III.

CC PHNG PHP PHN TCH MNG

Phng php kho st hnh thi b mt mng: knh hin vi lc nguyn t (AFM) Phng php phn tch cu trc,thnh phn,trng thi lin kt ha hc ca mng Ph k in t Auger (AES) Ph k quang in t tia X (XPS) H o nhy kh

Hc vin: Hunh L Thy Trang

KHO ST HNH THI B MT MNG

KNH HIN VI LC NGUYN T (AFM- Atomic Force Microscope)

Chc nng: kho st cu trc vi m b mt ca vt rn da trn nguyn tc xc nh lc tng tc nguyn t gia 1 u mi d nhn vi b mt mu,c th quan st phn gii nm. Cu to: gm 6 b phn chnh: 1 mi nhn gn vi cn qut Ngun laser Phn x gng Hai na tm pin quang in (photodiode) B qut p in

KNH HIN VI LC NGUYN T (AFM- Atomic Force Microscope) (tt)

Nguyn l hot ng: + Khi mi nhn qut gn b mt mu s xut hin lc Van der Waals gia cc nguyn t lm thanh rung. +Dao ng ny c ghi li nh 1 tia laser chiu vo b mt phn x ca thanh rung. +Dao ng ny lm thay i gc lch ca tia laser v c detector thu lai. +Vic ghi li lc tng tc trong qu trnh thanh rung qut trn b mt s cho hnh nh cu trc b mt ca mu vt

g gh ca b mt

KNH HIN VI LC NGUYN T (AFM- Atomic Force Microscope) (tt) Phn tch ph: V AFM hot ng da trn vic o lc tc dng nn n c mt ch phn tch ph, gi l ph lc AFM (force spectrocopy), l ph phn b lc theo khong cch. Cc ph ny c th cung cp nhiu thng tin v cu trc nguyn t ca b mt cng nh cc lin kt ha hc. u im: -o c c vt liu dn in v khng dn in - C th o trong iu kin thng, khng i hi mi trng chn khng cao - Mu chun b n gin, cho thng tin y hn knh hin vi in t truyn qua (TEM) - Cho hnh nh kh r rng v nhng c trng ca b mt mu (khng cn lp bao ph mu) Nhc im: - Qut nh trn mt din tch hp (ti a 150 c

PHNG PHP PHN TCH THNH PHN HA HC, CU TRC,TRNG THI LIN KT HA HC CA MNG PH K IN T AUGER (AES) Hiu ng Auger Chiu mt chm in t (3-10 keV) n b mt mu

ni c nng lng thp: + pht ra bc x tia X (4a) + nhng nng lng cho e- cng phn lp, nu nng lng ny ln th e- ny s bt ra khi nguyn t i EAuger = EK EL1 EL3

PH K IN T AUGER (AES) (tt)

Cu to _ Bung chn khng cao UHV _Sng phng in t _My phn tch nng lng in t: (CMA) _Detector in t _B phn thu nhn v phn tch d liu

Nguyn l hot ng: Chm in t t(nng lng t 3-10 keV) c ri ti muhiu ng Auger v cc in t Auger bt ra khi b mt mng (cc in t nm di b mt khong t 0.4-5nm).Cc in t ny s b li cong quanh sng phng n mt khu nh nm pha sau CMA.Sau c thu nhn bi mt electron detector, qua b phn khuch i tn hiu,b phn x l tn hiu in tr, cho th l hm ca nng lng . Thng tin thu c t AES

AES
Thnh phn cu to Cc trng thi ha hc

Nng nguyn t

PH K IN T AUGER (AES) (tt)

Nhc im: -Cn o trong mi trng chn khng cao -Kh phn tch cc vt liu cch in -Mu phi sch -B mt mu c th b hng do chm in t chiu ti. - nhy va phi

u im: _ phn gii khng gian cao _ Phn tch tng i nhanh _C th phn tch b mt v lp di b mt ca mu _Nhy vi cc nguyn t nh (Z3) _Phn tch nh lng tt _Cho cc thng tin ha hc gi tr ( s n mn, oxi ha..)

PH K QUANG IN T TIA X (XPS)

Nguyn l hot ng: Chm tia X c nng lng c 1keV bn ln mng mng c i m d ng nng c c i nang l n nng l a i

PH K QUANG IN T TIA X (XPS) (tt) Phn tch ph: n c ni x t i t nng l Trc honh l nng lng lin kt (nng lng tia X c qut). Trc tung l cng Thng tin thu c: Phn tch c cu trc in t trong lin kt Yu cu ca phng php: -Phn tch tt c cc mu rn (tr cht c p sut hi tng i cao) - i hi kht khe v sch b mt -i hi tin hnh trong chn khng cao hoc chn khng siu cao (khong di 10-9 torr) -Trng hp mng qu mng : s dng phng php g mu nghing vi gc ln.

H O NHY KH C ch nhy kh: i vi mng nhy kh , c ch hot ng da vo s thay i in tr ca mng. S thay i ny ph thuc nhiu yu t nh: nhit , s hp th oxi, kh d,s gii hp

Qu trnh d kh c m t nh sau: -S hp th v khuch tn nhng phn t kh trn b mt oxit bn dn, iu ny ph thuc nhit ca mi trng. - Phn ng ca cc phn t kh d v cc phn t b hp th ha hc trn b mt cm bin.

H O NHY KH (tt)

nhy: l t l ca in tr ca mng o trong khng kh vi in tr trong mi trng c kh d.

_i vi kh kh: Ra > Rg ( Ra :in tr ca mng khi

cha c kh d; Rg : in tr khi c kh d), nn nhy kh c tnh nh sau:

_i vi kh oxi ha: Ra < Rg nn nhy kh c

tnh nh sau

H O NHY KH (tt) Cu to h o: -Bung o -Lu lng k -ng h o tr -B iu chnh v hin th nhit ca mu -B hin th nhit ca tm Inox -Pipet mirco -Bnh cha kh cn d -Ca bung -Qut ht

Cu to bn trong h o: Tm Inox c nng nhit Cp mi d ly tn hiu ra ngoi Bp nng nhit u d nhit ca tm bung u d nhit ca tm Inox

H O NHY KH (tt) Cch o:

-t mu ph in cc ln bp sao cho mi d tip xc tt vi cc in cc ca mu . Chn nhit o thch hp.o in tr trong khng kh (cha c kh d) ly gi tr ban u R
- o in tr khi c kh d (Rx ), c th chn theo lu lng

kh.Ln lt ly cc gi tr in tr theo nng l Rx (x:vn tc phun kh qua flow metter., ri tnh nhy:

Th tch kh d tim vo (Vi ) c tnh:

Phn tch ph: