TRNG I HC KHOA HC T NHI N TP HCM KHOA VT L B Mn VT L NG DNG

BI TIU LUN

NGHIN CU CH TO MNG ITO BNG PHNG PHP PHN X MAGNETRON

GVHD: TS. L Trn HVTH: Nguyn Thanh T

Tp.HCM Thng 5/2010

Thc mc xin a ln din n ti: www.myyagy.com/mientay

MC LC
Chng 1. TNG QUAN............................................................................ 3 1.1. Gii thiu s lc v phng php to mng dn in trong sut ...... 3 1.1.1. Cc phng php ........................................................................ 3 1.1.2. Phng php phn x magnetron DC.......................................... 3 1.2. Gii thiu mng ITO.......................................................................... 4 1.2.1. Gii thiu mng trong sut dn in (TCO) ............................... 4 1.2.2. Gii thiu mng ITO................................................................... 4 Chng 2. THC NGHIM V PHNG PHP NGHIN C U........ 6 2.1. To mng bng phng php phn x trong h Univex 450 ............... 6 2.1.1. H to mng mng Univex 450 .................................................. 6 2.1.2. Quy trnh to mng ..................................................................... 7 2.2. Cc php o xc nh tnh cht ca mng........................................... 9 Chng 3. KT QU V BN LUN .................................................... 10 3.1. nh hng ca qu trnh ch to ln tnh cht in v quang ca mng ITO trong phng php phn x magnetron DC ......................................... 10 3.1.1. Khong cch bia - v p sut phn x................................... 10 3.1.2. Cng sut phn x .................................................................... 13 3.1.3. Nhit ............................................................................... 15 3.1.4. dy mng ............................................................................ 17 3.1.5. Kh xi..................................................................................... 20 3.1.6. X l nhit sau khi ph ............................................................. 22 3.2. Kt lun ........................................................................................... 25 TI LIU THAM KHO

Chng 1.

TNG QUAN

1.1. Gii thiu s lc v phng php to mng dn in trong sut 1.1.1. Cc phng php Hin nay c nhiu phng php to mng oxide trong sut dn in (TCO) nh: Phng php solgel Phng php xung laser Phng php phn x Phng php bay hi ngng t ha hc Phng php bc bay nhit, bc bay bng ch m electron Phng php m ion hot tnh Mi phng php u c nhng c im ring, vic la chn phng php ph thuc vo nhiu yu t khc nhau nh: Loi vt liu to mng Kch thc , vt liu Cc tnh cht l, ha cn t c Tnh n gin trong ch to 1.1.2. Phng php phn x magnetron DC ti ny s dng phng php phn x magnetron DC. Ta chn ph ng php ny v n c nhng tin li sau Nhit thp, c th xung n nhit ph ng bm dnh tt ca mng trn Vn tc ph cao, c th t 12 m/pht D dng iu khin Cc hp kim v hp cht ca cc vt liu vi p sut h i rt khc nhau c th d dng phn x Phng php c chi ph khng cao C kh nng ph mng trn din tch rng, c th t 3m x 6m Phng php phn x magnetron l phng php phn x c tng cng bng t trng. Trong phng php ny s sp xp thch hp gia t trng tng mt ion ha trn b mt bia ln nhiu ln dn n tng vn tc phn x so vi phng php phn x thng Ngoi ra vi mt ion ha cao trong v ng khng gian trn b mt bia nn cc phn ng ha hc trong vng ny cng d xy ra do nng lng v xc sut va chm cao, iu ny cho php kh nng iu khin cc qu tr nh to mng c kch hot phn ng

Trong phng php phn x Magnetron ngi ta phn ra lm hai loi l : phn x DC v phn x RF. i vi vt liu dn in c th d ng hai phng php. Phng php RF dng cho v t liu khng dn in 1.2. Gii thiu mng ITO

