Solid State Engineering

Relation to Other Courses

Reading Materials

Primary Text:

Material Science () Thin-film Analysis / Material Analysis (/) Solid State Physics() Solid State Devices () / Semiconductor Devices and Physics() Simulation of Semiconductor Process () Advanced VLSI Technology ()

Hong Xiao, Introduction to Semiconductor Manufacturing Technology (5th ed.), Prentice Hall, 2009, ISBN 978-986-154-197-6 ()
Lecture notes

Course Reader:

E-mailfansen@dragon.nchu.edu.tw
2011/9/16 NCHU EE / Prof. F.H.Wang 1

Ftp: 140.120.32.87, username: student , password: student06 , port: 21

NCHU EE / Prof. F.H.Wang 2

2011/9/16

Reading Materials

Grading

3

Reference Texts:

Fundamental:

Homework 10% Quiz (2 times) 20% Midterm Exam. 30% Final Exam 40% Attendance +/-6%
NCHU EE / Prof. F.H.Wang 4

M. Quick and J. Serda, Semiconductor Manufacturing Technology, Prentice Hall, 2001 Peter Van Zant, Microchip Fabrication McGraw Hill, 5e. 2004 C.Y. Chang & S.M. Sze, ULSI Technology, McGraw Hill, 1996. Stanley Wolf, Silicon Processing for the VLSI Era Lattice Press
NCHU EE / Prof. F.H.Wang

100

Advanced:

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2011/9/16