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Micro Fabricated Drug Delivery Systems From Particles To Pores
Micro Fabricated Drug Delivery Systems From Particles To Pores
Abstract
Microfabrication techniques which permit the creation of therapeutic delivery systems that possess a combination of
structural, mechanical, and perhaps electronic features may surmount challenges associated with conventional delivery of
therapy. In this review, delivery concepts are presented which capitalize on the strengths of microfabrication. Possible
applications include micromachined silicon membranes to create implantable biocapsules for the immunoisolation of
pancreatic islet cells—as a possible treatment for diabetes—and sustained release of injectable drugs needed over long time
periods. Asymmetrical, drug-loaded microfabricated particles with specific ligands linked to the surface are proposed for
improving oral bioavailability of peptide (and perhaps protein) drugs. In addition, microfabricated drug delivery systems
ranging from transdermal microneedles to implantable microchips will be discussed.
2002 Elsevier Science B.V. All rights reserved.
Contents
0169-409X / 02 / $ – see front matter 2002 Elsevier Science B.V. All rights reserved.
doi:10.1016/S0169-409X(02)00227-2
316 S.L. Tao, T. A. Desai / Advanced Drug Delivery Reviews 55 (2003) 315–328
unsolved issues that still engage the drug delivery injection is the administration of drugs across the
scientist. These include drug targeting (of peptides, skin. This approach seeks to avoid any degradation
proteins, and DNA) to improve cancer chemotherapy of the molecules in the gastrointestinal tract and
and cardiovascular treatment, improved control of first-pass effects of the liver associated with oral
the rate of release from implanted dosage forms, drug delivery as well as the pain of intravenous
pulsatile drug delivery, closed-loop systems that can injection [10–14]. It also offers the possibility to
sense a change in the bodies biochemistry leading to continuously control the delivery rate over extended
modulated rate or extent of drug delivered, and the periods of time [14]. However, conventional trans-
ability to implant xenogeneic cells in humans to dermal drug delivery is severely hindered by the
more naturally control a range of diseases, including outer 10–20 mm of skin, a barrier of dead tissue
diabetes and neurodegenerative conditions. called the stratum corneum [15]. The development of
microneedles for transdermal drug delivery came
about as an approach to enhance the poor permeabili-
ty of the skin by creating microscale conduits for
3. Microfabrication technology
transport across the stratum corneum [14]. The
development of microneedles that are long and
The use of traditional microfabrication techniques,
robust enough to penetrate this layer of skin, but
the same processing techniques used to manufacture
short enough to avoid stimulating nerves has the
microelectronic chips, is a recent and alternative
potential to make transdermal delivery of drugs more
method of creating drug delivery platforms. Micro-
effective [15].
electronic process engineering was a discipline that
developed due to the rapid growth of the integrated
4.1. Microfabrication of silicon microneedle arrays
circuit industry. Traditionally, microelectromechani-
cal systems (MEMS) research has been used to
By adapting microfabrication technology, three-
produce functional devices on the micron scale, such
dimensional arrays of sharp-tipped microneedles can
as sensors, switches, filters, and gears, from silicon,
be made for transdermal drug delivery [10,14,15]. To
the dominant material used throughout the IC indus-
fabricate microneedles, a deep reactive ion etching
try. These devices are fabricated by the repeated
process is commonly used. In this process, a
application of unit process steps such as thin-film
chromium masking material is deposited onto silicon
deposition, photolithography, and etching. Such mi-
wafers and patterned into dots that have a diameter
crofabrication techniques allow for the precise con-
approximately equal to that of the base of the desired
trol over surface microarchitecture, topography, and
needles. When placed in the reactive ion etcher, the
feature size.
wafers are exposed to carefully controlled plasma of
Although research on microfabricated devices for
fluorine and oxygen, which causes a deep vertical,
biomedical applications (BioMEMS) has rapidly
etch and slight lateral underetching. The regions on
expanded in recent years, relatively few researchers
the wafer that are protected by chromium remain and
have concentrated on therapeutic applications of
eventually form the microneedles. Etching is allowed
microfabrication technology such as drug delivery.
to proceed until the masks are undercut and fall off,
The use of microtechnology to tailor the size, shape,
leaving behind an array of silicon spikes [14]. The
reservoir number, reservoir volume, unidirectional
aspect ratio of the microneedles can be adjusted by
openings and surface characteristics of the drug
simply modifying the ratio of flow rates of SF 6 and
delivery vehicle in conjunction with appropriate
O 2 . Hollow silicon needles can also be fabricated
surface chemistry are potentially influential in the
using deep reactive ion etching in an inductively
area of controlled release.
