can en cac iem moc o tuyet oi absolute mearusement
bases, bi chung cho phep nhan dang tm ra moi v tr vi mot ma tng ng, v du bang mot bo ky
t so.
oi ngau vi phep o tuyet oi la phep o ty oi relative hay phep o gia lng incremental. Theo
phng phap nay, so lng cac increments tren mot li manh grid (a vach hay thc vach)
tng ng vi so o em c. iem khi em, tc la iem 0 tren manh, co the chon mot cach
ngau nhien v khong co iem nao khac vi iem nao. Tuy nhien, tren thc te, cac qua trnh o v
tr theo phng phap gia lng lai thng co them iem dau moc zero, sao cho may em co the at
nh iem 0 tai mot v tr nhat nh, va nh vay phep o chuyen v thang hay chuyen v goc cung
co the xac nh them c v tr.
Neu em so sanh hai phng phap o tuyet oi va ty oi, ta thay ro nhng u iem va nhc iem
cua chung. Phep o tuyet oi cho o an toan cao hn ve sai so o va sai so truyen at, ac biet la
khi viec nhan biet sai so co the thc hien bang cac tn hieu th phu them (nh bits-chan-le). Mot
u iem na la he tuyet oi co iem zero co nh, co the tm ra khi b loi hay khi may b ngat do s
co. Nhng u the nay cang noi bat khi tnh phc hp tang va do o ma ga thanh cao hn. Neu can
them phep xac nh v tr th qua trnh o tuyet oi phai co bo tnh so arithmetic unit e cong vao
hay tr i so chuyen v zero trong tr so o c.
Cac he o gia lng incremental co ac trng la gia thanh thap hn trong viec nhan biet va truyen
at d lieu ket hp vi viec la va dch iem zero mot cach n gian. Tuy nhien, chung co nhc
iem la khong the nhan biet tm ra sai so o bi cac xung nhieu cam ng va sai so em. Trng
hp xay ra s co nguon cung cap, hay khi khi ong lai qua trnh o th se khong co thong tin g ve
v tr hien hu ca. Phai khi ong phep o tr lai t iem so ban au.
Cac qua trnh o ma trong o thc hien lap lai tuan hoan mot pham vi tuyet oi nho c goi la
cac he tuyet oi tuan hoan. Mot v du ien hnh la bo ma hoa goc quay Angle Encoder (xem them
Phu luc 2) dung mot a n e o goc ln hn 360 o , tc ln hn mot vong quay. Phai em so
vong quay va do o ma phep o la gia lng incremental. Mot v du na la qua trnh o ien cam
trong may o Inductorsyn (xem them Phu luc 2). ay lap lai mot khoang so o analog la 2 [mm].
Noi mot cach chnh xac, th trng hp nay van e la cac he gia lng incremental co noi suy gia
cac so gia increments rieng le.
106
Noi chung, phep o da tren c s so sanh trc tiep kch thc o vi mot mau chuan etalon nao
o khong phai la phng phap duy nhat. Phep o chuyen v cung co the thc hien bang cach
chuyen oi chuyen ong doc longitudinal thanh chuyen ong quay bang truc quay spindle hay truc
vt screw nut hoac s dung gia thc o rack va pinhong pinion (hnh 4.1).
Hnh 4.1 He cam bien chuyen v trong ky nghe may cong cu:
a). Phan t o thang, trc tiep;
b). Phan t o thang gian tiep, dung gia va pinion pinhong;
c). Phan t o thang gian tiep, dung truc quay;
d). Phan t o goc trc tiep.
Trong ky nghe che tao may cong cu, thng khong co s phan biet rach roi phng phap o trc
tiep va gian tiep, bi trong khi gia cong hiem khi thc s o kch thc ban than vat pham. Phep
o kch thc vat pham hay san pham thng phai dung nhng phng phap o khac hn la o trc
tiep tren may gia cong, bi vat lieu, dau m, chat lam nguoi va hnh dang phc tap cua vat pham
lam tr ngai phep o trc tiep. Thay v o, ngi ta thng o ng trt gia cong. Ca vat pham
gia cong va cong cu o eu c gi chat tai v tr cua chung bang dung cu kep hay mam cap ma
khong b sai lech v the trong suot cong oan gia cong. S bien dang vat the, dung cu hay cac bo
phan may khac, eu anh hng ti o chnh xac gia cong, do o phai c gi trong mot gii han
nho nhat co the. Theo o, phep o trc tiep chuyen v vat the duy nhat c thc hien ay la o
trc tiep cac bo phan may chuyen ong.
Phep o gia lng c ng dung rong rai trong cac thiet b o lng cong nghe ngay nay theo ky
thuat so (nh cac may CNC, robotic cong nghiep, ). Cho nen thiet ngh ay chung ta i sau hn
mot chut ve c s ky thuat cua phep o gia lng incremental.
C s phep o gia lng ky thuat so Digital Incremental Measurement Base. Thuat ng
digital xuat phat t goc tieng latine digitus co ngha la ngon tay. o la c s thoat au cua
phep em, em ngon tay hay em ot ngon tay dung en bay gi. Tuy nhien, ieu o cung co
ngha la so em a c chia ra thanh nhng phan hay nhng gia lng bang nhau, co san va em
c. e lam c phep em so gia lng nh vay, can co hai bc: phan chia (hay lng t hoa)
thanh cac giai lng va em. Viec lng t hoa so c thc hien ngay khi che ra vat the dung cu
o v nh thc chia vach hay can can. Viec em ch la mot phan cua phep o. Phep o gia
lng la qua trnh o theo ky thuat so n gian nhat theo nguyen ly o lng vat the, thu nhan va
x ly d lieu o. Bc tien tiep theo la tao kha nang la chon iem khong zero 0tuy y, bang cach
at nh preset hay tai nh reset bo em khi toan tnh oi hoi ch th so tuyet oi. Nhc iem
107
tram trong la mot khi mat nguon ien cung cap th co the b mat d lieu ve v tr iem dan xuat.
ay nhc iem nay c han che nh co bo nh co nh EEPROM re tien. Ngay nay, an toan d
lieu truyen dan la ca van e, viec s dung ngay cang nhieu cac he gia lng la mot minh chng.
Hnh 4.2 Lng t hoa chieu dai o. S chieu dai; T chu ky phan oan; giai lng.
Thc o dang manh bao gom cac phan oan co ac tnh vat ly khac nhau (hnh 4.2), v nh nhng
vung sang-toi trong he quang. Khoang cach gia tng phan oan rieng le la khoang T tren thang
o. em so phan oan nam doc theo chieu dai o A-B se cho tr so ng vi v tr cua vat. o vat
the di dang thc manh hay thc vach la bo nh nh phan read-only ROM c ket noi giao
dien theo ham chc nang chuyen v thang hay chuyen v goc. Ngi ta co the ngh ra nhieu nguyen
ly vat ly thch ng vi hai trang thai cua bo nh nay va co the tao c giao dien ket noi cho no.
Tuy nhien, trong vo so thiet ke lnh vc nay ch co vai no lc em lai ket qua (xem bang 4.1).
Bang 4.1 Thuoc tnh c s phep o va qua trnh trch mau.
C s phep o
Qua trnh trch mau
Bien so ien dan:
Trch mau c hoc bang tiep iem;
Lo xo hay chot an hoi;
Trch mau ien dung;
Trch mau bang linh kien tan so gii han trong mach dao
Bien so t tnh
ong.
Bien so mau sac
au do hieu ng Hall hoac au do co loi ferrite.
Bien so o trong suot
Trch mau quang hoc bang tia phan xa.
Bien so o day
Trch mau quang hoc bang tia xuyen thau.
o sai pha gia cac chum tia.
Hnh 4.3 He o chuyen dch n gian (mot xung/vong).

V du ien hnh la phep o chuyen v goc n gian (hnh 4.3). Mot banh xe cam lam contact tiep
ien moi vong quay, tao mot giai lng xung a ti bo em cong. Chng nao cha phai phan biet
hng quay th dung c cau o nay tao ra mot chuoi xung n gian, co the thc hien phep o mot
cach chnh xac. Nguyen ly nay c ng dung trong cac he ien hnh nh cac may em san pham
ch chay theo mot chieu, trong o chuyen ong thang co the chuyen thanh chuyen ong quay (v
du bang banh xe ma sat). Viec at nh bo em co the bat au t zero cho ti khi at so at trc,
108
khi o se tiep nhan tn hieu (hoac ma lenh theo giao thc nh san) va cuoi cung bo em se t
ong tra ve zero, khi ong lai qua trnh. V du ien hnh loai nay la may ca t ong, ca xe suc
go thanh nhng phan co chieu dai hay o day nhat nh. Cung co the at nh bo em ngc, tc
la at may tr so nhat nh khi bat au chay, ngng qua trnh em khi at tr so zero va cuoi cung
at lai tr so at trc ban au. Tuy nhien, khi oi hng quay neu phai thc hien phep o chnh
xac y nh vay th lai can en tn hieu th hai e nhan dang hng quay. Hai tn hieu A va B phai
c phan ly bang mot khoang dch pha. Tuy theo hng quay (hnh 4.4) tn hieu A sm pha hay
muon pha hn tn hieu B. Khoang di pha nay thng c chon c ( T + nT ), sao cho o phan giai
4
gap oi hay gap bon lan e co the nhan dang hng quay. T la chu ky lap lai cua tn hieu A va B.
Hnh 4.4 Tao tn hieu A va B dch pha:

a). quay ngc chieu kim ong ho;
b). quay theo chieu kim ong ho.
Chi tiet hn ve ky thuat nhan dang hng quay neu trong tai lieu [2].
4.2 Cam bien chuyen dch (thang linear-, va chuyen dch goc angular-).
4.2.1 Khai niem chung.
ng dung ien hnh cua cac phan t cam bien tham so la viec nh v vat the trong bo tr khong
gian, cung nh viec ieu khien, khong che s dch chuyen cua no trong khong gian, xac nh
khoang cach tng oi gia cac vat the. Chung la cac thiet b s cap nham thc hien nhiem vu o.
Lien he gia phan t cam bien va oi tng dch chuyen thng c thc hien bang lien ket c
hoc trc tiep hay gian tiep thong qua cac trng ien, trng t, anh sang tac ong len cac tham
so mach cam bien (tr khang R, L, C, ho cam M, sc ien ong E , ).
Co hai phng phap c ban e xac nh v tr va dch chuyen:
Tn hieu la ham phu thuoc v tr cua mot trong nhng phan t cam bien co lien he vi vat di
ong can xac nh chuyen v;
Thong qua so xung em ng vi chuyen v c ban cua cam bien lien quan ti v tr va dch
chuyen vat the.
4.2.2 Phan t bien tr Resistance Transducer.
Cac phan t bien tr thng c che xuat di dang chiet ap potentiometer. Tr so ien tr thuan
Ohm cua bien tr kim loai day cuon la:
l
R = , [ ];
(4.4)
A
mm 2
ay: - ien tr suat vat lieu ien tr, [
]; l chieu dai day cuon ien tr; A tiet dien
m
day tr, [ mm 2 ].
109
Ve cau truc, cac chiet ap co tiep iem con trt: chuyen ong thang linear- hay vong (arc-shaped-)
(hnh 4.5), mot vong hay nhieu vong. Kieu thong dung la co bo phan truyen ong truc quay con
trt (quay tay hay dung may ien). Bien tr c thc hien bang ien tr day cuon, hoac mang
ien tr film resistor bang mot lp carbon hay chat deo dan ien. Moi chiet ap thc te khong tranh
khoi co nhng thanh phan ien cam va ien dung. Tuy nhien, co the bo qua nhng thanh phan o,
neu dung ien mot chieu hay xoay chieu tan so thap. Hien nay ang phat trien loai bien tr t
magnetic field resistors, lam viec khong tiep xuc va do o khong b anh hng ma sat con trt.
Hnh 4.5 Cam bien ien tr: a). Chiet ap thang;

b). Chiet ap vong (amular).
tao.
Hnh 4.6 Sai lech tuyen tnh cua

chiet ap do dung sai che
Cac thong so ac trng cua bien tr.

Tr so ien tr (danh nh): Tr so ien tr ien hnh la 100[ ] va 100 [k ].
Mc ton hao cong suat cho phep: Ton hao se tang tuy theo mc tang ien ap neu ien tr nho.
Vi ien tr ln th khong ch lam tang anh hng thanh phan ien cam va ien dung ma con
co nguy c lam tang nhieu ien-t. Do o, tuy trng hp ng dung cu the ma tm phng an
thoa hiep. Do o, ien ap ln nhat U 0 max co the cung cap cho chiet ap c tnh bang:
U 0 max = Pth R ; [V]
(4.5)
ay: Pth cong suat ton hao cho phep cua chiet ap, [W]; R tr so ien tr, [ ].
Dung sai cho phep: Dung sai la sai so ln nhat co the cho phep. Dung sai cua chiet ap la sai
lech gia tr so thc te va tr so danh nh, tnh bang [%] tr danh nh, tc la sai so tng oi
cua bien tr chiet ap. No nam trong pham vi (1 10)[%]. Tr so ien hnh la trong khoang
3[%] va 5[%].
o tuyen tnh: o tuyen tnh la ac tnh ac biet quan trong oi vi cac phan t t ong. Tham
ch trong ieu kien khong tai, v du khi ien ap au ra c xac nh theo phng phap bu (can
bang), coi nh khong co sut ap tren au o, th thay oi ien ap au ra cung van khong that
tuyen tnh vi ng trt hay goc quay cua con trt. o sai lech ien tr thc te so vi ng
cong ly tng thng la trong khoang 0,05[%] va 1[%] (hnh 4.6). Chiet ap day cuon co o
tuyen tnh tot hn ca, nhng co nhc iem la gia tr bien tr thay oi ung bang o ln vong
day, t vong nay sang vong khac. Noi cach khac, o phan giai bang o ln ien tr mot vong
day. Trong thc te, co the che tao chiet ap vi 25 vong tren 1 [mm], tc la o phan giai gii
han trong khoang 40 [ m].
o phan giai: o phan giai cua chiet ap vong n ng knh 25 [mm] la khoang 0,2 o . Ve ly
thuyet, cac chiet ap kieu mang carbon hay mang deo ien dan co o phan giai vo nh. Tren
thc te, co the at 0,01 [mm] khi o dch chuyen thang va 0.01 o khi o di goc. Tuy nhien o
tuyen tnh cua nhng cam bien nay kem hn cac chiet ap day cuon.
110
Trong khi o, cac chiet ap con trt lai phai han che dong ien qua tiep iem trt toi a la 1 [mA]
e tranh hao mon lam giam tuoi tho thiet b. Bien phap khac phuc tr ngai nay la phoi hp hai
phng phap ket cau: ien tr day la day cuon va day cuon c phu mot lp chat deo ien dan
tren be mat tiep xuc vi con trt. Ky thuat day cuon cho o tuyen tnh tot, trong khi mang chat
deo ien dan am bao o phan giai cao. Them vao o, con trt co the tiep xuc tot hn, khong ch
cho phep giam ien tr tiep xuc ma con co cac ac tnh chong rung ong va shock ien tot hn.
o tuyen tnh khong ch phu thuoc vao ban than phan t chiet ap R0 ma con phu thuoc tai au ra
cua chiet ap mac tai la phan mach tieu thu dong. Hnh 4.7 cho thay o phi tuyen cua ac tuyen
ien ap ra se tang len khi ien tr tai Rtai giam :
Ux
1
=
;
R
U0
l + 0
x
1
x
Rtai
l
(4.6)
ay: x khoang chay cua tiep iem con trt; l o dai toan phan cua bien tr.
Trng hp ly tng, chiet ap khong tai ( Rtai ), th bieu thc (4.3) co dang:
Ux x
= .
U0 l
(4.7)
Neu Rtai = R0 th sai so cc ai la 12[%] tr cuoi thang o, neu Rtai = 10 R0 th tng ng sai so se
giam xuong con 1,5[%]. Van e phoi hp ien tr tai giai quyet khong may kho khan khi s dung
mach khuyech ai thuat toan Op-Amp lam bien oi tr khang.
Hnh 4.7 Sai lech tuyen tnh cua chiet ap do tr khang tai.
oi vi chiet ap tuyen tnh, pham vi bien tr co the at c ch tuy thuoc o dai cua phan t bien
tr. Tren thc te, a so cac chiet ap tuyen tnh co chieu dai khoang (25 300) [mm], nhng cung co
nhng bien tr co o dai ti 2000 [mm]. oi vi cac chiet ap vong, cac san pham tieu chuan c
che tao t mot en mi vong.
Cung co nhng c cau ket noi mac noi tiep. Co nhng trng hp can phai m rong pham vi dch
chuyen goc qua nho bang banh rang, hoac pham vi ln hn, v nh 10 vong th bang chiet ap 10
vong. Hnh 4.8 gii thieu mot chiet ap phu hp vi nhng ieu kien ky thuat dch chuyen thang va
goc, co vo boc thep chac chan, truc quay o bi va mot hop noi o trt ben trong.
111
Hnh 4.8 Chiet ap co c cau truyen ong.
Hnh 4.9 Bien tr khong tiep xuc.
Bien tr khong tiep xuc. e khac phuc nhc iem cua con trt tiep iem, bien tr chiet ap
dang mang mong chat deo ien dan c thc hien phoi hp vi mang mong bang chat lieu quang
dan (ban dan) hoac mang t-tr (hnh 4.9).
S o o ng dung s o mach cau. Phng phap xac nh tr so ien tr chnh xac nhat la s
dung s o cau o. Hnh 4.10 gii thieu nguyen ly s o mach cau ng dung cho phan t bien tr.
S o mach cau ng dung cho phan t bien tr co the thc hien theo nguyen ly s o cau can
bang, khi o s o hnh 4.10 c chnh nh sao cho ien ap ng cheo cau U D = 0 [V], tc la
dung ien ke galvanometer ch th 0. Khi cau can bang, co the xac nh tr so ien tr cha biet
R1 = R X theo gia tr biet trc cua cac ien tr kia.
R
(4.8)
R X = R2 . 3 .
R4
Cung co the s dung s o cau theo nguyen ly cau lech e x ly gia cong tn hieu o, khi o ong
ho ch th ien ap ng cheo cau U D la ien ap au ra. Thong thng phan t bien tr R2 trong
s o cau lech hnh 4.11 thay oi theo chuyen v x dang R2 = R(1 + x) .
oi vi nhng chuyen dch nho, tc la x <<1, th:
R(1 + x)
U
1 U
x
= 0.
0 .x = f ( x) x<<1 .
U D = U 0 .
(4.9)
4 1+ x
4
R + R(1 + x) 2
2
Nh vay, ien ap ng cheo cau U D chnh la ien ap ra, ty le vi o chuyen dch x.
Hnh 4.10 S o cau tr vi phan t bien tr.
112
Hnh 4.11 S o mach cau vi hai phan t cam bien.

Trong cac s o cau lech, ien ap ra con phu thuoc ien ap cung cap cho mach cau U 0 . Xet trng
hp U 0 = 10 [V]. Neu chuyen v toi a c x = 0,002 , th ien ap au ra U D = 5 [mV]; o sai lech
tuyen tnh nho hn 0,1[%]. Neu chuyen v x = 0,02 , tng ng ien ap ra bien ong t 0 en 50
[mV], th sai lech tuyen tnh nho hn 1[%]. o nhay cua hai trng hp o se la:
U D 5[mV ]
U D 50[mV ]
mV
mV
hay
la:
=
= 0,5[
];
=
= 5,0[
].
U0
V
U0
V
10[V ]
10[V ]
(4.10)
e tang o nhay, co the dung s o hai phan t cam bien (hnh 4.11). Khi o ien ap ra se bang:
R(1 + x)
U0
R
U D = U 0 .
;
vi
x<<1;
2 .x
R + R(1 + x) R + R (1 + x)
(4.11)
tc la ien ap au ra tang gap oi so vi s o hnh 4.10.
Hnh 4.12 gii thieu s o mach cau co 4 phan t cam bien, ien hnh la dung hai bien tr vi sai.
Khi o:
2 Rx
R(1 + x)
R (1 x)
= U0.
U 0 .x .
U D = U 0 .
R(1 + x) + R(1 x)
R(1 + x) + R(1 x) R (1 + x) + R(1 x)
(4.12)
Hnh 4.12 S o mach cau vi bon phan t cam bien.

Hnh 4.13 la phng an s o mach cau dung cho bien tr chiet ap tuyen tnh. ay U D
Hnh 4.13 S o mach cau dung cho bien tr chiet ap tuyen tnh.
113
U0
.x .
2
oi vi cac s o cau lech, anh hng cua ien ap cung cap cho cau la tng oi ln. No phai
c gi sao cho khong oi, la nguon hang. ieu nay co the thc hien bang mach ieu chnh ien
ap.
Hnh 4.14 S o dung vi mach nguon cung cap cho cau.

Hnh 4.14 gii thieu s o dung vi mach nguon cung cap cho cau. Nguon cung cap cho cau co the
la mot nguon ien ap hang hay la mot nguon dong hang. Khong co mot hng dan tong quat la
nen dung dang nguon cung cap nao, nguon ap hang hay nguon dong hang. ay tuy thuoc nhiem
vu, muc tieu cu the.
Hnh 4.15 S o chiet ap potentiometer nh mot phan t cam bien dch chuyen.
Phng phap n gian nhat e chuyen oi chuyen ong thang thanh ai lng ien ty le la dung
he bien tr chiet ap. Chung a ta tr lai nguyen ly cam bien tham so cua phan t bien tr day o
(day tr) co con trt Resistance Transducer. Hnh 4.15 gii thieu cau tao nguyen ly phan t bien
tr o chuyen v thang.
Ty le gia o dai chuyen dch cua con trt tren bien tr x va o ln ien ap U x ri tren phan bien
tr ay tng t nh trong s o mot bo phan ap. Quan he ty le:
.l
R N = max
A
(4.13)
U
I= 0
RN
(4.14)
114
U x = R x .I =
U0
.
.l x = k .l x = f (l x ) ;
A RN
(4.15)
ay: l max , l x o dai toan phan va o dai khoang dch chuyen x cua con trt bien tr; R N va
R x ien tr toan phan (danh nh) va ien tr phan chiet ap cua bien tr; va A ien tr xuat
cua vat lieu day dan va tiet dien day; U 0 , I ien ap va dong ien tren phan t; U x ien ap
phan chiet ap con trt cung chnh la ien ap ra cua phan t; k he so ty le.Nh thay t bieu
thc (4.12), moi chuyen v con trt ng vi mot ien ap ty le nhat nh. o ty le ch ung khi
phan t bien tr lam viec nh mot bo phan ap khong tai. Nh a neu phan tren, o tuyen tnh
khong ch phu thuoc vao ban than phan t chiet ap ma con phu thuoc tai au ra cua chiet ap mac
tai la phan mach tieu thu dong. o phi tuyen cua ac tuyen ien ap ra se tang len khi ien tr tai
Rtai giam. Hnh 4.16 ch ro anh hng tai len phan t phan ap. T o ta thay rang phai thc hien
phep o ien ap ay sao cho phan t bien tr khong b tai phan dong (e anh hng tai la nho
nhat).
Hnh 4.16 Anh hng tai oi vi phan t bien tr chiet ap.

La mot bien tr day dan nen phan t cam bien dang nay co tr so ien tr nho. Hn na, thong
thng day o c cuon xep vong tren loi. Va nh vay, bi con trt ch co the dch chuyen t
vong day nay sang vong khac, ien tr R x bien thien gia tr so thanh nhng nac nho tng ng
ien tr moi vong day. Noi cach khac, o phan giai bang o ln ien tr mot vong day. Trong
nhieu ng dung, ieu nay se la tr ngai, bien thien ien tr khong trn. The nhng cac phan t
bien tr day cuon lai co u iem la ac tnh nhiet tot, va khi la chon vat lieu day dan phu hp th
tr so ien tr se t phu thuoc vao nhiet o. Trong cau truc phan t chiet ap kieu vong, nh a neu
tren, neu lam bang vat lieu than carbon th bien tr con trt khong phai a thch hp. Ch ti khi
co dang che xuat mi la mang deo ien dan mi co nhng ac tnh dung c. Chat deo ien dan
la mot loai vat lieu nhan tao c tron them hat than lam cho no co tnh ien dan. Vat lieu bang
chat deo ien dan nh vay c phu len e nen hay loi thanh mot lp mang mong. tren a neu
bien phap phoi hp hai phng phap ket cau: ien tr day la day cuon va day cuon c phu mot
lp chat deo ien dan tren be mat tiep xuc vi con trt. Ky thuat day cuon cho o tuyen tnh tot,
trong khi mang deo ien dan am bao o phan giai cao. Them vao o, con trt co the tiep xuc tot
hn, khong ch cho phep giam ien tr tiep xuc ma con co cac ac tnh chong rung ong va shock
ien tot hn.
Tuy theo hang san xuat, cac phan t bien tr khac nhau kha nhieu ve cau truc, mang phu va vat
lieu nen. Con trt cua phan t bien tr kieu mang c lam dang choi, quet nhieu tiep iem, e
115
giam tai c hoc va tiep xuc tot hn. Mang chat deo ien dan, giong nh trng hp day ien tr
at thang chieu dai, co o phan giai gan nh vo cung, tc la dch chuyen con trt se tao ien ap
ra ty le v tr con trt tren bien tr, nhng khong bien thien theo nac nh kieu day cuon.
Bien tr mang chat deo ien dan c che tao rat chnh xac, co the giam thieu sai so tuyen tnh ti
0,1%. Tuoi tho van hanh co the at 10 8 lan chnh nh (van hanh con trt) va toc o chuyen
dch con trt toi a co the at 400 [mm/s]. Phan t bien tr kieu nay c gii thieu s lc trong
hnh 4.17.
Phan t bien tr khong co vo boc co loai chieu dai ti 1000 [mm]. Cac san pham che san co the co
chieu dai toi a ti 2,5 [m]. Tr so ien tr cua phan t bien tr o khoang dch chuyen tuy theo o
dai la khoang (2 200) [ k ] vi dung sai c 20 [%] ien tr toan phan cua phan t. Trong mot
so che xuat ac biet cung co the at 10 [%]. Sai so tuyen tnh noi chung la 0,5 [%], va co the
giam tng nac ti 0,1 [%].
Hnh 4.17 Cau truc phan t bien tr o khoang chuyen dch thang dung mang chat deo ien dan.
oi vi nhng ng dung thc te cac phan t bien tr kieu mang co nhieu kieu vo boc khac nhau.
Cau truc trc kia lam bang vo thiec, cac phan t kieu mi co vo boc dang ong hay dang thep uc
nh hnh. Truc dch chuyen con trt c lap o bi mot au hay ca hai au. Hnh 4.18 gii thieu
hai kieu khac nhau.
Hnh 4.18 Phan t bien tr o khoang dch chuyen.
116
Hnh 4.19 Cac cau truc phan t o khoang chuyen dch.

oi vi cac bien tr dch chuyen loai mang chat deo ien dan co he so nhiet o c 400
[ppm/ o K ] ( ay ky hieu ppm la phan trieu parts per million, tc la 0,4.10 3 [1/ oK ] ), trong
pham vi nhiet o thu hep khoang (0 70) [ o C ] co the coi nh bang 200 [ppm/ o K ]. Do nhng
ng dung khac nhau nen co hai kieu phan t chnh. Mot kieu co mat ngam vi o trt gan trc tiep
tren phan dch chuyen cua phan t. Kieu th hai th ch co rieng phan dch chuyen. Viec dan ong
c thc hien bang mot c cau lo xo (hnh 4.19).
Ve nguyen ly th mach ien ap ra ket noi vi phan t bien tr phai la mach co ien tr cang ln
cang tot. e tranh dao ong ien ap lam viec cua phan t cam bien, nguon cung cap cho phan t
bien tr phan ln dung nguon dong hang, ch hiem khi mi dung nguon ap hang. Cac vi mach
nguon chuyen dung giup n gian hoa viec cung cap nguon cho phan t bien tr. Chu yeu la cac vi
mach nay tch hp nguon dong hang vi noi tr c 5 [ M ]. Mach cap dong cho phan t bien tr
c tach khoi mach o ien ap. Linh kien chnh nh ien tr cho phep chnh iem khong va
iem cuoi thang o. Vi mach nguon SIF cua hang ien t TWK-Electronics co tham so ien tr
toan phan la 1 [ k ] (nguon dong hang 2,5 [mA]) va 5 [ k ] (nguon dong hang 0,5 [mA]). Vi mach
con tch hp bo phan gia cong chuan hoa tn hieu. Co the chon tn hieu ra nam trong khoang (0
20) [mA]; (4 20) [mA] hay 10 [mA]. Cung co vi mach nguon cung cap la ap hang vi thong so
ky thuat tng t. Hnh 4.20 gii thieu mach nguyen ly ng dung vi mach nh vay.
Hnh 4.20 Phan t bien tr o dch chuyen co vi mach nguon cung cap (hang TWK).
4.2.3 Phan t bien dung Capacitance Transducers.
ien dung cua mot tu ien phang ty le vi dien tch be mat ban cc A, vi khoang cach ban cc d
va vi chat ien moi:
117
C=
0 r A
[F]
(4.16)
ay: 0 hang so ien moi cua khong kh, 0 = 8,854. 1012 [F/m]; r hang so ien moi tng
oi cua vat lieu chat ien moi so vi khong kh; oi vi ien moi la khoang khong (khong kh) th
r = 1.
Do o, ien dung la ham cua v tr tng oi trong khong gian va chat ien moi s dung. oi vi
cau truc ong tam chieu dai l (tu ien hnh tru), bieu thc se la:
2l
;
C = 0 r
r
ln a
rb
(4.17)
ay: ra - ban knh tru ngoai; rb - ban knh tru trong.
Tuy nhien, hiem khi ngi ta xac nh ien dung theo cong thc (4.13), ch trong mot so trng
hp nhat nh mi tnh tr so ien dung tren c s nhng ai lng tren. Thong thng, ien dung
c xac nh bang cac phep o tr hieu dung dong ien I va ien ap U ien xoay chieu tan so f
tren tu:
I
.
C=
2f .U
(4.18)
Cam bien ien dung tao nen mot ien trng, con cam bien ien cam tao nen mot t trng. Neu
a mot vat the dan ien lai gan ien trng nay, th vat tac ong nh mot ban cc va lam thay oi
phan bo ien trng. S thay oi ien trng se c phan t cam bien thau nhan va lng gia
cho nen ay goi chung la phan t bien dung.
Phan t bien dung gom hai ban cc dan ien cach ly nhau nhng co the chuyen dch so vi nhau.
Hai ban cc at song song, nen co the tnh ien dung cua phan t bien dung bang:
A
;
C = r 0.
l0
(4.19)
ay: C ien dung phan t, tnh bang [F]; r hang so ien moi tng oi; 0 hang so ien
moi khong kh, 0 = 8,8854184. 10 12 [F/m]; A dien tch ban cc, [ m 2 ]; l 0 khoang cach gia hai
ban cc, tnh bang [m].
Moi quan he ro rang gia cac ai lng kch thc va ien dung tao c s che xuat phan t bien
dung co kha nang lng gia tn hieu o theo khoang cach (hnh 4.21).
Hnh 4.21 Nguyen ly phan t bien dung o khoang cach.

trang thai ban au th:
118
C 0 = r . 0 .
A
.
l0
(4.20)
Khi tang khoang cach gia hai ien cc ( l1 = l 0 + l ) th:
A
C1 = r . 0 . .
l1
(4.21)
Bieu thc c s cua phan t bien dung o khoang cach se la:
C1
1
=
l
C0
1+
l0
(4.22)
oi vi nhng chuyen dch nho l so vi khoang cach l 0 th ty so bien ong khoang cach co the
coi la kha nho ( l << 1 ) va nh vay:
l0
C1
l
= 1 .
C0
l0
(4.23)
ac tuyen phan t cung co the coi gan ung la tuyen tnh trong mot pham vi nhat nh.
S m rong ien trng cua phan t bien dung bang cach tang dien tch ban cc ien dan b han
che, du co nhng u iem cau truc nhat nh. Phan t bien dung co ac iem:
o o tuyen tnh cao (hn 0,01%);
o Co kha nang boc chan chong anh hng ien trng nhieu;
o Nhay vi nhieu t trng;
o Chuyen oi trc tiep thanh ai lng ien.
Va bi s thay oi ien dung la rat nho (thng nho hn 10 [pF]), oi hoi phai dung mach khuyech
ai mac noi tiep, nhng co the dung khuyech ai thuat toan FET-OpAm. Chung c ng dung
lam tu ien chuan so hay phan t bien dung vi sai.
Phan t bien dung khong tiep iem co ng knh khoang (10 15) [mm}. Pham vi o nam trong
khoang (2 3) [mm]. o tuyen tnh cao, hn 1% va o phan giai toi a nho hn 1 [ m ].
Trong nganh che tao may, ngi ta s dung cac phng tien o da tren c s phan t bien dung
o khoang cach hay chieu dai co cac thong so ky thuat cao (tuy nhien o cung gap phai van e
khuyech ai va boc chan chong nhieu cho he o lng).
Trong ky thuat t ong s dung rong rai mach bien dung o tiep can, phan ng nhanh nhay vi ai
lng khoang cach chuyen dch, th gia tr ien dung theo tr tuyet oi khong phai chnh yeu, cai
chnh lai la s bien ong, thay oi cua no.
Cac phan t cam bien ien dung ng dung s thay oi ien dung theo bien ong cua mot trong
nhng ai lng bieu thc (4.13). Hnh 4.22 trnh bay s o nguyen ly cac phng an bien dung
o. Hnh 4.22a phan t bien dung do thay oi khoang cach gia cac ban cc mot lng bang d ;
hnh 4.22b do thay oi dien tch oi ng cua cac ban cc (bi chuyen dch l ); hnh 4.22c do
thay oi tnh chat ien moi (bi tng tac ien moi khong gian r va 0 gia cac ban cc vi xe
dch l ).
119
Hnh 4.22 Nguyen ly cau truc c ban cua cac phan t bien dung.
S thay oi khoang cach ban cc, dien tch be mat ban cc hay chat ien moi lam thay oi ien
dung va se c lng gia bang s o mach cau (hnh 4.23). ay cac phan t cam bien ien
dung kieu bien dung vi sai, ma moi na nh mot tu ien. Cac tu ien C 0 mac song song la e khac
phuc anh hng ky sinh va tan xa.
Hnh 4.23 S o mach cau vi phan t bien dung.

Trng hp n gian nhat th phan t cam bien ien dung la tu bien dung C1 , con C 2 la mot tu co
nh. Na cau kia la cac bien tr chiet ap, cung co the thay bang cac tu ien. Cac bien tr trong s
o hnh 4.23 thng c chon tr so bang nhau. Co the dung mach cau theo nguyen ly cau can
bang (can bang cau cho ien ap ng cheo cau u D = 0 [V]), hay theo nguyen ly cau lech. Phng
phap cau lech da tren moi quan he gia ien ap ng cheo cau vi s thay oi ien dung cua
phan t cam bien. ien ap cung cap la ien xoay chieu co tan so trong khoang 50 [Hz] en 10
[kHz], cho nen ien ap u D la ien ap xoay chieu. No se c khuyech ai len va chnh lu bang
mot bo chnh lu nhay pha e ch th hay ieu khien. Viec s dung bo chnh lu nhay pha cau
xoay chieu la e nhan biet s oi dau tn hieu lan can iem can bang. Bang cach o, viec lng
gia ien ap ng cheo cau trang thai lan can iem can bang se c thc hien khong ch ve o
ln sai lech ma con ca theo xu hng tiem can.
Hnh 4.24 ve s o nguyen ly mach cau bien dung. Khi mach o ien ap ng cheo cau U D co
noi tr u ln th ta co:
U C C2
UD 0 . 1
.
2 C1 + C 2
(4.24)
S o hnh 4.25 dung cho phan t cam bien ien dung vi sai. ay ket hp ca hai tu ien C1 va
C 2 trong hnh 4.24 trong mot phan t vi sai, co cac tu ien phu C 0 nham khac phuc ien dung ky
sinh va tan xa.
120
Hnh 4.24 S o nguyen ly mach cau bien dung.
Hnh 4.25 S o mach cau dung cho phan t cam bien ien dung vi sai.
Tng quan gia s chuyen dch cua ban cc gia va ien ap ng cheo cau la khong tuyen tnh.
Tuy nhien, lan can iem can bang th co the tuyen tnh hoa gan ung, ta co:
U
l
U D 0 1 .U 0 ;
2
l
(4.25)
ay: l khoang cach cac ban cc tu bien dung.
Khong ch thay oi khoang cach ban cc tu bien dung, ma con co the thay oi dien tch oi ng
cua cac ban cc. Viec nay co the thc hien bang cach tach mot ban cc thanh hai tu ien hnh tru
(hnh 4.26).
Hnh 4.26 S o cau lech vi phan t bien dung vi sai thay oi dien tch ban cc.
Tng t nh vay oi vi phng an thay oi tnh chat ien moi (hnh 4.27). ay loi di ong gia
cac ban cc tu ien se lam thay oi tnh chat ien moi.
121
Hnh 4.27 S o cau lech vi phan t bien dung vi sai thay oi tnh chat ien moi.
Nh neu tren, ien dung la ham cua v tr tng oi trong khong gian va chat ien moi s dung.
oi vi cau truc ong tam chieu dai l (tu ien hnh tru, mot phan t dang nay ma kieu vi sai c
the hien trong hnh 4.26, 4.27), bieu thc se la:
2l
C = 0 r
;
r
ln a
rb
(4.26)
ay: ra ban knh tru ngoai; rb ban knh tru trong.
Trong ky thuat thng s dung cac tu vi sai e tranh tnh khong thuan nhat non-homogeneity cua
ien trng tai cac ra ban cc. Hn na, con co the khai thac tot nhng u iem cua s o mach
cau o ve o chnh xac, o nhay, vv
Trong cac cam bien o am, li dung s thay oi ien dung theo o am moi trng, ngi ta dung
phng phap xung vi sai e xac nh bien dung. Hnh 4.28 gii thieu nguyen ly o.
Hnh 4.28 Nguyen ly phng phap xung vi sai xac nh bien dung.
Mach Flip-Flop lng on M1 c at nh sao cho trang thai tnh o rong xung t1 cua tn hieu
au ra cua no tng ng vi o rong xung t 2 cua mach lng on M2. o rong xung cua mach FlipFlop M2 lai phu thuoc vao ien dung cua phan t cam bien o am C 0 . Khi bien ong o am, ien
dung cua phan t bien dung se thay oi mot lng C , th xung tn hieu au ra cua M2 cung se
bien ong o rong xung t 2 , dan ti lam thay oi o rong xung t 3 . Neu chnh nh trc chu ky lap
lai xung au ra cua M1 la T = 2t1 , th tr trung bnh so hoc cua xung vi sai co o rong la t 3 se ty le
vi ien ap ra U 0 :
t
U 0 = 3 .U max ;
T
(4.27)
122
ay: U max la bien o xung.

cac mach Flip-Flop th o rong xung au ra ty le vi ien dung cua tu ien mac vao mach, va
nh vay ta co moi lien quan gia ien ap ra va s thay oi bien dung:
t
C
U 0 = 3 .U max =
.U max .
T
2C 0
(4.28)
Tren thc te, cac phan t cam bien ien dung o khoang cach va dch chuyen goc co ien dung
bien thien trong khoang (1 500) [pF]. Nham ngan nga tr khang qua ln, thng chon tan so
ien nguon cung cap khoang (0,1 1) [MHz]. Ngoai ra, phai am bao ien tr cach ien u ln e
giam thieu sai so ien tr shunt phan dong. Yeu cau nay thng kho am bao c khi tien hanh
phep o o am cao. u the cua cam bien ien dung so vi cam bien ien tr va ien cam la t b
anh hng bi nhiet o va co the at c o chnh xac cao.
Hnh 4.29 gii thieu mot kieu tu vi sai ghep kep dung trong o lng chnh xac. Ve ket cau, moi
tu ien co hai hoac bon phan co nh stators va mot phan xoay rotor. V la tu vi sai, ien dung
gia phan xoay va toan bo phan co nh van gi nguyen khong oi bat ke v tr goc o cua phan
xoay.
Hnh 4.29 Tu ien xoay vi sai ghep kep.

Co the noi them rang trong cac bo phan ky thuat tnh analog, tu vi phan co phan xoay nh hnh
c dung e thc hien cac phep tnh vi phan va cac ham xap x hoa phu thuoc goc xoay , v du
cac ham tuyen tnh, bnh phng va ham lng giac (sin, cos, /2). Can nhan manh la co the at
o chnh xac cao khi ng dung cac cam bien ien dung vi sai nay. V du, cap chnh xac cao nhat
oi vi cac ham tuyen tnh va ham lng giac, co the am bao sai so cho phep 0,05% tr cc ai
cua cac ham nay. He so nhiet o la c 30. 106 60. 106 [1/ o C ].
4.2.4 Phan t bien cam Inductance Transducers.
ien cam cua cuon day c xac nh bang:
N 2 0 r A
L=
;
l
(4.29)
ay: N so vong day; 0 - o t tham cua khoang khong, 0 = 4 . 107 [H/m]; r o t tham
tng oi; A dien tch va l o dai cua cuon day.
123
Tren thc te, viec tnh toan ien cam cuon day theo cac ai lng nay noi chung la khong the.
Thng th ngi ta xac nh ien cam theo phep o tr hieu dung dong va ap xoay chieu tan so f
tren cuon day.
U
L=
.
2f .I
(4.30)
Tuy nhien, ton hao tr khang (ien tr thuan cua day cuon), ton hao t hoa va dong xoay trong
cuon day co loi sat se lam sai lech ket qua o (dong va ap). Trong trng hp nay th xac nh
ien tr day cuon cua cuon day loi khong kh bang cach thc hien phep o ien mot chieu th
chnh xac hn nhieu (xem s o tng ng cua cuon cam day cuon, Phu luc 1). Con oi vi cuon
day co loi sat th oi hoi phai xac nh thanh phan ien khang tac dung.
Cung nh oi vi cac phan t cam bien ien dung, nguyen ly chung oi vi cac phan t cam bien
ien cam la lam thay oi mot trong nhng ai lng xac nh ien cam cua cuon cam (xem bieu
thc (4.26), co the bien thien cac thanh phan N, r , A va l e dung lam bien cam. Tren c s o co
the co nhng phng an hien thc hoa phan t bien cam nh trong hnh (4.30).
Co the bien thien so vong day N bang cach dung ket cau con trt (hnh 4.30a). Tuy nhien, kho co
the lam thay oi kch thc hnh hoc cua tng vong day rieng le. Cach khac, neu chia cuon day
thanh hai na va lam thay oi khoang khong gia chung (hnh 4.30b), th s ghep t tnh se thay
oi va lam thay oi ien cam toan phan. oi vi cuon cam co loi sat th s dch chuyen cua loi satt trong long cuon day lam thay oi o t tham r (kieu phan ng doc, hnh 4.30c nguyen ly va
ket cau). Kieu khac kieu phan ng ngang, th mot ban cc ien dan c a lai gan cuon day,
hoac than boc ien dan at tren cuon day, khi o trong phien ien dan se cam ng dong xoay
Foucoult. ien trng tao bi dong Foucoult ay tng tac vi t trng cuon day lam thay oi ien
cam (hnh 4.30d nguyen ly va ket cau).
Hnh 4.30 Nguyen ly bien cam theo phng an bien thien: a). so vong day N;
b). bo tr hnh hoc; c). o t tham (loi sat t kieu phan ng doc);
d). ton hao dong xoay (phien ien dan kieu phan ng ngang).
Nh vay, phan t cam bien ien cam noi chung co hai dang ket cau c ban:
Cuon cam khong loi sat, va:
Cuon cam loi sat-t.
124
Ve nguyen ly th ket cau bien cam co loi sat-t lam viec chu yeu tren c s ghep t tnh, o la
nguyen ly bien ap, vi he so ghep nh la he so bien ap. Do o dang ket cau co loi sat co hai kieu
c ban:
o Kieu phan ng doc longitudinal armature , va:
o Kieu phan ng ngang transverse armature.
ay, cung nh trong ky thuat ien-t, bo phan ong goi la phan ng.
Mot dang phan t bien cam kieu phan ng ngang c thc hien bang cach thay oi o t tham
cua khoang khong trong long cuon cam bang loi sat co ngam (hnh 4.31a). Hnh 4.31b gii thieu s
o nguyen ly phan t bien cam vi sai vi mach cau.
Hnh 4.31 - Phan t bien cam kieu phan ng ngang:

a). kieu ngam; b). kieu vi sai mac vao mach cau.
Dang ng dung co loi sat-t mem di ong trong long cuon cam day cuon la phan t bien cam phan
ng doc (xem hnh 4.30c) mot dang phan t bien cam theo nguyen ly bien the. Cau truc thong
dung nhat la cuon chan iron-core choke vi sai mac mach na cau phan t bien cam ghep hai
cuon day co loi sat-t di ong kieu vi sai (hnh 4.32). Con tren hnh 4.33 la phng an ng dung
nguyen ly bien ap vi sai.
Hnh 4.32 Phan t bien cam vi sai: a). S o noi mach cau o; b). ac tuyen.
Cuon chan vi sai hnh 4.32a co ket cau phan ng doc (loi sat-t doc). Neu cuon day di ong, t
trng ghep se thay oi va cung vi no la thay oi ho cam. ien cam cua hai nhanh cau bien oi
nghch va ien ap ng cheo cau U D se c hien th nh la ham cua khoang chuyen dch x (ac
tuyen hnh 4.32b). Khoang ac tuyen i qua iem 0 tren o th co the coi nh tuyen tnh. So vi
cac phan t cam bien ien cam n, ve c ban, hai cuon day mac vi sai kem nhay hn oi vi tap
125
nhieu strays t trng, oi vi bien ong nhiet o va bien ong ve bien o hoac tan so nguon cung
cap.
Cac bien ap vi sai tham ch con c s dung pho bien hn cuon chan (kieu ngam dch chuyen doc
truc) mac mach kieu vi sai (hnh 4.31) hay cau na vi cam bien ien cam (hnh 4.32). Hnh 4.33
gii thieu mot kieu bien ap vi sai co mot cuon s cap va hai cuon th cap c lap long vao nhau
(ong truc tren cung mot khung day cuon), trong long co loi sat-t mem di ong.
Hnh 4.33 Nguyen ly bien ap vi sai: a). Ket cau; b). Kieu loi doc;
c). Kieu loi doc mac mach cau o; d). Kieu loi ngang.
Cuon s cap c cap mot ien ap xoay chieu. Khi loi sat-t v tr gia (v tr oi xng) th s
ghep t tnh (he so bien ap) gia cuon s va hai cuon th la nh nhau; va neu nh cac thong so cua
hai cuon th cap la y nh nhau th ien ap cam ng hai cuon th cung se bang nhau. Neu loi satt b dch chuyen ra khoi v tri oi xng th ien ap ra cua cac cuon th cap se khac nhau.
Hai cuon th cap trong phan t bien cam kieu loi doc (hnh 4.33b) mac mach ngc au vi nhau,
tao thanh ien ap vi sai au ra. Cung co the dung s o mach cau (hnh 4.33c), mac hai cuon th
cap vao hai nhanh mach cau.
oi vi s o hnh 4.33b th ien ap au ra cua mach U ra se bang:
U ra = K .U 1 .l ;
(4.31)
ay: K hang so ghep (he so bien ap); U 1 ien ap cuon s cap (tr hieu dung); l chuyen v
cua loi sat-t khoi v tr oi xng.
s o mach cau hnh 4.33c, th ien ap au ra (ien ap ng cheo cau) se bang:
1
U ra = K .U 1 .l .
2
(4.32)
Nh vay, neu dch chuyen loi sat-t la nh nhau ca hai s o, th s o hnh 4.33b se cho ien ap
au ra ln hn.
Thng th cac phep o ien cam c thc hien bang phng phap cau o. ay, cung nh mach
cau dung cho cac phan t bien dung a neu phan tren, ien ap cung cap cho cau la ien ap xoay
chieu co tan so trong khoang 50 [Hz] en 10 [kHz]. Trong s o mach cau co cuon cam, viec x ly
ien tr day cuon cua cuon day khong n gian nh s o mach cau dung vi phan t bien dung.
Hn na, trong cac phan t bien cam co loi sat-t th s thay oi ien cam chu yeu chu anh hng
cua loi sat, co hien tng t hoa va bao hoa t. Do tnh phi tuyen cua cac anh hng nay ma trong
ien ap ng cheo cau ben canh tan so c ban tan so ien ap cung cap cho cau, con co nhng
thanh phan tan so bac cao khac. Ma s o mach cau ch co the ieu chnh can bang mot tan so
ma thoi, can phai loc bo nhng thanh phan hai cao tan, e ch th khong qua sai lac. ay cung
126
dung bo chnh lu nhay pha. Bang cach lng gia mot cach phu hp co the xac nh dau (hay xu
hng) thay oi ien cam.
Trong thc te, cac phan t bien cam vi sai ong vai tro quan trong. Tren th trng cung co san
nhng linh kien vi mach dung cho cac phan t bien cam vi sai nay. Hnh 4.34 gii thieu s o
nguyen ly chung xac nh ien cam cua phan t bien cam.
Trong ng dung ky thuat dung cac phan t cam bien ien cam co the o cac di chuyen s trong
pham vi t 1. 104 [mm] en hn 1 [m]. Co the lam cho sai so phep o nho hn 0,1%. Co the at o
chnh xac va o nhay cao khi s dung he ket cau phan ng doc. Cuon s cap va hai cuon th cap
c quan quanh mot khung day hnh tru bang chat deo co lo trong gia. Tuy theo ng dung, vat
lieu chat deo plastic phai co o on nh nhiet cao va phai rat kem nhay vi o am. o la ly do
cuon day phai c tam hon hp chat deo trong chan khong. Them vao o, to hp cuon day co the
c lap trong mot ong thep cao cap va boc kn bang mot lp nha epoxy. oi vi nhng ieu
kien moi trng ac biet khac nghiet, ong thep cao cap con c at trong mot lo khoan ben trong
va cac ong c han vao be mat trc bang cac tam thep cao cap, tao thanh mot lp vo boc c
gan kn. Ngoai viec bao ve khoi nhng tac nhan xam thc, lp vo boc con tao thanh man chan
chong nhieu t trng va ien trng. Cung nh vi cuon chan vi sai, dch chuyen can o c
bien oi thanh ai lng ien bi loi sat di ong trong long khung day. Nguon cung cap cho cuon
s cap co song mang tan so khoang (10 20) [kHz]. Tuy theo v tr cua loi sat, s ghep t tnh gia
cuon s cap va th cap se thay oi. Trong hai cuon th cap se cam ng ien ap xoay chieu ngc
hng, co cung hoac khac nhau ve o ln. Bi hai cuon th cap c mac ngc au nhau, nen
ien ap au ra bang hieu ien ap hai cuon, c a ti bo khuyech ai.
Hnh 4.34 S o nguyen ly xac nh ien cam cua phan t bien cam.
Hnh 4.35 gii thieu phan t ieu khien dung trong cong nghiep. Bo tao song G tao ra ien ap
nguon 10 [kHz] cho cuon s cap LP cua bien ap vi sai DWG82. Hai cuon th cap LS1 va LS2 la
cac nhanh cau o, ien ap ng cheo cau c a qua mot bo bien oi tr khang en bo chnh
lu o lng. Bo chuyen oi U/I tao ra tn hieu chuan hoa 0(4) 20 [mA].
127
Hnh 4.35 Phan t bien cam vi sai vi mach tao ien ap au ra va tn hieu nhan dang.
Nguyen ly o ay cung c dung e o goc (hnh 4.36). Goc quay c bien oi thanh chuyen
ong thang thong qua mot truc quay chnh xac (bang cach chuyen dch loi ferrite trong bien ap vi
sai). Tat ca cac bo phan ien t can e tao nguon ien ap 10 [kHz] va e tach loc tn hieu eu
c lap trong vo boc chat deo gan kn. Neu loi sat va tr khang ien cam s cap trong bien ap vi
sai c thiet ke thch hp, th co the giam cong suat phan khang tren loi sat en mc bo qua
c. ng cong ac tuyen ien ap au ra la ham cua khoang dch chuyen x tng t nh cua
cuon chan vi sai.
Hnh 4.36 May o di goc ng dung phan t bien cam (phai), nguon va mach nhan dang (trai).
To hp cuon day co loi sat hay khong loi sat eu c dung lam cam bien ien cam o dch
chuyen. Mac du cuon day loi khong kh co ien cam thap hn, chung van c s dung tham ch
tan so cao. Cac loi sat tao nen c s thay oi ln hn ve ien cam va do o co o nhay cao hn.
Tuy nhien, cac cam bien ien cam co loi sat lai phu thuoc dong ien va b ton hao phu thuoc tan
so.
128
Cac bien cam vi sai co hang loat ac tnh ma cac cam bien dch chuyen khac khong co, do o ac
biet phu hp cho nhng ng dung chuyen dung. Phep o c tien hanh khong b anh hng ma
sat, v khong co tiep xuc c hoc gia loi sat phan ong va cuon day. o cach ien ln gia cuon
au vao va cuon au ra cho phep ng dung trong nhng he cach ly ien hoa galvanic vi hieu ien
the cao. Ngoai ra, chung con co ac tnh kem nhay oi vi nhng tac ong lc ngoai, ng dung tot
trong cac may o gia toc.
Cac ac tnh ky thuat chu yeu:
Pham vi nhiet o lam viec cho phep (200 +600) [ o C ];
Chu va ap shock (11 [ms]) ti 1000 [g];
Chu rung ong ti 20 [g] vi tan so rung 2 [kHz];
Chu ap lc ti 70 [bar];
Sai so tuyen tnh 0,1 [%].

Nhng thong so nay hau nh khong loai cam bien nao khac co c.
Phan t bien cam kieu phan ng ngang (nguyen ly xem hnh 4.33d) mot a bang vat lieu ien
dan c a vao t trng, t thong cam ng gay ra dong xoay Foucoult ben trong a, tao nen
dch chuyen dong chay. a co the nam au truc cua cuon day, goc phai cua no, hoac di
dang mot vong ngan mach co the di dong ong truc vi truc cuon day. Noi chung, o nhay cua
cam bien co phan ng ngang thap hn so vi he phan ng doc.
Mot dang cam bien o di chuyen gan vi kieu bien ap vi sai ket cau phan ng ngang, dung mot
vong ngan mach c at di ong tren canh doc cua loi t mem khep kn dang ca so.
Tren hnh 4.37a, hai cuon s cap va hai cuon th cap c at canh ngan cua loi. Viec ghep t
tnh gia cac cuon s cap va th cap c xac nh bi s phan bo t thong, gom t thong trong
loi va thong lng nhieu bat ky. Neu khong co vong ngan mach th hai cap cuon day trai va phai
la oi xng. Khi o ien ap U1 va U 2 cam ng trong ca hai cuon th cap se bang nhau va do o
ien ap ng cheo cau U D = 0.
Vong ngan mach, c at di ong tren mot trong hai canh dai ma khong tiep xuc trc tiep vi
canh ay, lam cho no co the thay oi phan bo t thong trong ca so loi, do o thay oi ca s ghep t
tnh gia cac cuon s cap va th cap mot v tr ac biet. Trong hoan canh ly tng, vong ngan
mach co tac dung cua mot t-khang phc, ln en noi t thong khep kn qua loi khong kh hai ben
phai trai vong ngan mach. Noi cach khac, vong ngan mach tac ong nh mot loi khong kh ao.
Bien thien ien ap au ra U1 va U 2 ve tren hnh 4.38.
Hnh 4.37 Phan t bien cam o dch chuyen kieu bien ap vi sai co vong ngan mach:
a Loi t mem khep kn; b Vong ngan mach;
129
c Cac cuon s cap; d Cac cuon th cap.
Hnh 4.38 ng cong ien ap cac cuon th cap.

Tuy nhien, co the giam sai so tuyen tnh (ln nhat la 5 [%]) cua ien ap vi sai U D xuong en 0,5
[%] bang mot mach hieu chnh ien t. Bi v vong ngan mach co trong lng rat nho nen co the
ng dung trong nhng thiet b o ma oi tng o phai chu rung ong gia toc en 300 [g]. Cau
truc bao plastic ben trong vo boc kim loai cho phep s dung nhiet o moi trng xung quanh en
180 [ o C ] trong moi trng kh quyen xam thc hoac trong chat long an mon. Khoang cach o la
280 [mm].
Trong ky thuat xac nh v tr va o o dai dch chuyen, th cac phan t bien dung capacitive t
thong dung hn la cac phan t cam bien ien cam inductive. Phan t bien cam co loi sat-t ben
trong cuon day n vong. Chuyen dch loi sat-t se lam thay oi ien cam cua phan t (hnh 4.39a).
ien cam cua phan t cam bien phu thuoc vao so vong day n, o t tham va kch thc hnh
hoc cua phan t.
L = f ( n, , A, l ) ;
(4.33)
Hnh 4.39 Nguyen ly cau tao phan t bien cam.

a). Cau truc loi trt (phan ng doc truc);
b). Cau truc phan ng ngang theo nguyen ly thay oi t
thong.
Cau truc phan t bien cam nh vay c goi la phan t loi trt (phan t cam bien ien cam co
phan ng doc). Dang bien cam khac la theo nguyen ly thay oi t thong (phan ng ngang). ay
co mot phien ien dan nam cach cuon cam mot khoang l . Khi cung cap cho cuon cam mot ien
ap xoay chieu, se tao ra t trng xuyen qua phien ien dan. Khi o ben trong phien se co dong
xoay Foucaut, tao nen mot trng oi ngau lam tang mot phan ien trng cua cuon cam hay la
lam giam ien cam ban au cua cuon cam (hnh 4.39b).
phan tren a neu cac dang phan t bien cam. Ve mat ky thuat th ng dung co y nghia ac biet
la phan t cam bien tiep can loai bien cam co tn hieu ra analog va phan t cam bien khoang cach
theo nguyen ly loi trt (phan ng doc) hay bien ap vi sai.
130
Phan t bien cam o tiep can. Phan t bien cam tiep can lam viec khong tiep xuc. Chung co bo
dao ong hai tang, mach trigger Schmidt va mach khuyech ai. Hnh 4.40 gii thieu loai phan t
bien cam nay.
Bo dao ong tao ra mot trng ien-t bien thien lan truyen trong phan loi va tan xa ra moi trng
xung quanh. Khi co vat the dan ien nao o lot vao trng ien-t nay th ben trong no se cam
ng dong ien xoay, rut mot phan nang lng dao ong song ien-t. Thong qua mc thay oi
c tao nen au ra bo dao ong lam bo lat trigger Schmidt nhay bac va oi nac tn hieu au ra
cua phan t, tao s thay oi trang thai tiep can. Hnh 4.41 gii thieu nhng cau truc thong dung.
Hnh 4.40 Phan t bien cam o tiep can, cau tao va nguyen ly.
Hnh 4.41 Dang cau truc cac kieu phan t bien cam tiep can.
Khoang cach tiep can danh nh S N oi vi phien o co be day 1 [mm], hnh vuong, co chieu dai
canh ben tng ng ng knh be mat tch cc cua cam bien. Vat lieu phien o la thep, ky hieu
St37. o la mot vat lieu sat-t, co o suy bien mach t ac biet ln. Khoang cach chuyen trang
thai la khac nhau oi vi nhng vat lieu khac nhau, se giam neu khong phai la vat lieu sat-t. oi
vi nhom th khoang tiep can b rut ngan 50%, con vi ong th 55% (hnh 4.42).
Anh hng vat lieu ien dan phai c lu y en trong khi thiet ke che tao phan t cam bien. Ly
do la bi co s khac nhau gia cau truc ket hp hay khong ket hp (xem hnh 4.42).
o tre gia cac iem m va ngat trang thai tiep can tuy theo cau truc, thng trong khoang (5
20) [%] khoang chuyen v. Cac tr so ac tnh, ma khi s dung phai lu y ti, la kha nang tai lap
ch so, pham vi nhiet o lam viec va tan so chuyen toi a. Nhng tham so nay c cho trong tai
lieu ky thuat cua phan t cam bien.
131
Hnh 4.42 He so rut ngan va cac kieu dang cau truc.
Hnh 4.43 ac tuyen phan t cam bien khoang cach loai bien cam (hang Baumer).
Trong so cac phan t bien cam tiep can vi khoang cach chuyen trang thai tiep can nhat nh, th
ngi ta u tien che xuat nhng phan t co ty le gia khoang cach cua phien suy bien mach t vi
o ln ien ap ra. ien ap ra cua cac phan t bien cam loai nay giam mot cach tuyen tnh trong
pham vi khoang cach nhat nh va co the ng dung lam phan t cam bien khoang cach vat the. o
on nhiet va tnh tai lap cua ac tnh chuyen trang thai phai c anh gia tot xau tng ng vi
tng kieu phan t. V tr oan tuyen tnh cua ac tuyen ien ap ra phu thuoc vao ng knh phan
t. Anh hng cua vat lieu oi vi trng ien-t xoay chieu cung phai chu y ac biet. Hnh 4.43
ve ac tuyen cua nhng phan t cam bien loai nay.
132
Hnh 4.44 Phan t bien cam tiep can analog (hang Vibrometer) dung cam bien chuyen dch.
Trong hnh lay lam v du phan t cam bien IWA 30 U 9001 (hang Baumer) co ng knh 30 [mm],
pham vi lam viec tuyen tnh la (5 .. 10) [mm]. o sai lech tuyen tnh khoang 0,2 [mm]. o doc
ac tuyen au ra la 1,6 [V/mm]. ien ap cung cap co the trong khoang (13,5 30)[V] ma khong
anh hng ti che o van hanh cua cam bien. au ra la transistor pnp theo s o collector m,
Cac phan t cam bien loat nay c au ngan mach. Tnh tai lap v tr la 0,01 [mm]. Khi van
hanh, nhiet o phai trong khoang (0 60) [ o C ].
Phan t bien cam vi sai. Bang cach s dung hai phan t bien cam tiep can co tn hieu ra analog
va mot ngam kim loai co the tao thanh phan t bien cam o chuyen dch kieu vi sai (hnh 4.44).
Viec s dung hai bien cam dan ti s o mach cau e lng gia tn hieu au ra cua phan t cam
bien. Va cau c cung cap ien ap xoay chieu, nen ien ap ng cheo cau phai c chnh lu
nhay pha e co the lng gia theo dau cua tn hieu. S thay oi ien cam cuon day cung co the
thc hien bang cach chuyen dch loi sat-t trong long cuon cam. ay chu yeu dung hai cuon day,
loi co v tr ban au iem can bang gia hai cuon (hnh 4.45).
Ben canh anh hng ien cam cua hai cuon day len phan t cam bien, ay con co anh hng
cua ho cam. Bang cach bo tr cau truc phan t mot cach toi u, co the che xuat phan t loai nay e
o chuyen dch co o dai ti 100 [mm]. u the cua nhng phan t cam bien loai nay la cau truc
khong co bo phan ma sat trt nh cac phan t bien tr chiet ap. Can lu y anh hng nhiet o
va pham vi tuyen tnh cua ac tuyen phan t.
Hnh 4.45 Phan t cam bien dch chuyen theo nguyen ly bien cam co loi trt.
Hnh 4.46 Phan t bien ap vi sai bien thien thang (LVTD).

