יסודות התקני מוליכים למחצה

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044127
! avi.bandel@gmail.com
21/7/2010 :

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- 21 .....................................................................................................................................................................
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27 ...................................................................................................................................................................
2 ) PN( 29 ...........................................................................................................................................................
PN 30 .........................................................................................................................................
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- 41 ..............................................................................................................................................................................
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)43 ................................................................................................................................................. (BREAKDOWN
)44 ...................................................................................................................................................... (MODELING
45 ........................................................................................................................................................................
3 47 ..................................................................................................................................................................... MOS
48 ...................................................................................................................................................................
49 .........................................................................................................................................................
54 .............................................................................................................................................................. MOS
4 57 ........................................................................................................................................................... MOS
61 ..................................................................................................................................................................
)63 ................................................................................................................................................... (BODY EFFECT
) (SCALING 63 ................................................................................................................................
67 ..............................................................................................................................................................
68 ...............................................................................................................................................................
5 69 ................................................................................................................................................
72 ..........................................................................................................................................
74 .....................................................................................................................................................
- 75 .....................................................................................................................................
- ) (EBERS-MOLL - 76 ................................................................................................................
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- 80 ............................................................................................................................................
- )82 ........................................................................................... (INTEGRATED CIRCUIT
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! 1 "
! . .
V
A

:1
, V"
V = IR
"
l
R=
A
, ] . [ cm
"" , "

J =E

1
:
.1 ] < 10 [ cm
5
.2 ] > 106 [ cm

.3 10 , .
"
, . :
.
, , 4 , C Si
. Ge .
, , :
, " " , SiO2 , .
2 , ! . , ,
, .
:2
" " .
. 4
) ,(4 +" 8 4 4
. ! " ,
.
4
) ) 273C( , ) 0 K(( , " ,
. ,
" " , . ) ,( 300 K = 27C
" , .

. ) ( ,
1
Eth = kT
2
23 J
5 eV
k = 1.38 10 K = 8.617 10 K
.
" ,
1
3
Eth = 3 kT = kT
2
2
] , [ eV ) ,( T = 300 K
kT 1.38 1023 300

=
] ~ 0.026 [ eV ] = 26m [ eV
q
1.6 1019
)(
] Eionization = 1.12 [ eV
, :
1
3
m
me vth 2 = kT vth ~ 105 sec
2
2
, , + " "
. , , .
, " .
+ . )""( , +.
+ + +
+
:3
, "
.
.
" , , .
" ,
, .
me* ~ 0.25me
""
*
mh ~ 0.5me
me .
,
) .( Generation ,"
, ) .( Thermal Generation
, ," "" )
( , ) .( Recombination ,
, ,
, .
/
// ) ( Dopants )" (,
, + ,
.
) As() P ,() B ,() Al ,(.
, .
" , , )( . .
AS
: 4
. ) ( , ,
. , ,
) ( . ,
) .( Donor
. ,
. , .
) .( Acceptor
+
B
:5
, + .
" ) :( As
q2
1 q 2 me*v 2
FE = mar
=
= r
r
4 0 r r 2
4 0 r me*v 2
, , r 12 . q
,+ " !:
h
h
h
= 2 r = e = = * v
p me v
*2 rme
34
]h = 6.636 10 [ J sec
. :
q 2 4 2 r 2 me*2
q2
=r
=
4 0 r me*v 2 4 0 r me*h 2
m
0 r h 2
= r e* a0 48a0
2
*
q me
me
=r
h 2 0
q 2 me
" .
= a0 ) ( . , 48
" , E0 :
1 me*
1 1
] E = E0 2 = 13.6 2 = 0.025 [ eV
r me
12 4
, ,
, )
( .
6
) ( Donor " ,
" ) " ""
( . " ," ,
.
:6 )( ;
)( ,
. ) " ( "
. , .
:

ND
NA
Donors ,
Acceptors ,
N D+
,
N A+
,
13
cm
"
, " , .
E = 0

E
En
E2
E1
] E0 = 13.6 [ eV
n = 1 ,
:7 ,
" , :
1
] En = 13.6 2 [ eV
n
. ,"
. , ) ( Energy Bands
, , .
"

Conduction Band
"
EC
E gap = EC EV
EV

Valance Band
:8
" .
, , .
" , : ,
.
, EC , EV
Egap EC EV
E gap , Eionization ,
) ( , .
,
, . , :
] Egap = 1.12 [ eV
. " ,
) (.
) ( +
" , " " ED
) ( . , EC"
ED ! . EC
E A .
, ) ( E A EV + . E A

E gap
EC
ED
EA
EV
:9 "
8
, ) , (
2 . . ,
, .

E
EC
EV
V+
:10 "

:

q

][Cb
Cb3
cm
1
cm3
1
cm3
ND
1
cm3

NA
1
cm3

N D+
1
cm3

N A
1
cm3

) (
) ( , "
/ "
, " / "
" ,
=0
,
. N D+ p , N A n ,
:
+
qp + qN D + ( q ) n + ( q ) N A = 0
, :
n + NA = p + ND
) ( , ) (.
pairs
, , G sec
G + .
, ,
R pairs " "
sec
," + .
R = r (T ) n p
) r (T .
n , p . T
"
2
G = R = r ( T ) n p = r ( T ) ni

2
ni (T ) n p
, , n p , :
n p = ni 2
9
. n = p = ni 1.4 1010 cm 3 ,
:
3
" . N D cm
?
:
, :
n + N A = p + ND ,
NA = 0
n = p + ND
N D . n, p :
.
2
n
) ( , , n p = ni 2 . p = i
n
:
2
n
n = i + N D n 2 N D n ni 2 = 0
n
2
ni
ND
= n
1 1+ 4
2
ND
,
2
ni
ND
1+ 1+ 4
=n
2
ND
:
, , N A
2
ni
NA
1+ 1+ 4
=p
2
NA
, ni
N D >> ni N A >> ni
,
n = N D p = N A
:
. 10 cm
:
, .
," , N D = 1016 cm 3
3
16
2
2
ni 1016
1.4 1010
ND
=n
1+ 1+ 4
=
1+ 1+ 4
N D = 1016 cm 3
16
2
2
10

N D

2
2
20
n
n
1.96 10
= p= i i
104 cm 3
16
n
ND
10
, .
10
"
, n , Negative
" , , .
, , p , Positive " ,
.
)(Compensation
" , , N A N D
,
.
N D N A > 0 , n N A N D > 0 . p
, " .

+ , " : n
log n
n ND
1
] [K
T
: 11 " n
,+ ,
.
,+ , , "
.
, , + ,
. . Freeze Out
," ,
) ni 2 (T . ni << N D . ni >> N D
log n
log1016
1
] [K
T
) ni (T
2
:12
11
"
,
.
,
, .
:13
, , + ,
"

E
:14 ,
" . ,
. " , ,
. " ,
. ,
, , .
, , .

E
+
: 15 , "
. + , ,
. , , .

x
vd
t

vd = E

cm
vd ] sec
[
cm 2
.
=
=
[ E ] cmV V sec
.

