Outline report masterthesis Mathias

Theory
FET Nernst equation Capacitance model

Methods and materials

Sample fabrication yield Measurement setup

Results and discussion

FET characterization try to explain ALD shift in air Leakage measurements ALD dependence pH measurements o sensitivity o influence of LG at different BG values, p-site / n-site o is sensitivity ALD depending? (comparison of slope in pH-maps)

APTES, CPTES results Measurements at different ion concentrations (KCl) Beyond Nernst limit o Capacitance ratio LG / BG comparison to ALD thickness

Sample images
Comparison of different readout section

Figure 1 : data readout from pH map.

Sensitivity depends on area

Comparison of different samples Comparison p-site / n-site

Figure 2: a9 n-site (

3 sensitivity plot in one graph)

Sample / measurements overview. (More measurements and data processing necessary to complete list.)