Mot phng an khac la phan t bien cam kieu bien ap, hnh 4.46 gii thieu nguyen ly o. Phan t
cam bien dang nay co the coi la bien ap vi sai bien thien thang. Cac phan t cam bien nay thng
ky hieu LVTD (Linear-Variable Differential-Transformator).
ien ap ra t le vi chuyen dch:
133
U 2 = K1 .U 1 .l ;
(4.34)
ay: K loi sat-t mem; P la cuon day s cap; S va S la cac cuon th cap; l o dch
chuyen cua loi; U 1 , U 2 ien ap s cap va th cap; K1 he so ty le.
Cuon s cap c cung cap mot ien ap xoay chieu. Cac cuon th cap au ngc pha, ien ap b di
pha i 180 o nghch hng nhau. ieu o co ngha la khi loi nam yen ca hai ien ap se tang trng
nghch hng nhau. Neu loi b dch chuyen, th o ghep t cam cac cuon day se khac nhau. Nh
vay, hieu ien ap au ra hai cuon day se la so o oi vi o lech cua loi sat-t mem khoi v tr can
bang. Theo s lng gia ien ap vi sai nay bi mot bo chnh lu nhay pha se co tn hieu ien mot
chieu vi dau theo hng dch chuyen.
Pham vi o thong thng la 200 [mm]. o tuyen tnh co the c 0,25%. o phan giai ay
cung nh trng hp phan t bien tr mang chat deo ien dan la vo cung, o tre do hng dch
chuyen la rat nho. Cac phan mach ien t can thiet c lap rap luon trong phan t.
V du: Hnh 4.47 la may o chuyen dch GCD-121-1000 (hang Schaennitz). Phan t cam bien nay
co bo phan ien t x ly tn hieu. ien ap lam viec la 15 [V], Nhiet o moi trng cho phep nam
trong khoang (-18 +70) [ o C ]. trang thai tnh, ien ap ra la 0 [V]. Pham vi o 25 [mm] vi sai
so tuyen tnh 0,25%. Tnh tai lap la 0,6 [ m]. Tn hieu au ra co the c 10 [V], khi o ien tr
tai phai c 200 [ ].
Hnh 4.47 May o o chuyen dch (hang Schaenitz)

4.2.5 Cac phan t cam bien chuyen v khac.
Trong cac muc tren chu yeu chung ta khao sat cac phan t cam bien chuyen v thang theo nguyen
ly cam bien tham so: bien tr, bien cam va bien dung. ay chung ta se khao sat cac dang phan
t cam bien chuyen v da tren c s cac nguyen ly vat ly khac.
Phan t cam bien dch chuyen theo hieu ng Hall. Phan t cam bien Hall co tch hp ben trong
mot bo tao dao ong Hall, bo ieu chnh ien ap va bo khuyech ai o lng. Hang Honeywell ky
hieu phan t cam bien chuyen dch thang nay la LOHET (Linear Output Hall Effect Transductor).
Trong pham vi mat o t thong 40 [mT] no co sai so tuyen tnh c 1,5% va o nhay 75 [mV/mT]
vi ien ap nguon la +12 [V]. Hnh 4.48 bieu dien ien ap ra nh la ham cua mat o t thong.
Hnh 4.48 ien ap ra cua phan t cam bien Hall LOHET (hang Honeywell).
134
Hnh 4.49 ng dung cam bien Hall lam phan t cam bien dch chuyen.
Cac thong so ky thuat kha cao nh o tuyen tnh ien ap au ra va o phan giai cao, at c do
cau truc phan t (hnh 4.49a). Khi dch chuyen ve pha phai th nam cham (2) tac ong len cam
bien manh hn nam cham (1) va cho ien ap ra nho hn so vi khi chung nam v tr gia can
bang. Cau truc hnh 4.49b co ac tuyen ien ap ra co oan tuyen tnh dai hn.
Phan t cam bien dch chuyen sieu am. Phan t cam bien khoang cach kieu sieu am c ng
dung e nhan biet oi tng bang tan so song sieu am cao hn 200 [kHz]. Phan t cam bien phat
ra song xung sieu am vi toc o lan truyen c, b phan xa lai t oi tng nam trong vung chum tia
bc xa hnh chop non. Song phat xa ngat quang. Trong khoang thi gian gia nhng lan phat xa
sieu am, bo phan thu tac hoat va thu nhan song phan xa. T khoang thi gian t L lan truyen song
sieu am t nguon phat xa ti oi tng va phan xa lai ti bo thu song co the tnh ra khoang cach
ti oi tng x L bang:
1
.
x L = .c.t L
2
(4.35)
Khoang thi gian gia thi iem ket thuc xung phat xa va thi iem co xung tao ra t bo phan thu
khi nhan c song phan xa, c em bang may em ien t va coi la lng t L . Trong cac phan
t cam bien sieu am loai mi th viec lng gia tn hieu va ieu khien c thc hien bi mach vi
x ly microprocessor. Pham vi o thng la (150 1500) [mm]. o phan giai cao hn 1 [mm].
Phan t cam bien dch chuyen quang. Cac phan t cam bien quang ng dung trong ky thuat o
dch chuyen chu yeu da tren c s nguyen ly c trnh bay hnh 4.50.
Hnh 4.50 Nguyen ly phan t quang o dch chuyen.
135
Theo phng phap nay, dch chuyen can o c phan thanh nhng oan nho. Mot manh quang
hoc c tao thanh nh vay se c chieu tia sang cho xuyen qua hoac phan xa lai. Moi chuyen
dch cua manh quang hoc nay c ieu khien bi nhng xung trch mau va se c em. So
lng xung em c la so o khoang dch chuyen. Mot trong nhng phng phap nh vay c
goi la phng phap gia lng Incremental-, bi no gom tng nac o gop lai. o chnh xac khong
cao hn o rong moi nac cua manh quang. Theo nguyen ly, ay la phng phap o tng oi, bi
co the bat au t mot iem bat ky nao o. Bang cach a ra mot iem dau moc co the bien
phng phap o nay thanh phng phap o tuyet oi. e co the at o chnh xac cao hn, phai che
manh quang hoc that la tinh. ia thuy tinh khac vach cho phep tao cac vach cach nhau 0,005 [mm].
e khi anh gia so o tranh khi ong iem moc, ngi ta chon phng phap ma hoa vi ong
thi trch mau nhieu manh quang. Theo ky thuat so digital-, moi nac tng ng mot so nh phan
(hnh 4.51).
Hnh 4.51 Thc ma nh phan o chuyen dch.

Trong phng phap nay th ieu kho khan gap phai la viec thu nhan chnh xac manh quang cung
nh s bien oi ro net sang-toi. e tranh sai so oc nay ngi ta chu yeu dung phng phap trch
mau V- (hnh 4.52). Trong kieu trch mau ch V moi bc c thc hien ti va lui. Co mot logic
trch mau am bao rang moi gia tr ti se c em so can bang vi gia tr lui.
Ben canh ma nh phan ngi ta con dung thc ma BCD. Hnh 4.53a gii thieu thc ma BCD
dung o dch chuyen. Neu ch trch mau ma nh phan mot cach thuan tuy (hnh 4.53b), th rat co
the gap phai sai so oc, cho thong tin sai lac. e tranh nhng sai so trch mau nh vay ngi ta s
dung nhng ma ma trong o moi bc ch thay oi mot so. Chu yeu o la ma Gray (hnh 4.53c).
Ro rang ay khac vi trng hp ma nh phan ngi ta khac phuc c sai so dien dch so (hnh
4.53d).
Hnh 4.52 Trch mau theo kieu ch V.
136
Hnh 4.53 Thc ma dung o dch chuyen: a). Thc ma BCD;

b). Sai so trch mau theo ma nh phan; c). Thc ma Gray;
d). Trch mau ma Gray.
Phan t laser o khoang cach. Laser la nguon phat xa Radiation Sources, c ng dung trong
nhieu lnh vc, nhat la trong ky thuat o lng va ieu khien laser ban dan Laser Diodes hay
LASER Light Amplification by Stimulated Emission Radiation. Nguyen ly, ac iem ng dung cua
cac nguon phat xa nay thuoc loai cac phan t cam bien quang hoc a c trnh bay phan tren
(chng 2, phan t cam bien anh sang, nguon sang).
Trong ky thuat robotics ngi ta ng dung phng phap quang hoc o khoang cach dung ky thuat
laser. May phat laser chieu ra mot tia sang, phan chieu lai t oi tng. Qua mot thau knh tia
phan xa se c hoi tu vao phan t cam bien tuyen tnh nhay quang. V tr cua iem sang tao nen
tren phan t cam bien la so o khoang cach. (hnh 4.54). Nhng cung nh trong cac phng phap
trch mau, ay o chnh xac khong cao.
Hnh 4.54 Nguyen ly quang hoc o khoang cach.

Ben canh cac phan t cam bien quang theo nhng nguyen ly cau tao neu tren, con co phng an
cau truc hnh 4.55, nguon sang phat ra mot tia sang va cung trong bo phan nay thu lai tia sang
phan xa. Khi o ngi ta o cng o anh sang laser tan xa. Cng o tan xa nay phu thuoc vao
khoang cach va o nhan bong cua be mat phan xa. Bang hai phep o vi o ieu tieu khac nhau
se tach biet c hai hieu ng o.
137
Hnh 4.55 Phan t cam bien quang hoc o khoang cach.

4.2.6 Cam bien chuyen dch goc angular-.
Cac phan t cam bien o goc chu yeu ng dung cac nguyen ly nh nhng phan t o so vong quay
va goc chuyen v.
Phan t bien tr chiet ap potentiometer. n gian nhat la phng an o goc quay dung phan t
bien tr potentiometer. Nhng phan t bien tr nay c che xuat dang bien tr day cuon, mang
carbon hay mang mong ien dan (xem muc 4.2.2). Cac bien tr c tao dang hnh ng tron.
tam iem co truc gan con trt va tay quay hay bo phan ga dan ong, sao cho con trt co the dch
chuyen gia hai au bien tr. Vi bien tr day cuon th phai tnh en s bien thien ien tr theo
nac, trong khi loai mang than hay chat deo ien dan th o phan giai gan nh la vo cap. Tuoi tho
van hanh cua cac phan t cam bien goc quay nay co the ti 100x 10 6 lan trt, tnh nang tai lap gia
tr o cao va co o tre nho. Co the at o khong tuyen tnh c 0,025 [%].
Cac phan t bien tr o goc c mac theo s o phan ap. o on nh nguon ien ap cung cap cho
phan ap co anh hng trc tiep en ket qua o, nen ay at ra nhng yeu cau kha cao oi vi
nguon cung cap. o ln ien ap nguon cung cap phu thuoc vao cap cong suat ton hao cua phan t
chiet ap.
Thong thng, tr so ien tr cua cac phan t bien tr o goc la (1 4,7 10) [ k ]. Do nhng ng
dung cu the khac nhau nen tren thc te ngay cang co nhieu loai co tr so ien tr phong phu hn.
Cac phan t bien tr o goc quay dang n gian co pham vi van hanh la t 0 en 350 o (hnh
4.56), tc la khong het ca ng tron.
oi vi pham vi goc o ln hn, co the dung loai bien tr nhieu cap, nhieu vong. Thong thng la
cac dang che xuat co 2, 5, 10 va 20x 360 o (tc la 2, 5, 10, va 20 vong).
Ket cau vo boc cua phan t o co the thc hien theo nhieu cach rat khac nhau. e x ly tn hieu ra
cua cac phan t bien tr o chuyen dch thang hay goc quay, co linh kien vi mach chc nang
chuyen dung, nguon cung cap co the la nguon ap hang 2,5 [V] hay nguon dong hang c 0,5 va 2,5
[mA]. Tn hieu ra thng la tn hieu chuan hoa c 0 hay 4 en 20 [mA] hoac la tn hieu oi xng
10 [mA]. Co the at trc iem 0 va pham vi lam viec.
138
Hnh 4.56 Phan t bien tr chiet ap o goc.

Loai chiet ap sin-cos co the quay ca vong tron. Hnh 4.57 gii thieu mot dang cau truc va o th
bien thien ien ap au ra.
Hnh 4.57 Phan t bien tr sin-cos- o goc.

Phan t bien cam inductive- o goc quay. cac phan t bien cam o goc quay loi sat khong dch
chuyen thang ma co the xoay. Hnh 4.58 gii thieu nguyen ly mot phan t bien cam o goc nh
vay.
Hnh 4.58 Nguyen ly chc nang mot phan t bien cam inductive- o goc.
Thng th hai cuon cam cua phan t c cung cap nguon ien ap xoay chieu. Trong mach o
(mach cau) cac cuon day tao thanh mot cau na ien cam. Bang bo giai ieu che demodulator co
the nhan dang dau cua tn hieu ien ap mot chieu au ra (ien ap ng cheo cau). Tn hieu ra
khong bien thien theo nac, ma trn va on nh. ay tnh tai lap gia tr o la rat kha d, khong gap
phai hieu ng tre hysteresis. Khoang gan iem 0 cung nh khi loi sat v tr gia th sai so tuyen
tnh la nho nhat. Do cau truc oi xng nen iem 0 nam chnh gia khoang pham vi lam viec, bang
cach x ly tn hieu tng ng co the dch iem khong nay. Phan t bien cam o goc co the o en
45 o vi o nhay c 60 [mV] moi o goc.
Microsyn. Hnh 4.59 gii thieu nguyen ly may o goc chuyen v microsyn. Microsyn la may o
theo nguyen ly bien ap vi sai co phan ng la loi sat-t. Phan tnh la stator 4 cc mac cac cuon day
139
s cap va th cap. Cac cuon s cap mac noi tiep, c cung cap ien ap tan so 10 [kHz], o ln vai
chuc volt. Cac cuon th cap c mac noi tiep sao cho t thong tren cac cap cc stator va sc ien
ong cam ng tren cac cuon th cap la xung oi so vi s cap. Khi loi sat-t phan ong v tr truc
oi xng cua hai cap cc stator, t thong cua cac cap cc va sc ien ong cam ng la bang nhau
nen ien ap au ra bang 0, tng ng iem 0 cua cam bien. Khi loi sat-t phan ong dch chuyen
i mot goc, t thong va ien ap cam ng trong cac cuon th cap se bien thien va ien ap au ra ty
le vi dch chuyen goc.
Hnh 4.59 May o microsyn.

Chi tiet hn ve nguyen ly, cau tao cua microsyn se c neu phan sau (Phu luc 2 Phan t cam
bien thong tin).
Phan t ch th so gia lng Incremental- o goc quay. Phng phap o v tr va dch chuyen
incrementall- (gia lng) la phng phap ch th so. ay cac vach dau hay phan sang-toi cua
phan t cam bien goc quay c tao hnh mot cach phu hp (hnh 4.60).
Hnh 4.60 Cau truc phan t cam bien goc gia lng Incremental-.
So xung tao ra se c cong vao mot bo em va a ra o ln cua goc o t so bc at ngc.
Moi iem cua ia xung co the xac nh iem au phep o. Khi o bo em se c at ve 0. Sau
moi lan ngng lam viec th phai xac nh lai v tr iem 0 nh a giai thch trong phan hoat ong
cua phan t gia lng thang. Viec nay dien ra bang cach i ti iem dan xuat hay dau so va quy
0 bo em. e nhan biet hng quay co the tr lai cac phng phap thong thng cua hai dang
phan t o goc quay a neu. ay cung co the at o phan giai cao bang cach em xung nhieu
140
lan vi hai chuoi xung trong moi na chu ky. Khi so xung cho moi vong quay la khoang 5000 xung
th bang cach nhan bon co the at so xung cho moi vong quay la 20000 xung.
Phan t cam bien o goc loai tuyet oi absolution- phai cho thong tin tng minh oi vi moi v tr
goc. ay can co a ma e tao xung. Ma goc gom nhieu ng co vung sang-toi. So ng se
xac nh o phan giai, c in thanh bc moi 360 o . Hnh 4.61 gii thieu loai a ma nh vay. Moi
ma goc c bat au t vung 0. Khac vi loai ia xung, sau khi ngng lam viec cac loai ia ma co
the tr lai v tr nay ngay lap tc. ay chu yeu dung ma Gray. Theo mot dang chuyen oi, ma
Gray cung co the chia theo kieu thap phan, v du 1000 bc cho moi 360 o , hay chia theo o goc, v
du 3600 bc cho moi 360 o . Bang mot bo chuyen ma co the chuyen oi, v du tr lai ma BCD
chang han.
Hnh 4.61 Cac a ma o goc.

Cung co the o goc ln hn 360 o . ay, ben canh a ma au tien c dan ong trc tiep, cac
a ma tiep theo se c dan ong theo nhng dien dch khac nhau. Bang cach o co the tang dung
lng cua a ma, von co so bc toan phan xac nh theo so bc nhat nh cho moi vong quay.
Cach ma hoa o goc nh vay cung c dung e o khoang cach dai (chuyen v thang).
Hnh 4.62 gii thieu mot thiet b chuyen oi dch chuyen thang thanh chuyen ong quay. Phng
phap nay ac biet c ng dung nhng ni chuyen ong quay tao ra nhng dch chuyen thang,
v nh dch chuyen ban mam may cong cu nh may phay, may khoan
Hnh 4.62 Mot ng dung phan t cam bien goc quay.
141
BAI 6: KY THUAT CAM BIEN VAN TOC VA GIA TOC.

CHNG 4. CAM BIEN VA O CAC CHUYEN V VAT THE. PHAN 2.
Muc tieu bai nay tap trung vao nhng khai niem c ban va ky thuat cam bien
chuyen dch vat the trong khong gian theo thi gian, cac ng dung o
lng van toc, gia toc, o chan ong (o rung) gom 2 phan cua chng
4.
Noi dung c ban ma SV phai nam c bai nay la nhng van e trong tam
sau:
Khai niem ai cng ve v tr va chuyen v vat the va nhng ac iem xac
nh chung. Cac loai phan t cam bien ng dung trong ky thuat o lng
ieu khien nh v, ket cau, hoat ong chc nang, cac ac tnh ky thuat,
ac iem ng dung.
Cac van e ng dung thc tien cac phan t cam bien va ieu khien nh
v vat the trong cong nghiep e co nhan thc va ren ky nang tong hp,
thiet ke va che tao he thong cu the trong thc te moi trng ng dung.
Bai 6 tap trung trong tam la ky thuat cam bien cac chuyen dch vat the
van ong theo thi gian (phan 2): van toc va gia toc, bang cac phan t
cam bien ng dung rong rai trong cong nghiep va dan dung.
Thi lng bai giang la 04 tiet/45 tiet len lp theo chng trnh mon hoc la 03TC
(45 tiet) va 04 tiet t nghien cu.
4.3 Cam bien toc o va gia toc chuyen v.
Nh ta biet, phan biet van toc goc va van toc thang (tnh tien). Van toc goc la vector ac trng cho chuyen
ong quay cua mot vat:
v d v
=
.n ;
(4.36)
dt
v
trong o: d la goc quay trong khoang thi gian dt; n la vector n v nam tren truc quay va co hng (sao
cho khi ta ng canh truc quay va neu cho vector ay hng t chan len au th thay vat quay t phai sang
trai). n v van toc goc la [rad/s], trong ky thuat thng o bang [vong/phut].
Ngi ta cung phan biet gia toc goc vi gia toc dai. Gia toc goc la ai lng vector ac trng cho s thay oi
v
van toc goc cua vat ran trong chuyen ong quay quanh mot truc. Gia toc goc bang ao ham cua van toc
v
goc theo thi gian:
v
v d
=
.
(4.37)
dt
Gia toc goc lien he vi moment lc M tac dung len vat va moment quan tnh I cua vat theo bieu thc:
v
v
M = I . .
(4.38)
2
n v cua gia toc goc theo he SI la [rad/ s ].
4.3.2 Cam bien o van toc.
Trong ky thuat cong nghe, cac ai lng van toc va gia toc c quan tam chu yeu la thong so ac trng trang
thai tng ng cua may do o thong thng la toc o quay va cac cam bien o lng ay thong dung la
cam bien toc o goc. Nguyen ly hoat ong chung cua cac cam bien loai nay la nguyen ly chung cua may ien
1
sc ien ong ty le vi van toc he truyen ong. ai lng gia toc ay tap trung vao cac dang cam bien o
rung, chan ong.
Cac phng phap o toc o quay cua phan ong rotor:
S dung may phat toc co o chnh xac thap, can chuyen oi A/D e so hoa tn hieu o. Ve nguyen ly,
cac may phat toc la phan t thong tin trong he o lng va ieu khien khao sat cu the hn c neu
trong Phu luc 2.
S dung cam bien quang vi a ma hoa theo phng phap ma hoa gia lng Incremental Encoder.
S dung may o goc tuyet oi theo phng phap o absolute-, dang may o Resolver.
o gian tiep dong va ap phan tnh stator e xac nh toc o quay. ay la phng phap khong co cam bien
toc o. Y tng cua phng phap la toc o ong c c lng gia t ien ap va dong stator (tren c s
tnh toan toc o t he phng trnh ong hoc cua ong c) va dung lam tn hieu phan hoi cua mach vong
ieu chnh toc o (tren c s mo hnh he ong cua ong c).
Phan t cam bien Incremental Encoder. La phan t cam bien toc o quay dung cam bien quang vi a ma
hoa. Toc o quay c xac nh theo nguyen ly cua mot trong hai phng phap c ban xac nh v tr va dch
chuyen: thong qua so xung em ng vi chuyen v c ban cua cam bien.
Hnh 4.63 Cam bien quang o toc o vi a ma hoa:

a). Nguyen ly cam bien; b). Nguyen ly photo-transistor.
S o s dung bo cam bien quang: mot a ma hoa c at gia nguon phat tia hong ngoai (diode quang
LED) va au thu (photo-transistor) (hnh 4.63). Toc o quay n c xac nh theo bieu thc:
60 N
, [vong/phut];
(4.39)
n=
4 N 0Tn
ay: Tn - chu ky ieu chnh toc o = chu ky em xung, [s]; N 0 - so xung trong mot vong quay = o phan
giai cua cam bien; N so xung em trong khoang thi gian Tn .e xac nh chieu quay, can s dung bo cam
bien kep (hai a ma hoa, hai LED va hai photo-transistors, hnh 4.64).
Khi a quay ta nhan c hai chuoi xung lech pha nhau 90 o , chieu quay c xac nh bang cach so pha hai
tn hieu.
e tang o phan giai co hai giai phap:
Tang so lo ( 2 n lo) trong mot ranh tren a ma hoa (n ranh);

Phoi hp em xung vi o thi gian: trong pham vi xung chot chu ky T, ong thi em chuoi xung thi gian co
tan so at trc (hnh 4.65).
Hnh 4.64 Cam bien quang o toc o quay hai chieu.
Hnh 4.65 Bieu o tn hieu phng phap phoi hp em xung thi gian.
ong thi o khoang thi gian t M gia hai sn xung lan can thi iem bat au va ket thuc chu ky em Tn
t M , bien oi bieu thc (4.38) va lay ao ham rieng cua n (theo N va t ), ta co:
60
60 N
n
dn =
dN
d ( t ) d ( t ) ;
2
4 N 0 t
t
4 N 0 ( t )
(4.40)
trong o so hang au co the bo qua v sai so em xung chot dN 0 . Khi o, neu n = 3000 [vong/phut], o phan
giai thi gian la d( t ) = 50 [ns], th o phan giai dn = 0,15 [vong/phut]. Nh vay, phng phap phoi hp o
thi gian co o phan giai khong phu thuoc a ma hoa ma ch phu thuoc tan so chuoi xung thi gian. Hnh 4.66
gii thieu mot phng an o nh vay vi hai kenh phat xung dang sin.
Hnh 4.66 Phng an ket hp em xung toc o va xung thi gian

tn hieu dang sin: a). Tn hieu hai kenh; b). S o nguyen ly mach o.
Chi tiet hn ve nguyen ly, cau tao cua cac dang Encoder se c neu phan sau (Phu luc 2).
May o goc tuyet oi (Resolver). Cau tao: phan ong (ket noi vi truc quay can o goc quay hay toc o) co
cuon s cap c kch thch bang song mang tan so khoang (2 10) [kHz] qua bien ap quay, phan tnh co hai
cuon th cap (cuon sin va cuon cos) at lech nhau 90 o (hnh 4.67).
au ra la tn hieu ieu bien cua hai cuon th cap, cha thong tin ve v tr tuyet oi cua rotor may o, tng
ng v tr tuyet oi cua rotor ong c can o. Bang cach lay ao ham goc quay ta co toc o quay cua ong c.
o phan giai cua may o phu thuoc kha nang phan giai cua bo chuyen oi A/D mac trong mach o.
3
Nhc iem cua cac phng phap o tren la lam he truyen ong khong ong nhat do phai tai them phan ong
cua cam bien (ma khong phai trong trng hp nao cung co the ket noi vao truc quay c). e khac phuc,
ngi ta ng dung phng phap khong co cam bien.
Hnh 4.67 May o goc tuyet oi resolver:

a). Nguyen ly cau tao; b). Nguyen ly hoat ong; c). Hai kenh tn hieu ra.
Chi tiet hn ve nguyen ly, cau tao cua may o Resolver se c neu phan sau (Phu luc 2).
Selsyn. La phan t may ien o dch chuyen goc. May o phan ly ong bo, phoi hp hai may ien giong nhau
may phat Transmitting Selsyn va may thu Receiving Selsyn. Moi may la mot may ien ba pha, cac cuon day
c noi hnh sao va hai may c noi vi nhau nh hnh 4.68. Selsyn c dung o dch chuyen goc, tao ien
ap au ra co o ln ty le vi goc lech gia v tr truc o ket noi vi may phat va v tr at trc cua phan ong
may thu.
Hnh 4.68 Nguyen ly may o selsyn (che o ch bao).

Chi tiet hn ve nguyen ly, cau tao cua selsyn se c neu phan sau (Phu luc 2).
4.3.3 Cam bien o gia toc.

Gia toc ke la cac dung cu o gia toc , dung trong nghien cu chuyen ong va dao ong cua cac bo phan may.
Co loai o gia toc goc, gia toc dai, gia toc cc ai, gia toc ham thi gian va quang ng, ; hay theo nguyen
ly cau tao co: gia toc ke c hoc, gia toc ke ien c, gia toc ke quang,
Gia toc ke rung. Khai niem gia toc ay hieu la gia toc chan ong, cua dao ong rung c hoc. Cac cam bien
o gia toc cung da tren c s dao ong rung c hoc cua vat the theo mot bac t do quanh v tr chuan. Phng
trnh dao ong cua mot he c bieu dien di dang bien oi Laplace:
A( s )
A( s )
;
(4.41)
X (s) = 2
=
2
s + 2 0 s + 0 G ( s )
ay: X(s) va A(s) bien oi Laplace cua x(t) va d 2 y dt 2 ; 0 - tan so dao ong t nhien cua he; - he so
tat dan cua dao ong.
Bang cach bien oi ngc Laplace phng trnh tren, xac nh c dao ong chuyen dch cua vat:
(4.42)
x(t ) = L1 [G ( s ), A( s )] .
Gia toc ke rung co kha nang nhan dang ung tan so cong hng. Tan so rung au ra ac trng ac tnh tan
cua cam bien. o nhay cua gia toc ke la ty so ien ap au ra vi ai lng dao ong c hoc au vao, tnh
bang volt tren n v gia toc (VD: [V/g]; 1 g = 9,81 m/ s 2 ), vi tan so chuan (Chau Au: 160 Hz; My: 100 Hz).
Gia toc ke ien dung.
Cam bien trong gia toc ke ien dung la tu ien co ien dung phu thuoc gia toc: hai ban cc tu ien, mot gan
vi phan tnh cua gia toc ke, ban cc kia gan vi vat rung. Hnh 4.69 gii thieu nguyen ly cua bo cam bien gia
toc ke ien dung vi sai va s o mach bien oi thc hien tren vi mach tch hp silicon, trong o CMC la ien
dung o gia vat rung va nap vo, va CMB la ien dung o gia vat rung va e co loxo silic, C f - ien dung
mach phan hoi cua khuyech ai thuat toan chuyen oi ien dung sang ien ap au ra:
VA = 2 E
CMC CMB
.
Cf
(4.43)
Hnh 4.69 Gia toc ke ien dung vi tu ien vi sai:

a). Mat cat cam bien; b). Lo xo gi vat rung; c). S o vi mach tch hp bien oi tn hieu ra.
Tc la ien ap au ra phu thuoc ien dung vi sai cua cam bien, tng ng gia toc chuyen v dao ong cua vat
the can o. Gia toc ke ien dung vi sai cho phep o nhng dch chuyen nho (cac gia toc ke ien dung thng
co the o c dch chuyen cc ai la 20 [ m]).
Gia toc ke ap ien. ng dung hieu ng ap-ien do Pierre va Jacques Curie phat hien nam 1880. Trong cam
bien gia toc ap ien, vat rung c at tren phan t ap ien piezo, sinh ra ien tch khi chu tac dung cua ng
suat tng ng chuyen ong cua vat rung, do o ty le vi gia toc cua vat. Thong thng s dung hai bien
dang tinh the piezo: kieu nen va kieu uon (hnh 4.70).
Hnh 4.70 Gia toc ke ap ien: a)- b)- c). Kieu nen; d). Kieu uon.
WUX
BAI 7: KY THUAT CAM BIEN LC.

CHNG 5. CAM BIEN O LC VA TAC DUNG LC. PHAN 1.
lc va tac dung lc (phan 1) va ap suat, ng suat (phan 2); cac ng dung
trong ky thuat o lng va ieu khien gom 2 phan cua chng 5.
sau:
Khai niem ai cng ve lc, tac dung lc va va nhng ac iem xac nh
chung. Cac loai phan t cam bien lc va tac dung lc (ap suat) ng dung
trong ky thuat o lng ieu khien, ket cau, hoat ong chc nang, cac ac
tnh ky thuat, ac iem ng dung.
Cac van e ng dung thc tien cac phan t cam bien trong cong nghiep
e co nhan thc va ren ky nang tong hp, thiet ke va che tao he thong cu
Bai 7 tap trung trong tam la ky thuat cam bien lc va tac dung lc (phan
1) bang cac phan t cam bien ng dung rong rai trong cong nghiep va dan
dung.
KHAI NIEM CHUNG.
ai cng ve lc va tac dung lc.
Lc la ai lng vector, so o tng tac gia cac vat. Tng tac nay co the thc hien khi cac vat tiep xuc trc
tiep vi nhau (lc nen, lc keo, lc ay, lc ma sat) hoac thc hien gian tiep thong qua tac dung trng vat ly
ma cac vat tao ra (trng hap dan, trng ien-t, ). La mot vector, lc co o ln (modul), hng tac dung va
iem at.
ieu quan trong ay la phai nhan thc c s khac biet gia lc, trong lc trong lng, lc tai va tai
trong, v cac thuat ng nay thng c hieu va dung trao oi mot cach khong ro ngha.
Lc:
So o cua s tng tac gia cac vat the (Force).
Trong lc:
So o trong lng cua vat the tac dung len ban can (Weight)
Lc tai (tai trong): So o lc tac dung len vat the (Load)
Trong lc la lc tong hp cua lc hap dan do trai at tac dung len vat va lc ly tam ma vat phai chu do
chuyen ong quay cua trai at. Trong lc hng theo phng thang ng iem quan sat. Bi lc ly tam ma
vat phai chu (do chuyen ong quay cua trai at) la nho so vi lc hap dan (lc ly tam cc ai xch ao,
nhng cung ch bang 1/288 trong lc), nen co the noi trong lc la so o lc hap dan tac dung len vat.
Trong lng cua mot vat la lc ma vat tac dung len ga (hoac he thong treo) do o vat khong b ri t do
mac du b hut ve pha tam trai at. Neu vat va gia (ban can) eu bat ong oi vi trai at th trong lng
vat (o c bang ban can) bang trong lc cua no. Trong lng rieng la trong lng cua mot n v the tch,
tnh bang [ N / m 3 ].
Khoi lng la mot ac trng vat ly quan trong cua vat chat, la so o ong thi cua tnh hap dan va quan tnh
cua vat chat. La so o tnh hap dan, khoi lng c xac nh theo nh luat van vat hap dan cua Newton :
mm
F = . 1 2 2 ; [N]
(5.1)
r
trong o: m1 , m2 la khoi lng cua hai vat tng tac; r la khoang cach gia hai vat o; la hang so hap dan.
La so o quan tnh, khoi lng c xac nh theo phng trnh c ban cua ong lc hoc: F = ma ; trong o a
7
la gia toc ma vat the nhan c di tac dung lc F. Khoi lng rieng cua vat chat co tr so bang khoi lng
cua mot n v the tch:
dm
=
.
(5.2)
dV
n v khoi lng trong he SI la [kg].
Nh vay, trong lng cua mot vat the la lc ma vat the tac dung len ban can (hay can can); trong lng rieng
la trong lng cua mot n v the tch cua vat. Trong khi o, khoi lng rieng cung la khoi lng cua mot n
v the tch tuy nhien, vi cach chon n v thch hp (kg lc / kg khoi lng) th tr so cua khoi lng rieng
co the bang ty trong cua chat o. o la ban chat quan he gia khoi lng va trong lng cua mot vat the.
Tai (hay tai trong) la tac dung lc len mot vat the. Bi lc la so o tng tac gia cac vat the, lc tai (hay tai
trong) chnh la tac dung lc ma mot vat phai chu t mot hoac cac vat the khac trong tong the cac lc tac dung
len no (nh trong lc, trong lng va cac lc tng tac khac). Trong thc te ng dung, cac phep o lc noi
chung la o lc tai, phan nao bo qua tac ong ngc cua vat chu tac ong len vat tac ong (tnh tng tac
lc).
Cac phng phap o lc. Co the o lc theo cac phng phap:
Phng phap tnh: Da vao s can bang lc can o vi mot lc oi khang, sao cho tong cac lc va tong
moment cua chung bang 0; hoac can bang lc can o vi mot lc khac (nh lc trong trng, lc ien-t)
co the o c.
Phng phap ong: Da vao phng trnh c ban cua ong-lc-hoc chat iem (nh luat hai Newton):
r
r
F = ma , [N];
(5.3)
trong o: m khoi lng cua vat chu tac dung lc, tnh bang [kg]; a gia toc chuyen ong cua vat di tac
r
ong lc, [m/ s 2 ]). Theo nguyen ly phng phap nay, ngi ta o gia toc a cua vat (co khoi lng m a biet)
e xac nh lc tac dung F; hoac bien oi lc tac dung F thanh ap suat P cua chat long, chat kh hay ng suat
p bien dang cua chat ran va o cac ai lng nay.
Lc-ke la dung cu o cng o cua lc. Co nhieu loai lc-ke cau tao khac nhau, pho bien nhat la lc-ke da
tren s bien dang an hoi cua vat ran. Lc-ke co cac bo phan chnh:
o bo phan chu lc, thng la mot chi tiet an hoi, la phan t bien dang an hoi;
o bo phan truyen ong, thng la mot he on bay hoac banh xe rang ca e khuyech ai o dch
chuyen, va:
o bo phan oc hoac ghi tr so cng o lc, cung co the la giao dien cho cac bo phan x ly tiep theo.
Lc-ke c dung e o sc keo cua ong c, o lc tac dung len cac bo phan may moc, e th sc ben cua
vat lieu vv Trong nhieu cong nghe cam bien lc khac, ngay nay cac cam bien thong dung nhat trong ky
thuat o lng va ieu khien ng dung hoac nguyen ly day o bien dang strain gauge, hoac da tren c s
tinh the ap-ien thach anh piezoelectric quartz crystal.
Trong he n v quoc te SI, lc tnh bang n v Newton [N]. Co nhng n v ngoai he nh 1 [dyn] = 10 5 [N]
hay 1 [kg lc] = 9,80665 [N]. Trong cac may o lc (va ap suat) c che xuat t My va nhieu nc Chau Au
van dung cac n v khong theo thong c quoc te (he SI), nhng co the de dang quy oi nh:
1[kg]=2,205pounds[lb]; pound ky hieu la 1[lb] =0,45359237[kg]; ounce 1[oz]=0,0283495[kg]; pound lc
(force) ky hieu la 1[lbf]=4,44822[N]; vv
ai cng ve tac dung lc ng suat va ap suat.
ng suat (c hoc) la so o noi lc xuat hien trong vat bien dang di anh hng cua cac tac dung lc t ben
ngoai. Tng tac gia cac phan vat tiep xuc vi nhau theo tiet dien i qua iem ng suat, c thay bang cac
lc tac dung o. Khai niem ng suat nay (c hoc) khac vi ng suat nhiet, xuat hien trong mot vat bi s phan
bo nhiet khong eu trong nhng phan khac nhau cua vat va bi kha nang co dan v nhiet b can tr do b
nhng phan lan can ben trong hay nhng vat ke canh ben ngoai chen ep. Trong hau het cac cam bien lc va
ap suat, th ng suat nhiet la nguyen nhan chu yeu gay sai so cam bien.
Trong khi o, ap suat la ai lng vat ly ac trng cho cng o cua lc ben ngoai at thang goc len be mat
cua mot vat. Neu lc F phan bo eu tren dien tch A cua be mat S th ap suat la p = F/A. oi vi moi trng
8
chat long va tnh th ap suat tai moi iem la nh nhau theo moi phng. oi vi moi trng chat kh, ap suat
la do cac phan t kh chuyen ong hon on truyen xung lng cho be mat vat tiep xuc vi chat kh. Cac chat
long va chat kh c goi chung la lu chat. Trong thc te, thng noi en ap suat cua lu chat, hiem khi noi
en ap suat chat ran.
Nh vay, co the coi ap suat va ng suat la hai mat cua tac dung lc. Ap suat gay nen bi tac dung lc t
ngoai, con ng suat la tac dung noi lc ben trong vat, gay nen bi nhng tac dung t ngoai.
n v o ap suat co th nguyen lc chia cho dien tch, trong he SI la [ N / m 2 ]. Ngoai ra con co cac n v
ngoai he SI nh atmosphere vat ly (tng ng atmosphere tieu chuan, ky hieu [atm]), atmosphere ky thuat
[at], millimet cot nc [mm cot nc], millimet thuy ngan (hay ky hieu [tor]), [bar]. Trong mot so tai lieu, va
nhat la cac che pham t My va Chau Au, van dung cac n v o lng khong theo thong c SI, nh pound
tren inch vuong (square) [psi] e o ap suat, (cung vay, ngi ta ky hieu n v o ap suat vi sai (differential-)
la [psid], ap suat tuyet oi (absolute-) la [psia]). Hien nhien nhng n v o nay co the c chuyen oi sang
he SI hay nhng n v o thong dung khac nh 1[mmHg]=1[tor]=133,322[N/ m 2 ], Pascal 1[Pa]=1[N/ m 2 ];
[bar] hay millibar 1[mbar]=100[N/ m 2 ], vv
o ap suat. Dung cu e o ap suat la ap-ke. Ngi ta phan biet ap-ke e o ap suat tuyet oi (tnh t so
khong) va ap-ke e o ap suat d (tc la hieu gia ap suat tuyet oi va ap suat kh quyen) khi ap suat tuyet
oi ln hn ap suat kh quyen. Ap-ke vi sai o hieu hai ap suat. e o ap suat kh quyen, ngi ta dung khap-ke, e o ap suat gan so khong ngi ta dung ap-ke-chan-khong. Tuy theo nguyen ly hoat ong, ngi ta
chia ra: ap-ke chat long, ap-ke piston, ap-ke bien dang (kieu ong, kieu mang, kieu hop xep). Ap-ke co the
chia o theo cac n v khac nhau: [kgl/ m 2 ], [kgl/ cm 2 ], [bar], millimet cot nc, millimet thuy ngan, hay theo
he n v quoc te SI la [N/ m 2 ].
Co the dung bat c phng phap nao e o ap suat da tren s thay oi cac ac tnh vat ly cua cac chat khi
thay oi ap suat, do o cac phng tien o ap suat la rat a dang. Tuy nhien, trong cac may o ap suat ngi
ta chu yeu s dung cac phan t cam bien lc. ay, nguyen ly phng phap la o lc tac dung len mot dien
tch gii han nh gia tr ap suat trung bnh P :
F
(5.4)
P= .
A
Ty so cua lc tac dung F tren dien tch A c bieu dien nh la ap suat p:
F
p=
.
(5.5)
A
Va bi v tren mat at luon chu mot ap suat kh quyen nhat nh, nen trong khai niem ap suat phan biet ap
suat tuyet oi va ap suat d lien quan vi ap suat kh quyen.
Phan ln cac phan t cam bien ap suat co nguyen ly hoat ong da tren c s:
ap suat tac dung len be mat dien tch, o lc can bang ap suat o; hoac:
ap suat tac dung len mot phan t cau truc nhay vi ap lc (v nh bien tr R thay oi ien tr theo ap suat,
hay phan t tao ra ien ap co o ln phu thuoc ap suat).
5.1 CAM BIEN O LC.
Phan loai.
Phan t bien tr bien dang an hoi:
o Kim loai (day tr, mang tr, mang rung bien dung, );
o Ban dan (ien tr bien dang silicon, mang ien dan chat deo, ).
Cac phan t cam bien vat ly khac: cam bien ien dung, ien cam, cam bien ap-ien piezoelectric, cam
bien t-giao,
Cac phan t bien tr kieu day o bien dang an hoi c ng dung nhng cho co the co bien dang t c va
ti ln (0,001% - 1%), nhng ni can en nhng thiet b re tien, nhng dung cu co kch c nho nh silicon te
vi, va ni tn hieu ra co the bien thien tan so t 0 (ien mot chieu) ti vai kHz. Gii han tan so xuat hien
9
ay la bi v ket cau cac dung cu nay noi chung co ien dung tan ln, co xu hng loc bo nhng tn hieu bien
thien nhanh.
Cac phan t cam bien vat ly da tren nhng hieu ng vat ly, v nh ien tr ap-ien la mot linh kien thay oi
ien tr khi b bien dang. Trong hau het cac vat lieu ien tr, hieu ng tr khang ap-ien bieu hien di hai
dang thanh phan thanh phan hnh dang hoc geometric va thanh phan ien tr resistive. Thanh phan hnh
dang hnh hoc cua phan t tr khang ap-ien xuat phat t hien tng la phan t bien dang chu s thay oi ve
kch thc. Nhng thay oi nay lam anh hng en ien tr cua cam bien trong tiet dien mat cat va theo
chieu dai.
5.1.1 Phan t bien dang an hoi kieu bien tr.
Cac phan t bien dang an hoi pho bien nhat dung trong cac phep o lc la:
Day o bien dang ien tr;
Day o bien dang ban dan, va:
Bien cam ap-ien piezoelectric transducers.
Day o bien dang o lc mot cach gian tiep bang cach o o uon cong ma lc tac dung tao ra trong mot vat
mang carrier a c hieu chuan. Co the dung ky thuat day o bien dang e o ap suat, roi chuyen oi ap
suat thanh lc, s dung mot bo bien cam xap x hoa appropriate transducer. Co the o lu lng dong chay
bang cach dung cac phep o ap suat vi sai ng dung cong nghe day o bien dang.
Bang 5.1 Cac phep o da tren day o bien dang.
Bien dang
Day o bien dang; Bien cam ap-ien.
Lc
Te bao tai trong.
Ap suat
Mang ngan lc cho day o bien dang.
Lu lng
o ap suat vi sai.
Day o bien dang ien tr la mot phan t bien dang ien tr kim loai, khi co lc tac dung len e ma no c
lap tren o lam no thay oi o dai, b keo dan ra hay nen lai, do o lam thay oi ien tr. o co le la mot
bien cam quen thuoc nhat bien oi lc thanh tn hieu ien.
Nguyen ly chung. Phng phap pho bien nhat e xac nh lc la tao mot lc c hoc can bang vi no. Khi co
lc F tac dung, lam vat the bien dang chuyen dch, vat the an hoi b nen lai (hnh 5.1a) hay gian ra.
e vat the nam yen trang thai nen nay, lc tac dung F phai can bang vi lc an hoi c hoc cua vat bien
dang Fmech :
F = Fmech .
(5.6)
Neu ac tuyen cua vat the an hoi la tuyen tnh, tc la lc tac dung va o bien dang cua vat ty le vi nhau,
th ta co:
(5.7)
Fmech = C.s ;
ay: C he so an hoi cua vat bien dang; s o dch chuyen vat the.
Hnh 5.1 a). o lc F bang lc can bang cua vat the bien dang an hoi Fmech .
b). Nguyen ly phan t bien dang an hoi.
10
Hnh 5.1b gii thieu nguyen ly cua mot phan t bien dang an hoi. Lc F lam uon cong vat the an hoi. o
cong s cua vat co the xac nh bang mot phan t cam bien chuyen dch, v nh phan t bien tr chiet ap
potentiometer (nhieu tai lieu goi tat phan t co con trt nay la pot) hoac phan t bien cam inductive (xem
chng 4). Co phng phap khac la o o dan dai be mat tren hay o ep nen mat di bi s uon cong
cua phan t. o co dan lai la tnh nang cua phan t cam bien an hoi nay va qua o ma the hien so o cua lc
tac dung F. Phep o o co dan c thc hien bang cach s dung phan t day tr, co kha nang thay oi ien
tr do bien dang co dan. Theo nguyen ly o ngi ta che xuat cac phan t cam bien dang day o bien dang
strain gage hay mang bien tr co dan foil-gage.
Bang 5.2 cho cac thong so ky thuat chu yeu cua cac kieu phan t cam bien bien dang an hoi strain gauge
di dang day tr, mang tr hay ban dan silicon.
Bang 5.2 ac tnh cac phan t cam bien bien dang an hoi.
ac tnh ky thuat
Ky hieu. n v
Kieu phan t bien dang an hoi
Day tr
Mang tr
Ban dan
Tr so ien tr danh nh.

R0 ,
[ ] 120; 600
120; 300;
120; 600
350; 600
R R0 ,
[%] 0,25 0,5
0,2
0,5
Dung sai ien tr.
Chieu dai tch cc.
o nhay bien dang.
Dung sai o nhay.
Tan so gii han.
l,
F.s ,
fM ,
[mm] 3 6 150
2
[%] 0,5
[kHz] 0 100
0,6 6 30
2
1
0 100
15
100 160
2
-
Dong ien cho phep.
IM ,
[mA] 10 40
20 40
10 20
ien ap cung cap cho mach cau max.
UB ,
2 20
12
o bien dang toi a.
max ,
Pham vi bien dang tuyen tnh

vi sai so tuyen tnh 0,1 %.
Pham vi bu nhiet o.
He so nhiet o (khi co bu nhiet).
o sai bien trong thi gian mot gi
khi = 1000[ m m] .
M ,
[V] 2 60
3
5 50
50 80
35
[ m / m ]
4000 10000
4000 10000
1000
-10 +130
10 [m / m]
[ o C ] -10 +150
TK ,
K ,[ ( m m)/ oK ] 1

1 10. 10 3
1 10. 10
110. 10 3
Phan t cam bien bien dang an hoi bien tr kim loai.

Nguyen ly day o bien dang Strain Gage.
Bien tr dan n la mot dang day tr, co the co hay dan, nhng trong pham vi an hoi, e dang nguyen thuy
cua no khong thay oi. e xac nh o co dan cua mot vat the, ngi ta dan day o len vat. Khi co lai hay dan
ra, vat the truyen s bien dang o cho day o. Bien dang c hoc dan ti s thay oi ien tr cua day o bi
xuat hien ng suat c hoc ben trong day. S thay oi ien tr nay c o bang phep o tng ng o ien
tr (ma do nhng yeu cau ac biet cua phep o dung day o bien dang, se danh mot chuyen muc rieng phan
sau neu cu the hn ve mach cau o ien tr ien hnh, nh mot mach chc nang chuan hoa tn hieu).
oi vi day tr kim loai an hoi, o nhay bien dang co the tnh nh sau:
L L 4 L
=
=
;
(5.8)
R=
A r 2 D 2
4L
8L
dR =
dL
dD ;
(5.9)
.d +
2
2
D
D
D 3
dR d dL
dD
=
+
2.
.
(5.10)
R
L
D
11
ay: R ien tr day o bien dang theo chieu dai day ( 20 o C); ien tr suat cua day o (mot hang so
phu thuoc vao vat lieu); L chieu dai day o; A tiet dien day; D ng knh day o.
oi vi day o bien dang ta quan tam he so day o gage factor K s thay oi ien tr ty oi cua day o ng
vi s thay oi ty oi chieu dai day o (s bien dang day o):
dR R d
dD D
.
(5.11)
K=
=
+ 1 2.
dL L dL L
dL L
So hang cuoi trong bieu thc (5.9) c goi la ty so Poisson :
dD D
;
=
dL L
khi o ta co:
K = 1 + 2 +
d
.
dL L
(5.12)
(5.13)
oi vi nhng kim loai khac nhau, ai lng nay phu thuoc vao tnh chat vat lieu, va vao ac tnh ien dan.
Noi chung, kim loai co gia tr he so day o gia 2 va 4.
T bieu thc (5.5), o bien dang cua vat ty le vi lc tac dung, ta cu the hn oi vi trng hp day o bien
dang an hoi. Bi ng suat ben trong day o bang lc F tac dung len be mat dien tch A cua day o; gay nen
s thay oi ien tr day o, s thay oi ien tr ty oi nay dR R bang he so day o K nhan vi s thay oi o
dai ty oi dL L (tc la s bien dang, ay e n gian ta ch tnh bien dang theo chieu dai s dan dai day
o); ma ng suat bang modul an hoi Young E nhan vi o bien dang, ta co:
dL E. A dR
;
(5.14)
F = . A = E. A.
=
.
L
K R
hay la:
dR F .K
.
(5.15)
=
R
E. A
Nh vay, s thay oi ien tr ty oi cua day o bien dang ty le vi lc tac dung va ty le vi he so day o chia
cho modul an hoi Young cua vat lieu. Ro rang la can co s thay oi ln ve ien tr e n gian hoa viec
thiet ke cac phan con lai cua dung cu cam bien, nen noi chung ta co gang chon nhng day o ng knh nho,
co modul an hoi Young nho, va he so day o cang ln cang tot. Tnh an hoi cua a so cac vat lieu thng
han che di 1%, cho nen ta thng noi ve nhng thay oi ien tr trong pham vi 1% - 0,001%. Ro rang o
nhng ien tr nh vay khong phai la de, va thng phai kiem cac cau o tr c thiet ke e tao ra ien ap
u cung cap cho cac mach khuyech ai va x ly tiep theo (xem muc 5.1.1.4).
Trong thc te, bieu thc (5.13) cho ty so bien tr R R0 c xac nh theo bieu thc:
R
= K . ;
(5.16)
R0
ay: R o ln thay oi ien tr do bien dang; R0 tr so ien tr danh nh (trc khi b bien dang); K
hang so ty le, ay chnh la he so day o gauger factor (mot hang so do nha san xuat cung cap, la ty so
(R / R ) (L / L ) ); so o dan n, ay la o gian dai cua oi tng tren n v chieu dai ( L L ), goi la
o bien dang strain.
Hang so ty le K la hang so vat lieu dan ien cua day tr. Tr so K oi vi cac vat lieu ien tr kim loai nam
trong khoang t 2 en 4.
ien tr danh nh R0 cua phan t bien tr an hoi la tr so ien tr gia hai au ra cua phan t, thng chon
trong day so: (120; 350; 600; 700) [ ].
oi vi nhng phan t day tr dan dai, thay v gia tr co the dung ty so o dai L L0 (xem bieu thc (5.9)):
R
L
= K.
;
R0
L0
(5.17)
12
ay: L o co dan chieu dai cua day tr; L0 chieu dai cua day o trc khi bien dang. Noi chung, he so
K chu anh hng cua bien ong chieu dai, tiet dien va ien tr suat cua day tr.
Tac dung lc au vao c chuyen oi thanh ien ap bang s thay oi ien tr cua cac day o bien dang co
lien quan mat thiet vi ket cau bien cam transducer.
S thay oi ien tr day o ch th o ln bien dang trong ket cau bien cam va do o cung ch th o ln cua
tai trong tac dung.
C s cong nghe che tao day o bien dang.
Day o bien dang kieu day tr co the dung e o lc trong mot pham vi rong, t 10 [lb] ti nhieu tan. No gom
mot si day manh (0,001 [in.]) c quan vong ti va lui vai lan roi c gan chat vao mot ban nen dang tam
mong (hnh 5.2a). Ngay nay co nhieu phng an dung cong nghe mach in e tao ra nhng mau day tr. Toan
bo day o bien dang c ghep chat mot cach tin cay vao mot oi tng ket cau nao o va se phat hien c
bat ky bien dang ket cau nao co the xay ra. Day o c nh hng sao cho cac si day nam cung hng vi
hng bien dang ch i. Nguyen ly hoat ong nh sau: neu oi tng b at di lc cang, day o se gian ra
va b bien dang dai. Si day khong ch hi dai ra ma con manh hn. Ca hai tac ong o gay nen viec tang
ien tr toan phan cua day, nh co the thay t ang thc c ban cua ien tr (xem bieu thc 5.8).
Hnh 5.2 Day o bien dang.

S thay oi ien tr cua day o bien dang co the dung e tnh toan o gian dai cua day o bien dang (va cua
oi tng ma no c gan chat vao). Neu anh biet c o gian dai va hang so an hoi cua thanh phan ga ,
th nhng nguyen tac cua nh luat Hook co the c dung e tnh toan lc tac dung.
S thay oi ien tr trong day o bien dang la nho. Mot cach ien hnh, no ch khoang vai phan tram, tc la
co the nho hn mot ohm. o lng mot gia tr ien tr nho nh vay thng oi hoi phai co mot mach cau o
(hnh 5.2b). Vi mach cau nay, s thay oi nho trong mot ien tr co the gay nen mot mot s thay oi ty le
phan tram tng oi ln hn trong ien ap ng cheo cau. Ban au, cau c can bang (hoac c quy 0)
bang cach ieu chnh cac ien tr sao cho V1 = V2 . Sau o, khi ien tr day o thay oi, hieu ien the
( V1 V2 ) se thay oi. Cau o cung cho phep ta kh nhng bien ong do nhiet o, bang cach noi mot day bu
(goi la dummy) the vao cho mot trong nhng ien tr mach cau. Nh trong hnh 5.2 va 5.3, thc te day bu
c mac gan ke day o chnh sao cho chung tiep nhan cung nhiet o, nhng no c nh hng vuong goc
vi day o chnh nen lc tac dung se khong lam cac si day tr cua no b bien dang dai.
Bang cach phan tch mach cau trong hnh 5.2, thoat tien ta tnh rieng cac ien ap V1 va V2 , dung nh ly phan
ap:
V .R
(5.18)
V1 = S G ;
R1 + RG
V .R
(5.19)
V2 = S D .
R2 + R D
ien ap ng cheo cau co the bieu dien bang ( V1 V2 ):
(V1 V2 ) = V
RG
RD
= VS .
R1 + RG R2 + R D
(5.20)
13
Bang cach s dung ai so toan hoc, ta co the chuyen oi bieu thc (5.20) thanh dang:
(RG .R2 RD .R1 )
.
V = VS .
(R1 + RG )(. R2 + RD )
(5.21)
Ta co the n gian hoa viec phan tch mach bang cach ac trng rang tat ca cac ien tr trong mach cau (bao
gom ca RG va R D ) eu co cung tr so (R) khi cau can bang. Khi o, neu day o b gian dai, RG se tang len
mot t, thanh ( R + R ), ay R la so ohm ma RG tang len bi gian dai. S dung nhng ieu kien o, bieu
thc (5.21) c gian c thanh:
R
; vi moi ien tr bang R khi cau can bang.
(5.22)
V = VS .
4 R + 2R
Nhn mau so trong bieu thc (5.22), ta thay co tong cua 4R va 2 R, nhng trong moi canh huong thc te 4R
se ln, ln hn nhieu so vi 2 R, nen ta co the noi rang (4R+2 R) 4R. Vi gia thiet o va mot vai bien oi
toan hoc ta ti bieu thc (5.23) ma ta co the dung e tnh toan s thay oi trong ien tr day o bien dang tren
c s cua s thay oi ien ap ng cheo cau o c.
4 R.V
R
;
(5.23)
VS
ay: R s thay oi trong ien tr day o bien dang; R tr so nh mc cua moi ien tr trong mach cau;
V ien ap ng cheo cau nhan c; VS - ien ap nguon cung cap cho cau.
Bi day o bien dang b gian ra, ien tr cua no tang len. Tng quan chnh xac gia o gian dai va ien tr
co the tnh toan bang cach dung bieu thc (5.16) va da tren he so day o K (gauge factor), do nha san xuat
day o bien dang cung cap (xem bieu thc (5.16)).
Hnh 5.3 Cac cau truc day o bien dang.