coupled reactive ion etcher. The deep etch creates
arrays of holes through the silicon wafer (the needle
lumen) and the microneedles are formed by reactive
4. Microneedles for transdermal drug delivery ion etching around these holes [15].
Arrays of solid silicon microneedles have been
One alternative to oral delivery and intravenous fabricated with individual needles measuring 150 mm
318 S.L. Tao, T. A. Desai / Advanced Drug Delivery Reviews 55 (2003) 315–328
in length, 80 mm in diameter at the base, with a level for as long as 5 h [14]. Hollow microneedles
radius of curvature less than 1 mm [14]. Hollow were also capable of insertion into the skin without
needles have also been microfabricated with similar any extensive damage to the microneedles or skin
dimensions, but containing hollow bores anywhere [15]. In addition, the improved design of these
from 5 to 70 mm in diameter, depending on design needles increased skin permeability further still [15].
[15]. To test their durability, the solid needles were
inserted into skin with gentle pushing, an approxi-
mate force of 10 N. All but a few percent of the 4.3. Other microneedles
microneedles remained intact. Even in these few
needles, only the top 5–10 mm was damaged More recently, the original microneedle design has
[14,15]. Additionally the array of microneedles could been further refined to provide better control over
also be removed without additional damage and drug delivery. Silicon microhypodermic needles have
could also be reinserted into skin multiple times. been fabricated in combination with heat-controlled
bubble pumps [15]. Hollow metal microneedles have
been fabricated by defining molds in epoxy and
4.2. Transdermal transport studies filling them by electrodepositing metal [15]. Similar-
ly, polysilicon microneedles have been fabricated
Quantification of transdermal transport of various with reusable molds [15,16]. Polysilicon micronee-
molecules with and without inserted microneedle dles are likely to be most cost effective and have the
arrays was used to assess any increase in skin potential to produce single use disposable platforms
permeability leaving (Fig. 1). Insertion of the mi- [15]. These types of needles, combined with a
croneedles increased permeability only 1000-fold pressurized reservoir to generate a drug delivery
because the microneedles or the silicon plate may pump, have already been incorporated into a wear-
have blocked access to the microscopic holes [14]. able drug infusion system to deliver insulin [17].
When the microneedles were removed after 10 s, Furthermore, by modifying needle dimension and
permeability increased by 10 000-fold [14]. Removal design to incorporate multiple channels and ports,
after 1 h increased skin permeability by 25 000-fold optimized microhypodermic needles and micro-
[14]. Elevated permeability after microneedle inser- probes can be developed for cellular, local tissue, or
tion was found to remain at approximately the same systemic delivery [15].
Fig. 1. (A) Scanning electron micrograph of microneedles made by reactive ion etching technique. (B) Microneedle tips inserted across
epidermis. The underside of the epidermis is shown, indicating that the microneedles penetrated across the tissue and that the tips were not
damaged. Arrows indicate some of the microneedle tips. Reproduced with permission from Ref. [14].
S.L. Tao, T. A. Desai / Advanced Drug Delivery Reviews 55 (2003) 315–328 319
5. Implanted microchip for localized drug complex dissolves in the electrolyte, the membrane
delivery disappears, and the chemical is released and allowed
to diffuse form the reservoir.
Microfabrication technology has also created a The time at which release occurs from each
new class of controlled release systems for drug individual reservoir is determined by the time at
delivery based on programmable devices. These which the reservoir’s anode membrane is removed
devices are particularly intriguing due to their small [18]. Each reservoir, or a group of reservoirs, may be
size, potential for integration with microelectronics independently addressed by demultiplexing [18].
and their ability to store and release chemicals on This allows each anode to have its own conducting
demand [18]. With the recent advancements in path and electric potential can be applied to any
biosensors and micromachining, implanted respon- given combination of reservoirs at any given time
sive drug release systems are becoming more plaus- [18,19]. However, the rate of release from the
ible. reservoir is a function of the dissolution rate of the
materials in the reservoir and the diffusion rate of
5.1. Microchip design these materials out of the reservoir [18]. Therefore,
the rate of release from an individual reservoir can
The first experimental demonstration of a microch- be controlled by proper selection of the materials
ip with potential application in drug delivery was (e.g. pure drugs, or drugs with polymers) placed
described in Nature [19]. The ultimate goal was to inside the reservoir [18]. Using a material that
develop a microfabricated device devoid of moving quickly dissolves once the reservoir is opened can be
parts, but with the ability to store and release used to achieve pulsatile release whereas a material
multiple chemical substances. The device was fabri- that dissolves slowly after the reservoir is opened can
cated by the sequential processing of a silicon wafer be used to achieve sustained release (Fig. 2) [18].
using microelectronic processing techniques includ-
ing UV photolithography, chemical vapor deposition, 5.3. Reversible polymeric valves
electron beam evaporation and reactive ion etching
[19]. The experimental prototype was a 17 mm 3 17 An alternative to the use of irreversible metallic
mm 3 310 mm square silicon device containing an valves is a microchip using reversible polymeric
array of 34 square pyramidal reservoirs etched valves. The use of ‘artificial muscle’ valves in
completely through the wafer [18,19]. conjunction with silicon micromachined drug release
structures can render a microchip responsive to a
5.2. Irreversible metallic valves patient’s therapeutic requirements and deliver certain
amount of a drug in response to a biological stimulus
The 25-nl reservoirs were sealed at one end by a [20]. ‘Artificial muscle’ refers to a chemomechanical
thin membrane of gold to serve as an anode in an actuator consisting of a blend of a hydrogel and an
electrochemical reaction [18,19]. One other electrode electronically conducting redox polymer [21]. The
was placed on the device to serve as a cathode. The redox polymer is sensitive to pH, applied potential,
reservoirs were filled through the open end with the and the chemical potential of its microenvironment
chemical to be released by either microsyringe whereas the hydrogel provides a cross-linked net-
pumps or inkjet printing in conjunction with a work of hydrophilic homo / copolymers that exhibit
computer-controlled alignment apparatus [18,19]. dramatic swelling and shrinking upon changes in pH,
The open ends of the reservoirs were then covered solvent, temperature, electric field, or ambient light
with a thin adhesive plastic and sealed with water- conditions [21]. By electropolymerizing these poly-
proof epoxy [18,19]. When submerged in an elec- mers onto electrodes, reservoirs can be opened or
trolyte, ions form a soluble complex with the anode closed, and the drug compound released or retained,
material in its ionic form [18]. An applied electric via the swelling and shrinking processes of the
potential oxidizes the anode membrane, forming a polymer system in response to electrochemical actua-
soluble complex with the electrolyte ions [18]. The tion (Fig. 3) [20].
320 S.L. Tao, T. A. Desai / Advanced Drug Delivery Reviews 55 (2003) 315–328
Fig. 2. Photographs of a prototype microchip: the electrode-containing front side and the back side with openings for filling the reservoirs.
Scale bar 10 mm. Reproduced with permission from Ref. [18].
5.4. Current developments implanted for drug delivery applications need not be
removed.
Current developments on microchip systems con-
sist of integrating active components. Combining
battery clocks, reference electrodes and biosensors
with the microchip could provide a single package 6. Bioadhesive microparticles for oral drug
for implantation. Another logical extension of the delivery
controlled-release microchip would be the develop-
ment of a passive, polymer microchip that contains Oral drug delivery is one of the most preferred
no electronics, power sources, or microprocessors methods of drug administration due to its non-inva-
[18]. Each of the reservoirs would be covered by a sive nature. However, it is generally not a viable
cap of degradable material, or a nondegradable method for peptide and protein delivery. The human
material of known permeability for the drug, or left GI tract resists absorption of peptides, proteins, and
uncapped. Time and rate of release from the reser- other large molecules until they are broken down
voir would then be dictated by the degradation rate into smaller molecules. The acidic environment of
of the cap or diffusion of the drug [18]. This type of the stomach combined with an array of enzymes and
polymeric microchip device would have the addition- physical barriers in the intestines either destroy or
al advantage of being biodegradable, and once prevent absorption of nearly all macromolecules.
Fig. 3. (A) A Ag /AgCl and IrO x valve electrode in the same micromachined drug delivery cavity. Both electrodes are 30 3 30 mm. (B)
SEM micrograph of ‘artificial muscle’ grown on TEM gold grid coated with poly-HEMA in holes (38.5 mm 3 38.5 mm) of a drug reservoir.
Reproduced with permission from Ref. [20].