F = qE
, . ,
t . :+

I F t = qE t
+ . ,:

qE t = ( mv ) = mevd
12

qtE
vd =
me

qt
me
e
t .
n v q ":

J nvq

J e = qvd = qne E
, ,

J total = J e + J h = q ( ne + p h ) E
"

J =E

) = q ( n e + p h
,
, .
) = Lattice( : ,
, . , .
. ,
.
3
L T 2
) :(Impurities .
, , " )
, ( .
.
3
I T 2
" :
1
1
1
=
+
log

3
2
1
] [K
T

32
,

:16
13
e , h Vcmsec
2
e
h
N D , N A cm1 3
:17 ,
":

vd = E
, , vd ,sat , ,
, .
7 m
vd
vd ,sat 2 10 sec

vd = h E
vd = e E
E
:18 "
+ , " . " 2 "

. "
. 19 + n" ! , l
.
)n ( x
) n (l
) n ( l
x=0
:19
+ . x = 0 +:
1
) ) = vth ( n ( l ) n ( l
6
1
dn
dn
vth n ( 0 ) l
n ( 0) l
6
dx
dx
dn
1
vth l
3
dx
J e + :
dn
1
J e = q = q vth l
dx
3
:
1
De vth
3
14
:
dn
dx
.
J e = qDe
me e
, = vth t t
q
1
1 2
1 2 me e
De = vth = vth t = vth
3
3
3
q
:
1 * 2 3
3kT
* = me vth = kT vth 2
2
2
me
1 m 1 3kT me
= De = vth2 e
= kT e
*
3
3 me q
q
q
, , :
D kT
=
q
= t
:
dp
J h = q h pE qDh dx
, J total = J e + J h
J = q nE + qD dn
e
e
e
dx
, :
)p ( x
+J p
J p
Jn
)n ( x
+Jn
x
:20
, , " ,
, .20
:
.
.
.
.
15

" , " .
+
V
A
:21 "
! ,
. E gap , ) ( ,"
E = h
h . = c :
hc
1.24
= E = h
=
] [ eV
] [ m
1.24
" . ,
Egap
, " .
, Egap = 1.12 [ eV ] , "
, " " ,"
1.24
] = 1.107 [ m
1.12
. ]) 0.3 0.7 [ m" (,
.
.
= 0

n = n + n , p = p + p
n, p , n , p .
. n p ,
n = p , .
:
2
2
+ pn
+ np
= ni + np
+ pn
+ np
> ni
np = ( n + n )( p + p ) = np + np
, , .
:
"" " ".
+ , : n
p << p = n << n
: p
n << p = n << p
, " ,
" . , : n
. p = n ~ 1011 , n ~ 1016 , p ~ 10 4
+ " , .
, Gopt" + , Gth .
16
/ ) ) ( G R ( , : n
)( ! ! R (T ) = r ( T ) np
+ pn
+ np
)
G R = Gth r (T ) np = Gth r ( T ) ( np + np
, , . Gth r (T ) np = 0

+ pn
+ np
)
G R = r (T )( np
np
, p << p = n << n ,
. np

G R = r (T ) pn
, + , .
p
r ( T ) pn
1
h
][sec
r (T ) n
.
, ,+ + "
p
h .
," p :
n
GR=
,+ :
GR=0
, , .
, + , ,
.
"
p
GR=
t
, +
p
p
=
t
h
.22
t
p ( t ) = p 0 e
p
p 0
t
:22 ,
, + :
p
p
= G R = + Gopt
h
t
Gopt sec1cm3 ".
17
, p p = Gopt h :
t
+ Gopt h
p ( t ) = p 0 e
, .23
G
Gopt
t
:23 "
) p ( n , , .
, , p 0 = Gopt h .24
p
p 0
t
:24
""" J = E.
"" , J = ( + ) E ,
.
:
dp
= q h ( p + p ) E = ( q h p + q h p ) E ( h + h ) E
dx
J h = q h pE qDh
dn
= q e ( n + n ) E = ( q e n + q e n ) E ( e + e ) E
dx
J e = q e nE + qDe
= ( h + h ) E + ( e + e ) E = ( + ) E
+
= qh p + qe n
J total
+ . .
.
" !"" . " "
, , + , ".
, " , + ,
, . = q h p + q e n
18
" , ,25
+ +
V
A
:25"
.
) , ( , .
, ,"
" !.

.
) (:
= ] 2 ] + [2 [

" . " , .26

" , ] , x [ x, x + dx "
, . "" "" 2 "
.
, n + . p
)n ( x
) J h ( x + dx
x
)Jh ( x
x + dx
:26 "
:
J ( x, t ) J h ( x + dx, t )
p
p
dx = h
+ Gth + Gopt dx
t
q
q
h

total holes
" " natural expantion
" "immigration
in the region
dx
= Gth
p = p + p ,
) 1 J h ( x, t ) J h ( x + dx, t
1 J h
=
q
dx
q x
19
" , " ,
:
p p
1 J h ( x, t ) p
=
=
+ Gopt
t t
q
x
h
n n 1 J e ( x, t ) n
=
=
+ Gopt
h
t t q
x
! . n = p : ! , ,
. n = p
:
.1 + , : , .
.2 , , , ,
.

! ) , ( . . = 0
t
! . = 0
x
, . E = 0
. Gopt = 0
" n , ,

. photons + " , .
cm 2 sec
" " .
x
x=0
:27"

, Gopt = 0 ," .+ , . p = n << n
:
p p
1 J h ( x, t ) p
=
=
+ Gopt
t t
q
x
h
,
1 J h ( x, t ) p
0=
+ Gopt
q
x
h
, , , , x > 0
1 J h ( x, t ) p
0=
q
x
h
J h , , :
p
J h = qDh
x
20
:
1
p p
2 p p
qD
=
D
h
h
x h
x 2 h
q x
0=
, Dh
p
p
=0
2
Dh h
x
2
, Lh Dh h " " ,
2 p
p
2 =0
2
Lh
x
" ".
:
x
+ C2 e Lh
x
Lh
p ( x ) = C1e
, , x , C2 = 0
x
Lh
p ( x ) = C1e
C1 : + . .
" +" , P , h
" " , P = " "
h
. h , " +":
Lx
P p ( x ) dx = C1e dx = C1 ( Lh ) e h = C1 Lh ( 1) = C1 Lh
0
0
0
, P = h
CL
h
= = 1 h C1
h
Lh
x
Lh
) p ( x
h
Lh
x
:28 "
:
p
, J h = qDh" n = p
,
x
. J n ," .
21
!
! , . "
+
+
x
x=0
:29 " -
, n . . x = 0
" ) ) ( t ( .+
, + " " " ,
.+
, h ,
) p ( x, t
) 2 p ( x, t
p
) 1 J h ( x, t
=
= Dh
t
q
x
t
x 2
2
, . e x
) n = p ( x

) ( t
t = t2 > t1
t=0
t = t1 > 0
: 30 " ,
, , " ,
. , , , "
.
. h
t
, "
.e
) n = p ( x
t = t2 > t1
t = t1 > 0
t=0
:31 " ,
22
+ E" " ,
, vd = h E
) n = p ( x
t = t2 > t1
t=0
t = t1 > 0
:32 " ,

. ,
) ) N C ( E , ) .( NV ( E
, . N ( E ) = 0
) , f ( E " E":
dn ( E ) = N C ( E ) f ( E ) dE
"
N ( E ) f ( E ) dE
C
= ) dn ( E
EC
=n
EC
"
3
4
* 2
N C ( E ) = 3 ( 2me ) E EC
h
! :
1
= ) f FD ( E
E EF
1 + e kT
! , .
, T 0 K + , , "" .
EF . " ".
) f FD (T = 0 K
) f FD (T = 300 K
1
1
1
2
EF
EF
:33
23
34 ,
N ( E ) f ( E ) dE
C
FD
=n
EC
f FD
NC
EC
N C f FD
EF
E
:34
! , , N C f FD.
, EF ,0 .0
, . EC
, ! . EF
, EC !
E EF
kT
f MB ( E ) = e
! , EF .