Can co mot bieu thc na trc khi ta co the giai quyet van e day o bien dang mot ang thc quan he
ng suat stress va s bien dang strain trong mot oi tng. ng suat la lc tren dien tch mat cat ngang; v du,
neu mot chan ban co dien tch mat cat la 2 [ in.2 ] va mot tai trong la 100 [lb], khi o ng suat la 50
[ lb / in.2 ]. S bien dang la lng chieu dai (tren n v chieu dai) ma oi tng b gian ra nh ket qua cua ng
suat tac ong ti no; v du, mot oi tng co chieu dai 10 [in.] gian ra 1 [in.], khi o moi inche cua oi tng
a gian ra 0,1 [in.] va nh vay s bien dang se la 0,1 [in./in.]. ng suat va bien dang tng quan vi nhau
bang mot hang so c goi la modul Young (con goi la modul an hoi), nh trong bieu thc (5.24). Modul
Young (E) la so o mot vat lieu cng en bao nhieu va co the coi nh mot dang hang so lo xo an hoi spring
constant.
E=
(5.24)
ay: E modul Young (mot hang so oi vi moi loai vat lieu); - ng suat (lc tren tiet dien); - o bien
dang (o co gian tren n v o dai).
Bang 5.3 cung cap mot vai gia tr cua E oi vi cac vat lieu thong dung.
Bang 5.3 Modul Young (E) cua cac vat lieu thong dung.
Vat lieu
x 10 6 [lb/in 2 .] x 10 6 [N/cm 2 ]
Thep
30
20,7
14
ong
Nhom
a soi
Go cng
15
10
7,3
1,5
10,7
6,9
5,0
1,0
V du 5.1.1
Mot day o bien dang va mach cau c dung o lc cang trong mot thanh dam thep (hnh 5.4). Thanh dam
co tiet dien ngang la 2[ in 2 ]. Day o bien dang co ien tr nh mc la 120[ ] va hang so K bang 2. Mach
cau c cung cap ien ap 10[V]. Khi thanh dam khong chu tai, cau c can bang nen ien ap ra bang 0[V].
Khi o lc c cung cap len thanh dam, va ien ap cau at ti 0,0005[V]. Xac nh lc tac dung len thanh
dam.
Giai.
au tien, dung bieu thc (5.21) e tnh s thay oi ien tr cua day o bien dang bi lc tac dung:
4 R.V 4.120[].0,0005[V ]
R
=
= 0,024[] .
VS
10[V ]
Tiep theo, dung bieu thc (5.14) e tnh o gian dai (bien dang) cua day o (no b gian dai ra bao nhieu):
R R 0,024 120
=
=
= 0,0001[in. / in.] .
2
K
Cuoi cung, dung bieu thc (5.22) e tnh lc lc tac dung len thanh dam. Viec nay oi hoi phai tra bang tr so
modul Young. T bang 5.3 ta tm c no la 30.000.000 [lb/ in 2 ] oi vi vat lieu thep. The no vao bieu thc
(5.22) ta co:
= E. = 30.10 6 [lb / in 2 ].0,0001[in / in] = 3000[lb / in 2 ] .
Ket qua nay cho ta thay rang lc keo cang tren thanh dam la 3000 [lb/in 2 ], va bi thanh dam co tiet dien
ngang la 2 [ in 2 ] nen lc cang toan phan tren thanh dam la 6000 [lb/in 2 ].
Hnh 5.4 Phep o lc cang trong thanh dam thep bang day o bien dang (v du 5.1.1).
V du 5.1.2 (lam lai vi n v o SI)
Mot day o bien dang va mach cau c dung o lc cang trong mot thanh dam thep co tiet dien ngang la
13[ cm 2 ]. Day o bien dang co ien tr nh mc la 120[ ] va hang so K bang 2. Mach cau c cung cap
10[V]. Neu thanh dam khong phai chu tai th cau can bang va ien ap ra bang 0[V]. Khi tac dung lc len
thanh dam th ien ap cau at en 0,0005 [V]. Tm lc tac dung len thanh dam.
Giai.
au tien hay tnh s thay oi ien tr day o bien dang do tac dung lc.
4 RV 4.120[].0,0005[V ]
R
=
= 0,024[] .
VS
10[V ]
Tiep theo, hay tnh o gian dai (bien dang) cua day o bien dang:
R R 0,024 120
=
=
= 0,0001[cm / cm] .
2
K
15
Cuoi cung, s dung bieu thc (5.24):
E=
e tnh toan lc tren thanh dam. Viec nay oi hoi phai tra tm tr so cua modul Young. T bang 5.3 ta tm c
no bang 20,7.10 6 [N/cm 2 ] oi vi thep. Bien oi bieu thc (5.24) ta co:
= E. = 20,7.10 6 [ N / cm 2 ].0,0001[cm / cm] = 2070[ N / cm 2 ] .
Ket qua nay co ngha la lc keo cang tren thanh dam la 2070 [N/cm 2 ], va bi thanh dam co tiet dien la
13[ cm 2 ], nen lc cang toan phan trong thanh dam la 26.910 [N].
Ve mat cong nghe che tao va lap at, co hai dang phan t day o bien dang:
Day o bien dang kieu ghep chat bounded wire; va:
Kieu khong ghep chat unbounded-.
Cac day o bien dang kieu ghep chat co the dang si day tr hay dang mang mong ien tr hay ien dan
(hnh 5.5). Phan t day o kieu khong ghep chat gom mot si day tr cang gia hai iem (xem hnh 5.7), va
co the c tao hnh ngay trong qua trnh lap at cam bien, nhat la oi vi nhng ng dung chuyen biet.
Trong ng dung thc te, cac day o bien dang thng khong trai thang ca chieu dai ma xep theo hnh nh
trong hnh 5.5. Viec che xuat nhng cam bien co dan an hoi kieu day tr strain gauge nh vay la tng oi
tien dung. Cong nghe an mon ien hoa cho phep thc hien nhng phan t bien tr dang mang, co nhieu hnh
dang tuy theo nhng ng dung khac nhau. Day o bien dang kieu nay bao gom mot day kim loai c tao
mau sao cho o nhay dan dai elongation u tien theo mot hng. Cac day o bien dang san co t mot vai nha
thiet ke mau vendors, va in an thanh hang tram hnh mau mang mong co the chon la, cac mau hnh khac
nhau cho ta o nhay bien dang theo nhng hng khac nhau. Hnh 5.5b gii thieu mot so mau mang ien tr
bien dang.
Hnh 5.5 a). Nguyen ly bien tr an hoi kieu day tr: (a) Nen cam bien;
(b) Day tr; (c) Day noi ra; (d) e; (e) Vat lieu ket dnh.
b). Phan t mang bien tr bien dang an hoi.
e lam vat lieu bien tr an hoi, ngi ta chon nhng hp kim co he so nhiet cua ien tr ac trng rat nho.
o la cac hp kim ong-nickel (constantan), nickel-chromium (nichrom), sat-nickel, platin-wolfram, vv Ben
canh nhng co gang loai tr anh hng nhiet o len ien tr day o, ngi ta cung co gang khac phuc anh
hng s thay oi kch thc cua vat the do bien ong nhiet o, nhng viec nay kha la kho khan, ch co the
thc hien trong mot pham vi nho. oi vi nhng trng hp tai ong, v nh viec ghi nhan nhng rung ong,
16
ngi ta s dung nhng hp kim ac biet. Vat lieu nen va chat keo dan la a dang, oi hoi phai co kinh
nghiem la chon va s dung.
Co le phng an pho bien nhat la day o kieu mang mong foil-type, c che tao bang ky thuat quang-khac
photo-etching, dung cung loai vat lieu hp kim nh kieu day si (nh constantan, nichrom, sat-nickel, platinwolfram, vv).
Cac cam bien da tren c s cong nghe mang bien dang foil strain gage c thiet ke theo y niem danh cho
phep o chnh xac trong lng tnh hay lc hoac tai trong chuan ong hoc quasi-dynamic. Thiet ke cac cam
bien kieu mang bien dang bao gom nhng ket cau c thiet ke ac dung e van hanh theo kieu co the d
bao trc va co kha nang lap lai khi tac dung lc, tai trong hay trong lng.
Cac kieu cam bien bien dang an hoi.
Bo phan c kh thiet yeu nhat cua moi cam bien day o bien dang la phan t an hoi spring element . Theo
thuat ng chung, phan t an hoi lam viec nh c cau phan ng lai vi tac dung lc, tai trong hay trong lng.
Co nhng no lc nhat the hoa uniform phan t, tnh toan ng day bien dang cho phep o chnh xac bi day
o bien dang gan ket bonded. Co ba dang ket cau thiet ke s dung trong cong nghiep, la dang thanh dam
bending beam, dang cot column va dang trt shear, chung ta se khao sat cu the hn phan sau.
Hnh 5.6a gii thieu mot cach khai quat phep o lc dung cac cam bien bien dang an hoi. ay lc tac dung
c tiep nhan bi mot ong hnh tru (1), at tren e cng (2). iem at cua lc tac dung len au o phai sao
cho thch hp, cang tap trung thanh iem cang tot. Tuy nhien may o dung phan t bien dang an hoi (A va
C, B va D) cung phai c at xa iem tac dung lc, bi neu khong th o ep nen se khong trung thc. Hnh
5.6b la cau truc nguyen ly mot phan t cam bien lc keo. Hnh 5.6c gii thieu mot kieu cau truc may o lc
co phan t cam bien an hoi dang vong. Trong o, vat the an hoi (1) co dang vong tron gan cac phan t bien
dang an hoi (2), (3), (4), (5).
Hnh 5.6 Phep o lc dung phan t bien dang an hoi.

Day o bien dang kieu khong ghep chat unbounded wire (hnh 5.7) gom mot si day dan cang gia hai iem.
Lc tac dung len si day (tiet dien = A; chieu dai = L; ien tr suat = ) se lam day gian ra hay co ngan lai,
lam ien tr tang hay giam mot cach ty le (xem bieu thc (5.6) va (5.15)). ay, he so day o K bang 2,0
4,5 oi vi kim loai, va hn 150 oi vi cac chat ban dan.
ai lng vi sai ty oi (khong n v) L L la so o lc tac dung len day va c bieu dien microstrain
(1 e = 10 6 cm/m), cung nh cach bieu dien phan trieu parts-per-million (ppm). T bieu thc tren, lu y rang
he so day o ln hn th ket qua tng ng la ien tr se thay oi nhieu hn do o o nhay cung cao hn.
Day o bien dang kieu ghep chat bonded wire (hnh 5.8) gom mot si day manh hay mang mong ien dan
c xep theo mau hnh ong dien coplanar (thanh hnh det tren mot mat phang) va c o chat gan
cemented thanh nen e base hay vat mang carrier. Thong thng, day o c lap at sao cho chieu dai cua
phan ien dan cang thang hang cang tot vi hng ng suat can o. Cac day dan noi ra c kep vi e nen
va a ra ngoai e mac mach. Cac dung cu ghep chat la kieu c coi co tnh thc dung hn va c s dung
rong rai hn so vi cac dung cu kieu khong ghep chat.
Phng an day o ghep chat kieu mang mong foil-type (hnh 5.9), c che tao bang ky thuat quang-khac
photo-etching, dung cac mang hp kim (constantan, nichrom, sat-nickel, platin-wolfram, vv). Cac day o co
17
phan t cam bien dang si co dien tch be mat nho so vi mau th specimen, ieu o han che dong ro nhiet
o cao va cho phep ien the cach ien cao hn gia phan t cam bien va mau th. Ngc lai, cac phan t
mang mong co ty le dien tch be mat va thiet dien (mat cat) ln hn va co ac tnh on nh hn di ieu kien
nhiet o cc tr (cc cao hay cc thap) va kha nang chu tai lau ben hn. Dien tch be mat ln hn va thiet
dien manh hn cung cho phep dung cu co kha nang doi theo nhiet o cua mau th va gia tang o tan nhiet t
than cua no.
Hnh 5.7 Day o kieu khong ghep chat.
Hnh 5.8 Day o kieu ghep chat.
Hnh 5.9 Day o bien dang kieu mang mong kim loai.
Cac day o bien dang ban dan s dung hieu ng tr khang ap-ien trong mot so chat ban dan nhat nh nh
silicon va germanium, co o nhay cao hn va mc tn hieu ra ln hn. Cac day o ban dan co the c che
tao e co nhng thay oi hoac dng hoac am khi bien dang (ng dung mang vat lieu ban dan silicon hay
germanium khong tiep giap loai p- hay loai n-). Chung co the c che xuat dang vat ly kch c nho (te vi)
nhng van gi c tr so ien tr nh mc. Day o bien dang ban dan vi cau o co the co o nhay gap 30
lan so vi cac cau o dung cho mang mong kim loai, nhng chung cung nhay vi thay oi nhiet o moi trng
va kho bu. S thay oi ien tr cua cau o vi day o cung khong tuyen tnh. Chung khong c ng dung
rong rai bang cac dung cu mang mong kim loai, on nh hn oi vi cac muc tieu can o chnh xac cao. Tuy
nhien, nhng cho o nhay mi quan trong va nhng bien ong nhiet o la nho th chung co the c u tien
hn. Viec trien khai o lng cung c thc hien tng t nh oi vi cac cau o mang mong kim loai,
nhng t nghiem ngat hn, bi chung co mc tn hieu ra cao hn va o chnh xac bien cam giam.
Bang 5.4 a ra nhng so lieu so sanh thong so cua hai kieu day o bien dang thong dung nhat hien nay: o
la day o bien dang kim loai va day o ban dan tren nen silicon (ma phan tren a neu s lc ve cac day o
bien dang ban dan silicon e so sanh, chi tiet hn se c khao sat phan sau, muc 5.1.2).
Bang 5.4 So sanh day o bien dang mang mong kim loai va ban dan.
Thong so
Day o bien dang kim loai
Day o bien dang ban dan
Pham vi o, [ c]
0,1 40.000
0,001 3000
18
50 200
He so day o
2,0 4,5
ien tr, [nn]
120; 350; 600; ; 5000
1000 5000
Dung sai ien tr, [%]
0,1 0,2
1 2
Kch thc, [mm]
0,4 150 (tieu chuan: 3 6)
1 5
Cac day o bien dang o lc, nh trong hnh 5.10, trong ket cau thanh dam beam co khung g cantilever, khi
chu tac dung lc se b lech nhe hay uon cong. Bon day o bien dang c dung e o o uon cua thanh dam,
hai day mat tren, hai day mat di. Cac day o c noi vi mot mach cau o toan phan. Cau truc mach
cau nay cho o nhay toi a va von la tuyen tnh. Cau truc mach cau nay cung cho phep hieu chnh bac nhat
first-order oi vi hien tng troi nhiet o trong tng day o rieng le.Cac day o bien dang la dung cu tr
khang thap; chung oi hoi phai co nguon kch thch cong suat ln e co c mc ien ap ra thch hp. Mot
cau o te bao tai trong da tren c s day o bien dang ien hnh co tr khang la 350 (ien hnh) va c
ac trng la co o nhay c vai millivolts tren toan thang o oi vi ien ap kch thch mot volt.
Hnh 5.10 Day o bien dang trong cam bien lc dang thanh dam.
Te bao tai trong c to hp t bon day o bien cam mac thanh mach cau nh trong hnh 5.11. oi vi ien
ap kch thch cho cau bang 10 [V] , th cau o vi o nhay 3 [mV/V] se co tn hieu 30 [mV] khi tai het thang o.
Co the lam tang tn hieu ra bang cach tang ien ap nguon cung cap cho cau, nhng hieu ng phat nhiet t
than se gii han cach tiep can o: chung co the gay nen cac ch so o sai hoac tham ch lam h hong may o.
Nhieu te bao tai trong co nhng au noi nhay cho phep mac cac mach ien t chuan hoa tn hieu e bu tr
ien ap mot chieu DC rt tren ng day. Mot vai te bao tai trong co them nhng ien tr trong co the ieu
chnh e bu nhiet.
Hnh 5.11 Te bao tai trong 6-day.

Cac dang ket cau cam bien c ban.
Cam bien dang thanh dam Bending Beam.
Cac phan t an hoi cua cam bien dung ket cau thanh dam la thong dung nhat (hnh 5.12). o la bi v thanh
dam la ien hnh ket cau bien dang cao, thanh phan ket cau lc thap, co hai be mat oi dien nh nhau e gan
day o bien dang. Thiet ke dang thanh dam c s dung mot cach ien hnh trong cac te bao tai trong load
cell cng o thap.
19
Hnh 5.12 Ket cau dang thanh uon.

Hnh 5.13 Xac nh truc cua te bao tai trong.
Cac che xuat cong nghiep oi vi te bao tai trong tuan thu cac nh ngha ve truc cam bien Axis and Sense
Definitions cua NAS-938 (National Aerospace Standard-Machine Axis and Motion), thuat ng ten goi va cac
hng dan cua Uy ban day o bien dang mien Vien Tay (Western Regional Strain Gage Committee). Cac truc
nay c xac nh theo ngha he toa o vuong goc la ban tay phai nh sau: Mot dau (+) ky hieu lc theo
hng tao ra tn hieu ien ap dng (+) va noi chung lc tac dung xac nh la lc keo. Truc quay ban au
hoac truc oi xng hng ban knh cua mot te bao tai trong la truc z, minh hoa trong hnh 5.13.
Dang cot Column.
Te bao tai trong dang cot (hnh 5.14) la kieu bien cam day o co sm nhat. Mac du ket cau n gian, phan t
an hoi dang cot oi hoi mot so nhan thc ve thiet ke va ng dung. Cot phai u dai so vi tiet dien cua no sao
cho day bien dang cua cam bien co dang nhat the hoa. Trong ng dung, ngi s dung cuoi cung phai biet
c cac hieu ng phu, bi te bao tai trong dang cot nhay cam vi cac hieu ng tai trong ngoai truc off-axis
loading.
Dang mang trt Shear-Web.
Nguyen ly cua te bao tai trong dang mang trt shear-web ien hnh co dang thanh beam co g cantilever
c thiet ke vi tiet dien ln hn bnh thng so vi tai trong nh mc phai mang, nham han che uon cong
ket cau (hnh 5.15). Trong ieu kien nh vay, bien dang be mat doc theo au thanh dam se qua thap e day
o bien dang co the tao mot tn hieu ien ra tng xng. Tuy nhien, neu cac day o bien dang c at tren
hai mat thanh dam truc gia, ni ng suat uon bang 0 th trang thai ng suat tren mat thanh dam la dang
trt n thuan, tac ong theo hng ng va hng ngang.
Hnh 5.14 Ket cau dang cot.
Hnh 5.15 Ket cau dang mang trt.
Tren c s cac nguyen ly ket cau neu tren, cac cam bien o lc kieu day o bien tr c hien thc hoa trong
ng dung theo cac dang neu di ay. Viec chon la va ac trng mot cam bien kieu day o bien dang la
viec au tien phai lam. Cac nhan thc ng dung ien hnh bao gom nhng quan tam ve moi trng, o ln tac
dung lc, tai trong hay trong lng can o, o chnh xac, nhng han che rang buoc ve kch thc, tnh tch hp
c hoc, s hien dien cua nhng lc hay tai ngoai lai, va nhng yeu cau ky thuat ng dung ac trng khac.
Ky thuat ng dung.
Dang chc nang chung.
Cac te bao tai trong chc nang chung (hnh 5.16) c thiet ke cho nhng ng dung a dang trong cong
nghiep oto, hang khong, va cong nghiep hang dan dung. Te bao tai trong chc nang chung, nh ten goi cho
20
thay, c thiet ke thiet thc t nhien. Trong th trng te bao tai trong chc nang chung co mot vai tieu
chuan phan biet, o la: o chnh xac, tnh a nang, thang o trong lng, va ng dung chuyen biet.
Cac te bao tai trong a nang la loai thong dung nhat trong cac che xuat cong nghiep. Cac te bao tai trong tnh
nang chung phu hp cho nhng ng dung o lc trong pham vi rong, ke ca can o, th nghiem may o ong
hoc dynamometer, va cac may th nghiem vat lieu. a so cac thiet ke nay lam viec vi ca lc keo va lc nen,
va cho o chnh xac va ga tr o cao.
Hnh 5.16 Te bao tai trong tnh nang chung.
Hnh 5.17 Te bao tai trong nh lng moi.
Dang nh lng o moi Fatigue Rated.

Cac te bao tai trong nh lng o moi (hnh 5.17) ac biet c thiet ke va che xuat e co the chu ng
hang trieu chu ky chu tai. Nhieu nha san xuat li dung cac loai thep co kha nang khang moi cao va cong
nghe x ly vat lieu ac biet e bao am tch hp nhng tnh nang ky thuat ien va c hoc cao, cung nh o
chnh xac. Cac te bao tai trong nh lng o moi ien hnh am bao trong suot 100 trieu chu ky nghch ao
hoan toan (keo cang hoan toan qua 0 ti nen hoan toan). Mot tien ch na cua cac te bao tai trong dang nh
lng moi la chung oi khang cc ky tot vi s uon cong ngoai lai va cac lc tai ben ngoai.
Cac te bao tai trong dang nh lng moi c thiet ke ac biet e th nghiem o moi cua cac bo phan may
moc hay san pham gia cong, hoac trong ng dung bat ky khi co nhng tai trong cao co tnh chu ky. Tat ca cac
te bao tai trong nh lng moi eu c am bao chong tai hong hoc do moi suot hn 100 trieu chu ky
nghch ao lap lai. Nhng te bao tai trong tho nay c che xuat bang cach s dung nhng loai thep nhiet
luyen, co kha nang chong moi, kim loai quy hiem. Cac cho uon ben trong c thiet ke ky cang nham han
che dien tch tap trung ng suat. S chu trong ac biet c danh rieng cho viec la chon va lap at thch hp
day o bien dang ben trong va viec quan day e am bao tuoi tho toi a. Cac te bao tai trong nh lng moi
co nhieu kieu dang ket cau khac nhau.
a).
b).
c).
Hnh 5.18 Cac dang ien hnh: a).Te bao tai trong rong; b). Te bao tai em; c). Te bao tai nhan.
Dang rong Hollow, dang vong em Washer, dang nut nhan Button Cac te bao dang tai nen rong hollow
compression load, dang tai em load washer va dang tai nhan load buttons la nhng chon la thong dung khi
ng dung oi hoi mot cam bien nho gon compact. Nhng cam bien nay san co trong mot pham vi rong kch c
va tnh nang. Cac te bao tai trong dang nen rong co ch trong nhng ng dung oi hoi tai trong xuyen qua trc
tiep te bao. Dang tai em co the dung xac nh lc kep oi vi moment xoan tren cac kieu au kep. Dang tai
21
nhan co mot be mat tai trong tch hp hnh cau va noi chung c dung o tai nen trong cong nghiep che tao
va trong cac th nghiem.
Dang a thanh phan Nhng cam bien nay dung o ong thi cac lc a thanh phan multiple forces va
moments lc ch bang mot bien cam. Cac ng dung a thanh phan bao gom th nghiem o moi cua may, th
nghiem tnh ong eu vanh banh xe tire uniformity va nhng eu cau th nghiem oto. ien hnh la co nhng
bo phan thu nhan hay cap noi rieng le c cung cap cho tng truc, hoac tng kenh o. oi hoi phai co mot
s phan tch cau truc ky lng e cach ly cac lc tac dung va moments tao ra trong giao thoa nhieu cross-talk.
Cac phan t cam bien dang nay san co mot loat cac ket cau va to hp cac phep o lc va moments.
Hnh 5.19 Te bao tai trong a thanh phan ien hnh.

Dang chuyen dung Special Application..
Cac te bao tai trong chuyen dung la nhng te bao tai trong c thiet ke cho nhng nhiem vu o lc ac biet,
duy nhat. Cac te bao tai trong chuyen dung co the co truc n hay nhieu truc.
Cac cam bien o lc thap. Phan t cam bien ien dan.
Cac cam bien tai trong o lc c hoc. Cac lc co the ln hay nho ln th nh trong can o cac oi tng
nang (can ca bon cha, xem hnh ), hay nho nh trong viec phat hien cac ap suat xuc giac lc thap.
Bien cam o lc kieu day o bien dang (goi la te bao tai trong load cells) c che san nh mot khoi oc lap
co the lap rap vao bat ky cho nao trong he. Mot te bao tai trong co the bao gom hai day o bien dang (day
tch cc va day bu) va mot mach cau (xem cac hnh 5.3; 5.4; 5.10; 5.11). ng dung ien hnh oi vi cac te
bao tai trong la kiem tra trong lng cua bon cha. Bon cha c at len ba hoac bon te bao tai trong, nen
trong lng cua bon la tong tn hieu ra cua cac te bao tai trong (xem hnh 5.20).
Hnh 5.20 Can be cha dung bo te bao tai trong..

Trong cac trng hp o lc tac dung nho nh trong cac cam bien xuc giac, co s bien dang nhe bi lc tac
dung thap, th phep o ma cac cam bien o lc thc hien, thng khong phai la o lc mot cach trc tiep.
ien hnh la s bien dang nay rat nho. Mot khi lng chuyen dch sc cang tension (gian n stretching) hoac
chuyen dch lc nen compression (ep nen squeezing) c o lng, th co the tnh toan c lc gay ra no
bang cach dung cac thong so c hoc cua he. Ty le cua lc tren bien dang la hang so oi vi moi loai vat lieu,
nh nh luat Hook xac nh bang:
F = K .X ;
(5.25)
22
ay: K hang so an hoi spring constant cua vat lieu; F lc tac dung; X o dan n hay o ep nen nh
ket qua tac dung lc.
V du, neu mot bo phan c kh co hang so an hoi la 1000 [lb/in.] va no b nen 0,5 [in.] di mot lc, khi o
tai trong phai la 500 [lb].
Cam bien xuc giac thuoc loai cam bien ien dan, loai bien cam chuyen oi lc va ap suat ac biet, co be mat
rat mong, dung nhng cho lc va ap suat gia hai mat cach biet lan can nhau, v du nh trong tay may, ban
phm may tnh, man hnh tiep xuc, trong y sinh, vv
Hnh 5.21 gii thieu mot cam bien xuc giac n gian, theo nguyen ly bien oi ien dan, bang hai la mong dan
ien ghep tren mot mieng em co lo hnh dang thch hp. Khi co lc tac dung len la dan tren, no b uon
xuong cham la di va tiep xuc dan ien noi mach at, ien ap au ra bang 0 chng to co lc tac dung. La
dan co the che tao dang mach in tren nen chat deo (nh ban phm may tnh).
Hnh 5.21 Cam bien xuc giac bang mang chuyen mach ien dan.
Hnh 5.22 gii thieu mot dang khac cua cam bien xuc giac ien-dan an hoi, da tren c s nguyen ly la ien
tr tiep xuc thay oi theo dien tch be mat tiep xuc an hoi di tac dung cua lc nen. Chat ien-dan an hoi
la nhng vat lieu an hoi co cac hat hoac si dan ien nh cao-su silicon, polyurethan, hay chat long nhay
ap suat. Nhc iem cua no la be day cam bien phai c 1 [mm].
Hnh 5.22 Cam bien xuc giac an hoi: a). Cam bien; b). ac tuyen.
Ngay cang co nhieu ng dung oi hoi cam bien lc thap. V du, hay hnh dung yeu cau o nhay oi vi mot
tay gap robot e gi ly nc ma khong trt tay va khong hat o no. Cac day o bien dang co the o cac lc
nho neu chung c lap tren mot chat nen deo elastic substrate, giong nh cao su khi o mot lc nho se gay
ra mot s uoin lech ang ke va lam thay oi ien tr. Giai phap khac la phai cau truc mot cam bien lc nho
co lo xo va mot chiet ap dch chuyen thang (hnh 5.23). Lo xo b nen mot khoang ty le vi lc tac dung, va
khoang cach nay c o bang con trt pot.
23
Hnh 5.23 Cam bien xuc giac dung con trt thang tai trong lo xo.
V du 5.1.3
Xay dng ket cau mot cam bien lc vi nhng thong so ky thuat sau:
Pham vi o: 0 30 [lb];
o bien dang: 0,5 [in.] (toi a);
Tn hieu ra: 0,1 [V/lb]
Chuyen dch thang con trt mot khoang bang 1[in.] tng ng 1[ k ].
Giai.
S dung minh hoa hnh 5.23, thoat tien ta can ac trng lo xo. ac tnh lo xo la bien dang 0,5 [in.] vi lc tac
dung 30 [lb]. Nh vay, hang so lo xo an hoi K bang:
30[lb]
K=
= 60[lb / in.] .
0,5[in.]
Biet rang ta can mot lo xo co he so an hoi K=60[lb/in.], co the tra so tay tra cu lo xo e chon.
o nhay mong muon la 0,1 [V/lb] at ieu kien cho ta la tn hieu ien ap ra toi a phai c 3 [V] khi tac dung
lc la 30 [lb]: ien ap tai cc ai bang 30[lb].0,1[V/lb]=3[V].
Cuoi cung, ta phai xac nh ien ap nguon cung cap tren con trt. Con trt a ra 3[V] khi no dch chuyen
0,5[in.] (mot na khoang chay con trt). Mot ty so co the dung e tm ra ien ap cung cap cho con trt chay
mot khoang 1[in.] la:
3[V ]
X
.
=
0,5[in.] 1[in.]
X = 6[V ] .
T o, ien ap nguon cung cap phai la 6[V]. Hnh 5.24 minh hoa cau hnh cam bien nay.
Hnh 5.24 at nh mot cam bien xuc giac (v du 6.1.3).

Mot cam bien o lc nho dang xuc giac co the c che tao bang cach dung chat xop ien dan. o la nguyen
ly c dung trong cac ban phm kieu mang minh hoa tren hnh 5.25. Chat xop ien dan la chat lieu cao su
xop nhe bao hoa cac hat carbon rat nho. Khi chat xop b ep, cac hat carbon b nen lai vi nhau, va ien tr vat
lieu giam xuong. Nh vay, theo mot kieu nao o, ien tr ty le vi lc. Hien thi th khai niem nay a tm
c ng dung han che trong nhng th nh ban phm may tnh; bi tnh n gian va gia thanh thap cua no,
tuy nhien, o cung la phng cach song ong cho nhng ng dung khac nh cac cam bien xuc giac cua robot.
24
Cuoi cung, mot cam bien xuc giac rat n gian co the che tao bang hai hay nhieu hn cac chuyen mach gii
han (contact c) c rap ke can vi cac c cau chap hanh lo xo c at nh e m nhng ap suat khac
nhau. Khi ap suat tang len, chuyen mach au ong mach, roi khi ap suat ln hn th chuyen mach tiep theo se
ong, va c vay tiep tuc.
Hnh 5.25 Cam bien xuc giac kieu mang xop ien dan.
o thuoc dang phan t cam bien ban dan an hoi silicon, ma phan tiep sau se trnh bay chi tiet hn.
5.1.2 Phan t bien dang an hoi ban dan.
Phan t cam bien dang ban dan silicon.
Ben canh nhng phan t bien tr dang day o bien dang Strain Gage va mang tr bien dang Thin Film Strain
Gages, th nhng bien tr ban dan Silicon Strain Gage cung rat pho bien. ay ng dung thuoc tnh thay oi
ien tr theo bien dang c hoc cua mang vat lieu ban dan silicon loai p- hay loai n-. Cac phan t dang nay
pho bien la vi mach bien tr silicon (silicon chip) dung o ap suat.
Nhng khoi cam bien nay thay oi ien tr khi co lc tac dung va c 25 100 lan nhay hn day o bien dang
kieu day ien tr kim loai ghep chat. Mot day o bien dang ban dan la mot vach n vat lieu silicon c gan
ket thanh mot ket cau. Khi ket cau b dan ra, silicon b gian dai va ien tr t au no ti au kia se tang len
(tuy nhien, s thay oi ien tr khong tuyen tnh).
Phan biet hai dang ban dan:
Phan t vi mach silicon c khuyech tan hay cay (plana) lp ien tr;
Phan t vi mach silicon ap mat sau cua mang an hoi bang kim loai quy.
Loai th hai co ac iem la ban than linh kien vi mach silicon khong tiep xuc trc tiep vi moi trng o, ac
biet la khi dung trong moi trng xam thc, an mon, c mang kim loai quy ngan cach e bao ve tnh nang
bien oi ien tr cua phan t cam bien.
oi vi phan t vi mach bien tr, lc tac dung lam bien dang mang silicon bo phan cau thanh c ban cua
phan t cam bien. Hnh 5.26 gii thieu nguyen ly cau truc phan t cam bien nay. Phan sau, khi noi ve cac
phan t cam bien o cac dang ap suat khac nhau se neu chi tiet hn ve ket cau cac cam bien theo nguyen ly
nay (xem them cac hnh 5.65 5.69).
Hnh 5.26 Nguyen ly cau truc phan t vi mach bien tr silicon.
25
Hnh 5.27 Day o bien dang mang mong. (Courtesy of Vishay).

Trong nhng nam lai ay a phat trien nganh cong nghiep che tao va th trng cac loai day o bien dang
mang mong va ca nhng cong cu va thiet b can thiet e ghep noi nhng day o nay vi cac ket cau c kh
khac nhau. Hnh 5.27 la anh chup mot day o bien dang kieu mang mong. Day o bien dang kieu nay bao
gom mot day kim loai c tao mau sao cho o nhay dan dai elongation u tien theo mot hng. Cac day o
bien dang san co t mot vai nha thiet ke mau vendors, va in an thanh hang tram hnh mau mang mong co the
chon la. Cac mau hnh khac nhau cho ta o nhay bien dang theo nhng hng khac nhau. Vai nam lai ay,
nhieu li ch a c rut ra t thc te la chat silicon co phu gia doped silicon la chat ien dan co he so day o
ln hn 200 tuy theo lng phu gia pha tap. ieu nay tao c hoi che tao cac day o bien dang ien dan silicon
va dung chung e tao ra cac cam bien nhay hn la che t bat ky vat lieu nao khac.
Phan t cam bien ap-ien piezoelectric.
Nguyen ly cam bien dang khoi tinh the. Mot dang phan t bien dang an hoi ban dan la cam bien ap-ien
piezo, ng dung hieu ng ap-ien trong tinh the piezo s phan cc cua cac tinh the co tnh oi xng nao o
khi chu tac dung ng suat, the hien s xuat hien cac ien tch trai dau tren cac mat oi dien cua tinh the khi
b lam bien dang (nen hay keo) theo phng vuong goc vi cac mat. S bien dang tinh the dan en s xuat
hien cac ien tch be mat. Do vay, nguyen ly o ay la o ien tch tren be mat ban tinh the ap-ien piezo
khi tac dung lc len be mat vuong goc cua no.
Trong hn 100 chat ap-ien, cac tinh the ap-ien pho dung trong ky thuat la thach-anh, tinh the ap-ien t
nhien tuamalin, cac muoi senhet,
Hnh 5.28 gii thieu nguyen ly mot phan t cam bien lc thach-anh. Phien thach-anh c noi vi bo khuyech
ai co phan hoi dng tao dao ong tinh the thach-anh vi tan so c ban f 0 va o lech tan khi co tai f:
Knf 02
;
D
ay: K hang so; n so mode; D kch thc tinh the.
f = F
(5.26)
Hnh 5.28 Nguyen ly phan t cam bien ap-ien thach-anh.

e bu anh hng nhiet o len bien thien tan so, co the s dung tinh the kep, trong o mot na dung e bu
nhiet o. Moi bo cong hng c noi vi mach dao ong cua no va tan so tong c tr cho nhau.
Cac cam bien lc kieu thach anh ap-ien c thiet ke theo y niem phu hp cho phep o ong hoc cac dao
ong lc, lc va ap impact, hay cac lc keo/nen tan suat cao. C s thiet ke da tren nguyen ly hieu ng apien, cac ng suat c hoc hien dien c chuyen oi thanh ien tch tnh ien tch tu tren be mat tinh the
(hnh 5.29).
26
Hnh 5.29 Hieu ng ap-ien piezoelectric.

Cac tinh the thach anh ap-ien ch tao ra ien tch tnh ien khi c cung cap lc hay lc tac dung b lay ra
khoi chung. Noi cach khac, neu cung cap mot lc tnh len mot cam bien lc kieu ap-ien, th ien tch tnh
ien ban au c tao nen au ra ket cuc la se ro thoat va au ra cam bien cuoi cung lai tr ve 0.
Toc o ro thoat ien tch tr ve 0 bien thien dang ham mu va tuy thuoc hang so thi gian phong ien DTC
discharge time constant cua cam bien. Hang so thi gian DTC la khoang thi gian can thiet e cam bien va he
o lng phong tn hieu xuong ti 37% gia tr ban au, neu kch thch au vao dang bc nhay n v. Tr so
nay (tnh bang giay s) thng biet trc va c xac nh bang cach nhan tr so thap nhat cua ien tr lp
cach ien (tnh bang ohm) vi ien dung toan phan (tnh bang farad) cua he mac trc mach khuyech ai.
(ieu nay ung oi vi moi cam bien ap-ien, bat ke van hanh la o tac dung lc, o ap suat hay rung ong).
Hang so thi gian DTC cua mot he co lien quan trc tiep ti kha nang kiem soat tan so thap cua he. Chnh v
ac tnh nay ma cac cam bien lc kieu ap-ien ch c s dung trong cac phep o chuan tnh quasi-static
ma khong the dung cho cac ng dung o trong lng.
e giup minh hoa ban chat ac tnh hang so thi gian phong ien DTC, gia thiet rang mot trong lng nao o
at len au mot cam bien lc ap-ien. Thoat tien, cac tinh the cam bien ap-ien se tao ra ien tch Q, nhan ra
ngay lap tc au vao cua bo khuyech ai (mac ngoai hoac tch hp ben trong cam bien). Tuy nhien, sau tn
hieu vao ban au dang bc nhay nay, tn hieu ien tch se giam dan theo bieu thc:
q = Q.e t RC ;
(5.27)
ay: q ien tch tc thi (tnh bang Coulomb [C]); Q ien lng ban au (tnh bang Coulomb [C]); R
ien tr vao cua bo khuyech ai (tnh bang ohm [ ]); C ien dung toan phan ca vao bo khuyech ai (tnh
bang Farad [F]); t khoang thi gian tnh t thi iem 0 (tnh bang giay [s]); e so t nhien ( = 2,718).
Hnh 5.30 la o th minh hoa bieu thc nay. Tch so RC the hien hang so thi gian DTC (tnh bang giay [s])
cua cam bien. o th cho thay hang so thi gian DTC cang dai th cam bien cang co kha nang doi theo nhng
s kien lau hn mot cach chnh xac hn. Noi chung, cac cam bien lc kieu ap-ien co tch hp ben trong cac
bo phan ien t co the co hang so thi gian bien thien t vai giay ti hn 2000 giay. Co the ieu chnh c
hang so thi gian bang cach thay oi tr so ien tr R mach tch hp trong cua cam bien.
Hnh 5.30 Suy giam do hang so thi gian.

Cac cam bien kieu ien tch ma khong co mach ien t tch hp ben trong oi hoi phai co bo khuyech ai
ngoai (bo khuyech ai ien tch) e at nh hang so thi gian DTC. Mot so bo khuyech ai ien tch co san
kha nang ieu chnh c hang so DTC.
27
Mot trong nhng u the khac cua silicon la vai nam lai ay a co s phat trien ky thuat cham khac etching
cho phep che tao cac c cau vi-c t nhng chat nen silicon wafers. Noi chung, c noi ti nh cong nghe
che tao silicon vi-c-ien t, cong nghe nay s dung ky thuat tao mau va ky thuat x ly cua nganh cong
nghiep ien t e nh dang va che tao cac cau truc vi-c.
Hnh 5.31 Bo lu tr d lieu c-nhiet AFM.

(Thesis cua Ben Chui, PhD, cong bo 1998).
Cong nghe vi-c co the dung e che tao cac cam bien ien tr ap-ien dang khung g cantilever ng dung
trong pham vi rong. Nghien cu gan ay (cua Ben Chui Stanford va John Mamin IBM Almaden) a tap
trung phat trien cac cam bien ien tr piezo dang khung g cho nhng ng dung lu tr d lieu. Trong thiet
ke nay, mot khung g ien tr ap ien dai 100 micron c keo doc theo mot a bang polycarbonate vi van
toc 10 [mm/s], bat len bat xuong khi i qua nhng vet in te vi c micron tren be mat a. Y tng nay thc s
can thiet cho chay kim may hat chat lng cao. Mo hnh thiet b gii thieu trong hnh 5.31 minh hoa cac khung
g cantilevers thiet ke cho ng dung lu tr d lieu.
Cung nen lu y cach xac nh pham vi o cua cam bien lc thach anh ap-ien. oi vi cac cam bien co mach
ien t tch hp trong th nha san xuat at nh san pham vi o va co the xac nh bang cach kiem th cac ac
tnh ky thuat cua cam bien. oi vi cac cam bien khong co mach tch hp trong th pham vi o c at nh
bi mach khuyech ai ngoai. Co mot loat cac thoa hiep gia moi kieu loai, do o phai co nhng lu y nhat
nh trong viec chon la cam bien cho mot ng dung cu the (neu phan sau).
Ngay nay, trong ky thuat o lng va ieu khien ng dung mot cach pho bien hai dang cam bien lc kieu apien thach anh:
Kieu ien tch tr khang cao Charge Mode, High-Impedance.
Kieu ien ap tr khang thap Voltage Mode, Low-Impedance.
ay chung ta se i sau khao sat nhng ac iem chu yeu cua hai dang cam bien lc nay, ke ca nhng van
e la chon va ac iem ng dung cua chung.
Cam bien lc ap-ien kieu ien tch tr khang cao Charge Mode, High-Impedance.
Cam bien lc (loai ap-ien) kieu ien tch khi b nen tinh the se tao ra mot ien tch tnh ien. oi vi nhng
muc ch phan tch hay lu ghi chnh xac, ien tch tr khang cao nay phai c truyen dan theo tuyen cap co
o nhieu tap thap, ti mot bo khuyech ai phoi hp tr khang impedance converting amplifier v nh bo
khuyech ai ien tch th nghiem laboratory charge amplifier hoac bo nguon tuy ong source follower. (Co the
ket noi cam bien trc tiep ti thiet b ch th nh may hien song e khao sat cac tac dung lc tan suat cao,
nhng khong thch hp oi vi nhng phep o lc co tnh nh lng hn). Chc nang au tien cua bo
khuyech ai ngoai la chuyen oi au ra ien tch tr khang cao thanh tn hieu ien ap tr khang thap, s dung
c cho nhng muc tieu phan tch hay lu ghi.
Hnh 5.32 la s o mot he cam bien kieu ien tch ien hnh, bao gom: cam bien, cap truyen tap nhieu thap,
va bo khuyech ai ien tch.
Nh a noi tren, trong he cam bien kieu ien tch, cac cam bien khong tch hp bo khuyech ai trong. Do
o, pham vi o va hang so thi gian DTC co the xac nh bang cach at nh bo khuyech ai ien tch ngoai.
Mot ien tr phan hoi lam viec cung vi mot tu ien trong mach khuyech ai thuat toan operational amplifier
28
quyet nh nhng ac tnh nay. Cac bo khuyech ai ien tch kieu phong th nghiem noi chung la co tien ch
thay oi cac tuy chon options pham vi o cung nh la chon hang so thi gian ngan, va hoac dai. (Gia thiet
rang ien tr cach ien cua cam bien lc va ng cap noi ti bo khuyech ai ien tch phai ln hn ien tr
mach phan hoi, bi neu khong th co the xay ra hien tng suy giam chat lng van hanh nh o troi tn hieu.
Do o, e chac chan, phai gi cho cac iem ket noi cam bien vi ng cap sach va kho).
Hnh 5.32 He cam bien kieu ien tch.

Hnh 5.33 He cam bien kieu ien ap.
Cam bien lc ap-ien kieu ien ap tr khang thap Voltage Mode, Low-Impedance.
Cac cam bien o lc kieu ien ap tr khang thap cung thc hien theo cung nguyen ly nh cam bien kieu ien
tch, nhng co tch hp bo khuyech ai vi ien t ben trong. Bo khuyech ai nay dung e chuyen oi tr
khang cao cua tn hieu ien tch lay ra t cac tinh the thach anh thanh tn hieu ien ap tr khang thap dung
cho nhng ng dung phan tch hay lu ghi. Cam bien kieu nay, c nuoi bi mot nguon dong hang rieng
biet, hoat ong tren ng cap ong truc dai thong thng hay bang cap ribbon ma khong b suy giam tn
hieu. Them vao o, tn hieu ien ap tr khang thap khong b anh hng bi nhieu ien ma sat trong cap
triboelectric cable noise (nhieu gay ra bi nhng chuyen dch hay rung ong ng cap) hoac cac chat bam
ban trong moi trng.
Hnh 5.33 trnh bay s o mot he cam bien kieu ien ap hoan chnh.
Pham vi cam bien va hang so thi gian DTC c xac lap bi cac linh kien mach khuyech ai trong cua cam
bien. (Gia thiet rang hang so thi gian DTC cua bo chuan hoa tn hieu ln hn hang so thi gian cua cam
bien).
Cau truc cua cam bien lc kieu ap-ien. Hnh 5.34 mo ta cau truc ien hnh cua mot cam bien lc thach anh
ap-ien thong dung. Ket cau c hoc c ban cua cac cam bien lc kieu thach anh ap-ien thong dung bao gom
cac a mang mong thach anh c kep (sandwiched) gia cac tam nen tren va tam nen di. Mot au
kep stud (hoac oi khi goi la ong noi sleeve) bang hp kim ong-beryllium tng oi deo, an hoi, e kep gi
tam tren va tam di lai vi nhau va lam tai s bo preload cho cac tinh the. Viec tai s bo cho tinh the la can
thiet e chac chan rang cac ban tren va ban di tiep xuc trc tiep vi cac tinh the ap-ien thach anh, am
bao o tuyen tnh tot va co kha nang thc hien cac phep o ca lc keo cung nh lc nen. Sau o toan bo ket
cau phan t cam bien nay c bao trong mot vo boc cng bang thep khong r va han kn e bao ve cac bo
phan ben trong khong b bam ban.
Hnh 5.34 Mat cat cua mot cam bien lc thong dung.
29
La chon va ac trng cam bien lc kieu ap-ien thach anh.

Viec chon la va ac trng ky thuat mot cam bien lc kieu ap-ien thach anh la cong viec ky thuat au tien
c thc hien. Cac nhan thc ng dung ien hnh ke ca o ln, tan so va hng tac dung lc va cac lc can
o. Nhng nhan thc phu them co the ke ca nhng han che ve kch thc, cac ieu kien moi trng va nhng
yeu cau ket hp c hoc. Tnh en tnh a dang cua cac ng dung va cac yeu cau ky thuat, phan ln cac nha
san xuat a ra gii thieu mot loat cac mau kieu dang nham phu hp vi cac ng dung ien hnh. Chung co
the bao gom:
Dang cam bien chc nang tong quat thc hien tai s bo ben trong cho phep o cac lc nen va/hoac lc
keo (hnh 5.35). Cac ng dung ien hnh bao gom th nghiem lc va ap impact, uc lo punching va tao hnh
forming, th nghiem ri nen drop, th nghiem vat lieu, th nghiem o moi fatigue, hien tng gay vat lieu
fracture, cac nghien cu may, phan tch hnh thai lc tac dung modal analysic force input va c-sinh hoc
biomechanics.
Hnh 5.35 Cam bien lc dang chc nang tong quat ien hnh.
Cam bien dang xuyen thau Cac cam bien dang xuyen thau penetration (hnh 5.36) c thiet ke chuyen
dung cho cac phep o lc va ap va lc nen trong cac ng dung th nghiem vat lieu nh th nghiem mu sat
helmet. Co vo boc hnh tru, nhan trn va nap chup caps c lam cong ngan nga cat thung cac mau th cho
phep thc hien cac phep o hieu suat, o bien dang, va o iem gay cua cac chat polymer, composite va cac
vat lieu khac.
Hnh 5.36 Cam bien lc xuyen thau.
Hnh 5.37 Cam bien lc c nho.
Cam bien kch c thu nho Ket cau thu nho cua cam bien cho phep thc hien cac phep o lc va ap, lc
keo, lc nen cng o thap va co ong nang cao (hnh 5.37). ien hnh la hai cau truc, mot co lo lap rap dang
khoa tapped va au va ap impact cap; cau truc khac co cac lo khoa tapped holes ca hai au cam bien. eu
co the cac dang ghep noi link, ghep noi tch hp integrated link, va lap at trang thai t do freestanding
installations. Cac ng dung bao gom ca nhng nghien cu au in matrix, noi day, va th nghiem xung mc
thap hay xung tan so cao.
Cam bien lc va ap Cac cam bien lc va ap (hnh 5.38) c thiet ke chuyen dung cho cac phep o lc
va ap. Mot cach ien hnh, cam bien c lap at theo kieu ga t do co au chup va ap hng thang ti
oi tng ma no se va cham. Nhng ng dung ke ca th nghiem pha v crash, uon day wire crimping va tao
hnh kim loai, nghien cu may, th nghiem va ap, th nghiem ri, va cac may th nghiem va ap shock.
30
Hnh 5.38 Cam bien lc va ap.
Hnh 5.39 Cam bien lc dang vong.
Cam bien dang vong Cac cau truc cam bien dang vong ring (hnh 5.39) o lc nen ong hoc dynamic
compression. Cac phep o lc keo cung co the co dang vong, neu may c lap at vi tai s bo phu hp. Gia
lap rap ba lo xuyen suot, ghep noi tch hp, va cac lap at kieu ho tr s dung hoac bulong xuyen suot
hoac au cap phoi supplied stud. o keo (sc cang tension range) phu thuoc vao lng tai s bo a at va o
cng cua au lap s dung. Cac ng dung bao gom ep vien tablet presses, cac nguyen cong dap khuon
stamping, uc lo punching, va tao hnh forming, can bang balancing, nghien cu may machinery studies, va th
nghiem rung ong lc ieu khien force-controlled vibration testing.
Hnh 5.40 Cam bien lc ghep noi.
Hnh 5.41 Cam bien lc a thanh phan.
Cam bien dang ghep noi Cac cam bien kieu ghep noi link (hnh 5.40) o lc keo nen ong hoc. Chung
c cau truc bang cach s dung mot vong lc ma co lc tai nen s bo gia cac phan cng lap ren. Viec lap
rap bang ren ca hai au cam bien ho tr kieu lap rap ghep noi tch hp. Cac ng dung bao gom ep vien, th
nghiem sc cang tensile testing, dap khuon, uc lo va cac nguyen cong tao hnh, can bang, nghien cu may,
va th nghiem rung ong lc ieu khien.
Dang a thanh phan Cac cam bien dang a thanh phan multi-component (hnh 5.41) cho phep o ong thi
cac thanh phan vector lc ong hoc ca ba chieu. Them vao o, mot so cam bien cung c thiet ke e o ca
cac moments lc. Gia ba lo xuyen suot, thanh phan tch hp, va cac kieu lap at ho tr s dung hoac
bulong xuyen suot hoac au cap phoi. Cac ng dung bao gom cac lc cat cac may cong cu cat got, dap
khuon, uc lo va cac nguyen cong tao hnh, nghien cu may, va cac th nghiem rung ong lc co ieu khien.
Phan t cam bien dang mang. Mang ap-ien chat deo.
Hnh 5.42 trnh bay nguyen ly cam bien mang ap-ien chat deo, bien oi trc tiep ng suat c thanh tn hieu
ien. Bo cam bien co ba lp: lp mang polyvinylidene flourid PVDF nam gia lp nen bang cao-su silicon va
lp ep bang mang chat deo. Khi tac dung lc, mang PVDF chu ng suat va tao ien tch tren be mat. ien
tch thay oi tao nen ien ap au ra. Bien o ien ap ra ty le vi lc tac ong. Do o bo cam bien loai nay ch
nhay vi s thay oi cua lc tac ong ch khong nhay vi lc tnh hang, thng c dung trong y te e ch
th trc tiep nhp th.
31
Hnh 5.42 Cam bien ap-ien o ng suat:

a). Phan t cam bien; b). S o tng ng mach o.
Hnh 5.43 gii thieu nguyen ly cam bien xuc giac bang mang mong ap-ien PVDF co ba lp: hai lp ngoai la
mang PVDF, lp gia la mang nen ghep noi am thanh vi hai lp kia. Tn hieu kch thch tao ng suat c hoc
trong mang nen lam cho mang ap-ien ng tac nh bo phan thu tn hieu. Theo hieu ng ap-ien, mang tren
sinh ra ien ap xoay chieu ty le vi dao ong c cua mang nen. Cam bien nay co the o nhng chuyen v nho,
o chnh xac hn 2 [ m] vi tn hieu au vao giai tan millimet. u iem la cau truc n gian, ap ng
c ca oi vi lc tnh.
Hnh 5.43 Cam bien xuc giac bang mang mong ap-ien.
Hnh 5.44 Cam bien xuc giac bang mang polymer ban dan.
Dang mang polymer ban dan. Hnh 5.44 gii thieu phan t cam bien xuc giac co ien tr thay oi theo ap
suat, khac phuc c nhc iem cua phan t xuc giac ien-dan a neu muc tren (hnh 5.22) ve be day: be
day cua no ch c 0,25 [mm].
Bang 5.5 Pham vi o va ng dung phan t cam bien ap suat ban dan piezo.
ng dung
5
x 10 [Pa]
< 0,04
Trang thai ay trong cac may giat va may ra chen.
0,1
May hut bui, canh bao may loc, o thong lng dong chay.
0,2
o ap lc mau.
1
May o ap suat barometer, bo chnh anh la va phun dau
2
Kfz.
Pham vi ap suat,
32
10
50
500
Kfz (ap lc hut).

Kfz (ap suat dau, ap lc kh nen phanh thang), may lanh.
Kh nen, robot cong nghiep.
Thuy lc, che tao may.
5.1.3 Cac phan t cam bien vat ly khac.

Phan t cam bien ien-cam. Phng phap o lc khong ch theo nguyen ly bien dang an hoi. Hnh 5.45 gii
thieu nguyen ly may o lc s dung phan t cam bien ien-cam co loi sat trt. Nguyen ly phan t bien cam
nay a neu phan tren (cam bien tham so). Trong hnh: (1) la vo may, (2) mang an hoi, (3) thanh noi
vi loi sat (4), (5) cac cuon cam vi sai.
Hnh 5.45 May o lc dung phan t bien cam loi sat.

Phan t cam bien ien-dung kieu mang rung. Cac phng phap cam bien ien dung o ap suat chu yeu da
tren c s anh gia s thay oi ien dung gia mot ien cc chuan so va mot ien cc dang mang rung. Tuy
theo ap suat tac dung ma khoang cach gia ien cc va mang b thay oi, do o ma ien dung cua phan t
cam bien cung thay oi tng ng. Phan t tch cc ay chnh la mang rung mot kieu mang bien dang an
hoi. Mac du phan t bien dung mang rung thng co ien dung nho va ca o thay oi cua no la rat nho, nhng
bang cach thiet ke cau truc thiet b o mot cach phu hp van co the co c o phan giai va tnh lap lai cac
ch so o kha tot. Cac phan t bien dung von dung o cac chuyen v (neu chng 4) ay dung o ap suat
trong nhng ieu kien nhat nh se cho nhng ac tuyen kha tuyen tnh.
Hnh 5.46 Nguyen ly cau truc phan t bien dung o ap suat.

Hnh 5.46 gii thieu cau truc nguyen ly cua mot phan t cam bien ap suat bien dung hien ai.
S tinh chnh tng phan cam bien rieng le se at o tuyen tnh cao hn 0,5%. Tnh phu thuoc nhiet o at ti
tr so 0,015 [ % o K ] trong pham vi nhiet o (-20 +70) [ o C ]. Tuy theo pham vi o, o day cua mang an hoi
nam trong khoang (0,03 3) [mm]. Khoang cach gia ban cc chuan so va mang an hoi c 100 [ m ]. S
chuyen tiep trang thai tnh ti trang thai nen lam thay oi khoang cach ien cc khoang mot phan t.
Phan t cam bien t-giao. Da tren hieu ng t-giao hien tng mot vat at trong trng t se chu tac
dung ng suat keo hoac nen, thay oi tnh chat hnh hoc hoac tnh chat c hoc cua mot so vat lieu sat-t di
tac ong cua t trng. oi vi cac chat sat-t, khi lc tac dung u ln th co the lam vat bien dang. Hieu
ng t-giao c ng dung trong ky thuat e che tao cac nguon phat sieu am; hoac dung dong ien cao tan e
sinh ra t trng bien thien nhanh gay ra bien dang c hoc tren mot loi sat-t, che o cong hng c hoc se
bien no thanh nguon phat sieu am co tan so cho trc.
33
Hnh 5.47 Cam bien t giao: a). Cam bien;

b). Bien dang ng cong t hoa di tac dung lc nen.
Trong cam bien t-giao o lc (hnh 5.47), ng lc trong vat lieu cam bien lam thay oi ng cong t hoa, do
o co the xac nh lc tac dung bang s bien thien cua o t-tham hay t-d. S thay oi o t tham di
anh hng cua lc tac dung lam thay oi ien cam L cua cuon day:
R L
=
=
= K ;
(5.28)
R
L
ay: ng lc can o.
Cam bien ng suat sieu am. Nguyen ly cam bien ng suat sieu am da tren hien tng vat ly la s lan
truyen song am trong mau vat thay oi khi ng suat trong mau thay oi.
Hnh 5.48 Cam bien ng suat ong bang sieu am.

Cam bien vector ng suat ong sieu am UDVSS Ultrasonic Dynamic Vector Stress Sensor dung o s thay oi
ng suat ong co hng trong vat lieu hay cau truc chu tai trong chu ky (hnh 5.48). UDVSS gom au do, he
ien t noi vi mau o va nguon tn hieu chuan. au do co bo chuyen oi, may phat sieu am, may thu, ong
dan song thu phat bien oi tn hieu ien thanh chuyen ong c hoc va ngc lai. Khi au do tiep xuc vi mau
vat, may phat sieu am truyen song am qua mau vat ti may thu roi c chuyen oi thanh tn hieu song ien.
Nhng phat trien mi va trien vong.
Thiet ke c ban cua cac can bien kieu day o bien dang o lc, tai trong, hay trong lng khong co nhng
thay oi ang ke t nhng phat trien ban au vao nhng nam 1950. Mot vai nha san xuat ngay nay a bo sung
nhng bo phan ien t trong board mach e chuan hoa tn hieu ngay tai chnh cam bien. ieu nay lam tang
chat lng cua cam bien noi chung va lam giam gia thanh cua toan he. Cac au tn hieu ra c chuan hoa
bao gom ca kha nang la chon tn hieu ra la tn hieu ien ap hay dong.
34
TEDS (Transducer Electronics Data Sheet) ban d lieu bien cam ien t tren c s tieu chuan IEEE P1451
la mot tieu chuan nhat thiet, xac nh kien truc va giao thc oi vi viec bien dch compiling va a ch hoa bo
nh khong oi non-volatile gan ket ben trong bo cam bien o analog. TEDS cho phep ngi s dung truy cap
nhng thong tin ac dung nh ten hang san xuat, loai cam bien, so hieu mau model number, so hieu loat
serial, va d lieu hieu chuan cung nh viet nhng thong tin nh ma danh kenh ID, a phng, v tr, hng,
nhan hieu tag number, vv
Mot so nha san xuat cung cap nhng cam bien kem nhhng tien ch TEDS vi d nh noi chung la lam n
gian hoa va giam thieu thi gian at nh hieu chnh may cho ngi s dung va giam thieu nhng sai sot co
the.
Nhng phat trien trong tng lai oi vi cac te bao tai trong va cac cam bien lc co the la bao gom ca cong
nghe khong day wireless technology e truyen dan d lieu a so hoa qua khoang khong gian ngan. S phat
trien cua cong nghe nay ang c xuc tien. Tuy nhien, gia thanh se la rao can au tien phai vt qua. Nhng
phat trien tng lai khac co the la bu nhiet o bang ky thuat so.
5.1.4 Mach cau o ng dung ien hnh va chuan hoa tn hieu.
Mach cau o ng dung.
Mot ieu co lien quan mat thiet ti cac day o bien dang la o chnh xac cua phep o ien tr. Noi chung, o
chnh xac c gia tang bang cach dung nguon dong ln va tao ra c nhng thay oi ien ap ra ln. Tuy
nhien, gii han thc te cng o dong ien co the s dung nam trong pham vi cong suat tieu hao tren phan t
ien tr. V ly do o ma cac cong nghe lien ket day o bien dang mang mong a c toi u hoa e tang
cng toi a tnh nhiet dan t mang mong ti chat nen. Viec tang cng nhiet dan cho phep s dung dong
ien ln hn trong phep o.
Nhieu day o bien dang, va ac biet la cac day o bien dang silicon co phu gia, co tnh nhay cam vi bien
ong nhiet o. Trong vai trng hp, o la mot hieu ng hu ch ac biet neu ng dung con ong thi o
nhiet o na. Song noi chung, o khong phai la trng hp pho bien, do o can phai bu tr o nhay nhiet nay.
Cach de nhat e lam viec o la che tao cac ien tr tham chieu reference resistors lam t cung loai vat lieu
va lap at chung sao cho chung khong nhay cam bien dang.
o ln thay oi ien tr cua phan t bien dang an hoi thng c xac nh bang s o mach cau
Wheatstone. Co the de dang bo tr cau truc mach cau o e gi nguyen o nhay bien dang trong khi loai bo
c tnh nhay nhiet cua chuoi day bien dang. Cach bo tr nh vay la rat quan trong va de thc hien cho nen
rat pho bien.
Hnh 5.49 Cau truc cau Wheatstone.
Hnh 5.50 S o cau cam bien ien tr silicon.
Hnh 5.49 gii thieu nguyen ly mot mach cau o Wheatstone ien hnh cho nhng ng dung nay. Cac day o
bien dang c mac vao bon nhanh mach cau, hoat ong nh mang ien them va bt (phan ap), cho phep bu
tr cac hieu ng nhiet o cung nh loai bo cac tn hieu gay nen bi nhng lc ngoai khong c ban. Can co
ien ap cung cap mot chieu (thng la t 5 ti 20 VDC) hoac ien ap xoay chieu AC a ti cac iem A va D
cua cau. Khi co lc tac dung len ket cau bien cam, cau Wheatstone mat can bang, tao ien ap ra gia cac
iem B va C cua cau, ty le vi tai trong tac dung.
35
Hnh 5.50 la s o mach cau o ng dung cho cac phan t vi mach bien tr c mac vao bon nhanh cau o.
Phan t cam bien chu tac ong ap suat, s bien dang cua mang vi mach lam thay oi tr khang cua no, bien
oi ien ap ng cheo cau thanh tn hieu ien tuyen tnh au ra. Viec nh v cac phan t bien tr c la
chon sao cho khi mang b bien dang uon th hai phan t bien tr tren hai nhanh oi dien cua cau b bien dang
ngc hng.
Cac bien tr co tr so nh nhau, mot cach gan ung co the coi ien ap ra bang:
R
U ra = U B .
+U0 ;
(5.29)
R0
ay: U B ien ap cung cap cho cau; U 0 ien ap m.
Ty so bien thien ien tr R tren tr so ien tr danh nh trc khi bien dang R0 c xac nh theo bieu
thc (5.16):
R
= K . ( p ) ;
R0
ay: K he so ty le; ( p) o nen c hoc (ham cua ap suat p).
o nen c hoc phu thuoc tuyen tnh vi ap suat trong mot pham vi gii han. Hnh 5.51 la ac tuyen ien ap
au ra va anh hng cua nhiet o moi trng xung quanh. Anh hng nhiet o co the khac phuc bang giai
phap mach (v nh dung mot bien tr nhiet ban dan loat KTY trong hnh 5.52, bien tr nhiet KTY xem
chng 3).
Hnh 5.51 ac tuyen ien ap ra va

anh hng nhiet o.
Hnh 5.52 Bu nhiet o trong phan t

cam bien ap suat ban dan.
Trong thc te ng dung, nhat la oi vi trng hp cac te bao tai trong load cells che xuat cong nghiep, th
thng chung c bo tr lap at thanh mach cau o ket noi vi cac mach (vi mach ien t) chuan hoa tn
hieu ra e co the a ti cac bo phan x ly hay ieu khien tiep theo. Cac phan t cam bien lc dang te bao
tai trong nay c che xuat theo ma hoa day o cua Uy ban day o bien dang mien Vien Tay Western
Regional Strain Gage Committee (a c sa oi thang Nam 1960). Ma hoa mau day noi nh trong hnh 5.46
sau:
Hnh 5.53 Ma mau ket noi ien tieu chuan.

