Pressure Measurement

Item Page

Introduction to Pressure Measurement .................................... 398 Pirani Gauge Range......................................................................... 399 Pirani Principles of Operation ..................................................... 399 Pirani Gauge Heads ........................................................................ 400 Ion Gauges ........................................................................................ 402 Ion Gauge Principles of Operation ............................................. 402 Ion Gauge Heads............................................................................. 403 Ion Gauge Heads - Spares and Accessories ............................. 404 Ion Gauge Connection Leads ...................................................... 405 IGC3 Ion Gauge and Process Vacuum Controller ................. 406 Wide Range Pressure Measurement.......................................... 410

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Pressure Measurement
Introduction to Pressure Measurement Vacuum pressure measurement is broadly divided into two categories: high and low vacuum. Many of the different techniques used to measure these categories have an overlap at some point in the pressure range. By combining several different types of gauge it is possible measure system pressure from 10 mbar down to 10-11 mbar.

For measuring in the low vacuum range (30 mbar to 10-3 mbar) we offer a range of Pirani gauges; for pressures below this (10-3 mbar to 10-11 mbar) we offer a range of ionisation gauges. VG Scienta offers both types of gauges in various options, along with a high performance gauge controller. However, for the user who requires a more basic configuration, a low cost alternative gauge and controller is available. This offers vacuum pressure measurement in the range 1000 mbar to 10-10 mbar.

Pressure Measurement

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Pirani Gauge Range

Introduction to the Pirani Gauge Range The Pirani gauge is a roughing pressure vacuum gauge. It uses the thermal conductivity of gases to measure pressure. VG Scienta has two different types of Pirani gauge measuring slightly different pressure ranges; they are both available in a variety of styles with a range of mounting flanges. Principles of Operation The Pirani gauge head is based around a heated wire placed in a vacuum system, the electrical resistance of the wire being proportional to its temperature.

At atmospheric pressure, gas molecules collide with the wire and remove heat energy from it (effectively cooling the wire). As gas molecules are removed (when the system is pumped down) there are less molecules and therefore less collisions. Fewer collisions mean that less heat is removed from the wire and so it heats up. As it heats up, its electrical resistance increases. A simple circuit utilising the wire detects the change in resistance and, once calibrated, can directly correlate the relationship between pressure and resistance. This effect only works in the pressure region from atmosphere to approx 10-3 mbar. Therefore other types of gauge have to be used to measure pressures lower than this.

The VG Scienta range of Pirani gauges is divided into two types: constant current, and constant resistance. The name refers to how the electrical measurement of the wire is controlled. The constant current type has a power supply that gives a constant current all the time to the filament. Therefore the filament resistance changes are measured. The constant resistance type has a power supply that changes the current supplied to keep the resistance of the filament the same. It has a slightly larger pressure range but requires more complicated electronics to control it.
Pressure Measurement

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Pirani Gauge Heads

The Pirani gauge range is divided into the constant current and constant resistance types; these are listed on the next page. They are also classified by the controllers that will operate them.
IMPORTANT PRODUCT INFORMATION The head control electronics are mounted directly on top of the Pirani head in the non-bakeable versions. The electronics are located at the end of a bakeable lead assembly in the case of the bakeable heads. These electronics are NOT bakeable and must be mounted away from all heat sources.

All dimensions in mm.

ZPVGM5KF

Pressure Measurement

ZPVG92

ZPVGM2

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Pirani Gauge Heads

Pirani Gauge Heads lange OD F mm inch KF10 34 70 KF10 34 70 KF10 34 70 1.33 2.75 1.33 2.75 1.33 2.75 Bakeout Connector Temperature, C Detail 50 250 250 50 250 250 50 250 250 DIN DIN DIN 4 Flat Pin 4 Flat Pin 4 Flat Pin Mini DIN Mini DIN Mini DIN Pressure mbar 3 to 1x10-3 3 to 1x10-3 3 to 1x10-3 3 to 1x10-3 3 to 1x10-3 3 to 1x10-3 3 to 1x10-3 3 to 1x10-3 3 to 1x10-3 Dimension A 93 mm 117 mm 117 mm 93 mm 117 mm 117 mm 93 mm 117 mm 117 mm Control Unit IPGC2(1) IPGC2(1) IPGC2(1) IGC/PIR1(2) IGC/PIR1(2) IGC/PIR1(2) IGC3(3) IGC3(3) IGC3(3) Order Code ZPVGM5KF ZPVGM92 ZPVGM2 ZPVG5KF ZPVG92 ZPVG2 ZPVGEKF ZPVGI5KF ZPVGI92 ZPVGI2