1.2.1. Gii thiu mng trong sut dn in (TCO) Mng oxide trong sut dn in c rt nhiu thun li tron g k thut quang in, v d nh mng to bng vt liu: tin oxide( SnO 2), indium oxide, zinc oxide( ZnO) ng dng quan trng ca mng trong sut dn in TCO da trn u im nh truyn qua cao, s phn x h ng ngoi cao v dn in cao. Ba yu cu chnh : B rng vng cm ln hn 3,1 eV Dn in bng elctron trong vng dn v mt trng thi trong vng dn phi ln Electron dn trong tinh th oxide c c bng cch thay th cc ion dng hoc ion m bng cc ion khc loi hoc to thm khong trng oxi hoc khong trng ion m Trong tt c cc loi mng TCO th mng Indium tin oxide (ITO) c quan tm nhiu v ngoi yu t v dn in cao v truyn qua cao th n c nhng tnh cht nh tr v ha hc, bm dnh cap v c rn. 1.2.2. Gii thiu mng ITO

a. Cu to Mng ITO c to t hn hp ca hai loi bt oxide: Indium oxide (In2O3) v Tin Oxide ( SnO 2), trong In v O l nhng thnh phn c bn, thm Sn nh l tp cht donor b. C ch dn in C ch dn in ca ITO ch yu do cc electron trong vng dn. Nhng electron ny c sinh ra do c s pha tp donor hoc do s thiu oxi trong c u trc mng Khi pha tp cht th nguyn t tp cht phi c electron ha tr ln h n hoc bng 4, do nguyn t pha tp c 4 elctron ha tr s thay th cho mt nguyn t In c 3 electron ha tr, khi tha mt electron ha tr , ch cn mt nhit no th in t c gii phng v chuyn ng t do trong tinh th v dn in. c. ng dng Mng ITO c nghin cu t rt lu v cho n nay vn c xem l vt liu tt nht c v tnh cht quang, tnh cht in v bn c ha nn vn c s dng rng ri trong nhiu ng dng. Do c truyn qua cao vng kh kin v in tr sut thp thng c dng lm in cc trong sut trong c c loi mn hnh, pin mt tri mng mng,

v gn y c dng ch yu trong cng ngh mn hnh phng (FPD), i-t pht quang hu c (OLED). d. t vn nghin cu Hin nay, ngoi vic tm cc vt liu khc thay th cho ITO nh ZnO v SnO2 pha tp, nhiu nghin cu vn c tip tc tin hnh trn ITO gim in tr sut hn na (~10-4 cm) trong khi mc trong sut vn cao (> 85% trn thy tinh). Ngoi ra, mi ng dng khc nhau li i hi nhng mc u tin khc nhau v tnh cht in, quang hoc cu trc tinh th ca mng ITO, do vic nghin cu s nh hng ca phng php v iu kin ch to ln cc tnh cht nh cu trc tinh th, s nh h ng tinh th, tnh cht b mt, tnh cht c hc, bn ha hc, l cn thit nhm tng cng hiu nng s dng ITO cho cc linh kin trong thc tin ti ny nghin cu s nh hng ca iu kin ch to l n tnh cht quang v tnh cht in ca mng ITO.

Chng 2.

THC NGHIM V PHNG PHP NGHIN C U

2.1. 450 2.1.1.

To mng bng phng php phn x trong h Univex H to mng mng Univex 450 (Hnh 2.1)

Hnh 2.1 H to mng mng Univex 450

H thng bm chn khng: Bm s cp TRIVAC D40B, loi b m rotor l gt, lm vic mi trng p sut 760 10-3 torr, vn tc bm 46 m3/h. Bm Turbo phn t TURBOVAC 1000, to c chn khng cao, p sut bnh thng t c 10-6 torr trong iu kin mi trng m cao ( m tng i RH 60 - 90%), vn tc bm 1000 l/s. Bung chn khng: Bung c dng hnh tr, ng knh 450 mm, cao 500 mm. Bung c cc l ni vi cc thit b o c t b n ngoi vo. Bung c h thng nc gii nhit trn thnh bung pha ngoi. ng m bung bng h thng motor. Thit b o p sut: Trong vng p sut cao 760 10-2 torr: s dng p k Pirani