Hnh 5.54 gii thieu mot s o ien hnh va n gian, tuy nhien ap ng c nhng yeu cau ky thuat o kha
cao. S o mach cau gom mot phan t bien dang an hoi lam phan t chnh, mot cam bien th hai la bien
tr bu nhiet (nhng khong phai chu tai bien dang), va hai phan t bien dang phu co o chnh xac 0,1% tr
danh nh. Cac linh kien khac trong mach cau am bao oi xng cau.
36
Hnh 5.54 May o bien dang bang phan t bien dang an hoi.
Do nhng muc tieu yeu cau ky thuat cao, oi vi mach nguon cung cap cho cau ngi ta dung vi mach nguon
chuyen dung, co nhng tnh nang toi u (v du Analog Devices 2B35). ien ap cau co the ieu chnh c, cac
thong so ky thuat c cho trong thuyet minh ky thuat linh kien cua hang san xuat. e gi cho ien ap cau la
hang, khong oi bi anh hng cua dong tai, mach day dan ap va dan dong c tach biet. Viec xac nh
ien ap ng cheo cau c thc hien n gian cung bang mot vi mach (v nh Analog Devices 2B30). Vi
mach nay co bo khuyech ai tn hieu ieu chnh c va bo khuyech ai loc tan so gii han 100 [Hz].
Mach chuan hoa tn hieu cau o.
Hnh 5.55 minh hoa viec chuan hoa tn hieu cua mach cau o toan phan bien thien, ng dung cho may kiem
tra o moi fatigue monitoring mach cam bien bien dang. Co kha nang thc hien o lng va ieu khien t xa
bi tn hieu cam bien ra a c chuan hoa e truyen xa remote sensing.
37
Hnh 5.55 Bo khuyech ai cam bien day o bien dang chnh xac.
Cau o toan phan la mot bo tch hp co the ghep noi vi be mat can o mot s bien dang hay uon cong.
Nham tao ieu kien cam bien t xa, ngi ta dung nguon cung cap la nguon dong. Vi mach OP177 lam ao
chieu servos dong ien trong mah cau ti 10 [mA] quanh ien ap tham chieu c 1,235 [V]. Day o bien dang
tao mot tn hieu ra c 10,25 [mV]/1000 [ e]. Tn hieu c khuyech ai bi vi mach khuyech ai o lng
AD620 c cau hnh vi o khuyech ai 100. Co the at nh toan thang o ien ap bien dang bang cach
hieu chnh chiet ap o khuyech ai 100[ ] sao cho ng vi o bien dang la -3500[ E ], ch so au ra oc
c la -3,500[V]; va ng vi s bien dang +5000[ E ], au ra ghi nhan +5,000[V]. Khi o co the thc hien so
hoa phep o bang mot bo chuyen oi ADC co pham vi au vao toan thang o la 10[V]. Mot tu ien 0,1[ F ]
c mac qua cac chan au vao cua bo ADC lam viec nh bo loc EMI/RFI e ket noi vi ien tr cau 1[ k ].
Tan so goc cua bo loc la xap x 1,6 [kHz].
Mot v du khac la mach khuyech ai te bao tai trong gii thieu tren hnh 5.56. Mot te bao tai trong ien hnh
co ien tr mach cau la 350[ ]. Mot ien ap cung cap cho cau 10.000[V] c lay t vi mach nguon ien ap
chnh xac AD588 co cac vi mach OP177 va 2N2219A lam bo em. Vi mach 2N2219A nam trong mach phan
hoi cua OP177 va cung cap dong ien can thiet dan ong mach cau (28,57 [mA]). e chac chan rang ieu nay
am bao o tuyen tnh, ngi ta dung bo khuyech ai o lng. Thiet ke nay co so lng toi thieu cac ien
tr va khuyech ai co tnh quyet nh, lam cho toan mach o am bao o chnh xac, o on nh va hieu qua
gia thanh. Yeu cau duy nhat la ien tr 475[ ] va chiet ap 100[ ] phai co he so nhiet o thap, sao cho o
khuyech ai cua bo khuyech ai khong b troi theo bien ong nhiet o.
Hnh 5.56 Bo khuyech ai te bao tai trong chnh xac.

Nh a neu phan tren, mot te bao tai trong chnh xac thng c ket cau vi mach cau 350[ ]. Hnh 5.57
gii thieu mot bo khuyech ai te bao tai trong chnh xac c cap nguon t mot nguon n (n cc). ien ap
kch thch ti cau phai chnh xac va on nh, neu khong se gay ra sai so phep o. Trong mach nay, vi mach
nguon tham chieu 5[V] chnh xac REF195 c s dung dan ong cau. Nguon tham chieu REF195 co the cung
cap dong hn 30[mA] ti tai, nen no co the dan ong mach cau 35052 ma khong can bo khuyech ai em.
38
Hnh 5.57 Bo khuyech ai te bao tai trong dung nguon cung cap cc tnh n.
Vi mach kep OP 213 c cau hnh nh hai vi mach khuyech ai thuat toan op-amp-in-amp co o khuyech ai
bang 100. Mang ien tr at nh o khuyech ai G theo cong thc:
10[k]
20[k]
G = 1+
+
= 100 .
1[k] 196[] + 28,7[]
oi vi kieu mac mach thoat at rejection chung toi u, ty le ien tr phai chnh xac. Nen dung cac ien tr
co o dung sai cao ( 0,5% hoac tot hn).
oi vi tn hieu ra cua cau la 0 [V], bo khuyech ai se dao ong trong pham vi 2,5 [mV] quanh mc 0[V]. o
la gii han au ra toi thieu cua OP213. Do o, neu oi hoi ieu chnh thien ap offset, th viec ieu chnh nen
bat au t ien ap dng V REF va ieu chnh VREF xuong cho ti ien ap ra ( VOUT ) ngng bien ong thay
oi. o la iem gii han khuyech ai dao ong. Bi thiet ke la nguon cung cap n, bo khuyech ai khong
the nhay cam vi nhng tn hieu co cc tnh am. Neu oi hoi o tuyen tnh au vao 0 [V], hoac neu phai x
ly tn hieu cc tnh am, th VREF co the noi vao iem gia ien ap (2,5[V]) hn la noi vao iem at. Lu y
rang khi V REF khong noi at th au ra phai tham chieu ti VREF .
Trong viec so hoa tn hieu th bo chuyen oi ADC sigma-delta 24-bit kieu AD7730 la ly tng e chuan hoa
tn hieu trc tiep t au ra cua cau o va khong oi hoi phai co mach giao dien. Hnh 5.58 trnh bay s o ket
noi n gian nhat. Toan mach hoat ong nguon cung cap n +5[V], cung dung lam ien ap kch thch cau.
Lu y rang phep o la ty le ratiometric bi ien ap kch thch cau cam bien cung dung lam nguon tham chieu
cua chuyen oi ADC. Nhng bien ong trong nguon +5[V] khong anh hng ti o chnh xac phep o.
Hnh 5.58 ng dung te bao tai trong dung chuyen oi AD7730.

Vi mach AD7730 co bo khuyech ai trong lap trnh o khuyech ai c, cho phep tn hieu ra toan thang o
cua cau 10[V] co the so hoa thanh o chnh xac 16-bit. AD7730 co cac tien ch t than va he hieu chuan,
cho phep giam thieu cac sai so nh thien offset va sai so o khuyech ai gain bang cach tai hieu chuan nh
39
ky. Tuy chon option kieu chop lam giam ien ap nh thien va o troi, hoat ong tng t nh mot bo
khuyech ai on nh kieu chopper. ien ap nhieu hieu dung au vao RTI xap x c 40 [nV] hieu dung rms,
hoac 264 [nV] nh-nh. ieu nay tng ng vi o phan giai c 13 [ppm], hoac xap x 16,5-bits. o tuyen
tnh khuyech ai cung xap x 16-bit. Bang 5.6 neu cac thong so che o chuyen oi ADC AC7730 lam viec vi
mang te bao tai trong 6 day.
Bang 5.6 Che o van hanh AC7730 chuyen oi ADC te bao tai trong.
Gia thiet
Thc hien
Tn hieu ra toan thang o 10 mV, k.thch +5 V
Nhieu RTI
40 nV rms, 264 nVp-p
Kieu chop
c kch hoat
o phan giai khong nhieu
80,000 iem (16.5 bits)
Hieu chuan he
Zero va toan thang o
o phi tuyen khuyech ai
18ppm
o chnh xac khuyech ai
< 1 V
ien ap offset
<1 V
o troi offset
0.5 V/ o C
o troi khuyech ai
2 ppm/ o C
Lu y: o troi khuyech ai va o troi offset co the g bo c bang he tai hieu chuan.
40
BAI 8: KY THUAT CAM BIEN AP SUAT.

CHNG 5. CAM BIEN O LC VA TAC DUNG LC. PHAN 2.
lc va tac dung lc (phan 1) va ap suat, ng suat (phan 2); cac ng dung
trong ky thuat o lng va ieu khien gom 2 phan cua chng 5.
sau:
Khai niem ai cng ve lc, tac dung lc: ng suat va ap suat; va nhng
ac iem xac nh chung. Cac loai phan t cam bien lc va ap suat ng
dung trong ky thuat o lng ieu khien, ket cau, hoat ong chc nang,
cac ac tnh ky thuat, ac iem ng dung.
Bai 8 tap trung trong tam la ky thuat cam bien lc va tac dung lc: ng
suat va ap suat (phan 2) bang cac phan t cam bien ng dung rong rai
trong cong nghiep va dan dung.
5.2 CAM BIEN O AP SUAT.
Khai niem chung.
Cac cam bien o ap suat chuyen oi ap suat au vao thanh tn hieu ien au ra e o ap suat, lc va lu
lng chat long, chat kh (lu chat). Nhng phep o nay c dung e ieu khien nhieu th, t mc nc
trong may giat en cac chat kh thoat he kh thai xe oto. Cac cam bien ap suat c s dung trong cac thiet
b y te e kiem tra huyet ap, thnh giac va th giac, ca benh tang nhan ap glaucoma. Trong cac nganh cong
nghiep che tao va che bien, ngi ta da vao cac cam bien ap suat e ieu khien cac may moc cong nghe.
Chung la nhng phan t thiet yeu oi vi viec van hanh cac he HVAC, cac xe nang tai t d hang, may xuc.
Chung o o cao va o van may mu turbidity trong hang khong va la mot phng tien quan trong cua cac may
ghi d lieu bay nhat thiet phai co tren moi chuyen bay thng mai.
ni nao co nhu cau ieu khien chnh xac ap suat, lc va lu lng lu chat, th co kha nang phai ng dung
cam bien ap suat. Cac cam bien ap suat ngay nay cung cap tnh nang lap lai cac ac tnh ky thuat mc o
cao, co o tre thap, va o on nh lau ben trong cac ng dung vi pham vi ap suat au vao t c nho hn mot
pound tren mot inch vuong ap suat (pounds per square inch gauge ay ky hieu la n v ap suat [psig]) cho
ti hang ngan psig.
Ap suat c o theo phng phap ien bang cac bien cam ap suat khac nhau. Ton tai cac chuyen oi c hoc
a dang (ke ca mang ngan diaphragms, hop kn capsules, ong xep bellows, ong manometer, va ong Bourdon)
dung o ap suat bang cach o ket hp chieu dai, khoang cach, hay chuyen dch, va o nhng thay oi ap suat
bang cach tao chuyen ong.
Hnh 5.59 cho s o tong quat cac phng phap cam bien o ap suat, ay ac trng cam bien ap suat dang
mang ngan. Khi o, tn hieu au ra cua cac giao dien nay c a ti mot bo chuyen oi nh day o bien
dang Strain Gauge hay bo bien tr ap-ien Piezoelectric Transducers. au ra c chuyen oi thanh tn hieu
ien va chuan hoa bang mach ien t signal conditioning. Khong nh day o bien dang, cac bien cam ap-ien
c s dung ien hnh cho cac phep o ap suat tan suat cao (chang han nh cac ng dung nh v bang am
thanh sonar hay microphon tinh the).
1
Hnh 5.59 Cam bien o ap suat.

Ap suat c nh ngha nh la lc tren mot n v dien tch ma mot vat tac dung len vat khac. V du, co mot
khoi vuong 10[lb] nam tren ban. Neu dien tch moi mat khoi la 4[ in.2 ], th 10[lb] se phan bo tren dien tch
4[ in.2 ], nen khoi vuong tac dung len ban mot ap suat 2,5 [ lb / in.2 ] (hay 2,5 [psi]). Trong he n v SI, ap suat
c tnh bang newton tren met vuong ([ N / m 2 ]), goi la Pascal ([Pa]). oi vi chat long, ap suat tac dung len
cac thanh ben cua be cha cung nh len ay be. Cam bien ap suat thng gom hai phan: bo phan au chuyen
oi ap suat thanh lc hay dch chuyen, con bo phan th hai chuyen oi lc hay dch chuyen o thanh tn hieu
ien. Cac phep o ap suat ch c thc hien vi cac chat long hay chat kh (lu chat). Phep o ap suat n
gian nhat se cho mot ap suat ap ke gauge pressure, la hieu so gia ap suat o c va ap suat moi trng.
mc nc bien, ap suat moi trng bang ap suat kh quyen, c tha nhan la bang 14,7 [psi], hoac la 101,3
[kPa]. Cam bien phc hp hn mot chut co the o ap suat vi sai hieu so ap suat hai iem ma khong iem
nao can o ap suat kh quyen. Dang cam bien ap suat th ba o ap suat tuyet oi, c o bang mot cam bien
ap suat vi sai ma mot ben c tham chieu vi 0 [psi] (gan vi chan khong tuyet oi).
ay chung ta khao sat hai dang cam bien ap suat thong dung nhat hien nay, o la cac cam bien ban dan
silicon va cam bien ien tr ap ien vi s a dang ket cau cong nghe lan nhng ac tnh ky thuat khac nhau
cua chung. Nhng trc tien cung nen khao sat hai dang cam bien o ap suat van con thong dung en nay
trong cac he o lng ieu khien, bi ket cau n gian va van hanh hieu qua: o la ap ke dang ong Bourdon
va dang ong xep.
Dang ong Bourdon.
Ong Bourdon la mot ong cong ngan, mot au bt kn. Khi ong b tac dung ap suat, no co xu hng duoii thang
ra. Chuyen ong nay ty le vi ap suat tac dung. Hnh 5.60 minh hoa vai cau truc ong Bourdon (dang uon va
dang xoan). Hay lu y rang s dch chuyen co the la chuyen ong thang hay chuyen ong goc quay. Mot cam
bien v tr nh chiet ap bien tr con trt pot (potentiometers) hoac bien tr mang mong LVTD (xem phan
sau) co the chuyen oi s dch chuyen nay thanh tn hieu ien. Cac cam bien dang ong Bourdon san co vi
pham vi o t 30 en 100.000 [psi]. Cac ng dung ien hnh la cac au o ap suat hi hay ap suat nc.
Hnh 5.60 Cam bien dang ong Bourdon: a). Dang uon Unbend; b). Dang xoan Untwist.
Dang ong xep Bellows.
Cam bien nay dung mot ong xep kim loai nho e chuyen oi ap suat thanh chuyen ong thang (hnh 5.61a).
Khi ap suat ben trong tang len, ong xep gian ra chong lai khang lc cua lo xo (thng th lo xo chnh la cac
nep gap cua ong xep). Chuyen ong nay c phat hien bang mot cam bien v tr (v nh bien tr con trt
pot). Hnh 5.61b minh hoa mot cam bien ap suat vi sai, co the c che tao bang cach ghep mot ong xep vi
mot bnh cha. ay ap suat t ben ngoai ong xep (ap suat 2) co xu hng lam ong xep b nen, trong khi ap
2
suat 1 lai co xu hng lam ong xep gian ra. V tr cua hnh gap la ham cua hieu so ap suat ben trong va ben
ngoai ong xep. Cac ong xep co o nhay ln hn cac ong Bourdon pham vi ap suat thap c 0 30 [psi].
Hnh 5.61 Cam bien dang ong xep: a). Kieu ap suat n; b). Kieu ap suat vi sai.
5.2.1 Cam bien ap suat kieu ien tr ban dan silicon.
C s cong nghe che tao. Ngay nay phan ln cac cam bien o ap suat, lc va o lu lng lu chat c che
tao bang cach dung ky nghe silicon trong cong nghiep che tao chat ban dan. Do o, nhieu thuat ng dung
trong cong nghe chat ban dan cung c dung cho cong nghe cam bien ap suat. Hn na, ngay nay cong nghe
cac he vi c-ien t MEMS (microelectromechanical systems) ang phat trien theo hng nay.
Cong nghe cay ion ban dan ien tr ap-ien chiem lnh th phan linh kien cam bien ap suat vi nhieu ly do
tch cc. Nhng cach tiep can khac, ke ca bien tr t variable reluctance, tu bien dung, si quang va ien dan
ap-ien, cung san co th phan ng dung. Tuy nhien, ay chung ta chu yeu chu trong cam bien ap suat apien tren nen cong nghe silicon.
Cac cam bien ap suat ap-ien (cam bien day o bien dang) thng c tham chieu en nh cac cam bien
dang vi mach IC (integrated circuit), cam bien chat ran the cng solid-state, cam bien n tinh the (c hnh
thanh t chat silicon n tinh the) hay chnh la cam bien silicon. Chung c che xuat dang nguyen lieu
wafer, moi wafer gom vai tram ti vai ngan lang ket die, tuy theo kch c khuon mau lang ket cam bien. Mot
chip vi mach cam bien ien hnh co kch thc 80x80 mils hay 2mmx2mm. Cac cam bien ap suat ap-ien
(silicon) bao gom mot phan t cam bien lam t chip vi mach silicon vi mot mang ngan diaphragm silicon
mong cong va bon ien tr ap-ien (o gan nh la cac ien tr the cng c cay ghep len be mat chat
silicon).
Cac ien tr ap-ien cua chat ban dan co xu hng thay oi ien tr gay ra bi s bien dang khi co ap suat
hay co lc tac ong len mang ngan. Ap suat lam mang ngan b uon cong, tao ra mot ng suat trong mang va
vay la cung tac ong len cac ien tr cay ghep. S thay oi tr so ien tr phu thuoc vao o ln ap lc cung
cap cho mang ngan. Nh vay, s thay oi trong ap suat (tac ong c au vao) c chuyen oi thanh s thay
oi ien tr (tn hieu ien au ra). Phan t cam bien chuyen oi hay bien cam nang lng t dang nay sang
dang khac, v vay co thuat ng bien cam ap suat pressure transducer. Cac cam bien ap suat c che tao
bang cach thoat tien cay ion bon ien tr ap-ien vao chat silicon. Viec cay ghep ion c tang cng s
dung nham cung cap tnh nang hoat ong cao hn so vi cac cam bien che xuat theo cong nghe khuyech tan.
Sau khi bon ien tr ap-ien a hnh thanh, mang ngan c tao ra bang cach cham khac ien hoa mot hnh
mau co the ieu chnh c len chat silicon t mat sau cua no (tren be mat oi dien vi cac ien tr ap-ien).
Phan khong khac hnh tren mieng silicon cung cap mot ng bien, gii han ghep noi cng cho mang ngan va
tao be mat lap rap no vao mot vat the thanh phan nao o khac.
o day cua mang ngan xac nh pham vi ap suat (o nhay) cua cam bien. Tuy nhien, quan he o la ham
khong tuyen tnh. V du, neu tang gap oi o day cua mang ngan se lam giam o nhay i bon lan. Be day
ien hnh cua mang ngan la c 5 ti 200 micron (mot mang kha mong), tuy theo pham vi ap suat cua no. Qua
3
ap overpressure la thuat ng dung e ac trng ap suat toi a co the cung cap cho phan t cam bien ma khong
gay nen nhng thay oi vnh vien cac ac tnh ra cua no.
o nhay (hay he so day o gauge factor) cua mot day o bien dang silicon la kha cao, gap khoang 100 lan o
nhay cua day o bien dang kim loai.
Bang cach cay ghep cac ien tr ap-ien vao moi trng chat silicon n tinh the thuan nhat, chung c tch
hp thanh mot phan t cam bien lc silicon.
Mot cach ien hnh, cac kieu day o bien dang co ban chat vat lieu khac nhau c ghep lai thanh cac thanh
phan cam bien lc, thu c trong bien dang nhiet an hoi va trong cac qua trnh che tao phc hp. Trong o,
nhieu day o rieng le von khong on nh bi moi ghep kem pham chat, co tnh nhay nhiet va tnh tre gay nen
bi s bien dang nhiet an hoi. Cac cam bien ap suat kieu mang ngan silicon la loai cc ky an toan tin cay
am bao chac chan, bi v silicon la vat lieu ly tng tiep nhan lc tac dung, va cac day o c cay ghep
theo cong nghe cay ghep ion nh vay khong b anh hng cua moi lap ghep.
Hnh 5.62 Mac mach cam bien ap suat silicon.

Nh mot tinh the an hoi hoan hao, silicon khong tr nen vnh vien b dan ep ma tr lai hnh thu ban au cua
no. Cac khoi lieu wafers silicon tot hn kim loai e lam cac mang ngan cam bien, bi silicon co tnh an hoi
cc ky tot trong pham vi hoat ong cua no. Thong thng mang ngan silicon ch sai hong bi gay t, thng
la v b qua ap suat qua ln. Ngay nay, cong nghe che tao vi c va ky thuat tinh chnh laser se giup cong
nghiep che tao cac cam bien an toan tin cay co tnh nang o chnh xac cc ky cao.
Cac ien tr cam bien co the c ket noi hoac vao mot mach cau na hoac mach cau toan phan kieu cau
Wheatstone, trong o hai ien tr tang tr so vi ap suat dng trong khi hai ien tr kia giam tr so cua
chung. Khi ap suat cung cap len dung cu nh trong hnh 5.62, cac ien tr trong cac nhanh cau se thay oi
mot lng bang R . S nh hng ien tr song hanh tren nen silicon se xac nh lieu ien tr se tang hay
giam tr so khi tac dung ap suat.
ien ap vi sai au ra Vout , nh de thay t hnh 5.62, se bang:
R
;
(5.28)
Vout = V B .
R
ay V B la ien ap cung cap cho mach cau (Bridge).
Bi v s thay oi ien tr ty le thuan vi ap suat, co the tnh ien ap ra Vout cua cau bang:
Vout = (S + P + VB ) Voff ;
(5.29)
ay Vout la ien ap ra, tnh bang [mV]; S la o nhay, tnh bang [mV/V] ng vi moi [psi]; P la ap suat, tnh
bang [psi]; VB la ien ap cung cap cho cau, tnh bang [V]; Voff la sai so nh thien offset (ien ap vi sai au ra
khi ap suat cung cap bang 0).
Tuy nhien, tn hieu au ra vi sai cua mot cam bien ap suat tho la khong chnh xac theo ngha hieu chuan va
cac hieu ng nhiet o. o mot phan la do cac nha san xuat cam bien chao hang mot loat cac cam bien co
mc o chuan hoa tn hieu khac nhau tren c s trang thai tho cua chung, cho ti nhng bo truyen phat so bu
va hieu chuan hoan chnh vi cac au ra c khuyech ai va cac vi mach tch hp chuyen dung ASIC
(Application-Specific Integrated Circuits).
4
Mot so cam bien ap suat thng mai san co s dung tnh chat tr khang ap-ien cua silicon (hnh 5.63). Phan
t ien tr ap-ien chuyen oi trc tiep ap suat thanh ien tr, va ien tr co the c chuyen oi thanh ien
ap. Nhng cam bien nay co u iem khong co bo phan ong va co san vi pham vi ap suat t 015 [psi] ti
0-5000 [psi].
Hnh 5.63 Cam bien ap suat ban dan.
Hnh 5.64 Cam bien ap suat ban dan ST2000 (Courtesy of SenSym Inc.).
Mot v du cam bien ap suat ban dan thng mai la loat ST2000 cua hang SenSym Inc. (hnh 5.64). Co the
dung khoi o nay cho chat long hay chat kh, co bo khuyech ai trong, cho ien ap ra ty le thuan vi ap suat
tuyet oi.
Phan loai cam bien o ap suat. Nh a neu phan tren khi e cap ti nhng kieu dang cam bien o lc
(muc 5.1.2), co mot phan ln danh cho cac phan t cam bien lc bien dang an hoi ban dan da tren nen chat
lieu silicon (xem them hnh 5.26). ay chung ta i sau hn vao nhng kha canh ng dung o ap suat.
Cac cam bien ap suat c xep hang tieu chuan, theo loai ap suat ma chung o. Phan ln cam bien c chao
hang nh che pham san xuat loat vi liet ke khac nhau e o cac loai ap suat khac nhau: ap suat ap ke, ap ke
vi sai, ap ke tuyet oi, hay ap ke chan khong. Nhieu ngi a quen vi cach trao oi au o ap suat ap ke
gauge pressure o la ap suat tng oi so vi ap suat kh quyen bnh thng quanh ta. Nh vay co the b lan
lon gia ap suat tuyet oi va cam bien o ap suat tuyet oi, von o ap suat tng quan vi chan khong tuyet
oi, vi au o ap suat thong thng, o ap suat tng oi so vi ap suat kh quyen. Bi v ap suat 0 tuyet oi
cua chan khong tuyet oi von khong the at ti, phep o ap suat tuyet oi kho khan hn nhieu. Se de hieu
hn ve phap o ap suat tuyet oi, mot khi a hieu biet ve cac au o ap suat va ap suat vi sai, von quen thuoc
hn vi moi ngi (xem then hnh .
Ap suat vi sai la s sai biet ve ap suat gia hai nguon ap suat noi v du, o hai nguon ap suat e xac nh
trang thai cua mot bo loc. Dang phep o ap suat nay thng c the hien dang pound tren inch vuong vi
sai ( ay ky hieu n v ap suat vi sai la [psid] pounds per square inch differential).
Cac cam bien ap suat vi sai c thiet ke e ong thi tiep nhan hai nguon ap suat oc lap, cho nen chung co
hai cong ap suat. au ra ty le vi ap suat vi sai gia hai nguon, cho nen ta co the dung au ra nay e xac nh
lieu bo loc co can phai lam sach hay phai thay the hoan toan. Cac cam bien ap suat vi sai hai hng la nhng
cam bien ap suat vi sai cho phep ap suat au vao ln hn a ti cong ap suat nao cung c.
5
Trong cam bien ap suat vi sai gii thieu tren hnh 5.65, ai lng can o (cac thong so vat ly c nh lng
bang phep o) c cung cap ti ca hai cong. Khi mot trong so hai nguon ap suat la ap suat moi trng, th o
goi la ap ke gauge pressure. Do o, ap ke la mot dang phep o ap suat vi sai ma trong o ap suat kh quyen
c dung lam tham chieu. Phep o ap suat lop banh xe (oto, xe may), khi can mot ap suat ln hn ap suat
kh quyen e cho lop xe gi c tnh nang hoat ong cua no, la mot v du.
Hnh 5.65 Nguyen ly cam bien ap suat vi sai va tn hieu ra chuan hoa.
(Tn hieu ra 1 V se xuat hien khi ap suat ca hai cong bang nhau).
Vi dung cu o ap ke, nh ve trong hnh 5.66, cong P1 thong cho ap suat kh quyen, va ai lng can o c
a vao cong P2. Tn hieu ra 1 [V] bieu th ap suat moi trng.
Hnh 5.66 au ra cam bien ap ke mc cao.

Ap suat tuyet oi c o vi tham chieu ti chan khong. Cac cam bien ap suat tuyet oi thng dung e o
nhng thay oi ap suat trong kh ap ke barometer hoac nh trong may o o cao altimeter. Nhng ng dung
nay oi hoi tham chieu ti mot ap suat co nh, bi chung khong the n gian tham chieu ti ap suat moi
trng chung quanh.
Hnh 5.67 Tn hieu ra cua cam bien ap suat tuyet oi a c chuan hoa.
Cac cam bien ap suat tuyet oi phai o ap suat au vao tng quan vi ap suat zero (hoan toan chan khong
mot pha mang ngan). V du, 10 pound tren mot inch vuong tuyet oi ( ay dung n v ap suat tuyet oi la
[psia]) se bang 10 [psi] tren chan khong tuyet oi. o la khoang chng 4,7 [psi] thap hn ap suat kh quyen
tieu chuan mc nc bien (la 14,7 [psi]). Khi o, 0 psi la ap suat chan khong tuyet oi.
Trong cam bien ap suat tuyet oi hnh 5.67, cong P2 c danh cho chan khong, bieu th mot nguon tham
chieu co nh. Sai biet ap suat gia chan khong tham chieu va ap suat can o a vao cong P1 lam lech mang
ngan, tao nen s thay oi ien ap ra. Tn hieu ra 1[V] bieu th chan khong tuyet oi.
Cac cam bien ap suat tuyet oi co hop boc kn chan khong tham chieu trong phan t cam bien, co the c
che tao bang cach bt kn mot hop chan khong tham chieu vao mot ben cua phan t cam bien (hnh 5.68, xem
them hnh 5.26). Khi o, cac ap suat c o oi vi tham chieu chan khong o. Chan khong thc s, ma
c bt kn ben trong cam bien, la khoang 0,0005 [psi] (25 [millitor]). Neu khong kh b bay trong hop kn
chan khong tham chieu, lng kh b bay o se cho ap suat tac dung trong qua trnh co gian vi nhiet o tng
ng theo nh luat Boyle, cho nen o chan khong gan tuyet oi nay se c dung nh mot tham chieu e han
che bat ky sai so nhiet nao co kha nang xuat hien. Mot trong nhng u iem cua cac vi mach tch hp cam
bien ien tr piezo la bay chan khong tham chieu the tch nho, ma, trong s giao hoi vi mot boc kn siliconto-silicon co chat lng, se lam cho cac dung cu nay on nh theo thi gian va nhiet o.
Hnh 5.68 Cam bien ap suat tuyet oi.

Cuoi cung, may o ap ke chan khong la mot dang o ap suat ma trong o ap suat chan khong c cam nhan
vi tham chieu ti ap suat moi trng. Hnh 5.69 gii thieu au ra cua mot cam bien chan khong nh the. Tn
hieu ra 1[V] bieu th ap suat moi trng.
Hnh 5.69 au ra cua mot cam bien chan khong mc cao.

Lu y: Trong nhieu nguon tham khao, nhieu nc van dung n v pound tren inch vuong square [psi] e o
ap suat. Hien nhien n v o nay co the c chuyen oi sang nhng n v o thong dung khac nh
[mmHg], [kPa], [bar], vv Cung nh the, ay dung ky hieu n v o ap suat vi sai differential la [psid), ap
suat tuyet oi absolute la [psia].
La chon va ac trng cac cam bien ap suat. Khi a co d nh ve loai hoac cac loai ap suat can phai o,
co the bat au thu hep pham vi tm kiem cac cam bien thch hp bang cach nhan thc cac thong so van hanh
quan trong oi vi tng ng dung cu the.
Cac nha san xuat cam bien muon chac chan rang cac cam bien c giao hang la thch hp vi ng dung
cuakhach hang, va phan ln cac nha cung cap chao hang mot vai loai ban ke d lieu ng dung e giup ngi
s dung thu thap thong tin can thiet nham ac trng ung cac cam bien cho ng dung cua mnh. V du, truy
nhap vao a ch web:
http://content.honeywell.com/sensing/prodinfo/pressure/technical/c15_7.pdf
e tm dang ban ke nhng ac tnh thch hp nhat e la chon cam bien ap suat, bao gom ca loai ap suat, o
chnh xac, linh kien ien kem theo, va nhng yeu cau ve moi trng.
Ap suat nao ma bien cam phai o?
Nhan thc au tien la ap suat toi a cua he. Noi chung, thng th ngi mua chon dung bien cam co pham vi
o ln nhat phai c 1,5 lan ap suat toi a mong i trong he cua mnh. Lng d nay la khuyen cao, bi v
nhieu he, ac biet la cac he ieu khien qua trnh san xuat va thuy lc, co ap suat nh hay la xung ong ap
suat lien tuc. Cac nh ap suat nay co the ln hn 5 ti 10 lan ap suat maximum. ap suat cao nh vay, cac
nh ap suat tc thi co the pha huy bo phan bien cam ap suat. Nhng xung ong ap suat cao lien tuc, gan
hoac vt hn mot chut gia tr cc ai gii han cua bien cam, cung co the lam bien cam giam tuoi tho phuc
vu. Neu cac tan so xung ong at ti tan so t nhien (tan so cong hng) cua bien cam, th tham ch nhng
xung ong bien o thap cung co the gay nen kch thch cong hng va lam hong bien cam. Tuy nhien, viec
ac trng mot pham vi hoat ong cao hn khong phai luon luon la giai phap, bi v nh the se hy sinh o phan
giai cua phep o. Cung co the dung mot bo phan xen snubber e giam cac nh ap suat, nhng ieu o cung
phai thoa hiep vi viec no lam cham thi gian ap ng cua bien cam.
Trong cac ac tnh ky thuat cua cam bien, pham vi o hay tn hieu ra toan thang o la khoang sai biet aiso
gia cac gii han tren va gii han di cua pham vi ap suat cam bien (sai biet gia cac iem tan cung ng
cong tn hieu ra). Thong thng cac iem tan cung nay la iem 0 va iem cuoi thang o. nh thien 0 (zero
measurand offset ZMO tn hieu ra zero cua ai lng o) la tn hieu ien au ra at ti, khi ap suat hay lc
tren ca hai mat mang ngan cam bien bang nhau. 0 null tham chieu ti ap suat tng ng, con 0 offset nh
thien tham chieu ti tn hieu au ra nhan c khi ap suat iem 0.
Phan ln cac nha san xuat co the cho biet san pham cua ho c thiet ke sc chu ng trong bao nhieu chu
ky lam viec ma khong b mat tnh nang hoat ong. V du, hang Honeywell thiet ke cho 200 trieu chu ky chu
8
ng ap suat toan phan. Hay nhan thc ve ap suat he thong mot cach can than khi la chon mot bien cam. Se
phai thoa hiep o chnh xac he thong oi nghch vi tuoi tho cua bien cam.
Moi trng ap suat la g?
Mot yeu to then chot khac phai nhan thc c khi la chon mot bien cam la moi trng o. Lieu o co phai
la mot chat long nht hay chat ac set co the lam nghet cong ap suat ? Lieu o la mot chat dung moi hay an
mon co the xam thc vat lieu bien cam khi tiep xuc vi chung, hay lai la chat kh sach va kho ?
Nhng cau hoi nh the se xac nh lieu co can en mot dung cu ra mang ngan va vat lieu g co the tiep xuc
vi moi trng o. Mot so mau co cac mang ngan t ra, con nhng mau khac co cac cong ap suat. Co the
chon loai mang ngan thep khong r khi co tiep xuc vi moi trng e han che van e xay ra bi cac yeu to co
tnh xam thc (xem hnh 5.70).
Hnh 5.70 oi vi cac moi trng khac nghiet va am t,

co the ac trng mot hoc ap suat bang thep khong r e bao ve.
o chnh xac cua bien cam phai nh the nao?
o chnh xac la mot thuat ng chung c s dung bi nhieu nha san xuat bien cam, e mo ta sai so o lng
hoac o bat nh trong tn hieu au ra cua bien cam. Cac nguon sai so nay co the bao gom ca o khong tuyen
tnh, o tre, tnh khong lap lai ac tnh, nhiet o, iem can bang zero, hieu chuan va cac hieu ng o am.
Phan ln cac nha san xuat ac trng o chnh xac nh la cac hieu ng c to hp lai, t o phi tuyen, tnh
khong trung lap, va o tre. Nhng sai so khac co the c ac trng rieng.
Sai so tuyen tnh la o sai lech ng cong ac tnh ra cua cam bien so vi ng thang ac trng trong suot
pham vi ap suat a thiet ke (mc o sai lech tn hieu ra cua mot dung cu tuyen tnh so vi che o van hanh ly
tng). No thng c bieu dien bang so phan tram tn hieu ra tren toan thang o. Mot phng phap tnh
toan sai so tuyen tnh la tnh tr so bnh phng nho nhat, ve mat toan hoc cho ta mot ng thang phu hp
nhat BFSL (best fit straight line) oi vi cac iem d lieu (hnh 5.71). Khi la chon mot bien cam ap suat,
ngi s dung phai can than xac nh phng phap dung e tnh toan sai so tuyen tnh.
Hnh 5.71 ng thang BFSL tuyen tnh phu hp nhat Best Fit Straight Line.
Hnh 5.72 o tuyen tnh c s gii han TBL.
Hnh 5.73 Sai so tnh lap lai.
Phng phap khac xac nh o tuyen tnh la o tuyen tnh c s gii han TBL (terminal base linearity) hoac
iem cuoi o tuyen tnh (end point linearity) (hnh 5.72). TBL c xac nh bang cach ve mot ng thang
(L1) gia cac iem d lieu tan cung tren ng cong ac tuyen ra. iem d lieu c chon e at chieu dai
toi a cua ng vuong goc. o dai cua ng vuong goc the hien sai so o tuyen tnh c s gii han TBL.
TBL co o ln gan gap oi bien o cua BFSL.
Sai so tnh lap lai la s sai lech trong cac ch so tn hieu ra oi vi cac ng dung thanh cong cua ap suat au
vao bat ky a cho, so vi cac ieu kien khac van gi c khong oi (xem hnh 5.73).
Hnh 5.74 o tre.

Sai so o tre thng bieu th nh mot to hp cua o tre c hoc va o tre nhiet. Hnh 5.74 bieu dien o tre nh
to hp hai hieu ng nay. o tre c hoc la sai lech tn hieu au ra mot ap suat au vao nhat nh, khi au vao
nay at c ti ap suat o thoat tien bang cach tang ap suat roi sau o lai giam ap suat. oi vi nhieu bien
cam, cac sai so o chnh xac nho hn nhng sai lech o nh co can bang iem 0 hay can bang nhiet o.
Cac bien cam co o chnh xac cao noi chung la co gia thanh cao hn. Lieu he thong co thc s can en o
chnh xac cao hn ? Giai phap s dung mot bien cam co o chnh xac cao, lam viec vi thiet b o co o phan
giai thap, se la mot giai phap kem hieu qua.
Nhng nhiet o nao ma bien cam se phai chu?
Cac bien cam ap suat, cung giong nh moi he o lng vat ly khac, la oi tng co sai so va hong hoc do
nhng cc tr nhiet o cc oan. Thong thng co hai pham vi nhiet o c ac trng cho mot bien cam. o
la pham vi van hanh va pham vi so bu. Pham vi so bu la tap hp con cua pham vi van hanh. Pham vi nhiet o
van hanh la pham vi nhiet o ma bien cam co the van hanh trong o, mot khi c kch hoat ma khong b h
hai. Tuy nhien, no se khong trung hp vi cac ac tnh hoat ong a c cong bo cua no (cac he so nhiet o)
khi chu nhng nhiet o ngoai pham vi nhiet o so bu. Pham vi nhiet o so bu la mot pham vi hep ien hnh
ben trong pham vi van hanh. Trong dai nhiet o o cam bien c am bao trung hp vi nhng ac tnh a
cong bo.
S thay oi nhiet o anh hng ti tn hieu ra cua bien cam theo hai cach. Chung co the lam thay oi au ra
zero va cung co the anh hng ti au ra toan thang o. Nhng sai so nhiet o nay trong ac tnh hoat ong
cua bien cam c liet ke nh sau:
x % cua toan thang o / o C;
x % cua so ch th / o C;
x % cua toan thang o trong suot pham vi nhiet o so bu / o C;
x % cua so ch th oi vi toan pham vi nhiet o so bu / o C
Khong co nhng ac tnh liet ke nh the se lam tang tnh bat nh khi s dung bien cam.
Lieu s thay oi au ra bien cam la do thay oi ap suat hay do thay oi nhiet o ?
Nhieu hang san xuat ac trng cac pham vi van hanh va pham vi so bu, cac he so nhiet o cua iem 0 va
khoang pham vi thang o oi vi moi san pham. Cac hieu ng nhiet o tac ong len bien cam thng la phan
phc tap nhat trong kien thc ve khai thac s dung bien cam.
Hien tng troi iem 0 nhiet o (thermal zero shift).
Hien tng troi iem 0 nhiet la s thay oi trong tn hieu au ra ap suat 0, gay ra bi mot s thay oi nhiet
o nao o. Troi iem 0 nhiet o la sai so khong the oan trc c, bi no co the dch chuyen len hay
10
xuong, di bien t bo phan nay sang bo phan khac. S thay oi nhiet o se lam cho toan bo ng cong ac
tuyen ra b dch len hay troi xuong doc truc ien ap (xem hnh 5.75).
Hnh 5.75 Sai so troi iem 0.
Hnh 5.76 Sai so troi o nhay.
o nhay troi iem 0 la s thay oi o nhay bi nhiet o thay oi. Thay oi nhiet o gay nen thay oi o doc
ng cong ac tuyen ra (xem hnh 5.76). Mot cach tong quat hn, sai so troi o nhay quy chieu ti s thay
oi o nhay bi nhng thay oi bat ky cua moi trng.
o tre nhiet o la sai lech tn hieu au ra mot au vao nhat nh, trc va sau mot chu ky nhiet o. Trong
mot so ng dung, mot vai so lieu ac tnh c nha san xuat cong bo co the b cat giam hay han che. V du,
neu s dung mot cam bien trong pham vi nhiet o ch bang hoac hn na pham vi nhiet o c ac trng, th
co the giam sai so nhiet o ac trng i mot na.
Nen dung tn hieu ra nao ?
Hau nh moi bien cam eu co san vi s la chon au ra dang tn hieu ien ap millivolt, tn hieu ien ap qua
khuyech ai, tn hieu dong milliampere, hoac tan so ra. Tn hieu ra phu thuoc vao khoang cach gia bien cam
va bo ieu khien hay bo phan hien th trong he, s hien dien cua nhieu hoac cac giao thoa ien-t khac, lieu
co can khuyech ai hay khong, va neu can th au la ni thch hp nhat lap at bo khuyech ai. oi vi nhieu
san pham OEM vi khoang cach ngan gia bo bien cam va bo ieu khien, th au ra c millivolt thng la
tng thch va re tien hn.
Neu can khuyech ai tn hieu au ra cua bien cam, th co the dung bo bien cam vi sai co bo khuyech ai tch
hp ben trong de dang hn. e chay cap ng dai, hoac nhng dien tch co nhieu ien t ln, th tn hieu
ra la tn hieu dong c milliampere hay la tan so th phu hp hn. oi vi nhng moi trng co mc o nhieu
giao thoa tan so radio rat ln hoac giao thoa ien-t (EEI environment electrical interference hay EMI
electromagnetic interference), th phai nhan thc c s can thiet boc man chan bao ve va loc nhieu ho tr
cho cac au ra milliampere hay tan so.
ien ap kch thch la g?
Loai tn hieu au ra co the xac nh dang ien ap kch thch can thiet. Nhieu bo bien cam transducer co
khuyech ai cung co tch hp ben trong mot bo ieu chnh ien ap, va hoat ong trong mot pham vi ien ap
rong t mot nguon ien ap khong c ieu chnh. Mot so bien cam thuoc loai ty le ratiometic oi hoi nguon
kch thch ieu chnh c. ieu khien ty le co ngha la au ra cam bien ty le vi ien ap cung cap khi nhng
ieu kien khac van gi khong oi. Sai so ty le la s thay oi trong ty le ay va thng bieu th nh so phan
tram cua pham vi o. Nguon cung cap co san co the at ieu kien cho viec lieu co dung loai transducer co
ieu chnh hay khong ieu chnh. Hay nhan thc tnh thoa hiep gia nguon kch thch co san va gia thanh he
thong. Nhieu bo khuyech ai bien cam hay day o bien dang co nguon cung cap kch thch hoac la ien ap
ieu chnh c hoac la dong ieu chnh c.
Lieu co can loai bien cam co the thay the nhau c?
ieu quan trong la cac bien cam transducers thay the nhau c t he nay sang he khac, hoac se phai hieu
chuan tng transducer mot nh mot bo phan rieng le trong toan he thong? ieu o quan trong, ac biet la oi
vi OEM. Mot khi hang san xuat a chuyen san pham cua mnh ti khach hang, th chi ph hieu chuan tai hien
trng la rat ln. Neu cac bien cam thc s la thay the nhau c, th co kha nang thay the bien cam tai cho
va hy vong rang he thong se van gi c ac tnh hoat ong nh cu ma khong can phai hieu chuan lai bien
cam.
Bien cam can on nh nh the nao vi thi gian?
11
Phan ln cac cam bien se troi cach nao o theo thi gian. ieu quan trong la phai thao luan ve o on nh
lau ben vi nha cung cap. Cong viec lam trc se tra gia cho nhng van e xay ra sau tai hien trng.
Viec ket noi bien cam vao he thong thc hien nh the nao?
Mot ng day cap ngan noi bien cam co thch hp chang? Hay la, trong trng hp phai chay ng day cap
dai, lieu co can au noi cho cam bien? Nhieu loai bien cam ap suat co the c cung cap vi day cap noi hay
cac au noi thch hp kem theo.
Bien cam phai ben chac en mc nao?
Mot yeu to thng b bo qua, nhieu hn mc o that vong cua ngi s dung, la o ben chac cua bien cam,
ac biet la vo boc cua no. ieu quyet nh la nhan thc moi trng van hanh tng lai cua bien cam. Lieu
moi trng o co o am hay hi am cao? Bien cam se c lap at nh the nao? Lieu ay se co rung ong
hay va ap mc o cao? Tat ca nhng cau hoi ay nen c nhan thc khi la chon mot kieu vo boc.
Bi cac cam bien ap suat c s dung trong mot pham vi ng dung rong rai va rat khac nhau nh the, chung
c che san di dang nhng khoi chc nang nhe trong vo boc plastic gia thanh hieu qua, cho ti nhng
dang thiet b boc kn c bao trong vo boc bang thep khong r cho nhng moi trng khac nghiet hay nguy
hiem, nhng cho co hoa chat an mon, va nhng ng dung vi quan tam chu yeu la kh trung, nh trong che
bien thc pham, hay san xuat dung cu y te.
Giao dien va ky thuat ng dung cam bien ap suat.
Khi thiet ke ng dung, ieu quan trong phai hieu la cac cam bien ap suat khong ly tng. Viec tinh chnh
bang laser cho cac cam bien tch hp o khuyech ai cao, noi chung la lam giam cac sai so iem 0 va toan
thang o ti tr so xap x 1 hay 2 phan tram khoang pham vi o, nhng khong hoan toan triet tieu c chung.
Viec thiet ke mach hieu chnh ho tr oi luc la can thiet, nhat la cho nhng ng dung ch cho phep dung sai
bo hep trong mot pham vi cc nho.
Hnh 5.77 minh hoa ac tuyen mot cam bien ap suat ly tng. o troi tn hieu ra theo thi gian, viec tinh
chnh dung sai, va nhng thay oi nhiet o moi trng tat thay gop phan vao sai so nh thien offset hang
(sai so dang chung common-mode error), ky hieu la V0 . Nhng thay oi nhiet o moi trng cung gop them
sai lech dang khac, c biet nh troi o nhay, lam thay oi o doc ng cong ac tuyen ien ap theo ap
suat.
Cac phng phap c biet nh ky thuat tham chieu t ong auto-referencing la mot cong cu manh e bu tr
nhng sai so o. Nhng ky s thiet ke he thong nhan thay phng phap nay rat hap dan, bi v gia thanh thc
hien nho hn so vi cac cam bien ap suat sieu ben. Va nh vay, thc te o chnh xac cua dung cu cung tang
len. Co the thc hien tham chieu t ong theo phng phap tng t analog hay ca digital. Phng phap so
digital la phng phap co hieu qua gia thanh nhat va de thc hien. Neu gii han o chnh xac cua mach tham
chieu t ong c the hien bang sai so, th sai so co the giam xuong t nhat la 250 lan, ch con van e sai so
troi o nhay (dang thng normal-mode).
Hnh 5.77 Cac sai so cam bien.

o la tien bo co y ngha ma gia thanh phu troi em lai. Trong ng dung bat ky, khi viec tang o chnh xac
cam bien toi a la co gia tr, th hay cong nhan giai phap s dung mach tham chieu t ong. Viec tham chieu
t ong (dang chung common-mode) lam thay oi cac nguon sai so (dang chung). Cac sai so dang chung hien
12
dien mot so ap suat tham chieu va gop phan vao ien ap hang nh thien offset nh minh hoa tren hnh
5.77. Nhng sai so nay noi chung ln hn sai so troi o nhay, ac biet la nhng ap suat gan bang ap suat
tham chieu. Do o, chung cho phep o at o chnh xac cao nhat khi c tham chieu t ong.
Cac sai so dang chung de hieu chnh. Hay trch mau sample ien ap ra ap suat tham chieu va so sanh no vi
ien ap tham chieu mong muon. Tao mot ien ap hieu chnh sai so roi em no bu tr cho tn hieu ra ap suat
o bat ky (xem hnh 5.78).
Hnh 5.78 Cac sai so dang chung.
Hnh 5.79 Tn hieu tham chieu t ong.
Viec tham chieu t ong dang chung c bieu th bi cong thc:

Vcorr = Vout V0 ;
(5.30)
ay: Vout tn hieu o au ra; V0 sai so dang chung; Vcorr tn hieu ra c hieu chnh.
Lu y rang khong co hieu chnh o doc ac tuyen nao c thc hien oi vi sai so troi o nhay, va tn hieu
ra thc te se co dang nh tren hnh 5.79.
Viec thc hien t ong tham chieu dang chung oi hoi phai s dung nhng khoi chc nang c ban nh s o
hnh 5.80 minh hoa. Chung bao gom cac chuyen mach tng t, mach lay mau va dng S&H, bo cong, va
logic ong bo hoa chuyen mach gia cac chu ky oc va tham chieu au vao va au ra cua cam bien. e van
gi c o chnh xac toi u cho he thong, nen t ong tham chieu cang thng xuyen cang tot e han che
nhng bien ong nguon cung cap va troi tn hieu ra theo thi gian.
e chac chan rang phep o ap suat se c thc hien mot cach chnh xac nhat, s o thc hien lap tc lenh t
ong tham chieu. Mac du viec tham chieu t ong dang chung hau nh la ky thuat van nang, van co nhng
tnh huong ma ng dung chung t mang lai hieu qua: nh cac he co chu ky o lng ngan han, ni ma cac
iem tham chieu c oc hay c hieu chnh bang tay trc khi khi ong chu ky, hoac cho ma cam bien
c ghep vi nguon ien xoay chieu AC va ap ng thanh phan ien mot chieu DC se b loai tr.
Hnh 5.80 Nguyen ly t ong tham chieu dang chung.

Nhng kieu chu ky o nhat nh von thch hp vi quy khong t ong (ap suat tham chieu thc te la 0).
Mot cach ly tng, co mot loat cac chu ky ngan han co the co khoang tham chieu nhanh chen vao trc moi
chu ky. Mot chu ky o ngan c at trnh t thc hien iem tham chieu trc, ke theo la khoang thi gian
khong tac ong e o, cung rat thch hp.
Nhieu ng dung da tren mot trong nhng tieu chuan nay. Mot so ng dung khong the chuyen oi c theo
khuon kho chu ky lap lai ngan han, th se c thiet ke co tnh sang tao mot chut. Nhng v du ng dung quy
khong t ong auto-zeroing ly tng la: thang can o, bon nc toilet, may giat; va cac bnh tr ap suat nh
ap suat lop xe, ap suat dau, va ap suat bnh cha kh LP. ieu kien tham chieu c cung cap trc khi o.
13
Nhng trng hp khac la o lu lng dong chay va nhng ng dung ieu khien, v nh cac he ien t phun
nhien lieu (ong c ot trong), cac ap ke sphygmomanometers, va cac he ot nong khong kh cng bc. Lu
lng bang 0 tai mot iem nao o, thng la khi he b ngat nguon ien. Neu co dung ky thuat quy khong t
ong, th co the han che sai so nh thien iem 0 va troi iem 0.
Cha khoa oi vi mach tham chieu t ong la ap dung tn hieu kch khi trigger signal e ra lenh cho viec
tham chieu xuat hien vao thi iem thch hp. o goi la lenh tham chieu t ong.
Viec tham chieu t ong oi hoi xac lap mot he cac iem tham chieu. Viec x ly theo goi batch processing va
x ly lien tuc continuous processing la hai tieu chuan chnh cua chu ky o. Trong qua trnh x ly goi, ieu
kien tham chieu xuat hien vao mot thi iem nao o, thng la khi he c m nguon ien. V du, mot bon
cha toilet co mc nc cao trc khi xa, tng ng vi mot ap suat tham chieu nao o. Khi chu ky xa hoan
thanh, bon nc lai c ien ay ti mc cu. iem tham chieu t ong hien nhien la iem ngay trc khi xa,
khi nc ang mot mc a biet.
Trong qua trnh x ly lien tuc th khong de g tiep can c vi ieu kien tham chieu. V du, can kiem tra khoi
lng chat long trong mot thap nc. o la chc nang o sau cua nc va co the cam nhan bang mot cam
bien ap suat. Khong giong nh toilet, ay khong thc s phai lam mot phep o ap suat, khong co mot iem
nao trong thi gian ma o biet c o sau. He cam bien / tham chieu t ong / c cau chap hanh co the
dung cho trng hp n gian, khi mot tham chieu biet trc xuat hien mot cach nh ky. Nh vay, co the s
dung mot c cau chap hanh ieu kien tham chieu kieu nh van cam ng ien t valve solenoid. No co the
chuyen mach ra cua cam bien, t ap suat o sang mot ap suat tham chieu nao o khac.
Cuon day cam ng solenoid co the c kch hoat bi ngi s dung, theo mot ieu kien nao o, nh bat m
nguon ien, hoac bang mot mach khi ong theo thi gian (xem hnh 5.81).
Hnh 5.81 Tham chieu t ong co cac c cau chap hanh ieu kien tham chieu.
Valve phai c kch hoat u lau e ap suat co c hoi on lap trang thai, sao cho co the ghi nhan ch so o tin
cay. Lay thap nc lam v du. Mot cam bien ap-ke at gan ay se cam nhan o sau nc. Mot ong venture
at be mat dung lam ap suat tham chieu.
Mot van cam ng ba ng dung lam c cau chap hanh, ket noi nc va ong venture vi cong vao cua cam
bien. Mot mach nh thi dung lam bo ieu hanh enabler (xem hnh 5.82).
Hnh 5.82 Mach nh thi, cong n.
Hnh 5.83 Mach nh thi, cong kep.
Tiep theo, gia thiet nc chay qua ng ong n co ng knh khong oi. Co the o van toc chay bang mot
cam bien ap suat vi sai. Cuon day solenid hai ng c mac gia hai cong vao, dung lam c cau chap hanh
tham chieu nh trong hnh 5.83.
Nhng phat trien mi va trien vong. Nhieu phat trien mi ket hp vi ky thuat cam bien ap suat tao ra cac
cam bien cung cap nhieu chc nang hn la ch dung o ap suat. Ngay cang nhieu he thong ieu khien t ong
14
tr thanh cac mang da tren c s CAN va cac he t no thanh linh hoat hn. Cac nha san xuat cam bien
ang gia tang c hoi cung cap nhieu thong tin hn, ngc vi viec ch a nhng tn hieu ra n gian.
Cong nghe CAN a dan ti cac cam bien linh hoat chao mi mot loat nhng chc nang phan tch cac qua
trnh lien quan va t phan tch. Chung ang c van hanh trong cac trang thiet b thong minh intelligent,
tren san xng san xuat, trong khoang may bay, va trong cabin xe may.
Mot no lc khac bao ham viec ghep chum cac kieu phan t cam bien khac nhau ben trong vo mot chip vi
mach n. Hang Honeywell dung cach tiep can nay khi ho dung cam bien lu lng khoi kh e tao ra mot vi
cam bien microsensor e o lien tuc nhiet o moi trng, ap suat, nhiet dan va nhiet dung rieng cua chat
long. Cong nghe nay co the ap dung cho cac nha may hoa chat, cac phng tien lu tr hoa chat, va trong
cong nghe san xuat xe oto, ni ma noi v du, no cho phep ong c xe may t ieu chnh oi vi nhng thay
oi tnh chat nhien lieu moi lan bon nhien lieu c nap lai, lam cho chat kh gas c cai thien khoang cach
tnh ra dam mileage va lam sach kh thai.
Cung cach tiep can nh vay c thc hien e phat trien cong nghe ien tr ap-ien, chat silicon tren nen
cach ien SOI (Silicon-On-Insulator), co o nhay cao, chu nhiet o cao, dung cam bien ap suat, cam bien
nhiet o, va cac mang ien tr phan hoi feedback va ien tr nh thien bias eu c tch hp ben trong mot
chip vi mach n te vi 90 millimet vuong. Cong nghe nay c thiet ke cho nhng ng dung ca ap suat cao
lan nhiet o cao. He so day o cao cua chung la rat quan trong trong nhng ng dung co ty so tn hieu tren
nhieu (signal-to-noise ratio) ln e at c o chnh xac hoat ong cao, ac biet la trong mot pham vi
bien thien nhiet o rong nh oi hoi ong c turbine va trong be cha dau cong nghiep ngam. Cac ket qua
th nghiem trch mau ch ra rang thiet ke cam bien a han che thanh cong va/hoac giam thieu mot cach thanh
cong cac nguon sai so o tre c hoc va tre nhiet mc tuyet vi oi vi nang lc o lng hien ai a thanh
nghe thuat.
5.2.2 Cac cam bien ap suat kieu ien tr ap-ien piezo-.
Hai anh em Pierre va Jacques Curie a phat hien hieu ng ap-ien piezoelectric t nam 1880. Ho tm ra rang
mot so vat lieu tinh the ket tinh tao ra s phan cc ien khi chu mot lc tai c hoc doc theo mot hng tinh
the nao o. Trong so cac vat lieu ho a khao sat th thach anh quartz va tourmaline la hai tinh the ma ngay
nay van thng dung trong cac cam bien ien tr ap-ien. Cam bien ap suat dang ien tr ap-ien au tien
a c cong bo khoang nam 1920, nhng cac cam bien thng mai van cha san co tren th trng cho mai
ti nhng nam 1950, khi cac ong o tnh ien electrometer tubes co chat lng am bao tr thanh pho bien.
Ngay nay, cac cam bien ap suat c s dung rong rai trong cac phong th nghiem va trong san xuat. Nhng
ng dung chu yeu c nhan thay trong cac may no ong c ot trong combustion engines, cong nghe uc
khuon phun injection molding va an ao ballistics, nhng chung cung co the ng dung trong nhng lnh vc
bat ky, oi hoi o chnh xac o lng hoac kiem tra cac bien the ap suat.
Cac u iem chu yeu cua cam bien ap-ien la:
Pham vi o rong (ty so khoang o tren ngng o at ti 108).
o cng vng cao (tan so t nhien cao).
o tuyen tnh cao gia tn hieu ra va tai trong tac dung.
Co tnh nang lap lai va on nh ac tnh (khi dung cac n tinh the).
Pham vi nhiet o lam viec rong.
Khong nhay vi cac trng ien va ien-t.
Ngi ta thng noi rang cac bien cam ap-ien da tren hieu ng ap ien thuan ch co the dung o ap suat
ong hoc. ieu o ung mot phan, v chung ch phan ng vi s thay oi trong tai trong va v vay khong the
thc hien cac phep o thc s tnh. Tuy nhien, mot cam bien tot vi phan t cam bien lam t vat lieu n tinh
the, ket hp vi cac bo phan ien t tng thch, co the dung cho nhng phep o chnh xac ap suat tnh xuong
ti c 0,1 [mHz]. Noi cach khac, co the thc hien c cac phep o chuan tnh quasistatic keo dai ti c vai
gi.
15
Cac cam bien ap suat kieu ap-ien da tren hieu ng ap ien thuan (tao ra ien tch di tac dung cua tai c
hoc) c coi la cac cam bien tch cc, v chung khong can co nguon cung cap nao ben ngoai. Chung co au
ra la ien tch, nen oi hoi phai mac them ben ngoai mot bo chuyen oi ien tch thanh ien ap.
Ve ban chat, co hai loai chuyen oi, ien ke tnh ien electrometer va khuyech ai ien tch charge amplifier.
Bo khuyech ai ien tch c sang che bi W.P. Kistler nam 1950 va dan dan thay the cac ien ke tnh ien
trong nhng nam 1960. S dan nhap cac mach MOSFET va JFET va s phat trien cac vat lieu cach ien cao
nh teflon va kapton a tang cng tnh nang van hanh va thuc ay ky thuat o lng ap-ien ng dung trong
moi lnh vc cong nghe hien ai.
Cac van e cong nghe ng dung c ban.
Hieu ng ap-ien Piezoelectricity. Hieu ng ap-ien c nh ngha mot cach c ban la mot tng tac
ien-c tuyen tnh trong mot vat lieu khong co tam oi xng. Ngi ta phan biet hieu ng ap-ien thuan va
hieu ng ap-ien nghch. Trong trng hp hieu ng ap-ien thuan, mot tai trong c hoc hay s bien dang
tinh the tao nen mot ien tch ty le hay mot the ien ong. Trong trng hp hieu ng ap-ien nghch th mot
ien trng tac ong len tinh the tao nen mot s bien dang c hoc hoac tao ra mot tai trong ty le vi trng
tac dung. oi vi ky thuat cam bien o lng cac ai lng bien dang th ng dung chu yeu hieu ng ap-ien
thuan. ay co the mo ta hieu ng piezo- nh sau:
D = .E + d . X ;
(5.31)
ay: D la s dch chuyen do ien trng tao nen; E la cng o ien trng; X la ng suat c cung cap cho
vat lieu. Hang so ien moi va he so ap-ien d mo ta tnh chat cua vat lieu. D va E la nhng vectors, la
tenx hang 2, d la tenx hang 3 va X la tenx hang 4. ieu nay co ngha cac tnh chat ap-ien la d hng
anisotropic, cac he so tch cc oi vi d va c xac nh bang tnh oi xng cua tinh the. Do o s nh
hng cua phan t o lng dang tinh the ket tinh la quan trong va co tnh quyet nh cac thuoc tnh cua no.
ay dung khai niem tenx bien dang, mo ta s bien dang cua mot vat, trong o cac ai lng la cac thanh
phan tenx bien dang cua o dch chuyen D.
Mat cat doc va ngang, hieu ng the khoi. Trong mat cat doc, be mat AQ ma tren o co ien tch Q c tao
ra, cung nh be mat AF ma tren o co tai trong (lc) F tac dung. o nhay ap-ien ch phu thuoc duy nhat vao
he so ap-ien doc dL. Ngc lai, trong mat cat ngang, ien tch tao ra va tai trong cung cap khong tac dung
tren cung mot be mat. o nhay phu thuoc vao ca he so ap-ien ngang dT va vao ty so dien tch be mat
AQ AF (hnh 5.84).
Mat cat doc:
Q = d L .F ;
AQ
l
Mat cat ngang: Q = d T .F .
= d T .F . ;
AF
t
(5.32)
(5.33)
ay: l la chieu dai va t la o day cua tam ap-ien.

u iem cua mat cat ngang la co the gia tang o nhay bang he so hnh hoc l/t, gia thiet la cac he so ap-ien
doc va ngang la nh nhau. ieu o luon ung oi vi trng hp thach anh va moi tinh the co tinh the oi
xng nh thach anh. Con oi vi tourmaline, lithium niobate, lithium tantalate va gom ap-ien piezoceramics
th he so ngang ch bang 1/10 hay 1/3 he so doc, v vay ma oi vi cac tinh the nay mat cat ngang t khi c
s dung.
16
Hnh 5.84 Mat cat doc (trai): ien tch tao ra va lc tac dung tren cung mot be mat.
Mat cat ngang (gia): ien tch tao ra khong tren cung be mat vi lc tac dung.
Hieu ng the khoi (phai): Ap suat thuy tnh cung cap len mot mau th,
ien tch tao ra tren hai be mat oi dien.
Ca hai hieu ng doc va ngang eu da tren c s truc n uniaxial. Ap suat can o c chuyen oi thanh lc
tac dung n truc bi mot mang ngan.
Hieu ng the khoi khac vi hieu ng n truc la lc c cung cap len moi be mat cua phan t cam bien. o
nhay la tong cua cac thanh phan doc va ngang.
(5.34)
Hieu ng the khoi: Q = (d L . p + 2.d T . p ). AQ = d h . p. AQ ;
ay: d h la he so ap-ien thuy tnh va p la ap suat cung cap.
Lu y rang he so ap-ien thuy tnh d k luon bang 0 oi vi thach anh va tat ca cac tinh the co cung oi xng
tinh the nh thach anh. Hieu ng the khoi c s dung chu yeu trong cac cam bien song va ap hoac trong
cac ng dung thuy am hoc hydrophone, ni ma hng lan truyen song ap suat cha biet trc.
oi vi cac hieu ng doc, ngang va the khoi, tai trong c cung cap vuong goc vi be mat ap-ien tch cc.
Ve nguyen tac cung co the s dung c cac mat cat bien dang trt shear cuts, ni ma tai trong c cung
cap song song vi be mat, nhng se khong gia tang ang ke cac thuoc tnh ap-ien.
Vat lieu ap-ien. Phan t cam bien la trai tim cua transducer va nen la chon mot cach ky lng. Cac
phng cach bu tr bang mach ien t hoac bang phan mem oi vi cac tinh the co thuoc tnh toi kho ma
thc hien c. o nhay cao, ien tr cach ien cao, o ben c hoc cao, o cng vng cao, tnh phu thuoc
nhiet o thap (cua cac ac tnh ky thuat) trong mot pham vi bien thien nhiet o rong, tnh d hng thap, quan
he tuyen tnh gia ien tch va ng suat c, khong b lao hoa, khong co tnh hoa ien no pyroelectricity (khong
nhay vi thay oi nhiet o), chu gia cong che tao, gia thanh che xuat thap o ch la mot so t nhng yeu cau
oi vi mot vat lieu ap-ien tot. Tat nhien, khong ton tai th vat lieu ly tng ap ng thoa man het nhng
tieu chuan neu tren.
Thach anh a c s dung mot cach pho bien trong nhng nam trc va van con la vat lieu c la chon
cho hau het cac cam bien ap suat ngay nay. No rat on nh, co sc ben c hoc rat cao, co the s dung ti
400 o C , co cac tnh chat cach ien tuyet vi, co sai lech o nhay toi thieu ti tan 350 o C (vi mat cat tinh the
ac biet), khong co tnh hoa ien va gia thanh san pham thap. Nhc iem duy nhat cua thach anh la o nhay
cua no tng oi thap va co xu hng sinh oi tinh the twin di tai trong qua cao.
Tourmaline co o nhay thap hn thach anh, nhng pham vi nhiet o cua no khuyech trng toi thieu ti
600 o C. Tuy nhien no co tnh hoa ien va ch co san di dang tinh the t nhien. Lithium niobate va lithium
tantalate co o nhay cao hn, nhng chung co tnh hoa ien manh va ien tr cach ien cua chung rat thap,
ch s dung han che trong nhng ng dung n thuan ong hoc.
Cac tinh the nhom CGG (ien hnh la cac tinh the Ca3Ga 2 Ge4 O14 va langasite, noi v du) la vat lieu mi c
tch cc nghien cu 20 nam qua. Chung thuoc loai co tinh the oi xng nh thach anh, khong co tnh hoa ien
va co o nhay cao. Khong giong nh thach anh hay gallium orthophosphate, chung khong co s chuyen pha
cho ti iem nong chay (tren 1300 o C), cho nen cac ac tnh cua chung van gi c rat on nh cho ti nhiet
o rat cao va khong xay ra sinh oi tinh the. Tuy nhien s tang trng cac tinh the ln kho khan hn nhieu so
vi thach anh, mac du tinh the langasite a tang trng c en c 4 inch ng knh.
Gallium orthophosphate cung co cung dang cau truc tinh the nh thach anh. o nhay cua no gap hai lan thach
anh va thc te khong oi cho ti 500 o C. S chuyen pha cua no nam trong hkoang 970 o C (oi vi thach anh la
573 o C), lam pham vi nhiet o co ch m rong len en 600 o C. Tuy nhien no rat kho phat trien tinh the (s
tang trng keo dai vai thang ti mot nam) va khong san co di dang tinh the ln.
Cac chat gom ap-ien piezoceramics tren c s PZT va Lead-Metaniobate co o nhay ap-ien rat ln (ti 100
lan so vi thach anh), nhng b lao hoa (phu thuoc thi gian kh phan cc), o tuyen tnh yeu va hieu ng hoa
ien ln, lam han che pham vi s dung, ch nhng ng dung ma o chnh xac khong quan trong lam.
17
Cac chat gom ap-ien nhiet o cao (cac vat lieu da tren bismuth titanate) co the s dung ti 500 600 o C,
nhng phai chu ng nhng van e tng t nh PZT (mac du khong en noi nghiem trong lam). o nhay
cua chung cao hn thach anh khoang 5 en 10 lan. Chung c dung trong nhng ng dung nhiet o cao (v
du cac may o gia toc hoat ong c en 600 o C).
Cac bo phan ien t. Nh a neu trong phan gii thieu, cac bien cam ap-ien la nhng he tch cc (chung
khong oi hoi nguon cung cap ngoai nao) ma co tn hieu ra la ien tch (au ra tr khang cao). e thu thap d
lieu va phan tch tn hieu, au ra ien tch phai c chuyen oi thanh ien ap, v du bang cac phng tien
ien ke tnh ien hay khuyech ai ien tch.
Hnh 5.85 a). Bo khuyech ai ien tch phong th nghiem;

b). Bo khuyech ai ien tch cong nghiep. (Courtesy of Kistler).
Bo khuyech ai ien tch. Hnh 5.85 minh hoa cac bo khuyech ai ien tch dung trong phong th nghiem va
trong cong nghiep. Bo khuyech ai ien tch phong th nghiem, hau nh dung c cho cac cam bien dang bat
ky nao (bao gom ca cam bien lc va may o gia toc) ma co au ra ien tch, co the ket noi trc tiep cam bien
vi au vao khuyech ai. Bo khuyech ai ien tch cong nghiep co hai dai pham vi o, co the thc hien
chuyen mach chon pham vi o t xa.
Ve c ban, khuyech ai ien tch la bo khuyech ai chuyen oi ien ap co o khuyech ai cao vi tr khang
vao rat cao, c cau hnh nh mot bo tch phan.
Hnh 5.86 gii thieu mot chuoi o lng co bo khuyech ai ien tch. Cam bien c mo ta tng ng mot
nguon dong (nguon ien tch) mac song song vi ien dung C s va ien tr Rs cua cam bien. Cac tnh chat
cua ng cap noi c mo ta tng ng tu C c va ien tr cach ien Rc . Bo khuyech ai ien tch gom bo
khuyech ai (co o khuyech ai cao) va tu ieu chnh pham vi o C r , ien tr hang so thi gian Rt va chuyen
mach R/O (reset/operate).
Hnh 5.86 Chuoi o co khuyech ai ien tch.

ien ap ra U out thong dung nhat la 10V. Pham vi ien dung C r thng c chuyen mach gia 10 [pF] ti
100 [nF], cho phep thc hien phep o trong mot khoang ien tch rong. Hang so thi gian co the bat chuyen
mach bang ien tr Rt (thng la 1 [G ] ti 100 [G ]). Chuyen mach R/O Reset/Operate cho phep at nh
iem 0 cua bo khuyech ai ien tch.
18
ien ap ra cua mot khuyech ai ien tch ly tng (o khuyech ai mach h la vo tan, khong dong ro, khong
ien ap offset au vao), ch phu thuoc vao ien tch c tao ra va pham vi ien dung, ni ma tr khang au
vao khong b anh hng.
(5.35)
Tn hieu ra: U out = Q C r ;
Tan so gii han thap nhat (-3 dB): f l = 1 2Rt C r .
(5.36)
Neu khong chon ien tr Rt th bo khuyech ai ien tch hoat ong kieu DC (khuyech ai dong mot chieu) va
ac tnh trang thai dng se c ieu khien bi o troi.
Nhng quan he nay la ung cho phan ln cac ng dung. Trong mot so trng hp cc oan, cac tnh chat cua
mot bo khuyech ai ien tch thc te phai c tnh toan nh sau:
Gii han tan so tren: f u = (200 500) [kHz];
Khi hoat ong cac tan so tren 100 [kHz], khong the tiep tuc bo qua tr khang vao, bi v khi o o khuyech
ai mach h cua bo khuyech ai phu thuoc vao tan so.
o troi bi dong ro: I L < 10 [fA] (oi vi MOS-FET);
< 100 [fA] (oi vi J-FET).
Dong ro gay nen o troi ien ap ra, hau qua la co the lam bo khuyech ai b bao hoa. ien tch phu thuoc
thi gian:
QL = I L .t ;
(5.37)
tao nen ien ap ra phu thuoc thi gian:
(5.38)
U out (t ) = I L .t C r .
o troi bi ien ap offset va tr khang vao thap: U off vai [mV].
ien ap offset au vao khuyech ai tao ra dong:
I d = U off (Rs Rc ) .
(5.39)
Bi co dong ro, dong I d co the se lam bo khuyech ai b bao hoa. Mot so bo khuyech ai ien tch co bo quy
0 ben trong e gi o troi mc rat nho. Neu tr khang vao phai rat nho (v nh trong phep o nhiet o
cao) th viec bat ien tr hang so thi gian Rt hoac mac them mot tu ghep noi tiep vao gia cam bien va bo
khuyech ai co the se giai quyet c van e o troi. Trong ca hai trng hp, se tang c gii han tan so
thap f l .
Q
.
(5.40)
ien dung vao cao (>1[ F]) : U out =
1 C s + Cc
C r 1 + +
A
A.C r
Trong nhng ng dung can phai dung ng cap dai, khong the bo qua ien dung cua ng cap, ac biet la
neu o khuyech ai mach h cua bo khuyech ai can phai rat cao. Ket qua la lam giam tn hieu ra.
Chuyen oi tr khang (ien ke tnh ien Electrometer). Chuyen oi tr khang bao gom mot vi mach
MOSFET co tnh cach ien cao (>10 [T ]) va dong ro nho lam viec vi mot transistor lng cc co o
khuyech ai quy c va ien tr ra nho (c 100[ ]). Khong nh khuyech ai ien tch, au ra cua bo chuyen
oi tr khang b phu thuoc bi ien dung toan phan au vao (hnh 5.87):
Q
U out =
;
(5.41)
C s + Cc + Cr + C g
ay: C g ien dung cua MOSFET.
Chuyen oi tr khang c cung cap bang mot nguon dong hang (bang phng tien goi la mach ghep
coupler), tao ra mot ien ap offset au ra cua bo chuyen oi. Ngoai viec cap nguon cho chuyen oi tr
khang, mach coupler con phai tach tn hieu o khoi ien ap offset.
Hang so thi gian (gii han tan so thap nhat) cua he c tnh bang:
= Rt .(C t + C r + C c + C g ) .
(5.42)
19
Gii han tan so tren c xac nh bi tan so t nhien cua cam bien.
Hnh 5.87 Chuoi o co bo chuyen oi tr khang.

Trong hnh 5.87, cam bien c ac trng nh mot nguon dong (nguon ien tch) mac song song vi tu ien
C s va ien tr Rs . Cac tnh chat cua ng cap c mo ta bang tu ien C c va ien tr cach ien Rc . Bo
chuyen oi tr khang bao gom mot bo khuyech ai co he so khuyech ai thong nhat, co ien dung C r ieu
chnh pham vi o va ien tr hang so thi gian Rt . Mach ghep cung cap nguon cho chuyen oi tr khang bang
mot dong hang c 4 [mA]. Tu ien C k tach tn hieu o khoi ien ap offset.
Cac bo chuyen oi tr khang rat thong dung trong cac cam bien vi mach ien t tch hp (cac cam bien co
tn hieu ra la ien ap hoac cac cam bien tr khang thap). So sanh vi bo khuyech ai ien tch, th cac bo
chuyen oi tr khang la giai phap co gia thanh hieu qua va thng thay trong cac ng dung cong nghiep.
Ngc lai, bo khuyech ai ien tch co tnh linh hoat cao hn: ien ap ra khong phu thuoc ien dung au vao,
ien ap ra ty le vi tai trong cung cap, co the de dang chuyen mach pham vi ap suat o, cho phep ket noi cam
bien bat ky vao cung khoi thiet b.
Triet nhieu. Cac bo khuyech ai ien tch au n single-ended charge amplifiers thng c s dung mot
cach thong dung. Chung co mot tuyen chung common path cho tn hieu cua mot trong cac mat cat. Nham ngan
nga mach khep vong noi at, he thong cam bien + bo khuyech ai nen noi at ch mot iem. Giai phap
nay thng cho ty le tnhieutrennhieu tot.
oi vi cac phep o tn hieu mc thap, khi hien dien trng ien-t manh hay khi can ng cap noi dai, co
the can en mot bo khuyech ai ien tch vi sai.
Ve c ban, bo khuyech ai ien tch vi sai tach kh nhng tn hieu khong mong muon hien dien tren ca hai
vat dan (cach tach kh chung), v chung ch khuyech ai tn hieu vi sai. Viec nay oi hoi cac cam bien co
ien dung can bang nh nhau tren moi ng tn hieu.
Ket cau cam bien va ng dung.
Thiet ke c ban.
Hnh 5.88 Ket cau c ban mot cam bien ap suat ng dung tong quat.
20
Vo boc cam bien. Vo boc cua cam bien bao ve phan t ap-ien chong lai o am va hien tng bam ban. Vo
boc cung dung lam mot man chan ien chong nhieu. Hn na, no cung cap phng tien lap rap va boc kn
cam bien khoi cac anh hng ap suat moi trng ngoai. Dien boc kn cua cam bien c thiet ke ap ng
nhng yeu cau ng dung ac trng. Ch co the ap ng thoa man tat ca nhng yeu cau nay bang cach dung vo
boc bt kn. Vat lieu vo boc ien hnh la thep khong r c gia cng o cng.
Ong boc tai trong s bo. Viec at tai s bo cho phan t cam bien am bao o tuyen tnh tot va o nhay on
nh suot toan bo pham vi hoat ong cua cam bien. Tai s bo phai am bao tren toan bo pham vi nhiet o van
hanh. Vo ong boc tai s bo co the day c mot phan mi millimet e toi u hoa o mem deo an hoi va giam
s phan tan lc. Vat lieu cua vo boc tai s bo thng c lam t cung loai vat lieu nh vo boc cam bien.
Khong phai tat ca cac cam bien eu co vo boc tai s bo. oi khi, tai s bo c cung cap bi chnh mang
ngan diaphragm.
Mang ngan Diaphragm. Dien tch tch cc cua mang ngan chuyen oi ap suat thanh lc ty le tac dung len
phan t o. Lc nay tao ra mot ng suat trong tinh the, ng suat tao ra mot ien tch ty le. Ngay nay nhieu
mang ngan c han kn trong vo boc cam bien va c at tai s bo nhe, hay c han vao mat au cua
phan t cam bien. Mang ngan la bo phan quan trong nhat cua cam bien ap suat. No xac nh tnh lau ben cua
cam bien va o chnh xac cua phep o. No phai khong nhay vi nhng xung ong nhiet ngan han (nh cac
ong c ot trong) sao cho khong gay nen sai so o lng. Nham at c ket qua tot, cac mang ngan phai
c toi u hoa cho nhng ng dung khac nhau.
au noi. Cac au noi ien oi vi cac cam bien ap-ien phai co ien tr cach ien rat cao. Tuy theo pham vi
nhiet o van hanh, chat cach ien c lam t PTFE hay oxide nhom.
Vong em. Vong em nay bu tr s khac biet gia s n nhiet cua tinh the va vat lieu vo boc tai s bo. Bang
cach tnh gan ung kch thc va la chon vat lieu, vong em se giam thieu mot cach co hieu qua anh hng
nhiet o gay nen hien tng troi tn hieu au ra.
Phan t tinh the. Hnh dang va kch thc cua tinh the ap-ien bien thien tuy theo thiet ke va ng dung cua
cam bien. V du neu tren hnh 5.88 va 5.89b s dung mot mau thiet ke co ba phan t tinh the vi hieu ng
ngang. Cac be mat khong chu tai c hoc c boc bang kim loai chan khong va c cach ien vi nhau e
tao thanh cac ien cc thu gom ien tch. Mot lo xo hnh xoan oc tiep xuc vi cac be mat phang va mang ien
tch ti au noi. Mat hnh tru tiep xuc vi vo boc tai s bo.
Thiet ke phan t cam bien ap-ien. Ngay nay, cac mau thiet ke phan t cam bien co the thay oi c ban e
ap ng nhng yeu cau ac trng nh pham vi ap suat, nhiet o van hanh va cac nhan thc ve moi trng.
Cac a mat cat tinh the theo hieu ng doc. Cac phan t cam bien dung cac ban tam nay co the bao gom mot
hoac vai tam tinh the (hnh 5.89a). o nhay cua cac phan t ty le thuan vi so tam tinh the c s dung.
Hn na, cac tam nay khong oi hoi be mat kim loai hoa. ien tch c cac ien cc thu gom trc tiep t be
mat chu tai. Nhng phan t nh vay c s dung cho cac cam bien ap suat tan so cao (thi gian tang trng
ap suat ngan) hoac nhiet o cao.
Hnh 5.89 Thiet ke phan t tinh the vi sai:

a). mat cat doc; b). c). va d). mat cat ngang.
Bo mat cat tinh the theo hieu ng ngang. Trong hieu ng ngang, lc tac dung len cac mat au va ien tch
xuat hien tren cac be mat tinh the khong chu tai trong c hoc (hnh 5.89b). Nhng mat nay c phu kim loai
21
va c cach ien vi nhau. Tuy theo kch thc cua chung, mot bo ba tinh the tao ra ien tch bang 5 en 15
a ap-ien theo hieu ng doc. Nhng phan t nay la ly tng oi vi ap suat c va va nho, hoac cac cam
bien lc va co o nhay cao.
Mat cat tinh the danh thanh theo hieu ng ngang. Trong cau truc nay (hnh 5.89c), viec phu kim loai cac be
mat khong phai chu tai m rong en mot trong cac mat au. Tinh the kch c nho hn, tao ra mot ien tch
bang 4 en 6 a ap-ien theo hieu ng doc. Nhng tinh the nay cho phep thiet ke nhng mau phan t cam
bien rat nho.
Bo ban tam tinh the theo hieu ng ngang. Moi tam trong so bon tam (hnh 5.89d) cung giong nh thanh tinh
the mo ta tren. Ca bo co o nhay xap x 7 en 10 a ap-ien theo hieu ng doc. Tuy nhien, vi tam co o
day ch bang vai phan mi millimet th mot vai tam c dung song song e tang kha nang chu tai. Cau truc
nay la ly tng cho nhng cam bien rat nho gon.
Hnh 5.90 Cac cam bien o ap suat tong quat.
Trai: Mau thiet ke mat cat doc (cac a tinh the); Phai: Mau thiet ke mat cat ngang (cac tam tinh the).
Cac cam bien tieu chuan cho nhng ng dung tong quat. Ca hai cam bien trong hnh 5.90 co cung o nhay.
Trong khi cam bien ben trai dung tinh the theo hieu ng doc va co tan so cong hng cao (khoang 300 kHz),
th cam bien ben phai dung tinh the theo hieu ng ngang, va do o ve ban chat khong nhay vi hieu ng sinh
oi tinh the trong thach anh. Co the cat tinh the mot cach nhat nh theo cac mat cat e toi u hoa he so nhiet
o cua o nhay. Cac cam bien dung hieu ng doc cua thach anh khong nen dung cho nhng ng dung nhiet
o cao.
Cac nha san xuat cam bien cung ng mot s la chon rong rai cac phan cng lap rap tuy chon nh cac bo
phoi hp adaptors, kep noi connecting nipples, vv Chung cho phep mot so kieu cam bien s dung c mot
cach hieu qua oi vi nhieu ng dung. Trong tnh huong khong gian han hep, cac cam bien co the c lap
at trc tiep ma khong can au phoi hp.
Cac cam bien co san nhieu kch c. Cac phng an c nho co ng knh ngoai 6 [mm], c ln 11 [mm].
Trong khi cac cam bien c nho co o nhay 16 [pC/bar], c ln tao ra 80 [pC/bar] vi pham vi o t 250 [bar]
en 1000 [bar]. ieu ang lu y ay la cac cam bien ap-ien co pham vi o ong rat rong. Cung mot cam
bien co the dung cho pham vi o ty oi 1 [bar] cung nh cho toan thang o 1000 [bar].
Bu gia toc. Moi cam bien ap suat eu nhay vi gia toc, ac biet la gia toc hng truc. Trong moi trng co o
rung ong ln vi mc ap suat nho, gia toc tao ra tn hieu co the at ti vai mbar/g. Trong khi a so cac ng
dung sai so gia toc co the bo qua, th oi vi nhng phep o ap suat nho trong moi trng co o rung ong
ln, no co the lam ngng tre phep o. Trong nhng ng dung nh vay, (v du tham do mc am thanh hay trong
am hoc), nen dung cac cam bien co bu tr gia toc.
Cac cam bien ap suat co bu tr gia toc co the dung cac hieu ng tinh the doc hay ngang.
Mau thiet ke truyen thong.
22
Hnh 5.91 Mau thiet ke cam bien ap suat co bu tr gia toc:

a). Mau thiet ke truyen thong; b). Mau thiet ke mi.
Trong hnh 5.91a, lo xo hnh xoan oc helical-shaped spring ket noi ien tch t mot bo cac tam tinh the xuong
vo mass. Vong tinh the c lap at ngc cc tnh vi hieu ng tinh the ngang, do o lam giam o nhay ap
suat cua cam bien. Khoi vo bu c thiet ke kch thc sao cho vong tinh the tao ra cung tn hieu nhng
ngc dau tac ong len hieu ng ngang cua tinh the. Di tac ong cua gia toc, hai tn hieu co nguon goc t
hai bo tinh the se loai tr lan nhau. S bu tr gia toc gop them tnh phc hp vao cam bien, nhng mau thiet
ke ngay nay at c s bu tr gia toc ma khong can co vong tinh the.
Mau thiet ke mi. Trong mau thiet ke mi (hnh 5.91b) a c cap patent nay, hai he lo xo dang khoi c
ieu chnh nh nhau lam han che cac lc bat ky do gia toc tao ra tac dung len tinh the. o nhay rung ong
cua nhng thiet ke nay ien hnh la nho hn 100[ bar/g].
Cac cam bien ap suat cach ien oi at.
Cac cam bien cach ien oi at giam tieng u mach tiep a khep vong, tieng u se tang len khi hieu ien the
ln xac lap gia cam bien va chuoi o (mach ien t). Viec nay co the xay ra khi mach ien t va cam bien
c noi vi nhau bang ng cap rat dai. Trong mau thiet ke co cap ong truc (hnh 5.92a), man chan ngoai
cua cap ong truc khong noi ien vi vo cam bien. He 2-day (hnh 5.92b) oi hoi thiet ke vi sai cac phan t
o lng ap-ien va cung can co bo khuyech ai ien tch vi sai. Nhng cam bien nay u tien dung cho nhng
ng dung nhiet o t cao ti rat cao, trong cac turbine kh, trong cac ng dung hang khong va du hanh vu tru.
a so cac cam bien nay cung c bu tr gia toc.
Hnh 5.92 Cac cam bien cach ien oi at:

a). Mau thiet ke cap ong truc; b). Mau thiet ke 2-day.
Cac cam bien o an ao (ap suat cao ballistics).
23
Hnh 5.93 Mau thiet ke ien hnh oi vi cam bien an ao. (Courtesy of Kistler).
Cac cam bien lc, ap suat va gia toc kieu ap-ien a c s dung nhieu nam cho cac phep o an ao. Gan
40 nam trc, cam bien ap suat ap-ien au tien dung o an ao co mot piston c kh thay v mang ngan.
Cac cam bien nay phai thao ri va lam sach sau moi lan ban. Ngay nay, cac cam bien ap suat cao kieu apien c dung rong rai toan cau e th nghiem, nghiem thu an dc va phun bot. Cac phep th nay am
bao rang an dc a trai qua nhng yeu cau chat che ve ap suat c ac trng bi nha san xuat.
Ngay nay, cac cam bien c bao kn mat trc a thay the cac cam bien c boc vai. Hnh 5.93 gii thieu
mot cam bien ap suat chong bien dang co boc mat trc. Trong hnh, ng ren tach biet khoi phan t tinh
the (thiet ke chong bien dang), san co cac ren M10 va M12. Thiet ke nay han che cac sai so o gay nen bi
bien dang c hoc do lap rap tao ra. Hn na, thiet ke chong bien dang cung han che bien thien o nhay bi
bien thien moment xoan lap rap. Pham vi o oi vi cac cam bien an ao ap suat cao t 5000 [bar] en
10.000 [bar] vi o tuyen tnh nho hn 5% toan thang o vi o on nh o nhay lau ben tuyet vi. Ky vong
tuoi tho la vai ngan chu ky ap suat. Nh vi cac cam bien ap-ien bat ky, cam bien ap suat an ao cung
kieu co kha nang o t vai tram bar en 10 nghn bar.
Cac thiet ke kieu cu oi hoi cung cap mot cach nh ky mot lp m bao ve cho mang ngan e chong lai cac
chat kh nong. Cac thiet ke cam bien mi co kha nang o mot cach chnh xac vi ky vong tuoi tho tuyet vi
ma khong can lp phu bao ve.
Cam bien ap suat dang hoc Cavity-. Viec o ap suat hoc trong cac khuon uc may phun chat deo lam tang
chat lng va giam thi gian chu ky san pham. Viec toi u hoa qua trnh nay am bao rang cac bo phan thanh
phan co trong lng khong oi va gi c kch thc on nh. Viec kiem tra lien tuc cac dang ap suat trong
qua trnh uc khuon lam tang hieu suat bi giam gia thanh san pham.
Hnh 5.94 Cac cam bien o ap suat hoc: a). ng knh mat trc 6 mm;
b). va c). ng knh mat trc 2,5 mm. (Courtesy of Kistler).
Cac cam bien ap suat chuyen dung a c phat trien cho nhng ng dung nay. Ngc vi nhng cam bien
quy c, chung khong co mang ngan (hnh 5.94). Khi vat lieu chat deo nong tiep xuc vi hoc khuon uc tng
oi nguoi, chat deo lap tc hnh thanh mot lp vo da co tac dung nh mang ngan, do o ngan vat lieu nong
24
khoi xam nhap t nhat la 0,03-mm be rong khe h gia phan t o va khuon uc. ieu nay cho phep khong
phai dung mang ngan, mang ngan trong trng hp nay se han che tuoi tho ky vong cua cam bien. Hn na,
mat au cua cac cam bien nay co the c tao dang phu hp vi be mat khuon uc.
Nhieu cam bien c lap rap trc tiep vao khuon uc ma khong can co them tay boc protective sleeve bao ve.
ieu nay giam kch thc cua cam bien, lam no phu hp trong cac khuon dung cac bo phan thanh phan rat
nho. Cac cam bien lap rap trc tiep co ng knh ien hnh la t 4 ti 8 [mm] (hnh 5.95a), cai nho nhat ch
co ng knh 1[mm].
Cac cam bien ap suat dang hoc hoat ong tin cay nhiet o ti 200 o C. Mac du nhiet o khuon uc han che
tnh nang cua cam bien, nhiet o uc thc te cua vat lieu co the ln hn (400 o C). Phan ln cac cam bien co
kem theo mot vong tch hp dang ch O e giam bam ban (thng ong gia phan t cam bien va khuon),
nhng o khong phai bien phap thiet thc cho cam bien van hanh ung cach.
Hnh 5.95 a). Cam bien ap suat chay co au ren lap rap M5. (Courtesy of Kistler);
b). Cam bien ap suat nho co tch hp au cc anh la M12. (Courtesy of Kistler).
Cac cam bien cho ong c. Cac cam bien ap suat kieu ap-ien c dung t rat sm vao phep o ap suat
chay combustion pressure trong ong c ot trong. Ngay nay, phan ln cac cam bien ap suat kieu ap ien
c dung trong cac ong c oto cai tien. Cac cam bien mi ang c phat trien lien tuc e ap ng nhng
nhu cau cao hn oi vi cac ong c nho gon hn ma o chnh xac lai cao hn.
Nhiet o lam viec ien hnh bien thien trong khoang t 150 en 350 o C tuy theo v tr o va cac ieu kien th
nghiem. Tuy nhien, nhiet o mang ngan co the cao hn nhieu. Mang ngan b tiep xuc trc tiep vi cac chat
kh chay nong mot cach tuan hoan chu ky, nhiet o xap x 2.500 o C. Cac mau thiet ke va vat lieu mang ngan
ac biet giam thieu c sai so o do nhiet va am bao chu ky tuoi tho lau ben. Viec ap ng cac yeu cau
nay at ra nhng thach thc ac biet oi vi nhng mau thiet ke mang ngan va vi yeu cau cac cam bien phai
c toi u hoa cho nhng ng dung ac biet.
Cac ong c ot trong ngay nay tr nen nho gon hn va co bon hay nhieu valve cho moi cylinder. ieu nay
lam han che khoang khong danh cho cam bien ap suat chay. Cac cam bien co ng ren lap rap M5 vi
ng knh mat au 4 [mm] lam cho cach lap at nay kha thi (hnh 5.95a). oi vi cac ng dung trong khong
gian bo hep hn, cac cam bien co the tch hp trc tiep thanh cac au cc anh la spark plugs va au cc
phat sang glow plugs c thiet ke ac biet (hnh 5.95b).
Cac cam bien c lam lanh bang nc tang cng o on nh iem 0 zero (hnh 5.96a). Ban au, co nhu cau
nc lam lanh cam bien e bao ve cam bien khoi nhiet o cao cua ong c ot trong. Cam bien lam lanh
bang nc nho nhat hien nay co mot au ren lap rap M8. Cac cam bien hien ai co the s dung ma khong can
nc lam lanh, do o se khong b h hong neu v mot ly do nao o ma viec lam lanh b ngng.
25
e kiem tra cac ong c diesel va cac ong c chat kh cho cac tram nang lng va tau thuyen, ngi ta dung
cac cam bien ap suat khong phai lam lanh, va manh chac robust. Nhng cam bien nay c thiet ke e van
hanh lien tuc va co tuoi tho lau ben (hnh 5.96b). Thong thng, cac he o lng bao gom mot bo khuyech
ai ien tch c tch hp ben trong lam theo n at hang cho nhng ng dung ac biet.
Hnh 5.96 a). Cam bien ap suat lam lanh bang nc M8 kiem tra ong c ot trong.
b). Cam bien Robust khong lam lanh M10. (Courtesy of Kistler).
Cam bien ap suat nhiet o cao. Cac nha san xuat turbine kh can cac cam bien ap suat nhiet o cao co kha
nang lam viec nhiet o hn 400 o C e kiem tra nhng xung ong nho cua ap suat chay no. San co cac cam
bien lam viec ti 650 o C vi pham vi ap suat t 0 250 [bar] (hnh 5.97). e co the chu c nhiet o cao
nh vay, bo phan cam bien c lam bang mot a tourmaline va cam bien c lam va kht vi mot ng
cap hai day co cach ien bang chat khoang. Thiet ke cam bien tng t nh hnh 5.92b.
Hnh 5.97 Bo bien cam lam viec vi nhiet o ti 650 o C (Courtesy of Vibro-Meter SA.).
La chon cam bien.
Cac nha san xuat cam bien co the giup ngi s dung tm c cam bien thch hp nhat cho ng dung cua
mnh. Ngay nay ban ke d lieu san co tren Internet va cung vi nhng chc nang tm kiem hoac nhng cong
cu nh hng ng dung, ho tr rat nhieu cho viec tm kiem mot cam bien ung. Di ay liet ke nhng thong
tin cam bien thch hp va nhng thuoc tnh ien t can biet, trc khi bat au cuoc tm kiem.
Cam bien.
Pham vi ap suat ap suat toi a ma cam bien se phai o.
Pham vi hieu chuan tng phan co ch oi vi nhng phep o trong pham vi ap suat nho. Lu y rang cac cam
bien ap-ien a ra vai dai decades pham vi o ma khong b mat o chnh xac.
Qua tai ap suat toi a ma cam bien phai chu ng c.
Tan so t nhien no xac nh gii han tan so tren cua tn hieu ap suat ong hoc.
o nhay o nhay cua cam bien (thng c tnh bang [pC/bar] hay [mV/bar]).
Troi nhiet cua o nhay s bien thien o nhay nh la ham cua nhiet o.
o tuyen tnh thng tnh bang %FS (toan thang o Full Scale). o sai lech so vi quan he tuyen tnh thc
gia tn hieu ra va ap suat.
o tre thng tnh bang %FS. S sai biet tn hieu au ra khi tac ong cung ap suat tang roi giam lien tiep.
26
ien tr cach ien mot cam bien co cac thuoc tnh cach ien tot se cho phep thc hien nhng phep o
xuong en c [mHz]. Lu y rang o cach ien cua cam bien giam khi nhiet o tang.
Pham vi nhiet o nhiet o lam viec toi a va toi thieu. Neu nhiet o vt qua 300 o C, th phai chu y ac biet
en au noi va cap ien.
Kch thc cam bien cac kch thc ln nhat cho phep cua mot cam bien (lo lap rap).
o khang va ap o khang c va ap ln nhat (thng tnh bang [g]).
o nhay gia toc e cap en no la thch hp neu cam bien c lap rap tren mot cau truc von rung ong (v
du ong c). Phan biet o nhay gia toc hng truc va hng tam.
Shock nhiet bien ong tn hieu ra (thng tnh bang [bar]) bi shock nhiet tren cam bien. Quan trong trong
nhng phep o ong c ot trong.
Moi trng thong thng cac cam bien c boc kn bang vo boc thep khong r. Tuy nhien can chu y ac
biet neu anh nh dung cam bien trong nhng moi trng co tnh chat an mon va mai mon, hoac neu cam bien
se b chieu bc xa hat nhan.
au noi va ng cap cac cap ong truc o nhieu thap (au ra la ien tch), cap ong truc tieu chuan (au
ra la ien ap). Cac ng dung nhiet o cao (>300 o C) oi hoi ng cap va au noi ac biet.
au ra cam bien tn hieu ra la ien tch hay ien ap. Co the nhan c ien ap ra bang cach tch hp trong
cam bien mot mach ien t. u iem la nh vay khong can bo phan ien t nao phu them (bo khuyech ai
ien tch), nhng tnh limh hoat b giam nhieu, bi ch co san mot pham vi thang o va mot hang so thi gian.
Nhiet o b han che khoang 150 o C.
Gii han tan so thap hn phu thuoc ve c ban pham vi ieu chnh tr so ien dung va ien tr. Gia s he
thong co cau hnh sau:
o nhay cua cam bien ap suat: 20 [pC/bar];
Pham vi ap suat: 200 [bar];
au ra toan thang o: 10 [V].
Trc tien phai chon pham vi ien dung. o nhay au ra (o nhay cua bo khuyech ai ien tch) c cho
bang:
20[ pC / bar ].20[bar ] / 10[V ] = 400[ pC / V ] .
(5.43)
o cung la tr so ly thuyet cua ien dung C r =400 [pF]. Tat nhien, thc te khong co kha nang cau hnh mot bo
khuyech ai ien tch vi hang ngan tr so ien dung, ma ch vi 4 hay 5 dai ien dung nhat nh (noi v du:
100 pF, 1,10,100 nF, ). Trong v du cu the nay, pham vi ien dung hieu dung la tr ien dung ln nhat trong
chuoi so tiep theo tr so ly thuyet va tnh c, tc la 1 [nF].
kieu ien xoay chieu AC, hang so thi gian phu thuoc vao tch so Rt .C r . Gia thiet rang Rt = 100[G] ,
hang so thi gian se bang:
= Rt .C r = 100[ s ] ;
(5.44)
Va gii han tan so thap nhat (giam 3dB bien o song sin) c tnh ra tng ng:
fl = 1
= 1,6[mHz ] .
(5.45)
2. .
kieu ien mot chieu DC, khong co ien tr Rt va cac ac tnh cam bien dai han c ieu khien bi o
troi. Viec gia thiet mot ien ap offset U off c 5 [mV] tang au vao cua bo khuyech ai ien tch va o cach
ien cua cam bien c 10[T ], o troi se bang:
5[mV ] / 1013 [] / 1[nF ] = 0,5[ V / s ] ; co the bo qua.
(5.46)
o
nhiet o cao hn, khong con co the bo qua o troi c na. 400 C, cach ien cua cam bien rt xuong
con 10 7 [] , tao ra o troi c 500 [mV/s] au ra. Neu khong chuyen mach ien tr hang so thi gian th bo
khuyech ai ien tch se bao hoa, cham nhat la 20[s] sau ! Mot cach khac e han che o troi la mac noi tiep
tu ien C D rat ln vao gia cam bien va bo khuyech ai ien tch (tu ghep noi). Trong trng hp o, khong
xay ra hien tng troi va hang so thi gian bay gi c xac nh bi Rs .C D .
Cac bo phan ien t.
27
Mach ien t tch hp cung cap mot giai phap gia thanh hieu qua cho nhng ng dung oi hoi nhng thay
oi rat t trong cach at nh bien cam. B gii han nhiet o lam viec di 150 o C.
Bo khuyech ai ien tch cung cap o linh hoat cao nhat, v co the khai thac toan bo pham vi ap suat cua
cam bien va co the ieu chnh hang so thi gian. Hn na, au ra khong phu thuoc ien dung au vao.
Bo chuyen oi tr khang la la chon gia thanh hieu qua, khac vi cach chon bo khuyech ai ien tch. Tuy
nhien, au ra phu thuoc ien dung au vao (ien dung cap noi) va noi chung co kha nang chuan hoa tn hieu
han che hn.
Khuyech ai ien tch vi sai danh cho nhng ng dung vi cac tn hieu nho trong moi trng rat nhieu.
Nhng phat trien mi va trien vong. S phat trien ngay nay chu yeu dan ti hai yeu to: te vi hoa va nhiet
o cao. Hai yeu to nay a thuc ay viec nghien cu nhng vat lieu ap-ien mi vi nhng tnh chat tot hn:
o nhay cao va o on nh tot nhiet o cao (>300 o C). Nh la he qua, vat lieu mi thuoc ve nhom CGG ang
thay the cac vat lieu tieu chuan (thach anh va tourmaline) trong cac cam bien te vi hay trong cac cam bien
nhiet o cao.
Te vi hoa. Cac cam bien phai nho gon hn. o la he qua cua xu hng quan sat c trong nhieu lnh vc ng
dung. V du, cac ong c ngay cang nho gon, oi hoi cac cam bien co ng knh c M5 va nho hn. Trong
cong nghe uc khuon cac chat deo, ngay nay thong dung cac cam bien co ng knh 2,5 [mm] danh cho
nhng phep o ti 2.000 [bar]. Giam thieu kch thc cam bien la mot qua trnh ay thach thc. Ngoai nhng
kho khan trong san xuat cac bo phan thanh phan cam bien nho gon, van con van e o nhay giam ty le vi
kch thc mang ngan. Tng ng, viec tiet giam ng knh cam bien (mang ngan diaphragm) xuong con
mot na th o nhay tut xuong con mot phan t. Co the khac phuc c van e nay bang cach cat ban tinh the
rat mong va dung he so hnh dang trong cac mau thiet ke tinh the theo hieu ng ngang e co c o nhay
hoac/va bang cach s dung nhng vat lieu co o nhay cao hn.
Nhiet o cao. Cac cam bien ap suat tieu chuan ngay nay co the hoat ong ti 350 o C. Vt qua ngng nhiet
o nay nhieu van e phai vt qua: phan t ap-ien phai on nh ma van gi c o cach ien cao, co the
tranh an mon bang cach dung cac hp kim da tren nickel (nhng chung kho gia cong tren may, hay kho
han), day cap quy c phai c thay the bang cap kim loai tch hp, vv Tat nhien, cam bien phai chu ng
c nhng nhiet o cao nay thng xuyen, qua hang ngan gi, v may moc (v nh turbine) khong the luc
nao muon th ngng (e thay the cam bien b h hong). Mot so nha san xuat chao hang nhng cam bien hoat
ong ti 600 hay 700 o C, da tren c s tourmaline, lithium niobate hoac piezoceramics nhiet o cao.
Ban ke d lieu ky thuat (chng ch) cam bien. Moi cam bien c hieu chuan bi nha san xuat va xuat
xng vi cai goi la ban ke thong so hieu chuan. Trc khi s dung cam bien, ngi van hanh phai bat au
hieu chnh o nhay cua cam bien trong bo khuyech ai ien tch. oi vi nhng ng dung oi hoi nhieu cam
bien, th o co the la mot cong viec buon te va de mac sai sot. Chng ch cam bien, kem theo c s d lieu
bao gom tat ca nhng thong tin can thiet (ma danh ID, mc troi o nhay theo nhiet o, vv ) bay gi a tr
thanh san co va ho tr ln cho viec thc thi mot so lng ln cam bien. Mot cach la tch hp mot TEDS
(Transducer Electronic Data Sheet, tng ng IEEE 1451.4 Standard -) dang chip vi mach, vao cam bien hoac
trong au noi cua no. Khi cam cam bien vao bo khuyech ai ien tch, th d lieu c oc t TEDS va bo
khuyech ai ien tch t ong ieu chnh cac thong so cua no phu hp vi o nhay cua cam bien. TEDS co
the viet lai, theo nhng bien thai tuan t hoac nhng phoi hp tng thch thuoc tnh cua cam bien.
Mot cach khac, la tch hp mot chip ID (v du mot bang dau ma hoa song am be mat SAW surface acoustic
wave) vao cam bien. Bo khuyech ai ien tch nhan dang cam bien va co the nhan nhng thong tin tin cay
trong c s d lieu, c cung cap t mang ket noi vi mot may tnh PC.
28
WUX
BAI 9: KY THUAT CAM BIEN LU LNG CHAT LU.
CHNG 6. CAM BIEN LU LNG, MC VA O AM. PHAN 1.
lu lng chat long va kh (lu chat) (phan 1); cac ng dung trong ky
thuat o lng va ieu khien gom 2 phan cua chng 6.
sau:
Khai niem ai cng ve lu lng chat lu (chat long va kh) va nhng
ac iem xac nh chung. Cac loai phan t cam bien lu lng va may o
lu lng ng dung trong ky thuat o lng ieu khien, ket cau, hoat ong
chc nang, cac ac tnh ky thuat, ac iem ng dung.
Bai 9 tap trung trong tam la ky thuat cam bien lu lng chat long va kh
(phan 1) bang cac phan t cam bien ng dung rong rai trong cong nghiep
va dan dung.
KHAI NIEM CHUNG.
ai cng ve c lu chat va lu lng.
Chat lu (hay lu chat) la ten goi chung chat long va kh. C lu chat la bo phan cua c hoc nghien cu
chuyen ong cua cac moi trng long va kh va tng tac cua chung vi cac vat ran co bien gii chung. Trong
c hoc chat lu, cau truc phan t thc cua cac chat long va kh c thay the bang khai niem ly tng hoa ve
mot moi trng vat chat co hai tnh chat c ban: tnh lien tuc va tnh linh ong (tnh chay).
Lu lng la lng chat long hay chat kh chay qua tiet dien ngang cua dong trong mot n v thi gian. Lu
lng co the o bang [kg/s] neu tnh theo khoi lng chat (lu lng the khoi), hoac bang [ m 3 s ] neu tnh
theo the tch (lu lng the tch) cua lu chat (long, kh hay hi) lu thong qua ng ong dan. Neu tnh theo
the tch th lu lng Q bang:
Q = v.S ;
(6.1)
trong o v la van toc chat long tai tiet dien ang xet va S la dien tch tiet dien cua dong chay. Neu chat long
chay theo ong va khong chu nen th lu lng Q la khong oi moi tiet dien.
Lu lng chat (ky hieu ay la Q, [ m 3 s ], [ m 3 h ] hay [kg/s], [tan/h]). Khoi lng chat (ky hieu m, n v
o la [ m 3 ], [lt] hay {kg]) va the tch chat (ky hieu V, tnh bang [ m 3 ]) ay c hieu la lng vat chat lu
thong qua may o lu lng (lu lng ke, cong-t) trong mot khoang thi gian t nao o, tnh bang giay [s]
hay gi [h].
May o lu lng chat lu thong qua ng dan c goi la lu lng ke hay cong-t lu lng, ch th lu
lng trung bnh chay trong mot khoang thi gian (tc tr hieu dung hay tr trung bnh tch phan). May o co
hang so cong-t la qV xac nh lng chat qua may o ng vi mot ch so ch th may.
So o cua cac may o lu lng phu thuoc nhieu vao cac tnh chat hoa/ly cua lu chat trang thai moi trng
o, thng phai c quy oi ve ieu kien tieu chuan:
29
nhiet o o T o C = 20[ o C ] ;
ap suat kh quyen P=101325 [Pa]= 760 [mm thuy ngan];
o am tng oi RH%=0[%]).
(6.2)
Cac cam bien lu lng c ng dung nhieu trong o lng kiem tra va ieu khien, o lu lng cua ca chat
long va chat kh. Co nhieu cach xac nh lu lng dong chay (lu lng the khoi mass flow, lu lng the
tch volume flow, lu lng chay lp (tang) laminar flow, lu lng chay roi turbulent flow). Thong thng so
lng lu chat (lu lng the khoi) la quan trong nhat, va neu mat o chat long la khong oi, th phep o lu
lng the tch la cach thay the tot nhat cho phep o lu lng the khoi, noi chung de thc hien hn. Ngay nay
co kha nhieu cong nghe va cac kieu dang cam bien danh cho muc tieu nay. Mot so cong nghe ap dung c
cho ca cac phep o lu lng chat long lan cua chat kh, v nguyen ly hoat ong eu nh nhau trong ca hai
trng hp. Cac cong nghe khac ch ac trng cho lu lng chat kh hay lu lng chat long ma thoi. Trong
chng nay ta se ban thao mot so ky thuat thng dung nhat e o lu lng cua ca chat long va chat kh.
Phan bo sung cho phep o lu lng la phep o mc, va mot phng dien nao o la ca phep o o am. Cac
qua trnh o lng nay eu noi bat la kha phc tap.
6.1 CAM BIEN O LU LNG.
Phng phap ien hnh xac nh lu lng dong chay la trc tien o toc o chat long chay qua mot ng
ong, mot oan ong dan, hoac cac cau truc khac, roi nhan vi dien tch mat cat tai iem o.
Cac phng phap o lu lng chat kh bao gom:
Phong vu bieu nhiet thermal anemometers,
He o ap suat vi sai, va:
Cam bien chay xoay vortex shedding sensors.
Cac phng phap o lu lng chat long bao gom:
He o ap suat vi sai,
Cam bien chay xoay,
Cam bien lu lng chuyen dch tch cc,
Cam bien lu lng kieu turbine,
Cam bien lu lng kieu t trng, va:
Cam bien lu lng kieu sieu am.
Tren c s cac phng phap o nay pho bien cac loai may o lu lng sau:
Theo nguyen ly cam bien khoi lng the tch:
o Cam bien lu lng the tch chuyen dch tch cc: may o lu lng the tch (thng goi cong-t the
tch);
o Cam bien lu lng the khoi: may o toc o chuyen dch the khoi lu chat (thng goi cong-t toc
o hay cong-t tuabin).
Theo nguyen ly thay oi o giam ap trong ng lu thong:
o He cam bien ap suat vi sai: lu lng ke kieu bien oi ap suat;
o Cam bien chay xoay: lu lng ke Reynol nho, lu lng ke mao dan.
Theo nguyen ly bien oi ien:
o Cam bien lu lng kieu t trng: lu lng ke t -ien.
o Cam bien lu lng kieu sieu am: lu lng ke sieu am.
o Cam bien lu lng theo hieu ng laser Doppler: lu lng ke LDA.
6.1.1 Phong vu bieu nhiet Thermal Anemometer.
Cac phong vu bieu nhiet s dung nguyen ly: nhiet lng cua mot cam bien a c nung nong b dong chat
long chay qua lay i co lien quan vi van toc dong chay o. iem ac trng trong phng phap nay la co s
dung cam bien th hai, cam bien nhiet o khong b nung nong, e bu tr s bien ong trong nhiet o khong
kh, do vay ma phng phap con c goi la day nong hot wire.
30
Cac cam bien day nong c che tao san nh mot may o iem n danh cho cac muc ch th nghiem test,
hoac nhieu dung cu c bo tr tai nhieu iem lap at co nh. Cac cam bien nay dung o cac luong kh chay
cham tot hn cac kieu cam bien ap suat vi sai, va noi chung c s dung cho cac luong kh co van toc t 50
ti 12000 feet tren phut (tc la t 1 200 km/h).
Thong thng e o chat kh ngi ta dung cac manometers. Hnh 6.1 cho mot v du phep o ap suat thuy
ong cua luong kh bang manometer dang ong hnh ch U. ay s dung nguyen ly cam bien lu lng kieu
ap suat vi sai.
6.1.2 He cam bien o ap suat vi sai.
Cac cong nghe cam bien o ap suat vi sai co the dung cho cac phep o lu lng cua ca luong chat kh va
dong chat long theo nguyen ly thay oi o giam ap trong ng lu thong. Tren th trng co san nhieu kieu
dang cam bien chuyen dung dung o ap suat va dung o ca lu lng kh, cung nh cac cam bien ap suat vi
sai dung cho cac phep o chat long. Cac may o lu lng kieu ap suat vi sai la kieu may o thong dung, nhat
la cac may dung cho chat long.
Hnh 6.1 Phep o ap suat thuy ong dung manometer dang ong hnh ch U.
Nguyen ly hoat ong cua cac may o lu lng kieu ap suat vi sai da tren c s ap suat ri tren may o ty le
vi bnh phng lu lng; lu lng dong chay c xac nh bang cach o ap suat vi sai roi lay can bac hai
tr so o. Cac may o lu lng kieu ap suat vi sai, giong nh hau het cac may o lu lng khac, co cac phan
t s cap va th cap. Phan t s cap gay ra s thay oi trong nang lng ong hoc, e tao ra ap suat vi sai
trong ng ong. Cau truc may phai va kht vi kch thc ong, cac ieu kien dong chay, va cac tnh chat
cua chat long c o. Them vao o, o chnh xac o lng cua phan t phai am bao trong mot pham vi
chap nhan c. Phan t th cap o ap suat vi sai va cac tn hieu au ra c chuyen oi thanh gia tr lu
lng thc te cua dong chay.
Co nhieu cach xac nh lu lng dong chay (lu lng the khoi mass flow, lu lng the tch volume-, lu
lng chay tang laminar-, lu lng chay roi turbulent-). Thong thng, khoi lng chat chay (lu lng khoi)
la quan trong nhat, va neu mat o chat long la khong oi, th phep o lu lng the tch la thay the tot nhat
ma lai de thc hien hn. Mot lp cac bien cam transducers c s dung mot cach pho bien o trc tiep lu
lng dong chay, cung can en phep o ap suat. Hnh 6.2 gii thieu mot canh ngan nh hng bending vane
co lap ghep mot day o bien dang nhung trong dong chay e o lu lng.
Hnh 6.2 Canh hng co day o bien dang dung o lu lng dong chay
31
oi vi cac phep o lu lng luong kh, cac may o lu lng kieu ap suat vi sai thong thng bao gom cac
ong pitot (xem hnh 6.3) va nhieu kieu dang khac nhau cam bien ap suat thuy ong velocity pressure-sensing
dang ong tubes (xem hnh 6.1 ong ch U), dang li grids, va dang manh arrays. Tat ca cac phan t cam
bien nay eu ket hp vi bo phat dan ap suat vi sai cng o thap low differential pressure transmitter e tao
ra tn hieu ty le vi can bac hai cua toc o chat long.
Mot ong pitot bao gom hai ong o ap suat hai v tr khac nhau ben trong ng ong. Mot ong o ap suat tnh,
thng at tren thanh ng ong, con ong kia o ap suat tac dung impact pressure (ap suat tnh static pressure
cong vi ap suat thuy ong velocicity pressure). Lu lng dong chay cang nhanh th ap suat tac dung cang
ln. Cac ong pitot s dung s khac biet gia ap suat tnh va ap suat tac dung e tnh toc o dong chay.
Cac ong pitot la nhng dung cu re tien, nhng chung co nhc iem la ch o dong chay tai mot iem va can
phai lap at tai iem toi a toc o dong chay. Nhng thay oi trong hnh dang van toc dong chay co the gay
nen nhng sai so nghiem trong. Chung cung co xu hng lam nghet dong chay. Viec anh gia trung bnh cac
ong pitot co vai cong e o dong chay tai nhieu v tr khac nhau, cho phep tnh en s thay oi hnh dang van
toc dong chay.
Hnh 6.3 Ong Pitot.

Cac he o lu lng dong chay da tren c s ap suat vi sai bao gom cac bo truyen dan co kha nang rut ra can
bac hai cua ap suat o c bi phng tien ien t va cung cap tn hieu ty le tuyen tnh vi toc o. Cac
phng phap khac cung cap tn hieu ty le vi ap suat o c va phu thuoc vao he ieu khien e tnh toan can
bac hai. Mot khi co c tr so toc o, co the tnh c lu lng bang cach nhan vi dien tch mat cat cua
ong dan.
Pham vi o toc o thuy ong bi han che bi pham vi va o phan giai cua bo truyen dan c s dung. a so
cac may o ap suat vi sai eu b han che toc o toi thieu c 400 en 600 feet tren phut. Toc o toi a ch b
han che bi o ben cua cam bien. e o dong nc, ien hnh la cac dung cu o lu lng kieu ap suat vi sai
hoac la o ap suat thuy ong (dang ong nhung), hoac o s sut ap tren mot vach ngan biet trc nao o. Cac
tam ngan co lo orifice plates, cac ong phut gich-l flow nozzles, cac ong pitot, ong venturis la nhng kieu vach
ngan thng c s dung.
Cac cam bien lu lng kieu ong nhung c che tao mot cach ien hnh t mot ong dan co nhieu nhanh m
multiple openings chay suot be rong dong chay, e cho ta tr trung bnh vi sai toc o dong qua ong; va mot vat
can ben trong nam gia cac ca m pha tren va pha di dong chay e nhan c ap suat vi sai. Cac may
o kieu ong nhung co o ton hao ap suat ben permanent pressure loss thap va co the ap ng thoa man nhieu
ng dung thong thng.
Loai tam ngan co lo ong tam concentric orifice plate la dang n gian nhat va re tien nhat trong so cac dung
cu ap suat vi sai. Tam ngan co lo lam dong chat long chay theo dang ong tam va tao nen ap suat vi sai tren
tam lo (xem hnh 6.4). ieu o tao ra ap suat cao trong dong chay tren va ap suat thap dong chay di, ty le
32
vi bnh phng toc o dong chay. Tam ngan co lo thng tao ra ton hao ap suat toan phan ln hn la cac
phan t lu lng khac. Mot u iem cua dung cu nay la gia thanh khong tang may vi kch c ong.
Hnh 6.4 Tam ngan co lo ong tam.

Cac ong venturi (hnh 6.5) la dung cu ap suat vi sai ln nhat va at tien nhat. Chung hoat ong theo ng
knh hep dan lai cua ng ong gradually narrowing the diameter, va o s sut ap bi o hep dan ay. Phan n
ra sau o cua dung cu ap suat vi sai se lam cho ap suat dong chay tr lai gan nh ap suat ban au cua no.
Cung nh vi tam ngan co lo, phep o ap suat vi sai c chuyen oi thanh lu lng thuy ong tng ng.
Mot cach ien hnh, cac ong venturi ch c s dung trong nhng ng dung oi hoi o sut giam ap suat thap
va o chnh xac cua cac so o cao. Chung thng c dung trong cac ng ong co ng knh ln.
Hnh 6.5 Ong venturi.

Cac cam bien dang ong phut gich-l flow nozzles thc te la mot bien dang cua kieu ong venturi, co gich-l m
ra lam vat can hnh ellip trong dong chay nozzle opening being an elliptical restriction, nhng khong co
khoang n ra e bu tr lai ap suat (hnh 6.6). Cac gich-l ap suat taps c nh v khoang ng knh
ong dong di downstream va bang khoang 1 ng knh ong dong tren upstream.
Cac ong phut gich-l la may o dong chay toc o cao, thng c s dung khi co o roi turbulence cao (so
Reynold tren 50.000), nh trong cac ng dung o lu lng luong hi. o sut ap suat cua cac ong phut gich-l
nam gia kieu ong venturi va kieu tam ngan co lo ong tam (30 ti 90 phan tram).
Li ch cua cac dung cu ap suat vi sai la gia thanh thap, van hanh va lap at n gian, va kha nang hoat ong
a c minh chng tren thc te. o la mot cong nghe de hieu. Nhc iem cua nhng dung cu nay la ton
hao ap suat ben, co the b tch tu can ban va lam nghet; mot vai kieu dang co kch c ln; va khong thch hp
vi mot so loai chat long nhat nh.
33
Hnh 6.6 Cam bien dang ong phut gich-l.

6.1.3 Cac cam bien chay xoay Vortex-Shedding.
Cac cam bien lu lng nay da tren nguyen ly (Von Karman) la khi chat long chay vong qua vach ngan
obstruction (oi tng gia bluff object) trong luong chay, cac xoay hoac loc cuon eddies or vortices thay nhau
chay xuong luong di oi tng. Tan so chay xoay ty le vi van toc dong chay. Cac cam bien n c s
dung trong cac ong dan nho, con oi vi cac ong dan ln th ap dung cach bo tr cam bien thch hp, nh oi
vi cac kieu may khac o luong kh. Noi chung, cac cam bien chay xoay c ng dung cho cac dong kh co
toc o trong pham vi t 350 ti 6000 feet tren phut. Cac may o nay thch ng nh nhau e o lu lng thuy
ong hay o lu lng toan phan. Khong khuyen ngh s dung vi cac chat long co mat o cao hay dang set.
6.1.4 Cac cam bien lu lng kieu chuyen v tch cc Positive Displacement Flow Sensors.
Cac dung cu o lu lng nay c s dung khi can thiet phai co o chnh xac cao ngng di o nhay
turndown (ty so toan pham vi o cua may tren lu lng nho nhat co the o c), va khi o ton hao ap suat
ben khong gay ra s tieu thu nang lng qua mc. Cac may nay hoat ong bang cach tach chat long thanh
cac phan oan o, roi chuyen dch no i tiep. Moi phan oan khi o c o em bi mot may em registers
va cac may em nay c ket noi vi nhau. Chung rat co ch oi vi cac dong chat long sen set hay khi can
en cac may o c hoc n. Cac kieu thong dung trong so cac may o lu lng kieu chuyen v bao gom cac
may dang thuy lobed va dang banh rang gear, dang a quay nutating disk, dang canh quat quay, va dang
piston dao ong oscillating piston. Mot cach ien hnh, cac may o nay c che tao bang kim loai nh ong
thau brass, ong o bronze, va thep uc, nhng cung co the c cau truc t chat deo ky thuat engineered
plastic, tuy theo ng dung.
Bi trong cac may o lu lng kieu chuyen v tch cc can am bao dung sai khep kn close tolerances gia
cac bo phan chuyen ong nen cac chat ran l lng trong dong chay co the gay ra van e c hoc. Cac may o
lu lng kieu chuyen v tch cc co san cac bo ch th lu lng va bo tong gop, co the oc trc tiep c.
Nhng dung cu nay tng oi at tien.
e hieu nguyen ly cam bien khoi lng the tch kieu chuyen v, chung ta khao sat mot dang may o c kh
thong dung: cong-t the tch o lu lng the tch chat long va cong-t kh kieu quay.
Cong-t the tch. Nguyen ly: Da tren c s em trc tiep lu lng the tch chat long lu thong qua buong
cha co the tch biet trc, ay la buong cha tao nen ben trong may o. S o nguyen ly cau truc (hnh
6.7):
Hnh 6.7 Cong-t the tch.

Bo phan cau truc c ban la buong cha c tao hnh ac biet va he banh rang ovan truyen ong do dong
chay. Truc cua mot trong hai banh rang c gan vi c cau em lap ben ngoai.
ac iem:
o May o co o chnh xac cao ( = (0,5 1,0)[%] ); ton that ap suat nho.
o Nhc iem: can bo loc au vao, gay on, pham vi o gii han (0,01 250) [ m 3 /gi].
o ng dung chu yeu o lu lng the tch chat long, dau sach va cac san pham dau.
o Phng phap o: Dung c cau em c kh e ch th hay bo bien oi so vong quay thanh tn hieu ien.
Cong-t kh kieu quay. S o nguyen ly cau truc (hnh 6.8).
34
Hnh 6.8 Cong-t lu lng the tch kh kieu quay.

Bo phan cau truc c ban la tang quay nam ben trong vo may va he canh gat co banh lan ta tren c cau cam
co nh. Tang quay c gan vi c cau em ben ngoai.
ac iem:
o May o co o chnh xac 0,25; 0,5. Pham vi o (100 300) [ m 3 /gi]. ng knh ong dan (100 500)
[mm].
o ng dung o lu lng the tch chat kh hay dau trong ieu kien co nh tai cac nha may loc dau hay
trang b tren cac thiet b di ong.
Cac cam bien lu lng kieu turbine.
Cac may o kieu turbine va chan vt propeller ap dung nguyen ly la chat long chay qua turbine hay chan vt
se lam quay rotor vi toc o ty le thuan vi lu lng dong chay. Cac xung ien se c em va cong gop.
Cac dung cu nay co san dang toan phan ng knh full bore, dang cac phng an lap rap theo tuyen linemounted va dang nhung insertion types neu ch mot phan dong chay can o la chay qua phan t quay cua may.
Cac may o lu lng kieu turbine, khi c ac trng va lap at mot cach phu hp, se cung cap o chnh xac
tot, ac biet la oi vi cac chat long co mat o thap. Cac cam bien kieu nhung c s dung cho nhng
trng hp t nghiem trong hn, tuy nhien chung thng de bao tr kiem tra va sa cha hn bi co the thao
d ra ma khong lam ngng tre ng ong dan chnh.
Tren c s nguyen ly cam bien lu lng lng kieu turbin, chung ta khao sat mot dang may o c kh thong
dung: cong-t toc o hay con goi la cong-t turbine.
Cong-t toc o. Nguyen ly: Da tren c s o gian tiep so lng the tch chat long chay qua, thanh n v lu
lng the tch, thong qua so vong quay n cua turbine may trong mot n v thi gian (tc la tng ng toc o v
cua dong chay).
Lu lng the tch Q cua dong chay (bieu thc (6.1)-) co toc o v chay qua tiet dien S cua cong-t la:
Q = v.S .
Toc o turbine may o tng ng gia tr tc thi cua toc o dong chay. Nhng may o c khac vach theo
n v lu lng the tch cua dong chay, bi so vong quay n cua turbine ty le vi van toc v dong chay:
n = k .v = k . Q S ;
(6.3)
ma lu lng the tch Q chnh la:
dV
Q=
;
(6.4)
dt
ay: V la the tch lu chat i qua tiet dien S cua may o trong khoang thi gian t = t 2 t1 , (ng vi ch th
may o nhng thi iem o la N 1 va N 2 ). T o ta co:
t2
S t2
(6.5)
V = Q.dt = . n.dt = K . f (n) .
t1
k t1
Tc la lu lng the tch cua chat long ty le vi so vong quay n cua turbine may.
S o nguyen ly cau truc (hnh 6.9).
35
Hnh 6.9 Cong-t toc o turbine hng truc.

Bo phan cau truc c ban la turbine at theo hng truc may, co dang vt xoan, truyen ong bi dong chay;
truc turbine gan vi c cau em c kh bang cap banh rang truc vt. May co bo phan hieu chnh toc o turbine
bang cach chnh hng dong chay so vi goc lech canh turbine.
oi vi dong chay lu lng nho, dung cong t turbine kieu tiep tuyen (chia thanh loai dong n hay nhieu
dong hnh 6.10).
Hnh 6.10 Cong-t turbine tiep tuyen.

ac iem:
o Cong-t turbin hng truc co o chnh xac 1,0; 1,5; 2,0; pham vi o (50 300) [ m 3 /gi]; ng knh
ong dan (50 300) [mm]. Cong-t turbin tiep tuyen co o chnh xac 2,0; 3,0; pham vi o (3 20)
[ m 3 /gi]; ng knh ong dan (15 40) [mm].
6.1.5 Cac may o lu lng the khoi Mass Flowmeters.
Cac qua trnh lien quan ti lu lng the khoi nh cac phan ng hoa hoc, qua trnh nhiet dan vv oi hoi
nhng phep o lu lng chnh xac hn, va ieu o dan ti viec phat trien cac may o lu lng khoi. Mot
loat cac thiet ke a c thc hien, nhng pho bien nhat la may o Coriolis, hoat ong cua no da tren c s
hien tng c goi la lc Coriolis.
Lc Criolis la mot loai lc quan tnh, la ai lng co o ln bang tch cua khoi lng vat vi gia toc Criolis va
co hng ngc vi hng cua gia toc Criolis. Gia toc Criolis la gia toc xuat hien trong cac he quy chieu quay.
v
ay ta dung khai niem he quy chieu, co he S (co vat chuyen ong ben trong vi van toc dai v ) chuyen
v
ong vi van toc goc oi vi mot he N, e giai thch nguyen ly hoat ong cua may o Criolis.
Cac may o Coriolis la may o khoi lng thc, o trc tiep van toc khoi cua dong chay, khac vi cach o lu
lng the tch. Bi v khoi lng khong thay oi, nen may o la tuyen tnh ma khong phai ieu chnh oi vi
nhng chat long co cac thuoc tnh khac nhau. Cung y nh vay, khong can phai bu tr oi vi nhng thay oi
ve nhiet o va cac ieu kien ap suat. Kieu may o lu lng nay ac biet co ch oi vi phep o nhng chat
long co mat o thay oi theo van toc nhiet o va ap suat a cho.
Cac may o Coriolis c che xuat theo nhieu kieu thiet ke khac nhau. Mot dung cu pho bien bao gom ong
dan dong hnh ch U c boc trong vo cam bien noi vi bo phan ien t, va khoi ien t co the at cach xa
36
cam bien ti 500 feet. Ben trong vo hop cam bien, ong dan hnh ch U rung ong tan so t nhien cua no bi
mot dung cu t tnh at oan cong cua ong. Cai nay giong nh rung ong cua am thoa (tuning-fork c cau
nh am la mau cho nhac cu), chiem t nhat la 0,1 inch. va hoan thanh tron chu ky khoang 80 lan/giay. Bi
ben trong ong co chat long chay qua, rung ong nay lam cho ong dan buoc phai rung ong theo chieu thang
ng. Viec nay lam chat long tac ong mot lc len ng ong (lc Criolis), lam cho ong xoay van xoan.
Lng xoan trc tiep ty le vi o ln lu lng khoi cua chat long chay qua ong. Cac cam bien t tnh at
tren moi au ong se o van toc chuyen dch cua ong, van toc nay se thay oi khi ong xoan lai. Cac cam bien
cung cap thong tin nay cho bo phan ien t, bo phan nay se x ly va bien oi thanh ien ap ty le vi o ln
lu lng the khoi. May o lu lng nay co pham vi ng dung rong rai, t chat keo dan ti ni-t long.
6.1.6 Lu lng ke t-ien.
Nguyen ly hoat ong da tren c s nh luat cam ng ien-t Faraday: khi t thong qua mot vong day
dan khep kn bien thien, th trong vong day se xuat hien mot the ien ong cam ng eCUT ; suat ien ong
cam ng nay ch ton tai trong thi gian t thong bien thien va ty le vi toc o bien thien t thong:
(6.6)
eCUT = d dt .
Neu vong day dan khep kn o la dong chay cua chat long dan ien th co the ng dung nguyen ly cam ng
ien-t e xac nh toc o hay lu lng the tch cua chat long.
Sc ien ong cam ng trong t trng khong oi (nam cham vnh cu) la:
4B
(6.7)
eCUT = B.v.D =
.Q = kQ ;
D
ay: B cng o t cam; v toc o dong chay; D ng knh trong cua ong dan; Q lu lng the tch
cua chat long. Tc la sc ien ong cam ng ty le vi lu lng the tch cua chat long.
e loai tr anh hng cua sc ien ong phan cc ky sinh tren cac ien cc cua lu lng ke, thay v nam
cham vnh cu co the dung nam cham ien xoay chieu. Khi o sc ien ong cam ng trong t trng xoay
chieu se la:
eCUT = 4Q.Bmax . sin(.
).
D
(6.8)
Nguyen ly cau tao (hnh 6.11). Bo phan cau thanh c ban cua lu lng ke la oan ong bang kim loai khong
t tnh at vuong goc vi ng sc cua t trng nam cham, co hai ien cc a ra, noi vi ong ho o
(millivolt-ke hay ien the ke).
Hnh 6.11 S o nguyen ly lu lng ke t-ien.
37
Hnh 6.12 au t cua may o lu lng.

Chat long la chat ien dan, va t trng ben ngoai (cua nam cham vnh cu hoac c tao bi cac cuon day
at ben ngoai ng ong c kch thch ien ap xoay chieu). ien ap tao ra se ty le vi o ln lu lng.
Cac ien cc lap tren thanh ong cam nhan ien ap cam ng va c o bi dung cu th cap.
Hnh 6.12 gii thieu nguyen ly ket cau cua lu lng ke t-ien. Cac may o lu lng kieu t-ien c ng
dung e o van toc dong chay cua cac chat long dan ien (gom ca nc), nhng cho can mot he chat lng
cao, yeu cau bao tr thap. Gia thanh cua cac may o lu lng kieu t-ien cao hn so vi cac kieu may o
lu lng khac. Chung co nhieu u iem: co the o cac chat long kho o va co tnh an mon, chat set nh ho
va cement, bun, phan set, va co the o lu lng chay ngc reverse flow.
ac iem:
o Lu lng ke t-ien dung o chat long co ien dan khong di ( 10 5 10 6 )[Simen/m].
o Ch th may o khong phu thuoc ty trong chat long, khong phu thuoc cac anh hng ngoai (ap suat,
nhiet o, o nht, lan hat, bui hay bot kh neu chung khong lam thay oi ien dan cua chat long).
o Pham vi o (1 2500)[ m 3 /gi]; toc o dong chay (0,6 10)[m/s] trong ong dan ng knh
(10 1000)[mm]; cap chnh xac 1,0; 2,5.
o Phng phap o: o sc ien ong, dung c cau o ien the ke.
6.1.7 Cac cam bien lu lng sieu am.
Cac cam bien lu lng kieu sieu am co the chia ra thanh:
Cam bien Doppler, va:
Cam bien chuyen van, hay la thi gian chuyen dch time-travel.
Cam bien Doppler da tren c s hieu ng Doppler s thay oi tan so cua dao ong phat i t mot nguon do
chuyen ong tng oi cua nguon va may thu. Trong cac cam bien Doppler, nhng di pha tan so gay ra bi
chat long chuyen ong mang theo nhng phan t ri rac tao ra nhng xung phan xa nh t mot nguon di ong.
Cac cam bien Doppler o nhng di pha tan so gay ra bi chat long. Hai bo bien cam c lap rap trong hop
gan vao mot ben ong; mot tn hieu co tan so a biet trc c cap ti chat long can o. Nhng hat l lng,
chat chat ran hay bat ky chat ri rac nao khac trong chat long se tao ra nhng xung phan xa ti phan t thu
nhan. Bi chat long gay nen phan xa lai ang dch chuyen nen tan so xung phan xa b di pha, va o dch pha
ty le vi van toc cua chat long.
Vi cac may o kieu thi gian chuyen van time-travel, th cac bien cam transducers c lap hai ben ong,
sao cho song am lam thanh mot goc 45 o vi hng dong chay. Toc o tn hieu gia cac bien cam se tang
hay giam theo hng truyen dan va van toc chat long can o. Cung co the xac nh c quan he thi gian vi
sai ty le vi lu lng bang cach truyen dan tn hieu mot cach luan phien theo ca hai hng. Khac vi cac
cam bien Doppler, cac cam bien thi gian chuyen dch b han che la cac chat long c o phai tng oi
sach, khong co nhng hat chat ran hay cac chat kh tron e giam thieu s phan tan hay hap thu tn hieu.
38
u iem cua cac may o lu lng kieu sieu am la chung khong xam thc va gia thanh va phai. Co nhieu
kieu c thiet ke e kep len ng ong.
Phep o lu lng theo hieu ng laser Doppler.
Phong vu bieu anemometer kieu laser Doppler (Laser Doppler Anemometer LDA) la ky thuat a xac lap kha
vng tren 30 nam nay, c ng dung rong rai e o ong hoc lu chat trong cac chat long va chat kh. o
nhay hng chay va tnh khong xam thc cua cac may LDA lam cho no tr thanh co ch oi vi nhng ng
dung vi o dong chay ngc, cac phan ng hoa hoc hoac phng tien nhiet o cao, va cac may quay, ni ma
cac cam bien vat ly khac co the kho khan hoac khong the s dung. Tuy nhien ky thuat nay oi hoi doi theo
nhng phan t trong dong chay.
Nhng li ch chu yeu cua LDA trong phep o lu lng bao gom:
o khong tiep xuc.
Khong can kiem chuan.
Khoang cach o co the t c centimeters en meters.
Toc o o co pham vi t 0 en sieu am.
Co the o o dong oi chieu.
Co giai thuat khong gian va thi gian cao.
Cau truc c ban cua mot may o LDA (hnh 6.13) bao gom:
Mot laser song lien tuc.
May phat quang hoc transmitting optics, ke ca bo tach tia beam splitter, va thau knh hoi tu focusing
lens.
May thu quang hoc receiving optics, gom thau knh hoi tu focusing lens, mot bo loc giao thoa
interference filter, va mot bo phan tach quang ien photodetector.
Mot bo chuan hoa tn hieu va x ly tn hieu.
Hnh 6.13 Cau truc may o LDA.

Noi chung, may LDA gi i mot tia laser n sac ti ch va thu bc xa phan xa. Tuy theo hieu ng Doppler,
s thay oi trong bc song cua bc xa phan xa la ham cua toc o tng oi cua oi tng dung lam ch. Do
o, toc o cua oi tng co the xac nh bang cach o s thay oi trong bc song cua tia laser phan xa. Viec
nay c thc hien bang cach tao ra mot mau pattern cac vach giao thoa (mau cac vach sang toi xen ke) bang
cach xep chong len nhau tn hieu goc va tn hieu phan xa.
Te bao quang-ien Bragg thng c s dung nh bo tach tia. No la mot tinh the thuy tinh ghep vi mot tinh
the piezo rung ong (hnh 6.14).
39
Hnh 6.14 Te bao Bragg s dung mot bo tach tia.

S rung ong tao nen cac song am tac ong giong nh mot li quang hoc. Hai luong tia co cng o nh
nhau thoat ra t te bao Bragg vi tan so f 0 va f dipha , va chung c hoi tu lai vao cac si quang a ti au
do probe. Trong au do, cac tia song song i ra t si quang c hoi tu bi mot thau knh ti iem giao nhau
trong mot vung goi la the tch o, ien hnh la khoang c vai millimeters chieu dai va c o tai o. Cng
o sang c ieu bien nh co s giao thoa gia cac tia laser tao nen cac vach sang song song co cng o
sang cao, goi la cac vach fringes. Khoang rong cac vach d f c xac nh bi bc song cua tia laser va
goc tao gia cac tia.
df =
.
2 sin ( 2 )
(6.9)
Thong tin ve toc o dong chay xuat phat t anh sang tach ra bi chum cac hat cay vao (seeding) co trong
chat long khi chung chuyen ong qua the tch o. Anh sang c phan tach bao gom mot s di pha Doppler
tan so Doppler f D - ty le vi van toc thanh phan vuong goc vi ng phan oi cua hai chum laser, tng ng
vi truc x cua the tch o.
Mot thau knh se thu gom cac chum anh sang b tach lai va hoi tu no len bo cam bien quang-ien. Mot bo loc
giao thoa c lap pha trc cam bien quang e ch cho anh sang co bc song nhat nh i qua, loc bo khoi
cac bc song khac va khoi nhieu anh sang xung quanh. Cam bien quang chuyen oi bien ong that thng
cua cng o sang thanh tn hieu ien, s bung len burst Doppler. Nhng s bng sang Doppler c loc va
khuyech ai len trong bo x ly tn hieu, xac nh f D oi vi moi hat, thong thng la bang cach phan tch tan
so s dung thuat toan bien oi nhanh Fourier (FFT).
Khoang rong cua pho vach d f cung cap thong tin ve khoang cach dch chuyen hat. Tan so Doppler f D cung
cap thong tin ve thi gian: t = 1 f D . Bi van toc bang khoang cach chia cho thi gian, nen bieu thc xac nh
van toc se la:
(6.10)
V = d f fD .
Vi chap nhan ve cac phan t hat cay seeding, thng co trng hp la cac chat long co cha nhng hat cay
t nhien tng t, nhng tng t cac chat kh cung b tron nhng hat cay nh vay. Mot cach ly tng, cac hat
phai u nho e troi theo dong, nhng cung u ln e tach u tia sang e co c ty le tn hieutrennhieu
signal-to-noise tot au ra cua cam bien quang. Pham vi kch c cua hat thng la khoang 1 ti 10 m . Vat
lieu hat co the la chat ran (bot) hay chat long (giot).
6.1.8 La chon cac cam bien lu lng.
Viec la chon dung cu khong thch hp giai thch en 90% cac van e thng mac phai vi cac may o lu
lng. Yeu cau quan trong nhat trong viec la chon mot cam bien la s hieu biet mot cach chnh xac nhng g
ma dung cu o phai thc hien. Di ay la nhng cau hoi quan trong can phai c at ra trong suot qua trnh
la chon cam bien:
Co phai phep o ap dung e ieu khien mot qua trnh cong nghe ma moi quan tam chu yeu la kha
nang lap lai repeatability, hay la nham ly giai accounting hoac khao sat s truyen chuyen custody
transfer, khi ma o chnh xac cao mi la quan trong?
Ch th ket qua la tai cho hay lieu co can tn hieu t xa remote khong ? Neu oi hoi phai co au ra t
xa th no phai la mot tn hieu ty le hay la mot tn hieu ong m tiep iem e kch hoat hoac ngng
dung cu khac ?
40
Chat long can o la chat sach, chat deo dnh, sen set, hay la chat ho cement, bun hoac phan bon dang
set ?
Chat long can o lieu co dan ien ?
ac tnh trong lng hay mat o ac trng cua chat long can o la g ?
Pham vi (o ln) cua lu lng lien quan en ng dung nay la the nao ?
Nhiet o va ap suat van hanh cua qua trnh nh the nao ?
Lieu co phai tnh en nhng ch so ve o chnh xac, pham vi o ln, o tuyen tnh, tnh lap lai, va
nhng yeu cau ve ng ong dan ?
Mot ieu cung rat quan trong trc khi a ra quyet nh la chon cuoi cung la phai biet nhng g may o lu
lng khong the thc hien c. Moi kieu cam bien eu co u va nhc iem, mc o thc hien thoa man
cong viec eu lien quan ti viec lieu cac tnh nang va nhc iem cua dung cu co phu hp vi nhng ieu
kien ng dung khong. a so cac nha cung cap cam bien eu nhiet tnh giup khach hang cua ho la chon
c may o thch hp cho tng ng dung cu the. Nhieu hang cung cap nhng cau hoi trac nghiem
questionnaires, ban th nghiem checklists, va cac ban ke ac tnh specification sheets c thiet ke nham thu
thap thong tin phe phan can thiet e cai tien cac may o lu lng thch ng vi cong viec.
Cung phai tnh en nhng tien bo cong nghe ng ai. Sai lam thong thng la la chon mot thiet ke a pho
bien vao nhng nam trc oi vi ng dung a nh, cho rang o van con la s la chon tot nhat. Biet au
trong khoang thi gian ay co the a xay ra nhieu oi thay va phat kien trong cong nghe may o lu lng oi
vi ng dung cu the, lam cho kha nang la chon a tr nen rong rai hn.
6.1.9 Lap at va bao tr sa cha.
Cac cam bien lu lng chat kh hoat ong co hieu qua nhat trong nhng phan ng ong hoac oan ong dan
co hnh dang ong nhat, cho trien khai hoan toan dong chay. Nham lam cho phep o co kha nang hien thc,
tat ca cac dung cu cam bien dong kh nen lap at theo ung hng chay cua ong dan au dong va cuoi dong
ma nha san xuat a ch nh. Mot so nha san xuat cung cap cac phan t lam thang dong chay, co the lap vao
au dong cho bo tr cam bien nham cai thien nhng ieu kien dong chay khong mong muon. Nen tnh en
nhng phan t nay khi nhng ieu kien khong cho phep lap at theo yeu cau chay thang cua phan ong dan
trc va sau cam bien.
Tat ca cac cam bien lu lng chat long cung se lam viec tot nhat khi dong chay ong nhat, trien khai het lu
lng. Nen lap at cac cam bien theo dong chay thang t au ong ti cuoi ong e co c phep o hien thc
nhat.
Mac du nhieu nha cung ng co dch vu lap at may o lu lng, van co mot ty le cao nhng ngi s dung
chon cach t mnh lap at. ieu o co the dan ti nhng sai sot trong lap at, v nh khong cho ng ong
chay u thang dong t au ti cuoi nh a neu tren. Moi thiet ke cam bien co mot lng dung sai nhat nh
oi vi nhng ieu kien van toc khong on nh trong ng ong, nhng moi dung cu eu oi hoi phai c
cau hnh ng ong phu hp e van hanh co hieu qua, cho nen co mot mau lu lng dong chay nh mc
c cung cap theo thiet b. Khong co no th o chnh xac va viec van hanh cam bien se b anh hng. Cac
may o lu lng oi khi cung lap ngc lai c (ac biet la vi cac tam ngan co lo orifice plates). Cac
ng cam bien ap suat cung b ao ngc.
Vi cac phan t linh kien ien thanh phan, th s an toan thiet yeu intrinsic safety la nhan thc c nhng
vung nguy hiem hazardous areas. Trong khu vc cac x nghiep cong nghiep eu thay co cac t trng tan xa.
Cac ng ien nang lng, cac relays, cac cuon day solenoids, cac bien the, ong c, va cac may phat eu
gop phan tao nhieu giao thoa ien-t, va ngi s dung phai chac chan rang may o lu lng ma ho a chon
thuoc kieu mien nhiem oi vi nhng giao thoa nh vay. a so cac van e xay ra vi cac phan t ien t la
cac thiet b th cap, phai c bao ve. Tuan thu nghiem ngat nhng ch nh cua nha san xuat thng se ngan
nga c nhng van e nh vay.
Hieu chuan.
Hieu chuan ban au la yeu cau oi vi tat ca cac may o lu lng; thong thng viec hieu chuan xuat xng
c thc hien bi nha san xuat. Tuy nhien, neu co san nhng can bo co uy tn trong cong viec nay cung co
41
the thc hien bi ngi mua. S can thiet hieu chnh lai may o tuy thuoc phan ln vao viec may o phu hp
en mc nao vi ng dung cu the. Mot so chat long chay qua may o lu lng la cac chat co tnh mai mon,
an mon, hoac gay set r, va vi thi gian co the co nhng bo phan b giam gia tr en mc u e anh hng ti
hoat ong cua toan may o. Mot so cau truc nhay cam de b ton thng h hong hn nhng cau truc khac. V
du, s mai mon mot canh quat nao o cua turbine co the lam cho hoat ong cua ca turbine b thay oi. oi vi
nhng ng dung quan trong th nen th nghiem mot cach thng xuyen o chnh xac cua may o.Trong nhng
trng hp khac, co the khong can thiet viec hieu chuan lai may o, bi ng dung khong quan trong lam hoac
bi moi trng khong anh hng ti hoat ong cua may. Mot so may o lu lng oi hoi phai co nhng thiet
b ac biet e hieu chuan. a so cac nha san xuat se cung cap dch vu nay bang phng tien cua chnh ho
hoac bang phng tien cua ngi s dung, ni ma ho se mang thiet b ti e hieu chuan mot cach hp le.
Sa cha bao tr.
Cac may o lu lng khong co bo phan chuyen ong th t can chu y hn la nhng may co bo phan chuyen
ong, nhng ket cuc het thay cac may o lu lng eu oi hoi phai c bao dng bao tr.
Vi cac may o lu lng kieu ap suat vi sai, cac phan t s cap oi hoi cac valves, cac ong dan ln, va va
van khi chung c noi vi cac phan t th cap, cho nen viec bao tr co the phai tien hanh lap i lap lai. Cac
ng xung co the b bt nghen hay b an mon dan, phai lam sach hay thay the. Cac may o co bo phan
chuyen ong oi hoi s kiem tra ben trong mot cach nh ky, ac biet la neu chat long can o la chat b
nhiem ban hay dang set. Viec lap at cac bo loc ang trc cac khoi nh the co the giup giam thieu kha nang
khuyet tat va hao mon.
Cac may o lu lng kieu sieu am hay ien-t co the co nhng van e phc tap hn vi cac phan t ien t
trong bo phan th cap cua chung. Cac cam bien ap suat to hp vi cac phan t th cap cung nen nh ky thao
ra va kiem tra.
oi vi cac may o kieu sieu am hay ien-t, ng dung nhng cho co the xay ra lp phu cung bieu hien
nhng van e tiem tang. Neu lp phu la chat cach ien, th hoat ong cua may o lu lng t tnh se b h
hong mot cach toi hau neu cac ien cc b cach ly khoi chat long. Viec thng xuyen nh ky lam sach se
giup ngan chan dang h hong nay. Vi cac may o lu lng kieu sieu am, goc phan xa co the b thay oi va
nang lng mat tri b hap thu bi lp phu se lam cho may o khong hoat ong c na.
6.1.10 Nhng tien bo ky thuat cam bien lu lng.
Mot nghien cu mi ay c thc hien bi Vien nghien cu dong chay va ng ong dan toan cau Flow
Research and Ducker Worldwide ch ra rang a co mot chuyen bien trong lnh vc o lu lng, hng ti
nhng may o lu lng cong nghe mi. Nhng may o cong nghe mi c tham nh trong nghien cu
nh cac may o kieu t tnh, sieu am, Coriolis, vortex, va kieu ap suat vi sai a bien multivariable differential
pressure meters. Noi chung, chung co bon tien ch:
1. Chung a c gii thieu 50 nam lai ay.
2. Chung a hien thc hoa nhng tien bo cong nghe, giai quyet nhng van e co hu nhng may o lu
lng kieu cu.
3. Chung a tr thanh yeu to chnh hoi tu s phat trien san pham mi bi cac nha san xuat.
4. Tnh nang hoat ong cua chung, ke ca o chnh xac, eu tot hn la cong nghe may o lu lng truyen
thong.
ien hnh la nhng kieu may nay con cung cap nhieu tien ch khac. o la nhng kha nang phan mem, nhng
goi ng dung ac trng hn, va cac phng phap cau truc cc ky lau ben. T phan tch self-diagnostics la mot
trong nhng tien ch nh vay ma ngi s dung mong i cac may o lu lng.
Hien nay a xuat hien nhng sang che vi cac may o kieu ap suat vi sai, ke ca s phat trien cac bo truyen
phat ap suat vi sai differential pressure transmitters o chnh xac rat cao, viec s dung cac bo phat dan a bien
multivariable, va cac bo phat dan ap suat vi sai tch hp phan t s cap. Mot phat trien ay y ngha la s xuat
hien may o lu lng kieu vi sai tch hp integrated differential flowmeter. Trong qua kh, ngi s dung
mua cac phan t s cap t mot hang, con cac bo phat dan th mua cua mot hang khac. Ngay nay, cac bo phat
42
dan c chao mi vi mot phan t s cap tch hp ben trong. No lc ngay nay la hng ti cac bo truyen dan
chnh xac hn va linh hoat hn. Tuy nhien, ieu quan trong la can phai hieu rang bo truyen dan ch la mot
phan t trong ca he, va cac bien khac eu co phan trong o chnh xac lu lng.
Vi cac may o lu lng kieu sieu am, mot loat dung cu co cap chnh xac mi va gia thanh thap cho cac
ng ong c nho (ng knh 1/4 inch. ti 2 inch) a xuat hien, da tren c s cac he vi c-ien t
(MicroElectroMachanical System MEMS) cam bien sieu am va tron tn hieu, mach vi ieu khien tch hp
chuyen dung (application-specific integrated circuit ASIC). Ky thuat nay cung cap mot phng tien khac so
vi cac may o c hoc truyen thong hay cac may o the khoi kieu vortex at tien oi vi nhng ng dung cu
the trong cac ng ong co ng knh nho. au ra ien t co the thch ng trc tiep vi ieu khien qua trnh
va thiet b kiem tra. Cung y nh vay, dung cu co the thc hien viec t chnh. No rat thch hp cho phep o lu
lng dong kh sach.
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BAI 10: KY THUAT CAM BIEN MC VA O AM.

CHNG 6. CAM BIEN LU LNG, MC VA O AM. PHAN 2.
Muc tieu bai nay tap trung vao nhng khai niem c ban va ky thuat cam
bien mc chat long va kh (lu chat) (phan 2) va o am; cac ng
dung trong ky thuat o lng va ieu khien gom 2 phan cua
chng 6.
Noi dung c ban ma SV phai nam c bai nay la nhng van e trong
tam sau:
Khai niem ai cng ve c hoc chat lu (chat long va kh) va mc,
o am; nhng ac iem xac nh chung. Cac loai phan t cam bien
mc va o am ng dung trong ky thuat o lng ieu khien, ket cau,
hoat ong chc nang, cac ac tnh ky thuat, ac iem ng dung.
Cac van e ng dung thc tien cac phan t cam bien trong cong
nghiep e co nhan thc va ren ky nang tong hp, thiet ke va che tao
he thong cu the trong thc te moi trng ng dung.
Bai 10 tap trung trong tam la ky thuat cam bien mc chat long va o
am chat kh (phan 2) bang cac phan t cam bien ng dung rong rai
trong cong nghiep va dan dung.
Thi lng bai giang la 04 tiet/45 tiet len lp theo chng trnh mon hoc la
03TC (45 tiet) va 04 tiet t nghien cu.
6.2 CAM BIEN O MC.
Khai niem. Mc chat long la chieu cao ien ay (chat long hay hat) trong cac thiet b cong nghe. n v
o mc la n v o chieu dai. Nh tren a noi, viec cam bien mc co quan he mat thiet vi cam bien
lu lng. ng dung chung nhat trong cam bien mc la o be cha va ieu khien van hanh be cha.
Ngay nay a san co nhieu cong nghe cam bien mc, bao gom t cac phng phap o mc kieu phao co
ien, kieu ien moi trong cam bien ien dung ... en ca cac phng phap ap suat thuy tnh, sieu am,
ien dung cao tan RF, cac phng phap da tren c s hieu ng t giao magnetorestrictive, va cac he o
xa radar.
Noi mot cach khai quat, trong ky thuat o lng va ieu khien cac be cha, co the phan cac cam bien
mc thanh hai loai: gian oan discrete va lien tuc continuous. Cac may o mc gian oan ch co the phat
hien lieu chat long co mot mc nhat nh nao o hay khong. May o mc lien tuc cung cap mot tn
hieu ty le vi mc chat long.
6.2.1 May o mc kieu gian oan.
Cac may o mc kieu gian oan xac nh khi nao chat long chay vao be cha at ti mot mc nhat nh.
Hnh 6.15 gii thieu mot so dang may o kieu nay. Mot ng dung ien hnh cua kieu cam bien nay la
xac nh khi nao ngng chu ky ien ay mc nc cua may giat. Co nhieu dang cau truc may o mc
kieu phao hnh 6.15a minh hoa mot trong cac dang ay, s dung c cau phao float va cong-tac chuyen
mach gii han limit switch. Trong trng hp nay, phao c ghep noi vi mot coc ng vertical rod.
Khi chat long at mot mc nhat nh th mot cam ghep noi vi coc ng se kch hoat cong-tac chuyen
mach gii han. Co the ieu chnh mc kch hoat bang cach at nh lai hoac cam hoac chuyen mach.
44
Hnh 6.15 May o mc chat long kieu gian oan: a). Dang phao va chuyen mach;
b). Dang cam bien quang ien; c). Dang au do ien tr.
Mot kieu may o mc khac da tren c s te bao quang ien (hnh 6.15b). Khi mc chat long ngap tia
sang th tn hieu may do quang ien photodetector se thay oi, no ch th s hien dien chat long.
Nhieu chat long nh nc ong, cac axit yeu, bia va ca phe (ch neu mot so lam v du) la chat dan
ien nhe, cho phep thc hien cac phng phap cam bien khac. Nh minh hoa tren hnh 6.15c, mot au
do ien c treo l lng trong chat long. Khi chat long at ti au do th ien tr trong mach ien ot
ngot giam xuong. ng dung thong thng nhat cua kieu cam bien nay la cam bien chat lam nguoi nhiet
o thap trong oto.
6.2.2 May o mc kieu lien tuc.
Cac may o mc kieu lien tuc cung cap mot tn hieu ra ty le vi mc chat long. Co vo so cach thc hien
ieu o. Hnh 6.16 minh hoa mot so dang may o kieu nay.
Hnh 6.16 Cac phng phap o mc kieu lien tuc:

a). Kieu phao va rong roc; b). Cam bien ap suat thuy tnh.
Cam bien o mc kieu phao. Ngay nay mac du a san co nhieu cong nghe cam bien o mc tien tien,
song trong nhieu ng dung cu the van thong dung phng phap o mc kieu phao co ien. ay chung
ta khao sat mot cach khai quat phng phap nay (xem hnh 6.16 a). Mot trong nhng phng an o trc
tiep thong dung nhat (c dung trong bnh gas xe oto) la mot cai phao gan ket vi mot cam bien v tr.
Nguyen ly phng phap: Ch th mc theo v tr tng oi cua phao noi tren mat chat long. Hnh 6.17
minh hoa nguyen ly cac phng an cam bien mc chat long kieu phao. Bo phan ch th co the la ch th
kim hoac bien oi goc quay thanh tn hieu ien hay kh nen. e truyen thong tin mc i xa, co the dung
he selsyn (truc selsyn phat ghep noi vi tang quay cua bo phan ong, con truc cua selsyn thu gan vi c
cau em).
ac iem:
45
o Thiet b phao (a) dung o mc nho co ng knh (80 200)[mm]; thiet b phao (b) dung o mc
nho co pham vi o (-10 +10)[mm] en (-200 +200)[mm], cap chnh xac 1,5; thiet b phao (d)
dung o mc co pham vi o (0 12)[m] en (0 20)[m], sai so tuyet oi cua phep o la
( 1,0 10 )[mm].
Hnh 6.17 S o nguyen ly cac phng an cam bien mc kieu phao.

Cam bien thuy tnh hydrostatic. Phep o mc s dung ap suat thuy tnh vi sai da tren c s nguyen ly
la s sai biet ap suat thuy tnh gia oan au va ay cua mot cot chat long co quan he vi mat o va o
cao cua cot chat long (xem hnh 6.16b).
Cac bo truyen dan ap suat co san c cau hnh cho cac ng dung kiem tra mc. Cac may o ap suat
cung co the lap at t xa remote. Tuy nhien, ieu o oi hoi phai tien hanh hieu chuan bo truyen dan tai
hien trng e bu tr nhng sai biet bac thang gia cam bien va mc can o.
Cac may o mc thuy tnh kieu bot bubbler type a c phat trien e dung vi ap suat kh quyen sau
di mat at cua cac be cha, cua ham cha rac phan va cac ng dung khac khong the co bo truyen dan
c lap vao di mc can cam bien, hay co khuynh hng b bt lai. Cac he kieu bot e x ra mot lng
nho hi (hay kh gas) qua mot ong nhung trong chat long, co au ra nam ngang hay thap hn mc kiem
tra. Van toc kh c ieu chnh sao cho co the bo qua ton that ap suat kh trong ong va ap suat ket cuc
iem bat ky trong ong van xap x bang au do thuy tnh cua chat long trong be cha.
o chnh xac cua cac may o mc kieu thuy tnh co lien quan vi o chnh xac cua cam bien ap suat
c s dung.
Cac bo truyen dan ap suat vi sai linh hoat (smart differential-pressure DP) co the thch ng vi cac phep
o mc va ang c dung rong rai trong cong nghiep, tao ra tnh pho bien tr lai cua cong nghe cam
bien nay. Bo truyen dan linh hoat va cac tn hieu ien 4 20 mA c dung e truyen thong ti/t cac
he ieu khien t xa (remote Distributed Control Systems DCSs), cac bo ieu khien logic lap trnh c
(Programmable Logic Controllers PLCs), va cac he ieu khien khac. Ky thuat o be cha thuy tnh (
Hydrostatic Tank Gauging HTG) la mot ng dung s dung cong nghe nay e o mot cach chnh xac tr
lng chat long va kiem tra s truyen chuyen cua be cha. Cac phep o mc co the truyen mang so lieu
e tiep can may tnh t xa.
ay ta khao sat nguyen ly ap suat thuy tnh vi sai o mc chat long bang mot v du cu the o ap suat
ay cua be cha (xem hnh 6.16b). Phng phap nay da tren thc te la ap suat ay be (goi la ap suat
thuy tnh head) ty le thuan vi mc chat long, nh the hien trong bieu thc (6.11).
P = d .H ;
(6.11)
ay: P ap suat o c ay be (ap suat thuy tnh head); d ty trong chat long (trong lng chat
long tren mot n v the tch); H chieu cao cot nc trong be.
V du: Hay tnh ap suat thuy tnh ay be cha 10 feet nc.
Giai: e s dung bieu thc (6.11) ta phai biet ty trong chat long (thng co the tm thay trong sach tra
cu). Ty trong cua nc la khoang 64 lb/ft 3 .
46
P = d .H = 64[lb / ft 3 ].10[ ft ] = 640[lb / ft 2 ] .

Co the chuyen oi ket qua nay sang n v ap suat [psi] (tc la bang [lb/in. 2 ]):
1[ ft 2 ]
640[lb / ft 2 ].
= 4,44[lb / in.2 ] .
144[in.2 ]
Ta coi ap suat o la 4,44 [psi], co ngha la ap suat ay be ln hn ap suat be mat. Ap suat tuyet oi
ay be se bang:
4,44 [psi] + 14,7 [psi] = 19,1 [psi]
(Aps. o) (Aps. mtrng) (Aps. tuyet oi)
Hnh 6.18 Cac phng phap o mc kieu lien tuc:

c). PP can be cha; d). PP ien cc o R hoac C; e). Kieu sieu am.
Cac phng an o mc kieu lien tuc khac trnh bay tren hnh 6.18. Viec kiem tra trong lng chat long
bang cac te bao tai trong load cells la mot ky thuat khac co the dung e xac nh mc chat long (hnh
6.18c). Khi o co the tnh c mc chat long neu biet ng knh va trong lng cua be cha (rong) va
ty trong cua chat long. Lu y rang trong lng toan bo cua be cha la tong cua cac trong lng c bao
ve t cac te bao tai trong.
Mot so may o co the phat hien mc chat long mot cach trc tiep. May o trong hnh 6.18d n gian ch
la hai ien cc at ng ben trong be. Tn hieu ra cua may, co the c khuyech ai va x ly tiep bang
cach nao o, hoac la tr so ien tr hay tr so ien dung ty le vi mc can o. Tuy nhien ay ng dung
nguyen ly ma ngay nay a c phat trien thanh phng phap cam bien kieu ien dung. Ta se khao sat
cu the hn ve no.
Cam bien o mc kieu ien dung. Nguyen ly phng phap la da vao s thay oi ien dung cua cam
bien theo mc chat long nh la chat ien moi cua tu ien bien dung. ien dung cua mot tu ien hnh tru
tron la:
H
C = 2 . . 0 .
;
(6.12)
ln(D d )
ay: - hang so ien moi cua chat long; 0 - hang so ien moi tng oi; H chieu cao ban cc; D, d
ng knh ngoai va ng knh trong cua ban cc.
Hnh 6.19 gii thieu nguyen ly cau tao mot so cam bien ien dung o mc.
47
Hnh 6.19 Cac phng an cam bien ien dung o mc chat long cach ien.
Bo phan cau thanh chu yeu cua cam bien ien dung kieu nay la cau hnh tu ien. Tu ien (a) la hai ban
cc ong truc co hnh tru tron. Tu ien (b) co cau tao bnh kn cha chat ien moi khac chat long.
Phng an (c) co them tu bu nhung chm trong chat long e bu anh hng nhiet o cua chat long len ket
qua o. Mach o thng la s o cau o ien dung.
ac iem:
o Cap chnh xac 0,5; 1,0; 2,5.
Cam bien o mc kieu sieu am.
Cac cam bien o mc kieu sieu am phat xa cac song am, va be mat chat long phan xa song am tr lai
nguon. Thi gian truyen chuyen ty le vi khoang cach gia be mat chat long va may phat. Cac cam bien
nay la ly tng oi vi viec cam bien khong tiep xuc dung o mc cua cac chat long dang set nh dau
nang, mu cay, keo nha tong hp, va bun, phan bon. Trong thc te, oi vi phng phap nay co nhng
han che sau:
Bot noi tren be mat chat long co the hap thu song am.
Toc o am thanh thay oi theo nhiet o.
S chay roi co the gay nen viec oc ch so khong chnh xac.
Hnh 6.18e gii thieu mot he cam bien mc trc tiep da tren c s phng phap cam bien sieu am. He
nay dung mot may do sieu am lap ben tren be cha. Tron bo ke ca may phat sieu am va bo phan ien
t co the mua nh cac module va khong at tien lam.
Cam bien kieu ien dung cao tan RF.
Cac may phat ien dung cao tan RF Capacitance Level Transmitters hoat ong theo nguyen ly la mach
ien dung co the c tao ra gia au do probe va thanh bnh. ien dung thay oi theo s thay oi mc
chat long, bi v moi chat long noi chung eu co hang so ien moi cao hn khong kh. au do noi vi
mot may phat tan so radio c lap ben ngoai be cha. S truyen dan mc o co the nhieu dang khac
nhau, va thiet b thu nhan co the la may tnh PC, bo ve o th chart recorder, hay mot he ieu khien kieu
phan bo (Distributed Control System DCS), mot bo ieu khien logic lap trnh c (PLC), vv Cac cam
bien nay rat co ch trong viec cam bien mc cua cac oi tng a dang, cua cac chat nc long hay set
hu c va cac chat bun, chat long hoa hoc nh voi song quicklime.
Con co cac cam bien mc kieu au do ien dung kep co the dung e cam bien mat tiep giap gia hai
chat long co hang so ien moi khac nhau. Cac cam bien nay tho cuc, de s dung, khong co bo phan
chuyen ong, de lam sach. Chung co the c thiet ke cho nhng ng dung nhiet o va ap suat cao.
Chung la nhng bien dang cua cac he da tren c s cao tan Radio Frequency RF goi la tr khang cao
tan Impedance RF va dan nap cao tan Admittance RF. (Tr khang la ien tr toan phan oi vi dong
chay mach xoay chieu AC hay cao tan RF; dan nap la tr nghch ao cua tr khang va la thc o mc
o de dang lu thong dong trong mach). Nhng ky thuat nay cung cap mot so cai tien phng phap da
tren c s ien dung cao tan, ke ca kha nang hien thc hoa tot hn va pham vi ng dung rong rai hn.
Cam bien t giao.
48
T giao la hien tng mot vat at trong trng t se chu tac dung ng suat keo hay nen. oi vi cac
chat sat t, cac lc tac dung nay u ln co the lam vat b bien dang. Cac may phat t giao o mc
Magnetostrictive Level Transmitters (hnh 6.20) da tren nguyen ly la s dung mot t trng ngoai e tao
nen mot song ien-t phan xa trong ong dan song lam bang vat lieu t giao.
au do c tao thanh t ba phan t ong tam. Phan t ngoai cung la mot ong bao ve pha ngoai. Ben
trong ong bao ve ngoai la ng ong dan song, la phan t c tao dang lam bang vat lieu t giao. Mot
xung ien nho tham do c tao ra trong bo phan ien t cua may phat va phat ra ong dan song, tao ra
mot trng ien-t doc theo chieu dai cua ng ong. Khi t trng nay tng tac vi t trng vnh cu
cua mot nam cham lap ben trong phao, gay nen mot xung xoan thang torsional strain pulse, hoac tao
nen ng dan song chap oi waveguide twist.
ng dan song chap oi nay c phan tach nh xung hoi ve. Khoang thi gian gia thi iem phat
xung tham do ban au va thi iem phat hien xung hoi ve c dung e xac nh mc o vi kha nang
thc hien va o chnh xac cao.
Hnh 6.20 Cam bien o mc kieu t giao.

Trong thap ky gan ay, cong nghe vi song hay vien tham radar dung o mc a tr nen thong dung hn
nhieu. ay la mot lnh vc phat trien nhanh. Mot cach chnh thc, cong nghe nay ch mi c s dung
cho nhng ng dung co o chnh xac cao, nhng s phat trien cua cac ky thuat mi va san xuat loat a
a cong nghe radar tr thanh co kha nang canh tranh oi vi nhieu ky thuat ng dung khac.
Cam bien mc kieu radar vi song.
Tat ca cac kieu o mc radar s dung nguyen ly c s la phong ra cac luong vi song t cam bien at
au be cha hoac cac dang bnh cha khac; mot phan nang lng phan xa ngc tr lai cam bien t be
mat cua chat c o. Khoang thi gian chay cua tn hieu c dung lam thc o mc.
May do mc radar co the chia ra thanh hai lnh vc ln:
Radar qua khong kh; va:
Radar dan song (guided wave radar GWR), con goi la radar xung vi song (microwaver impulse
radar MIR).
Loai cam bien radar qua khong kh co the c phan tiep ra thanh hai nhanh:
Thi gian song xung; va:
Song lien tuc ieu bien tan so (frequency-modulated continuous wave FMCW).
49
Mac du ca hai phng phap eu dung cac tn hieu vi song phong vao khoang khong pha tren chat can
o, viec x ly tn hieu hoi ap, thao tac va tnh toan khoang cach theo hai phng phap la khac nhau.
Cam bien kieu radar dan song GWR.
Khong nh cac he cam bien radar qua kh, cac cam bien kieu radar dan song GWR la mot cong nghe
song lan truyen invasive. No xuat hien tng t nh cong nghe cam bien dan nap RF, nhng khong co
nhng tnh nang nh a neu ve cac cc tr ap suat, nhiet o hay lp phu san pham cua cong nghe dan
nap cao tan RF.
Cac xung nang lng ien-t c phat xa t nguon may phat phong xuong ng dan song (mot ng
cap hoac thanh dan). Khi tn hieu at ti iem ma s thay oi hang so ien moi xay ra, thng la be
mat cua chat, phan nao o cua tn hieu se phan hoi lai. Do o lng tn hieu hoi ve ty le vi sai biet
trong hang so ien moi gia ng dan song va chat can o. Noi ngan gon, cac chat co tnh ien
moi/ien dan cao se cho tn hieu hoi ap manh hn.
Phep o mc t no la mot ham thi gian t khi phat xa tn hieu ien-t ti luc ket cuc tieng vong echo
c thu lai. Cong nghe radar nay c coi nh radar o phan xa theo mien thi gian (time domain
reflectometry TDR). S lan truyen tn hieu doc theo ng dan song lam han che nhng tieng vong gia
va giup giam thieu ton that tn hieu do bui va hi nc. Cung nh vay, hoat ong cam bien cung co the
thc hien trong nhng ng dung co s thay oi o am hi nc khong kh hoac s bien ong hang so
ien moi cua san pham. Tuy nhien, nen lu y rang giong nh moi kieu au do radar, cac vat lieu co ien
moi thap co the gay ra van e. Them vao o, ng dan song co the b h hong hay an mon.
Cac he eu co san cac ng dan song n hoac kep, tuy thuoc vao ng dung. Cac he ng dan song
kep hng ti tnh linh hoat cao hn mot chut va thch hp cho cac phep o giao tiep, cac vat lieu co
ien moi thap, hay nhng ni co bot noi. V tr giao tiep chat long c xac nh bang cach dung mot
phan xung ien-t ban au ma khong phan xa lai bi be mat cua pha tren. Nang lng nay tiep tuc
xuong ng dan song cho ti khi no gap giao tiep chat long/chat long va mot so phan tram nao o cua
no se phan xa lai au do. Phai biet c hang so ien moi cua pha pha tren e thc hien mot phep o
chnh xac, bi v cac bo phan ien t cua au do phai bu tr s thay oi toan phan trong van toc cua
xung ien-t khi i qua pha pha tren, bi no se khac vi toc o tn hieu khi i qua khoang khong.
Cam bien kieu radar qua khong kh.
Cam bien radar xung lng pulsed radar, hay thi gian chay cua tn hieu xung pulsed time-of-flight, cung
giong nh phng phap sieu am dung o mc. Mot xung radar c phat ti be mat cua chat can o va
khoang thi gian e xung tr ve c dung e xac nh mc. Phng phap nay dung t cong suat hn
kieu song lien tuc ieu bien tan so FMCW nhng hoat ong cua no co the b anh hng bi bot noi,
nhng vat can trong bnh cha, va cac vat lieu co ien moi thap.
Cac he FMCW la khong xam thc va lien tuc phat xa tn hieu tan so quet. Trong kieu cong nghe radar
nay khoang cach c rut ra t s khac biet trong tan so gia tn hieu phat va tn hieu thu bat ky thi
iem nao. Mac du ky thuat nay cho mot phep o quy nap inferential, no co the la phep o cc ky chnh
xac. Mc o do x ly tn hieu ket hp vi cac au o radar FMCW va nhng yeu cau ve cong suat a
ti ket luan la cac au do hai day kieu nay ch phu hp vi nhng ng dung n gian, a so cac ng
dung khac oi hoi dung cu bon day.
Viec la chon kieu antenna va kch c thch hp la yeu to quan trong e nhan c mot chum tia hoi tu
focused beam va song phan hoi return echo tng ng. Ca hai loai antenna hnh non cone va dang a
parabolic dish antennas eu c dung trong ky thuat cam bien qua khong kh. Cac antenna hnh non co
xu hng gi tn hieu trong ng truyen hep, hng xuong; trong khi cac antenna dang a parabolic
hng ti viec tao ra mot ng truyen tn hieu rong. Cac yeu to nh bot noi trong be cha, cac vat can,
va s chay roi co the anh hng ti viec la chon kieu va kch c antenna.
50
6.2.3 La chon cong nghe cam bien mc.

Khi la chon mot phng phap cho mot ng dung cu the nao o, phai chu y en nhieu yeu to ngoai ga
thanh ban au. Nhng yeu to quan trong nhat ve ng dung o mc ma cac nha san xuat cam bien can
thiet la:
Ten va cac ac trng cua vat lieu can o, lieu co phai la chat ran hay chat long, dang set, dang
bot, hay dang hat. Hang so ien moi K la ac tnh quan trong ac biet, cung nh mat o, o nht,
o dan ien, va tnh tng thch (dau m, chat nc, vv).
Thong tin qua trnh, nh ap suat va nhiet o, mc o chay roi, vat lieu be hoac bnh cha.
Nhng yeu cau ve cong suat.
ng dung chu yeu cua bnh cha co cha vat lieu can o (tch tr, tach loc nc, ham cha, vv),
va kch c, hnh dang cua no, va v tr cua bat ky vat ngan nao (neu co).
6.3 O O AM.
Khai niem chung.
o am c xac nh nh ham lng hi nc trong khong kh hoac trong cac chat kh gases khac. Theo
thuat ng chuyen mon th o am khong kh la nong o hi nc trong khong kh. o am thng c o
lng la:
o am tuyet oi bang khoi lng hi nc co trong mot n v the tch khong kh hay chat kh gas
(tnh ra [g/m 3 ]);
iem sng dew point (nhiet o va ap suat ma tai o chat kh bat au tch tu hi nc thanh chat
long);
o am tng oi, hoac RH (Relative Humidity RH) la ty le ham lng hi am moisture cua khong kh
so vi mc hi am bao hoa cung nhiet o va ap suat; noi cach khac, la ty so gia o am tuyet oi
vi o am cc ai (khi hi nc bao hoa) nhiet o va ap suat ang xet. o am tng oi tnh bang
[%RH].
Tren mat at, ham lng hi nc trong khong kh chiem t 0,2% khoi lng ( nhng v o cao) en
2,5% khoi lng ( vung ch tuyen). Trong ieu kien kh hau bnh thng, o am tng oi cua khong
kh thch hp nhat oi vi con ngi la vao khoang 40 60%.
iem sng la nhiet o ma moi trng can ha en e hi nc cha trong o tr thanh bao hoa (ieu
kien e ong lai thanh nng giot sng). Khi o trong khong kh (hay tren be mat nhng vat tiep xuc vi
khong kh) co the thay hi nc ngng tu thanh giot sng rat nho. Biet iem sng, ta se xac nh c
o am cua khong kh. o am tng oi cang nho (tri cang kho hanh), th iem sng cang thap hn
nhiet o ang co. Khi o am tng oi bang 100% th iem sng trung vi nhiet o ang co.
a co thi o am tng oi c xac nh bang cach o s thay oi hi am hap thu trong chat lua sink,
toc ngi hair (am ke toc, am ke bay hi), va sau nay la trong chat nylon va cac chat tong hp khac.
Cac phng phap c hoc o o am tng oi RH a c neu t nhng nam 1940. Ngay nay a phat
trien cac loai cam bien ien dung va tr khang da tren c s cac chat polymer. T nhng nam au
1960, nhng tam gng soi b lam lanh a c dung e o iem sng, nhng ngay nay s phat trien ky
thuat cam bien ien dung mang mong thin film capacitive sensors cho phep o iem sng nhiet o
thap c -40 o C ma gia thanh thap va o chnh xac cao hn nhieu.
o am khong kh la mot trong nhng ac trng quan trong nhat cua kh hau va co y ngha quan trong oi
vi mot so qua trnh cong nghe. Trong kh quyen, o am ton tai trong pham vi rat rong (t vai phan trieu
ppm en hi nc bao hoa 100 o C ), trong khoang nhiet o ln (t -60 en 1000 o C ), co the lan tap
51
chat va hoa chat khac nhau. o am chat long la ham lng nc trong cac chat long khi nc khong
phai la thanh phan cau tao c ban, nh ham lng nc trong dau mo, trong ru
Cac thong so quan trong ac trng la:
Ap suat hi bao hoa p S (T) ap suat hi nc trang thai can bang vi nc the long nhiet o T
nao o, vt qua gia tr nay se xay ra qua trnh ngng tu.

o am tuyet oi cua khong kh bang lng hi nc co trong mot n v the tch khong kh (tnh ra
g / m 3 ).
o am tng oi RH% - ty so ap suat rieng cua hi nc pV va ap suat hi bao hoa p S (T) nhiet o
T:
RH % =
pV
.100% .
p S (T )
(6.13)
Thong so nay c o bang am ke ien tr va am ke ien dung.

Nhiet o tao sng Td [%] nhiet o lam lanh khong kh e at trang thai hi nc bao hoa, sao cho
pV = p S (T ) . Thong so nay c o bang am ke ngng tu, am ke hap thu, am ke oxit nhom, am ke
ien ly.
Nhiet o am Th [ o C ] nhiet o can bang cua mot khoi lng nc hoa hi t nhien vi khong kh.
Thong so nay c o bang hygrometers.

