Defects in Amorphous Silicon: Dynamics and Role on
Crystallization
Thesis by
Jung H. Shin
In Partial Fulfillment of the Requirements
for the Degree of
Doctor of Philosophy
California Institute of Technology
Pasadena, California
1994
(Submitted November, 1993)Acknowledgments
First and foremost, I would like to thank my family for their loving support
and encouragement. I am here because of them.
My growth as a scientist here at Caltech would have been impossible
without the help and support of Prof. Harry A. Atwater, and I would like
to express my deepest gratitude to him. Not only did he provide invaluable
guidance, he also showed Ze:
like patience and faith during the carly part of
my research, when nothing seemed to be going right. I am still amazed that
I was not thrown out. Thanks.
also would like to thank Prof. Mare A. Nicolet for allowing me to use
his implanter and other equipment in his lab. They have been invaluable in
my research. Many thanks also go to Prof. James $. Im, who not only helped
me, fresh out of college, get started on research, but also provided me with
countless midnight meals. Thanks.
I would like to express special thanks to: Jimmy Yang, who helped
me with all matters concerning computers (I still am not sure what CON-
FIG.SYS does); Peter Stolk, who provided me with his measurements of den
sity of electronic states of amorphous silicon; to Jason Reid, who depositeddiffusion barrier and silver contacts for some of the samples; to Kyong-Hee
Kim, for performing X-ray analysis of some of the samples; to Edward Ryan
and Loren Funk of High Voltage Electron Microscope/Tandem Accelerator
at Argonne National Laboratory for their expert assistance; Imran Hashim
and Ramana Murty, for their help with transmission electron microscopy;
Maggie Taylor and Ruth Brain, for proofreading this thesis; and to Carol
Garland, for her help with transmission electron microscopy, and also for
steering me toward the research area of structural relaxation.
I would also like to express my deep thanks to people who have pro-
vided me with friendship and good times while here at Caltech: Dr. Shouleh
Nikzad, Dr. Byungwoo Park, Dr. Cho Jen Tsai, Dr. Channing Ahn, Selmer
Wong, Heather Frase, Gang He, and Kirill Shcheglov. Thanks.