Adaptor to convert from KF10 to Edwards " union fitting

(1) If Pirani is run with another type of controller, full pressure range may not be possible. (2) Controller is no longer available, included for information only. (3) Full specifications for the IGC3 controller can be found on pages 406 to 409.

Gauge Head Order Code ZPVGM5KF ZPVGM92 ZPVGM2 ZPVG5KF ZPVG92 ZPVG2 ZPVGI5KF ZPVGI92 ZPVGI2

Spare and Accessories for Pirani Gauge Heads KF10 to Edwards " inch ZPVGEKF ZPVGEKF ZPVGEKF Sealing Gasket ZKK10VCS ZCU19 ZCU38 ZKK10VCS ZCU19 ZCU38 ZKK10VCS ZCU19 ZCU38 Mounting Kit ZKKF16CA ZM4B20 ZM6B35 ZKKF16CA ZM4B20 ZM6B35 ZKKF16CA ZM4B20 ZM6B35

Pressure Measurement

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Ion Gauges
electrons away from the filament; they circulate around the grid passing through the fine structure many times until eventually they collide with the grid. Gas molecules inside the grid may collide with circulating electrons. The collision can result in the gas molecule being ionised. The collector inside the grid is negatively charged and attracts these positively charged ions. Likewise they are repelled from the positive grid at the same time. The number of ions collected by the collector is directly proportional to the number of molecules inside the vacuum system. By this method, measuring the collected ion current gives a direct reading of the pressure. The above is a simplification of what happens. The design of the gauge head affects how efficiently electrons are produced, how long they survive, and how likely they are to collide with a molecule. These factors combine together to result in the gauge sensitivity. As a general rule, the higher the sensitivity, the more efficient the operation of the gauge. There are other factors which determine the lowest pressure that a gauge head can measure. One of these limiting factors is the X-ray limit. When an electron collides with the grid, there is a probability of a photoelectron being produced. Once generated, there is also a chance that the photoelectron will hit the collector and produce an electron. Unfortunately, the collector does not know the electrical difference between collecting a positive charge or losing a negative charge. This means that every time an electron is knocked off the collector, the electronics measure it as receiving a positive ion instead. This effect is very small and depends on the design of the gauge head. It normally generates a current measured in the picoamp range. At 10-10 to 10-11 mbar, however, this is also the current produced by the gauge head itself. If pressure is plotted against current, the graph can be seen to tail off as this X-ray current becomes the dominant effect. The X-ray current therefore limits the lowest pressure that the ion gauge can measure.

Pressure Measurement

Introduction to Ion Gauges When operating below the Pirani gauge range, an ion gauge can be used to measure pressure. There are a range of gauge heads and filament materials to cover specific pressure ranges and vacuum requirements in this region.

The VG Scienta ion gauge heads all operate using the same principle. Subtle differences in design and construction determine the pressure range and robustness of the different gauges.
Principles of Operation The ion gauge consists of three distinct parts; the filament, the grid, and the collector. The filament produces electrons by thermonic emission. A positive charge on the grid attracts the

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Ion Gauge Heads (VIG2x and VIG1x Series)