3
4
N C ( E ) = 3 ( 2me ) 2 E EC
h

E EF
3
4
n = 3 ( 2me ) 2 E EC e kT dE
h
EC
, :
EC EF
kT
n = NC e
3
2
2
) 2 me kT
( 3
h
) ) ( N C ( E
= NC
, N C ~ 1019 .
:
" 0 ,1 . ,
" x , A " x . 1 A
, ,:
E EF
kT
E EF
kT
1+ e
E EF
kT
E EF
kT
1+ e
E EF
kT
1+ e
1
EF E
kT
f FDh ( E ) = 1 f FDe ( E ) = 1
1+ e
= ) f FDh ( E
1+ e
24
)
, ( . , ,
, , :
EF EV
kT
p = NV e
3
2
2
) ( 2 mhkT
h3
.
= NV
"" ) n ,( p EF ,
. n
EF , . p

E EC
NC fe
fe
EC
NC
EF
E gap
NV f h
fh
EV
NV
E EV
E EC
NC fe
fe
EC
NC
EF
E gap
NV f h
fh
EV
NV
E EV
:35 ,n . ,

E E
F V
kT
, p = NV e
E E
C F
kT
n = NC e
.
EF = EC , n = N C , EF = EV . p = NV
, np : np = ni2
E gap
= ni2
kT
np = N C NV e
25

3
2
3
2
2
*
*
2
,
2
m
kT
N
=
m
kT
( e ) V h3 ( h ) 2
h3
E gap
kT
= NC
2
i
e , n
. E gap
" " , EFi .
,
EF EV
kT
EC EF
E EV
= ln NV F
kT
kT
N
E + EV kT NV
ln
kT ln C = EC + EV 2 EF EFi = C
+
NV
2
2
NC
ln N C
NV
NC
= NV e
EC EF
kT
n = p NC e
N C EV EF + EC EF
=
NV
kT
ln
:
3
2
3
2 me kT ) 2 * 2
( N C h3
me
=
= *
3
NV
2
mh
2
) 2 mh kT
( 3
h
:
3
2
EC + EV kT NV EC + EV kT me
EC + EV 3kT mh
= EFi
+
ln
=
+
ln
+
ln
=
2
2
NC
2
2 mh
2
4
me
" 2
EC + EV
~ EFi
2
. , EF , " .
n . EF
, T 0 K , ,
ED + , EC
) ( EC , ED ,
EC .0
EC
) EF (T 0
ED
EV
:36 n
, , .
, .
EF EV
kT
, p = NV e
EC EF
kT
n = NC e
26
:
N
2 E EV EC
n
ln = ln C + F
p
NV
kT
2 EF EV EC
kT
NC
e
NV
EC EF EF EV
+
kT
kT
n NC
=
e
p NV
n NV
EV + EC kT n NV
ln
+
ln
= kT = 2 EF EV EC EF
2
2 p NC
p NC
:
EV + EC kT n NV EV + EC kT NV kT n
+
ln
+
ln
+
ln
=
2
2 p NC
2
2
NC
2
p
kT n
EF = EFi +
ln
p
2
, n , n > p EFi
= EF
n
, p , n < p
p
, ) , ( ,
n2
n = N D , np = ni 2 p = i
ND
, : n
kT n
N
EF = EFi +
ln = EFi + kT ln D
p
ni
2
, , p:
kT n
N
EF = EFi +
ln = EFi kT ln A
p
ni
2
. ln
, EF
n + N A = p + N D+

E E
F V
kT
, p = NV e
E E
C F
kT
n = NC e
,+ ) N D ( N A ) !(
," :
+
N D = N D (1 f FD ( ED ) ) ,
) N A = N A f FD ( E A
) n p (.
EF , :
EF
N D ~ 1020
EC
N D ~ 1017
N A ~ 1017
N D ~ 1015
N A ~ 1015
ED
EA
EV
N A ~ 1020
:37 ,
, "
, .
27
, ) ni = N D ( n
.:
Egap
Egap
2 kTmax
N C NV e
= = N D Tmax
N C NV
2k ln
ND
: N D = 1014 . Tmax = 550 K ~ 277C
) N D ( x" .
)ND ( x

J h diff J e diff
, J e diff + " ,
. ni 2 . ,
, . .
, :
n
J e = 0 = q e nE + qDe
x
".
," :
) D 1 n ( x
n
E= e
x
e n ( x ) x
:
) n ( x
x
kT 1
)q n ( x
0 = q e nE + qDe
En =
, :
) kT 1 p ( x
q p ( x ) x
r
, E = V:
x
) kT 2 1 n ( x
= = Edx
dx
q x1 n ( x ) x
Ep =
VBuilt in
, ) n ( x . N D
) , n ( x ) = N D ( x
) kT N D ( x2
ln
q
) N D ( x1
= dN D
1
D
x2
x1
) N D ( x
kT
= dx
N D ( x ) x
q
1
x2
x1
kT
q
= VBuilt in
28
, 10 , :
kT
= VBuilt in
] ln10 60m [V
q
: , , .10
] . VBuilt in 60m [V
N D = 1015 N D = 1016
:38 " ,
" ! , ".
29
2 ) pn(
pn " , n , n p
. p , "" " "
" " .
, , ,
, n , p ,
p . n , .
+ N
+ P
r
E
+
+ N
+
:39
, " 9" ,
. p n .
, , p
.
, . ,
, , .
:
) ( )( . 2 , .
p
r
E=0
+ Er
+
+ +
r
E=0
x
xp
xn
:40
, , .
:
x
N
xn N D+ = x p N A n = A+
xp ND
" , .
30
pn
,:
EC Ei
kT
E E
C i
kT
N C = ni e
Ei EV
kT
Ei EV
NV = ni e kT
:
EC EF
kT
EF EV
kT
EC Ei
kT
Ei EV
kT
EC EF
kT
EF EV
kT
= ni e
= ni e
ni = N C e
ni = NV e
n = NC e
p = NV e
" " ":

Ei EF
kT
p = ni e
EF Ei
kT
n = ni e
, .
" , EF ,
, ,
" .
p
VB
EC
EFN
EC
VP
VN
EF
EFi
EFi
EV
EFP
EV
:41
:
EFP
Fi
(E
1
q
= VP
EFi ,
FN
(E
1
q
= VN
:
ND
N
, EFi EFP = kT ln A
ni
ni
EFN EFi = kT ln
:
kT N D
kT N A
kT N D N A kT
N
= VN
ln
= , VP
ln
= VB = VN + VP
ln
=
ln 2 A
2
q
ni
q
ni
q
ni
q
ni / N D
, + :
34
10
] 0.69 [V
10 20
, , VB , ! ,
, .
VB 0.026 [V ] ln
. :
p
J h = 0 = qp h E qDh
x
:
D 1 p
E= h
h p x
31
:
kT 1 p
q p x
=E
r
: E = V
xp
kT 1 p
kT
kT N N
kT N
x
VB = Edx =
= dx
[ln p ]xnp = ln A 2 D = ln 2 A
q p x
q
q
ni
q ( ni / N D )
xn
, VB .
. " ,
:
qVB
ND
= e kT
2
) ( ni / N A
VB" .
.
, , :
) ( x
d 2V
dE
=
=
2
dx
dx
0 r
:
+
) ( x) = q ( p n + ND N A
:
) qV ( x
) qV ( x
n = ni e kT , p = ni e kT
. ,
" , . ," .
, , :
( x) ~ 0
n ~ N D:
kT 1 dN D
q N D dx
: ) .(Depletion Approximation ,
n = p = 0 .
, .
E=
n = ND
p = NA
p=0
n=0
x
:42
42 . pn ,
.
32
!
+
! . , n p
n . p " , xn ~ 0
, p .
+
p
n
+
+