 Trong vng p sut thp 10-2 10-9 torr: s dng p k Penning B iu khin v hin th k thut s: Combivac CM31 Thit b o lu lng kh lm vic: Tylan 2900C Kh nng iu chnh l u lng 0 100 sccm, iu khin v hin th s. Thit b cp nhit : ng knh ti a ca l 100 mm Khong nhit : nhit ph ng n 4500C, sai s 0.10C Cm bin o nhit , b phn iu khin v mn hnh hin th k thut s Thit b lm sch b mt bng phng in kh : C2000 in th 0 2000 V, dng ti a 60 mA, p sut phng in lm sch thng thng l 10-2 torr khong cch - cathode l 6 cm. Thit b o vn tc lng ng v b dy mng: XTM/2 Hot ng da trn nguyn tc tn s dao ng ca tinh th thch anh thay i theo khi lng ngng t trn b mt tinh th. H magnetron DC (Direct Current) Cathode phn x bn knh 76 mm cho bia (t arget) kch thc 76mm T trng trn b mt bia B = 450 750 G, ty dy bia Cng sut ti a: 1000 W B hin th v iu khin cng sut k thut s. H thng iu chnh thng s phn x, cho php c nh mt trong 3 thng s: cng sut, th v dng phn x. 2.1.2. Quy trnh to mng Cc c im chung: t song song vi bia nh Hnh 2.2 vi khong cch bia- trong khong t 4 n 9 cm. Khong cch thng th ng 5 cm, l ti u i vi kch c h cathode phn x nh ( ng knh 76 mm) v loi vt liu mng s dng trong thc nghim ca ti ny.

Hnh 2.2 M hnh b tr bia v trong thc nghim Kh lm vic chnh l Ar tinh khit 99.999 % vi l u lng khi to mng c gi c nh l 25 sccm. Gi tr ny c chn da trn tiu ch gim ti a nh hng ca kh cn li trong bung nhng khng lm qu ti bm Turbo phn t khi vn tc bm chn khng ln (van chnh c m rng). p sut nn trc khi to mng (4-7) x 10-6 torr thng thng t c sau hn 2 gi bm chn khng trong iu kin m cao. p sut kh lm vic trong qu trnh to mng c th iu chnh trong khong rng ty theo yu cu kho st. p sut in h nh cho kt qu tt trong thc nghim ny l khong 3 x 10-3 torr. Lm sch trc khi to mng: c lm sch qua hai giai on: Lm sch bng dung mi: u ti n ty ra vi dung dch NaOH 1% bng my siu m trong 20 pht, sau t y ra bng x phng, nc ct, aceton v sau sy kh. X l bng phng in: trc khi ph mng c ty ra bng phng in trong bung chn khng vi kh Ar p sut p = 10 -2 torr, dng I = 10 mA, th V = 2000 V trong thi gian t = 24 pht. Lm sch b mt bia trc khi phn x (presputtering): thng thng khi trong mi trng khng kh b mt bia d hp th tp cht do cn c lm sch trc khi a vo ph. Ngoi ra trong nhiu trng hp ph mng nhiu thnh phn, qu trnh phn x ty b mt l cn thit m bo s ng nht v thnh phn nguyn t gia mng ph v bia vt liu. Thi gian t c s cn bng ty thuc vo vt liu bia v vn tc phn x.Trong phn thc nghim ny thi gian phn x lm sch trong vng 3-10pht.

Cc bc to mng Dng bm s cp ht n p sut khong 10-2 torr trong khong thi gian t 10 n 12 pht ty thuc iu kin m ca mi tr ng th nghim. Khi ng bm Turbo phn t trong khong hn 10 pht. Khi bm Turbo khi ng xong th m van chnh ra bm tip tc ht n p sut nn (4-7) x10-6 torr. Tin hnh phng in lm sch (trc c ty ra ha hc bng NaOH v ra siu m bn ngoi bung chn khng). Tin hnh phn x: Cho kh Ar vo bung vi lu lng 25 sccm, phn x lm sch bia, a n v tr chnh din ca bia phn x. Cng sut phn x, p sut lm vic, nhit , thi gian phn x thay i t y theo yu cu. 2.2. Cc php o xc nh tnh cht ca mng Phng php 4 mi d thng: c s dng o in tr mt ca m ng Phng php van der Pauw vi my HMS 3000: c s dng xc nh nng v linh ng Hall ca ht ti. Phng php o dy:bng my Stylus Dektak 6M. Php o nhiu x tia X: cu trc tinh th ca khi v mng mng c xc nh bng ph nhiu x tia X trn my Siemens D5. Ph truyn qua trong v ng ph 190 1100 nm c o bng my UVVis Jasco V-530. Ph truyn qua v phn x trong vng hng ngoi bc sng 0.65-1.8m c o bng my FTIR Bruker Equinox 55.

Chng 3.

KT QU V BN LUN

3.1. nh hng ca qu trnh ch to ln tnh cht in v quang ca mng ITO trong phng php phn x magnetron DC Mng ITO c to bng phng php phn x magnetron DC t bia gm ITO vi thnh phn In2O3 + 10wt % SnO 2, vi tinh khit 99.99%, trn thu tinh trong h chn khng Univex 450, vi p sut nn 4 x 10-6 torr, vi p sut lm vic in hnh l 3 x 10-3 torr tr trng hp kho st theo iu kin p sut thay i. 3.1.1. Khong cch bia - v p sut phn x nh hng ca khong cch bia - ln in tr sut v truyn qua ca mng ITO c trnh by trong Bng 3.1 v Hnh 3.1 i vi b tr song song vi bia. Cc iu kin ph mng c gi khng i nh Cng sut phn x 50 W, Nhit 3500c, p sut phn x 3 x 10-3 torr kh Ar. dy cc mng c gi xp x nhau trch s nh h ng ca n ln cc tnh cht ca mng. Vi h magnetron ang s dng, khong cch bia - qu gn s to ra s bt ng nht ln ca vn tc lng ng trn , plasma phng in khng n nh v bn ph ion tr nn qu ln. Trong th nghim ny khong cch bia- c la chn thay i t 4 n 9cm ph hp vi ng knh bia 7.6cm. nhit cao 3500C, truyn qua khng thay i nhiu, trong khi in tr sut li thay i theo khong cch. Bng 3.1 in tr sut v truyn qua vi khong cch bia - khc nhau

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Gi tr cc tiu ca in tr sut trn Hnh 3.1 v tr khong cch 5 cm cho thy v tr thch hp t . khong cch nh h n 4 cm, mc d tc dng nhit ca plasma cao hn nhng hiu ng bn ph mng ca cc ion hoc ht trung ha nng lng cao lm tng in tr sut ca mng. Vn ny c th khc phc c nu mng nhit cao trong thi gian d i sau khi ph hoc gim cng sut phn x. Tuy nhin cch thc ny khng cho hiu qu v thi gian v vn tc lng ng. Vi nhng khong cch ln h n 5 cm, s va chm vi cc phn t kh lm tng ng k in tr sut. in tr sut tng 2 ln khi khong cch thay i t 5 n 9 cm.

Hnh 3.1 in tr sut ca ITO thay i theo khong cch bia Tc ng ca s va chm ca ht phn x vi nguy n t kh cn c th hin qua nh hng ca p sut ph ln tnh cht in ca mng trnh by trong Bng 3.2 v Hnh 3.2 Bng 3.2 Tnh cht in ca mng ITO vi p sut phn x khc nhau

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Hnh 3.2 in tr sut, nng v linh ng in t ca mng ITO vi p sut Ar khc nhau khi ph m ng Trong cng iu kin to mng cng sut phn x 50 W, nhit 3500C, khong cch bia- 5 cm, kt qu cho thy khi tng p sut Ar, vn tc phn x gim v in tr sut ca mng tng. S tng in tr sut do s gim nng in t v linh ng. Ngoi ra, trong thc nghim ny, p sut lm vic thp nht vi h magnetron trong ch DC l khong 3x 10-3 torr Gi tr ny l ph bin i vi cc h magnetron thng dng trong thc t. p sut thp h n h khng th duy tr plasma phng in. Mun hot ng p sut thp h n, cn c thm cc ngun b sung ht mang in nh phng x, pht x nhit in t hoc s dng cch b tr cc nam chm c bit ti u hiu sut ca by t, tuy nhin iu ny lm tng thm tnh phc tp v chi ph ca h to mng.

Hnh 3.3 Ph truyn qua v phn x ca mng ITO ch to vi p sut Ar khc nhau khi ph mng

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Ph truyn qua v phn x ca mng ITO c ch to vi p sut Ar khc nhau c trnh by trn Hnh 3.9. Khc bi t ch yu gia cc mng th hin mc phn x trong vng hng ngoi gn. Bng 3.3 truyn qua T v phn x R ca mng ITO khi p sut ph thay i. P (10-3torr) 3 5 10 T trung bnh (0.4-0.7 m) 0.82 0.84 0.85 R (3 m) 0.91 0.85 0.78

3.1.2. Cng sut phn x Cng sut phn x quyt nh n vn tc lng ng m ng. Kho st nh hng ca cng sut phn x l n tnh cht in v quang c tin hnh trong iu kin: Khong cch bia-: 5 cm p sut kh phn x: 3 x 10-3 torr Nhit Ts: 350 0C Kt qu vic kho st tnh cht in c trnh by trn Bng 3.3 v th Hnh 3.4. th Hnh 3.4 c cc tiu in tr sut c ng sut 50W ng vi nng v linh ng in t cc i. iu n y xy ra l do tc ng ca vn tc ht phn x. nhit nht nh, vn tc lng ng cn c tr s thch hp cho mng tnh cht tt nht. Ngoi ra s bn ph mng bi cc ion trong qu trnh phn x cng nh hung ln n tnh cht in. Cng sut qu ln, th s bn ph ca ion lm gim tnh cht in ca mng. Bng 3.4 Tnh cht in ca m ng ITO vi cng sut phn x khc nhau

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Hnh 3.4 Tnh cht in ca mng ITO theo mt cng sut phn x Ph truyn qua v phn x ca cc mng vi cng sut ph khc nhau c th hin trn Hnh 3.5.. truyn qua trung bnh ca cc ph trong vng kh kin (400 700 nm) khng thay i, xp x 82 - 84%. Phn x hng ngoi ~ 90% bc sng 3 m.

Hnh 3.5 Ph truyn qua v phn x ca mng ITO vi cng sut khc nhau khi ph mng Bng 3.5 truyn qua v phn x ca mng ITO vi cng sut phn x khc nhau P (W) 30 50 T trung bnh (0.4-0.7 m) 0.83 0.82
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R (3 m) 0.90 0.91

70 100

0.84 0.83

0.89 0.88

Kt qu kho st in tr sut theo khong cch bia -, p sut kh Ar lm vic v cng sut, cho php chn khong cch bia- 5 cm, p sut phn x 3x10-3 torr v cng sut phn x 50 W (mt 1.1 W/cm2) l m iu kin to mng ban u cho cc kho st tip theo. 3.1.3. Nhit Nhit l mt thng s rt quan trng khi ch to m ng ITO. Kho st nh hng ca nhit T S khi ph mng c tin hnh cc iu kin sau: Khong cch bia- 5 cm, Cng sut 50 w, p sut phn x 3x10-3 torr, B dy mng khong 310 340 nm, TS thay i t nhit phng n 4100C. Bng 3.6 Tnh cht in ca mng ITO ch to nhit khc nhau

th Hnh 3.6 cho thy c s gim in tr sut khi tng nhit TS, chng t c s thay i ln trong cu trc ca m ng nh c th quan st trong gin nhiu x trn Hnh 3.6. Khi TS > 1500C xut hin cc nh c tr ng cho s chuyn pha t trng thi v nh hnh sang tinh th trong vt liu ITO, mng bt u tinh th ha mnh. Trng thi kt tinh tt mt mt lm gim tn x bin ht,nhng quan trng hn l cc nguyn t pha tp Sn c sp xp vo ng v tr thay th, kch hot ln trng thi donor lm gia tng nng in t t do trong mng. nhng nhit cao hn in tr sut c xu hng bo ha v t gi tr thp
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nht ln cn nhit 350 0C. Khi tng nhit cao hn na, nng v linh ng in t gim, in tr sut bt u tng do nh h ng ca ng sut nhit gia mng v , hoc do s bin dng mnh ca thy tinh.

Hnh 3.6 in tr sut, nng v linh ng in t ca mng ITO khi c ch to vi nhit khc nhau

Hnh 3.7 Gin nhiu x ca mng ITO kho st cc nhit khc nhau Hnh 3.7 cho thy s tng trng tinh th r rt xy ra khi TS > 1500C S thay i trong cu trc ca m ng ITO theo nhit cng c th quan st qua ph truyn qua Hnh 3.8 nhit thp cu trc ITO l v nh hnh, truyn qua trong vng kh kin thp v b hp th khng r nt v m rng vo vng kh kin. Khi nhit cao h n 1500C, b hp th thng ng hn v dch v pha bc sng ngn, th hin s n nh trong cu trc tinh th ca mng ITO v s tng nng in t.

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Hnh 3.8 Ph truyn qua ca cc mng ITO khi c ch to vi nhit khc nhau Bng 3.7 truyn qua v phn x ca cc mng ITO ch to cc nhit khc nhau. TS (oC) 30 100 150 200 250 300 350 T 0.64 0.66 0.75 0.82 0.83 0.83 0.82 R (3 m)

0.62 0.77 0.82 0.84 0.91

truyn qua trung bnh trong vng kh kin (400-700 nm) thay i t 64% nhng mu nhit thp n 83% nhng mu nhit cao, phn x hng ngoi bc sng 3 m tng tng ng t 62% n 91 3.1.4. dy mng kho st nh hng ca dy ln tnh cht ca mng, cc mng c b dy trong khong t 60 nm n 1000 nm c kho st trong cng iu kin: Khong cch bia-: 5 cm Nhit T S: 3500C Cng sut phn x: 50 w p sut kh phn x: 3 x 10 -3 torr S liu v tnh cht in theo d y c th hin trong Bng 3.8 v trn th Hnh 3.9. Mt im chung ca mng mng khc vi vt liu khi l tnh cht ca n thay i theo dy do nhng dy qu mng kch thc ht tinh th cha ln nn tn x bin ht v tn x b mt ng vai tr quan

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trng. i vi mng ITO, mng cng dy in tr sut cng gim v tin ti gi tr n nh khi dy ln hn vi trm nanomet.