Ion Gauge Heads We have two ranges of gauge heads, the VIG1x and the VIG2x series. They are distinct from one another and cover different pressure ranges. The heads are all listed in the table below. VIG2x Series The VIG2x series of heads (VIG22 and VIG24) use the same construction; they only differ by filament materials used. The construction of the gauge is a ceramic feedthrough base with a highly insulated collector pin (remember that you are trying to measure very low currents). The grid is made from very thin molybdenum. It is made to be as large as possible (to maximise the volume for possible electron to molecule collisions) but also to have a very small surface area (to minimise the chance of electrons colliding with, and being collected by, the grid). This design ensures that the electrons stay out in the field as long as possible before being collected. The collector wire is made from very thin tungsten to minimise the risk of x-ray formation whilst still allowing the collection of positive ions. VIG1x Series The VIG1x series of heads (VIG17 and VIG18) have the same construction as the VIG22 series. Again a ceramic feedthrough base is used but with an even more highly insulated collector pin than the 2x series. The grid is made from very thin molybdenum and is made to be as large as possible (to maximise area of possible electron/ molecule collision volume) but also to have an even smaller surface area than the 22 series (to minimise the chance of electrons being collected by the grid). The grid also has a top and bottom which ensures that the field produced is as uniform as possible (no end effects). The collector wire is even thinner tungsten to further minimise the risk of x-ray formation whilst still allowing the collection of positive ions.

VIG2x series ion gauge head.

VIG1x series ion gauge head.

Pressure Measurement

Note: all ion gauges require a minimum port inside diameter of 35 mm.

VIG Series Ion Gauges Flange OD mm inch 70 70 70 70 2.75 2.75 2.75 2.75 Gauge X-ray Bakeout Filament Sensi- Pressure Limit D imensions in mm Temp(1), C Materials(2) tivity Range mbar in mbar A B C D E F G H Order Code 400 (250) 400 (250) 400 (250) 400 (250) 2 xW 2 x Th Ir 2 xW 2 x Th Ir 19 19 17 17 10-3 to 10-11 10 to 10
-3 -11

3 x 10-11 3 x 10-11 3 x 10-10 3 x 10-10

83 28 35 24 16 34 70 34 83 28 35 24 16 34 70 34 72 28 35 21 14 34 70 34 72 28 35 21 14 34 70 34

ZVIG17 ZVIG18 ZVIG22 ZVIG24

10-3 to 10-10 10-3 to 10-10

(1) Number in brackets is maximum temperature attainable whilst connected to appropriate bakeable lead assembly. (2) W = tungsten, Th Ir = thoriated iridium.

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Ion Gauge Heads - Spares and Accessories

has a lower work function (it is very efficient at releasing electrons by thermionic emission), which means that it runs at a lower temperature than tungsten to release the same number of ionising electrons. This means that less CO and CO2 is produced, less molecular cracking takes place, and the filament can survive exposure to air whilst hot (for a short period!).
Tungsten Filaments Tungsten has the ability to take a lot of power; this meant that in the days of dirty vacuum systems (untrapped diffusion pumps etc.) the gauge heads could be degassed at powers of up to 100 watts to remove oil contamination. Tungsten has the disadvantage of becoming very brittle (due to crystal growth) when it is heated, which means that it is easily broken by vibration. In addition it will instantly oxidise if let up to air whilst hot. The hot filament also generates CO and CO2 inside the vacuum system and causes larger gas molecules to be split into fragments.
IMPORTANT PRODUCT INFORMATION Thoriated iridium must not be degassed at more than 30 Watts power as the thoria coating may evaporate. Thoria dust must not be inhaled.

There are two kinds of filament material that VG Scienta use: tungsten and thoriated iridium. They both have different properties that make them useful as filament materials. The current ion gauge heads (and some of the obsolete ones) have a number of spares and accessories available; these include items such as spare filament and connector leads.
Thoriated Iridium Filaments Thoriated iridium filaments are based on an iridium wire coated with a thin thoria coating. This

Ion Gauge Heads - Spares and Accessories Non-Bakeable Lead Assembly(2) Varian IGC IGCI 1+2 Varian Multigauge Series Series Multigauge ZMGLIGB3 ZMGLIGB3 ZMGLIGB3 ZMGLIGB3 ZMGLIGB3 ZLIGNB3 ZLIGNB3 ZLIGNB3 ZLIGNB3 ZLIGNB3 ZLIG8NB3 ZLIG8NB3 ZIPGC204 (4m) ZIPGC204 (4m) ZIPGC204 (4m) ZIPGC204 (4m) ZIPGC204 (4m) ZIPGC803 ZIPGC803 ZMGLIGN3 ZMGLIGN3 ZMGLIGN3 ZMGLIGN3 ZMGLIGN3 ZMGLG8N3 ZMGLG8N3