+
E=0
E=0
E
+
x
xp
xn
:43 ,
, , .
44 . n + + ,0
) x = 0 ( ) , ( x .
) ( x
x
qN A
:44
,
Q = qN A x p
Cb
cm 2
45 . "
, :
) dE ( x
=
dx 0 r
, " ," +
: p
qN
Emax = x p A
0 r
qN A
0 r
)E ( x
~
x
:45
VB + ,
1
1
qN A 1 qN A 2
VB = x p Emax = x p x p
=
x
0 r 2 0 r p
2
2
2 : x p
2 0 rVB
qN A
= xp
33
" :
2 0 rVB
= 2 0 r qN AVB
qN A
+ ," , .46
Q = qN A
)V ( x
x
VB
:46
" , .47

EC
EF
EV
x
:47
) ( x ! , ," xn
n " . !.
p
n
+
+

+ +
E=0
E=0
E
+
+
x
xp
x=0
xn
:48
, . 49:
qN D xn = qN A x p
) ( x
qN D
qN A
x=0
:49
. n .50
)E ( x
qN
qN D
~ A
~
0 r
0 r
x=0
:50
34
:
2qVB N A N D
0 r N A + N D
= Emax
:
NA
( N A + ND ) ND
2 0 rVB
q
= xn
ND
( N A + ND ) N A
2 0 rVB
q
= xp
, :
kT N A N D
ln
q
ni 2
= VB
,
V ( x = 0) = 0
+ .51
)V ( x
VB
x=0
:51
, ! , .

, :
N ( x ) = ax
,
.
)N ( x
x
+
, .
) ( x
,
. x3
x
)E ( x
)V ( x
VB
:52
35

) pn ( .
p
VA
:53
:
VTotal = VB VA
VA ,Applied , . VB
" , , VA > 0
. VTotal
, , VA < 0
.
,
, .

, VA < 0 " ,
VTotal = VB + VA
, , + VB . VB + VA
VTotal = VB + VA
EC
EFP
VA
EFN
EV
n, p
pp
nn
pn
np
x = 0+
x = 0
:54
VA 2 , , VA < 0 .
" .
+ . ,
.
.
36

VTotal = VB VA
EFN
Va
EFP
n, p
p
pp
nn
) I e ( 0+
np
) I h ( 0
pn
x = 0+
x = 0
:55
, VA > 0 , , VB , VB VA
" .
, 2 ,
, ! .
, .,
.
, , .
, , x = 0+ , x = 0 :
) I = I e ( 0 + ) + I h ( 0
,
, , ,
.
)p ( x
, VA > 0
pn
x
x = 0
, VA < 0
:56
, n x = 0 , I h ( 0 ) , +
) ( ." , , n
, , .
! n .
, , , ,"
) , (.
,
. .
37
pn .
, n , :
p ( x = 0 ) = p 0
, :
1 dJ h ( x ) p
dp
=0=
+ Gopt
dt
q dx
h
, A " "
I h = qAJ h
qA " :
) 1 dI h ( x
p
0=
qA
q dx
h
, :
dp
dp
I h = qAJ h = qADh
= qADh
dx
dx
2
) 1 d p ( x ) p ( x
=0
q dx 2
Dh h
, : Lh 2 Dh h
x
+ c2 e Lh
x
Lh
p ( x ) = c1e
, , c1 = 0 x "
) p ( x ) = 0 .( x < 0 ,+ p ( x = 0 ) = p 0 :
x
Lh
p ( x ) = p0 e
. , ,
, , . ,
, x = 0 :
Dh
p 0
Lh
= qA
x=0
p
= qADh 0 e Lh
Lh
dp
I h ( 0 ) = qADh
dx
x=0
)p ( x
n
p 0
x
Lh
:57 n
, , x = 0 + , . Lh
! p 0 . n ,
q V
kT
)= p e
p
pn ( x = 0

qVA
kT
qV
B
kT
) q (VB VA
= ppe
kT
pn ( x = 0 ) = p p e
38

qV
B
ND
kT
=
e
) ( ni 2 / N A
ni / N A
ND
qV
B
kT
p N A
qVA
kT
= pn e
qVA
kT
qV
B
kT
= ) pn ( x = 0
N Ae
e
pn
:
p 0 = p ( 0 ) = pn ( 0 ) pn = pn e 1 = i e 1
ND
: p
qVa
kT
qVa
kT
qVa
kT
)=n e
p
np ( x = 0
qVa
n 2 qVa
n0 = n ( x = 0+ ) = n p ( 0 ) n p = n p e kT 1 = i e kT 1
NA
ni 2
, , x = 0 )( 1
ND
. ,
+
) I = I e ( 0 ) + I h ( 0
= ) , p 0 = p ( 0
, ) "( .
:
2
ni
I h ( 0 ) p 0 N D N A
=r
= = 2
ni
ND
I e ( 0+ ) n0
NA
,
, .
39
wp
wn
]I [ pA
]I [ mA
VA
VA
:58
! : pn
.1 : .
.2 :
. )
, ( ,
.
. 2 , ! ,
2 ) (.
. , .
kT N A N D
= . VB
ln
. , VTotal = VB VA :
q
ni2
.3 ! : .
, p
) 2 0 r (VB VA
qN A
: p
= xp
) . Q = qN A x p = 2 0 r qN A (VB VA
, , ,
) , Q = 2 0 r qN A (VB VA + . VA
, . Q = CV
Q
VA
C j":
2 0 r qN A
0 r qN A
dQ 1
qN A
@ Cj
=
=
= 0 r
= 0 r
) 2 (VB VA
) 2 0 r (VB VA
) dVA 2 2 0 r qN A (VB VA
xp
, , Q , ,
x p .
40
, , , ,
.
. . n + p
, . p ,
qVa
n p ( 0+ ) = n p e kT
, + , n p , VA
qVA
n ( 0+ ) = n p ( 0+ ) n p = n p e kT 1
, , wp >> Le :
x
x
Le
qVkTA

n ( x ) = n p ( 0 ) e = n p e 1 e Le
+
, , , x = 0 :
x
qV
qVkTA
1 Le
qADe kTA
n
+
I e ( 0 ) = qADe
n p e 1
= qADe n p e 1 e =
Le
x x = 0
Le
x = 0
, . wp << Le
: 2 , , x = wp , .0 ,
) ( , . :
a
qV
x
x
+
n ( x ) = n p ( 0 ) 1
= n p e kT 1 1
wp
, , , x = 0+ :
qV
a
qV
1
qADe kTa
n
+
kT
I e ( 0 ) = qADe
= qADe n p e 1
n p e 1
=
x x = 0
wp
wp
,
w x
sinh p
Le
) n ( x ) = n p ( 0 +
w
sinh p
Le
, , . ,
:
a
qAD p qV
pn
=
I h ( 0 ) = qAD p
pn e kT 1
x x = 0
Lp
" , :
Dp
qVa
qVa
D
I = I e ( 0 + ) + I h ( 0 ) = qA
pn + e n p e kT 1 I 0 e kT 1
Le
L p
41
!
I
Va
Io
I opt
:59
, ," .
Gopt sec1cm3 A cm 2 , ] wdep [ cm ,
, wdep x p xn
) I opt qAGopt ( Le + Lh + wdep
:
) 1 qAGopt ( Le + Lh + wdep
qV
a
kT
I = I0 e
! , wdep Le , Lh
, .
, p , :
n p = n p + Gopt p
" + . wdep Le Lh
, ) Gopt ( ,
, ,+
, .