Bng 3.8 Tnh cht in ca m ng ITO ch to vi cc dy khc nhau

Hnh 3.9 in tr sut, nng v linh ng in t ca mng ITO khi c ch to vi dy khc nhau Khi tng dy cu trc mng tt hn, kch thc ht tinh th tng lm gim tn x b mt, gim tn x bi n ht. S tng trng tinh th ca mng ITO theo dy c th hin qua gin nhiu x Hnh 3.10. Kho st nhiu x tia X ca mng ITO theo dy t 30 nm n 700 nm, cho thy s tng tr ng tinh th r rt ca mng theo dy. Vi b dy mng nh hn 15 nm th ph nhiu x cho thy mng c cu trc v nh hnh, khi b dy tng ln khong 30 nm th thy bt u xut hin nh (400), tip tc tng b d y mng khong 50 nm th nh (222) mi xut hin. Khi b dy mng cng tng th cng cc nh u tng, v cho thy mng a tinh th vi s pht trin ca nhiu nh, tuy nhi n cho thy c s vt tri hn ca nh (400), iu ny c th l gii do s bt ng h ng ca
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nng lng b mt. Tnh cht in ca m ng c lin quan cht ch vi cu trc tinh th ca mng. Khi tng dy c nng v linh ng in t u tng, tuy nhin t gi tr bo ha dy ln hn vi trm nanomet.

Hnh 3.10 Gin nhiu x mng ITO theo cc dy khc nhau Ph truyn qua v phn x ca mng ITO theo dy c trnh by trn Hnh 3.11. Cc mng qu mng hoc qu dy cho truyn qua khng cao. Tn x b mt mnh mng qu mng v hp th qu ln mng dy l nguyn nhn ch yu. Quan st trn Hnh 3.11 s thy rng mng c dy trong khong t 300 n di 600 nm l ph hp v tt c tnh cht quang v in, th hin mc truyn qua cao trong vng kh kin v phn x mnh trong vng hng ngoi.

Hnh 3.11 Ph truyn qua v phn x ca mng ITO khi c ch to vi dy khc nhau
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3.1.5. Kh xi nh hng ca xi ln tnh cht mng c kho st iu kin: - p sut lm vic ca hn hp Ar + O l 3 x 10-3 torr - Cng sut phn x 50 W Kt qu kho st cu trc tinh th ln l t c biu th trn hnh 3.12 i vi cc mu to nhit 100 0C v 3500C. p sut ring phn xi thay i t ~ 10-6 n 10-4 torr tng ng hm lng xi trong hn hp Ar -O2 t 0 n 3%. nhit 100 0C mng to thnh trng thi v nh hnh d lng xi a vo l rt ln. Mng ch c cu trc tinh th khi nhit ph m ng ln (> 150 0C). Gin nhiu x cho thy trong mi trng c xi mng pht trin theo mt (211) v (222), trong khi cng iu kin ch to nh nhau mng ITO pht tri n theo mt (400) khi mi trng khng c xi.

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Hnh 3.12 Gin nhiu x tia X ca mng ITO trong iu kin nhit v p sut ring phn xi khc nhau Kt qu kho st tnh cht in ca mng ITO ch to nhit 350 0C trong mi trng xi c th hin trong Bng 3.10 v Hnh 3.13.

Hnh 3.13 in tr sut, nng v linh ng in t ca mng ITO khi c ch to vi hm lng xi khc nhau Bng 3.10 Tnh cht in ca mng ITO ch to vi lng xi khc nhau

Kt qu cn cho thy vi lng xi thch hp linh ng ca in t c th tng ln do lm gim s lng sai hng trong qu tr nh hnh thnh mng. Nh vy khi phn x trong mi tr ng c kh xi, tnh cht in ca mng s b nh hng ty thuc theo cu trc mng ITO trng thi v nh hnh hay tinh th. nhit thp, mng khng pht trin c tinh th trong khong

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hm lng xi c kho st. nhit cao, m ng tng trng theo mt (222). Ph truyn qua trn Hnh 3.14 cho thy hiu ng dch chuyn Burstein Moss khi tng p sut xi. p sut xi cng tng th b hp th dch chuyn v pha bc sng di. iu ny chng t nng ht ti gim rt nhanh khi tng hm lng xi. Ph phn x cng cho thy iu ny.