Pressure Measurement

Gauge Head B akeable Lead Assembly(2) Order Spare IGC IGCI 1+2 Code Filaments Series Series ZVIG17 ZVIG18 ZVIG22 ZVIG24 ZHWW ZVIG10 ZVIG10A(1) ZVIG20(1) ZVIG21(1) ZVIG30(1) ZVIG23(1) ZVIG17M(1) ZVIG18M(1) ZVIG24M(1) ZVIG8 ZVIG8KF ZWW17 ZTIR23 ZWW17 ZTIR23 ZWW17 ZWW17 ZWW17 ZWW ZTTCIR ZWIR23 ZWW17 ZTIR23 ZTIR23 ZIR23 ZIR23 ZLIGB3 ZLIGB3 ZLIGB3 ZLIGB3 ZLIGB3 ZLIGMB3 ZLIGMB3 ZLIGMB3 ZIPGB3 ZIPGB3 ZIPGB3 ZIPGB3 ZIPGB3 -

Earlier Series Ion Gauge Heads

(1) These gauge heads are no longer available and are included for reference only. (2) All leads are 3 metre lengths as standard unless otherwise indicated.

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Ion Gauge Connection Leads

A lead is required to connect an ion gauge head to a controller. Leads are available in both bakeable and non-bakeable materials. The advantage of a bakeable lead is that the gauge can still be operated (and pressure monitored) whilst the system is being baked (as long as it does not exceed the temperature limit of the lead). It also means that the gauge head can be degassed whilst the system is still hot. Our standard lead length is 3 metres; we make special length leads of up to 10 metres (the longest we recommend that you use). For further information please contact our Technical Service Department or your local representative with details of your requirements.
Gauge Heads ZVIG17, 18, 22 and 24 ZVIG17, 18, 22 and 24 ZVIG17, 18, 22 and 24 ZVIG17, 18, 22 and 24 ZVIG17, 18, 22 and 24 ZVIG17, 18, 22 and 24 ZVIG17, 18, 22 and 24 ZVIG17, 18, 22 and 24 ZVIG17, 18, 22 and 24 ZVIG17, 18, 22 and 24 Controller Type IGC3 IGC3 IGC3 IGC3 IGC3 IPGC Series IPGC Series IGC Series IGC Series IGC-M Series Ion Gauge Connections Leads Spare Ion Gauge Head Connector ZVIGSK ZVIGSK ZVIGSK ZVIGSK ZVIGSK ZVIGSK ZVIGSK ZVIGSK ZVIGSK ZVIGSK Bakeout Temperature, C 250 250 250 250 250 250 250 250 250 250 Length in m 1 2 3 5 10 3 5 3 5 3

Order Code ZIPGB1 ZIPGB2 ZIPGB3 ZIPGB5 ZIPGB10 ZIPGB3 ZIPGB5 ZLIGB3 ZLIGB5 ZLIGMB3

IMPORTANT PRODUCT INFORMATION The picture to the left depicts the two standard 3 pin plugs. The older style controllers have the larger size 3 pin plug on the left of the picture, the new ZIGC controllers are fitted with the smaller 3 pin plug as standard, to the right of the picture. For more information on cabling and interconnects please don't hesitate to contact our Technical Support Department.
Standard DIN and mini DIN.

Pressure Measurement

ZLIGB3.

ZIPGB3.

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IGC3 Ion Gauge and Process Vacuum Controller

Electrical and Mechanical The IGC3 is housed in a 1U 19 inch rack mounting unit making for simple mechanical installation. All electrical connections are via standard plugs and sockets.

