'USO06916S84152 c2) United States Patent (0) Patent No.; US 6,916,584 B2 Sreenivasan et al. (45) Date of Patent: Jul. 12, 2005, (5, ALIGNMENT METHODS FOR IMPRINT wo wooIme2 10201 TrmocRAPHy Wo | Woowmens toa Wo Woormmie tam (75) Inventors: Sidigata V Sreenivasan, Austin, TX wo Wo 02722916 ‘202 (US); Michael P. C. Watts, Austin, TX. wo wo 0224977 aed {US}, Byung J. Cho, Round Rock, TX OTHER PUBLICATIONS (US) Ronald D. Voisin, Fremont, CA sieyar “A Pato with Six Degtes of Freedom,” Pro (us) fla. Mech. Eng 1965p. 371-878, ol 180 1 No (79) Assignee: Moeelar Imprint Ines Austin, TX Poy et a, tlw to Design Fleaue Hinges” Machine « Design, Nov. 25, 1965, pp. 151-156. ee ee ty Math lah igied Pecillo Maga (9) Novice: Subjecto any asim tem ofthis TS Tranaeton of te ASME. Dural of Dyic Systm, Measurement and Consol, Tune 1981, pp. sib) by 14 days USE. 15D) by 4d Systems, ‘Menus > « Gotan e al, “Dry Etch Resistance of Organic Materials" (21) Appl. No. 10,210,780 Electrochem. 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Kiveratcally eee Redundant Manipulators” IEEE Transactions on Rabotics Eek tie dil Automation, Dee. 1993, pp. 831-837, vl. 9, No.6. ‘ison ‘ato (Coatnved) toa Tom Peete aioe Primary Exoninr—Cisopher G. You ee Tio (9) Attorney, Agent, oF Frm Kenneth Brooks wosteans Sie? o nance wo woszias ston Wo woswroiat "1998 Described ate meth for patrning «substrate by imprint Wo WO99145753_Bj1999 Tithography. Imprint lithography is 4 process in which a eo wos one liquid is dispensed onto a substrate. A template is brought wo woataue = 4K int contact withthe lid and the guid is eued. 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A 5218193 A 5234103 5340550 S278 A S2a2711 A S2MBI8 A a1978. ais ‘1079 S180 5/1980 5/1981 i982 Sve raivs2 19K i988 A988 Sis S195 ass iss Hiss 71986, i988 1087 Sas? 911987 11987 21988 yes “8s 1988 i988 2989 i198 71989) 71999, 1089 ss 11950 31990 “y1090 ‘41090 sim 5/1990 e190 i190 1aiv90 21990 12190 “s1091 raiv91 12991 121991 raivor rivet vi Si1v92 i002 Sve Si si rio yoo iss y1093 is S93 sis e193 S193 003 093 911993 11093 Watson irks Drake tal ‘Alcorn ea Watson Sakawaki Feldman ot al De Fuzio Nevins eta De Faro Tamamara ct a Milgram ale etal Hiro Sandvig et al Blume ea a Fay Ok to. 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Hartman etal Acai et Otbors eta Harts et Novembre ickford et loca Ryo et a. Marcus ota Smith oa. Onene Leader otal Ghote at Feldmaa nism ta Souths a ‘sine Day eta Proper ea. Jeng DeMercuro ota Crouch Tanigava ea Peckels mare edger eta iashimoto tal Ue eta Emery tl aig Ching ea Gronin el Maracas Rust Tee et Keswonth eta Kondo et Maraces ea Simard Prsbsa et Park Sith ta Van Bia Kondo et Chow Singh et. Davis Faster tal Skat Everett Rast Kaw Aveschnit ta Ise ta. thou et Caer eta Whitesides ta. Shite Toprae eal Lee Rohner Harrison ota owlUS 6,916,584 B2 6,038,280 A. 3/2000. Rossiger et al. 32 9/2002 eo. ee ee eae lee ie ms 2OSOLL3HSE AL @/203 Mancini ta M2? 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