Phan loai am ke. Am ke la dung cu xac nh o am cua cac chat kh, long va ran, ke ca cac chat ran
the ri (hat). e o o am cua khong kh ngi ta dung am ke sng, am ke toc va am ke bay hi. e
o o am cua chat long, ngi ta dung am ke ien dung hoac am ke ien dan. e o o am chat kh,
ngi ta dung am ke hut am ien hoa co gan thiet b boc hi. e o o am chat ran ngi ta dung nhng
am ke ien dung, ien dan, ong v phong xava ca am ke hap thu cong hng.
Co the phan loai cam bien o am theo nguyen ly chu yeu:
Theo nguyen ly vat lieu cam bien co nhng ac tnh lien quan vi o am: cam bien ien dung
capacitive, ien tr resistive, va nhiet dan thermal conductivity.
Theo nguyen ly vat ly xac nh o am trc tiep: am ke ngng tu, am ke ien ly.
Nhng phat trien ngay nay trong cong nghe vat lieu ban dan a hien thc hoa cac cam bien o am theo
nguyen ly vat lieu ng dung nh cam bien ien dung, ien tr hay nhiet dan, co o chnh xac cao, lau
ben va hieu qua gia thanh. Cac cam bien o o am chat kh (nit, hydro, metan, CO2 , freon, ), chu yeu
o o am khong kh kho trong cong nghiep che tao linh kien ien t, trong ky thuat ieu hoa khong kh
lai thng dung cac cam bien theo nguyen ly vat ly nh ngng tu hi nc, ien ly, ay chung ta se
khao sat cach thc cau truc moi loai cam bien va cach s dung chung o o am.
6.3.1 Cac cong nghe va kieu dang cam bien.
Am ke ien ly.
Nguyen ly hoat ong da tren c s tng quan ty le dong ien ien phan I trong ong cam bien vi nong
o hi nc V trong chat kh i qua ong b chat P2 O5 hap thu, gay nen hien tng ien phan:
96500
I=
.QC . V = k . V ;
(6.14)
9000
ay QC , [ m 3 / s ] lu lng chat kh i qua ong.
Cau tao (hnh 6.21). Bo phan cau thanh chu yeu la ong o (dai khoang 10 [cm]) cho chat kh can o o
am chay qua. Trong ong quan hai day Pt hay Rh lam ien cc co ien ap mot chieu c 70[V], gia hai
52
day cuon la chat P2 O5 . Khi chat kh chay qua ong, hi nc mang theo se b lp P2 O5 hap thu va ien
phan.
Hnh 6.21 Nguyen ly cau tao am ke ien ly.

ac iem:
o Dung o o am chat kh (nit, hydro, metan, CO2 , freon, ), chu yeu o o am khong kh kho
trong cong nghiep che tao linh kien ien t.
o Thi gian hoi ap phu thuoc chieu hng tang giam o am chat kh: o am tang (100 1000)
[ppm] th thi gian ap ng Tr <30 [s]; o am giam(1000 100) [ppm] th thi gian ap ng tang,
co the ti vai phut.
o Ap suat chat kh lu thong qua ong o (1,7 8,0) [ kg / cm 2 ], thng co bo loc kh at au vao.
o Can nh ky tai sinh chat dung moi P2 O5 du chung t ong tai sinh trong qua trnh ien phan, tuy
theo ieu kien s dung va o sach chat kh.
Cac cam bien ien dung o o am tng oi RH.
Nguyen ly cam bien thong dung nhat la s thay oi tr khang, da tren c s bien oi ac tnh tr khang
ien cua chat hut am theo lng nc hap thu, la ham on nh tuyen tnh va co tnh thuan nghch.
Ve nguyen ly cau tao co the chia thanh ba nhom: Am ke ien tr; am ke tu ien co ien moi polyme;
am ke tu ien co ien moi oxit nhom Al 2 O3 .
Cac cam bien ien dung o o am tng oi RH c ng dung rong rai trong cong nghiep, thng mai
va cac ng dung quan trac kh tng t xa. Chung vt troi trong ca hai lnh vc o lng kh quyen va
o lng qua trnh cong nghe, va la loai may o toan thang o o RH duy nhat co kha nang hoat ong
chnh xac ti tan 0% o RH. Nh co ac tnh ky thuat t chu anh hng nhiet o nen chung thng c
s dung trong pham vi nhiet o rong ma khong phai bu nhiet tch cc.
cac cam bien ien dung o RH, s thay oi hang so ien moi hau nh ty le thuan vi o am tng oi
cua moi trng. ien hnh la ien dung thay oi c (0,2 0,5) pF khi o RH thay oi 1%. ien dung the
khoi bulk capacitance la khoang (100 500) pF 50%RH va 25 o C. Cac cam bien nay co he so nhiet o
thap va co the hoat ong nhiet o cao en 200 o C. Chung co the chu ng s bao phu hoan toan bi
cac chat ngng tu va co kha nang chong cac hi hoa chat. Thi gian ap ng trong khoang t 30 en 60
giay oi vi bien thien bc nhay o RH 63%.
Cam bien ien dung kieu ien moi polymer. Nguyen ly cam bien: ien moi trong tu la chat polyme
hap thu phan t nc, co hang so ien moi phu thuoc o am cua polymer. ien dung cua tu ien la:
A
(6.15)
C = . 0 . ;
L
ay: A dien tch ban cc; L o day mang polymer; 0 - hang so ien moi tng oi (oi vi chan
khong la 8,85. 10 12 [F/m], oi vi nc la 80); - hang so ien moi cua polymer (bien thien theo o
am t 2 en 6).
Cau tao (hnh 6.22, xem them hnh 6.23): ien cc tantan, lp crom Cr day (100 10000)[ A& ] phu len
lp polymer (bang phng phap bay hi trong chan khong).
53
Hnh 6.22 Cam bien ien dung polymer.

ac iem:
o o o am tng oi RH%, t chu anh hng nhiet o moi trng, cam bien co the nhung nc.
o Pham vi o (0 100)[%] trong dai nhiet o (-40 +80 +100)[ o C ] vi o chnh xac
(2,0 3,0)%; thi gian ap ng c vai giay.
Cam bien ien dung kieu ien moi oxit nhom. Cau tao gom mot ien cc lam bang nhom tam, lp
ien moi chnh la be mat tam nhom c anode hoa thanh chat ien moi Al 2 O3 (co chieu day nho hn
0,3 [ m ] e khac phuc anh hng ap suat rieng cua hi nc len tr so ien dung cua tu), ien cc kia la
mot mang kim loai mong tren be mat lp ien moi.
ac iem:
o o nhiet o iem sng, co the o o am tuyet oi; kch thc nho, nhng cam bien khong ong
nhat, phi tuyen, can hieu chuan rieng va thiet b o th cap phai c nh ky kiem chuan, s
dung trong moi trng tranh an mon.
o Pham vi o (-80 +70)[ o C ] trong dai ap suat rong (t chan khong en hang tram bar); thi gian
ap ng c vai giay.
Cac cam bien ien dung o RH dang polymer chu nhiet (Thermoset Polymer-Based Capacitive) phat
hien trc tiep nhng thay oi ve o bao hoa tng oi relative saturation nh la s thay oi ien dung
cua cam bien vi thi gian ap ng nhanh, o tuyen tnh cao, tnh tre hysteresis thap, va co tnh on nh
lau ben cc cao. o bao hoa tng oi cung giong nh o am tng oi cua moi trng xung quanh khi
nhiet o cua cam bien bang nhiet o moi trng. Bi v thng luon nh vay, nen khi o s thay oi
ien dung cua cam bien la thc o s thay oi o RH. Nhng cam bien nay s dung chat polymer chu
nhiet c che xuat va th nghiem quy mo cong nghiep, co cau truc ba lp ien dung, cac ien cc
platin va oi vi nhng phng an nhiet o cao th con co bo chuan hoa tn hieu ien ap ra dang vi mach
tch hp ben trong chip (xem hnh 6.23).
Hnh 6.23 Cam bien o am tng oi RH ba lp ien dung va polymer chu nhiet.
Khi hoat ong, hi nc trong lp ien moi cua ien dung tch cc can bang vi chat kh xung quanh.
Lp platin xop porous ngan chan chat ien moi khoi b nhng anh hng ben ngoai, trong khi lp boc
polymer bao ve chong tac ong c hoc cho lp platin khoi b nhiem ban bi bui bam va dau m. Lp
54
bam ban day ac se lam thi gian ap ng cua cam bien keo dai, bi thi gian can bang hi nc trong
cam bien cung se b keo dai.
Cac cam bien ien dung dang polymer chu nhiet thermoset-, ngc lai vi dang chat deo nong
thermoplastic-, cho phep nhiet o van hanh cao hn va chu ng c cac hoa chat long va hi nh
isopropyl, benzene, toluenne, formaldehydes, dau mo, cac chat tay thong dung, va hi amoniac vi nong
o thong thng nh trong chuong ga, chuong heo. Them vao o, cac cam bien o RH dang polymer
chu nhiet co tuoi tho van hanh lau ben nhat trong cac qua trnh cong nghe kh trung ethylenne oxide
(ETO). Cac cam bien ien dung polymer mang mong chu nhiet a chng to la loai cam bien co nhng
ac tnh ap ng hau nh ly tng oi vi o RH, tng phan vi o am tuyet oi (tc la ap suat hi
nc).
ap ng nay la nh co lc G dan ong nang lng t do cho hap thu:
G = R.T . ln(P P0 ) ;
(6.16)
ay: G lc dan ong; R hang so kh; T nhiet o moi trng o; P ap suat rieng cua hi nc;
P0 ap suat hi nc bao hoa.
P/ P0 bang o RH moi trng neu nhiet o cam bien bang nhiet o moi trng. Neu nhiet o cam bien
cung bang T th mc bao hoa tng oi se a ap ng cua cam bien len en 100%.
Cac nghien cu cung ch ra rang viec hieu chuan cam bien o RH trong khong kh co the ap dung cho
phep o o bao hoa tng oi trong dau trong pham vi 0,3% (ket qua co the m rong cho cac hoa chat
long tng ng khac).
Cac cam bien o am kieu ien tr.
Cau tao n gian la tren dien tch nho cua ien tr (vai mm 2 - e co ap ng nhanh) phu mot lp chat
hut am, hai ien cc lam bang kim loai khong b oxy hoa. Mach o co the la mot mach phan ap mac noi
tiep ien tr cam bien vi mot ien tr bu nhiet o. May o co the khac vach trc tiep o am tng oi
RH cua moi trng.
ac iem:
o o o am tng oi RH%, t chu anh hng o nhiem moi trng, kch thc nho (thi gian ap
ng c 10[s]), gia thanh thap.
o Pham vi o (15 99)[%] trong dai nhiet o (-10 +60)[ o C ] vi o chnh xac 2,0[%].
Cac cam bien o am kieu ien tr o s thay oi tr khang thng co quan he ham mu nghch ao vi
o am (hnh 6.24). Mot cach ien hnh, o la phep o s thay oi tr khang cua mot vat lieu nh chat
polymer ien dan conductive polymer, muoi, hoac chat nen a qua che bien treated substrate.
Cam bien o am au tien c san xuat loat la cam bien kieu Dunmore. c che xuat nam 1940, no
van con c s dung rong rai trong ng dung ieu khien ieu hoa khong kh chnh xac va kiem tra cac
ng truyen dan, cac antenna va ong dan song dung trong vien thong.
55
Hnh 6.24 Quan he gia s thay oi tr khang theo o am

Cac cam bien o am kieu ien tr mi nhat s dung ky thuat phu men s ceramic coating e chong lai
anh hng moi trng co ngng tu hi nc. Cac cam bien nay c cau truc vi cac ien cc kim loai
quy noble c ket tua bi qua trnh quang tr photoresist, va be mat chat nen c phu bang hon hp
gan ket ien dan polymer/ceramic. Cam bien c at trong mot vo bao ve bang chat deo plastic.
Tnh thay the lap lan la hn 3% o RH tren suot pham vi (15 95)% RH, trong khi o chnh xac c
xac nhan mc 2% RH. Khoang thi gian hoi phuc recovery time oi vi cac cam bien ien tr t s
ngng tu hi nc hoan toan ti 30% la vai phut. ien ap ra ty le thuan vi o am tng oi cua moi
trng neu s dung bo chuan hoa tn hieu. oi vi a so cac cam bien ien tr, thi gian ap ng la t
10 ti 30 giay oi vi s thay oi bc nhay o am 63%, trong khi tr khang bien thien trong pham vi t
1 k ti 100 M .
Cac cam bien o am kieu nhiet dan thermal conductivity.
Cac cam bien o am kieu nhiet dan thermal conductivity (con goi la cam bien o am tuyet oi) o o
am tuyet oi bang cach tnh toan s sai biet gia o nhiet dan cua khong kh kho va khong kh co cha
hi nc. Trong thc te, cac cam bien o am kieu nay s dung mot he co hai phan t thermistors trong
mach cau o, co kha nang lam viec trong moi trng nhiet o cao hoac tham ch ngap nc.
Cac cam bien nay c cau truc bang cach dung hai phan t thermistor co he so nhiet o am (NTC)
trong mot mach cau o. Mot trong cac phan t c nhung trong chat nit kho, con phan t kia c a
ra moi trng can o (xem hnh 6.25). S sai biet ien tr gia hai thermistors ty le thuan vi o am
tuyet oi.
Hnh 6.25 Cam bien o am kieu nhiet dan (hoac cam bien o am tng oi).
56
6.3.2 La chon va ac tnh ky thuat cua cac cam bien o am.

Phan tiep theo ay se neu nhng khac biet gia cac loai cam bien ke ca ve nhiet o, o chnh xac va
kha nang thay the lap lan. Nhng u nhc iem cua moi loai cung c neu bat.
La chon cam bien o am. Nhng nhan thc quan trong khi chon la cam bien o am bao gom:
o chnh xac.
Tnh thay the lap lan.
Tnh lap lai ac tnh ky thuat.
Tnh on nh.
Kha nang phuc hoi sau ngng tu hi nc.
Tnh khang nhiem tap chat, chat ban.
Kch c va bao goi.
Hieu qua gia thanh.
Gia thanh thay the cam bien.
Hieu chuan.
Tnh phc hp va hien thc hoa qua trnh chuan hoa tn hieu va mach thu thap d lieu.
Noi chung, cac ieu kien moi trng oi vi mot ng dung a cho se chi phoi quyet nh viec chon la
cam bien nao.
La chon cam bien RH kieu ien dung. Cac ng dung oi vi cam bien o RH kieu ien dung chiem
mot pham vi rong, bao gom:
Cac thiet b ben trong oto nh bo phan chong ong bang knh chan gio windshield defroggers.
Cac may in may tnh.
Cac thiet b y te nh quat thong gio va lo ap.
Nhng ng dung dan dung nh lo vi song, tu lanh, may say quan ao.
HVAC.
Cac may thu va ghi lu d lieu.
Bo phan phat hien ro r.
Cac tram kh tng.
Thiet b cong nghiep va x ly thc pham.
Buong th moi trng.
Tiep nhan nhng tien bo nguyen ly cutting-edge trong lnh vc thiet ke che tao chat ban dan, nhieu cam
bien ien dung a co c ac tnh o troi va o tre drift and hysteresis toi thieu va lau ben. Viec ng
dung cong nghe CMOS (Complementary Metal Oxide Semiconductor) trong cac bo phat xung nh thi
timer pulses giup cho cam bien tao c tn hieu ien ap ra gan tuyen tnh (xem hnh 6.26).
o bat nh cua cam bien ien hnh la 2% RH trong pham vi o RH t 5% ti 95% s dung hieu
chuan hai iem. Hieu ng ien dung cua ng cap noi lien quan vi nhng thay oi ien dung nho cua
cam bien han che khoang cach lap at phan t cam bien ti mach chuan hoa tn hieu trong pham vi
thc te la ngan hn 10 feet.
Viec ieu hng tinh laser trimming co the giam thieu o bien ong 2%, lam tang kha nang thay the
lap lan trc tiep tai hien trng.
Cac chng trnh may tnh hieu chuan lai recalibration programs cung co kha nang bo chnh
compensating cho ien dung cam bien t 100 en 500 pF.
57
Hnh 6.26 ien ap ra cua cam bien co bo nh thi CMOS.

Cac cam bien RH kieu ien dung la khong tuyen tnh di vai phan tram o RH, o la ly do tai sao
nhieu cam bien trong cac he o lng iem sng lai dung cac mach vi x ly e lu gi cac d lieu hieu
chuan. Phat trien nay a giup giam gia thanh cac may o o am hygrometers va cac may truyen phat
trong HVAC va cac ng dung tham bao kh tng vien thong.
u iem:
ien ap ra gan nh tuyen tnh.
Pham vi o o RH va dung sai ngng tu hi nc rong.
Tnh thay the lap lan, neu dung ieu hng tinh bang laser.
Tnh on nh trong thi gian dai s dung.
Nhc iem: Khoang cach t phan t cam bien ti mach chuan hoa tn hieu b gii han.
La chon cam bien o am kieu ien tr.
Cac cam bien kieu ien tr la nhng cam bien o am loai nho, gia thap ma lai co o on nh lau ben va
tnh thay the lap lan cao. Chung phu hp cho nhieu ng dung cong nghiep, thng mai va dan dung, ac
biet la trong kiem tra va ch th chat lng san pham.
Cac cam bien ien tr co ap ng phi tuyen oi vi s thay oi o am, nhng co the tuyen tnh hoa bang
cac phng phap tng t analog hay phng phap so digital. Pham vi bien thien ien tr ien hnh la t
vai kilohm ti hang tram megaohm. Tan so kch thch nh mc la t 30 Hz en 10 kHz.
Cac cam bien o RH co tnh thay the lap lan cao (trong pham vi 2% RH). Mach ien t chuan hoa tn
hieu co the c hieu chuan tai mot iem RH co nh, han che s can thiet cac chuan o am. o chnh
xac co the c kiem nghiem tai mot buong hieu chuan RH hoac bang mot he hieu chuan dung may
tnh tham chieu ti mot moi trng tieu chuan. Cac cam bien kieu ien tr co nhiet o lam viec nh
mc trong pham vi t -40 ti +100 o C.
Tuoi tho cam bien mong i la t hn 5 nam trong cac ng dung thng mai va dan dung, nhng s dung
trong cac ieu kien bam ban co the gay ra nhng hong hoc vnh vien. Cac cam bien kieu ien tr cung
co xu hng suy di ch so shift values ch th trong qua trnh boc lo cho hi nc ngng tu khi s dung
cac lp phu hoa tan c trong nc.
u iem:
Khong can chuan hieu chnh, co tnh thay the lap lan cao va kha nang thay the tai hien trng.
Co tnh on nh lau ben.
Co kha nang s dung t nhng v tr lap at xa.
Kch thc nho.
Gia thanh thap.
58
Nhc iem:
Viec boc lo vi hi hoa chat va bam ban co the gay nen nhng hong hoc vnh vien.
Tr so o co the b suy di bi s dung lp phu hoa tan c trong nc.
La chon cam bien kieu nhiet dan.
Cac cam bien o am kieu nhiet dan noi chung c s dung trong cac thiet b may moc, ke ca may say
quan ao va lo vi song. Chung c s dung trong nhieu ng dung cong nghiep, ke ca cac lo say go, may
say, bao che dc pham, nau an va kh nc trong thc pham
c cau truc t thuy tinh, vat lieu ban dan, chat deo nhiet o cao, va nhom, cac cam bien nhiet dan la
loai lau ben va co tnh nang chu c hi hoa chat.
Chung cho o phan giai cao hn so vi cac cam bien kieu ien dung va kieu ien tr nhiet o ln hn
200 o F. o chnh xac ien hnh la +3 [g/ m 3 ], c chuyen oi thanh gan 5% RH 40 o C va 0,5%
RH 100 o C.
u iem:
Rat lau ben.
Hoat ong tot moi trng an mon va nhiet o cao ti 575 o F.
Co o phan giai tot hn cac cam bien kieu ien dung va ien tr.
Nhc iem:
ap ng vi chat kh bat ky co cac tnh chat nhiet khac vi nit long, ieu nay co the anh hng
ti phep o.
6.3.3 Khai thac s dung.
Cac hieu ng o am va nhiet o.
au ra cua tat ca cac cam bien o am da tren c s hap thu (ien dung, ien tr khoi, mang ien dan,
vv) eu chu anh hng cua nhiet o va o %RH. Bi vay nen viec bo chnh nhiet o c dung trong
cac ng dung nham tang o chnh xac hoac m rong pham vi nhiet o van hanh.
Khi viec hieu chnh cam bien o am la e bo chnh nhiet o, th tot hn ca la lam sao cho nhiet o o
cang gan vi nhiet o cho lam viec cua cam bien cang tot tc la trong cung ieu kien o am vi kh
hau moi trng lam viec. ieu nay ac biet thc te khi viec phoi hp o RH va nhiet o trong phng
phap o iem sng. Cac may o cong nghiep o am va iem sng co to hp mot ien tr nhiet platin
RTD 1000 ohm mat sau nen gom cua cam bien e s bo chnh nhiet o khong anh hng en tnh
nguyen ven cua phep o. Trong cac cam bien nhiet o cao nay khong co bo phan chuan hoa tn hieu tch
hp trong chip.
ien ap au ra.
Mot cam bien o am vi mach tch hp o am tng oi (Relative Humidity Integrated Circuit RHIC)
co tn hieu ien ap ra tuyen tnh la ham cua Vsup ply , %RH va nhiet o. au ra la tng quan ty le
ratiometric, bi khi ien ap cung cap tang len th ien ap au ra tang len theo cung ty le. Mot ban ve
be mat cua ac tnh cam bien oi vi nhiet o trong khoang 0 o C va 85 o C c neu tren hnh 6.27.
o th be mat nay c xap x hoa gan ung bi s ket hp hai ang thc:
1. ac tuyen phu hp nhat 25 o C, (Best Fit Line at 25 o C) hoac tng t ang thc ac tnh cam
bien 25 o C (sensor-specific equation at at 25 o C). ac tuyen ien hnh oc lap cua cam bien phu
hp nhat 25 o C (ng am net trong o th) la:
Vout .J .Vsup ply [0,0062(% RH ) + 0,16] .
(6.17)
Mot ang thc ac tnh cam bien co the co c bi an ban cua cam bien RH. ang thc an ban gia
thiet la Vsup ply J5VDC va kem theo hay san co nh mot tuy chon cho cam bien.
59
2. Mot ang thc cam bien oc lap dung hieu chnh ch so %RH (t ang thc ac tuyen phu hp nhat)
oi vi nhiet o T la:
TrueRH = (% RH ) /(1,0546 0,00216T ) ; T= o C;
(6.18)
o
(6.19)
hoac: TrueRH = (% RH ) /(1,093 0,0012T ) ; T= F.
Hnh 6.27 o th be mat cua ac tnh cam bien.

Cac ang thc tren minh hoa ban ve be mat ien hnh (ac tuyen phu hp nhat 25 o C) hoac ban ve be
mat thc te (ang thc ac tnh cam bien 25 o C) vi pham vi dung sai neu di ay:
1% oi vi T > 20 o C
2% oi vi 10 o C < T <20 o C
5% oi vi T < 10 o C.
Cac may o iem sng co the minh hoa trc tiep cho phng an ac tnh cam bien co ban ve be mat
thong qua mot bang tra.
Lu y: Hay chuyen oi ien ap ra thu c thanh tr so %RH thong qua ang thc au tien (6.17) trc
khi ap dung ang thc th hai (6.18) hay (6.19).
Ngng tu hi nc va am t.
S ngng tu hi nc xay ra khi nhiet o be mat cua dien tch cam bien tch cc ha xuong di mc
iem sng cua chat kh xung quanh. S ngng tu hi nc hnh thanh tren cam bien (hay be mat bat ky)
tham ch ngay ca khi nhiet o be mat ch tam thi sut xuong di mc iem sng trong khoang khac.
Nhng bien ong nhiet o nho gan cam bien co the gay ra ngng tu hi nc mot cach khong lng
trc c khi lam viec o am tren mc 95%.
Trong khi ngng tu nhanh, nc se t t bay hi trong nhng ieu kien o am cao (tc la khi nhiet o
be mat cua cam bien ch cao hn nhiet o iem sng chut t). V ly do o ma chu ky hoi phuc cua cam
bien t trang thai am t hay trang thai ngng tu hi nc se lau hn nhieu so vi thi gian ap ng nh
mc. Trong suot qua trnh hoi phuc, cam bien cho tn hieu ra khong oi la 100% RH, bat chap o RH
cua moi trng thc te la the nao.
Neu ng dung yeu cau kiem tra lien tuc o RH o am c mc 90% va cao hn, hay tien hanh cac bc
ngan nga s can thiep cua hien tng ngng tu hi nc. Mot vai chien thuat sau:
1. Gi cho khong kh c xao tron eu e giam thieu bien ong nhiet o cuc bo.
2. Mot vai cam bien dung bo loc bang thep khong r dung ket sintered e bao ve cam bien khoi b hat
nc. Bien phap tiep theo la boc lp chong am hydrophobic coating ngan nga am t va ngng tu
60
hi nc trong nhng moi trng co khung hng nc ban tung toe hay co s bao hoa kh bao
hoa hi nc nhanh.
3. Lam nong cam bien sao cho dien tch tch cc cua cam bien nong hn nhiet o iem sng cuc bo.
ieu nay co the thc hien bang mot bo nung at ben ngoai hoac bang con chip o o RH kieu
CMOS t lam nong bang cach cho no hoat ong che o nguon cung cap cao hn.
Lu y: Viec lam nong cam bien o o RH cao hn nhiet o moi trng xung quanh se lam thay oi ac
tnh hieu chuan cua no va lam no nhay vi nhng bien ong nhiet o cung nh luong kh.
Tch hp chuan hoa tn hieu.
Moi cam bien o RH nhanh chong hoi phuc khoi tnh trang ngng tu hi nc hay tnh trang am t ma
khong b suy di ac tnh hieu chuan. Tuy nhien, sau 24 gi hoac lau hn phi mnh trong o am cao
(>95% RH) hoac ngng tu hi nc lien tuc th co the xay ra s suy di ac tnh t 2%RH en 3%RH.
S suy di nay co tnh lap lai va co the hoi ngc bang cach at cam bien vao mot moi trng co o RH
thap (10%RH) trong khoang thi gian 10 gi.
Cac cam bien o am silicon tch hp co mach chuan hoa tn hieu ben trong vi mach cung vi cam bien
kieu ien dung. Cac cam bien tch hp RHIC o o am nay la loai co ieu hng tinh bang laser sao cho
Vsupply J 5 V, ien ap ra nam trong khoang ien hnh la t 0,8 V ti 3,9 V oi vi pham vi bien thien t
0%RH ti 100%RH 25 o C. (An ban d lieu ac tnh hieu chuan cua cam bien va ac tuyen phu hp
nhat 25 o C c kem theo hay co san nh tuy chon oi vi cac cam bien nay).
Cac cam bien tch hp RHIC o o am a c hieu chuan tai nha may, nh la cac dung cu vi nang
lng micro-power devices co ac tnh hieu chuan rieng va/hoac co tnh thay the lap lan bo-vi-bo unitto-unit tot. Cac tien ch nay giup cac nha san xuat OEM tranh c gia thanh hieu chuan o am tai nha
va tuoi tho nguon battery trong cac thiet b xach tay. Co the nhan c o chnh xac gia tang bang cach
ieu chnh he ien t e tng thch cho ac tuyen phu hp nhat 25 o C cua mot cam bien cu the nao
o.
Tnh thay the lap lan xac nh pham vi ien ap ra oi vi s pho bien bat ky cua cac cam bien mot
iem o RH nhat nh. Tnh thay the lap lan trong khoang ( 5% 0%)RH c so sanh vi ac tuyen ra
c ban oi vi chip vi mach RHIC la t (0,8 3,9)V tng ng (0 100)%RH vi ien ap kch thch la
5VDC.
Neu ta lay ng cong ac tuyen c s th nhan 0.031 V/%RH vi 5%RH nhan c ket qua la 0.155
V. Co ngha la ien ap ra cua thiet b nay la 0.8 V 0.155 V hoac trong pham vi t 0.645 V ti 0.955 V.
Khi trong moi trng co o RH la 0% th ien ap ra cua tat ca cac cam bien thuoc cung loai se nam
trong pham vi nay.
Tnh thay the lap lan se tang len cung s gia tang o RH bi v niem phong cam bien tch hp RHIC a
c ieu hng tinh tch cc ch 0%RH. Viec ieu hng cac tr so o RH khac la khong kha thi,
khong thc te.
Tnh thay the lap lan giup ta ha gia thanh thiet ke bang cach tranh phai hieu chuan he cua mnh oi vi
moi cam bien rieng le. Cam bien tch hp RHIC van gi c cac tnh nang thay the va nhng u iem
ve o chnh xac o am cao hn.
o chnh xac datren c s ng cong hieu chuan ac tnh oi vi bat ky cam bien rieng le nao va
bang 2% RH. V du: neu mot cam bien ac trng co ien ap ra la 0,850V 0%RH (gia thiet ien ap
nguon cung cap la 5VDC), th cam bien nay se luon luon cho ra ien ap 0,062V hoac trong pham vi
(0,788 0,912)V. o chnh xac se bang tnh thay the lap lan 2% neu khong hieu chuan he cho moi
cam bien. Neu hieu chuan cho moi cam bien tch hp RHIC th o chnh xac toan phan co the trong
khoang 12% RH.
61
PHU LUC 1. C S LY THUYET

PHAN T CAM BIEN THAM SO MACH.
P1.1 Khai niem tham so mach: tr khang ien tr ien khang.
Trong ky thuat ienien t khai niem tham so mach bao gom tr khang (gom ien tr va ien khang)
va ien dan. Tren thc te, cac tham so mach thng phan biet ay la nhng tham so thu ong, ngoai
ien tr thuan Ohm (hay con goi ien tr tac dung) con co cam khang (cua cuon cam) va dung khang
(cua tu ien), lam thanh tr khang toan phan cua mach, bieu th mot tr khang phc.
ien tr phc la mo ta toan hoc tr khang theo ai lng phc (ai lng vector, co o ln va co
hng), bang ty so gia bien o phc cua hieu ien the dang sin vi bien o phc cua dong ien dang
v
v
v
sin. Vector tr khang phc ky hieu la Z . Modul cua Z goi la ien tr toan phan Z = Z . Neu argument
cua ien tr phc ky hieu la th:
v
Z = Ze j = Z cos + jZ sin = R + jX .
(P1.1)
Phan thc cua ien tr phc Z la R ien tr tac dung cua mach, phan ao X la ien tr phan khang
ien khang.
ien khang la phan tr khang ac biet cua mach ien oi vi rieng ien xoay chieu, khac vi ien tr
thuan la ien tr cua mach ien oi vi ca ien mot chieu lan xoay chieu. ien khang do hai yeu to la
o t cam va ien dung gay ra. ien khang do o t cam gay ra goi la cam khang va ien khang do
ien dung gay ra goi la dung khang. ien khang khong gay ra s toa nhiet JouleLenz nh ien tr
thuan, nhng no co tac dung phan bo lai nang lng cua mach ien theo thi gian.
ien tr la ai lng ac trng cho s ngan can cua vat lieu oi vi dong ien chay qua no. ien tr
phu thuoc vao ban chat, kch thc hnh hoc va nhiet o cua vat dan.
ien khang X la phan ao cua tr khang phc:
v
Z = R + jX .
(P1.2)
ien khang X cua oan mach co R, L, C mac noi tiep bang:
X = XL XC ,
(P1.3)
trong o: X L = L la cam khang va X C = 1 C la dung khang.
Tr so X xac nh o lech pha gia dong va the:
= arctan( X R ) .
(P1.4)
Khi X > 0 th > 0, mach co tnh cam khang; khi X < 0 th < 0, mach co tnh dung khang.
ien tr tac dung R la ty so gia cong suat tac dung tieu thu trong phan oan mach va bnh phng
dong hieu dung ca vao phan oan mach o:
R = P I2 .
(P1.5)
ien tr tac dung co the bieu dien qua ien dan tac dung G va ien dan toan phan Y, bang:
R = G Y 2 .
(P1.6)
ien tr tac dung thng ln hn ien tr thuan v hieu ng mat ngoai, v s hao ph nang lng do dong
ien xoay trong trng ien-t bien thien va do cac hien tng tre. Do o, khai niem ien tr thuan va
ien tr tac dung se cang khac biet khi phan t ien tr cua mach lam viec che o bien thien xoay
chieu, nhat la cao tan.
ien tr thuan R la ien tr thuan Ohm ai lng vo hng ac trng cho s can tr cua oan mach
oi vi dong mot chieu, bang ty so gia hieu ien the mot chieu U vi cng o dong ien I khi trong
62
phan oan mach o khong at mot the ien ong (hay the phan ien). ien tr thuan R c xac nh
theo nh luat Ohm:
(P1.7)
R =U I .
ien tr R ch phu thuoc vao ban chat vat dan, hnh dang va kch thc vat dan. oi vi day dan ong
chat th:
R = l S ,
(P1.8)
trong o: la ien tr suat, l la chieu dai va S la tiet dien day dan.
Trong thc te ng dung, thiet ke va cong nghe che tao van xuat hien nhng mau thuan lien quan quan
niem: ly thuyet ly tng hoa, va thc tien hien thc hoa chung. ay chung ta quan tam en nhng
phan t linh kien mach ieu khien t ong, du ch mc o s dung, khai thac nhng phan t linh kien
che san hay thiet ke che tao hoac thiet ke mach ng dung chung. Do o, thiet ngh trc het chung ta
nen khao sat cac tham so mach ien tren c s s o tng ng cua chung.
v
Mot tr khang phc Z ket hp thanh phan tac dung R va thanh phan phan khang X:
v
v
v
v
Z = Re(Z ) + j Im(Z ) = R + jX = Z e j z .
(P1.9)
oi vi ien tr thuan Ohm th ap dung nh luat Ohm di dang:
U (t )
,
(P1.10)
R=
I (t )
tc la dong va ap tren ien tr moi thi iem eu ty le tng quan vi ien tr Ohm cua no.
P1.2 S o tng ng cua cac phan t tham so mach.
v
ien tr thuan. ien tr thuan Ohm R khac vi tr khang phc Z la no khong cha cac thanh phan ien
khang (dung khang hoac cam khang) ma tren thc te o la mot khai niem ly tng, khong the at c
hoan toan. Cac phan t linh kien bien tr thc te, bang cach nay hay cach khac, t nhieu eu co cha
thanh phan ien khang. V nh bien tr kim loai (hnh P1.1a) che xuat theo cong nghe day cuon se co
thanh phan cam khang (hnh P1.1b), theo cong nghe mang (mang than, mang tr, mang ien dan ) se co
thanh phan dung khang (hnh P1.1c), the hien cang ro khi lam viec ien xoay chieu hay tan so cao.
Hnh P1.1 S o tng ng cua mot bien tr thc te.

oi vi cuon cam va tu ien, neu bo qua c thanh phan ien tr thuan Ohm th:
oi vi ien dung C (tu ien ly tng):
v
1
j
=
;
(P1.11)
Z C = jX C =
jC
C
oi v
i ien cam L (cuon cam ly tng):
v
Z L = jX L = jL .
(P1.12)
Linh kien thc te luon luon ton tai ton hao, ta s dung cac s o tng ng cuon cam va tu ien thc
te co ton hao nh sau:
Cuon cam co ton hao. Hnh P1.2 gii thieu s o tng ng noi tiep hay song song cua mot cuon cam
co ton hao, vi bieu o vector tr khang va ien dan tng ng.
63
Hnh P1.2 S o tng ng cuon cam co ton hao vi bieu o tr khang

vav ien dan tng ng: a). S o noi tiep; b). S o song song.
v
Tr khang Z L va ien dan YL cua mot cuon cam co ton hao bang:
v
v
1
1
.
Z L = R + jL = 1 YL = 1 +
(P1.13)
R jL
Cung co the bieu dien he so ton hao tan L va he so pham chat QL cua cuon cam bang cac phan t cua
s o tng ng:
R
LP
1
;
(P1.14)
tan L =
= S =
QL LS
RP
ay cac ky hieu s va p bieu th phan t thuoc s o tng ng noi tiep series hay song song parallel.
Tu ien co ton hao. Hnh P1.3 gii thieu s o tng ng noi tiep hay song song oi vi mot tu ien
co ton hao, vi bieu o vector tr khang va ien dan tng ng.
Hnh P1.3 S o tng ng tu ien co ton hao vi bieu o tr khang

va ien dan tng ng: a). S o noi tiep; b). S o song song.
v
v
Tr khang Z C va ien dan YC cua tu ien co ton hao bang:
v
v
j
1
ZC = R
= 1 YC = 1 + jC .
(P1.15)
C
R
Co the bieu dien he so ton hao tan C va he so pham chat QC cua tu ien bang cac phan t tren s o
tng ng:
tan C =
1
= RS C S = 1 C P R P .
QC
(P1.16)
P1.3 Cac phan t cam bien tham so.

P1.3.1 Phan t bien tr Resistance Transducer.
Cac phan t bien tr thng c che xuat di dang chiet ap Potentiometer. Tr so ien tr thuan Ohm
cua bien tr la:
l
R = , [ ];
(P1.17)
A
mm 2
ay: - ien tr suat vat lieu ien tr, [
]; l chieu dai day cuon ien tr; A tiet dien day
m
tr, [ mm 2 ].
64
Ve cau truc, cac chiet ap co tiep iem con trt: chuyen ong thang linear- hay vong (arc-shaped-) (hnh
P1.4), mot vong hay nhieu vong. Kieu thong dung la co bo phan truyen ong truc quay con trt (quay
tay hay dung may ien).
Hnh P1.4 Cam bien ien tr: a). Chiet ap tuyen tnh;
Hnh P1.5 Sai lech tuyen tnh cua
b). Chiet ap vong (amular).
chiet ap do dung sai che tao.
Bien tr c thc hien bang ien tr day cuon, hoac mang ien tr film resistor bang mot lp carbon
hay chat deo dan ien. Moi chiet ap thc te khong tranh khoi co nhng thanh phan ien cam va ien
dung. Tuy nhien, co the bo qua nhng thanh phan o, neu dung ien mot chieu hay xoay chieu tan so
thap. Hien nay ang phat trien loai bien tr t magnetic field resistors, lam viec khong tiep xuc va do
o khong b anh hng ma sat con trt.
Ty le gia o dai chuyen dch cua con trt tren bien tr x va o ln ien ap U x ri tren phan bien tr
ay tng t nh trong s o mot bo phan ap. Quan he ty le:
.l
R N = max ;
A
U0
I=
;
RN
U
U x = R x .I = . 0 .l x = k .l x = f (l x ) ;
A RN
(P1.18)
(P1.19)
(P1.20)
ay: l max , l x o dai toan phan va o dai khoang dch chuyen x cua con trt bien tr; R N va R x
ien tr toan phan (danh nh) va ien tr phan chiet ap cua bien tr; va A ien tr xuat cua vat
lieu day dan va tiet dien day; U 0 , I ien ap va dong ien tren phan t; U x ien ap phan chiet ap
con trt cung chnh la ien ap ra cua phan t; k he so ty le.
Tr so ien tr (danh nh): Tr so ien tr ien hnh la 100[ ] va 100 [k ].
Mc ton hao cong suat cho phep: Ton hao se tang tuy theo mc tang ien ap neu ien tr nho. ien
ap ln nhat U 0 max co the cung cap cho chiet ap c tnh bang:
U 0 max = Pth R ; [V]
(P1.21)
ay: Pth cong suat ton hao cho phep cua chiet ap, [W]; R tr so ien tr, [ ].
Dung sai cho phep: Dung sai la sai so ln nhat co the cho phep. Dung sai cua chiet ap la sai lech
gia tr so thc te va tr so danh nh, tnh bang [%] tr danh nh, tc la sai so tng oi cua bien tr
chiet ap. No nam trong pham vi (1 10)[%]. Tr so ien hnh la trong khoang 3[%] va 5[%].
o tuyen tnh: o tuyen tnh la ac tnh ac biet quan trong oi vi cac phan t t ong. Tham ch
trong ieu kien khong tai, v du khi ien ap au ra c xac nh theo phng phap bu (can bang),
coi nh khong co sut ap tren au o, th thay oi ien ap au ra cung van khong that tuyen tnh vi
ng trt hay goc quay cua con trt. o sai lech ien tr thc te so vi ng cong ly tng
thng la trong khoang 0,05[%] va 1[%] (hnh P1.5). Chiet ap day cuon co o tuyen tnh tot hn ca,
65
nhng co nhc iem la gia tr bien tr thay oi ung bang o ln vong day, t vong nay sang vong
khac. Noi cach khac, o phan giai bang o ln ien tr mot vong day. Trong thc te, co the che tao
chiet ap vi 25 vong tren 1 [mm], tc la o phan giai gii han trong khoang 40 [ m].
o phan giai: o phan giai cua chiet ap vong n ng knh 25 [mm] la khoang 0,2 o . Ve ly thuyet,
cac chiet ap kieu mang carbon hay mang deo ien dan co o phan giai vo nh. Tren thc te, co the
at 0,01 [mm] khi o dch chuyen thang va 0.01 o khi o di goc. Tuy nhien o tuyen tnh cua nhng
cam bien nay kem hn cac chiet ap day cuon.
P1.3.2 Phan t bien dung Capacitance Transducers.
ien dung cua mot tu ien phang ty le vi dien tch be mat ban cc A, vi khoang cach ban cc d va vi
chat ien moi:
A
C = 0 r ; [F]
(P1.22)
d
ay: 0 hang so ien moi cua khong kh, 0 = 8,854. 1012 [F/m]; r hang so ien moi tng oi
cua vat lieu chat ien moi so vi khong kh; oi vi ien moi la khoang khong (khong kh) th r = 1.
Do o, ien dung la ham cua v tr tng oi trong khong gian va chat ien moi s dung. oi vi cau
truc ong tam chieu dai l (tu ien hnh tru), bieu thc se la:
2l
C = 0 r
;
(P1.23)
ra
ln
rb
ay: ra - ban knh tru ngoai; rb - ban knh tru trong.
Cam bien ien dung tao nen mot ien trng, con cam bien ien cam tao nen mot t trng. Neu a
mot vat the dan ien lai gan ien trng nay, th vat tac ong nh mot ban cc va lam thay oi phan bo
ien trng. S thay oi ien trng se c phan t cam bien thau nhan va lng gia cho nen ay
goi chung la phan t bien dung.
Phan t bien dung gom hai ban cc dan ien cach ly nhau nhng co the chuyen dch so vi nhau. Hai
ban cc at song song, nen co the tnh ien dung cua phan t bien dung theo bieu thc (P1.22). Moi
quan he ro rang gia cac ai lng kch thc va ien dung tao c s che xuat phan t bien dung co kha
nang lng gia tn hieu o theo khoang cach (hnh P1.6).
Hnh P1.6 Nguyen ly phan t bien dung o khoang cach.

trang thai ban au th:
A
C 0 = r . 0 . .
l0
Khi tang khoang cach gia hai ien cc ( l1 = l 0 + l ) th:
A
C1 = r . 0 . .
l1
Bieu thc c s cua phan t bien dung o khoang cach se la:
66
(P1.24)
(P1.25)
C1
=
C0
1
.
l
1+
l0
(P1.26)
oi vi nhng chuyen dch nho l so vi khoang cach l 0 th ty so bien ong khoang cach co the coi la
kha nho ( l << 1 ) va nh vay:
l0
C1
l
= 1 .
(P1.27)
C0
l0
ac tuyen phan t cung co the coi gan ung la tuyen tnh trong mot pham vi nhat nh.
Phan t bien dung co ac iem:
o o tuyen tnh cao (hn 0,01%);
o Co kha nang boc chan chong anh hng ien trng nhieu;
o Nhay vi nhieu t trng;
o Chuyen oi trc tiep thanh ai lng ien.
Trong ky thuat t ong s dung rong rai mach bien dung o tiep can, phan ng nhanh nhay vi ai
lng khoang cach chuyen dch, th gia tr ien dung theo tr tuyet oi khong phai chnh yeu, cai chnh
lai la s bien ong, thay oi cua no.
Cac phan t cam bien ien dung ng dung s thay oi ien dung theo bien ong cua mot trong nhng
ai lng bieu thc (P1.22). Hnh P1.7 trnh bay s o nguyen ly cac phng an bien dung o. Hnh
P1.7a phan t bien dung do thay oi khoang cach gia cac ban cc mot lng bang d ; hnh P1.7b
do thay oi dien tch oi ng cua cac ban cc (bi chuyen dch l ); hnh P1.7c do thay oi tnh chat
ien moi (bi tng tac ien moi khong gian r va 0 gia cac ban cc vi xe dch l ).
Hnh P1.7 Nguyen ly cau truc c ban cua cac phan t bien dung.
P1.3.3 Phan t bien cam Inductance Transducers.
ien cam cua cuon day c xac nh bang:
N 2 0 r A
L=
;
(P1.28)
l
ay: N so vong day; 0 - o t tham cua khoang khong, 0 = 4 . 107 [H/m]; r o t tham tng
oi; A dien tch va l o dai cua cuon day.
Cung nh oi vi cac phan t cam bien ien dung, nguyen ly chung oi vi cac phan t cam bien ien
cam la lam thay oi mot trong nhng ai lng xac nh ien cam cua cuon cam (xem bieu thc (P1.28),
co the bien thien cac thanh phan N, r , A va l e dung lam bien cam. Tren c s o co the co nhng
phng an hien thc hoa phan t bien cam nh trong hnh (P1.8).
Co the bien thien so vong day N bang cach dung ket cau con trt (hnh P1.8a). Tuy nhien, kho co the
lam thay oi kch thc hnh hoc cua tng vong day rieng le. Cach khac, neu chia cuon day thanh hai
na va lam thay oi khoang khong gia chung (hnh P1.8b), th s ghep t tnh se thay oi va lam thay
oi ien cam toan phan. oi vi cuon cam co loi sat th s dch chuyen cua loi sat-t trong long cuon
day lam thay oi o t tham r (kieu phan ng doc, hnh P1.8c nguyen ly va ket cau). Kieu khac
kieu phan ng ngang, th mot ban cc ien dan c a lai gan cuon day, hoac than boc ien dan at
tren cuon day, khi o trong phien ien dan se cam ng dong xoay Foucoult. ien trng tao bi dong
67
Foucoult ay tng tac vi t trng cuon day lam thay oi ien cam (hnh P1.8d nguyen ly va ket
cau).
Hnh P1.8 Nguyen ly bien cam L theo phng an bien thien:

a). so vong day N; b). bo tr hnh hoc;
c). o t tham (loi sat t kieu phan ng doc);
d). ton hao dong xoay (phien ien dan kieu phan ng ngang).
Nh vay, phan t cam bien ien cam noi chung co hai dang ket cau c ban:
Cuon cam khong loi sat, va:
Cuon cam loi sat-t.
Ve nguyen ly th ket cau bien cam co loi sat-t lam viec chu yeu tren c s ghep t tnh, o la nguyen
ly bien ap, vi he so ghep nh la he so bien ap. Do o dang ket cau co loi sat co hai kieu c ban:
o Kieu phan ng doc longitudinal armature , va:
o Kieu phan ng ngang transverse armature.
ay, cung nh trong ky thuat ien-t, bo phan ong goi la phan ng.
Hnh P1.9 - Phan t bien cam kieu phan ng ngang:

a). kieu ngam; b). kieu vi sai mac vao mach cau.
Mot dang phan t bien cam kieu phan ng ngang c thc hien bang cach thay oi o t tham cua
khoang khong trong long cuon cam bang loi sat co ngam (hnh P1.9a). Hnh P1.9b gii thieu s o
nguyen ly phan t bien cam vi sai vi mach cau.
Dang ng dung co loi sat-t mem di ong trong long cuon cam day cuon la phan t bien cam phan ng
doc (xem hnh P1.8c) mot dang phan t bien cam theo nguyen ly bien the. Cau truc thong dung nhat
la cuon chan iron-core choke vi sai mac mach na cau phan t bien cam ghep hai cuon day co loi satt di ong kieu vi sai (hnh P1.10). Con tren hnh P1.11 la phng an ng dung nguyen ly bien ap vi sai.
68
Hnh P1.10 Phan t bien cam vi sai: a). S o noi mach cau o; b). ac tuyen.
Cuon chan vi sai hnh P1.10a co ket cau phan ng doc (loi sat-t doc). Neu cuon day di ong, t trng
ghep se thay oi va cung vi no la thay oi ho cam. ien cam cua hai nhanh cau bien oi nghch va
ien ap ng cheo cau U D se c hien th nh la ham cua khoang chuyen dch x (ac tuyen hnh
P1.10b). Khoang ac tuyen i qua iem 0 tren o th co the coi nh tuyen tnh. So vi cac phan t cam
bien ien cam n, ve c ban, hai cuon day mac vi sai kem nhay hn oi vi tap nhieu strays t trng,
oi vi bien ong nhiet o va bien ong ve bien o hoac tan so nguon cung cap.
Cac bien ap vi sai tham ch con c s dung pho bien hn cuon chan (kieu ngam dch chuyen doc truc)
mac mach kieu vi sai (hnh P1.10) hay cau na vi cam bien ien cam (hnh P1.9). Hnh P1.11 gii thieu
mot kieu bien ap vi sai co mot cuon s cap va hai cuon th cap c lap long vao nhau (ong truc tren
cung mot khung day cuon), trong long co loi sat-t mem di ong.
Hnh P1.11 Nguyen ly bien ap vi sai: a). Ket cau; b). Kieu loi doc;
c). Kieu loi doc mac mach cau o; d). Kieu loi ngang.
Cuon s cap c cap mot ien ap xoay chieu. Khi loi sat-t v tr gia (v tr oi xng) th s ghep t
tnh (he so bien ap) gia cuon s va hai cuon th la nh nhau; va neu nh cac thong so cua hai cuon th
cap la y nh nhau th ien ap cam ng hai cuon th cung se bang nhau. Neu loi sat-t b dch chuyen
ra khoi v tri oi xng th ien ap ra cua cac cuon th cap se khac nhau.
Hai cuon th cap trong phan t bien cam kieu loi doc (hnh P1.11b) mac mach ngc au vi nhau, tao
thanh ien ap vi sai au ra. Cung co the dung s o mach cau (hnh P1.11c), mac hai cuon th cap vao
hai nhanh mach cau.
oi vi s o hnh P1.11b th ien ap au ra cua mach U ra se bang:
U ra = K .U 1 .l ;
(P1.29)
ay: K hang so ghep (he so bien ap); U 1 ien ap cuon s cap (tr hieu dung); l chuyen v cua
loi sat-t khoi v tr oi xng.
s o mach cau hnh P1.11c, th ien ap au ra (ien ap ng cheo cau) se bang:
1
U ra = K .U 1 .l .
(P1.30)
2
Nh vay, neu dch chuyen loi sat-t la nh nhau ca hai s o, th s o hnh P1.11b se cho ien ap au
ra ln hn.
69
PHU LUC 2. PHAN T CAM BIEN MAY IEN THONG TIN.

P2.1 PHAN T MAY IEN PHAT TOC TACHO-GENERATOR.
P2.1.1 ai cng ve may phat toc Tacho-generator.
Trong cac ng dung ky thuat thng gap chuyen ong quay. Van e la xac nh so vong quay, thng
tnh bang so vong quay trong mot phut ([vong/phut] hay [1/min]).
Mot kha nang xac nh so vong quay la dung may ien khong lam viec che o ong c ma la che o
may phat generator-. May phat tacho- c dan ong c hoc se tao ra ien ap ty le vi so vong quay
cua may. Cung nh cac may ien ong c, may phat cung co rat nhieu kieu khac nhau. e phan biet cac
loai may phat ien, ngi ta xep dang may phat dung o so vong quay vao loai tachogenerator may
phat toc tacho-.
Tuy nhien, ngoai cac may phat toc tachogenerators (dang may ien), con co phan t cam bien so vong
quay kieu gia lng incremental-. Phan t cam bien so vong quay dang nay tao nen mot chuoi xung co
tan so lap lai ty le vi so vong quay. Chuoi xung vuong c dung lam ai lng ty le vi so vong quay
co u the la chung co the c lng gia trc tiep trong cac he ky thuat so digital. Trong cac he o
lng ieu khien ngay nay ng dung chu yeu la cac he ieu khien so, cho nen kieu phan t t ong nay
rat thong dung. oi vi cac tn hieu analog au ra th phai chuyen oi thanh nhng chuoi xung. Viec
lng gia so o c thc hien bang cach lay tch phan chuoi xung nay. Co nhng vi mach tch hp
chuyen dung e thc hien nhiem vu o. Chung c ky hieu la chuyen oi f/u chuyen oi tan so-ien
ap. Phan t gia lng incremental dung o so vong quay co the che tao vi nhieu cam bien a dang
khac nhau. Chu yeu la m rong kha nang la chon cac ac tnh chuyen biet, sao cho viec gia cong hay
cai bien t nhat. Phan t xung gia lng cho phep x ly m rong tiep theo bang mach ien t ap ng
nhng yeu cau cu the. Ngoai phng phap lng gia theo tan so bang cach em xung trong mot khoang
thi gian nhat nh, ngay nay cung dung kieu o o rong xung. Phng phap o ac biet phu hp cho
nhng chuyen ong quay toc o cham. Cac phan t cam bien gia lng o toc o quay a c neu
trong chng 4 phan t cam bien vat ly.
Phan loai. Cac loai may ien ong c cung co the lam viec che o may phat va khi o tao ra mot ien
ap phu thuoc vao chuyen ong quay. ien ap luon luon co quan he chat che vi so vong quay va c
dung lam so o so vong quay. Nhng ay, e co the nhan c quan he gia ien ap o va so vong
quay cang tuyen tnh cang tot, ngi ta at cho may phat nhng yeu cau cao, sao cho khong can may
phat phai la nguon dong ve mat nang lng (ch phat tn hieu). Cho nen cac may phat toc
tachogenerators c che xuat vi cau truc ac biet nh vay mot dang may ien ac biet, cong suat
nho, lam viec che o may phat (tn hieu), thc hien chc nang bien oi chuyen ong quay cua truc
dan ong thanh tn hieu ien ap ra ty le.
Phan biet cac dang may phat toc tachgenerators sau:
May phat toc xoay chieu:
o May phat toc khong ong bo:
xoay chieu ba pha;
xoay chieu (mot pha)
o May phat toc ong bo xoay chieu (mot pha) co chnh lu, rotor cc loi nam cham vnh cu.
May phat toc mot chieu
o co co gop;
o khong choi than.
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Trong he o lng ieu khien cac may phat toc thc hien nhng chc nang chu yeu sau:
Ch bao van toc quay;
Lien he ngc van toc quay (trong cac he theo doi bam sat);
Thc hien phep vi phan (theo phng trnh ac tnh ra cua may phat toc);
Thc hien phep tnh tch phan.
Phng trnh ac tnh ra cua may phat toc co dang:
d
U ra = k .n = K .
= f ( ) ;
(P2.1)
dt
ay: U ra ien ap ra cua may phat toc, [V]; n van toc quay cua truc dan ong, tnh bang
[vong/phut] hay [1/min]; k, K he so (khuyech ai).
T bieu thc (P2.1) ta thay ien ap ra ty le vi bien thien toc o quay cua truc quay. Do o, mot cach
gian lc co the coi may phat toc la mot phan t vi phan analog, o la c s ng dung may phat toc thc
hien phep vi phan ham analog neu tren.
Trong moi lien he ngc co the thay bien oi tch phan:
1
(P2.2)
= . U ra .dt .
K
ay cung la c s ng dung may phat toc trong mach tch phan analog giai tch ham toan tnh.
S khac nhau la loai may, ien ap cung nh cong suat ien tao ra khi tachogenerator c dan ong.
Trc het, chung ta lu tam en mot so ac tnh chung, cha i sau vao tng dang may, e co khai quat
van e.
Dang cau truc. Ngi ta phan biet cac tachogenerator ve mat cau truc:
o dang rotor rong (A4);
o dang e ng (B3);
o co mat bch pha truc dan ong (B10); va:
o co banh rang lap rap pha truc dan ong (B14).
Ky hieu trong ngoac n (x) la ky hieu dang cau truc may ien theo tieu chuan DIN cua CHLB c
(DIN 40050). Dang bao ve IP. cho thong tin them ve s bao ve tiep xuc trc tiep cung nh tiep xuc vi
vat ngoai va vi nc. Mot dang bao ve thong thng oi vi cac may phat toc la IP54. Ky hieu nay co
ngha la tachgenerator c bao ve chong bui gay hai va nc xoi t moi hng. Cac ieu kien bao ve
ac biet la khi may phat toc phai lam viec trong moi trng co nguy c chay no.
So vong quay danh nh, ien ap danh nh, dong ien danh nh. So vong quay danh nh chu yeu
cho biet so vong quay ng vi iem cuoi pham vi lam viec. ien ap au ra cua may phat toc ng vi so
vong quay danh nh va tai danh nh goi la ien ap danh nh. Dong ien khi o la dong danh nh.
Dong danh nh tng ng vi tai van hanh va so vong quay la 1000 [vong/phut]. Tai van hanh c quy
nh bi hang che xuat, cho trong tai lieu ky thuat kem theo may.
ac tuyen, sai so tuyen tnh. o th bieu dien cac ai lng au vao va au ra theo cac he so ly thuyet
c goi la ng ac tuyen. o th bieu dien iem cac gia tr o goi la ac tuyen thc nghiem.
Nhng sai lech ln gia ng ac tuyen danh nh va ac tuyen thc nghiem c coi la sai so tuyen
tnh. Sai so tuyen tnh c bieu dien theo gia tr ien ap hay gia tr ty oi oi vi mot ai lng dan
xuat nao o, v du tnh bang % cua ien ap cuoi pham vi o (hnh P2.1).
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Hnh P2.1 Sai so tuyen tnh cua cac may phat toc:
N ac tuyen danh nh; T ac tuyen thc nghiem;

x truc so vong quay; y truc ien ap ra; [%] sai so tuyen tnh.
Bi thong thng may phat toc lam viec trong mot pham vi so vong quay hep, nen sai so tuyen tnh co
the rat nho, nh vay o tuyen tnh cua ac tnh ra kha cao. Tuy nhien oi vi cac chc nang khac nhau
th phai thoa man yeu cau nhng mc o khac nhau. V nh cac may phat toc lam viec chc nang lien
he ngc ve van toc trong he theo doi bam sat can co he so khuyech ai ln trong khi o tuyen tnh ac
tuyen khong ong vai tro quan trong.
So vong quay cc ai. So vong quay cc ai c hang che xuat cung cap so lieu. Trong thc te, ngay
nay khong hiem may phat toc co so vong quay cc ai tren 10 nghn [vong/phut]. cac may phat toc ba
pha co chnh lu th so vong quay b gii han bi ien ap khoa cua cac diodes chnh lu. Bang cach la
chon linh kien co the m rong pham vi so vong quay, cho ti gii han c hoc.
oi vi cac may phat toc mot chieu th so vong quay toi a b gii han bi tnh nang chuyen mach co
gop va pham vi toc o toi a cua phan ng.
o nhap nho song tn hieu. Tn hieu au ra mot chieu cua may phat toc xoay chieu ba pha co chnh lu
va cua may phat toc mot chieu co thanh phan song hai nhap nho. o nhap nho trong tn hieu phu thuoc
so vong quay va phu thuoc tai, nhng cung gay anh hng thong qua sai so cau tao va ghep noi c. oi
vi cac may phat toc ba pha th chung phu thuoc vao so pha va mach chnh lu. oi vi cac may phat
mot chieu co co gop th phan anh hng chu yeu la t so vong quay phan ng va cau truc may phat toc.
Neu co the chap nhan mot khoang tre trong thi gian ap ng th co the dung mach loc e loai bo o
nhap nho d trong tn hieu.
P2.1.2 May phat toc xoay chieu.
May phat toc xoay chieu khong ong bo. May phat toc khong ong bo co cau truc may ien xoay
chieu khong ong bo, nhng rotor rong khong dan t. Tren stator at hai cuon day (quan rai, lech pha
nhau 90 o ien): cuon kch thch au vi nguon ien xoay chieu; va cuon phat a ien ap ra (hnh
P2.2). Vat lieu rotor c lam t hp kim khong dan t nh constantan, manganin, e am bao ien
tr suat ln va t thay oi theo nhiet o. e am bao t trng eu trong khoang h khong kh gia rotor
va stator may phat, cac may phat toc khong ong bo thng c che tao vi so cap cc ln hn hai
(2p 4).
Hnh P2.2 Nguyen ly cau truc may phat toc khong ong bo.
May phat toc xoay chieu khong ong bo ba pha. May phat toc ba pha co stator lam t thep tam ky
thuat ien va cuon day ba pha quan bang day ong. Ben trong stator co mot nam cham vnh cu quay,
72
vat lieu lam t hp kim nhom-nickel-cobalt. Khi nam cham quay th trong cuon day stator cam ng mot
ien ap. Bi cau truc ba pha cua cuon stator nen se cam ng cac ien ap lech pha nhau 120 o . Ba cuon
day stator c au theo hnh sao. Hnh P2.3 gii thieu nguyen ly cau tao.
Hnh P2.3 Nguyen ly cau tao may phat toc xoay chieu ba pha.
e nhan c tn hieu ra dang analog mot chieu thong thng, ngi ta mac noi tiep vi may phat toc
mot cau chnh lu ba pha (hnh P2.4). May phat toc ba pha co so vong quay cc ai ti c 10 nghn
[vong/phut]. Bi phan ng khong oi hoi mach au ien nao nen chung cung khong can co choi than,
trong van hanh khong phai cham soc ky thuat g nhieu. Va v a s dung nam cham vnh cu e tao t
trng cho may nen cung khong can phai co nguon ien phu nao them. Tn hieu ra cua may phat toc ba
pha co chnh lu phu thuoc vao so vong quay nhng khong phu thuoc hng quay.
Hnh P2.4 Nguyen ly cau tao may phat toc ba pha co chnh lu.
ien hnh: May phat toc xoay chieu ba pha TD3 (hang Thalheim). ac tuyen hnh P2.5. Co mach cau
chnh lu ban dan ba pha mac noi tiep.
ien ap khong tai:
mot chieu 30 [V] 3 [%] ( 1000 [vong/phut]);
Sai so tuyen tnh:
1 [%];
Sai so tuyen tnh giam thieu: 0,1 [%] khi: (100 n [vong/phut] 1000);
Hng quay:
ao c;
Cc tnh:
khong phu thuoc hng quay;
So vong quay ln nhat:
8000 [vong/phut].
Loai ket cau ac biet khong co chnh lu: ien ap ra la 3x22,5 [V].
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Hnh P2.5 ac tuyen may phat toc ba pha TD3 (Thalheim):
1000 [vong/phut] co ien ap danh nh:

khong tai: 30 [V] 3 [mA] 27,5 [V] 10 [mA] 23,9 [V]
1 [mA] 28,7 [V] 5 [mA] 26,5 [V] 20 [mA] 19,1 [V].
Loai may phat toc ba pha co chnh lu TD3 nh neu tren khong phu hp vi hng quay thay oi, khi
ngoai so vong quay can phai xac nh them hng quay. oi vi nhng trng hp ng dung nay, hang
san xuat co che xuat loai tacho- co them bo phan ao cc tnh, cho ien ap ra oi dau khi oi hng
quay. Do phai ao cc tnh nen so vong quay cc ai cua loai nay thap hn kha nhieu. Viec xac nh
hng quay can thi gian, them vao o tn hieu ra phu thuoc hng quay ch co the thc hien sau mot
khoang thi gian ngan, nhng t nhat cung phai sau mot phan t vong quay.
Trong o th ac tuyen cua may phat toc co the nhan thay o sai lech tuyen tnh, nhat la trong pham vi
van hanh toc o quay nho. Co the dung mach ien t mac noi tiep vi tacho- e bu o phi tuyen nay
va nh vay ac tuyen se gan nh ac tuyen ly tng. ieu nay co y ngha ac biet quan trong, khi can
phai xac nh nhng so vong quay nho, v nh c 1 [vong/phut].
May phat toc xoay chieu (mot pha). May phat toc xoay chieu mot pha co cau truc nh ong c ien
xoay chieu khong ong bo mot pha lam viec che o may phat. No tao tn hieu ra la ien ap xoay
chieu khong phu thuoc hng quay.
ien hnh: May phat toc xoay chieu WTD3 (hang Thalheim). ac tuyen hnh P2.6.
ien ap khong tai:
xoay chieu, dang sin 8 [V] 3 [%] ( 1000 [vong/phut]);
0,5 [%];
Sai so tuyen tnh:
Hng quay:
ao c;
Cc tnh:
khong phu thuoc hng quay;
8000 [vong/phut].
Hnh P2.6 ac tuyen may phat toc xoay chieu WTD3 (Thalheim).
Khi may phat toc xoay chieu khong ong bo lam viec vi nguon kch thch thay v la ien ap xoay chieu
dung nguon kch thch mot chieu th che o hoat ong nay co ac iem:
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Khi rotor may phat toc quay vi van toc khong oi n = const. th trong cuon phat khong co sc ien
ong cam ng, tc la khong co tn hieu ra;
Khi van toc quay cua rotor bien thien n = var. th sc ien ong cam ng trong cuon phat va ien ap
ra cua may phat toc se ty le vi van toc bien thien o, tc la ty le vi gia toc quay cua truc dan
ong.
Noi cach khac, may phat toc xoay chieu khong ong bo lam viec vi nguon kch thch mot chieu la mot
phan t cam bien gia toc quay.
May phat toc ong bo. Mot dang cau truc may phat toc xoay chieu co cau tao nh may phat ien ong
bo mot pha, co rotor cc loi lam bang nam cham vnh cu goi la may phat toc ong bo. Nh phan ng
la nam cham vnh cu nen rrong may phat toc ong bo khong co tiep xuc co gop, choi than, lam tang o
tin cay cua may. Dang may phat toc ong bo co nhng ac iem:
Khi van toc quay cua rotor thay oi se dan en s thay oi khong ch o ln ma ca tan so ien ap ra;
ieu nay co the lam bien dang ac tuyen ra, bi thay oi tan so lam thay oi ien khang cua may va
ca cua tai;
Co nguy c cong hng tan so cua he thong, gay ra nhng hien tng khong mong i.
Bi vay may phat toc ong bo c ng dung chu yeu trong mach o trc tiep toc o quay: cuon phat tn
hieu ra (cuon stator) c mac vi may o (o ien ap volt-ke) ch th so vong quay (thong qua bo chnh
lu).
P2.1.3 May phat toc mot chieu.
May phat toc mot chieu co co gop. May phat toc mot chieu co stator la mot nam cham vnh cu, hoac
lap cuon kch t oc lap, tao nen t trng kch thch (hnh P2.7). Phan ng la cuon phat c rap tren
rotor, tiep xuc ien thong qua co gop va choi than.
Hnh P2.7 S o nguyen ly cau truc may phat toc mot chieu kch thch oc lap.
Khi phan ng c dan ong, t trng se cam ng trong cuon day phan ng mot ien ap. Neu cuon day
phan ng co mac tai th se co dong ien xoay chieu chay qua. Bo phan tiep ien (co gop va choi than
trt tren no) se thc hien ao cc tnh e dong ien ra ch chay theo mot hng. Cac tacho- mot chieu
co ac tuyen doi xng qua iem 0. o sai lech so vi ac tuyen ly thuyet co the sinh ra ton hao loi sat
va dong ien xoay, nguyen nhan va la do tr khang tiep xuc cua choi than, va la bi phan ng phan
ng. Chung tac ong cang manh so vong quay ln.
Trong thc te, ac tuyen ra cua cac may phat toc mot chieu khong hoan toan tuyen tnh va khong i qua
goc toa o bi may nguyen nhan:
Anh hng cua ien tr tiep xuc choi than co gop gay ra tren ac tuyen ra mot vung khong nhay n =
(0 n min ). iem ac trng na oi vi may phat toc mot chieu co co gop la sai so ao chieu thuan
nghch, xay ra bi choi than tr hoan mot khoang thi gian ngan tren co gop khi oi chieu quay. e
khac phuc, choi ien thng c che tao nhieu tiep iem va bang hon hp ong-than hay bac-than.
Anh hng cua phan ng phan ng khi lam viec vi tai nho, dong ien cuon phat cang tang khi so
quay tang, lam luong t thong trong may giam. Phan ng cua phan ng lam tang sai so tuyen tnh
75
cua ac tuyen. e giam anh hng nay co the thiet ke sao cho may phat toc lam viec tren phan ac
tnh t hoa tuyen tnh khong bao hoa hay bao hoa manh.
oi vi may phat toc mot chieu kch thch oc lap: anh hng nhiet o ti ien tr day cuon cuon
kch thch (ln hn nhieu so vi cuon day phan ng). Bien phap khac phuc chu yeu la mac them vao
mach kch thch ien tr phu bu nhiet.
May phat toc mot chieu can phai bao dng nh ky, chnh nh v tr thch ng cua co gop va choi than.
Trc het, chu trong chu yeu oi vi nhng dan ong ao chieu quay, nh thao tac bc tien an dao
trong cac may cong cu.
ien hnh: May phat toc mot chieu co choi than co gop KTD 60 (hang Thalheim). ac tuyen hnh
P2.8.
ien ap khong tai:
mot chieu 66 [V] 5 [%] ( 1000 [vong/phut]);
ien ap danh nh:
60 [V];
Dong danh nh:
67 [mA] khi: (800 n [vong/phut] 3000);
Sai so tuyen tnh:
0,15 [%];
Hng quay:
ao c; Cc tnh: phu thuoc hng quay;
9000 [vong/phut].
Hnh P2.8 ac tuyen may phat toc mot chieu KTD 60 (Thalheim).
May phat toc mot chieu khong choi than. Trong nhng trng hp dan ong ien co ac tnh ong hoc
cao va hang so vong quay ln trong mot pham vi at nh rong, v nh t 0,5 en 10 nghn [vong/phut],
th ngi ta s dung cac may phat toc tacho- khong co bo phan tiep xuc trt nh co gop choi than.
Hnh P2.9 S o nguyen ly va bieu o tn hieu xung cua may phat toc mot chieu khong choi than.
Ve mat cau truc c kh, nhng tacho- nay giong nh he may ien xoay chieu (ba pha) co rotor nhieu cap
cc va co cuon day (ba pha) stator. Nam cham vnh cu nam trong phan ng rotor. Cac ien ap cam
ng co dang bien thien gan hnh thang va lech pha nhau. Bang cach chuyen mach thch ng, phan thang
cua na chu ky dng c cong them sn len cua na chu ky am. Viec chuyen mach c thc hien
76
bang cac bo cam bien v tr tac ong nhanh (v nh phan t cam bien Hall hay phan t cam bien phien t
tnh) va mot bo oi noi multiplexer (hnh P2.9).
Mach ien t mac noi tiep vi tacho- se cho ra tn hieu ty le vi so vong quay. Hng quay c xac
nh theo dau cua tn hieu ra.
ien hnh: May phat toc mot chieu khong choi than BLTD 4 (hang Thalheim). ac tuyen hnh P2.10.
ien ap ra:
(0 10,00) [V] ( 20 [mA]);
Pham vi o so vong quay
(0,5 10 000) [vong/phut];
(Khi so vong quay vt ngng:
12 [V];
ien ap ra max.:
Dong ra max.:
30 [mA] - );
Hng quay:
ao c;
Cc tnh:
phu thuoc hng quay;
ien ap lam viec:
+ (24 30) [VDC].
Hnh P2.10 ac tuyen may phat toc mot chieu BLTD 4 (Thalheim).
P2.1.4 ng dung.
Theo chc nang va tnh nang hoat ong co the phan cac may phat toc theo ba nhom ng dung:
1. Ch bao toc o, so vong quay.
2. Cam bien o tang giam tn hieu ty le toc o quay trong moi lien he ngc cua he thong t ong ieu
chnh va la phan t cua he on nh toc o. ay thng dung cac may phat toc khong ong bo hay mot
chieu cap chnh xac (0,5 1,0).
3. Phan t tnh toan t ong e giai cac phep vi phan va tch phan ham so analog. ay dung may phat
toc o chnh xac cao: (0,05 0,2).
Hnh P2.11 S o cau truc he truyen ong anntena radar.
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Hnh P2.11 gii thieu s o cau truc he thong truyen ong anntena radar, trong o may phat toc tacholam chc nang th hai cam bien lien he ngc ve van toc quay cua anntena. He on nh toc o quay
anntena mc ngng at U 0 tren phan t bien tr chiet ap R, so sanh bo so C vi tn hieu toc o
quay hien hu cua anntena t au ra may phat toc khong ong bo Tacho-. o sai lech c khuyech ai
ien t a ti may ien khuyech ai e ieu khien ong c chap hanh Motor quay anntena vi van toc
on nh.
P2.2 PHAN T MAY IEN CAM NG SELSYN.
P2.2.1 ai cng ve may ien cam ng selsyn.
Selsyn la may ien cam ng cong suat nho trong he thong lien lac ong bo truyen goc ng dung ieu
khien, ieu chnh va theo doi, kiem tra t xa. Trong ky thuat thng co s can thiet ong bo hoa chuyen
ong quay hay goc quay cua cac truc c nam xa nhau va khong co lien he c kh vi nhau. Van e
c giai quyet nh he thong lien lac ong bo gom may phat c dan ong bi truc quay, mot hay
nhieu may thu va ng day truyen at gia chung.
Ve phan loai he thong ong bo truyen goc co:
Selsyn ba pha;
Selsyn mot pha;
Selsyn vi sai.
May t-ien: magnesyn va selsyn ong c.
Phan loai theo cau truc may ien selsyn co:
Sensyn co cc tiep xuc co co gop va choi than tiep ien;
Selsyn khong tiep xuc khong co cac tiep iem trt.
May ien cam ng sel syn co hai che o hoat ong chc nang:
Che o ch bao; va:
Che o bien ap.
Ve nguyen ly, cac selsyn mot pha eu co the hoat ong theo ca hai chc nang tren. He thong lien lac
ong bo vi hoat ong chc nang ch bao c s dung nhng ni ma truc nhan goc quay (selsyn thu)
co tai nho, t tao ra goc quay ma selsyn phat a at. Goc quay cua selsyn thu khi o se ch bao trang
thai goc quay tng ng cua ben phat.
He thong lien lac ong bo vi hoat ong chc nang bien ap c s dung nhng ni ma truc nhan goc
quay (selsyn thu) co moment can ln, khong t tao ra qoc quay selsyn phat at, ma nh mot ong c
chap hanh khac. Khi o, ien ap ra cua selsyn thu c a ti ieu khien ong c chap hanh co noi truc
quay vi rotor selsyn thu, cho ti khi goc quay cua selsyn thu can bang vi goc quay cua selsyn phat.
Cac che xuat selsyn cong nghiep lam viec tan so ien cong nghiep 50 [Hz] hoac tan so cao (400, 500)
[Hz]. Ve phng dien ng dung ky thuat, co the xem xet selsyn theo dang phan t cam bien toc o quay
e ch th so vong quay hay goc quay (chng 4).
P2.2.2 Selsyn mot pha.
Cau truc va nguyen ly hoat ong. Ve cau truc, selsyn ba pha giong nh ong c khong ong bo vi
rotor day quan bnh thng. Tuy nhien chung t c s dung truyen goc quay do nhng nhc iem nh
moment quay khong bang nhau khi rotor oi chieu quay thuan/nghch chieu t trng, moment can bang
ong nho, can li ien cung cap ba pha. Trong thc te pho bien hn la he ong bo truyen goc s dung
selsyn mot pha.
Selsyn mot pha co cau truc gan giong may-ien ong bo kch t. Loi thep stator va rotor ghep bang thep
tam ky thuat ien.
78
Selsyn tiep xuc. selsyn mot pha loai co tiep iem trt, cuon day kch thch (cuon s cap, mot pha)
c lap tren stator (hoac tren rotor) va cuon day ong bo hoa (cuon th cap, ba pha) lap tren rotr (hoac
stator) (hnh P2.12).
Nh vay, ve c ban selsyn tiep xuc co ba loai phan biet theo cau truc:
1). Stator cc loi, co lap cuon kch t;
2). Rotor cc loi, tren co lap cuon kch thch;
3). Cc an.
Hnh P2.12 Selsyn mot pha tiep xuc: a). S o nguyen ly (ket cau stator cc loi) ;
b). Ket cau: 1). Stator cc loi; 2). Rotor cc loi; 3). Cc an.
Ve nguyen ly th hoat ong cua selsyn khong phu thuoc v tr lap cuon day tren stator hay tren rotor. Tuy
nhien e giam so vanh trt va choi than, cuon ong bo hoa ba pha thng c at tren stator. Cuon
ong bo hoa c quan day rai, cuon kch t c quan day tap trung thanh boi day.
So cap cc cua selsyn c chon p = 1 e am bao kha nang t ong bo trong mot vong quay.
Selsyn khong tiep xuc. Loai selsyn khong co tiep iem trt khac phuc c nhc iem ve o tin cay
do tiep xuc co gop choi than cua loai selsyn tiep xuc. Hnh P2.13 gii thieu cau truc selsyn khong tiep
xuc.
Hnh P2.13 Nguyen ly cau truc selsyn khong tiep xuc.

Selsyn khong co cc tiep xuc la may ien cam ng mot pha vi cuon kch thch (mot pha) va cuon ong
bo hoa ba pha eu nam tren stator. Stator (4) cua selsyn co loi thep ghep t thep tam ky thuat ien, co
ranh lap cuon ong bo hoa ba pha (5) quan rai va au hnh sao. Tren stator con co cuon kch thch (2)
chia thanh hai na cuon at ben canh cuon ong bo hoa.
Rotor (6) co hai cc t c cach ly bi khoang khong dan t. Hai cc t cua rotor c ghep bang thep
tam ky thuat ien theo chieu doc truc va gan len truc (8) bang chat keo silumin khong t tnh (7).
T thong kch t tao bi dong xoay chieu trong cuon kch thch khep mach qua vo thep (3) stator va
vong xuyen chan cac cuon kch thch (2), qua rang va gong stator (4) ma tr ve hai au cc-t (6) cua
79
rotor, cat cuon day ong bo hoa (5) nen sinh ra trong o sc ien ong cam ng. o ln cua s. nay
phu thuoc vao v tr tng oi gia rotor va stator, vao t tr gia chung.
Do cau truc ac biet cua rotor gan hai cc t, luong t thong khong khep mach trc tiep tren truc rotor
bi khoang khong dan t (chat silumin keo dan hai cc t), ma cat cuon day th cap ong bo hoa e co
tn hieu ien ap ra. Cau truc nh vay cho phep tao t trng quay ma khong can tiep iem trt. Nh
vay, o tin cay va tnh on nh ac tuyen cua selsyn cao hn ang ke so vi loai tiep xuc.
Che o hoat ong chc nang cua selsyn.
Che o ch bao. Hnh P2.14 gii thieu s o n gian cua he thong ong bo truyen goc quay dung
selsyn lam viec che o ch bao. He thong gom hai selsyn hoan toan giong nhau (selsyn phat va selsyn
thu) va ng truyen. Nguon kch thch la li ien xoay chieu mot pha. iem cuoi cac pha tng ng
cua cuon ong bo hoa c noi vi nhau qua ng truyen. Dong ien xoay chieu cua cac cuon kch
thch tao ra t thong ap mach cat cac pha cua cuon ong bo hoa va sinh ra s. cam ng. o ln cac
s, cam ng nay phu thuoc vao v tr tng oi trong khong gian gia cac pha va cuon kch t.
Neu cac pha cuon ong bo hoa selsyn phat va selsyn thu co v tr tng oi nh nhau so vi cuon
kch t :
F = T ;
(P2.3)
th s. cam ng trong ng truyen co o ln bang nhau va ngc chieu nhau:
v
v
E ( A, B ,C ) F = E ( A, B , C )T .
(P2.4)
Khi o, khong co dong ien chay qua ng truyen:
v
I ( A, B.C ) = 0 .
(P2.5)
Moment ien-t cua selsyn bang 0 va v tr nay cua rotor selsyn la v tr can bang.
Hnh P2.14 S o nguyen ly he truyen tin ong bo bang selsyn che o ch bao.
Neu selsyn phat, rotor dch chuyen khoi goc o can bang, khi o:
F T ;
(P2.6)
va mat s can bang s. cam ng trong ng truyen:
v
v
E ( A, B , C ) F E ( A, B , C ) T .
(P2.7)
Khi o, xuat hien dong ien trong cac cuon ong bo hoa chay qua ng truyen:
v
I ( A, B.C ) 0 .
(P2.8)
Dong ien nay tng tac vi t trng kch thch ma sinh ra moment quay trong hai selsyn, bang nhau ve
o ln va ngc chieu nhau. selsyn phat, moment quay hng rotor tr lai v tr can bang cu; selsyn
thu moment quay hng ti v tr can bang mi vi ben phat. o ln moment ong bo hoa trong selsyn
thu tuy thuoc sai lech goc :
= F T .
(P2.9)
80
Sai so ch bao. o chnh xac truyen goc t selsyn phat ti selsyn thu phu thuoc vao chat lng hoat ong
cua ca hai ben. o chnh xac cua selsyn thu trong che o ch bao ac trng bi sai so goc truyen :
( ) + ( max )
;
(P2.10)
= max +
2
ay: ( max ) + , ( max ) sai lech goc ln nhat theo chieu thuan hay chieu ngc.
Tc la sai so goc truyen la so trung bnh (cong) cac tr sai lech goc quay rotor may thu khoi v tr can
bang vi selsyn phat sau mot vong quay thuan va mot vong quay ngc.
o chnh xac cua sensyn thu phu thuoc cac yeu to:
o Suat moment ong bo hoa gia tr moment ong bo hoa ng vi mot o goc sai lech phan
au ac tuyen moment M = f( ):
dM
M =
.
(P2.11)
d = 0
Suat moment ong bo hoa cang ln, ac tuyen phan au ( = 0 o ) cang doc th sai so cang nho. che
o chc nang ch bao, selsyn thu thng lam viec vi goc sai lech nho, nen e tang o chnh xac can
chon sensyn phat co cong suat ln.
o Moment can tren truc cua selsyn thu chu yeu la moment ma sat trong selsyn tiep xuc trt, co
o ln khoang (0,03 1,0) [N.cm]. o chnh xac ly thuyet xac nh he so pham chat K Q cua
selsyn:
M
;
KQ =
M ms
(P2.12)
ay: M suat moment ong bo hoa; M ms moment ma sat tren truc cua selsyn tiep xuc. Gia tr he
so pham chat K Q cang ln, o chnh xac ly thuyet cang cao.
o Tnh oi xng cua mach t va mach ien chu yeu do cong nghe che tao.
o Tnh can bang cua rotor selsyn thu ac trng bi thi gian on nh rotor trang thai dng sau
khi co goc sai lech ln nhat ( 179 o ), thng c (0,5 1,5) [s].
e giam thi gian on nh cua selsyn thu ngi ta dung bo can ien (nh cuon can trong may ien ong
bo) hay bo can c (nh lo xo, ma sat).
o o chnh xac cua selsyn phat chu yeu phu thuoc o sai lech gia v tr thc cua rotor so vi v
tr ly thuyet (co s. cam ng trong cac pha cuon ong bo hoa bang 0).
Che o bien ap cua selsyn. Hnh P2.15 gii thieu s o he ong bo truyen tn hieu goc quay dung
selsyn lam viec che o bien ap.
Hnh P2.15 S o nguyen ly he truyen tn hieu ong bo bang selsyn che o bien ap.
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He ong bo truyen tn hieu goc quay ti truc c co moment can ln (hnh P2.15) gom cac selsyn phat va
thu noi vi nhau qua ng truyen, bo khuyech ai tn hieu va mot ong c chap hanh co truc quay ghep
c vi truc selsyn thu (lien he c kh ngc).
Khac vi nguyen ly hoat ong chc nang ch bao, sensyn thu lam viec che o bien ap khi can truyen
tn hieu goc quay ti truc c co moment can ln. Khi o selsyn thu khong t tao goc quay (can nang
lng ln) ma ch tao tn hieu ien ap e ieu khien mot ong c chap hanh trung gian.
Neu bi mot tac dung ngoai lc nao o, rotor cua selsyn phat ra khoi v tr can bang, quay i mot goc:
F = ;
(P2.13)
th trong cuon ra cua selsyn thu xuat hien tn hieu ien ap ra:
U ra 0 .
(P2.14)
ien ap nay sau khi bien oi va khuyech ai c a ti cuon ieu khien cua ong c chap hanh. ong
c chap hanh quay, keo theo rotor cua selsyn thu (bi hai truc b ghep noi c vi nhau). Chuyen v quay
cua rotor selsyn thu lam thay oi s. cam ng trong cuon ong bo hoa va thay oi ca ien ap ra. Rotor
cua ong c chap hanh (va cua selsyn thu) dch chuyen cho ti khi quay c mot goc bang goc F (bieu
thc (P2.13)-). Khi o ien ap ra cua selsyn thu U ra = 0 , tc la ien ap ieu khien ong c chap hanh
cung bang 0.
Chat lng cua selsyn che o bien ap. Phu thuoc chu yeu vao cac yeu to sau:
o ien ap d ien ap ra cua selsyn v tr can bang, khong phai nh ly thuyet U ra = 0 , ma
thng co o ln c (0,1 0,3) [V]. Nguyen nhan la do cong nghe che tao mach t khong hoan
toan oi xng.
o Suat ien ap ra ien ap ra ng vi goc sai lech la mot o = 1o .
Suat ien ap ra cua selsyn thu xac nh o nhay cua toan he. Co the lam tang suat ien ap ra bang cach
tang so vong day cuon ra. Tuy nhien, ong thi cung lam tang tr khang cuon day va giam suat cong
suat cua may, buoc phai thoa hiep vi gia thanh tang o khuyech ai va kch thc may.
o Suat cong suat ra cong suat cc ai cua cuon ra cua selsyn thu ng vi goc sai lech la mot o.
o Tnh oi xng mach t va mach ien.
o Tr khang ng truyen.
P2.2.3 Selsyn vi sai.
Cau truc va nguyen ly hoat ong. Trong he thong lien lac ong bo, selsyn vi sai c s dung nh
selsyn phat chuyen tiep hay selsyn thu lam viec vi hai selsyn phat. Hnh P2.16 trnh bay s o chc
nang ch bao khi selsyn vi sai la selsyn thu cua hai selsyn phat.
Hnh P2.16 S o nguyen ly selsyn vi sai chc nang ch bao.
82
Cac cuon kch thch cua hai selsyn phat SF1 va SF2 noi vi nguon ien xoay chieu. Cuon ong bo hoa
cua SF1 noi vi cuon stator cua selsyn vi sai VS. Cuon ong bo hoa cua SF2 noi vi cuon rotor cua
selsyn vi sai VS.
Gia s he thong ang v tr can bang ban au, tc la:
(P2.15)
SF 1 = SF 2 = VS = 0 .
T thong kch t cua cac selsyn phat SF1 va SF2 tao ra trong cac cuon ong bo hoa cac s. cam ng
E ( A, B ,C ) SF 1 va E ( A, B ,C ) SF 2 . Cac s. cam ng nay sinh ra dong ien chay trong cac cuon stator va rotor cua
selsyn vi sai VS, gay ra sc-t-ong tong Fs cua cuon stator va Fr cua cuon rotor. Cac st. nay sinh ra
cac t thong tng ng s va r trung pha vi nhau (bi trong trng hp ta ang xet cac truc kch
thch trung nhau). Moment quay do cac luong t thong nay tao ra co o ln ty le vi tch vector cua
chung:
v v
(P2.16)
M ~ { s . r } .
v
v
V luc nay cac t thong s va r trung pha nhau, nen moment quay M = 0 va rotor selsyn vi sai trang
thai nam yen (hnh P2.17a).
Hnh P2.17 Bieu o vector t thong trong selsyn vi sai.

Neu rotor cua SF1 quay theo chieu kim ong ho mot goc SF 1 , con rotor cua SF2 quay ngc chieu mot
v
v
goc la SF 2 th tng ng cac luong t thong s va r cung quay i goc nh vay, theo chieu ngc
v
v
nhau (hnh P2.17b). Di tac dung cua cac t thong s va r , trong selsyn vi sai VS xuat hien moment
v
v
ong bo hoa lam rotor quay cho ti khi at goc VS = SF 1 + SF 2 . Luc nay cac luong t thong s va r
tr lai trung pha vi nhau, moment ong bo hoa triet tieu. Va nh vay selsyn vi sai a thc hien goc
quay bang tong cac goc at t cac selsyn phat.
Trng hp ca hai selsyn phat cung quay mot hng th tng t, goc quay cua rotor selsyn vi sai bang
hieu cac goc at t hai selsyn phat (hnh P2.17c).
P2.2.4 Cac dang may ien cam ng khac.
May t-ien cam ng magnesyn. Magnesyn la may ien cam ng t-ien khong tiep xuc. Hnh P2.18
gii thieu nguyen ly he lien lac ong bo s dung magnesyn lam viec che o ch th.
83
Hnh P2.18 He lien lac ong bo dung magnesyn.

Stator cua magnesyn co dang tron hnh vanh khuyen khong co rang hay ranh, ghep t thep tam ky thuat
ien hoac hp kim permaloi (hp kim sat-ken cha (36 85) [%] Ni, la vat lieu sat-t memco o t
cam cao). Rotor la mot nam cham vnh cu hai cc co dang khoi tru.
Cuon stator mot pha c quan quanh loi thep stator. Cac au ra c au nh tren hnh P2.18: hai au
cuon day (iem au va iem cuoi A) c au vao nguon ien xoay chieu mot pha; cac au ra B va C
lay ra t cac iem cach au va cuoi 120 o ien.
Hai magnesyn (phat va thu) c noi vi nhau qua ng truyen, cac au ra B va C cua may phat noi
vi cac au tng ng cua may thu.
Trong magnhesyn tng tac hai luong t thong:
T thong 1 tao bi dong ien xoay chieu trong cuon stator. Luong t thong 1 khep kn trong
loi thep vanh khuyen stator va bien thien vi tan so ien nguon f 1 ;
T thong 2 tao bi t trng nam cham vnh cu rotor. Luong t thong 2 khep kn qua rotor,
khe h khong kh va loi thep stator.
Do ac tnh t hoa (bao hoa t) cua loi thep stator, di tac dung cua bien thien t thong 1 , t tr cua
mach t trong loi thep hnh xuyen stator bien thien theo thi gian vi tan so f 2 ln gap oi f 1 .
Di tac dung cua t trng quay cua rotor (nam cham vnh cu), trong cuon day stator se cam ng mot
sc ien ong co tan so f 2 = 2 f 1 cong them vi ien ap nguon xoay chieu tan so f 1 (ien li).
Khi hai magnesyn mac vi nhau theo s o he ong bo truyen goc (hnh P2.18), cung nh selsyn phat va
thu lam viec che o ch bao, khi rotor v tr can bang, goc sai lech bang 0, khong co dong ien chay
qua ng truyen. oi vi nguon dien ap tan so ien li f 1 , th v ien the cac iem A, B, C tng ng
bang nhau, nen khong co dong ien tan so f 1 chay qua ng truyen. oi vi ien ap cam ng tan so
f 2 , th v hai rotor phat va thu v tr can bang, sai lech goc quay bang 0, nen cac pha tng ng cac
phan cuon day stator AB, BC, CA may phat va may thu bu tr nhau, cung khong co dong ien cam
ng tan so f 2 chay qua ng truyen.
Khi rotor cua magnesyn phat lech khoi v tr can bang, goc sai lech khac 0, trong ng truyen va cuon
day nagnesyn xuat hien dong ien cam ng tan so f 2 . Chung tng tac vi t trng nam cham vnh
cu rotor cua magnesyn tao ra moment ong bo hoa cung nh trng hp ong bo hoa selsyn.
Nh vay, cung nh selsyn may ien cam ng, magnesyn co kha nang t ong bo hoa. Mac dau co
moment quay nho nhng do cau truc khong tiep iem trt va trong lng kch thc nho, magnesyn
c s dung nhieu trong cac he lien lac ong bo truyen goc, nhat la khi khoang cach gia may phat va
may thu khong ln va truc cua may thu co moment khong ang ke. Sai so cua chung c (1 2,5) o
ien.
84
P2.3 PHAN T MAY IEN CAM NG BIEN AP QUAY.

P.3.1 ai cng ve may bien ap quay.
May bien ap quay la dang may ien cam ng nho hoat ong theo nguyen ly bien ap, bien oi goc quay
phan ng thanh ien ap ra vi bien o ty le, ty le tuyen tnh, hay ty le ham theo goc quay (sin , cos
hay ).
Ve cau truc, bien ap quay giong nh ong c khong ong bo hai pha rotor day quan hay la selsyn tiep
xuc co khe kh tron eu lam viec che o bien ap (hnh P2.19).
Hnh P2.19 Cau truc va loi thep may bien ap quay.

Nguyen ly c ban cua may la s thay oi ho cam gia cuon s cap va cuon th cap. Trong trng hp
nay, viec xac nh cuon day nao la cuon s cap hay th cap la tuy thuoc quan niem. Nhng do ay la
mot loai may-ien, du la may-ien ac biet, phu hp hn ca la da theo c s may-ien phan biet cuon
day stator va cuon day rotor. Thong thng cac au day ra cua cuon rotor c a ti vanh trt co
gop. Du vay, cung co nhng dang (khi rotor quay khong qua 360 o ) au ra cac cuon day c dan ti
mot vong bien ap ring-transformer bang day mem. Cau truc c kh cua may bien ap quay, ac trng bi
nhng yeu cau ky thuat cao ve tnh chat vat lieu, va cac ac tnh c. Loi thep cua stator may bien ap
quay c ghep t nhng tam thep ky thuat ien co cach ien tot va dap khuon vi o chnh xac cao.
Ranh quan day stator c dap chnh xac vi canh nghieng can xng e giam thieu sai so goc va anh
hng t tr. Trong cac ranh quan day (co o m nho, na kn) at day quan hai pha lech nhau 90 o o
ien. Hnh 8.19b ve dang thep tam ghep stator va rotor. Rotor dang hnh tru cung co ranh quan hai cuon
day lech pha vi nhau 90 o o ien. Rotor quay tren o bi lan c ep len truc.
May bien ap quay c che tao va canh chnh am bao khoang h kh gia rotor va stator tron eu. oi
vi phan t cam bien goc quay resolver ien hnh la c 50 [ m ]. e at c ieu o be mat trong cua
stator c mai tron vi o chnh xac 1 [ m ]. Rotor cung c che tao nh vay, c tien va mai e
co o tron be mat can thiet. Viec chon la vat lieu va gia cong loi thep ien-t , che tao cac cuon day
cung oi hoi nhng yeu cau cao nh the. Ch co bang cach o mi am bao o chnh xac cua cac phan
t cam bien nay.
85
Hnh P2.20 S o bo tr cuon day may bien ap quay.

Cac cuon day (s cap stator hay cuon th cap rotor) c che tao vi cac thong so nh nhau. S o bo tr
cac cuon day tren stator va rotor nh trong hnh P2.20. Cuon s cap stator ky hieu la P, cuon th cap
rotor ky hieu la S; cac au ra la ( P1 - P2 ) cuon phu; ( P3 - P4 ) cuon chnh; va ( S1 - S 2 ) cuon sine S;
( S 3 - S 4 ) cuon cosine CS.
ac iem cua may bien ap quay la ho cam gia cac cuon s cap stator va cuon th cap rotor bien oi
chat che theo quan he vi goc quay hay quan he ham cua goc quay (sin hay cos ) vi o chnh xac
cao. May bien ap quay co the thc hien cac dang ham so khac nhau, tuy theo s o noi day trong may
ma co ac tnh tn hieu ien ap ra khac nhau.
Ngi ta phan biet cac dang may bien ap quay theo ac tnh bien oi tn hieu nh sau:
May bien ap quay sine:
o
v
U ra = U m sin ;
(P2.17)
May bien ap quay sine-cosine:

o
v
U S .ra = U m sin ;
o
v
U CS .ra = U m cos ;
(P2.18)
o He
v so ty le k khong oi (k = const), khi o:
U ra = k = f ( ) - ty le goc quay;
(P2.19)
o Goc quay gi mot v tr co nh ( = 0 = const ), khi o:

v
U ra = K U .BAQ - ty so bien ap.
(P2.20)
v
May bien ap quay tuyen tnh: U ra = k , vi:
May bien ap quay c ng dung trong cac he t ong analog thc hien cac phep toan tnh hnh hoc
lng giac analog nham bien oi he toa o, phan tch va dng vector. Trong cac he o lng ieu khien,
chung c s dung vi chc nang phan t cam bien o cac sai lech chuyen v goc.
Ngay nay pho bien cac he ieu khien ky thuat so phoi hp vi cac phan t cam bien Transducers analog
au vao va cac phan t tac hoat Actuators au ra analog. Che xuat cong nghiep tren c s nguyen ly
bien ap quay dung cho cac he nay la resolver. Ve nguyen ly cau truc, resolver la may bien quay c nho,
giong nh mot may phat xoay chieu kch thc nho. Nh co thiet kien chuan xac, kch thc nho va o
chnh xac cao, resolvers ng dung rong rai trong cong nghe o lng ieu khien. San co nhieu phng
tien ky thuat so hoa tn hieu analog au ra cua resolver trong x ly d lieu, lam cho resover tr thanh
mot loai phan t may ien thong tin ong bo manh co the ghep noi vi he o lng va ieu khien so.
Chung thng c che xuat theo kch thc tnh theo ng knh. Co cac c 5 28 (ng knh tnh
bang phan mi inch). oi vi cac phan t resolver, tuy theo yeu cau chung co the thc hien chc nang
bo ieu che ien-c hay phan t cam bien, nh mot modul may tnh hay phan t chuyen v goc. Trong
a so trng hp, moi quan tam chu yeu la thuoc tnh o goc vi o chnh xac cao cua chung.
P2.3.2 May bien ap quay sine-cosine.
May bien ap quay sine. May bien ap quay sine lam viec chu yeu vi hai cuon day: cuon s cap stator
P1 ( P3 - P4 ) va cuon th cap rotor S1 ( S1 - S 2 ). Cuon stator noi vi nguon ien ap xoay chieu kch thch,
cuon rotor se cam ng ien ap ra ty le vi goc quay truc rotor. Hnh P2.21 ve s o noi day va bieu o
vector cua may ien quay sine.
Khi cung cap cho cuon s cap P1 cua may bien ap quay nguon ien xoay chieu u ~ , dong ien trong cuon
v
day s cap se tao t thong P cam ng sang cuon th cap S1 s. eS1. sin ty le vi goc quay cua rotor:
86
o
v
eS 1. sin = E S 1. max . sin ;
(P2.21)
ay: E S 1. max gia tr s. cam ng cc ai trong cuon th cap S1 khi truc cac cuon s va th cap trung
nhau.
Neu quy oi s. nay sang ben s cap P1 ta co:
o
o
o
W
E S 1. max = S . E P1 = K . E P1 ;
(P2.22)
WP
o
ay: E P1 s. cam ng bi t thong P trong cuon s cap P1; K ty so bien ap tac dung cua bien
ap quay, bang ty so vong day tac dung WP va WS gia cuon s cap P1 va cuon th cap S1:
K=
WS
.
WP
(P2.23)
Hnh P2.21 S o noi day va bieu o vector cua may ien quay sine.
Neu bo qua phan ien ap ri tren ien tr (thuan) cua cuon day va ien khang (t hoa), co the cho rang
o
s. cam ng E P bang ien ap cung cap U ~ :

o
E P1 U P .
Nh vay, s. au ra cua may bien ap quay khi khong tai ( Z S 1.tai = ) co dang:
o
v
v
e S1. sin = K . E P1 . sin u P .k ( ) ;
(P2.24)
(P2.25)
ay: k ( ) he so bien ap cua may bien ap quay ng vi goc quay , la ham cua :
W
k ( ) = K . sin = S . sin .
(8.26)
WP
T cac bieu thc (P2.25), (P2.26) ta thay rang khi nay ien ap ra cua bien ap quay ty le vi goc quay ,
noi ung hn, la ty le vi sin .
Tuy nhien, cac bieu thc tren ch ung khi au ra may bien ap quay khong tai.
o
Khi co tai ( Z S 1.tai ), xuat hien dong ien trong mach th cap I S 1 0, se sinh ra t thong S 1 hng
theo truc cuon S1 (hnh P2.20b).
ay ta xet anh hng cua t trng phan ng phan ng rotor gay ra bi dong ien trong mach th cap
o
I S 1 ti ien ap tn hieu ra cua may bien ap quay sine.

Co the phan tch t thong S 1 thanh hai thanh phan:
o T thong doc truc S .doc hng doc theo truc cuon s cap P1;
o T thong ngang truc S.ngang hng vuong goc vi truc cuon s cap P1.
87
Nh thay trong hnh P2.20b, t thong ngang truc S.ngang khong cat qua cuon s cap P1, nen khong bu tr
c vbang s tang giam dong s cap, ma sinh ra s. t cam trong chnh cuon th cap S1, xep chong len
s. E S 1. sin (bieu thc (P2.21) hay (P2.25)-), va lam cho s tong cua cuon th cap S1 bien oi khong con
ung bieu thc (P2.25) dang ham sine cua goc quay na. V vay trong thc te, may bien ap quay t
c s dung mot cach thuan tuy ch vi hai cuon day (s cap va th cap hnh P2.21).
Nguyen nhan gay ra sai so ay la thanh phan t thong ngang truc cua t trng phan ng phan ng
cua may nh neu tren. Bien phap khac phuc la lam oi xng hoa may bien ap quay (oi xng hoa s
cap hay oi xng hoa th cap). Viec nay c ap dung trong cac phng an s o bien ap quay sinecosine di ay.
May bien ap quay sine-cosine. May bien ap quay sine-cosine co bon cuon day, hai cuon s cap tren
stator (cuon P1 va P2) lech pha nhau trong khong gian 90 o o ien, co cac thong so nh nhau; hai cuon
th cap tren rotor (cuon S1 va S2) co thong so nh nhau va cung lech nhau 90 o o ien (hnh P2.22).
Co hai phng an au day cac cuon stator va rotor.
Phng an 3 cuon day (hnh P2.22a). Tren stator dung mot cuon day la cuon s cap cung cap ien ap
nguon xoay chieu (cuon th hai e h mach). Hai cuon day th cap rotor bo tr lech pha nhau 90 o o
ien se cam ng cac s. co o ln phu thuoc vao v tr cac cuon day oi vi cuon stator, tc la phu
thuoc goc quay cua rotor. Khi goc lech gia rotor va stator tang t (0 90 o ), s. cam ng trong cuon
day rotor se bien thien ti cc ai (khi truc cuon day trung vi truc cuon s cap stator) roi giam xuong
theo dang sine.
Hnh P2.22 S o au day va bieu o vector t thong trong may bien ap quay sine-cosine.
Bi v hai cuon rotor lech pha nhau goc 90 o o ien trong khong gian, nen khi s. trong cuon S1 bien
thien theo dang ham sine cua goc quay , th sd. trong cuon S2 se bien thien dang ham cos . Do o,
ng vi goc lech , tren tai hai cuon day th cap rotor se co ien ap ra:
o
o
v
v
U 1 = E S1 K . E P . sin = U P . sin ;
(P2.27)
o
o
v
v
U 2 = E S 2 K . E P . cos = U P . cos .
(P2.28)
Vi bieu thc (P2.23) cua ty so vong day tac dung th cap va s cap K va cac bieu thc (P2.27), (P2.28),
ta co he so bien ap cua may quay sine-cosine tng ng theo cac ham sine (au ra cuon S1) va ham
cosine (au ra S2) la:
W
k sin ( ) = S 1 . sin = K . sin ;
(P2.29)
WP
88
k cos ( ) =
WS 2
. cos = K . cos .
WP
(P2.30)
Bi cac cuon day rotor S1 va S2 c che tao co cac thong so giong nhau ( WS 1 = WS 2 ), nen trong cac
bieu thc (P2.29), (P2.30) ty so bien ap tac dung K la nh nhau. Tuy nhien, nh neu tren, do thanh phan
t thong ngang truc cua t trng phan ng phan ng cua may khi co dong ien tai gay ra, s trong
cuon S2 khong hoan toan bien thien theo dang ham cosine. Trong hnh P2.22c chieu cac luong t thong
v
v
ngang truc cua cac cuon rotor ( S 1.ngang va S 2.ngang ) ngc chieu nhau, nen t thong tong se bang:
v
v
v
ngang = ( S 1.ngang + S 2.ngang ) .
(P2.31)
Tc la ve gia tr (o ln) t thong tong ngang se nho hn so vi trng hp may ch dung mot cuon th
cap. Nh vay, phan nao sai so do phan ng phan ng trng hp nay se nho hn may bien ap quay
sine (hnh P2.21).
e hoan toan kh bo anh hng t trng ngang truc (P2.31) th phai co bien phap lam cho:
v
v
(P2.32)
S 1.ngang = S 2.ngang .
ieu nay co the thc hien c bang cach oi xng hoa mach t cua may ien, la chon tong tr mach
th cap rotor sao cho am bao (P2.32). Cong nghe che tao may bien ap quay am bao ieu kien
WS 1 = WS 2 , ngoai ra con phai can bang tai, chon tai Z 1 = Z 2 .
Do o, phng an au day may bien ap sine-cosine nay la phng an oi xng hoa th cap.
Phng an 4 cuon day oi xng hoa s cap: Hnh P2.22b la s o au day may bien ap sine-cosine
theo phng an oi xng hoa s cap, ch khac phng an hnh P2.22a la cuon day th hai trong phan s
cap stator c au vi mot tr khang bu Z C e kh t thong phan ng ngang truc cua rotor.
oi xng hoa s cap la la chon tong tr mach s cap e luong t thong ngang truc cua may bang 0.
ieu kien nay co the thc hien bang cach lam cho tong tr mach hai cuon day s cap bang nhau. Thong
thng ien tr day noi cuon kch thch s cap vi nguon la nho co the bo qua. Cau tao cong nghe cua
may bien ap quay cung am bao tr khang trong cua hai cuon day la nh nhau. Do o ieu kien oi
xng hoa s cap la la chon tr khang bu Z C mac vao cuon phu stator bang tr khang trong cua nguon
kch thch xoay chieu u ~ . Tren thc te, bi nguon cung cap cong suat ln thng co noi tr coi nh bang
0, khi o cuon phu tren stator thng c noi ngan mach.
P2.3.3 May bien ap quay ty le. Dang may bien ap quay tuyen tnh thong thng, nhng goc quay
c gi co nh mot v tr goc nao o = 0 , tc la gi cho he so ty le k khong oi. Hnh P2.23 la s
o au day may bien ap quay tuyen tnh vi phng an oi xng hoa s cap va th cap.
Hnh P2.23 S o au day may bien ap quay tuyen tnh

89
a). Phng an oi xng hoa s cap; b). Phng an oi xng hoa th cap.
T cacv bieu thc (P2.27) va (P2.28), ta thay ien ap ra cua cac cuon day phan ng ty le vi goc quay
rotor U ra = k = f ( ) , co he so bien ap k cua may bien ap quay tng ng cac ham sine (au ra cuon
S1) va ham cosine (au ra S2) cua goc quay rotor (bieu thc (P2.29) va (P2.30) -). Neu gi khong oi
v
he so bien ap k cua may, th ta co ien ap ra ty le vi ty so bien ap U ra = K U . BAQ .
Theo bieu thc (P2.26), khi rotor quay c gi co nh mot v tr goc nao o = 0 , th he so bien ap
k se co gia tr khong oi k = const. Nh vay, sau khi ieu chnh goc quay rotor cua may e ien ap ra
at mot gia tr ty le tng ng nao o, roi co nh lai (bang c cau co nh rieng), ta co may bien ap
quay ty le lam viec nh mot bien ap co nh thong thng, vi ty so bien ap tng ng.
Ve phng dien nao o, cung co the coi may bien ap quay (sine-cosine) lam viec che o ty le nay la
v
may bien ap quay tuyen tnh, bi ien ap ra co quan he tuyen tnh vi chnh goc quay rotor U ra = k .
P2.3.4 Cac dang may bien ap quay khac.
May ien ong bo microsyn. Hnh P2.24 gii thieu nguyen ly may ien ong bo khong tiep xuc loai
nho microsyn. Stator va rotor c ghep bang thep tam ky thuat ien hay vat lieu hp kim sat-t mem,
co hai cap cc mac cac cuon day kch thch va cuon cam ng ong bo. Rotor cc loi, khong day quan.
Cac cuon kch thch mac noi tiep, c cung cap ien ap tan so 10 [kHz], o ln vai chuc volt. Cac cuon
ong bo cung c mac noi tiep, nhng co chieu au day sao cho t thong tren cac cap cc stator va sc
ien ong cam ng trong no la xung oi so vi cuon kch thch. Khi loi sat-t rotor v tr truc oi xng
cua hai cap cc stator, t thong cua cac cap cc va sc ien ong cam ng la bang nhau nen ien ap au
ra bang 0. Khi rotor dch chuyen i mot goc, t thong va ien ap cam ng trong cuon ong bo hoa se
bien thien va ien ap au ra ty le vi dch chuyen goc .
Hnh P2.24 May o microsyn.

Nh vay, ve nguyen ly, microsyn giong nh selsyn khong tiep xuc lam viec che o bien ap, cho tn
hieu ien ap ra ty le vi goc quay dan ong. Cho nen ng dung chu yeu cua microsyn la o goc chuyen
v.
Cung co the xem xet nguyen ly hoat ong cua microsyn theo nguyen ly bien ap quay vi sai co phan ng
la loi sat-t. Cac cuon day s cap va th cap c lap tren phan tnh la stator 4 cc (xem chng 4).
May o goc tuyet oi (Resolver). Nh a neu tren, resolver la che xuat cong nghiep tren c s
nguyen ly bien ap quay. Tuy theo yeu cau ng dung, chung co the thc hien chc nang bo ieu che
ien-c hay phan t cam bien, nh mot modul may tnh hay phan t chuyen v goc. Trong chng 4 a
neu ng dung resolver lam phan t cam bien chuyen v goc va toc o quay vi o chnh xac cao. Nh co
thiet kien chuan xac, kch thc nho va o chnh xac cao, va thc te tren th trng che xuat cong
nghiep san co nhieu phng tien ky thuat so hoa tn hieu analog au ra cua resolver, lam cho chung tr
thanh mot loai phan t may ien thong tin ong bo manh e ket noi vi he o lng va ieu khien so.
Thuoc loai may ien cam ng ong bo resolver nay con co nhng dang khac nh resolver co cac cuon
90
bu phu; may chuyen phat ieu khien control transmitter, may chuyen phat ieu khien vi sai control
diffential transmitter, may bien ap quay ieu khien control transformer, va transolver.
WUX
91
MUC LUC
Dan nhap.
Bai 1. C S KY THUAT CAM BIEN O LNG.
Chng 1 KHAI NIEM CHUNG.
1.1 Khai niem he thong o lng va ieu khien.
1.2 Cac phan t chu yeu cua he thong.
Phan t cam bien Transducers.
Phan t (c cau) tac hoat chap hanh Actuators.
Phan t thong tin.
1.3 Cac ac tnh c ban cua cac phan t t ong.
Ham truyen at. o nhay.
Trang thai ben ac tnh tnh.
o tuyen tnh.
o ln tn hieu au vao.
o phan giai.
Tnh thi gian ac tnh ong.
Hien tng tre.
Dai ong hoc (hoac o rong pham vi ong hoc).
o tac ong nhanh.
o rong bang tan.
Nhieu.
o chnh xac (hay o bat nh) va sai so.
Sai so he thong.
Sai so ngau nhien.
Chuan tn hieu giao dien cua cac bo cam bien.
Cac phan t tch cc va thu ong.
Cac phan t ly tng va thc te.
1.4 C s ng dung.
1.4.1 ac tnh van hanh cua mot cam bien cu the.
Cac ac tnh cam bien.
Cac ac tnh cua he.
La chon dung cu.
Cam bien.
Cap noi.
Nguon cung cap.
Bo khuyech ai.
Thu nhan d lieu va ch th.
1.4.3 Lap at.
Cam bien sensor.
Gan ket moi lap.
ng cap.
Nguon cung cap, khuyech ai, bo phan ch th.
92
1.4.4 Ket qua va chuan hoa.

Bai 2: KY THUAT CAM BIEN ANH SANG.
Chng 2. CAM BIEN VA O CAC AI LNG ANH SANG.
2.1 Nhng khai niem c ban ve anh sang.
2.1.1 Khai niem anh sang.
Anh sang.
Pho bc xa.
2.1.2 nh ngha khai niem cac ai lng quang.
2.1.3 Nguon sang.
en si ot Lamp.
LED Light-Emitting-Diode.
LASER.
2.2 Cam bien quang.
2.2.1 Nguyen ly cam bien Phan loai.
2.2.2 Cac phan t cam quang.
Quang tr Photoresistor.
Diode quang Photodiode va te bao quang-the Photovoltaic Cell.
Transistor-quang Phototransistor.
2.2.3 Cam bien phat xa.
2.3 ng dung cac phan cam bien quang, o cac ai lng anh sang.
2.3.1 Khai quat.
2.3.2 Cac thiet b thong dung o anh sang theo phng phap trc quan.
2.3.3 Phng phap o cac ai lng quang theo ky thuat o ien.
Bai 3: KY THUAT CAM BIEN NHIET O CONG NGHIEP.
Chng 3. CAM BIEN O NHIET O. (Phan 1)
Nhiet o.
Thang nhiet o.
Phan loai cam bien nhiet.
Ky thuat ng dung.
La chon cam bien o nhiet o.
Nhng phat trien mi nhat va trien vong.
3.2 Cac phan t cam bien nhiet kim loai.
3.2.1 Phan t cam bien nhiet dan n.
Nhiet ke lng kim.
Nhiet ap ke.
3.2.2 Nhiet ien tr kim loai Thermoresistances.
Nguyen ly hoat ong.
Cam bien nhiet ien tr platin va nickel.
Cam bien nhiet ien tr sat, ong.
Ket cau cam bien.
Hieu chuan cam bien.
Mot so van e ng dung.
93
o nhiet o bang nhiet ien tr.

Chuyen mach nhiet o.
Chuyen mach nhiet o co tre.
3.2.3 Cap nhiet-ngau Thermocouple.
Nguyen ly hoat ong.
Phan loai va ac iem ng dung.
Day noi nhiet-ngau.
Thi gian ap ng.
o nhiet o bang nhiet ngau.
Nhiet o iem can bang nhiet.
Mot so sai so c ban khi o nhiet o bang cap nhiet ngau.
Khac phuc sai so do thay oi nhiet o au t do.
Khac phuc anh hng cua dao ong nhiet o moi trng ngoai.
Bai 4: KY THUAT CAM BIEN NHIET O THAP.
Chng 3. CAM BIEN O NHIET O. (Phan 2)
3.3 Phan t cam bien nhiet ban dan.
3.3.1 Nhiet ien tr ban dan Thermistor.
Thermistor NTC.
Thermistor PTC.
Ky thuat ng dung.
3.3.2 Phan t cam bien nhiet ban dan silicon.
Cam bien nhiet ban dan loat KTY10 KTY16.
3.3.3 Vi mach cam bien nhiet ban dan.
Vi mach cam bien ban dan LM35.
3.4 Cam bien bc xa.
3.4.1 Khai niem bc xa nhiet.
3.4.2 Hoa ke bc xa.
Sai so o lng trong cac cam bien bc xa.
3.4.3 Hoa ke hong ngoai IR Infrared Pyrometry.
Bai 5: KY THUAT CAM BIEN V TR VA KHOANG CACH.
Chng 4. CAM BIEN VA O CAC CHUYEN V VAT THE. (Phan 1)
4.1.1 ai cng ve chuyen v vat the.
4.1.2 Phan loai cac phan t cam bien chuyen v.
4.1.3 Phng phap xac nh kch thc hnh hoc va chuyen v.
C s phep o gia lng ky thuat so Digital Incremental Measurement Base.
4.2 Cam bien chuyen dch (thang linear-, va chuyen dch goc angular-).
4.2.2 Phan t bien tr Resistance Transducer.
Bien tr khong tiep xuc.
S o o ng dung s o mach cau.
4.2.3 Phan t bien dung Capacitance Transducers.
4.2.4 Phan t bien cam Inductance Transducers.
94
Phan t bien cam kieu phan ng ngang.

Phan t bien cam o tiep can.
Phan t bien cam vi sai.
4.2.5 Cac phan t cam bien chuyen v khac.
Phan t cam bien dch chuyen theo hieu ng Hall.
Phan t cam bien dch chuyen sieu am.
Phan t cam bien dch chuyen quang.
Phan t laser o khoang cach.
4.2.6 Cam bien chuyen dch goc angular-.
Phan t bien tr chiet ap potentiometer.
Phan t bien cam inductive- o goc quay.
Microsyn.
Phan t ch th so gia lng Incremental- o goc quay.
Bai 6: KY THUAT CAM BIEN VAN TOC VA GIA TOC.
Chng 4. CAM BIEN VA O CAC CHUYEN V VAT THE. (Phan 2)
4.3 Cam bien toc o va gia toc chuyen v.
4.3.2 Cam bien o van toc.
Phan t cam bien Incremental Encoder.
May o goc tuyet oi (Resolver).
Selsyn.
4.3.3 Cam bien o gia toc.
Gia toc ke rung.
Gia toc ke ien dung.
Gia toc ke ap ien.
Bai 7: KY THUAT CAM BIEN LC.
Chng 5. CAM BIEN O LC VA TAC DUNG LC. (Phan 1)
Khai niem chung.
ai cng ve lc va tac dung lc.
Cac phng phap o lc.
ai cng ve tac dung lc ng suat va ap suat.
o ap suat.
5.1 Cam bien o lc.
Phan loai.
5.1.1 Phan t bien dang an hoi kieu bien tr.
Nguyen ly chung.
Phan t cam bien bien dang an hoi bien tr kim loai.
Nguyen ly day o bien dang Strain Gage.
C s cong nghe che tao day o bien dang.
Cac kieu cam bien bien dang an hoi.
Cac dang ket cau cam bien c ban.
Cam bien dang thanh dam Bending Beam.
Dang cot Column.
Dang mang trt Shear-Web.
95
Ky thuat ng dung.
Dang chc nang chung.
Dang nh lng o moi Fatigue Rated.
Dang rong Hollow, dang vong em Washer, dang nut nhan Button.
Dang a thanh phan.
Dang chuyen dung Special Application.
Cac cam bien o lc thap. Phan t cam bien ien dan.
5.1.2 Phan t bien dang an hoi ban dan.
Phan t cam bien dang ban dan silicon.
Phan t cam bien ap-ien piezoelectric.
Nguyen ly cam bien dang khoi tinh the.
Cam bien lc ap-ien kieu ien tch tr khang cao Charge Mode, High-Impedance.
Cam bien lc ap-ien kieu ien ap tr khang thap Voltage Mode, Low-Impedance.
Cau truc cua cam bien lc kieu ap-ien.
La chon va ac trng cam bien lc kieu ap-ien thach anh.
Dang cam bien chc nang tong quat.
Cam bien dang xuyen thau.
Cam bien kch c thu nho.
Cam bien lc va ap.
Cam bien dang vong.
Cam bien dang vong.
Dang a thanh phan.
Phan t cam bien dang mang.
Mang ap-ien chat deo.
Dang mang polymer ban dan.
5.1.3 Cac phan t cam bien vat ly khac.
Phan t cam bien ien-cam.
Phan t cam bien ien-dung kieu mang rung.
Phan t cam bien t-giao.
Cam bien ng suat sieu am.
5.1.4 Mach cau o ng dung ien hnh va chuan hoa tn hieu.
Mach cau o ng dung.
Mach chuan hoa tn hieu cau o.
Bai 8: KY THUAT CAM BIEN AP SUAT.
Chng 5. CAM BIEN O LC VA TAC DUNG LC. (Phan 2)
5.2 Cam bien o ap suat.
Khai niem chung.
Dang ong Bourdon.
Dang ong xep Bellows.
5.2.1 Cam bien ap suat kieu ien tr ban dan silicon.
C s cong nghe che tao.
Phan loai cam bien o ap suat.
La chon va ac trng cac cam bien ap suat.
Giao dien va ky thuat ng dung cam bien ap suat.
96

5.2.2 Cac cam bien ap suat kieu ien tr ap-ien piezo-.
Cac van e cong nghe ng dung c ban.
Hieu ng ap-ien Piezoelectricity.
Mat cat doc va ngang, hieu ng the khoi.
Vat lieu ap-ien.
Cac bo phan ien t.
Bo khuyech ai ien tch.
Chuyen oi tr khang (ien ke tnh ien Electrometer).
Triet nhieu.
Ket cau cam bien va ng dung.
Thiet ke c ban.
Mau thiet ke truyen thong.
Mau thiet ke mi.
Cac cam bien ap suat cach ien oi at.
Cac cam bien o an ao (ap suat cao ballistics).
Cam bien ap suat dang hoc Cavity-.
Cac cam bien cho ong c.
Cam bien ap suat nhiet o cao.
La chon cam bien.
Ban ke d lieu ky thuat (chng ch) cam bien.
Bai 9: KY THUAT CAM BIEN LU LNG CHAT LU.
Chng 6. CAM BIEN LU LNG, MC VA O AM. (Phan 1)
Khai niem chung.
ai cng ve c lu chat va lu lng.
6.1 Cam bien o lu lng.
6.1.1 Phong vu bieu nhiet Thermal Anemometer.
6.1.2 He cam bien o ap suat vi sai.
6.1.3 Cac cam bien chay xoay Vortex-Shedding.
6.1.4 Cac cam bien lu lng kieu chuyen v tch cc Positive Displacement Flow Sensors.
Cong-t the tch.
Cong-t kh kieu quay.
Cac cam bien lu lng kieu turbine.
Cong-t toc o.
6.1.5 Cac may o lu lng the khoi Mass Flowmeters.
6.1.6 Lu lng ke t-ien.
6.1.7 Cac cam bien lu lng sieu am.
Phep o lu lng theo hieu ng laser Doppler.
6.1.8 La chon cac cam bien lu lng.
6.1.9 Lap at va bao tr sa cha.
Hieu chuan.
Sa cha bao tr.
6.1.10 Nhng tien bo ky thuat cam bien lu lng.
97
Bai 10: KY THUAT CAM BIEN MC VA O AM.

Chng 6. CAM BIEN LU LNG, MC VA O AM. (Phan 2)
6.2 Cam bien o mc.
Khai niem.
6.2.1 May o mc kieu gian oan.
6.2.2 May o mc kieu lien tuc.
Cam bien o mc kieu phao.
Cam bien thuy tnh hydrostatic.
Cam bien o mc kieu ien dung.
Cam bien o mc kieu sieu am.
Cam bien kieu ien dung cao tan RF.
Cam bien t giao.
Cam bien mc kieu radar vi song.
Cam bien kieu radar dan song GWR.
Cam bien kieu radar qua khong kh.
6.2.3 La chon cong nghe cam bien mc.
6.3 o o am.
Khai niem chung.
Phan loai am ke.
6.3.1 Cac cong nghe va kieu dang cam bien.
Am ke ien ly.
Cac cam bien ien dung o o am tng oi RH.
Cam bien ien dung kieu ien moi polymer.
Cam bien ien dung kieu ien moi oxit nhom.
Cac cam bien ien dung o RH dang polymer chu nhiet (Thermoset Polymer-Based
Capacitive).
Cac cam bien o am kieu ien tr.
Cac cam bien o am kieu nhiet dan thermal conductivity.
6.3.2 La chon va ac tnh ky thuat cua cac cam bien o am.
La chon cam bien o am.
La chon cam bien RH kieu ien dung.
La chon cam bien o am kieu ien tr.
La chon cam bien kieu nhiet dan.
6.3.3 Khai thac s dung.
Cac hieu ng o am va nhiet o.
ien ap au ra.
Ngng tu hi nc va am t.
Tch hp chuan hoa tn hieu.
Phu luc 1 C S LY THUYE`T PHAN T CAM BIEN THAM SO MACH.
P1.1 - Khai niem tham so mach: tr khang ien tr ien khang.
P1.2 S o tng ng cua cac phan t tham so mach.
P1.3 Cac phan t cam bien tham so.
Phu luc 2 PHAN T CAM BIEN MAY IEN THONG TIN.
98
P2.1 Phan t may ien phat toc Tacho-generator.

P2.1.1 ai cng ve may phat toc Tacho-generator.
P2.1.2 May phat toc xoay chieu.
P2.1.3 May phat toc mot chieu.
P2.1.4 ng dung.
P2.2 Phan t may ien cam ng selsyn.
P2.2.1 ai cng ve may ien cam ng selsyn.
P2.2.2 Selsyn mot pha.
P2.2.3 Selsyn vi sai.
P2.2.4 Cac dang may ien cam ng khac.
P2.3 Phan t may ien cam ng bien ap quay.
P2.3.1 ai cng ve may bien ap quay.
P2.3.2 May bien ap quay sine-cosine.
P2.3.3 May bien ap quay ty le.
P2.3.4 Cac dang may bien ap quay khac.
TAI LIEU THAM KHAO.
MUC LUC.
WUX
99

Bai Giang Ky Thuat Cam Bien Do Luong Va Dieu Khien

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Bai Giang Ky Thuat Cam Bien Do Luong Va Dieu Khien

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BO CONG THNG

TRNG AI HOC CONG NGHIEP TP. HO CH MINH

TAP BAI GIANG

KY THUAT CAM BIEN

TP. HO CH MINH, 2008

TAI LIEU THAM KHAO

BAI 1. C S KY THUAT CAM BIEN O LNG.

Hnh 1.7 Mo hnh mot phan t t ong c mo ta bi ham truyen at F(s).

Bang 1.2 Quan he gia ty so cong suat, ien ap theo dB.

v Heaviside 1(t): dang A la ap ng tc thi; B ap ng tre dang ham mu; C ap ng tc thi

Sai so tng oi cua cam bien:

ieu kien be mat lap rap.

Nen tiep a trong qua trnh s dung.

BAI 2: KY THUAT CAM BIEN ANH SANG.

va trong chan khong th anh sang co bc song:

Pho bc xa. Bc xa phan ra:

Neu la bc xa a pho lien tuc, th:

Hnh 2.3 Minh hoa hnh khoi mat cau.

Hnh 2.4 o nhay cua mat theo bc song anh sang.

Hnh 2.6 Quan he gia quang thong va o roi.

Hnh 2.8 Quan he pho bc xa anh sang va nhiet o.

ay: h la so lng t Planck cua bc xa.

Hnh 2.12 Hieu ng Zeeman tren vach pho neon.

lieu, hnh dang, kch thc va nhiet o cua te bao.

Hnh 2.16 Quan he ien tr te bao quang dan va o roi.

Hnh 2.17 o nhay tng oi cua photoresistor.

Hnh 2.19 Cau truc photoresistor.

Hnh 2.20 Mach phan ap ieu khien bang anh sang.

Trng hp E v = 500 [lx]:

Kiem tra lai ieu kien cong suat: oi vi photoresistor:

P( 30) = U out (30 )

P( 500) = U out (500 )

oi vi ien tr noi tiep:

P( 500) = (U s U out (500 ) )

Diode quang Photodiode va te bao quang-the Photovoltaic Cell.

Hnh 2.22 Che o quang dan cua photodiode;

Hnh 2.24 ac tuyen V-A cua photodiode.

Hnh 2.26 Phototransistor: a). S o mach;

Hnh 2.27 Phototransistor

ay: - he so khuyech ai dong che o emitter chung.

ay: I DSS - dong mang khi U GS = 0; U - ien ap chan kenh.

Hnh 2.28 Nguyen ly c ban cua te bao quang-ien.

trnh bay hnh 2.31.

TC Ish +12[%/ oK ] ng vi kieu BPY 11 va BPY 64.

4. Te bao quang ien chan khong.

BAI 3: KY THUAT CAM BIEN NHIET O CONG NGHIEP.

ien tr nhiet kim loai;

Nhiet ien tr ban dan (silicon, diode, transistor)

Loai au cam, day dan ngan.

Loai day mem xoan (keo dai 1,5 [m])

Loai co tay cam, day dan teflon dai 1,5 [m].

au cam, day nha PVC cuon (dai 4 [m]).

au o nhiet o luong kh.

t 99 Khoang thi gian ti khi ch th at 99% gia tr o.

o Phan t rao t t creeper.

Pham vi ng dung han che.

3.2.2 Nhiet ien tr kim loai Thermoresistances.

ma phai tnh theo:

con R0 th c tnh theo bieu thc (3.11):

trung bnh, trong khoang (0 100) [ o C ]:

ien tr A: 18,49 0,24 [ ]

Class B: 18,49 0,56 [ ]

Hnh 3.5 Kieu dang cac phan t nhiet-ien-tr kim loai:

Hnh 3.6 Hnh dang ket cau nhiet ke cong nghiep: