Class test questions

1. a. Explain the various energy domains available in the MEMS technology

b. Write short notes on Thermal actuators 2. Explain the Silicon based MEMS process with neat sketch. 3. Analyze in detail the MEMS stress and strain analysis. 4. Write in detail about the comb drive devices. 5. Elucidate the magnetic actuator
6. a. With an example explain anyone applications of Inertia.

b. With neat sketch explain about Isotropic Wet Etching.

7. Explain about the Piezoresistive sensor materials. 8. Explain in detail about the Piezoelectric sensors and actuators. 9. With neat sketch explain the Anisotrophic Wet Etching.

10. Briefly explain the Striction and Antistriction methods.

11. a. Elucidate the Polimide.

b. Briefly explain the Lenses and Mirrors.

12. Write in detail about PDMS and PMMA. 13. Explain briefly about the Parylene and Fluorocarbon. 14. Explain the actuators for active optical MEMS.

15. Explain in detail about the application Flow and Tactile sensors