8

Plasma
A plasma can be defined as a quasi-neutral gas of charged and neutral particles characterized by a collective behavior.
Quasi-neutrality () : , Collective behavior ( ) :

(Fourth state of matter)

99% Plasma

Degree of ionization

Degree of ionization :

Glow Discharge : = 10-6 10-4


. -, -, -, -, - , Penning effect .

: . : ( ), .

Reaction in Plasmas

1.

Ionization

2.
3. 4. 5. 6. 7. 8.

Excitation
Dissociation Dissociative Ionization Electron Attachment Dissociative Attachment Symmetric Charge Transfer Asymmetric Charge Transfer

9.

Metastable-Neutral Ionization (Penning ionization)

10. Metastable-Metastable Ionization

Electron temperature/Density
Electron temperature : We = 3/2 kTe We : Average kinetic energy of electrons Ion temperature : Wi = 3/2 kTi We : Average kinetic energy of ions

Te > Ti
ne ( ) = ni ( )

Plasma density

Debye shielding/Debye length

DC glow discharges 1

DC glow discharge occurs through 1) electron multiplication and

2) avalanche process.

DC glow discharges 2

1)

electron multiplication (Breakdown voltage, Vb )

DC glow discharges 3

2) avalanche process (Townsend discharge) :

DC glow discharges 4

Normal glow : Glow , , Self-sustaining ( ) Abnormal discharge : Arc : Heating Thermionic emission

DC glow discharges 5

Paschens law 1
The breakdown voltage in a DC discharge is determined by the discharge gas, the gas pressure, and the tude dimension. The dependence of the breakdown voltage on gas pressure and inter-electrode distance can be expressed as

For large pd values the breakdown voltage is proportional to pd. This dependence is called Paschens law, which reflects the dependence of the DC glow discharge on the secondary electrons.

Paschens law 2
: : : pd( x ) breakdown voltage

* Penning ionization breakdown voltage : Ne* + Xe Ne + Xe+ + e