Hnh 3.14 Ph truyn qua v phn x ca mng ITO khi c ch to vi hm lng xi khc nhau 3.1.6. X l nhit sau khi ph Kho st tnh cht ca mng ITO khi trong mi trng khng kh, vi nhng mu to nhit thp Ts < 1 500C, cho thy sau khi x l, in tr sut v truyn qua thay i mt cch r rt. Hnh 3.15 cho kt qu kho st s thay i in tr mt theo nhit nhit trong mi tr ng khng kh vi cc mng ITO ch to nhit khc nhau (26 0C, 1500C, 2500C v 3500C).

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Hnh 3.15 in tr mt theo nhit trong khng kh Quan st 2 mu to nhit Ts ~ 26 0C v Ts ~ 150 0C trong chn khng, cho thy ti nhit nhit T n ~ 1500C in tr mng bt u thay i ln, iu ny gip khng nh thm ngng nhit chuyn pha ca ITO t v nh hnh sang tinh th xp x >150 0C. Vi cc mu to nhit Ts > 250 0C trong chn khng, khi nung trong khng kh gi tr in tr sut khng thay i theo nhit cho n gi tr Tn ~ 3000C. Khi Tn > 3000C th c s tng ln nhanh ca in tr sut. iu ny cho thy khi mng tinh th ha th nung trong mi trng nhiu xi s dn n tng in tr do xi hp th trong bi n ht v hnh thnh cc tm by in t dn. Ngoi ra s bin dng ca thy ti nh nhit cao cng nh h ng n tnh cht ca mng. Bng 3.11 Tnh cht in ca mng ITO ch to nhit phng, sau nhit trong mi trng khng kh

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Khi tng nhit nung, truyn qua trun g bnh trong vng kh kin tng ng k t 63% n 80% nh c th quan st Hnh 3.16. S bin i dng ph truyn qua cho thy s chuyn i trong cu trc tinh th khi tng nhit nung trong khng kh. Trong tr ng hp ch to mng nhit phng cn phi nung mu trn 2500C cho tnh cht quang hc tt. .

Hnh 3.16 S thay i ca ph truyn qua ca m ng ITO theo nhit trong mi trng khng kh

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3.2. Kt lun Qua qu trnh kho st thc nghim rt ra mt s kt lun nh sau: Mng mng ITO c ch to bng phng php phn x magnetron DC c trong sut ca mng trn 80% trong vng kh kin v trong sut ny ph thuc khng nhiu vo iu kin ch to. Nhit tinh th ha ca mng ITO trn 1500C .Nhit khi ph mng hay nhit trong khng kh cn t gi tr tr n 1500C th mng ITO mi c tnh cht tt. Trong cc iu kin ti u v dn in v trong sut, trong cu trc tinh th, mng ITO lun u tin pht tri n nh hng theo mt (400). S c mt ca xi trong th nh phn kh phn x vi p sut ri ng phn ln hn 10-5 torr lun lm gim dn in hay tng in tr sut in tr sut thp nht t c ~ 1.1x10-4 cm nhit ~ 3500C, trong iu kin ti u: Cng sut 50 W p sut Ar phn x 3 x 10 -3 torr, Khong cch bia l 5 cm V dy trn 300 nm. truyn qua quang hc tr n 80% trong vng 0.4 - 0.7 m, phn trn 90% bc sng ln hn 3 m.

Ti liu tham kho

1. Trn Cao Vinh (2008), To mng dn in trong sut bng ph ng php phn x Magnetron, Lun n tin s vt l quang hc, Tr ng HKHTNHQG Tp.HCM 2. Cao Th M Dung (2002), Tng hp mng trong sut dn in ITO trn thy tinh bng phng php phn x Magnetron, Lun vn tt nghip i hc, Trng HKHTN-HQG Tp.HCM 3. Nguyn Nng nh, Vt l v k thut mng mng, NXB HQG HN

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