Introduction to the IGC3 Ion Gauge Controller Precision HV/UHV ion gauge controller Pump down/vent control Multi-step bakeout control Timer function (e.g. TSP) Intelligent analogue output 7 trips and 2 digital inputs Full process interlocking 19 inch, 1U format

1U 19 inch rack mounting Bright VFD display User-defined unit naming for ease of identification Intuitive five button touch panel interface sets all parameters Universal QM ion gauge connector Digital I/O via standard male DB25 connector Analogue output via standard mini-jack connector RS232/485 serial communications via two standard RJ45 connector simplifies daisychaining The IGC3 controller is suitable for all HV/UHV ion gauges. Emission current settings of 0.1, 0.2, 0.5, 1, 2, 5 and 10 mA (user definable min/max) Auto-range mode automatically selects appropriate emission for pressure range Seven degas levels between 1 and 30 W (nominal) User set ramp/soak degas programme Sensitivity 1.0 99.0 Supports two filaments; tungsten and thoriated iridium User-defined filter response
Trip Outputs Four change-over relays: 1 A @ 24 VDC/ 0.5A @ 115 VAC Three open collector outputs: 150 mA @ 24 V Assignable to any IGC3 function including: ion gauge, bakeout, timer etc., or communications driven (e.g. valve)

The VG Scienta IGC3 ion gauge-based process vacuum controller combines the functionality of several vacuum system controllers into a single easy to use unit, reducing hardware, wiring and cost.
Pressure Measurement

The IGC3 combines the latest microprocessor technology with simple, well-established ion gauge power supply design to ensure ease of use, stability and reliability.

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IGC3 Ion Gauge and Process Vacuum Controller

Option Slots IGC3 is has two user-configurable option slots which can accommodate:

Pirani boards: monitor backing pressure. supports system pump-down Type K thermocouple amplifier: supports on/off system bakeout control with integrated pressure and external interlocking
Two Digital Inputs Two opto-isolated digital inputs Provides user-defined external interlock protection of ion gauge, bakeout, pump-down etc. Pump Down Pump down a system to user-defined parameters; auto start of ion gauge with up to nine attempts Vent ion gauge protection Bakeout Ramped temperature control of heaters for gentle bakeout heating/cooling Up to six ramp/soak steps of up to 99.9 hours each Fully pressure and interlock protected Timer Timed operation of external devices (e.g. sublimation pump) Pressure and interlock protected Analogue Output Sensitivity and emission corrected User-definable voltage output range; can be configured for inverted operation User-defined pressure range; ideal for pressure/flux monitoring where output can be tailored to match the range of interest
IGC3 basic dimensions (mm).

Communication All aspects of IGC3 can be controlled manually from the front panel or using serial communications (e.g. from process control software).

Native MODBUS protocol allows full floating point resolution data transfer. Grouping of frequently needed and related parameters together provides optimised data throughput Enhanced MODBUS allows data to be written to, and read from, the unit in a single data message, doubling data throughput Multi-drop RS232 and RS485 interfaces as standard. Up to sixteen IGC3s using RS485. Up to eight IGC3s running from a standard PC port using the multi-drop
Ion Gauge Heads VIG17 VIG18 VIG22 VIG24 Bakeable Leads Length ZIPGB1 (1 m) ZIPGB2 (2 m) ZIPGB3 (3 m) ZIPGB5 (5 m) ZIPGB10 (10 m)

Pressure Measurement

Gauges and Accessories for the IGC3 Controller Pirani Gauge Heads (bakeout) ZPVGI5KF (50 C) ZPVGI92 (250 C) ZPVGI2 (250 C)
(1)

(1) Pirani head includes cable.

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IGC3 Ion Gauge and Process Vacuum Controller

Item Controller Item Pirani Board IGC3 Controller Notes NB: will only run one ion gauge 110/120 VAC or 220/240 VAC Add-on Internal Board Notes K Type only With DIN conversion cable Order Code ZIGMTC ZIGMPVG Order Code ZIGC3

Bakeout Thermocouple Board

IMPORTANT PRODUCT INFORMATION NOTE: You can only add up to a total of two boards, but in any combination

IMPORTANT PRODUCT INFORMATION We can provide UK, USA and European style mains power leads. This determines the style of mains plug. Please specify which type you require when ordering.

