Classification of Scrubber Types Dry scrubber systems are widely used in the semicondustor industry such as silicon semiconductor

and compound semiconductor because they can safely defuse most toxic/corrosive gases such as AsH3, PH3, SiH4 and halogen compounds etc., by adsorption at ambient temperature. Burn scrubber systems can defuse toxic gases such as SiH4 and Si-compounds etc. by burning at high temperatures. During incineration of AsH3 and PH3, there are some risks of creating and emitting other harmful types of air pollution as by-products. Wet scubber systems can defuse toxic gases such as halogens, NH3, and SiH4 etc. by chemical reactions with water or chemicals. The secondary treatment of waste solutions is necessary with this method.