S.L. Tao, T. A. Desai / Advanced Drug Delivery Reviews 55 (2003) 315–328 321
This has led to the development of oral delivery sents the opportunity to create multiple reservoirs of
systems that can potentially enhance the delivery of desired size to contain not just one, but many drugs /
peptides utilizing mechanisms such as use of protec- biomolecules of interest [28].
tive coatings [22], targeted delivery [23], permeation
enhancers [24], and protease inhibitors [25]. 6.1. Silicon dioxide microparticles
Bioadhesive drug delivery systems have also
generated considerable interest due to their potential Microparticles have been successfully fabricated
for prolonging the residence time at the site of drug from silicon dioxide using microfabrication protocols
action or adsorption. Localization of the delivery [28]. These particles are then easily modified by
system at a given target site would intensify its silane chemistry to introduce to sites for the attach-
contact with the mucosal epithelial barrier, thereby ment of biological molecules.
increasing the drug concentration gradient due to
intense contact [26,27]. Rather than having an im- 6.1.1. Fabrication of microparticle body
planted controlled-release microchip for local drug To fabricate the particle body an etch stop layer
delivery, such systems could also be fabricated for was created by growing a thermal oxide under wet
specific targeting. By developing inorganic or poly- conditions. Low-pressure chemical vapor deposition
meric reservoir-containing particles on the micron was then used to deposit a sacrificial layer of poly-
scale, and grafting bioadhesive agents on their crystalline silicon atop the thermal oxide by low-
releasing side, these particles could be adapted for pressure chemical vapor deposition. Next, a layer of
use as a bioadhesive controlled release oral drug low temperature silicon dioxide (LTO) was depos-
delivery system. This type of system could improve ited to form the device layer. Negative lithography
the effectiveness of treatment by first, targeting and was carried out to mask define the particle shape. A
localizing a drug at a specific site, inhibiting dilution reactive ion etch (RIE) with SF 6 and O 2 was used to
of the drug in body fluids, thereby helping to define the actual LTO particles and any remaining
maintain the drug concentration at the optimal photoresist was then removed in negative photoresist
concentration between effective and toxic levels. remover.
Micromachined platforms, when combined with
complementary approaches, may address some of the 6.1.2. Fabrication of microparticle reservoir
shortcomings of current oral delivery systems for Positive lithography was carried out using infrared
peptides and proteins by combining several features (IR) backside alignment to define the wells. The
into a single drug delivery platform. First, one can wafers were then time-etched in buffered oxide
achieve control over the size and shape of the etchant to carve out the wells. Any remaining
delivery device. Unlike other spherical drug delivery photoresist was removed. The welled microdevices
particles, microfabricated devices may be designed were then released into solution by etching the
to be flat, thin, and disc-shaped to maximize contact sacrificial polysilicon layer with KOH. The KOH
area with the intestinal lining and minimize the side solution was diluted with deionized water and fil-
areas exposed to the constant flow of liquids through tered to isolate the micro devices. As seen in Fig.
the intestines. The size of the particles can be 4A, the particles were fabricated with well-defined
selected to be small enough to have good contact features across the entire wafer. Released microparti-
with the undulations of the intestinal wall and large cles are shown in Fig. 4B. The particles were
enough to avoid endocytosis of the entire particle. uniform and semi-transparent due to their poly-
While endocytosis of nanoparticles has been pro- crystalline nature.
posed as a method to enhance transport of large
molecules across the intestinal barrier, this process 6.1.3. Surface modification chemistry
can destroy the macromolecule. Secondly, one can Chemistries used to link biologically active mole-
selectively attach bioadhesive agents onto the device cules, such as proteins, on to the releasing side of the
surface using relatively simple surface chemical silicon dioxide microparticles have also been de-
modification strategies. Finally, micromachining pre- veloped using traditional silane chemistry and car-
322 S.L. Tao, T. A. Desai / Advanced Drug Delivery Reviews 55 (2003) 315–328
bodiimide coupling reagents. First, amine groups are modified by changing the spin rate or by spinning on
formed on the surface of unreleased microparticles additional layers of PMMA. Additionally, altering
through hydroxylation of the silicon, followed by the masked area of the wafer easily changes the
silanization in 2% v / v APTES at room temperature shape and surface area of the particles.
for at least 1.5 h. Biological molecules that contain
carboxyl groups were coupled with carbodiimide and 6.2.2. Fabrication of microparticle reservoir
N-hydroxysuccinimide to form a reactive inter- A second positive lithography was carried out to
mediate ester that is susceptible to attack by amines. expose the intended reservoir areas in the PMMA.