+ , , .
" ," ,
qVA
A
qAni wdep qV
2 kT
2 kT
= I GR
e I GR0 e
2
log I
~ 1
,

Va
I0
Va
1
2
:60
:
qVa
nkT
IS e
qVa
2 kT
+ I GR0 e
qVa
kT
I total = I 0 e
42
1 n 2 . . n [1.2,1.5] , ,
! I GR0 . n = 1
" , I GR0 , , I 0 .
) ,( VA < 0 , !
qAwdep ni
= I GR
! I 0 + ,
2
wdep VB VA
qVa
I = I 0 e kT 1
, I 0 ni:
Egap
kT
Egap
ni2 T 3e
I 0 T 3e kT
":
1 dI 0
d
4 E
1
=
( ln I 0 ) = + gap2 15%
I 0 dT dT
T kT
K
! 15% .
,
nkT
I
I = I0 e
= 1 VA
ln
q
I0
: T
n
( 3kT + Egap ) Va
dVa nK
I nkT 1 dI 0
q
V
=
ln
=
2.4m
dT
q
I0
q I 0 dT
T
K
, .
qV
A
nkT
43
)(Breakdown
, , .
:
. ) ( Punch Through

, , ."
" ." +
.
. ) ( Avalanche
" : , 2
, ." ,
" .
: , Egap
. .(Breakdown) EB
. ) ,( Tunneling "
.
I
Va
:61
44
)(Modeling
" "

, .
.
" .
" + / ,

, .

" "

,
"

0
t
= 0 ,
t
! . "
) // ( .
, / , :
a
qV
I = I 0 e kT 1
, , .
, :+
VS = VA + IR
qVkTA
I
=
I
1
0 e
qVA
VS = VA + I 0 e kT 1 R
.
, . ," .
I
R
VS
Va
VON
:62
, .
, VA < VON , , VA > VON .
rd , VON :
VA < VON
0,
I = VA VON
,
VA > VON
r
d
rd " . ) v0 ( ,
1
, a0 , = a0 .
rd
! v0
.
45
qVA
, : I ~ I 0 e kT
qV
dI
q kTA
q
= I0
= e
I
dVa
kT
kT
:
1
kT
rd
=
dI
qI
dVA
: ] , I = 1m [ A ] rd 26 [
] , I = 100 [ A ] . rd 260 [
I
rd
I
qI
kT
VA
VON
v0
VON
:63

2 .
, p + n + n
x
qVA

p ( x ) = pn e kT 1 e Lh
+ , , Q h
Q h = q p ( x ) dx
0
VA
!
, VA , Q h
Qh
.
: Q h
x
qV
Lh qDh ni 2 qVkTA
Lh
dp qDh pn kTA
J h = qDh
=
e
1
e
=
e
e
dx
Lh
Lh N D
! , n ,
.
Q h:
qVkTA
Lh
qVkTA
Qh = q p ( x ) dx = q pn e 1 e dx = qLh pn e 1
0
0
x

2
L
Q h = J h ( 0 ) h = J h ( 0 ) h
Dh

Q = A Q h = AJ h ( 0 ) h = I h h
46
. , " , h
" ," .
" w << Lh :
qVA
x
p ( x ) = pn e kT 1 1
w
:
qVA
kT
dp qDh ni
=
e
dx
wN D
2
J h = qDh
:
w
w
) Q h = q pn e 1 = J h ( 0
2
2 Dh
) (
w2
= B
2 Dh
,:
Q = I h F
F
1
1 1 2D
1
@ + = 2h +
F B h w
h
:
dQ
q
q
qI
1
Cd
= Q
= I F
=
F = F
dVA
kT
kT kT
rd
rd , .

F = rd Cd
, i ) I ( ,
,
v
= rd
i
F " , , I . i
2

" "

rd Cd = F
kT
qI
= rd
qVA
kT
" "
,

qVA
I = I 0 e kT 1
Q = I
F
0
t
= 0 ,
t
47
! 3 MOS
, .
d
Metal
Metal
Gate
x
E
x
V
x
:64
, + ) ( ,
. , Q
Q
= . E , ,
:
0 r
, d
0 r
= . VG , ) ( :
Q
Q
=
= 0 r
Q
V
d
d
C
0 r
, ) MOS (Metal-Oxide-Semiconductor ,
) ( SiO2 .
, ," + ,
. ).(Gate
Silicon
Gate Metal Oxide
x
E
x
V
VG
x
:65 Metal/Oxide/Semiconductor MOS
48
, ) ( ,
" . , " ,"
.
,
. , " .
, ! . ! ,
! .

, Egap , .
, + .
" " , . )
( .
. . Evac
Metal
SiO2
P Type Silicon
Evac
EC
S
M
S
EC
EFM
] Egap ~ 9 [ eV
EFS
EV
EV
:66 ,
,MOS .
EC
EC
] 1.1[ eV
] ~ 9 [ eV
EFm
EF
EV
P Type Silicon
SiO2
EV
Metal
:67
,
, ) (
," , , " ] . 3.2 [ eV , ,
, ,.
, )( ,
" , .
, , MS M S , .
, , MS 0 , .
49

, VG < 0" .
.
.
Evac
EFM
EC
VG
EF
EV
P Type Si
SiO2
Metal
:68 -
.
, , .
.
).(Accumulation
, , ""
, , .
. VG > 0 ,
EC
EF
Ei
EV
EFm
P Type Si
SiO2
Metal
xd
qN A
:69 , -
, " , +
.
, .
" , ,
, , ).(Deep Depletion
50
, ! ,
. + , , "
xd . ,
. " ) ,(Inversion ,
, " , n .
, ".
Cb
Cb
, Qdep cm
2
, , , QG cm2
Cb
, Qinv cm ) " ( ,"
2
"

) QG = ( Qdep + Qinv
Qinv" , + " , "
.
MOS x" .

xd

"
qN A
"

VG
"

VOxide
S
x
:70
, VOxide . S
) . ( x
,
F2
cm
0 Oxide
d
= COxide

Q
= S + G
COxide

VG = S + VOxide
) QG = COxide (VG S
S , Qdep . , , , N A
. ,+
" , , .
51
,
qN A
dE
=
=
dx 0 r 0 r
qN A
0 r
. )( + S ,
!:
qN
2 0 r S
1
= S = xdep A xdep xdep
qN A
2
0 r
,
Qdep = qN A xdep = 2 0 r qN A S

Qinv = ( QG + Qdep ) = COxide (VG S ) + 2 0 r qN A S
S , Qinv + ".
, VG , t = 0 , t = 0+ "
)" ( , , Qinv = 0 " . S
EC
Ei
EF
EV
:71 ,
) . Qinv ( S
, Ei EF
q F Ei EF
, ) ( , :
q F
kT
EF Ei
kT
= ni e
q F
Ei EF
kT
= ni e kT
n p = ni e
p p = ni e
,
Ei EF = F S
q F
, = ni e kT
) q ( Ei EF
kT
, N A = ni e :
q
S
ni 2 kTS
e = ne kT
NA
qS
kT
= pe
q S
kT
q S
= e kT
= N Ae
q S
kT
q F
kT
) q ( F S
= ni e
q F
kT
kT
= ni e
) q ( F S
= ni e
kT
= ni e
EF Ei
kT
Ei EF
kT
nS = ni e
pS = ni e
52
: p

VG

Flat Band
+
pS > N A
,
pS = N A
VFB
ni < pS < N A
,
0 < S < F
,
pS = nS = ni
"
ni < nS < N A
+"
nS = N A
"
nS > N A
S = F
F < S < 2 F
S = 2 F
S > 2 F
Flat Band
) EF ( Gate
EC
EC
EF
) EF ( Gate
EF
EV
EV
"
EC
EC
EF
EF
) EF ( Gate
EV
EC
EF
+"
EV
"
EC
) EF ( Gate
EV
) EF ( Gate
EF
EV
) EF ( Gate
)V ( x
"
Flat Band ,
P Type Si
SiO2
Metal
53
, VG , , S
. " , , :
2
V
=
2
x
0 r
":
) = q ( p p n p ) = q ( p p p p ) ( n p n p
p p , n p ) p ,( p p p , n p
. , ) = ( x:
q
kT
n p = n p e kT ,
pp = p pe
p p n p e kT n p
q
kT
( ) = q ( p p p p ) ( n p n p ) = q p p e
q n p q
kT
= q e kT 1
e 1
pp
, :
0
Q ( S ) = 0 r E = 2 0 r ( ) d
S
, VG
tOxide
) Q ( S
0 r
= S +
) Q ( S
COxide
VG = S + VOxide = S +
VG
+"
,
nS = N A
"
VT
2 F
:72 -
tOxide , + . , q F = Ei EF
kT N A
= F
ln
q
ni
. VT + , 0 < S < 2 F ,
, . Qinv = 0
" , S 2 F , Qdep = Const S = 2 F , " ,
. Qinv = 0
54
:
Qinv = COxide (VG S ) + 2 0 r qN A S

QOxide
Qdep
, :+
0 = COxide (VT 2 F ) + 2 0 r qN A S
4 0 r qN A F
COxide
VT = 2 F +
," (Threshold) +
4 0 r qN A F
COxide
VT ,
" ," .
, ,+ , VG > VT , Qdep ,
VT 2 F +
" Qinv "
) Qinv = COxide (VG VT

.
Qinv
VG
VT
:73
,MOS VG > VT .+
MOS
+ QG . VG ,
QG
VG
VT
:74
, , , VG > VT : Qinv Qdep
, , VG < VT " . Qinv

. , :
dQ
C
dVG
55
:
1 dVG d ( S + VOxide ) d S dVOxide

1
1
=
=
=
+

+
C dQG
dQG
dQG
dQG
CS COxide
S
QG
C S = 0 r
S .
1
weff
= 0 r
S
QG
, m 1
C S = 0 r
QG
weff , , S
CS . weff
weff
:75
,Flat Band , S = 0 ) (Debye ,
kT 0 r
q2 N A
= weff = LD
, MOS
1
1
+
CMOS CS COxide
COxide : CS .
=
VG
COxide
CS
:76 MOS
56
+ MOS , VG +.
dQ
C= G
dVG
COxide
"
CFB
VG
VT
S = F =
S
F
S = 2 F
:77 MOS
CS , VT +
, VT , COxide , CS
S = 2 F .
, vg , VG
CHF + .78
CHF
CHF
COxide
P Type
COxide
N Type
Cmin
Cmin
VG
VG
:78 MOS ,
, " ,
" .
, , " ,
, .
,+
1
1
1
=
+
Cmin COxide CS

0 r
xd
= CS
) 2 0 r ( 2 F
qN A
= xd
. N A
57
! 4 MOS
+
NMOS 4 , , n + p n , p
. MOS Source Drain .
+
VDS
+
VGS
",
Drain
xj
,
Source
,
Gate
n+
n+
VBS
,
Bulk
:79 ,NMOS
, VGS , " )( , ,
Source ,Drain" .
L
n+
",
Drain
n+
,
Source
:80 ,NMOS
" ," " ,"

.
NMOS
PMOS
G
D
G
S
D
B
:81 NMOS PMOS
. ,+ , VBS = 0
! .
" ) " ( , 2 , VDS . L
. W + .IGFET Insulated Gate Field Effect Transistor
PMOS ,NMOS " PMOS . n
,Complementary MOS ,CMOS
.
VDS , ,NMOS .MOS
Qinv , " , ttransit ,
58
Qinv W L COxide (VG VT ) WL COxide (VGS VT ) WL
W
=
=
eff E = eff COxide (VGS VT ) VDS
L
ttransit
L
L
vd
eff ,
.
I DS
= I DS
VGS3
VGS2
VGS1
VDS
VGS VT
:82 VDS ,-
:
1
W
) COxide (VGS VT
L
RON

VDS = RON I DS
, RON VGS .Transfer Resistor

VDS , " , ] . VT = 0.5 [V
] VGS = 3[V
VS = 0
] VDS = 2 [V
n+
EFN EF
P
n+
S = 2 F + VDS
" ,
S = 2 F
"
EFN = EFP
:83 NMOS
, " , + .
" , , +
" . , , " " .
84 . "
. " , ," +
59
, " . ,
" , ,.
VS = 0
] VDS = 2 [V
n+
n+
p
:84 ,
.
Qinv " " ,
V + VD VD
V = S
=
2
2
,
Qinv = COxide VG D VT
2

2
L
= ttransit
eff VDS

2
Q WL
V
W
I = inv
= eff
COxide (VGS VT ) VDS DS
2
ttransit
L
I DS
VDS = VGS VT
VGS3
VGS2
VGS1
VDS
:85
VDS 2
) , VDS << (VGS VT
2
"
QinvWL
W
= eff
COxide (VGS VT ) VDS
ttransit
L
.85
:
I DS
W
= eff
COxide ( (VGS VT ) VDS ) = 0
VDS
L
VDS = VGS VT
:
2
2
VGS VT )
) VGS VT
(
(
W
W
= eff
COxide (VGS VT )(VGS VT )
COxide
= eff
L
L
2
2
=I
=VGS VT
I max = I V
DS
60
, , ,
. VDS " ,
. "
. dy MOS , dy ,86 y
n+
n+
y
y=0
y=L
:86
: Qinv "
I DS ( y ) = I DS
Qinv ( y ) = COxide (VG V ( y ) VT )

:( + )
dV
= eff WQinv ( y ) E = eff WCOxide (VG V ( y ) VT )
dy
I DS dy = eff WCOxide (VG V ( y ) VT ) dV
L
VDS
I DS dy =
eff
WCOxide (VG V VT ) dV
V
1 DS
1
I DS L = eff WCOxide (VG VT ) V V 2 = eff WCOxide (VG VT ) VDS VDS 2

2 0
2
1
W
I DS = eff
COxide (VG VT ) VDS VDS 2
2
L
. " Qinv
:
W
VDS << VGS VT

eff L COxide (VGS VT ) VDS ,
VDS 2
W
I DS = eff
COxide (VGS VT ) VDS
, VDS < VGS VT
L
2
1
W
2
COxide (VGS VT ) ,
VDS VGS VT
eff
2
L
Qdep ,max
1
VT = 2 F
+ VFB = 2 F
2 0 r QN A 2 F + VFB
COxide
COxide
F =
kT N A
ln
, COxide = 0 r
q
ni
tOxide
www.hapetek.co.il | |
61

" , .87
D
VDS
S
:87 NMOS " "
, VGS = VDS VDS < VGS VT = VDS VT

.
, VDS = VGS VT
1
W
2
I DS = eff
) COxide (VGS VT
2
L
.88 , , ) VDS(.
VDS = VGS VT
I DS
VGS1
VDS
:88
" CMOS
. , In
, , " ,NMOS" .
) ,(0 " PMOS .
In
Out
] VDD = 3[V
G
S
xj
D
p+
VSS = 0
D
n+
n well
S
+
p well
:89 CMOS
. " " , "

MOS " )
PMOS .( NMOS " , "
) " ( , ) (
) " (.
62
, ,
CMOS ) ( , ) , 1
0 , " , " ( .
" " ".
] VDD = 3[V
Out
In
VSS = 0
:90 CMOS
," " , .
) ( " )
( .
In
Out
:91
+
NMOS " ) .(87 ,
k
W
2
I D = (VGS VT ) ,
k eff
COxide
2
L

k
= ID
) (VDS VT
2
, VDS VB.
] VB = 1[V
VDS
VB = 0
VT1
ID
VT0
:92 ,
" + .
63
)(Body Effect
, NMOS ] . VB = 2 [V
] VD = 0.1[V
VS = 0
Gate
n+
n+
p
] VB = 2 [V
:93 NMOS
,
S = VBS + 2 F
,
Qdep
VT = VFB + 2 F +
COxide
1
) 2 0 Si qN A ( VBS + 2 F
COxide
= VFB + 2 F +
, VBS = 0
2 0 Si qN A 2 F
+
1
COxide
( )
VT0 = VFB + 2 F +
2 0 Si qN A VBS + 2 F 2 F VBS + 2 F 2 F
COxide
, Bulk !) 0 VBS ! ,(0
, " . ).(Body Coefficient
= VT
" VBS . PMOS +" ,

VT VT0 ) PMOS , .( NMOS ,
PMOS
NMOS
2 0 Si qN A
,
COxide
=
2 0 Si qN A
,
C
Oxide
VBS + 2 F 2 F ,
VT = VT0 +
) (Scaling
:
Qinv
Qinv Qinv
I DS
2
L
ttransit
L
vd
" , ,
.
) (Moore , L . 0.7
64
Gate
n+
n+
:94 ,NMOS /
! , d Oxide " . d Oxide

! , . , "
) ( , " .
, x j . x j " ,
,Source/Drain Extensions" .
" Leff " . L
, , .
" .
VDS , , . VT +
, , .
" ).(Short Channel Effects
"
VDS ," " . "
, " ," .
, , VDS ,"
.
I DS

,
VDS
VDS
:95
, :
1
W
2
) eff COxide (VGS VT ) (1 + VDS
2
L
.
Punch-Through
, " , ,
. :
.
.
65

VDS
L
, L = 0.5 m,
vd = eff E = eff
] VDS = 5 [V
VDS
5
V
=
= 105 cm
L
0.5
=E
vd
m
vsat ~ 2 107 sec
vd = E
E
:96
, = 500
cm
vd = 500 105 = 5 107 sec
" vsat .
, :
Qinv
= vsat COxideW VGS VDsat VT
L
ttransit
vsat
VDsat + , . VGS VT
, , ,
.
,
I DS
=
= I DS
VDS
:97 ,
, x j " ,
. VT +
+
. CL:
, VDD :" ! 3 '1' ,.
" )( , VSS :" ! 0 '0' ,.
, VGS :
66
Pull Up
, ) NMOS
. (Pull Up , "
. ,NMOS , " ,
. " " , . VGS
" ,NMOS , " . p ,
! . VDD
VDD
D
VGS
S
CL
VSS
:98 NMOS
+ , VL , CL
VL + VDS = VDD VSS = Const
" , VGS VDS
) , VGS (.
,+ VGS , , VGS = VT ,
" .
,PMOS .99
VDD
S
VGS
D
CL
VSS
:99 PMOS
, , " ,
, " . VGS
, VDS . VL ,
, VDS . VGS VT
,+ , VDD " .NMOS
+ " .PMOS
67
Pull Down
VDD
VGS
S
CL
D
VSS
:100 PMOS
.Pull Down ,
NMOS , VDD
, VSS " .
VDD
D
CL
S
VGS
VSS
:101 NMOS
,PMOS ,NMOS
, + " .CMOS
" CMOS , ) NMOS
, PMOS (.

, ,102 :

VDS 2
k
V
V
V
(
)
GS T DS
, VDS < VGS VT

2
I DS =
2
1
VDS VGS VT
2 k (VGS VT ) ,
W
k eff
COxide
L
G
S
D
B
D
I DS
VGS
S
:102 ,
, .NMOS Pull-Down
68
VDD
D
CL
G
CL
VGS
I DS
D
S
VGS
VSS
: 103 Pull Down
, ,103" .
,
1
2
) I DS = k (VGS VT
2
. , VDS = VGS VT , ,
: VDS
V 2
I DS = k (VGS VT ) VDS DS
2

G
D
ids
vgs
S
:104 ,
, , .
vgs , ids , VGS , I DS
, , :
ids = g m vgs
g m ":
) ( I DS + ids
I ds
=
) Vgs (VGS + vgs
gm
, VDS > VGS VT :

W
g m = k (VGS VT ) ,
k eff
COxide
L
69
! 5 !
! ) .Bi-Polar Junction Transistor (BJT )!(
, , . ,MOS
, " .
,MOS !
.MOS ) (Source ).(Bulk
n + Source
n + Drain
VBS
p Bulk
: 105 MOS
! .
, . ,MOS "!
, " " .
" " , Le = De e
" .
, ! . ,
npn . pnp .
, Emitter Base ,"
) pnp , ( . Collector Base
, + .
n
Collector
p
Base
n
Emitter
p
Collector
n
Base
p
Emitter
:106
, " . x "
" , ! .
70
:
] 0.6 [V ! n + p
] 10 [V !" pn
" " "
] 10 [V
n
Collector
] 0.6 [V
n+
Emitter
p
Base
] 0.6 [V
EC
] 10 [V
EV
:107 pnp " "
) ( "
, Emitter , , . ,+
, ] , 0.6 [V
Collector ! ] 10 [V .
! , n + pn 2 ,
.

nn
) n p ( 0
np
n
+
WB
) p n ( 0
n+
WE
:108 npn
) n + ( Emitter ) p( . Collector
" , WB ) (
,
, Collector" I E Emitter I C . Collector ,
.
71
: , Emitter
Collector . Emitter ,
! Emitter .
, .
, , I E Emitter
. : I E ,
I E = IC = J e A
,
qVBE
2
ni kT
1
e
qVBE
qVBE
2
NA
) n p ( 0
n
= qAD ni e kT 1 @I e kT 1
I E = J e A = qADe
= qADe
= qADe
E0
e
WB
WB
N AWB
x
, . VBE
, .
VCC
RL
vl
iC
kT
qI E
= re
VCC
VCC
RL
VL
IC
RL
VL
RL
VL
vbe
VBE
IE
VCC
B
E
VBE
C N
P
E N+
VBE
:109 npn
" , , I B = 0 , ,+
Emitter Collector ,
IC = I E
VBE , vbe Emitter Base"
. , ,
kT
= re
qI E
, RL VL ) .( VL = RL I
:
v2 iC RL
R
=
= L
v1
iE re
re
72

.
p
n
+

I B 0
:110
, !.
) I e ( 0+
) I h ( 0
n
+
n+
WB
WE
:111

: Emitter Base
1
Ih (0
)
) (0
Ih (0
)
) (0
) I e ( 0+
) I e ( 0+
@
=
=
ITotal
) I e ( 0 + ) + I h ( 0
p
1+
1+
x
1+
Ie +
Ie +
n
qADe
x
,
1
1
1
1
=
=
=
=
qV
DhWB N A, B
) p ( 0
) D W p ( 0
n 2 BE
Dh n
1+ h B n
DhWB i e kT 1 1 +
DeWE N D , E
WE
) DeWE n p ( 0
N D,E
1+
1
+
qV
) n ( 0
ni 2 kTBE
De p
D
W
1
e
e E
WB
N A, B
qADh
N A, B N D , E . Emitter
, , "
Emitter ," " n + p .1
+ n +
, Emitter Collector . n
73
, n + . ,
WE , ) " ,
+ ( "
.