Ion Gauge Leads 1 m Ion Gauge Lead 2 m Ion Gauge Lead 3 m Ion Gauge Lead 5 m Ion Gauge Lead 10 m Ion Gauge Lead Ion Gauge Heads Ion Gauge Ion Gauge Ion Gauge Ion Gauge Pirani Gauge Leads Pirani Gauge Pirani Gauge Pirani Gauge
Pressure Measurement

IGC3 Controllers - Leads and Gauges Fully Bakeable Fully Bakeable Fully Bakeable Fully Bakeable Fully Bakeable Closed Grid / Tungsten Filament Closed Grid / Iridium Filament Open Grid / Tungsten Filament Open Grid / Iridium Filament KF10 Flange Bakeable to 50 C 34mm OD CF Flange Bakeable to 250 C 70mm OD CF Flange Bakeable to 250 C Order Code ZIPGB1 ZIPGB2 ZIPGB3 ZIPGB5 ZIPGB10 ZVIG17 ZVIG18 ZVIG22 ZVIG24 ZPVGI5KF ZPVGI92 ZPVGI2

IGC3 Controllers - Spares and Accessories Item Accessory Pack: Connectors and Fuses Pirani Conversion Lead Notes One set supplied with ZIGC3 For Mini DIN on ZIGMPVG to large 5 Pin DIN on Pirani Head Lead Note: These are supplied with the ZIGMPVG Thoria Coated 1 Set for ZVIG18 and 24 Tungsten 2 Sets for ZVIG17 and 22 Converts the trip/digital input connector for solder free wiring Order Code ZIGMACC ZIGMPCAB

Spare Filaments for Ion Gauges Spare Filaments for Ion Gauges DB25 to Screw Terminal Converter

ZTIR23 ZWW1 ZIGDB25C

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IGC3 Ion Gauge and Process Vacuum Controller

Thermocouple for Bake-out Module Two metre length of bakeable (350 C) type K thermocouple terminating in a washer with a 6 mm diameters hole. Non-bakeable section 3 or 8 m long terminated with thermocouple module connector.
Item 5 m Thermocouple 10 m Thermocouple

IMPORTANT PRODUCT INFORMATION Please see the questionnaire on our website for a stepby-step guide to configuring and ordering your IGC3.

IGC3 Controller - Thermocouples Order Code ZIGTCC05 ZIGTCC10

Communication Cables Up to eight ZIGC3's can be controlled directly from each PC serial port. These options provide cabling from the PC to the first ZIGC3, and between ZIGC3 for daisy-chaining purposes.
Cable DB25 PC serial connector, 3m long 1m long daisy chain cable 3m long daisy chain cable IGC3 Controller - Communication Cables Order Code ZIGDBC09 ZIGDB25C ZIGDCC01 ZIGDCC03 RS232 Communications cable from PC to first ZIGC3 in a daisy chain DB9 PC serial connector, 3m long

IGC3 Software VACTool: Software Configuration/Data Monitoring Tool This stand-alone Win32 programme allows any number of ZIGC3's to be controlled and monitored from the PC. Features include: access to all parameters, parameter file sets for ZIGC3 configuration, monitoring and logging of all data with graphical callback.
Software Package VACIG for Windows XP and above Communications Documentation Pack

VACSup: Developers Software Support ZIGC3 permits full control monitoring using industry-standard MODBUS protocol over multi-drop RS232 or RS485 buses. A range of facilities to help the user to implement their own communications package, or integrate ZIGC3 support into existing packages

Pressure Measurement

IGC3 Controller - Software Order Code ZIGVACXP ZIGCOMDP ZIGWIN32

Win32 DLL with Header parameter values and MODBUS data string

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Wide Range Pressure Measurement

Display and Control System Measuring Accuracy 25 % (10 to 10-2 mbar) 15 % (10-2 to 10-8 mbar) Analogue Signal 0 to 10 V logarithmic: U= 0.625 V x log (p/10-12 mbar) Operating Voltage 24V DC +/- 10 % Current Normal operation 0.4 A max, 0.9 A degas max Input Power Normal operation 10 W max, 22 W degas max Cathode Material Yttria-coated iridium Emission Current 25 A and 2 mA: degassing 20 mA Grid Potential 240 V, 400 V degas Ambient Temp 40 C max Setpoint One set point available Specification and Options Line Voltage 230 or 115 VAC (switchable by voltage selector on main input) Fuses Slow-blow fuses of 250 mA (230 V)/500 mA (115 V) Outputs Analogue pressure signal of the connected wide range gauge Relay output (24 V/1 A max) Weight 1.5 kg Size 128 mm x 142 mm x 170 mm (H x W x D)