This reaction can be applied to self-assemble a This area was then etched 1–2 mm deep using an
monolayer of covalently coupled biological mole- oxygen plasma and any remaining photoresist was
cules to the surface of the microparticles. removed. The dimensions of the reservoir can be
altered by changing the masked area and their depth
6.2. Poly(methyl methacrylate) microparticles can be modified by changing the time and / or flow
rate of plasma in the RIE (Fig. 5). By creating
Such a system has also been developed based on smaller wells, a series of multiple wells can be
the polymer polymethylmethacrylate (PMMA). etched into the particles to create separate reservoirs
PMMA is an ideal material for such a MEMS-based for a combination of drugs or permeation enhancers.
bioadhesive system because it is biocompatible and Since the PMMA is adherent to the surface of silicon
already used in many biomedical applications, is by linkage to the native oxide layer, the wafer was
commonly used as a resist in photolithographic soaked in basic solution to break this bonding and
applications, and contains a functional methyl ester immediately release the particles.
group for potential surface modification. The current
prototype is a square particle 150 mm across and 3 6.2.3. Surface modification chemistry
mm thick containing square reservoirs 80 mm across Heterogeneous modification of PMMA with N-
and 2 mm deep. lithioethylenediamine as the aminolyzing agent leads
to amination of its ester groups [29,30]. This reaction
6.2.1. Fabrication of microparticle body layer of amine sites tethered to the PMMA backbone
To fabricate these particles, PMMA was spun on by stable amide groups. Amine groups were placed
to clean silicon wafers. Positive lithography was on the surface of the releasing side of PMMA
used to expose the area between the particles and microparticles by reacting unreleased microparticles
isolate the particle bodies. The unmasked area was with N-lithioethylenediamine for 10 min. Biological
then etched completely through in the reactive ion molecules were linked to these amine sites using the
etcher using an O 2 plasma and any remaining resist same traditional carbodiimide coupling reagents used
was removed. The thickness of the particles can be for silicon dioxide microparticles.
S.L. Tao, T. A. Desai / Advanced Drug Delivery Reviews 55 (2003) 315–328 323
Fig. 5. Arrays of 150 mm 3 150 mm PMMA particles with (A) 50 mm 3 50 mm, (B) 80 mm 3 80 mm, (C) 100 mm 3 100 mm, and (D)
multiple 28 mm 3 28 mm wells.
conducted to determine the bioadhesive properties of A potentially useful approach, which has proven
these particles in the gastrointestinal tract of rats. effective in only a handful of cases, is the allotrans-
plantation of islets or whole pancreases from a
6.5. Future developments suitable human donor into a diabetic recipient.
Researchers in Canada recently reported successful
By replacing the molecule attached to the mi- transplantation of islet cells in type 1 DM patients
croparticles, an array of cells and tissues can be [34]. Although the potential complications of im-
targeted. For example, if the lectin is substituted with munosuppressive therapy were reduced by avoiding
an antibody that selectively binds to tumor cells in the use of glucocorticoids, each transplant required
the colon, the microparticles could actively seek out two harvestings of islet cells from organ donors.
cancerous masses in the colon and deliver anticancer Moreover recipients are still required to take immune
drugs directly. This would allow the high concen- suppressing drugs for the rest of their lives. These
tration of drug to be locally delivered while keeping immunosuppressive drugs are toxic and have po-
the systemic concentration at a low level. Moreover, tential adverse side effects, including cancer. For this
microfabricated polymer particles with the same reason, an islet or pancreas allotransplant is normally
targeting abilities, but small enough for injection, carried out only in conjunction with a kidney trans-
could be developed for direct delivery into the plant, for which immunosuppression is required in
circulatory system. any case.
Because of the toxicity of immune suppressing
drugs, and the shortage of organ donors, islet and
7. Nanoporous immunoisolating biocapsules pancreas allotransplantation appears to hold limited
promise as a cure for diabetes. A method then is
Diabetes mellitus (DM) represents a serious medi- required to sequester the islets from the body’s
cal problem. In the US alone, it is the third leading immune system which is able to recognize and reject
cause of death. While the majority of patients have these xenogeneic cell grafts. For the past 20 years,
type 2 diabetes, about 10% of all patients diagnosed investigators have focused on a range of microen-
with DM are insulin-dependent (type 1). In both capsulation methods most commonly involving so-
cases, disease is caused by decreased circulating dium alginate and another polycationic substance
concentrations of insulin and decreased response of such as polylysine. These materials have been used
peripheral tissue to insulin (insulin resistance) [33]. in an attempt to create a semipermeable membrane
S.L. Tao, T. A. Desai / Advanced Drug Delivery Reviews 55 (2003) 315–328 325
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