, b ) ( npn
Collector : Emitter
I I
I
b E R,B = 1 R ,B
IE
IE
I R , B :
WB
qAn ( x ) dx
Q B
I R,B
) n p ( 0
n+
WB
WE
:112 npn
Q B " , .+ " , "

, .
qV
ni 2 kTBE
1
qAW
e
1
B
2
1
) qA ( 2 n p ( 0 ) WB
NA
~ I R,B
=
,
ni
1
1
e
2 qAWB
NA
=
qVBE
kT
qV
ni 2 kTBE
I E = qADe
1 ,
e
N AWB
I R,B
,
WB
1
2
qVBE
kT
ni
e
NA
2
qAWB
1
2
WB 2
1 W
b = 1
= 1
= 1
= 1 B
qVBE
2
1
2 De e
2 Le
n
De
qADe i e kT 1
WB
N AWB
" , Le
Collector . b = 1
.+ , B
":
1
) qWB n ( 0
Q
IE = B = 2
74

) n ( 0
I E = qDe
WB
" :
1
) n ( 0
W2
) 2 qWB n ( 0
= qDe
B = B
WB
2 De
B
:
2
W
b = 1 B = 1 B
2 De e
e
+ 1
.
, . 2
, . b

:

IC = I E

Collector :
I
C
IB

IC
IE
= =
=
I B (1 ) I E 1
. ,
:
IC = I E
IE
E
C
(1 ) I E
VBE
VBC
B
:113
" I B = (1 ) I E
b 1 . 1
, :
.1 , 1 / .
.2 Collector ,
," , " ! .
Collector , M + .
.3 , , = b M"
. b .
75
, :
IC = I B
E
C
IB
B
:114
" .
, = 0.99 . = 100"
, . , , 1!2
, ".
!
. , )
( , " .
:
.1 ) :( Forward , Emitter Base
! Base Collector , .
, F . F
.2 ) : ( Cut off ,
. .
.3 ) :( Saturation " , ,
. , ,
) , I C = F I B .( I C < F I B
.4 ) :( Reverse " , " .
Base Collector , , Emitter Base
, . , R
. R
VBC
VBE
C
WB
WB
WB
WB
:115 npn
76
! ) (Ebers-Moll !
, ) (.
F IF
C
IC
R IR
IF
IR
VBC
IE
VBE
IB
B
:116
:
qVBC
I F = I ES e
1 , I R = I CS e kT 1
I ES . I CS
qVBE
kT
, VBC < 0 , VBE > 0 I R I CS , ,

, Collector " , I R"
.
+ ,
qVBC
qVBE
I E = I F + R I R = I ES e kT 1 + R I CS e kT 1
qVBE
qVBC
I C = F I F I R = F I ES e kT 1 I CS e kT 1
!.
77

! , )!(
, VCB" ! .( Common Base ) +
. Collector Collector , VCB I E.
A
IE
VCB
:117 ,
, I E = 0 ) ,( Collector Base
VCB . , I E , I C !.
.118
IC
I E3
IE
I E2
I E1
IE = 0
,
CB

IE
IE
VCB
I C = I CB0
:118 Common-Base
: Common Emitter
A
VCE
IB
:119 Common-Emitter

IC
IB
I B4
I B3
,
CB

I B2
I B1
VCE
VCE , sat
:120 Common-Emitter
78
I C , VCB , I E .
)!( , VCB > 0 " ," " . I E
IC
IE
IE
IE
IE
I E4
I E3
I E2
I E1
VCB
VCB , sat
:121 VCB
, Collector ,
, Collector :
I E4
I C
I E3
I E2
I E1
VCB
VCB , sat
VA
:122 VCB
)( " ) .( Early Effect" , VA
V
I C = I C 1 + CB
VA
79

! .
VDD
RL
VL
IC
VCE
:123
+ ,
VDD = VL + VCE = I C RL + VCE
:
1
V
VCE + DD
RL
RL
IC =

IC
VDD
RL
VCE
VDD
:124
) " "( ! I C VCE

, , , .
IC
I B4
I B3
I B2
I B1
VCE
:125 "
80
!
, + !:
IE = IF + R IR
IC = F I F I R
) ,( Forward I R
IE = IF
IC = F I F
) ,( Reverse I F
IE = R IR
IC = I R
.
! ,
R < F
) ( ,
, , Collector +"
Emitter . ,+ , ,
R.
, ,
!
R IR
F IF
C
IC
IF
IR
C J ,C
C D ,C
IB
B
IE
CJ , E
CD , E
: 126
, :
QJ ~ k VA Vbi
,+ " " . Qeff = I eff eff
Emitter , CD , E
QF = I F F
Collector , CD ,C
QR = I R R
. QR = 0 , , , ,
.
81
," .
, , .
,
! )!( )(.
F IF
IF
E
C
IE
IC
IB
B
:127
) ,T ( Common Base
ie = ib
C
vbe
ie
ic
ib
B
kT
= re
q IE
:128
Collector vbe :
v
qI
qI
ic = ie = be = E vbe = C vbe
re
kT
kT
" "
qI
gm C
kT
"
ic = g m vbe
g m , ,
, , " , I C . Collector
, , Common Emitter" :
v
g m vbe
ib be
B
C
ic
ie
E
r = ( + 1) re
:129 , , Common Emitter

vbe = ie re = ( ic + ib ) re = ( ib + ib ) re = ( + 1) ib re
, Common Emitter ,
vbe = ib r = ( + 1) ib re r = ( + 1) re
82
! )(Integrated Circuit
,
. , .
! , ,
.
NMOS .
Gate
Drain
Source
Oxide
n+
n+
p
Body
:130 nmos
, ,131 ! ) (.
. ,
Emitter , Base .
,+ " " Emitter Base ,
. , n +
.
Collector
Emitter
Base
Oxide
n
p
n+
p
:131 npn

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.2 ] > 106 [ cm

kT 1.38 1023 300

+ ,  " . " 2  "

, " "  ,"

 " .  " , .26

" " ":

Gate Metal Oxide

Qinv = COxide (VG S ) + 2 0 r qN A S

  " Qinv "

) Qinv = COxide (VG VT

,  ,  , VG > VT :  Qinv Qdep

, , VG < VT   " . Qinv

1 dVG d ( S + VOxide ) d S dVOxide

,Flat Band , S = 0 ) (Debye ,

  " ,"  " ," 

:81 NMOS  PMOS

, RON VGS  .Transfer Resistor

Qinv ( y ) = COxide (VG V ( y ) VT )

I DS L = eff WCOxide (VG VT ) V V 2 = eff WCOxide (VG VT ) VDS VDS 2

VDS << VGS VT

 , VGS = VDS VDS < VGS VT = VDS VT

  . " "  , "  

" VBS   . PMOS +" ,

! , d Oxide " . d Oxide

, VDD :" ! 3 '1' ,.

" )( , VSS :" ! 0 '0' ,.

 , VDS > VGS VT :

" " "

:107 pnp " "

Q B "  , .+ " ,  "

, VBC < 0 , VBE > 0 I R  I CS ,  ,

)( " ) .( Early Effect"    , VA

  )  " "( !  I C VCE

:129 ,  , Common Emitter

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.2 ] > 106 [ cm

+ , " . " 2 "

, " " ,"

" . " , .26

" " ":

" Qinv "

, , , VG > VT : Qinv Qdep

, , VG < VT " . Qinv

" ," " ,"

:81 NMOS PMOS

, RON VGS .Transfer Resistor

, VGS = VDS VDS < VGS VT = VDS VT

. " " , "

" VBS . PMOS +" ,

! , d Oxide " . d Oxide

, VDS > VGS VT :

Q B " , .+ " , "

, VBC < 0 , VBE > 0 I R I CS , ,

)( " ) .( Early Effect" , VA

) " "( ! I C VCE

:129 , , Common Emitter