B mn: Din tu Vin thng. Chuong 1: Co so Vt l (2d) Cu 1: Trnh by cc dang cu trc tinh th Cu 2: Trnh by cu trc vng nng luong cua cht bn dn. Cu 3: Trnh by nng d hat dn v muc nng luong Fermi trong bn dn tinh khit. Nhn xt. Cu 4: Trnh by nng d hat dn v muc nng luong Fermi trong bn dn loai P. Nhn xt. Cu 5: Trnh by nng d hat dn v muc nng luong Fermi trong bn dn loai N. Nhn xt. Cu 6: Trnh by d dn din cua cht bn dn. Chuong 2: Cu trc mch Vi din tu (2d) Cu 7: Trnh by v th tip xc trong chuyn tip PN Cu 8: Trnh by cc cch cu hnh Diode trong vi mach tch hop. Cu 9: Trnh by so d cu trc mt ct Transistor NPN trong vi mach tch hop. Cu 10: Trnh by so d cu trc mt ct Transistor PNP trong vi mach tch hop. Cu 11: Trnh by cng thuc xc dinh din dung cua mt chuyn tip mt pha P + N hoc PN + . Cu 12: Trnh by din tro Bazo trong cu trc mt ct Transistor NPN. Cu 13: Trnh by din tro Collector trong cu trc mt ct Transistor NPN. Cu 14: Trnh by cch cu hnh tu C trong cu trc mach vi din tu. Cu 15: Trnh by cu trc mt ct din tro trong vi mach tch hop. Cu 16: Trnh by cu trc mt ct tu MOS trong vi mach tch hop. Cu 17: Trnh by cu tao v ung dung Diode Schottkey trong vi mach tch hop. Cu 18: Trnh by k thut cch din bng oxide trong vi mach tch hop. Ly v du minh hoa. Cu 19: Trnh by cu trc mt ct MOSFET knh N chua c sn. Giai thch nguyn l hnh thnh knh dn. Cu 20: Trnh by cu trc mt ct MOSFET knh P chua c sn. Giai thch nguyn l hnh thnh knh dn. Chuong 3: Cng ngh ch to mch Vi din tu (3d) Cu 21: Trnh by k thut ch tao Silic da tinh th tu vt liu ban du l ct. Cu 22: Trnh by k thut ch tao Silic don tinh th tu Silic da tinh th bng phuong php Cz v Fz. Cu 23: Trnh by k thut ch tao phin bn dn tu thoi Si don tinh th v lm sach b mt phin bn dn. Cu 24: Trnh by v chun phng sach v nguyn tc b tr cc thit bi trong phng sach. Cu 25: Trnh by muc dch v cch ch tao lop SiO 2 trong cu trc mach vi din tu bng k thut Oxy ha nhit. Cu 26: Trnh by cc buoc co ban trong k thut quang khc. Ly v du minh hoa. Cu 27: Trnh by muc dch cua k thut quang khc v cc cht cam quang su dung trong k thut quang khc. Cu 28: Trnh by k thut phn xa v ung dung cua k thut ny trong cng ngh ch tao vi mach tch hop. Cu 29: Trnh by k thut bc bay trong chn khng v ung dung cua k thut ny trong cng ngh ch tao vi mach tch hop. Cu 30: Trnh by k thut kt tua ha hoc pha hoi (CVD) v ung dung cua k thut ny trong cng ngh ch tao vi mach tch hop. Cu 31: Trnh by cc co ch khuch tn trong tinh th bn dn.. Cu 32: Trnh by cc yu cu cua mt h khuch tn v so d h khuch tn tu ngun rn. Giai thch so d d. Cu 33: Trnh by cc yu cu cua mt h khuch tn v so d h khuch tn tu ngun long. Giai thch so d d. Cu 34: So snh hai k thut cy ion v khuch tn. Cu 35: Pha tap bng cy ion l g? Trnh by so d h cy ion v giai thch. Cu 36: K thut Epitaxy nhm muc dch g? Trnh by k thut Epitaxy tu pha kh. Cu 37: K thut Epitaxy nhm muc dch g? Trnh by k thut Epitaxy tu pha rn. Cu 38: K thut Epitaxy nhm muc dch g? Trnh by k thut Epitaxy tu pha long. Cu 39: K thut Epitaxy nhm muc dch g? Trnh by k thut Epitaxy chum phn tu. Cu 40: Trnh by quy trnh ch tao phin bn dn. Vt liu chu yu d ch tao linh kin vi din tu l g v tai sao. Phn bi tp: (3d)