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MEMS and Nanotech in Medical Devices

MEMS (Micro-Electro-Mechanical Systems) technology originated from Richard Feynman's 1959 presentation encouraging miniaturization and Westinghouse's 1969 "Resonant Gate FET". In the 1970s, bulk-etched silicon wafers were used for pressure sensors and Kurt Petersen published on silicon material properties. The 1980s saw early polysilicon surface micromachining experiments and increased documentation, leveraging the microelectronics industry. MEMS integrate mechanical and electronic components on a silicon chip through microfabrication, combining micro-scale mechanics and macro-scale electronics.

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53 views4 pages

MEMS and Nanotech in Medical Devices

MEMS (Micro-Electro-Mechanical Systems) technology originated from Richard Feynman's 1959 presentation encouraging miniaturization and Westinghouse's 1969 "Resonant Gate FET". In the 1970s, bulk-etched silicon wafers were used for pressure sensors and Kurt Petersen published on silicon material properties. The 1980s saw early polysilicon surface micromachining experiments and increased documentation, leveraging the microelectronics industry. MEMS integrate mechanical and electronic components on a silicon chip through microfabrication, combining micro-scale mechanics and macro-scale electronics.

Uploaded by

raviqq
Copyright
© Attribution Non-Commercial (BY-NC)
We take content rights seriously. If you suspect this is your content, claim it here.
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Download as DOC, PDF, TXT or read online on Scribd

Role of MEMS and

nanotechnology in medical
te chnologies
History of MEMS Technology

 Richard Feynman "There's Plenty of Room at the Bottom”


- Presentation given December 26,1959 at California Institute of
Technology.
- Tries to spur innovative miniature fabrication techniques for
Micromechanics.
- Fails to generate a fundamentally new fabrication technique.

 Westinghouse creates the "Resonant Gate FET" in 1969


- Mechanical curiosity based on new microelectronics fabrication
Techniques.

 Bulk-etched silicon wafers used as pressure sensors in 1970’s


Kurt Petersen published -Silicon as a Structural Material in 1982
- Reference for material properties and etching data for silicon

 Early experiments in surface-micromachined polysilicon in


1980’s
- First electrostatic comb drive actuators- micropositioning disc
drive heads

 Micromachining leverages microelectronics industry in late


1980’s
- Widespread experimentation and documentation increases
public intrest.
What are MEMS?
Micro-Electro-Mechanical Systems (MEMS) is the
integration of mechanical elements, sensors,
actuators, and electronics on a common silicon
substrate through microfabrication technology.

 Micro - Small size,


microfabricated structures
 Electro - Electrical signal
/control ( In / Out )
 Mechanical - Mechanical functionality
( In / Out )
 Systems - Structures, Devices,
Systems Controls

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