Pressure Measurement

Introduction to the Wide Range Gauge VG Scienta wide range gauge display control unit is designed for use with the ZPGSH and ZPGSU standard version wide range gauges, and the ZPGCH compact version wide range gauge (see page 411). The display unit is capable of being rack mounted. The display unit will allow continuous pressure measurement from atmosphere to UHV, control the degas of gauges and has up to six setpoints available.

Wide Range Gauge Display and Control Unit Rack Mounted Display Unit, 110 VAC Version Rack Mounted Display Unit, 220 VAC Version Order Code ZWPGC110 ZWPGC220

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Wide Range Gauge Heads

Wide Range Gauge Heads CF Flange Version Measuring Range Standard 1000-10-10 mbar Compact 1000-10-10 mbar Bakeout Temperature Standard 250 C on the front flange Compact 180 C on the front flange Replacement filaments available Housing tube changeable KF Flange Version Measuring Range Standard 1000-10-8 mbar Compact 1000-10-8 mbar Bakeout Temperature Standard 180 C on the front flange Compact 180 C on the front flange Replacement filaments Housing tube changeable

KF version.

Conflat version.

VG Scienta provides a number of complete gauging packages that include all the components necessary to install and operate the wide range gauge system (control, gauge head and cable). These are shown in the tables below.

Wide Range Gauge Heads - Compact Version Wide range compact disposable gauge head is fitted with non-replaceable twin yttria coated iridium filaments, and is mounted on to a KF25 flange. The wide range compact disposable gauge head will allow continuous pressure monitoring from atmospheric pressure to 10-9 mbar. Wide Range Gauge Heads - Standard Version Wide range standard gauge head is fitted with replaceable twin yttria coated iridium filaments, mounted to flanges either Conflat or Klein flanges. The wide range standard gauge head will allow continuous pressure monitoring from atmospheric pressure to 10-11 mbar.

Pressure Measurement

Wide Range Gauge Head - Compact Version Description Compact Wide Range Disposable Gauge Head with a KF25 Mounting Flange Description Standard Wide Range Gauge Head with a KF40 Mounting Flange Standard Wide Range Gauge Head with a KF25 Mounting Flange Standard Wide Range Gauge Head with a 70 mm OD Conflat Mounting Flange Standard Replacement Twin Yttria coated Iridium Filaments for the ZPGSH40K, ZPGSH25K and ZPGSH2C Wide Range Standard Gauge Heads Wide Range Gauge Sets Mounting Flange KF 25 70 mm OD Conflat KF 25 70 mm OD Conflat Description HV Gauge Set, 220 VAC, with ZPGCH25K Head UHV Gauge Set, 220 VAC, with ZPGSU2C Head HV Gauge Set, 110 VAC, with ZPGCH25K Head UHV Gauge Set, 110 VAC, with ZPGSU2C Head Order Code ZWPGHCC ZWPGUCC ZWPGHCCL ZWPGUCCL Wide Range Gauge Head - Standard Version Order Code ZPGSH40K ZPGSH25K ZPGSU2C ZPGSF Order Code ZPGCH25K

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Wide Range Gauge Controller

Non Bakeable Cables These cables are designed for use with the display/control units and either the compact or the standard version gauge heads. They range in length from 3 metres to 10 metres and are complete with all the necessary connectors.
Cable Length 3 metres 5 metres 7 metres 10 metres Wide Range Gauge - Non-bakeable Cables Description For use between ZWPGC110 or ZWPGC220, (standard or compact range) For use between ZWPGC110 or ZWPGC220, (standard or compact range) For use between ZWPGC110 or ZWPGC220, (standard or compact range) For use between ZWPGC110 or ZWPGC220, (standard or compact range) Order Code ZPGCC3 ZPGCC5 ZPGCC7 ZPGCC10

Pressure Measurement

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